Vacuum coating room

Abstract

The present invention discloses a vacuum coating chamber, including a coating chamber for accommodating products, wherein more than one cathode device is installed in the coating chamber, at least one cathode device is provided with a shielding device, the shielding device comprises two baffle mechanisms arranged on both sides of the cathode device, the baffle mechanism comprises a baffle plate and a baffle driving assembly, the baffle driving assembly is connected to the baffle plate and can drive the baffle plate to move to adjust the distance between the baffle plate and the product in the coating chamber, the baffle plates of the two baffle mechanisms and the inner wall of the coating chamber form a concave cavity with an opening facing the product in the coating chamber, and the cathode device is located in the concave cavity. The vacuum coating chamber has the advantages of improving coating quality, good flexibility in use, simple and compact structure, low cost, easy manufacture and assembly, and simple control.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum coating, and in particular to a vacuum coating chamber. Background Art

[0002] The vacuum coating chamber is an important equipment required for vacuum coating of products. In existing vacuum coating production lines, the vacuum coating chamber generally includes a coating chamber for accommodating products and forming a vacuum coating environment. The coating chamber has an entrance and exit for products to enter and exit. The coating chamber is equipped with a cathode device for coating, a process gas introduction device and other functional devices.

[0003] The cathode devices in the existing vacuum coating chambers are all arranged in an open and exposed manner in the coating chamber. During the actual working process, each cathode device is easily contaminated and affected by other functional devices. For example, when multiple cathode devices are arranged in the coating chamber, the coating material generated by each cathode device during the coating operation will sputter to the coating working area of ​​other cathode devices or sputter to other cathode devices, thereby affecting the coating quality; when process gas needs to be introduced during the coating process, the coating operation of the cathode device will be affected by the airflow generated by the other process, thereby affecting the coating quality; the cathode device is exposed in the coating chamber, and is easily contaminated by other environmental substances in the coating chamber whether in the working state or the non-working state, which will also affect the coating quality. Summary of the invention

[0004] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a vacuum coating chamber which can improve coating quality, has good flexibility in use, is simple and compact in structure, has low cost, is easy to manufacture and assemble, and is simple to control.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0006] A vacuum coating chamber comprises a coating chamber for accommodating products, wherein at least one cathode device is installed in the coating chamber, and at least one cathode device is provided with a shielding device, wherein the shielding device comprises two blocking mechanisms respectively arranged on both sides of the cathode device, wherein the blocking mechanism comprises a partition and a blocking drive assembly, wherein the blocking drive assembly is connected to the partition and can drive the partition to move so as to adjust the distance between the partition and the product in the coating chamber, wherein the partitions of the two blocking mechanisms and the inner wall of the coating chamber form a concave cavity with an opening facing the product in the coating chamber, and the cathode device is located in the concave cavity.

[0007] As a further improvement of the above technical solution:

[0008] A base is provided on the inner wall of the coating chamber corresponding to each partition, and the base is provided with a plug-in hole. The partition is inserted into the plug-in hole of the corresponding base. The partition drive assembly includes a telescopic drive component, which is connected to the partition and drives the partition to reciprocate to adjust the depth of the insertion hole to adjust the distance between the partition and the product in the coating chamber.

[0009] The coating chamber is provided with a plurality of cathode devices arranged in sequence around the product in the coating chamber, both sides of any cathode device are provided with the blocking mechanism, and only one blocking mechanism is provided between two adjacent cathode devices.

[0010] The shielding device also includes a closing component for cooperating with the partition to close the opening of the cavity.

[0011] The closing assembly includes a baffle and a driving mechanism, wherein the driving mechanism is connected to the baffle and can drive the baffle to move around the product in the coating chamber to a position facing the concave cavity. When the baffles of the two baffle mechanisms on both sides of the concave cavity move close to the product in the coating chamber, they contact the baffle that moves to a position facing the concave cavity to close the opening of the concave cavity.

[0012] The driving assembly comprises a rotating seat rotatably installed in the coating chamber around a vertical axis and a rotating driving mechanism driving the rotating seat to rotate, and the baffle is connected and installed on the rotating seat.

[0013] Compared with the prior art, the advantages of the present invention are:

[0014] In the vacuum coating chamber of the present invention, the cathode device in the coating chamber is provided with a shielding device. When the cathode device is working, the shielding device can partially shield the cathode device as needed, so as to reduce the coating material generated when the cathode device is working from sputtering to the coating working area of ​​other cathode devices or sputtering to other cathode devices, reduce the influence of the cathode device on the coating work of the cathode device by other cathode devices and other functional devices, reduce the influence of the airflow generated when the process gas is introduced during the coating work on the coating work of the cathode device, and improve the coating quality. When the cathode device is not working, the shielding device can also partially shield the cathode device, so as to reduce the pollution of the cathode device by other environmental substances in the coating chamber, which is also conducive to improving the coating quality. The shielding device of the vacuum coating chamber can choose whether to partially shield the cathode device and the shielding degree according to the needs, and has good flexibility in use. In addition, the shielding device only needs to set a partition and a partition drive assembly, which has the advantages of simple and compact structure, low cost, easy to manufacture and assemble, and simple control. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the top cross-sectional structure of the vacuum coating chamber in Example 1.

[0016] Figure 2 It is a schematic diagram of a partial top-sectional structure of the vacuum coating chamber in Example 1.

[0017] Figure 3 This is a schematic diagram of the top cross-sectional structure of the vacuum coating chamber in Example 2.

[0018] Legend:

[0019] 1. Coating chamber; 11. Base; 2. Cathode device; 3. Partition; 30. Concave cavity; 4. Partition drive assembly; 5. Baffle; 6. Rotating seat; 7. Rotating drive mechanism; 100. Product. DETAILED DESCRIPTION

[0020] The present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] Embodiment 1:

[0022] like Figure 1 and Figure 2 As shown, the vacuum coating chamber of this embodiment includes a coating chamber 1 for accommodating a product 100, wherein at least one cathode device 2 is installed in the coating chamber 1, and at least one cathode device 2 is provided with a shielding device, which includes two blocking mechanisms respectively arranged on both sides of the cathode device 2, and the blocking mechanism includes a partition 3 and a blocking drive assembly 4, and the blocking drive assembly 4 is connected to the partition 3 and can drive the partition 3 to move to adjust the distance between the partition 3 and the product 100 in the coating chamber 1, and the product 100 is a rotating hub on which a workpiece to be coated is mounted, and the partitions 3 of the two blocking mechanisms and the inner wall of the coating chamber 1 form a concave cavity 30 with an opening facing the product 100 in the coating chamber 1, and the cathode device 2 is located in the concave cavity 30. When the barrier driving assembly 4 drives the partition 3 to move to reduce the distance between the partition 3 and the product 100 in the coating chamber 1, the gap between the partition 3 and the product 100 in the coating chamber 1 is small, that is, the gap between the opening end of the cavity 30 and the product 100 in the coating chamber 1 is small, which can partially block the cathode device 2 in the cavity 30; when the barrier driving assembly 4 drives the partition 3 to move to increase the distance between the partition 3 and the product 100 in the coating chamber 1, the gap between the partition 3 and the product 100 in the coating chamber 1 is large, that is, the gap between the opening end of the cavity 30 and the product 100 in the coating chamber 1 is large, which can reduce the blocking of the cathode device 2, or not block the cathode device 2.

[0023] In the vacuum coating chamber, the cathode device 2 in the coating chamber 1 is provided with a shielding device. When the cathode device 2 is working, the shielding device can partially shield the cathode device 2 as needed, so as to reduce the coating material generated when the cathode device 2 is working from being sputtered to the coating working area of ​​other cathode devices 2 or sputtered to other cathode devices 2, reduce the influence of the cathode device 2 on the coating working area of ​​other cathode devices 2 or other cathode devices 2, reduce the influence of the airflow generated when the process gas is introduced during the coating work on the coating work of the cathode device 2, and improve the coating quality. When the cathode device 2 is not working, the shielding device can also partially shield the cathode device 2, reduce the pollution of the cathode device 2 by other environmental substances in the coating chamber 1, which is also conducive to improving the coating quality. The shielding device of the vacuum coating chamber can choose whether to partially shield the cathode device 2 and the shielding degree as needed, and has good flexibility in use. In addition, the shielding device only needs to be provided with a partition 3 and a partition drive assembly 4, which has the advantages of simple and compact structure, low cost, easy manufacture and assembly, and simple control.

[0024] In this embodiment, a base 11 is provided on the inner wall of the coating chamber 1 corresponding to each partition 3, and the base 11 is provided with a plug-in hole. The partition 3 is inserted into the plug-in hole of the corresponding base 11, and the barrier drive assembly 4 includes a telescopic drive member, which is connected to the partition 3 and drives the partition 3 to reciprocate to adjust the depth of the insertion hole to adjust the distance between the partition 3 and the product 100 in the coating chamber 1. The partition 3 and the base 11 constitute an integral structure located on the side of the cathode device 2, extending from the inner wall of the coating chamber 1 to the product 100 in the coating chamber 1, thereby shielding the cathode device 2. The installation structure and drive structure of this type of partition 3 have the advantages of simple and compact structure, low cost, and stable and reliable operation. Preferably, the telescopic drive member adopts a telescopic cylinder.

[0025] In this embodiment, a plurality of cathode devices 2 are installed in the coating chamber 1, and the plurality of cathode devices 2 are arranged in sequence around the product 100 in the coating chamber 1. Both sides of any cathode device 2 are provided with a barrier mechanism, and only one barrier mechanism is provided between two adjacent cathode devices 2. That is, a plurality of barrier mechanisms are arranged in sequence and spaced apart around the product 100 in the coating chamber 1, and any two adjacent barrier mechanisms form an installation space, and a cathode device 2 is installed in each installation space. This structural form can meet the requirement of arranging a plurality of cathode devices 2 in the coating chamber 1, and can reduce the number of barrier mechanisms to be provided, thereby reducing costs.

[0026] Embodiment 2:

[0027] like Figure 3As shown, the vacuum coating chamber of this embodiment is based on the embodiment 1, and the shielding device also includes a sealing component for cooperating with the baffle 3 to seal the opening of the cavity 30. The sealing component includes a baffle 5 and a driving mechanism. The driving mechanism is connected to the baffle 5 and can drive the baffle 5 to move around the product 100 in the coating chamber 1 to a position facing the cavity 30. When the baffles 3 of the two baffle mechanisms on both sides of the cavity 30 move close to the product 100 in the coating chamber 1, they contact the baffle 5 that moves to the position facing the cavity 30 to seal the opening of the cavity 30. The sealing component can be set to seal the opening of the cavity 30 as needed, which is equivalent to completely sealing the gap between the baffle 5 and the product 100, thereby improving the shielding effect. When the cathode device 2 needs to be shielded, the baffle 5 is first driven by the driving mechanism to move to a position facing the cavity 30, and then the baffle driving component 4 drives the baffle 3 to move close to the product 100 in the coating chamber 1 until it contacts the baffle 5, and the baffle 5 can seal the opening of the cavity 30. When there is no need to shield the cathode device 2, the baffle 5 can be driven by the driving mechanism to move to other suitable positions that are not directly facing the cavity 30, so as to avoid affecting the normal coating operation.

[0028] In this embodiment, the driving assembly includes a rotating seat 6 rotatably installed in the coating chamber 1 around a vertical axis and a rotating driving mechanism 7 driving the rotating seat 6 to rotate, and the baffle 5 is connected and installed on the rotating seat 6. The rotating driving mechanism 7 drives the rotating seat 6 to rotate, and the rotating seat 6 can move around the product 100 in the coating chamber 1 with the baffle 5. The driving assembly has a simple structure, is easy to manufacture and assemble, and is convenient to control.

[0029] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. For those skilled in the art, improvements and changes obtained without departing from the technical concept of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A vacuum coating chamber, comprising a coating chamber (1) for accommodating a product (100), wherein one or more cathode devices (2) are installed in the coating chamber (1), characterized in that: At least one of the cathode devices (2) is provided with a shielding device, the shielding device comprising two shielding mechanisms respectively arranged on both sides of the cathode device (2), the shielding mechanism comprising a baffle (3) and a shielding drive assembly (4), the shielding drive assembly (4) being connected to the baffle (3) and capable of driving the baffle (3) to move so as to adjust the distance between the baffle (3) and the product (100) in the coating chamber (1), the baffles (3) of the two shielding mechanisms and the inner wall of the coating chamber (1) forming a concave cavity (30) with an opening facing the product (100) in the coating chamber (1), and the cathode device (2) being located in the concave cavity (30); The shielding device also includes a sealing component for cooperating with the partition (3) to seal the opening of the cavity (30); the sealing component includes a baffle (5) and a driving mechanism, the driving mechanism is connected to the baffle (5) and can drive the baffle (5) to move around the product (100) in the coating chamber (1) to a position facing the cavity (30), and when the baffles (3) of the two blocking mechanisms on both sides of the cavity (30) move close to the product (100) in the coating chamber (1), they contact the baffle (5) moved to a position facing the cavity (30) to seal the opening of the cavity (30).

2. The vacuum coating chamber according to claim 1, characterized in that: A base (11) is provided on the inner wall of the coating chamber (1) corresponding to each partition (3), and the base (11) is provided with a plug-in hole. The partition (3) is inserted into the plug-in hole of the corresponding base (11). The barrier drive assembly (4) includes a telescopic drive member, which is connected to the partition (3) and drives the partition (3) to reciprocate to adjust the depth of the insertion hole so as to adjust the distance between the partition (3) and the product (100) in the coating chamber (1).

3. The vacuum coating chamber according to claim 1, characterized in that: The coating chamber (1) is provided with a plurality of cathode devices (2) arranged in sequence around the product (100) in the coating chamber (1), and the barrier mechanism is provided on both sides of any cathode device (2), and only one barrier mechanism is provided between two adjacent cathode devices (2).

4. The vacuum coating chamber according to any one of claims 1 to 3, characterized in that: The driving assembly comprises a rotating seat (6) rotatably mounted about a vertical axis in a coating chamber (1) and a rotating driving mechanism (7) driving the rotating seat (6) to rotate, and the baffle (5) is connected and mounted on the rotating seat (6).

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