A vacuum manual angle valve suitable for the semiconductor industry

Abstract

The present invention relates to the technical field of vacuum manual angle valves, and discloses a vacuum manual angle valve suitable for the semiconductor industry, comprising a handle, a center axis, a cover plate, a retractable bellows, a clamping plate, a threaded adapter, a valve body, and a flange on the valve body, wherein the upper end and the lower end of the bellows are respectively provided with an upper flange and a lower flange, the upper flange is mounted on the flange of the valve body, the upper end of the clamping plate is provided with a folding edge, the outer contour of the clamping plate is cylindrical and passes through the inner ring of the upper flange, the folding edge is mounted on the upper flange, the threaded adapter is inserted into the inner ring of the clamping plate and is vertically slidably connected to the clamping plate; in the present invention, the first sealing ring will not rotate when moving and pressing the valve body pipeline, thereby avoiding the generation of tiny particles and polluting the pipeline environment; during the opening or closing process, the handle and the center axis will not move axially, which is convenient for operation in a small space, and the linkage relationship is stable during operation.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum manual angle valves, in particular to a vacuum manual angle valve suitable for the semiconductor industry. Background Art

[0002] In the semiconductor industry, valves in vacuum pipelines are crucial. Their sealing, stability, low vibration, and ease of maintenance have a significant impact on the stability and functionality of the entire pipeline system. Current vacuum manual angle valves generally use the principle of screw movement, relying on the central structure of the valve body for fixation. By turning the handle, the screw is extended to open the door, and vice versa, the bellows is contracted, thereby compressing the sealing ring to close the valve. The external dimensions of such valves are generally large, and they use permanent connections, which are difficult to maintain. When closing the door, the screw rotates as the sealing ring descends and compresses, generating friction when it contacts the sealing surface, thereby generating tiny particles that pollute the pipeline environment. In addition, the existing technology causes the screw to produce axial movement during the rotation of the handle, making it difficult to operate in a small space. Summary of the Invention

[0003] In response to the above-mentioned deficiencies in the prior art, the present invention provides a vacuum manual angle valve suitable for the semiconductor industry. The first sealing ring does not rotate when it moves and presses the valve body pipeline, thereby avoiding the generation of tiny particles and polluting the pipeline environment. During the opening or closing process, the handle and the center axis do not move axially, which is convenient for operation in a small space, and the linkage relationship is stable during operation.

[0004] To achieve the above objectives, the present invention is implemented through the following technical solutions: a vacuum manual angle valve suitable for the semiconductor industry, comprising a handle, a central axis, a cover plate, a retractable bellows, a card plate, a threaded adapter and a valve body and a flange on the valve body, the upper end and lower end of the bellows are respectively provided with an upper flange and a lower flange, the upper flange is mounted on the flange of the valve body, the upper end of the card plate is provided with a folded edge, the outer contour of the card plate is cylindrical and passes through the inner ring of the upper flange, the folded edge is mounted on the upper flange, the threaded adapter is inserted into the inner ring of the card plate and is vertically connected to the card plate Straight sliding connection, the lower end of the threaded adapter is connected to the lower flange, and the bottom of the lower flange is provided with a first sealing ring with a diameter larger than the channel in the valve body. The cover plate is buckled on the flange on the valve body, and the upper flange and the flange on the valve body are fixed by screws. The cover plate circumferentially fixes the clamping plate and the folding edge. The central shaft passes through the center position of the cover plate and is rotatably connected to the cover plate through a bearing. The lower part of the central shaft is provided with an external thread, and the inner side wall of the threaded adapter is provided with an internal thread. The central shaft is screwed to the threaded adapter, and the upper end of the central shaft is fixedly connected to the handle.

[0005] Preferably, a limiting opening is provided on the folded edge of the clamping plate, and a threaded hole is provided on the cover plate corresponding to the position of the limiting opening. A top screw is screwed into the threaded hole and the lower end of the top screw is perforated with the limiting opening.

[0006] Preferably, the inner contour of the card plate is hexagonal, and the outer contour of the threaded adapter is hexagonal matching the inner contour of the card plate and is vertically movably inserted into the inner contour of the card plate.

[0007] Preferably, a third sealing ring is provided between the lower end of the threaded adapter and the lower flange, and the threaded adapter and the lower flange are connected by a screw pre-tightening force.

[0008] Preferably, the handle is connected to the upper end of the central shaft via a top screw.

[0009] Preferably, a second sealing ring is provided between the upper flange and the flange of the valve body.

[0010] Preferably, the outside of the handle is provided with protective patterns.

[0011] Preferably, the outer ring of the bearing is fixed to the cover plate by interference fit, the lower ends of both ends of the bearing are fixed by shaft shoulders, and the upper ends are fixed by retaining springs.

[0012] The present invention provides a vacuum manual angle valve suitable for the semiconductor industry, which has the following beneficial effects:

[0013] 1. The first sealing ring of the present invention does not rotate when moving and pressing the valve body pipeline, thus avoiding the generation of tiny particles that may contaminate the pipeline environment and improving the cleanliness of the valve. During the opening or closing process, the handle and the center axis do not move axially, which reduces the use space, facilitates operation in a small space, improves the product appearance, and ensures a stable linkage relationship during operation.

[0014] 2. In the present invention, all connections except the bearings are detachable, which increases the maintainability of the valve and indirectly increases the service life of the valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is an exploded view of a vacuum manual angle valve suitable for the semiconductor industry according to the present invention;

[0016] Figure 2 This is a schematic diagram of a vacuum manual angle valve applicable to the semiconductor industry when it is opened;

[0017] Figure 3 This is a schematic diagram of a vacuum manual angle valve suitable for the semiconductor industry when closed according to the present invention.

[0018] In the figure: 1. Handle; 2. Center shaft; 3. Bearing; 4. Cover plate; 5. Threaded adapter; 6. Clamping plate; 7. Bellows; 8. Valve body; 9. Lower flange; 10. First sealing ring; 11. Top screw; 12. Folded edge; 13. Second sealing ring; 14. Upper flange; 15. Third sealing ring. DETAILED DESCRIPTION

[0019] The present invention will be described in detail below with reference to specific embodiments and the accompanying drawings, but the protection scope of the present invention is not limited by the specific embodiments and the accompanying drawings.

[0020] like Figure 1-3 As shown, a vacuum manual angle valve suitable for the semiconductor industry includes a handle 1, a central shaft 2, a cover plate 4, a retractable bellows 7, a clamping plate 6, a threaded adapter 5, a valve body 8, and a flange on the valve body 8. The upper end and lower end of the bellows 7 are respectively provided with an upper flange 14 and a lower flange 9. The upper flange 14 is mounted on the flange of the valve body 8. The upper end of the clamping plate 6 is provided with a folded edge 12. The outer contour of the clamping plate 6 is cylindrical and passes through the inner ring of the upper flange 14. The folded edge 12 is mounted on the upper flange 14. The threaded adapter 5 is provided on the valve body 8. The thread adapter 5 is inserted into the inner ring of the card plate 6 and is vertically slidably connected to the card plate 6. The lower end of the thread adapter 5 is connected to the lower flange 9. The bottom of the lower flange 9 is provided with a first sealing ring 10 with a diameter larger than the inner channel of the valve body 8. The cover plate 4 is buckled on the flange on the valve body 8, and the upper flange 14 and the flange on the valve body 8 are fixed by screws. The cover plate 4 circumferentially fixes the card plate 6 and the folded edge 12. The central axis 2 passes through the center position of the cover plate 4 and is rotatably connected to the cover plate 4 through the bearing 3. The lower part of the central shaft 2 is provided with an external thread, the inner side wall of the threaded adapter 5 is provided with an internal thread, the central shaft 2 is screwed to the threaded adapter 5, and the upper end of the central shaft 2 is fixedly connected to the handle 1; a limited opening is provided on the folded edge 12 of the clamping plate 6, and a threaded hole is provided at the position corresponding to the limit opening of the cover plate 4, a top screw 11 is screwed into the threaded hole, and the lower end of the top screw 11 is perforated with a limit opening; the inner contour of the clamping plate 6 is hexagonal, and the outer contour of the threaded adapter 5 is a hexagon that matches the inner contour of the clamping plate 6 and is vertically movable. Within the inner contour of the clamping plate 6; a third sealing ring 15 is provided between the lower end of the threaded adapter 5 and the lower flange 9, and the threaded adapter 5 and the lower flange 9 are connected by screw pre-tightening force; the handle 1 and the upper end of the central axis 2 are connected by a top screw 11; a second sealing ring 13 is provided between the upper flange 14 and the flange of the valve body 8; a protective pattern is provided on the outside of the handle 1; the outer ring of the bearing 3 is fixed to the cover plate 4 by an interference fit, the lower ends of the two ends of the bearing 3 are fixed by shaft shoulders, and the upper ends are fixed by retaining springs.

[0021] The detailed connection means are well-known in the art. The following mainly introduces the working principle and process, which are as follows:

[0022] According to the instruction manual Figure 1-3 It can be seen that when the present invention is installed, the bellows 7, the clamping plate 6 and the threaded adapter 5 are installed on the flange of the valve body 8 in sequence, the upper flange 14 of the bellows 7 is placed on the flange of the valve body 8, and the folding plate of the clamping plate 6 is placed on the upper flange 14. The lower end of the threaded adapter 5 is detachably connected to the lower flange 9 at the lower end of the bellows 7. The clamping plate 6 limits the threaded adapter 5 to move only in the vertical direction. The cover plate 4 is buckled on the flange of the valve body 8, and the upper flange 14 and the valve body 8 are fixed by screws. At the same time, the clamping plate 6 and the folding edge 12 can be circumferentially fixed. The central shaft 2 is rotatably connected to the cover plate 4 through the bearing 3. The lower part of the central shaft 2 is screwed to the threaded adapter 5, and the upper end is detachably connected to the handle 1.

[0023] When working, the personnel rotates the handle 1 to drive the central shaft 2 to rotate. Since the central shaft 2 is screwed to the threaded adapter 5, and the threaded adapter 5 and the clamping plate 6 can only move vertically, the rotation of the central shaft 2 can drive the threaded adapter 5 to move vertically. Since the lower end of the threaded adapter 5 is connected to the lower flange 9 at the lower end of the bellows 7, it can drive the lower flange 9 to move vertically, but cannot rotate. At the same time, the bellows 7 expands and contracts. The rotation direction here determines the direction of vertical movement of the lower flange 9 and the threaded adapter 5 through the thread direction, and also determines whether the valve is opened or closed. Under normal circumstances, clockwise rotation can make the lower flange 9 move downward, and the first sealing ring 10 at the bottom of the lower valve can abut against the sealing surface of the internal channel of the valve body 8. The first sealing ring 10 is compressed to form a completely sealed state. At this time, the valve is closed, and on the contrary, the valve is open. The design of the rotation direction here is existing technology and can be understood by those skilled in the art. Compared with the prior art, the first sealing ring 10 in the present invention does not rotate when moving and pressing the valve body 8 pipeline, thus avoiding the generation of tiny particles that pollute the pipeline environment and improving the cleanliness of the valve; in the process of opening or closing, the handle 1 and the center axis 2 will not move axially under the limit of the clamping plate 6, thus reducing the use space, facilitating operation in a small space, increasing the appearance of the product, and preventing shaking, and the linkage relationship is stable during operation. In addition, the design of the bellows 7 is such that the center axis 2, the threaded adapter 5, and the clamping plate 6 are separated from the liquid in the pipeline through the valve body 8 as much as possible, which has a certain sealing effect and improves the cleanliness of the valve. In the present invention, all connections except the bearing 3 are detachable, which increases the maintainability of the valve and indirectly increases the service life of the valve.

[0024] Among them, a limiting opening is set on the folded edge 12 of the clamping plate 6, and a threaded hole is set at the position of the limiting opening of the cover plate 4. During installation, the top screw 11 is screwed into the threaded hole and stuck at the limiting opening, ensuring that the clamping plate 6 and the folded edge 12 will not rotate during work and are fixed and stable, thereby ensuring the stability of the limiting of the threaded adapter 5.

[0025] Among them, the inner contour of the clamping plate 6 is a hexagon, and the outer contour of the threaded adapter 5 is a hexagon that matches the inner contour of the clamping plate 6 and is vertically inserted into the inner contour of the clamping plate 6. The threaded adapter 5 is limited in the vertical direction by the shape, and the connection is stable, not easy to be damaged, and the service life is improved.

[0026] Among them, a third sealing ring 15 is arranged between the lower end of the threaded adapter 5 and the lower flange 9, and the threaded adapter 5 and the lower flange 9 are connected by screw pre-tightening force. The screw connection method is convenient for repair and maintenance, and the design of the third sealing ring 15 improves the sealing performance.

[0027] The handle 1 is connected to the upper end of the central axis 2 by a top screw 11, which is a detachable connection for easy repair and maintenance. At the same time, the outside of the handle 1 is provided with protective patterns to increase the friction when twisting.

[0028] A second sealing ring 13 is provided between the upper flange 14 and the flange of the valve body 8 to improve the sealing between the valve body 8 and the cover plate 4 .

[0029] Among them, the outer ring of the bearing 3 is fixed to the cover plate 4 by interference fit. The lower ends of the bearing 3 are fixed with shaft shoulders, and the upper ends are fixed with retaining springs to improve the stability of component connection and installation.

Claims

1. A vacuum manual angle valve suitable for the semiconductor industry, characterized in that: The invention comprises a handle (1), a central axis (2), a cover plate (4), a retractable bellows (7), a card plate (6), a threaded adapter (5), a valve body (8), and a flange on the valve body (8), wherein the upper end and the lower end of the bellows (7) are respectively provided with an upper flange (14) and a lower flange (9), wherein the upper flange (14) is mounted on the flange of the valve body (8), and the upper end of the card plate (6) is provided with a folding edge (12), the outer contour of the card plate (6) is cylindrical and passes through the inner ring of the upper flange (14), and the folding edge (12) is mounted on the upper flange (14), and the threaded adapter (5) is inserted into the inner ring of the card plate (6) and is vertically slidably connected to the card plate (6), and the lower end of the threaded adapter (5) is connected to the inner ring of the card plate (6). The lower flange (9) is connected, and a first sealing ring (10) having a diameter larger than the inner channel of the valve body (8) is provided at the bottom of the lower flange (9). The cover plate (4) is buckled on the flange on the valve body (8), and the upper flange (14) and the flange on the valve body (8) are fixed by screws. The cover plate (4) circumferentially fixes the clamping plate (6) and the folding edge (12). The central shaft (2) passes through the center position of the cover plate (4) and is rotatably connected to the cover plate (4) through a bearing (3). The lower part of the central shaft (2) is provided with an external thread, and the inner side wall of the thread adapter (5) is provided with an internal thread. The central shaft (2) is screwed to the thread adapter (5), and the upper end of the central shaft (2) is fixedly connected to the handle (1).

2. A vacuum manual angle valve suitable for the semiconductor industry according to claim 1, characterized in that: A limiting opening is provided on the folded edge (12) of the clamping plate (6), and a threaded hole is provided on the cover plate (4) at a position corresponding to the limiting opening. A top screw (11) is screwed into the threaded hole, and the lower end of the top screw (11) is perforated with the limiting opening.

3. The vacuum manual angle valve suitable for the semiconductor industry according to claim 1, characterized in that: The inner contour of the clamping plate (6) is hexagonal, and the outer contour of the threaded adapter (5) is hexagonal and matches the inner contour of the clamping plate (6) and is vertically movably inserted into the inner contour of the clamping plate (6).

4. The vacuum manual angle valve suitable for the semiconductor industry according to claim 1, characterized in that: A third sealing ring (15) is provided between the lower end of the threaded adapter (5) and the lower flange (9), and the threaded adapter (5) and the lower flange (9) are connected by a screw pre-tightening force.

5. The vacuum manual angle valve suitable for the semiconductor industry according to claim 1, characterized in that: The handle (1) is connected to the upper end of the central shaft (2) via a top screw (11).

6. The vacuum manual angle valve suitable for the semiconductor industry according to claim 1, characterized in that: A second sealing ring (13) is provided between the upper flange (14) and the flange of the valve body (8).

7. The vacuum manual angle valve suitable for the semiconductor industry according to claim 1, characterized in that: The handle (1) is provided with protective patterns on the outside.

8. The vacuum manual angle valve suitable for the semiconductor industry according to claim 1, characterized in that: The outer ring of the bearing (3) is fixedly connected to the cover plate (4) by interference fit, and the lower ends of both ends of the bearing (3) are fixed by shaft shoulders, and the upper ends are fixed by retaining springs.

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