Arc extinguishing gas supply pipeline and etching equipment

Abstract

The present invention belongs to the field of semiconductor technology, and discloses an arc extinguishing gas supply pipeline and an etching device. The arc extinguishing gas supply pipeline is used to supply process gas to the reaction chamber of the etching device, and includes a first delivery pipe, an arc extinguishing component, and a second delivery pipeline. The first delivery pipe is communicated with a gas source; the arc extinguishing component has an arc extinguishing channel, the arc extinguishing channel is communicated with the first delivery pipe, the arc extinguishing channel includes a plurality of gas guiding channels, the plurality of gas guiding channels are sequentially communicated, and the extending directions of the plurality of gas guiding channels are different from each other to form the arc extinguishing channel having a plurality of inflection points; one end of the second delivery pipe is communicated with the arc extinguishing channel, and the other end is communicated with the reaction chamber of the etching device. Thus, when the gas supply pipeline is in use, after the process gas is sent out from the gas source and passes through the arc extinguishing component, the possibility of arc generation can be effectively reduced, and the generated arc can be suppressed, so as to effectively reduce the possibility of the process gas being ionized and initiated during the transportation process, and ensure the stable etching effect of the process gas on the wafer.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to an arc extinguishing gas supply pipeline and an etching device. Background Art

[0002] Wafer etching is an important step in the wafer processing process. During the etching process, process gas is transported to the etching reaction chamber through a precise pipeline system, and is used to chemically react or physically bombard the etching surface to achieve material removal.

[0003] In the prior art, the pipeline for transporting process gas uses a hose made of PFA material. One end of the hose is connected to the gas source, and the other end is connected to the reaction chamber. When transporting, the process gas enters the reaction chamber along the hose.

[0004] However, since the etching device itself has a power supply with a relatively large joint power, the hose will inevitably be in an electric field. Therefore, the process gas is easily ionized and initiated during transportation, resulting in a poor etching effect on the wafer. Summary of the Invention

[0005] The purpose of the present invention is to provide an arc extinguishing gas supply pipeline and an etching device, which solve the problem that the process gas is easily ionized and initiated during transportation in the prior art, resulting in a poor etching effect on the wafer.

[0006] To achieve this purpose, the present invention adopts the following technical solutions:

[0007] In a first aspect, the present application provides an arc extinguishing gas supply pipeline for supplying process gas to the reaction chamber of an etching device, including:

[0008] A first delivery pipe, one end of which is communicated with a gas source;

[0009] An arc extinguishing component, the arc extinguishing component has an arc extinguishing channel, the arc extinguishing channel is communicated with the other end of the first delivery pipe, the arc extinguishing channel includes a plurality of gas guiding channels, the plurality of gas guiding channels are sequentially communicated, the extending directions of the plurality of gas guiding channels are different from each other, and the communicating part between two adjacent gas guiding channels is transitioned at an angle to form the arc extinguishing channel with a plurality of inflection points; and

[0010] A second delivery pipe, one end of which is communicated with the end of the arc extinguishing channel far from the first delivery pipe, and the other end of which is communicated with the reaction chamber of the etching device.

[0011] Optionally, the included angle between the extending directions of two adjacent gas guiding channels is between 15° and 85°.

[0012] Optionally, the plurality of gas guiding channels are sequentially distributed along the length direction of the arc extinguishing component.

[0013] Optionally, the length of the arc extinguishing channel is between 40 mm and 110 mm.

[0014] Optionally, the arc extinguishing component includes:

[0015] An arc extinguishing block, and the arc extinguishing channel is arranged inside the arc extinguishing block;

[0016] A first connector, arranged on the arc extinguishing block and having a first connection hole, one end of the first connection hole communicates with the arc extinguishing channel, and the other end communicates with the first conveying pipe; and

[0017] A second connector, arranged on the arc extinguishing block and having a second connection hole, one end of the second connection hole communicates with the arc extinguishing channel, and the other end communicates with the second conveying pipe.

[0018] Optionally, the top wall of the arc extinguishing block has a punched notch, the bottom wall of the punched notch is inclined and punched towards the inside of the arc extinguishing block to form the air guiding channel, and the punched notch is filled with a sealing block in a sealed manner.

[0019] Optionally, the aperture of the first connection hole or the aperture of the second connection hole is larger than the inner diameter of the arc extinguishing channel.

[0020] Optionally, a sealing part is filled between the first connector and the arc extinguishing block and between the second connector and the arc extinguishing block.

[0021] Optionally, the arc extinguishing component is made of polycarbonate material, polyether ether ketone material and stainless steel material.

[0022] In a second aspect, the present application further provides an etching device, which includes:

[0023] A machine shell, which has a reaction chamber;

[0024] A supporting mechanism, arranged in the reaction chamber and used for supporting a wafer; and

[0025] The arc extinguishing air supply pipeline as described in the first aspect, which communicates with the reaction chamber.

[0026] Advantages of the present invention:

[0027] In a first aspect, an arc extinguishing component is used to connect the first delivery pipe and the second delivery pipe. When the process gas flows from the first delivery pipe into the arc extinguishing channel, different gas guiding channels will guide the process gas in different directions, causing the process gas to flow in a curved manner through multiple turning points of the arc extinguishing channel. During the flow of the process gas, the ionization products contained in the process gas encounter greater resistance and can be effectively dispersed, significantly reducing the energy density in the process gas, thereby reducing the possibility of the process gas forming a discharge and generating an arc. At the same time, for the arc extinguishing channel with multiple turning points, when an arc appears in the process gas, it can also cause the arc to deform and disperse during the flow, thereby reducing the intensity and stability of the arc, causing the emerging arc to gradually disappear, and thus avoiding the situation where the arc further promotes the ionization of the process gas after its generation. In this way, when the gas supply pipeline is in use, after the process gas is sent out from the gas source, it is transported to the reaction chamber through the first delivery pipe, the arc extinguishing component, and the second delivery pipe. When passing through the arc extinguishing component, the possibility of arc generation can be effectively reduced, and the generated arc can be suppressed, thereby effectively reducing the possibility of the process gas being ionized and initiated during transportation, ensuring the stability of the etching effect of the process gas on the wafer.

[0028] In a second aspect, when the etching equipment is in use, the wafer is placed on the support mechanism in the reaction chamber, and the process gas is sent into the reaction chamber through the arc extinguishing gas supply pipeline. During the transportation of the process gas, the arc extinguishing gas supply pipeline can effectively reduce the ionization and initiation of the process gas, thereby ensuring that the process gas can smoothly etch the wafer when entering the reaction chamber, effectively improving the etching quality. Description of the Drawings

[0029] Figure 1 is a schematic structural diagram of the arc extinguishing gas supply pipeline in an embodiment of the present invention;

[0030] Figure 2 is a schematic structural diagram of the arc extinguishing component of the arc extinguishing gas supply pipeline in an embodiment of the present invention;

[0031] Figure 3 is a structural sectional view of the arc extinguishing component of the arc extinguishing gas supply pipeline in an embodiment of the present invention;

[0032] Figure 4 is a partial structural sectional view of the etching equipment in an embodiment of the present invention.

[0033] In the figure:

[0034] 1. First delivery pipe; 2. Arc extinguishing component; 21. Gas guiding channel; 22. Arc extinguishing block; 23. First joint; 231. First connection hole; 24. Second joint; 241. Second connection hole; 25. Sealing block; 3. Second delivery pipe; 4. Sealing part; 5. Reaction chamber; 6. Support mechanism. Detailed Embodiments

[0035] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present invention, rather than limiting the present invention. In addition, it should be noted that, for the sake of convenience of description, only the parts related to the present invention rather than all the structures are shown in the drawings.

[0036] In the description of the present invention, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0037] In the present invention, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "above the", and "on the" second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the first feature has a higher horizontal height than the second feature. The first feature being "below", "below the", and "under the" second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the first feature has a lower horizontal height than the second feature.

[0038] In the description of this embodiment, the orientation or positional relationships such as "above", "below", "left", and "right" are based on the orientation or positional relationships shown in the drawings. It is only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention. In addition, the terms "first" and "second" are only used for distinction in description and have no special meanings.

[0039] This application embodiment discloses an arc extinguishing gas supply pipeline and an etching device.

[0040] Refer to Figures 1 to 4, The arc extinguishing gas supply pipeline is used to supply process gas to the reaction chamber 5 of the etching equipment, and it includes a first delivery pipe 1, an arc extinguishing component 2, and a second delivery pipe 3. One end of the first delivery pipe 1 is communicated with the gas source; the arc extinguishing component 2 has an arc extinguishing channel which is communicated with the other end of the first delivery pipe 1. The arc extinguishing channel includes a plurality of gas guiding channels 21 which are communicated in sequence, and the extending directions of the plurality of gas guiding channels 21 are different from each other to form an arc extinguishing channel with a plurality of inflection points; one end of the second delivery pipe 3 is communicated with the end of the arc extinguishing channel far away from the first delivery pipe 1, and the other end is communicated with the reaction chamber 5 of the etching equipment.

[0041] Specifically, both the first delivery pipe 1 and the second delivery pipe 3 are made of stainless steel material, and sealing structures are arranged at their joints to form a sealed connection to ensure good airtightness. An arc extinguishing component 2 is arranged between the first delivery pipe 1 and the second delivery pipe 3. An arc extinguishing channel is opened inside the arc extinguishing component 2. The arc extinguishing channel includes multiple sections of gas guiding channels 21, and the extending directions of different gas guiding channels 21 are different. Then, adjacent two gas guiding channels 21 can guide the process gas along different directions, and an inflection point will be formed at the connection of adjacent two gas guiding channels 21. The inflection point can be in a fold angle transition or an arc transition, and can be specifically designed according to the actual processing difficulty, arc extinguishing effect, etc.

[0042] The first delivery pipe 1 and the second delivery pipe 3 are connected through the arc extinguishing component 2. When the process gas flows from the first delivery pipe 1 into the arc extinguishing channel, different gas guiding channels 21 will guide the process gas along different directions, so that the process gas passes through multiple inflection points of the arc extinguishing channel in sequence to form a curved flow. During the flow of the process gas, the ionized products contained in the process gas are more hindered and can be effectively dispersed, significantly reducing the energy density in the process gas, thereby reducing the possibility of the process gas forming a discharge and generating an arc. At the same time, for the arc extinguishing channel with multiple inflection points, when an arc appears in the process gas, the arc can also be deformed and dispersed during the flow process, thereby reducing the intensity and stability of the arc, making the generated arc gradually disappear, and thus avoiding the situation that the arc further promotes the ionization of the process gas after it is generated. In this way, when the gas supply pipeline is in use, after the process gas is sent out from the gas source, it is transported to the reaction chamber 5 through the first delivery pipe 1, the arc extinguishing component 2, and the second delivery pipe 3. When passing through the arc extinguishing component 2, the possibility of arc generation can be effectively reduced, and the generated arc can be inhibited, thereby effectively reducing the possibility of the process gas being ionized and starting to glow during the transportation process, and ensuring the stable etching effect of the process gas on the wafer.

[0043] Optionally, the connection of adjacent two gas guiding channels 21 is in a fold angle transition.

[0044] Specifically, the angled transition means that two adjacent gas guiding channels 21 extend in corresponding directions and directly intersect to form a connection, and the connection is angled, so that the process gas can fully contact the inner wall of the arc extinguishing channel when passing through the connection. Compared with using an arc transition, the angled transition can effectively improve the arc extinguishing effect. At the same time, the arc extinguishing component 2 can adopt an integral structure, and the arc extinguishing channel is formed by drilling holes inward on the side wall of the arc extinguishing component 2. Then, the angled transition of two adjacent gas guiding channels 21 can make the inflection point of the arc extinguishing channel easier to process, thereby effectively reducing the processing difficulty.

[0045] Optionally, the included angle between the extension directions of two adjacent gas guiding channels 21 is between 15° and 85°.

[0046] Specifically, the included angle between the extension directions of two adjacent gas guiding channels 21 determines the bending amplitude at the inflection point. The smaller the included angle, the smaller the bending amplitude of the inflection point, and vice versa. When the included angle is between 15° and 85°, it can not only ensure that the bending at the inflection point enables the process gas to flow smoothly without dead ends, but also form a certain blocking effect on the particles contained in the process gas, thereby reducing the amount of particles contained in the process gas and further improving the quality of the process gas. The specific included angle between two adjacent gas guiding channels 21 can be designed according to the actual arc extinguishing effect.

[0047] Optionally, multiple gas guiding channels 21 are sequentially distributed along the length direction of the arc extinguishing component 2.

[0048] Specifically, openings are respectively arranged on the opposite sides along the length direction of the arc extinguishing component 2, and both openings are communicated with the arc extinguishing channel. One side of the opening is communicated with the first delivery pipe 1, and the other side of the opening is communicated with the second delivery pipe 3. In this embodiment, four gas guiding channels 21 are arranged, and the four gas guiding channels 21 are distributed along the length direction of the arc extinguishing component 2 to form a "W"-shaped arc extinguishing channel. In other embodiments, the number of the guiding channels can be set more or less, and the shape of the formed arc extinguishing channel can also be designed according to the actual extension direction of the gas guiding channels 21.

[0049] Optionally, the length of the arc extinguishing channel is between 40 mm and 110 mm.

[0050] Specifically, the length of the arc extinguishing channel is the sum of the lengths of all the gas guiding channels 21. The total length of the arc extinguishing channel is between 40 mm and 110 mm, ensuring that the process gas stays in the arc extinguishing channel for enough time. While effectively cooling the process gas, it can also reduce the possibility of arc reignition. And the arc extinguishing channel having multiple inflection points can form an arc extinguishing channel with sufficient length in the arc extinguishing component 2 with a smaller size, reducing the space occupied by the overall structure while ensuring that the length of the arc extinguishing channel meets the requirements. The specific length of the arc extinguishing channel can be designed according to the actual arc extinguishing effect, and this application does not make any limitation.

[0051] Optionally, the arc extinguishing component 2 includes an arc extinguishing block 22, a first joint 23, and a second joint 24. The arc extinguishing channel is disposed within the arc extinguishing block 22; the first joint 23 is disposed on the arc extinguishing block 22 and has a first connection hole 231, one end of the first connection hole 231 communicates with the arc extinguishing channel, and the other end communicates with the first delivery pipe 1; the second joint 24 is disposed on the arc extinguishing block 22 and has a second connection hole 241, one end of the second connection hole 241 communicates with the arc extinguishing channel, and the other end communicates with the second delivery pipe 3.

[0052] Specifically, the arc extinguishing block 22 is in the shape of a cubic block, which is made of polycarbonate material, polyetheretherketone material, and stainless steel material. Guide air channels 21 are formed by drilling on its surface. In this embodiment, holes are drilled on opposite sides of the arc extinguishing block 22 to form guide air channels 21 at the edge positions of the arc extinguishing block 22, and the guide air channels 21 communicate with the first delivery pipe 1 or the second delivery pipe 3. A drilling notch is formed on the top wall of the arc extinguishing block 22 to form guide air channels 21 in the middle part of the arc extinguishing block 22, and the guide air channels 21 communicate with the guide air channels 21 at the edge positions. A sealing block 25 is filled in the drilling notch to seal the drilling notch.

[0053] A first joint 23 is fixedly connected to one side of the arc extinguishing block 22 close to the first delivery pipe 1. A surface fit is formed between the first joint 23 and the arc extinguishing block 22, and the two can be fixed by bonding, or by welding, or by fasteners such as screws to achieve fixed connection. The first joint 23 is provided with a first connection hole 231 penetrating therethrough. One end of the first connection hole 231 is hermetically communicated with the arc extinguishing channel, and the other end is hermetically connected to the first delivery pipe 1. The sealing method can be achieved by an O-ring or other sealing means. The structure of the second joint 24 is the same as that of the first joint 23 and will not be described in detail here.

[0054] By drilling and processing in the arc extinguishing block 22 to form the arc extinguishing channel, the entire arc extinguishing block 22 only has openings at the drilling positions, thereby ensuring good airtightness inside the arc extinguishing channel. The first joint 23, the second joint 24, and the sealing block 25 are provided at the openings on the surface of the arc extinguishing block 22, which can further ensure good airtightness of the entire arc extinguishing component 2, thereby ensuring that the process gas does not leak.

[0055] Optionally, the diameter of the first connection hole 231 or the diameter of the second connection hole 241 is larger than the inner diameter of the arc extinguishing channel.

[0056] Specifically, the aperture of the first connection hole 231 is relatively large, which can form a relatively large accommodation space within the first joint 23 to accommodate process gas. By setting the inner diameter of the arc quenching channel to be relatively small, the flow of the process gas in the arc quenching channel can be accelerated, so as to form a relatively strong deionization effect on the arc, making it easier to truncate and extinguish the arc. Moreover, as the inner diameter of the arc quenching channel decreases, the process gas can reduce the arc radius when entering, making it even easier to extinguish the arc.

[0057] Optionally, a sealing part 4 is filled between the first joint 23 and the arc quenching block 22 and between the second joint 24 and the arc quenching block 22.

[0058] Specifically, a sealing groove is formed on the side surface of the first joint 23. The sealing groove is arranged in a ring shape outside the first connection hole 231. The sealing part 4 is filled in the sealing groove, and a part of the sealing part 4 protrudes from the sealing groove and abuts against the side surface of the arc quenching block 22, thereby forming a seal. In this embodiment, the sealing part 4 is made of fluororubber, which ensures the overall insulation while ensuring the sealing performance between the first joint 23 and the arc quenching block 22.

[0059] The etching equipment includes a machine shell, a support mechanism 6, and an arc quenching gas supply pipeline as described in the above embodiments. The machine shell has a reaction chamber 5; the support mechanism 6 is arranged in the reaction chamber 5 and is used to support the wafer; the arc quenching gas supply pipeline is communicated with the reaction chamber 5.

[0060] When the etching equipment is in use, the wafer is placed on the support mechanism 6 in the reaction chamber 5, and the process gas is sent into the reaction chamber 5 by the arc quenching gas supply pipeline. During the transportation of the process gas, the arc quenching gas supply pipeline can effectively prevent the process gas from being ionized and initiated, so as to ensure that the process gas can smoothly etch the wafer when entering the reaction chamber 5, effectively improving the etching quality.

[0061] Obviously, the above embodiments of the present invention are merely examples for clearly explaining the present invention, rather than limiting the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments, and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions, and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.

Claims

1. Arc extinguishing gas supply pipeline, characterized in that, For supplying process gas to the reaction chamber (5) of an etching device, including: A first delivery pipe (1) with one end connected to a gas source; An arc extinguishing assembly (2) having an arc extinguishing channel that is connected to the other end of the first delivery pipe (1). The arc extinguishing channel includes a plurality of gas guiding channels (21) that are sequentially connected. The extending directions of the plurality of gas guiding channels (21) are different from each other, and the connection between adjacent two gas guiding channels (21) is transitioned at an angle to form the arc extinguishing channel with a plurality of inflection points; and A second delivery pipe (3) with one end connected to the end of the arc extinguishing channel away from the first delivery pipe (1) and the other end connected to the reaction chamber (5) of the etching device; The arc extinguishing assembly (2) includes: An arc extinguishing block (22) within which the arc extinguishing channel is provided; A first connector (23) disposed on the arc extinguishing block (22) and having a first connection hole (231). One end of the first connection hole (231) is connected to the arc extinguishing channel, and the other end is connected to the first delivery pipe (1); and A second connector (24) disposed on the arc extinguishing block (22) and having a second connection hole (241). One end of the second connection hole (241) is connected to the arc extinguishing channel, and the other end is connected to the second delivery pipe (3).

2. The arc extinguishing gas supply pipeline according to claim 1, wherein The included angle between the extending directions of adjacent two gas guiding channels (21) is between 15° and 85°.

3. The arc extinguishing gas supply pipeline according to claim 1, characterized in that, The plurality of gas guiding channels (21) are sequentially distributed along the length direction of the arc extinguishing assembly (2).

4. The arc extinguishing gas supply pipeline according to claim 1, characterized in that, The length of the arc extinguishing channel is between 40 mm and 110 mm.

5. The arc extinguishing air supply pipeline according to claim 1, characterized in that, The top wall of the arc extinguishing block (22) has a punching notch. The bottom wall of the punching notch is inclined and punched towards the interior of the arc extinguishing block (22) to form the gas guiding channel (21), and a sealing block (25) is hermetically filled in the punching notch.

6. The arc extinguishing gas supply pipeline according to claim 1, characterized in that, The inner diameter of the first connection hole (231) or the second connection hole (241) is larger than the inner diameter of the arc extinguishing channel.

7. The arc extinguishing gas supply pipeline according to claim 1, characterized in that, Sealing parts (4) are filled between the first connector (23) and the arc extinguishing block (22) and between the second connector (24) and the arc extinguishing block (22).

8. The arc extinguishing gas supply pipeline according to claim 1, wherein The arc extinguishing assembly is made of polycarbonate material, polyetheretherketone material, and stainless steel material.

9. Etching equipment, characterized in that, Including: A machine housing having a reaction chamber (5); A support mechanism (6) disposed in the reaction chamber (5) and used for supporting a wafer; And The arc extinguishing gas supply pipeline according to any one of claims 1 to 8, which is connected to the reaction chamber (5).

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