An EUV light cleaning device

Abstract

This invention discloses an EUV light cleaning device, belonging to the field of 3D glasses manufacturing technology. Key technical features include a worktable with a gantry frame mounted on it. A light cleaning component is mounted on the gantry frame. A vertical guide rail is provided on the worktable, and a fixture component is movably mounted on the vertical guide rail. A loading and transporting component is also movably mounted on the worktable, transporting products onto the fixture component. The light cleaning component cleans the products on the fixture platform. The gantry frame also has an unloading and transporting component for handling the cleaned products. The advantages of this invention are that it achieves automatic product cleaning and automatic loading and unloading, reducing manpower, eliminating the risk of secondary contamination, and improving cleaning efficiency and quality.

Description

Technical Field

[0001] This invention relates to the field of 3D glasses manufacturing technology, and more specifically to an EUV light cleaning apparatus. Background Technology

[0002] EUV ultraviolet light cleaning technology utilizes the photosensitive oxidation of organic compounds to remove organic substances adhering to the surface of workpieces, achieving "atomic cleanliness." With the rapid development of the optoelectronic industry, light cleaning technology is indispensable in optoelectronic products.

[0003] In the 3D glasses manufacturing process, before inkjet printing on the lens, the sides of the lens are cleaned to remove organic matter from the surface, thereby improving the hydrophilicity of the lens surface and preventing ink from falling off. However, the traditional non-contact plasma cleaning method still has the following problems:

[0004] 1. Manual loading and unloading is required, wasting manpower; 2. Manual loading and unloading carries the risk of secondary contamination of the lens; 3. If cleaned products are not moved to the next process within 15 minutes, the cleaning effect may expire; 4. Plasma cleaning has a low yield, increasing rework and scrap costs. Therefore, a new cleaning device needs to be designed to address these issues. Summary of the Invention

[0005] In view of the shortcomings of the existing technology, the purpose of this invention is to provide an EUV light cleaning device, which has the advantages of realizing automatic cleaning and automatic loading and unloading of products, reducing manpower, eliminating the risk of secondary pollution, and improving cleaning efficiency and cleaning quality.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] An EUV light cleaning device includes a worktable, a gantry frame on the worktable, a light cleaning component on the gantry frame, a vertical guide rail on the worktable, a fixture component movably mounted on the vertical guide rail, a loading and transporting component movably mounted on the worktable, the loading and transporting component transporting products to the fixture component, the light cleaning component cleaning the products on the fixture platform, and an unloading and transporting component on the gantry frame for transporting the cleaned products.

[0008] The fixture assembly includes a mounting plate slidably connected to a vertical guide rail. A fixture platform is rotatably connected to the mounting plate. The fixture platform includes a bracket. Clamping members are symmetrically arranged at the upper and lower ends of the bracket. One of the clamping members moves up and down along the bracket. Several clamping blocks for placing products are rotatably connected to the clamping member. When the loading and conveying assembly places the product on the clamping block, the clamping member moves downward to clamp and fix the product. When the fixture platform is rotated 90°, the clamping block remains horizontal. At this time, the product is in a vertical state, and the peripheral sidewall of the product is exposed.

[0009] The optical cleaning assembly includes a first transverse guide rail horizontally arranged on a gantry frame. The first transverse guide rail is perpendicular to the vertical guide rail. A lifting guide rail is movably arranged on the first transverse guide rail. An EUV lamp is movably arranged on the lifting guide rail. The EUV lamp moves vertically on the lifting guide rail. The lifting guide rail drives the EUV lamp to move via a servo motor.

[0010] The clamping member is provided with a sensing component for detecting whether the rotation of the clamping block is synchronized. The sensing component includes sensing plates respectively disposed on the rotation shaft of the clamping block. The sensing plates have notches. The sensing components also include slotted sensors respectively disposed on one side of the sensing plates. When the sensing plates rotate to the point where the notches are aligned with the slotted sensors, the slotted sensors receive a detection signal.

[0011] The present invention is further configured such that: the optical cleaning assembly includes a first transverse guide rail horizontally arranged on a gantry, the first transverse guide rail being perpendicular to the vertical guide rail, a lifting guide rail being movably arranged on the first transverse guide rail, an EUV lamp being movably arranged on the lifting guide rail, the EUV lamp moving vertically on the lifting guide rail, and the lifting guide rail driving the EUV lamp to move via a servo motor.

[0012] The present invention is further configured such that: two vertical guide rails are arranged in parallel on the worktable, and a fixture assembly is movably arranged on both vertical guide rails.

[0013] The present invention is further configured such that: the loading and conveying assembly includes a conveying guide rail horizontally arranged on the worktable, the conveying guide rail being perpendicular to the vertical guide rail, a loading and conveying head being movably arranged on the conveying guide rail, the loading and conveying head placing the products sequentially onto the clamping block, and the loading and conveying assembly also includes a barcode scanner arranged on the worktable, the barcode scanner scanning the products sequentially.

[0014] The present invention is further configured such that: the unloading and conveying assembly includes a second transverse guide rail horizontally arranged on the gantry, the second transverse guide rail being perpendicular to the vertical guide rail, and an unloading and conveying head movably arranged on the second transverse guide rail, the unloading and conveying head conveying the cleaned product from the fixture assembly along the second transverse guide rail.

[0015] The invention is further configured such that: a drive motor is provided on the clamping member, a drive wheel is provided on the output shaft of the drive motor, a driven wheel is provided on the rotation shaft of the clamping block, a synchronous belt is connected between the drive wheel and the driven wheel to drive the clamping block to rotate, and an inductive switch for controlling the drive motor is provided on the clamping member.

[0016] The present invention is further configured such that tensioning wheels are provided between the driving wheel and the driven wheel, as well as between adjacent driven wheels.

[0017] The present invention is further configured such that: the clamping member is provided with a detection sensor for detecting whether the timing belt is broken.

[0018] Compared with the prior art, the present invention has at least the following advantages:

[0019] 1. The loading and conveying assembly sequentially transports the products to the clamping block. The clamping parts move downward to hold and fix the products. Then, the fixture platform rotates 90° to make the product lens vertical, exposing the cleaning area. The light cleaning assembly on the gantry cleans the product, while the clamping block drives the product to rotate, so that the entire side wall of the product is cleaned. After cleaning, the fixture platform moves the product to the unloading area along the vertical guide rail. The unloading and conveying assembly transports the product to the next process. This realizes automatic cleaning and automatic loading and unloading of products, reduces manpower, eliminates the risk of secondary pollution, and improves cleaning efficiency and cleaning quality.

[0020] 2. Set the EUV lamp on the lifting guide rail. The EUV lamp can move vertically on the lifting guide rail, so that the EUV lamp can be raised and lowered according to the irregular contour of the product, always maintaining the same cleaning height and improving the cleaning quality.

[0021] 3. By setting up detection sensors, it is possible to monitor in real time whether there are any signs of breakage on the timing belt; it is also equipped with a sensing component. The slotted sensor can detect whether several clamping blocks are rotating synchronously by detecting the notches on the sensing plate, and it can also detect the angular deviation caused by the breakage of the timing belt. Attached Figure Description

[0022] Figure 1 This is a first-view diagram of the overall structure of this embodiment;

[0023] Figure 2 This is a second-view diagram of the overall structure of this embodiment;

[0024] Figure 3 This is a schematic diagram of the material handling assembly in this embodiment;

[0025] Figure 4 This is a schematic diagram of the material handling assembly in this embodiment;

[0026] Figure 5 This is a schematic diagram of the fixture components in this embodiment;

[0027] Figure 6 This is a schematic diagram of the fixture platform in this embodiment;

[0028] Figure 7 yes Figure 6 An enlarged schematic diagram of part A in the middle;

[0029] Figure 8 This is a schematic diagram of the clamping block in this embodiment;

[0030] Figure 9 yes Figure 8 Enlarged schematic diagram of part B.

[0031] Explanation of reference numerals in the attached figures:

[0032] 1. Workbench; 2. Gantry frame; 3. Vertical guide rail;

[0033] 4. Photo-cleaning assembly; 401. First transverse guide rail; 402. Lifting guide rail; 403. EUV lamp;

[0034] 5. Fixture assembly; 501. Mounting plate; 502. Tilting motor; 503. Fixture platform; 5031. Bracket; 5032. Clamping components;

[0035] 6. Material handling assembly; 601. Material handling guide rail; 602. Material handling head; 603. Barcode scanner;

[0036] 7. Material handling assembly; 701. Second transverse guide rail; 702. Material handling head;

[0037] 8. Drive motor; 9. Drive wheel; 10. Driven wheel; 11. Synchronous belt; 12. Inductive switch; 1201. Switch sensor; 1202. Paddle; 13. Product; 14. Vacuum nozzle; 15. Silicone sleeve; 16. Transfer plate; 17. Suction cup; 18. Slide cylinder; 19. Clamping block; 20. Tensioning wheel; 21. Detection sensor; 22. Sensing assembly; 2201. Sensing plate; 2202. Notch; 2203. Slotted sensor. Detailed Implementation

[0038] The present invention will be further described in detail below with reference to the accompanying drawings.

[0039] An EUV light cleaning device, such as Figure 1 and Figure 2As shown, the system includes a workbench 1, a gantry frame 2 on the workbench 1, a photo-cleaning component 4 on the gantry frame 2, a vertical guide rail 3 on the workbench 1, a fixture component 5 that moves along the vertical guide rail 3, and a loading and transporting component 6 that moves along the workbench 1. The loading and transporting component 6 transports the product 13 to the fixture component 5. The photo-cleaning component 4 cleans the product 13 on the fixture platform 503. The gantry frame 2 is also equipped with an unloading and transporting component 7 for transporting the cleaned product 13 to the next process.

[0040] The optical cleaning assembly 4 includes a first transverse guide rail 401 horizontally arranged on the gantry 2, the first transverse guide rail 401 being perpendicular to the vertical guide rail 3, a lifting guide rail 402 movably arranged on the first transverse guide rail 401, the lifting guide rail 402 being vertically arranged, and an EUV lamp 403 movably arranged on the lifting guide rail 402, the EUV lamp 403 moving along the vertical direction on the lifting guide rail 402.

[0041] The lifting guide rail 402 drives the EUV lamp 403 to move via a servo motor. A threaded rod is connected to the output shaft of the servo motor, and a moving block is slidably connected to the lifting guide rail 402. The EUV lamp 403 is mounted on the moving block, which is threadedly connected to the threaded rod. A guide rod is also provided. When the servo motor drives the threaded rod to rotate, the moving block on the threaded rod slides along the guide rod, thereby driving the EUV lamp 403 to move up and down. The movement position is precisely controlled, so that the EUV lamp 403 can follow the contour of the product 13 and rise and fall in real time.

[0042] like Figure 3 and Figure 4 As shown, the loading and conveying assembly 6 includes a conveying guide rail 601 horizontally arranged on the worktable 1. The conveying guide rail 601 is perpendicular to the vertical guide rail 3. A loading and conveying head 602 is movably arranged on the conveying guide rail 601. A conveying plate 16 protrudes horizontally from the loading and conveying head 602. A suction cup 17 is provided at the end of the conveying plate 16. After the product 13 is picked up by the suction cup 17, it moves horizontally along the conveying guide rail 601 and places the product 13 onto the clamping block 19 in sequence. The loading and conveying assembly 6 also includes a barcode scanner 603 arranged on the worktable 1. Each time the suction cup 17 picks up the product 13, the barcode scanner 603 scans and reads the information of the product 13 in sequence.

[0043] The unloading and conveying assembly 7 includes a second transverse guide rail 701 horizontally arranged on the gantry frame 2. The second transverse guide rail 701 is perpendicular to the vertical guide rail 3. The second transverse guide rail 701 and the first transverse guide rail 401 are located on opposite sides of the gantry frame 2. An unloading and conveying head 702 is movably arranged on the second transverse guide rail 701. A conveying plate 16 protrudes horizontally from the unloading and conveying head 702. The number of conveying plates 16 is the same as the number of products 13 in the fixture assembly 5. Each end of the conveying plate 16 is provided with a suction cup 17. The unloading and conveying head 702 simultaneously picks up the cleaned products 13 in the fixture assembly 5 through the suction cups 17 on the conveying plate 16 and sends them out of the workbench 1 along the second transverse guide rail 701 to the next process.

[0044] like Figure 1 , Figure 5 , Figure 6 As shown, the fixture assembly 5 includes a mounting plate 501 slidably connected to a guide rail. A fixture platform 503 is rotatably connected to the mounting plate 501. A flip motor 502 is fixed on the mounting plate 501. The fixture platform 503 is connected to the flip motor 502 via a transmission shaft. The flip motor 502 drives the fixture platform 503 to rotate via the transmission shaft. The fixture platform 503 includes a bracket 5031. The bracket 5031 is connected to the transmission shaft. Clamping members 5032 are symmetrically arranged at the upper and lower ends of the bracket 5031. One of the two clamping members 5032 moves up and down along the bracket 5031. In this embodiment, the lower clamping member 5032 is fixed on the bracket 5031, and the upper clamping member 5032 moves up and down along the bracket 5031.

[0045] A sliding cylinder 18 is installed on the bracket 5031, and the upper clamping member 5032 is fixed on the sliding cylinder 18. The sliding cylinder 18 drives the clamping member 5032 to move up and down. Several clamping blocks 19 for placing products 13 are rotatably connected to the clamping member 5032. In this embodiment, the clamping member 5032 is specifically provided with 4 clamping blocks 19, which can place 4 products 13 at the same time, thereby improving the cleaning rate. The number of clamping blocks 19 can be adjusted according to the needs. When the feeding and conveying component 6 places the product 13 on the clamping block 19, the sliding cylinder 18 drives the upper clamping member 5032 to move down to clamp and fix the product 13.

[0046] When the EUV lamp 403 moves above the fixture platform 503 to irradiate and clean the product 13, the clamping block 19 drives the product 13 to rotate, and at the same time, the lifting air rod drives the EUV lamp 403 to move up and down, so that the EUV lamp 403 and the product 13 always maintain the same distance. In this embodiment, two vertical guide rails 3 are arranged in parallel on the workbench 1, and fixture components 5 are movably arranged on both vertical guide rails 3. After the product 13 on one fixture platform 503 is cleaned, the EUV lamp 403 moves to the other fixture platform 503 for cleaning through the first horizontal guide rail 401. By setting two fixture platforms 503 for cyclic cleaning, the cleaning efficiency is improved.

[0047] like Figure 6 and Figure 7 As shown, a drive motor 8 is fixed on the clamping member 5032, and a drive wheel 9 is fixed on the output shaft of the drive motor 8. The drive wheel 9 is coaxially arranged with the output shaft. The drive motor 8 drives the drive wheel 9 to rotate together. A driven wheel 10 is fixed on the rotation shaft of the clamping block 19. The driven wheel 10 is coaxially arranged with the rotation shaft of the clamping block 19. The driven wheel 10 and the drive wheel 9 are located on the same horizontal plane. The peripheral sidewalls of both the driven wheel 10 and the drive wheel 9 have protruding toothed blocks. A synchronous belt 11 connects the drive wheel 9 and the driven wheel 10. The drive wheel 9 passes through... The synchronous belt 11 drives the clamping block 19 to rotate, and the diameter of the driving wheel 9 is the same as the diameter of the driven wheel 10. When the driving wheel 9 rotates once, the driven wheel 10 also rotates once. The synchronous belt 11 connects the driving wheel 9 only to the driven wheel 10 of the first clamping block 19. Each clamping block 19 is provided with two driven wheels 10. The two driven wheels 10 are respectively connected to the driven wheels 10 of the adjacent clamping block 19 by the synchronous belt 11. After the driving wheel 9 drives the first driven wheel 10 to rotate, the driven wheels 10 then drive each other to rotate in turn.

[0048] An inductive switch 12 for controlling the drive motor 8 is provided on the clamping member 5032. The inductive switch 12 includes a switch sensor 1201 fixed on the clamping member 5032 and connected to the drive motor 8. It also includes a paddle 1202 fixed on the drive wheel 9. When the drive wheel 9 rotates one revolution, the paddle 1202 touches the inductive switch 12, thereby controlling the motor to stop. The clamping block 19 just drives the product 13 to rotate one revolution to completely clean the side wall.

[0049] Tensioning pulleys 20 are provided between the driving pulley 9 and the driven pulley 10, as well as between adjacent driven pulleys 10. The tensioning pulleys 20 are rotatably connected to the clamping member 5032 and are located on the same horizontal plane as the driving pulley 9. After passing through the tensioning pulleys 20, the synchronous belt 11 forms a curved path, which makes the tension of the synchronous belt 11 more stable.

[0050] The clamping component 5032 is equipped with a detection sensor 21 for detecting whether the timing belt 11 is broken. Several detection sensors 21 are provided to simultaneously detect multiple positions of the timing belt 11 in real time. The detection sensor 21 emits a laser to the belt. When the belt is not broken, the light of the detection sensor 21 is on and the equipment continues to run. When the belt is broken, the laser does not detect any obstruction, the light of the detection sensor 21 goes out, the equipment alarms and stops, and the EUV lamp 403 goes out.

[0051] like Figure 8 and Figure 9 As shown, the clamping member 5032 is also provided with a sensing component 22 for detecting whether the rotation of the clamping block 19 is synchronized. The sensing component 22 includes sensing plates 2201 respectively disposed on the rotation shaft of the clamping block 19. The sensing plates 2201 are coaxially disposed with the rotation shaft. Notches 2202 are opened on the sensing plates 2201. Each sensing plate 2201 has 4 notches 2202. The 4 notches 2202 are equidistantly arranged along the circumference of the sensing plate 2201. The sensing component 22 also includes sensing plates 2201 respectively disposed on the sensing plates 2201. The slotted sensor 2203 on one side has a sensing plate 2201 located in the middle of it. The sensing plate 2201 blocks the laser emitted by the slotted sensor 2203. When the sensing plate 2201 rotates until the notch 2202 aligns with the slotted sensor 2203, the laser is not blocked, allowing the slotted sensor 2203 to receive a detection signal. If the rotation speed of a certain clamping block 19 is not synchronized, the received signal will be spaced out from that of other slotted sensors 2203, thus detecting whether the rotation of the clamping block 19 is synchronized.

[0052] A vacuum nozzle 14 is provided on the clamping block 19, and an annular silicone sleeve 15 is fitted on the outside of the vacuum nozzle 14. When the product 13 is placed on the clamping block 19, it fits in close contact with the silicone sleeve 15. The vacuum nozzle 14 draws air and forms a negative pressure between itself and the product 13, making the product 13 more stable when placed, preventing it from shifting or even falling, and without damaging the product.

[0053] The working process of this invention is as follows:

[0054] The loading and conveying head 602 picks up the product 13 through the suction cup 17. After the barcode scanner 603 reads the information, the product 13 is placed on the clamping block 19 of the fixture platform 503. The product 13 is clamped and fixed by the upper and lower clamping blocks 19. The flipping motor 502 flips the fixture platform 503 by 90°, so that the clamping block 19 is kept in a horizontal state. At this time, the product 13 is in a vertical state, and the peripheral side wall of the product 13 is exposed. The EUV lamp 403 moves to the top of the fixture platform 503 to irradiate and clean the product 13. While the clamping block 19 drives the product 13 to rotate, the lifting guide rail 402 drives the EUV lamp 403 to rise and fall with the contour of the product 13 to maintain the same cleaning height. After cleaning, the fixture platform 503 moves along the vertical guide rail 3 to the unloading position. The unloading and conveying head 702 picks up the product 13 and sends it out of the workbench 1 along the second horizontal guide rail 701 to the next process.

[0055] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the design concept of the present invention should be included within the protection scope of the present invention.

Claims

1. An EUV light cleaning device, characterized by: The device includes a workbench, a gantry frame on the workbench, a photo-cleaning assembly on the gantry frame, a vertical guide rail on the workbench, a fixture assembly movably mounted on the vertical guide rail, a loading and transporting assembly movably mounted on the workbench, the loading and transporting assembly transporting products to the fixture assembly, the photo-cleaning assembly cleaning the products on the fixture platform, and an unloading and transporting assembly on the gantry frame for transporting the cleaned products. The fixture assembly includes a mounting plate slidably connected to a vertical guide rail. A fixture platform is rotatably connected to the mounting plate. The fixture platform includes a bracket. Clamping members are symmetrically arranged at the upper and lower ends of the bracket. One of the clamping members moves up and down along the bracket. Several clamping blocks for placing products are rotatably connected to the clamping member. When the loading and conveying assembly places the product on the clamping block, the clamping member moves downward to clamp and fix the product. When the fixture platform is rotated 90°, the clamping block remains horizontal. At this time, the product is in a vertical state, and the peripheral sidewall of the product is exposed. The optical cleaning assembly includes a first transverse guide rail horizontally arranged on a gantry frame. The first transverse guide rail is perpendicular to the vertical guide rail. A lifting guide rail is movably arranged on the first transverse guide rail. An EUV lamp is movably arranged on the lifting guide rail. The EUV lamp moves vertically on the lifting guide rail. The lifting guide rail drives the EUV lamp to move via a servo motor. The clamping member is provided with a sensing component for detecting whether the rotation of the clamping block is synchronized. The sensing component includes sensing plates respectively disposed on the rotation shaft of the clamping block. The sensing plates have notches. The sensing components also include slotted sensors respectively disposed on one side of the sensing plates. When the sensing plates rotate to the point where the notches are aligned with the slotted sensors, the slotted sensors receive a detection signal.

2. An EUV light cleaning device according to claim 1, characterized in that: Two vertical guide rails are arranged in parallel on the workbench, and fixture assemblies are movably mounted on both vertical guide rails.

3. The EUV light cleaning device according to claim 1, characterized in that: The loading and conveying assembly includes a conveying guide rail horizontally set on the worktable, the conveying guide rail being perpendicular to the vertical guide rail, and a loading and conveying head movably mounted on the conveying guide rail. The loading and conveying head places the products sequentially onto the clamping blocks. The loading and conveying assembly also includes a barcode scanner mounted on the worktable, the barcode scanner scanning the products sequentially.

4. The EUV light cleaning device according to claim 1, characterized in that: The unloading and conveying assembly includes a second transverse guide rail horizontally arranged on the gantry frame. The second transverse guide rail is perpendicular to the vertical guide rail. An unloading and conveying head is movably arranged on the second transverse guide rail. The unloading and conveying head delivers the cleaned product from the fixture assembly along the second transverse guide rail.

5. The EUV photo-cleaning apparatus according to claim 1, characterized in that: The clamping member is equipped with a drive motor, the output shaft of the drive motor is equipped with a drive wheel, the rotating shaft of the clamping block is equipped with a driven wheel, and a synchronous belt connects the drive wheel and the driven wheel, thereby driving the clamping block to rotate. The clamping member is equipped with an inductive switch for controlling the drive motor.

6. The EUV photo-cleaning apparatus according to claim 5, characterized in that: Tensioning wheels are provided between the driving wheel and the driven wheel, as well as between adjacent driven wheels.

7. The EUV photocleaning apparatus according to claim 5, characterized in that: The clamping component is equipped with a detection sensor for detecting whether the timing belt is broken.

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