Wafer visual inspection device and inspection method

Abstract

The present invention discloses a wafer visual inspection device, which relates to the field of wafer production, including a workbench, a positioning frame is connected to the top of the workbench through a lifting mechanism, a visual inspection mechanism is arranged at one end of the inner side of the positioning frame, and a feeding and discharging mechanism is arranged at the other end of the inner side of the positioning frame. The present invention arranges the visual inspection mechanism and the feeding and discharging mechanism on a common positioning frame, and also makes changes to the wafer basket. The visual inspection mechanism and the feeding and discharging mechanism are vertically lifted and lowered together through the positioning frame, and then cooperate with the linear motion of the feeding and discharging mechanism to perform visual inspection on each layer of wafers in the wafer basket. The vertical lifting inspection method is adopted, the movement stroke is short, the movement range is small, and the intermediate consumption time is interrupted, which further improves the efficiency of wafer inspection, and the inspection mechanism and the feeding and discharging mechanism are always at the same height, and there is no need to adjust the height of the visual inspection mechanism additionally.

Description

Technical Field

[0001] The present invention relates to the field of wafer production, and in particular to a wafer visual inspection device and an inspection method. Background Art

[0002] A wafer refers to the silicon chip used to make silicon semiconductor integrated circuits. Because of its round shape, it is called a silicon wafer.

[0003] Wafer visual inspection mainly relies on the combination of advanced technologies such as computer vision, image processing and machine learning to ensure the high quality and production efficiency of wafers in the semiconductor manufacturing process. The core of visual inspection is to use computer vision systems to simulate human visual functions and capture images of wafers through high-precision cameras. Image processing technology is then used to pre-process, enhance, extract features and analyze the captured images in order to detect various potential defects and impurities.

[0004] Most of the existing wafer visual inspection equipment uses a robotic arm to complete loading and unloading. First, the wafer basket is placed at the loading and unloading position manually, and then the robotic arm moves to the inside of the wafer basket to take the wafer, and then the robotic arm sends the wafer to the bottom of the inspection camera. The robotic arm retracts and waits. After the inspection is completed, the robotic arm extends to take the inspected wafer and transports it to the wafer basket and puts it back, and then repeats the inspection of the next wafer. The large movement stroke and range of the robotic arm means that the time consumed in the middle is long, which will reduce work efficiency. In addition, when the wafer basket is placed manually, it is very likely that the wafer basket will be placed obliquely due to improper operation, which will cause the wafers in the wafer basket to fall out and need to be rearranged and put back, which is very troublesome. Summary of the invention

[0005] Based on this, the purpose of the present invention is to provide a wafer visual inspection device and an inspection method to solve the technical problems that the existing wafer visual inspection equipment has low efficiency and the wafer basket is easy to fall during the placement process.

[0006] To achieve the above object, the present invention provides the following technical solution: a wafer visual inspection device, comprising a workbench, a positioning frame is connected to the top of the workbench through a lifting mechanism, a visual inspection mechanism is arranged at one end of the inner side of the positioning frame, and a feeding and discharging mechanism is arranged at the other end of the inner side of the positioning frame;

[0007] An air cylinder is fixed inside the workbench, an air cavity is arranged inside the air cylinder, and a piston column is movably arranged inside the air cavity, a gap is left between the bottom of the piston column and the inner bottom of the air cylinder, and an air inlet pipe connected with the gap is arranged on the outside of the air cylinder, an air valve is arranged at the bottom of the air cylinder, the piston column movably passes through the top of the air cylinder and is fixed with a top plate, when the piston column is retracted inside the air cylinder, the top plate is flush with the workbench, a wafer basket is placed on the top of the top plate, and the open side of the wafer basket faces the baffle, a storage cavity is arranged inside the wafer basket, a plurality of slots distributed up and down are arranged on the inner wall of the storage cavity, and slots for movement of the feeding and discharging mechanism are arranged on the outside of the wafer basket below each layer of the slots.

[0008] By adopting the above technical solution, the detection mechanism and the feed-in and feed-out mechanism are set on a common positioning frame, and the wafer basket is modified. The detection mechanism and the feed-in and feed-out mechanism are vertically lifted and lowered together through the positioning frame, and then coordinated with the linear movement of the feed-in and feed-out mechanism, each layer of wafers in the wafer basket can be visually inspected.

[0009] The present invention is further configured as follows: an air groove is provided inside the piston column, and the top end of the air groove is closed, movable grooves are provided at two corners on one side of the top plate, and the interiors of the two movable grooves are both rotatably connected to a rotating block via a rotating shaft, the top end of the rotating block is connected to a baffle, and the bottom end of the rotating block is provided with a force surface, an airbag is provided on the inner side of the movable groove, and when the airbag is inflated, it will squeeze the force surface to drive the rotating block to flip upward around the rotating shaft, and a gas channel connecting the airbag and the air groove is also provided inside the piston column.

[0010] By adopting the above technical solution, when placing the wafer basket, two baffles will block the opening of the wafer basket to prevent the wafer from slipping out due to deflection. Then the wafer will be lowered to the detection position through the piston column. During the descent, the baffle will flip down. After the inspection of each layer of wafers is completed, the piston column will drive the wafer basket to rise again, and the baffle will also flip up to prevent the wafer from slipping out when placing the wafer basket.

[0011] The present invention is further configured such that the lifting mechanism includes four screw rods rotatably connected to the top of the workbench, and the four screw rods are all threadedly connected to the four corners of the positioning frame, and a motor for driving the screw rods to rotate is installed inside the workbench.

[0012] By adopting the above technical solution, the positioning frame is driven to rise and fall by the screw rod.

[0013] The present invention is further configured such that the visual inspection mechanism includes two transverse screw rods rotatably connected to the inner side of the positioning frame, and a transverse slider is slidably connected to the inner side of the positioning frame through threaded cooperation with the transverse screw rods, two longitudinal screw rods are rotatably connected between the two transverse sliders, and a longitudinal slider is slidably connected through threaded cooperation with the longitudinal screw rods, a visual inspection camera is installed at the bottom of the longitudinal slider, and motors are installed on the outer side of the positioning frame to drive the transverse screw rods and the longitudinal screw rods to rotate respectively.

[0014] By adopting the above technical solution, the lateral and longitudinal movement of the visual inspection camera can be achieved.

[0015] The present invention is further configured such that the material feeding and discharging mechanism comprises a cylinder fixed on the positioning frame, the output end of the cylinder is connected to a material transporting plate, and the output shaft of the cylinder and the material transporting plate can extend into the slot.

[0016] By adopting the above technical solution, the transport plate is pushed to move by the cylinder to realize the entry and exit of the wafers.

[0017] The present invention is further configured such that an outer cover is provided on the top of the workbench, and a material hole for placing a wafer basket is provided on the top of the outer cover.

[0018] By adopting the above technical solution, internal components are protected.

[0019] The present invention is further configured such that the lengths of one end of the baffle located on both sides of the rotating block are asymmetric, and the outer length is greater than the inner length.

[0020] By adopting the above technical solution, the baffle can automatically flip downward by utilizing eccentric gravity.

[0021] The present invention is further configured such that a stopper cooperating with the material hole is also provided on the top of the baffle.

[0022] By adopting the above technical solution, the time for the baffle to flip down is prolonged.

[0023] The present invention is further configured such that a limiting block is disposed on the top of the top plate, and a limiting groove cooperating with the limiting block is disposed on the bottom of the wafer basket.

[0024] By adopting the above technical solution, the wafer basket can be placed stably.

[0025] The present invention also provides a wafer visual inspection method, the steps are as follows:

[0026] Step 1: Place the wafer basket onto the top plate through the material hole, insert the limit block into the limit groove, and use the baffle to block the opening of the wafer basket to prevent the wafer from slipping out. Then control the air valve to open, release air from the air cavity, and move the piston downward, thereby dragging the wafer basket downward to the specified position through the top plate, and the baffle also flips down at the same time;

[0027] Step 2: The screw drives the positioning frame down to the position of the first layer of wafers. At this time, the cylinder drives the transport plate to extend so that the transport plate passes through the slot 30 below the first layer of wafers and stays there. Then the screw drives the positioning frame to move upward for a short distance, thereby driving the cylinder and the transport plate to move upward for a short distance as well, thereby lifting the wafer through the transport plate. Then the cylinder continues to drive the transport plate forward to drag the wafer out of the slot and send it to the bottom of the visual inspection camera. Then the horizontal and longitudinal screws are used to drive the visual inspection camera to move, thereby inspecting the surface of the wafer through the visual inspection camera. After the inspection is completed, the visual inspection camera is reset, and the cylinder drives the transport plate to be recovered into the corresponding slot. The wafer is reinserted into the slot, and then the positioning frame descends, thereby continuing to place the wafer in the slot. Then the transport plate is controlled to exit the slot, and the above steps are repeated to inspect each layer of wafers.

[0028] Step 3: When all the wafers in the wafer basket have been inspected, the air valve can be controlled to close, and the air inlet pipe is connected to the external high-pressure gas. The air cavity is inflated through the air inlet pipe, and the piston rod moves upward using the air pressure. At the same time, the gas will enter the airbag through the gas channel. The inflation of the airbag will squeeze the force-bearing surface, thereby using the squeezing force to flip the rotating block upward, thereby turning up the baffle, and finally pushing the wafer basket out of the discharge hole. When removing the wafer basket, the baffle will still prevent the wafers from slipping, and then put them back in the next group of wafer baskets for inspection.

[0029] In summary, the present invention mainly has the following beneficial effects:

[0030] 1. The present invention arranges the visual inspection mechanism and the feeding and discharging mechanism on a common positioning frame, and also makes changes to the wafer basket. The visual inspection mechanism and the feeding and discharging mechanism are vertically lifted and lowered together through the positioning frame, and then cooperate with the linear motion of the feeding and discharging mechanism to perform visual inspection on each layer of wafers in the wafer basket. The vertical lifting inspection method has a short movement stroke, a small movement range, and a short intermediate consumption time, which further improves the efficiency of wafer inspection. Moreover, the inspection mechanism and the feeding and discharging mechanism are always at the same height, and there is no need to additionally adjust the height of the visual inspection mechanism.

[0031] 2. When placing the wafer basket, the present invention will have two baffles to block the opening of the wafer basket to prevent the wafers from slipping out due to deflection. Then the wafer will be lowered to the detection position through the piston column. During the descending process, the baffle will flip down. After the detection of each layer of wafers is completed, the piston column will drive the wafer basket to rise again, and the baffle will also flip up to prevent the wafers from slipping out when placing the wafer basket. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0033] Figure 2 It is a schematic diagram of the internal structure of the present invention;

[0034] Figure 3 This is a schematic diagram of the structure of the main functional components of the present invention;

[0035] Figure 4 It is a schematic diagram of the structure of the gas cylinder and the wafer basket of the present invention;

[0036] Figure 5 For the present invention Figure 4 Another perspective of the picture;

[0037] Figure 6 It is a structural schematic diagram of the gas cylinder of the present invention;

[0038] Figure 7 For the present invention Figure 6 A cross-sectional view of

[0039] Figure 8 For the present invention Figure 7 A magnified view of middle;

[0040] Fig. 9 It is a schematic diagram of the structure of the wafer basket of the present invention;

[0041] Fig.10 For the present invention Fig. 9 Another perspective of the picture.

[0042] In the figure: 1. workbench; 2. outer cover; 3. material hole; 4. screw; 5. positioning frame; 6. cylinder; 7. material transport plate; 8. horizontal screw; 9. horizontal slider; 10. longitudinal screw; 11. longitudinal slider; 12. visual inspection camera; 13. air cylinder; 14. air cavity; 15. air valve; 16. air inlet pipe; 17. piston column; 18. air groove; 19. top plate; 20. movable groove; 21. rotating shaft; 22. rotating block; 23. baffle; 24. block; 25. air bag; 26. gas channel; 27. wafer basket; 28. storage cavity; 29. ​​slot; 30. slot; 31. limit groove; 32. limit block; 33. force surface. DETAILED DESCRIPTION

[0043] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0044] The following describes an embodiment of the present invention based on its overall structure.

[0045] A wafer visual inspection device, such as Figure 1-10 As shown: it includes a workbench 1, an outer cover 2 is arranged on the top of the workbench 1, and a material hole 3 for a wafer basket 27 to be placed is arranged on the top of the outer cover 2. A positioning frame 5 is connected to the upper part of the workbench 1 inside the outer cover 2 through a lifting mechanism. A visual inspection mechanism is arranged at one end of the inner side of the positioning frame 5, and a material inlet and outlet mechanism is arranged at the other end of the inner side of the positioning frame 5. When in use, the wafer basket 27 is placed into the inner part of the outer cover 2 through the material hole 3, and the positioning frame 5 is driven to move up and down by the lifting mechanism. Then, each layer of wafers in the wafer basket 27 is sent to the visual inspection mechanism for inspection by the material inlet and outlet mechanism. A storage cavity 28 is arranged inside the wafer basket 27, and a plurality of slots 29 distributed up and down are opened on the inner wall of the storage cavity 28. Wafers are placed in the slots 29 of each layer, and the opening size of the slots 29 is larger than the thickness of the wafers, so that the wafers also have space to move up and down in the slots 29. The outer side of the wafer basket 27 is located below each layer of the slots 29 and is provided with slots 30 for the movement of the material inlet and outlet mechanism.

[0046] Specifically, an air cylinder 13 is fixed inside the workbench 1, an air cavity 14 is provided inside the air cylinder 13, and a piston column 17 is movably provided inside the air cavity 14, a gap is left between the bottom of the piston column 17 and the inner bottom of the air cylinder 13, and an air inlet pipe 16 connected with the gap is provided on the outside of the air cylinder 13, an air valve 15 is provided at the bottom of the air cylinder 13, the piston column 17 movably passes through the top of the air cylinder 13 and is fixed with a top plate 19, when the piston column 17 is retracted inside the air cylinder 13, the top plate 19 is flush with the workbench 1, a wafer basket 27 is placed on the top of the top plate 19, and the opening side of the wafer basket 27 faces the baffle 23.

[0047] In the initial state, the piston column 17 pushes the top plate 19 to the position of the material hole 3, and the baffle 23 is also in an upright state. The wafer basket 27 is placed on the top plate 19 through the material hole 3. A limit block 32 is provided on the top of the top plate 19, and a limit groove 31 cooperating with the limit block 32 is provided at the bottom of the wafer basket 27. The limit block 32 is inserted into the limit groove 31 to ensure that the wafer basket 27 is placed stably. The baffle 23 resists the opening part of the wafer basket 27 to prevent the wafer from slipping out, and then the air valve 15 is controlled to open, and the air cavity 14 is deflated, so that the piston column 17 moves downward, thereby dragging the wafer basket 27 downward to a specified position through the top plate 19.

[0048] An air groove 18 is provided inside the piston column 17, and the top of the air groove 18 is closed. Movable grooves 20 are provided at the two corners on one side of the top plate 19, and the insides of the two movable grooves 20 are both rotatably connected to a rotating block 22 through a rotating shaft 21. The top of the rotating block 22 is connected to a baffle 23, and the bottom end of the rotating block 22 is provided with a force surface 33. An air bag 25 is provided on the inner side of the movable groove 20, and when the air bag 25 bulges, it will squeeze the force surface 33 to drive the rotating block 22 to flip upward around the rotating shaft 21. A gas channel 26 connecting the air bag 25 and the air groove 18 is also provided inside the piston column 17.

[0049] When the air valve 15 is opened, the gas inside the airbag 25 will also be discharged through the gas channel 26 and the air groove 18, and the airbag 25 will lose the squeezing support on the force-bearing surface 33. Since the lengths of one end of the baffle 23 located on both sides of the rotating block 22 are asymmetrical, and the outer length is greater than the inner length, the baffle 23 will fall down and flip outward due to eccentric gravity. A baffle 24 that cooperates with the material hole 3 is also provided on the top of the baffle 23. Only when the wafer basket 27 drops to a certain distance, the baffle 24 is separated from the material hole 3, and the baffle 23 will not be blocked from falling down. After the baffle 23 is down, it will no longer block the opening of the wafer basket 27. In addition, since the gas channel 26 has a small diameter, the gas in the airbag 25 will not be released all at once. The slow release of the gas in the airbag 25 can also buffer the fall of the baffle 23.

[0050] The lifting mechanism includes four screws 4 rotatably connected to the top of the workbench 1, and the four screws 4 are all threadedly connected to the four corners of the positioning frame 5, and a motor for driving the screws 4 to rotate is installed inside the workbench 1; the visual inspection mechanism includes two transverse screws 8 rotatably connected to the inner side of the positioning frame 5, and a transverse slider 9 is slidably connected to the inner side of the positioning frame 5 through thread cooperation with the transverse screw 8, two longitudinal screws 10 are rotatably connected between the two transverse sliders 9, and a longitudinal slider 11 is slidably connected through the thread cooperation of the longitudinal screw 10, a visual inspection camera 12 is installed at the bottom of the longitudinal slider 11, and motors for driving the transverse screws 8 and the longitudinal screw 10 to rotate are installed on the outer side of the positioning frame 5; the feeding and discharging mechanism includes a cylinder 6 fixed on the positioning frame 5, and the output end of the cylinder 6 is connected to a material transport plate 7, and the output shaft of the cylinder 6 and the material transport plate 7 can extend into the slot 30.

[0051] After the wafer basket 27 is placed in the designated position, the screw 4 drives the positioning frame 5 to descend to the position of the first layer of wafers. At this time, the cylinder 6 drives the transport plate 7 to extend, so that the transport plate 7 passes through the slot 30 below the first layer of wafers and stays there. Then the screw 4 drives the positioning frame 5 to move upward for a short distance, thereby driving the cylinder 6 and the transport plate 7 to move upward for a short distance, so that the wafer is lifted by the transport plate 7. Then the cylinder 6 continues to drive the transport plate 7 to move forward, dragging the wafer out of the slot 29 and sending it to the visual inspection camera. 12, and then use the transverse screw rod 8 and the longitudinal screw rod 10 to drive the visual inspection camera 12 to move, so that the surface of the wafer is inspected by the visual inspection camera 12. After the inspection is completed, the visual inspection camera 12 is reset, and the cylinder 6 drives the transport plate 7 to be recovered into the corresponding slot 30, and the wafer is reinserted into the slot 29, and then the positioning frame 5 is lowered, so that the wafer continues to be placed in the slot 29, and then the transport plate 7 is controlled to exit the slot 30, and the above steps are repeated to inspect each layer of wafers.

[0052] When all the wafers in the wafer basket have been inspected, the air valve 15 can be controlled to close, and the air inlet pipe 16 is connected to the external high-pressure gas. The air is inflated into the air cavity 14 through the air inlet pipe 16, and the piston rod 17 moves upward by the air pressure. At the same time, the gas will enter the air bag 25 through the gas channel 26. The inflation of the air bag 25 will squeeze the force-bearing surface 33, so that the rotating block 22 is turned upward by the squeezing force, and then the baffle 23 is turned up, and finally the wafer basket 27 will be pushed out of the discharge hole 3. When the wafer basket 27 is removed, the baffle 23 will still prevent the wafers from sliding, and then the next group of wafer baskets 27 can be put back in for inspection.

[0053] It should be noted that after a group of wafer baskets 27 are inspected, the positioning frame 5 may or may not be reset. After being reset, the next group of wafer baskets 27 will continue to be inspected from top to bottom. If not reset, the next group of wafer baskets 27 can be directly inspected from the other end.

[0054] Although an embodiment of the present invention has been shown and described, this specific embodiment is merely an explanation of the present invention and is not a limitation of the invention. The specific features, structures, materials or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. After reading this specification, those skilled in the art may make modifications, substitutions and variations to the embodiments without creative contributions as needed without departing from the principles and purpose of the present invention. However, as long as they are within the scope of the claims of the present invention, they are protected by patent law.

Claims

1. A wafer visual inspection device, comprising a workbench (1), characterized in that: A positioning frame (5) is connected above the workbench (1) via a lifting mechanism, a visual inspection mechanism is provided at one end of the inner side of the positioning frame (5), and a material feeding and discharging mechanism is provided at the other end of the inner side of the positioning frame (5); An air cylinder (13) is fixed inside the workbench (1), an air cavity (14) is arranged inside the air cylinder (13), and a piston column (17) is movably arranged inside the air cavity (14), a gap is left between the bottom of the piston column (17) and the inner bottom of the air cylinder (13), and an air inlet pipe (16) connected to the gap is arranged on the outside of the air cylinder (13), an air valve (15) is arranged at the bottom of the air cylinder (13), the piston column (17) movably passes through the top of the air cylinder (13) and is fixed with a top plate (19), and the piston column When (17) is retracted inside the air cylinder (13), the top plate (19) is flush with the workbench (1), the piston column (17) is provided with an air groove (18) inside, and the top of the air groove (18) is closed, and movable grooves (20) are provided at two corners on one side of the top plate (19), and the insides of the two movable grooves (20) are rotatably connected to a rotating block (22) through a rotating shaft (21), and the top of the rotating block (22) is connected to a baffle (23), and one end of the baffle (23) is located on both sides of the rotating block (22) and the length is asymmetrical, and the outer The side length is greater than the inner length, the bottom end of the rotating block (22) is provided with a force-bearing surface (33), the inner side of the movable groove (20) is provided with an air bag (25), and when the air bag (25) swells, it will squeeze the force-bearing surface (33) to drive the rotating block (22) to turn upward around the rotating shaft (21), and the interior of the piston column (17) is also provided with a gas channel (26) connecting the air bag (25) and the gas groove (18), and a wafer basket (27) is placed on the top of the top plate (19), and the opening side of the wafer basket (27) faces the baffle plate (23 ), a storage cavity (28) is arranged inside the wafer basket (27), a plurality of slots (29) distributed up and down are arranged on the inner wall of the storage cavity (28), the outer side of the wafer basket (27) is provided with slots (30) for movement of a material inlet and outlet mechanism below each layer of slots (29), the top of the workbench (1) is also provided with an outer cover (2), the top of the outer cover (2) is provided with a material hole (3) for the wafer basket (27) to be placed, and the top of the baffle (23) is also provided with a stopper (24) cooperating with the material hole (3).

2. A wafer visual inspection device according to claim 1, characterized in that: The lifting mechanism comprises four screw rods (4) rotatably connected to the top of the workbench (1), and the four screw rods (4) are all threadedly connected to the four corners of the positioning frame (5), and a motor for driving the screw rods (4) to rotate is installed inside the workbench (1).

3. The wafer visual inspection device according to claim 1, characterized in that: The visual inspection mechanism comprises two transverse screw rods (8) rotatably connected to the inner side of the positioning frame (5), and a transverse slider (9) is slidably connected to the inner side of the positioning frame (5) through threaded cooperation with the transverse screw rods (8), two longitudinal screw rods (10) are rotatably connected between the two transverse sliders (9), and a longitudinal slider (11) is slidably connected to the longitudinal screw rods (10) through threaded cooperation, a visual inspection camera (12) is installed at the bottom of the longitudinal slider (11), and motors are installed on the outer side of the positioning frame (5) for driving the transverse screw rods (8) and the longitudinal screw rods (10) to rotate respectively.

4. The wafer visual inspection device according to claim 1, characterized in that: The material feeding and discharging mechanism comprises a cylinder (6) fixed on a positioning frame (5); the output end of the cylinder (6) is connected to a material transporting plate (7); the output shaft of the cylinder (6) and the material transporting plate (7) can extend into the slot (30).

5. The wafer visual inspection device according to claim 1, characterized in that: A limiting block (32) is arranged on the top of the top plate (19), and a limiting groove (31) cooperating with the limiting block (32) is arranged on the bottom of the wafer basket (27).

6. A wafer visual inspection method, using the wafer visual inspection device according to any one of claims 1 to 5, characterized in that: Here are the steps: Step 1: Place the wafer basket (27) onto the top plate (19) through the material hole (3), insert the limit block (32) into the limit groove (31), and use the baffle (23) to block the opening of the wafer basket (27) to prevent the wafer from slipping out. Then, the air valve (15) is controlled to open, and the air in the air cavity (14) is degassed, so that the piston column (17) moves downward, thereby dragging the wafer basket (27) downward to a specified position through the top plate (19), and the baffle (23) is also turned over and fallen down; Step 2: The screw (4) drives the positioning frame (5) down to the position of the first layer of wafers. At this time, the cylinder (6) drives the transport plate (7) to extend, so that the transport plate (7) passes through the slot (30) below the first layer of wafers and stays there. Then the screw (4) drives the positioning frame (5) to move upward a short distance, thereby driving the cylinder (6) and the transport plate (7) to move upward a short distance, thereby lifting the wafer through the transport plate (7). Then the cylinder (6) continues to drive the transport plate (7) to move forward, dragging the wafer out of the slot (29) and sending it to the visual inspection camera (12). Below, the transverse screw rod (8) and the longitudinal screw rod (10) are then used to drive the visual inspection camera (12) to move, so that the surface of the wafer is inspected by the visual inspection camera (12). After the inspection is completed, the visual inspection camera (12) is reset, and the cylinder (6) drives the material transport plate (7) to be recovered into the corresponding slot (30), and the wafer is reinserted into the slot (29), and then the positioning frame (5) is lowered, so that the wafer continues to be placed in the slot (29), and then the material transport plate (7) is controlled to exit the slot (30), and the above steps are repeated to inspect each layer of wafers; Step 3: When all the wafers in the wafer basket have been inspected, the air valve (15) can be controlled to close, and the air inlet pipe (16) is connected to the external high-pressure gas, and the air cavity (14) is inflated through the air inlet pipe (16). The piston rod (17) moves upward by the air pressure, and the gas also enters the air bag (25) through the gas channel (26). The inflation of the air bag (25) will squeeze the force-bearing surface (33), so that the rotating block (22) is turned upward by the squeezing force, and then the baffle (23) is turned up, and finally the wafer basket (27) is pushed out of the material hole (3). When the wafer basket (27) is removed, the baffle (23) will still prevent the wafers from sliding, and then the next group of wafer baskets (27) are put back in for inspection.

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