Scrubber

Abstract

The present invention relates to the field of gas treatment technology, and discloses a scrubber. The scrubber includes a first processing unit, a second processing unit, a third processing unit and a collecting unit; the second processing unit is arranged below the first processing unit and the third processing unit, and the collecting unit is arranged below the second processing unit; the first processing unit includes an inlet for a gas to be treated, an inlet for a reaction gas and a primary water curtain area, and a plasma torch is arranged at the inlet for the gas to be treated; the second processing unit includes a two-fluid capture area, a primary washing area and a secondary washing area, the primary washing area is provided with a primary packing part and a primary spraying part, and the secondary washing area is provided with a secondary spraying part and a secondary packing part; the third processing unit is connected in sequence along the flow direction of the gas to be treated, and is provided with a secondary water curtain area, an atomized material removal area and a gas outlet. The scrubber of the present invention has a better gas treatment effect and a more compact structure.

Description

Technical Field

[0001] The present invention relates to the technical field of gas processing, and in particular to a scrubber. Background Art

[0002] When treating the exhaust gas (SiH4, etc.) from semiconductor and solar energy projects, a large amount of dust (Powder) is generated. The scrubber is a core device that dissolves the exhaust gas from semiconductor and solar energy projects in water, turns it into wastewater, and purifies it before discharging it. As the use of semiconductor and solar energy projects is increasing, the demand for scrubbers that treat the dust generated when treating large amounts of gas is increasing.

[0003] In the prior art, the washing effect of the traditional water-spraying washing tower is limited, resulting in a lot of dust being discharged into the atmosphere, causing environmental pollution and endangering people's health; at the same time, the existing water-spraying washing tower is large in size and occupies more space.

[0004] Therefore, a scrubber is urgently needed to solve the above problems. Summary of the invention

[0005] Based on the above, an object of the present invention is to provide a scrubber which has a better gas treatment effect and a more compact structure.

[0006] To achieve the above object, the present invention adopts the following technical solutions:

[0007] The scrubber comprises a first processing unit, a second processing unit, a third processing unit and a collecting unit which are sequentially connected and arranged along the flow direction of the gas to be processed;

[0008] The second processing unit is arranged below the first processing unit and the third processing unit, and the collecting unit is arranged below the second processing unit;

[0009] The first processing unit comprises a to-be-treated gas inlet, a reaction gas inlet and a primary water curtain area which are sequentially connected along the flow direction of the to-be-treated gas, and the to-be-treated gas inlet is provided with a plasma torch;

[0010] The second treatment unit comprises a two-fluid capture zone, a primary washing zone and a secondary washing zone which are sequentially connected along the flow direction of the gas to be treated, the primary washing zone is provided with a primary packing part and a primary spraying part, and the secondary washing zone is provided with a secondary spraying part and a secondary packing part;

[0011] The third processing unit includes a secondary water curtain area, an atomized material removal area and a gas outlet which are sequentially connected along the flow direction of the gas to be processed.

[0012] As a preferred solution of the scrubber, the inlet of the gas to be treated is set as a conical mouth, and the inner diameter of the conical mouth gradually decreases towards the direction close to the reaction gas inlet; the first processing unit also includes a scraper chain, and the scraper chain is set corresponding to the inner wall of the conical mouth.

[0013] As a preferred solution of the scrubber, the second processing unit includes a washing box, the collecting unit includes a water tank, and the water tank is arranged below the washing box.

[0014] As a preferred solution of the washer, a baffle is vertically arranged in the washing box, one side of the baffle is set as the primary washing zone, and the other side is set as the secondary washing zone, and the upper end of the baffle is spaced apart from the top wall of the washing box to connect the primary washing zone and the secondary washing zone.

[0015] As a preferred solution of the scrubber, the bottom wall of the water tank is inclined, and the end communicating with the primary washing zone is lower than the end communicating with the secondary washing zone.

[0016] As a preferred embodiment of the scrubber, the primary washing zone is provided with a first separation sleeve, the upper end of the first separation sleeve is connected with the inlet of the gas to be treated and the inlet of the reaction gas, the two-fluid capture zone is arranged on the lower side of the first separation sleeve, the primary water curtain zone includes a first water curtain nozzle, the primary packing part includes a first ball ring, the primary spray part is provided with a first nozzle, the first water curtain nozzle is arranged at the upper end of the first separation sleeve and faces the inner side of the first separation sleeve, the first ball ring is sleeved on the outer lower end of the first separation sleeve, and the first nozzle is arranged at the outer upper end of the first separation sleeve.

[0017] As a preferred solution of the scrubber, the first processing unit also includes a first air inlet flange, which includes a first inner sleeve and a first outer sleeve which are sleeved on each other, the first inner sleeve is connected to the inlet of the gas to be treated, and the first outer sleeve is connected to the reaction gas inlet and the inner side of the first separation sleeve.

[0018] As a preferred embodiment of the scrubber, the secondary washing zone is provided with a second separating sleeve, the upper end of the second separating sleeve is connected to the atomized material removal zone, the secondary water curtain zone includes a second water curtain nozzle, the secondary spraying part is provided with a second nozzle, the secondary filling part is provided with a second ball ring, the second water curtain nozzle is arranged at the upper end of the second separating sleeve and faces the inner side of the second separating sleeve, the second nozzle is arranged at the outer upper end of the second separating sleeve, and the second ball ring is sleeved on the outer lower end of the second separating sleeve.

[0019] As a preferred solution of the scrubber, the two-fluid capture zone is provided with an air inlet, a water inlet and a two-fluid nozzle, and a mixing chamber connected to the air inlet, the water inlet and the two-fluid nozzle.

[0020] As a preferred solution of the scrubber, the mist removal zone is provided with a compressed gas nozzle, and the direction of the compressed gas nozzle is opposite to the flow direction of the gas to be treated.

[0021] The beneficial effects of the present invention are:

[0022] The present invention can effectively improve the treatment effect of the gas to be treated by setting three treatment units to treat the gas to be treated in sequence. The first treatment unit is provided with a plasma torch and a primary water curtain area. The plasma torch is arranged above the inlet of the gas to be treated and can heat the gas to be treated; the reaction gas inlet is used to spray reaction air along the flow direction of the gas to be treated, and the reaction air can be mixed with the gas to be treated for subsequent treatment; the primary water curtain area can effectively prevent the dust generated by the gas to be treated and the reaction air from being adsorbed on the inner wall of the pipe of the scrubber, so that the dust can continue to enter the second treatment unit for treatment; the second fluid capture area of ​​the second treatment unit can capture the dust for the first time, and then pass through the secondary washing area and the secondary washing area in sequence. The water sprayed from the spray part of the two washing areas can react with the dust, and the filler part can make the liquid and gas evenly distributed, so that the reaction of water and dust is more thorough, and the dust after the two reactions can all fall to the collection unit for collection. After two washes, the treated gas passes through the secondary water curtain area of ​​the third treatment unit again to wash the treated gas again to prevent dust from continuing to rise along the pipeline and falling to the collection unit; the atomizer removal area is used to remove the atomizer in the treated gas and make it fall to the collection unit. The treated gas is finally discharged through the gas outlet, and the dust content in the discharged gas is greatly reduced, reducing pollution to the environment and damage to personnel. The second treatment unit is set below the first treatment unit and the second treatment unit, and the collection unit is set below the second treatment unit, making the overall structure of the scrubber more compact, effectively reducing the occupied space and improving space utilization. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without paying any creative work.

[0024] Figure 1 is a schematic diagram of a scrubber provided in a specific embodiment of the present invention;

[0025] Figure 2 is a schematic diagram of the flow direction of the gas to be treated in the scrubber provided in a specific embodiment of the present invention;

[0026] Figure 3 is a partial cross-sectional view of a first processing unit of a scrubber provided in a specific embodiment of the present invention;

[0027] Figure 4 is a cross-sectional view of a first air inlet flange of a scrubber provided in a specific embodiment of the present invention;

[0028] Figure 5 is a cross-sectional view of a first separation sleeve or a second separation sleeve of a scrubber provided in a specific embodiment of the present invention;

[0029] Figure 6 is a cross-sectional view of a washing box of a washing machine provided by a specific embodiment of the present invention;

[0030] Figure 7 It is a schematic diagram of the mist removal zone of the scrubber provided in a specific embodiment of the present invention.

[0031] In the figure:

[0032] 100, first processing unit; 110, inlet of gas to be treated; 111, plasma torch; 112, scraper chain; 120, inlet of reaction gas; 130, primary water curtain area; 131, first water curtain nozzle; 140, first air inlet flange; 141, first inner sleeve; 142, first outer sleeve;

[0033] 200, second treatment unit; 210, second fluid capture zone; 211, air inlet; 212, water inlet; 220, primary washing zone; 221, primary filling part; 2211, first ball ring; 222, primary spraying part; 2221, first nozzle; 223, first separation sleeve; 230, secondary washing zone; 231, secondary spraying part; 2311, second nozzle; 232, secondary filling part; 2321, second ball ring; 233, second separation sleeve; 240, washing box; 241, baffle;

[0034] 300, third treatment unit; 310, secondary water curtain area; 311, second water curtain nozzle; 320, atomized material removal area; 321, compressed gas nozzle; 330, gas outlet;

[0035] 400. Collection unit; 410. Water tank. DETAILED DESCRIPTION

[0036] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0037] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0038] Unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0040] The technical solution of the present invention is further described below with reference to the accompanying drawings and through specific implementation methods.

[0041] like Figure 1-Figure 7As shown, this embodiment provides a scrubber, which is sequentially connected with a first processing unit 100, a second processing unit 200, a third processing unit 300 and a collecting unit 400 along the flow direction of the gas to be treated; the second processing unit 200 is arranged below the first processing unit 100 and the third processing unit 300, and the collecting unit 400 is arranged below the second processing unit 200; the first processing unit 100 is sequentially connected with a gas inlet 110 to be treated, a reaction gas inlet 120 and a primary water curtain area 130 along the flow direction of the gas to be treated, A plasma torch 111 is provided at the inlet 110 of the gas to be treated; the second processing unit 200 includes a two-fluid capture zone 210, a primary washing zone 220 and a secondary washing zone 230 which are sequentially connected along the flow direction of the gas to be treated, the primary washing zone 220 is provided with a primary packing part 221 and a primary spray part 222, and the secondary washing zone 230 is provided with a secondary spray part 231 and a secondary packing part 232; the third processing unit 300 is sequentially connected along the flow direction of the gas to be treated, and a secondary water curtain zone 310, an atomizer removal zone 320 and a gas outlet 330 are provided.

[0042] By setting up three processing units and sequentially processing the gas to be processed, the processing effect of the gas to be processed can be effectively improved. The first processing unit 100 is provided with a plasma torch 111 and a primary water curtain area 130. The plasma torch 111 is arranged above the gas inlet 110 to be processed and can heat the gas to be processed; the reaction gas inlet 120 is used to spray reaction air along the flow direction of the gas to be processed, and the reaction air can be mixed with the gas to be processed for subsequent processing; the primary water curtain area 130 can effectively prevent the dust generated by the gas to be processed and the reaction air from being adsorbed on the inner wall of the pipe of the scrubber, so that the dust can continue to enter the second processing unit 200 for processing; the second fluid capture area 210 of the second processing unit 200 can capture the dust for the first time, and then pass through the secondary washing area and the secondary washing area 230 in turn. The water sprayed from the spray part of the two washing areas can react with the dust, and the filler part can make the liquid and gas evenly distributed, so that the reaction of water and dust is more thorough, and the dust after the two reactions can all fall to the collection unit 400 for collection. After two washes, the gas to be treated passes through the secondary water curtain area 310 of the third treatment unit 300 again, which is used to wash the gas to be treated again to prevent the dust from continuing to rise along the pipeline and falling to the collection unit 400; the atomizer removal area 320 is used to remove the atomizer in the gas to be treated and make it fall to the collection unit 400. The treated gas is finally discharged through the gas outlet 330, and the dust content in the discharged gas is greatly reduced, reducing the pollution to the environment and the damage to personnel. The second treatment unit 200 is arranged below the first treatment unit 100 and the second treatment unit 200, and the collection unit 400 is arranged below the second treatment unit 200, so that the overall structure of the scrubber is more compact, effectively reducing the occupied space and improving the space utilization.

[0043] Specifically, the plasma torch 111 is provided with a cooling water inlet 212, a cooling water outlet, a nitrogen inlet 211, a cathode wiring hole, and an anode wiring hole. The nitrogen inlet 211 is connected to the inlet 110 for treating the gas to supply nitrogen. There are six inlets 110 for treating the gas, which are respectively arranged around the nitrogen inlet 211. At the same time, each inlet 110 for treating the gas is provided with a pressure detection member for detecting the inlet pressure of the inlet 110 for treating the gas.

[0044] Furthermore, if Figure 3 As shown, the inlet 110 for the gas to be treated is set as a tapered opening, and the inner diameter of the tapered opening gradually decreases toward the direction close to the reaction gas inlet 120, which is conducive to providing guidance for the gas to be treated to enter the first processing unit 100. The first processing unit 100 also includes a scraping chain 112, which is set corresponding to the inner wall of the tapered opening and is used to remove dust accumulated on the inner wall of the tapered opening.

[0045] For example, Figure 4 As shown, the first processing unit 100 further includes a first gas inlet flange 140, which includes a first inner sleeve 141 and a first outer sleeve 142 which are sleeved with each other, the first inner sleeve 141 is connected to the inlet 110 of the gas to be processed, and the first outer sleeve 142 is connected to the inlet 120 of the reaction gas. The reaction gas can enter through the first outer sleeve 142 and be evenly sprayed so as to be mixed with the gas to be processed.

[0046] In this embodiment, Figure 2 As shown, the second treatment unit 200 includes a washing box 240, and the second fluid capture area 210, the primary washing area 220 and the secondary washing area 230 are all arranged in the washing box 240; the collection unit 400 includes a water tank 410, which is arranged below the washing box 240 and is used to hold sewage containing dissolved dust.

[0047] Specifically, Figure 2 and Figure 5 As shown, the primary washing zone 220 is provided with a first separation sleeve 223, the upper end of the first separation sleeve 223 is connected to the inlet 110 of the gas to be treated and the inlet 120 of the reaction gas, that is, the mixed gas to be treated and the reaction gas downwardly enter the first separation sleeve 223, and the primary water curtain zone 130 includes a first water curtain nozzle 131, which is arranged at the upper end of the first separation sleeve 223 and faces the inner side of the first separation sleeve 223, and is used to form a water curtain at the upper end of the first separation sleeve 223. The first separation sleeve 223 is conducive to blocking the dissipation of heat and preventing dust from being adsorbed on the inner wall of the first separation sleeve 223; in addition, the water curtain formed by the first water curtain nozzle 131 can dissolve part of the dust and drop it into the water tank 410.

[0048] Furthermore, the two-fluid capture area 210 is disposed at the lower side of the first separation sleeve 223 , and the two-fluid capture area 210 is used to evenly spray the mixed air and water into fine water particles for the first capture of dust.

[0049] Optionally, the two-fluid capture area 210 is provided with an air inlet 211, a water inlet 212, a two-fluid nozzle, and a mixing chamber connected to the air inlet 211, the water inlet 212, and the two-fluid nozzle. The mixing chamber is used to mix the air entering through the air inlet 211 and the water entering through the water inlet 212, and the mixed air and water are finally sprayed out through the two-fluid nozzle to capture dust.

[0050] Exemplarily, the primary filling part 221 includes a first ball ring 2211 , and the primary spray part 222 is provided with a first nozzle 2221 . The first ball ring 2211 is sleeved on the outer lower end of the first separation sleeve 223 , and the first nozzle 2221 is provided on the outer upper end of the first separation sleeve 223 .

[0051] In this embodiment, Figure 2 and Figure 6 As shown, a baffle 241 is vertically arranged in the washing box 240, one side of the baffle 241 is set as the primary washing area 220, and the other side is set as the secondary washing area 230, and the upper end of the baffle 241 is spaced from the top wall of the washing box 240 to connect the primary washing area 220 and the secondary washing area 230. That is, the gas to be treated passing through the primary water curtain area 130 enters the first separation sleeve 223 downward, and then moves upward along the four sides of the first separation sleeve 223 in the second fluid capture area 210, and is captured for the second time by the primary filler part 221 and the primary spray part 222 in the area surrounded by the outer wall of the washing box 240, the baffle 241 and the first separation sleeve 223, and then enters the secondary washing area 230 through the upper end of the baffle 241 and the top wall of the washing box 240.

[0052] Specifically, Figure 5 As shown, the secondary washing area 230 is provided with a second separation sleeve 233, the upper end of the second separation sleeve 233 is connected to the mist removal area 320, the secondary spray part 231 is provided with a second nozzle 2311, the secondary filler part 232 is provided with a second ball ring 2321, the second nozzle 2311 is provided at the upper end of the outer side of the second separation sleeve 233, and the second ball ring 2321 is sleeved at the lower end of the outer side of the second separation sleeve 233. The gas to be treated entering the secondary washing area 230 moves downward in the area surrounded by the washing box 240, the baffle 241 and the outer wall of the second separation sleeve 233, is captured for the third time by the secondary filler part 232 and the secondary spray part 231, and then enters the interior of the second separation sleeve 233 and moves upward.

[0053] Furthermore, the secondary water curtain area 310 includes a second water curtain nozzle 311, which is arranged at the upper end of the second separating sleeve 233 and faces the inner side of the second separating sleeve 233. The second separating sleeve 233 can also help block the heat from dissipating outward and prevent dust from being adsorbed on the inner wall of the second separating sleeve 233. In addition, the water curtain formed by the second water curtain nozzle 311 can dissolve part of the dust and drop it into the water tank 410.

[0054] The first separating sleeve 223, the baffle 241 and the second separating sleeve 233 are provided to extend the flow path of the gas to be treated in the washing box 240, so as to facilitate multiple washings, effectively improve the washing effect and make the structure of the scrubber more compact.

[0055] Preferably, if Figure 2As shown, the bottom wall of the water tank 410 is inclined, and the end connected to the primary washing area 220 is lower than the end connected to the secondary washing area 230. This arrangement improves the capacity of the end connected to the primary washing area 220 to hold sewage, and on the other hand, it is more convenient to discharge the sewage in the water tank 410.

[0056] Furthermore, if Figure 7 As shown, the mist removal area 320 is provided with a compressed gas nozzle 321, and the direction of the compressed gas nozzle 321 is opposite to the flow direction of the gas to be treated, which is used to make the rising mist fall to the water tank 410, while removing moisture in the gas to be treated and discharging it to the gas outlet 330.

[0057] The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there will be changes in the specific implementation methods and application scopes. The content of this specification should not be understood as limiting the present invention.

Claims

1. Scrubber, It is characterized in that The scrubber comprises a first processing unit (100), a second processing unit (200), a third processing unit (300) and a collecting unit (400) which are sequentially connected and arranged along the flow direction of the gas to be treated; The second processing unit (200) is arranged below the first processing unit (100) and the third processing unit (300), and the collecting unit (400) is arranged below the second processing unit (200); The first processing unit (100) comprises a to-be-treated gas inlet (110), a reaction gas inlet (120) and a primary water curtain area (130) which are sequentially connected along the flow direction of the to-be-treated gas, and the to-be-treated gas inlet (110) is provided with a plasma torch (111); The second treatment unit (200) comprises a second fluid capture zone (210), a primary washing zone (220) and a secondary washing zone (230) which are sequentially connected and arranged along the flow direction of the gas to be treated, the primary washing zone (220) being provided with a primary packing part (221) and a primary spraying part (222), and the secondary washing zone (230) being provided with a secondary spraying part (231) and a secondary packing part (232); The third treatment unit (300) comprises a secondary water curtain area (310), an atomized material removal area (320) and a gas outlet (330) which are sequentially connected along the flow direction of the gas to be treated; The second processing unit (200) comprises a washing box (240), and the collecting unit (400) comprises a water tank (410), wherein the water tank (410) is arranged below the washing box (240); A baffle (241) is vertically arranged in the washing box (240), one side of the baffle (241) is arranged as the primary washing area (220), and the other side of the baffle is arranged as the secondary washing area (230), and the upper end of the baffle (241) is spaced apart from the top wall of the washing box (240) to connect the primary washing area (220) and the secondary washing area (230); The primary washing zone (220) is provided with a first separation sleeve (223), the upper end of the first separation sleeve (223) is connected to the inlet of the gas to be treated (110) and the inlet of the reaction gas (120), the two-fluid capture zone (210) is provided at the lower side of the first separation sleeve (223), the primary water curtain zone (130) includes a first water curtain nozzle (131), the primary packing part (221) includes a first ball ring (2211), the primary spraying part (222) is provided with a first nozzle (2221), the first water curtain nozzle (131) is provided at the upper end of the first separation sleeve (223) and faces the inner side of the first separation sleeve (223), the first ball ring (2211) is sleeved on the lower end of the outer side of the first separation sleeve (223), and the first nozzle (2221) is provided at the upper end of the outer side of the first separation sleeve (223); The secondary washing zone (230) is provided with a second separation sleeve (233), the upper end of the second separation sleeve (233) is connected to the atomized material removal zone (320), the secondary water curtain zone (310) includes a second water curtain nozzle (311), the secondary spraying part (231) is provided with a second nozzle (2311), and the secondary filling part (232) is provided with a second ball ring (2321). The second water curtain nozzle (311) is arranged at the upper end of the second separation sleeve (233) and faces the inner side of the second separation sleeve (233), the second nozzle (2311) is arranged at the upper end of the outer side of the second separation sleeve (233), and the second ball ring (2321) is sleeved on the lower end of the outer side of the second separation sleeve (233).

2. The scrubber according to claim 1, It is characterized in that The inlet (110) of the gas to be treated is arranged as a tapered opening, the inner diameter of which gradually decreases towards the direction approaching the reaction gas inlet (120); the first processing unit (100) further comprises a scraper chain (112), and the scraper chain (112) is arranged corresponding to the inner wall of the tapered opening.

3. The scrubber according to claim 2, It is characterized in that The bottom wall of the water tank (410) is arranged to be inclined, and the end communicating with the primary washing zone (220) is lower than the end communicating with the secondary washing zone (230).

4. The scrubber according to claim 3, It is characterized in that The first processing unit (100) further comprises a first air inlet flange (140), the first air inlet flange (140) comprising a first inner sleeve (141) and a first outer sleeve (142) which are sleeved on each other, the first inner sleeve (141) being connected to the inlet (110) of the gas to be treated, and the first outer sleeve (142) being connected to the reaction gas inlet (120) and the inner side of the first separation sleeve (223).

5. The scrubber according to claim 4, It is characterized in that The two-fluid capture area (210) is provided with an air inlet (211), a water inlet (212) and a two-fluid nozzle, and a mixing chamber connected to the air inlet (211), the water inlet (212) and the two-fluid nozzle.

6. The scrubber according to claim 5, It is characterized in that The mist removal zone (320) is provided with a compressed gas nozzle (321), and the direction of the compressed gas nozzle (321) is opposite to the flow direction of the gas to be treated.

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