Exposure machine with suction cup mechanism
By designing the suction cup mechanism and flip mechanism in the exposure machine, the self-flipping and precise position control of the double-sided circuit board are achieved, which solves the problem of only single plane processing in the prior art, and improves the exposure efficiency and accuracy.
Patent Information
- Application Number
- CN202411277583.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-12
- Publication Date
- 2025-02-14
- Estimated Expiration
- 2044-09-12
AI Technical Summary
Existing exposure machines can only process a single plane. If the double-sided circuit board is processed, it requires adding a flip device, which increases the footprint and reduces production efficiency.
An exposure machine with a suction cup mechanism is designed, and the circuit board is turned horizontally in the exposure machine through the flip mechanism, and the circuit board is adsorbed and placed through the suction cup mechanism to realize the self-flipping and precise position control of the circuit board.
It realizes efficient processing of double-sided circuit boards, improves exposure efficiency, avoids the impact of ambient light on circuit board exposure, and reduces damage to the exposure film through the suction cup mechanism, and improves exposure accuracy.
Smart Images

Figure CN118778379B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the field of circuit printing, and in particular to an exposure machine with a suction cup mechanism. Background Art
[0002] As a key equipment in the modern electronic manufacturing industry, the exposure machine is responsible for the important task of accurately transferring fine patterns to the substrate. Its performance directly determines the accuracy of the circuit pattern and the performance of the chip. At the same time, it improves production efficiency and product consistency through an efficient and precise exposure process, promotes technological progress and cost reduction in the semiconductor and related industries, and plays an irreplaceable role in the development of the entire electronic industry chain.
[0003] Existing exposure machines use extreme ultraviolet lamps to emit ultraviolet light to cause chemical changes in the exposure film on the circuit board, so that the circuits on the circuit board can be retained during etching. However, existing exposure machines can generally only process a single plane. If double-sided circuit boards are to be processed, a flipping device needs to be added between two exposure machines. This method not only increases the floor space, but the exposure machine also needs to wait for the flipped circuit board to be transported in by the conveyor belt before it can continue to work normally, reducing production efficiency. Summary of the invention
[0004] In order to overcome the shortcoming that an exposure machine can only illuminate a single plane of a circuit board, an exposure machine with a suction cup mechanism that can automatically flip the circuit board is provided.
[0005] The technical solution of the present invention is: an exposure machine with a suction cup mechanism, including a shell, an extreme purple lamp is installed on the top of the shell, an exposure template is fixedly connected to one side of the shell, the exposure template is located directly below the extreme purple lamp, a feed port and a discharge port are respectively opened on both sides of the shell, and a conveyor belt is installed on the feed port and the discharge port, an exposure platform is fixedly connected to one side of the shell, a moving mechanism is fixedly connected to the bottom of the inner side of the shell, a first vertical plate and a second vertical plate are installed on the moving mechanism, and a flipping mechanism is also included, the flipping mechanism includes a second motor, the second motor is fixedly installed on the first vertical plate, and the output of the second motor The shaft is rotatably connected to a second screw rod, one end of the second screw rod is rotatably connected to the second vertical plate, the second screw rod is threadedly connected to a second threaded sleeve, a mounting plate is fixedly connected to the second threaded sleeve, a sliding shell is slidably connected to the mounting plate, a first sliding groove is provided on the sliding shell, a positioning shaft is slidably connected in the first sliding groove of the sliding shell, one end of the positioning shaft is rotatably connected to the mounting plate, a gear is rotatably connected to the positioning shaft, a rack is fixedly connected to the inner side of the sliding shell, the rack meshes with the gear, elastic ratchet pieces are circumferentially fixedly connected to the positioning shaft, a columnar ratchet groove is provided in the gear, and the elastic ratchet piece cooperates with the columnar ratchet groove.
[0006] Preferably, the flipping mechanism also includes an L-shaped support frame, which is symmetrically distributed and fixed on both sides of the sliding shell, a sliding rod is fixed on one side of the L-shaped support frame, a support plate is symmetrically distributed and fixed between the first vertical plate and the second vertical plate, a Z-shaped groove is opened on the support plate, and the sliding rod is slidably connected to the Z-shaped groove.
[0007] Preferably, the flipping mechanism also includes a second polished rod, which is rotatably connected to the first vertical plate, one end of the second polished rod is rotatably connected to the second vertical plate, the outer wall of the second polished rod is slidably connected to a second column sleeve, and the second column sleeve is fixedly connected to the mounting plate.
[0008] Preferably, a suction cup mechanism is also included, which includes an air column, the air column is fixedly connected to the positioning shaft, one side of the air column is slidably connected to a first air cylinder, and a first compression spring is connected between the air column and the first air cylinder.
[0009] Preferably, the suction cup mechanism also includes an L-shaped rotating frame, one end of the first air cylinder is fixedly connected to the L-shaped rotating frame, one end of the L-shaped rotating frame is fixedly connected to a telescopic cylinder, a telescopic rod is sealed and slidably connected inside the telescopic cylinder, a first air vent is opened on the top of the first air cylinder, a second air vent is opened on one side of the telescopic cylinder, and the first air hole of the first air cylinder is connected to the second air hole of the telescopic cylinder through a first hose.
[0010] Preferably, the suction cup mechanism also includes an angular gear disk, an angular gear disk is fixedly connected to the bottom end of the telescopic rod, the angular gear disk is provided with circumferentially distributed triangular teeth, a triangular groove is provided between two adjacent triangular teeth, the outer wall of the telescopic rod is slidably connected to a second air cylinder, a plurality of ratchet blocks are circumferentially distributed and fixedly connected inside the second air cylinder, the angular gear disk is slidably connected to the ratchet block, the second air cylinder is slidably connected to the ratchet disk, a plurality of second sliding grooves are circumferentially distributed on the ratchet disk, a group of narrow ratchet teeth and wide ratchet teeth are provided on the left and right sides of the second sliding groove, a single narrow ratchet tooth and a single wide ratchet tooth form a group, the narrow ratchet teeth in each group are fixedly connected to the wide ratchet teeth, each group of narrow ratchet teeth and wide ratchet teeth are fixedly connected to the ratchet disk, a ratchet angle groove is provided between the top of each group of narrow ratchet teeth and wide ratchet teeth, the width of the second sliding groove is the same as that of the ratchet block, and a second compression spring is rotatably connected between the second air cylinder and the ratchet disk.
[0011] Preferably, the suction cup mechanism also includes a positioning frame, the positioning frame is fixedly connected to the bottom of the second air cylinder, a plurality of suction cup shells are rectangularly distributed and slidably connected to the positioning frame, a soft rubber suction cup is fixed to the bottom of the suction cup shell, a third air hole is opened on the top of the suction cup shell, a plurality of fourth air holes are circumferentially distributed on the second air cylinder, and the third air hole of the suction cup shell is connected to the fourth air hole of the second air cylinder through a second hose.
[0012] Preferably, the suction cup mechanism further comprises a limiting ring, both ends of the suction cup shell are fixedly connected to the limiting ring, and a third compression spring is connected between the limiting ring at the bottom end of the suction cup shell and the positioning frame.
[0013] Preferably, a T-shaped shaft is further included, one end of the positioning shaft is fixedly connected to the T-shaped shaft, a hydraulic channel is opened through the exposure platform, one end of the hydraulic channel is sealed and slidably connected with a sealing plug, a fourth compression spring is connected between the sealing plug and the hydraulic channel, an airtight channel is opened in the exposure platform in a mirror distribution with respect to the hydraulic channel, the airtight channel is connected with the hydraulic channel, a fifth vent is opened at the top of the exposure platform, the fifth vent is connected with the airtight channel, a sealing slider is slidably connected in the airtight channel, the hydraulic channel is filled with hydraulic oil, and a groove for placing the T-shaped shaft is reserved on the side of the conveyor belt.
[0014] Preferably, the moving mechanism includes a first motor, which is fixedly mounted on one side of the outer shell, the output shaft of the first motor is rotatably connected to the shell, a first screw rod is fixedly connected to the output shaft of the first motor, a first threaded sleeve is threadedly connected to the first screw rod, a sliding table is fixedly connected to the top of the first threaded sleeve, a first light rod is fixedly connected to both sides of the inner shell, a first column sleeve is slidably connected to the first light rod, the top of the first column sleeve is fixedly connected to the sliding table, and the first vertical plate and the second vertical plate are both fixedly connected to the sliding table.
[0015] Beneficial effects of the present invention:
[0016] 1. The present invention controls the horizontal flipping of the circuit board in the exposure machine through a flipping mechanism, thereby avoiding the problem that the existing exposure machine can only process a single plane, improving the exposure efficiency of the exposure machine, and avoiding the problem of the circuit board being exposed to ambient light that may occur during the transmission process.
[0017] 2. The present invention uses a suction cup mechanism to absorb the circuit board, and utilizes the elastic material of the soft glue suction cup and the buffering of the third compression spring to reduce damage to the exposure film. The soft glue suction cup is absorbed at the corner of the circuit board to avoid the soft glue suction cup leaving marks on the exposure film, which may cause defects in the exposure of the circuit board.
[0018] 3. The suction cup mechanism of the present invention will absorb or place the circuit board only after it contacts the conveyor belt or the exposure platform, thereby ensuring the position accuracy of the circuit board when it is absorbed by the suction cup mechanism and improving the exposure accuracy of the exposure machine. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;
[0020] Figure 2 It is a partial cutaway schematic diagram of the three-dimensional structure of the present invention;
[0021] Figure 3 It is a partial cutaway schematic diagram of the suction cup mechanism of the present invention;
[0022] Figure 4 It is a partial cutaway schematic diagram of the sliding shell of the present invention;
[0023] Figure 5 It is a schematic diagram of the three-dimensional structure of the first screw rod of the present invention;
[0024] Figure 6 It is a partial cutaway schematic diagram of the first gas cylinder of the present invention;
[0025] Figure 7 It is a schematic diagram of the three-dimensional structure of the positioning frame of the present invention;
[0026] Figure 8 It is a partial cutaway exploded schematic diagram of the second gas cylinder of the present invention;
[0027] Fig. 9 It is a schematic diagram of the three-dimensional structure of the suction cup shell of the present invention;
[0028] Fig.10 It is a partial cutaway schematic diagram of the exposure platform of the present invention;
[0029] Fig.11 It is a schematic diagram of the three-dimensional structure of the groove of the present invention.
[0030] Figure numbers: 1-shell, 101-feed port, 102-discharge port, 2-ultraviolet lamp, 3-moving mechanism, 301-first motor, 302-first screw rod, 303-first polished rod, 304-first threaded sleeve, 305-first column sleeve, 306-sliding table, 4-first vertical plate, 5-second vertical plate, 6-flipping mechanism, 601-second motor, 602-second screw rod, 603-second polished rod, 604-second threaded sleeve, 605-second column sleeve, 606-mounting plate, 607-sliding shell, 608-positioning shaft, 609-rack, 610-gear, 611-elastic ratchet, 612-L-shaped support frame, 613-sliding rod, 614-support plate, 615-retractable ratchet, 616-retractable ratchet, 617-retractable ratchet, 618-retractable ratchet, 619-retractable ratchet, 620-retractable ratchet, 621-retractable ratchet, 622-retractable ratchet, 623-retractable ratchet, 624-retractable ratchet, 625-retractable ratchet, 626-retractable ratchet, 627-retractable ratchet, 628-retractable ratchet, 629-retractable ratchet, 630-retractable ratchet, 631-retractable ratchet, 632-retractable ratchet, 633-retractable ratchet, 634-retractable ratchet, 635-retractable ratchet, 636-retractable ratche 5-Z-shaped groove, 616-T-shaped shaft, 7-suction cup mechanism, 701-air column, 702-first air cylinder, 703-L-shaped rotating frame, 704-telescopic cylinder, 705-telescopic rod, 706-second air cylinder, 707-angle tooth plate, 7071-triangular teeth, 7072-triangular groove, 708-ratchet plate, 7081-narrow ratchet, 7082-wide ratchet, 7083-ratchet angle groove, 709-ratchet block, 710-positioning frame, 711-suction cup shell, 712-soft rubber suction cup, 713-limiting ring, 8-conveyor belt, 801-groove, 9-exposure platform, 901-hydraulic channel, 902-sealing plug, 903-airtight channel, 904-sealing slider, 10-exposure template. DETAILED DESCRIPTION
[0031] The present invention will be described in detail below in conjunction with the accompanying drawings.
[0032] Embodiment 1: An exposure machine having a suction cup mechanism, such as Figure 1-Figure 11As shown, it includes a shell 1, an extreme purple lamp 2 is installed on the top of the shell 1, an exposure template 10 is fixedly connected to one side of the shell 1, and the exposure template 10 is located directly below the extreme purple lamp 2. A feed port 101 and a discharge port 102 are respectively penetrated on both sides of the shell 1, and a conveyor belt 8 is installed on the feed port 101 and the discharge port 102. An exposure platform 9 is fixedly connected to one side of the shell 1, and an observation window is embedded in the shell 1. A moving mechanism 3 is fixedly connected to the bottom of the inner side of the shell 1, and a first vertical plate 4 and a second vertical plate 5 are installed on the moving mechanism 3, and a flipping mechanism 6 is also included. The flipping mechanism 6 includes a second motor 601, and the second motor 601 is fixedly installed on the first vertical plate 4. The output shaft of the second motor 601 is rotatably connected to a second screw rod 602, and one end of the second screw rod 602 is rotatably connected to the second vertical plate 5. A second threaded sleeve 604 is threadedly connected, a mounting plate 606 is fixedly connected to the second threaded sleeve 604, a sliding shell 607 is slidably connected to the mounting plate 606, a first sliding groove is provided on the sliding shell 607, a positioning shaft 608 is slidably connected in the first sliding groove of the sliding shell 607, the height of the positioning shaft 608 is slightly higher than the top plane of the exposure platform 9, one end of the positioning shaft 608 is rotatably connected to the mounting plate 606, a gear 610 is rotatably connected to the positioning shaft 608, a rack 609 is fixedly connected to the inner side of the sliding shell 607, the rack 609 is meshed with the gear 610, and elastic ratchet pieces 611 are circumferentially fixedly connected to the positioning shaft 608, a columnar ratchet groove is provided in the gear 610, and the elastic ratchet piece 611 cooperates with the columnar ratchet groove so that the elastic ratchet piece 611 can only rotate clockwise on the positioning shaft 608.
[0033] The flipping mechanism 6 also includes an L-shaped support frame 612, and the L-shaped support frames 612 are symmetrically distributed and fixedly connected on both sides of the sliding shell 607, and a sliding rod 613 is fixedly connected to one side of the L-shaped support frame 612. A support plate 614 is symmetrically distributed and fixedly connected between the first vertical plate 4 and the second vertical plate 5, and a Z-shaped groove 615 is opened on the support plate 614. The horizontal sliding part at the bottom of the Z-shaped groove 615 is longer than the exposure platform 9, and the sliding rod 613 is connected to the Z-shaped groove 615 in a through-type sliding manner.
[0034] The flip mechanism 6 also includes a second light rod 603, which is rotatably connected to the first vertical plate 4, one end of the second light rod 603 is rotatably connected to the second vertical plate 5, and the outer wall of the second light rod 603 is slidably connected to the second column sleeve 605, and the second column sleeve 605 is fixedly connected to the mounting plate 606.
[0035] It also includes a suction cup mechanism 7, which includes an air column 701. The air column 701 is fixedly connected to one end of the positioning shaft 608. The air column 701 is an annular stepped column. One side of the air column 701 is slidably connected to a first air cylinder 702. A first compression spring is connected between the air column 701 and the first air cylinder 702.
[0036] The suction cup mechanism 7 also includes an L-shaped rotating frame 703, one end of the first air cylinder 702 is fixedly connected to the L-shaped rotating frame 703, one end of the L-shaped rotating frame 703 is fixedly connected to a telescopic cylinder 704, a telescopic rod 705 is sealed and slidably connected inside the telescopic cylinder 704, a first air vent is opened on the top of the first air cylinder 702, a second air vent is opened on one side of the telescopic cylinder 704, and the first air vent of the first air cylinder 702 is connected to the second air vent of the telescopic cylinder 704 through a first hose.
[0037] The suction cup mechanism 7 also includes an angular toothed disc 707, the bottom end of the telescopic rod 705 is fixedly connected to the angular toothed disc 707, the angular toothed disc 707 is provided with circumferentially distributed triangular teeth 7071, and a triangular groove 7072 is provided between two adjacent triangular teeth 7071. The outer wall of the telescopic rod 705 is slidably connected to a second air cylinder 706, and four ratchet blocks 709 are circumferentially distributed and fixedly connected to the second air cylinder 706. The angular toothed disc 707 is slidably connected to the four ratchet blocks 709, and the second air cylinder 706 is slidably connected to a ratchet disc 708, and the ratchet disc 708 is provided with four second sliding grooves distributed circumferentially, and each second sliding groove is about A group of narrow ratchet teeth 7081 and wide ratchet teeth 7082 are provided on both sides, a single narrow ratchet tooth 7081 and a single wide ratchet tooth 7082 form a group, there are four groups of narrow ratchet teeth 7081 and wide ratchet teeth 7082, and the narrow ratchet teeth 7081 in each group are fixedly connected with the wide ratchet teeth 7082, each group of narrow ratchet teeth 7081 and wide ratchet teeth 7082 are fixedly connected to the ratchet plate 708, a ratchet angle groove 7083 is provided between the top of each group of narrow ratchet teeth 7081 and wide ratchet teeth 7082, the width of the second sliding groove is the same as that of the ratchet block 709, and a second compression spring is rotatably connected between the second air cylinder 706 and the ratchet plate 708.
[0038] The suction cup mechanism 7 also includes a positioning frame 710, the positioning frame 710 is fixedly connected to the bottom of the second air cylinder 706, four suction cup shells 711 are rectangularly distributed and slidably connected on the positioning frame 710, a soft rubber suction cup 712 is fixedly connected to the bottom of the suction cup shell 711, a third ventilation hole is opened on the top of the suction cup shell 711, and four fourth ventilation holes are distributed circumferentially on the second air cylinder 706. The third ventilation holes of the four suction cup shells 711 are connected to the four fourth ventilation holes of the second air cylinder 706 through a second hose.
[0039] Limiting rings 713 are fixedly connected to both ends of the suction cup housing 711 , and a third compression spring is connected between the limiting ring 713 at the bottom end of the suction cup housing 711 and the positioning frame 710 .
[0040] It also includes a T-shaped shaft 616, one end of the positioning shaft 608 is fixedly connected to the T-shaped shaft 616, a hydraulic channel 901 is opened through the exposure platform 9, one end of the hydraulic channel 901 is sealed and slidably connected with a sealing plug 902, a fourth compression spring is connected between the sealing plug 902 and the hydraulic channel 901, an airtight channel 903 is opened in the exposure platform 9 in a mirror distribution with respect to the hydraulic channel 901, the airtight channel 903 is connected to the hydraulic channel 901, a fifth vent is opened at the top of the exposure platform 9, the fifth vent is connected to the airtight channel 903, a sealing slider 904 is slidably connected in the airtight channel 903, the hydraulic channel 901 is filled with hydraulic oil, and a groove 801 for placing the T-shaped shaft 616 is reserved on the side of the conveyor belt 8.
[0041] The moving mechanism 3 includes a first motor 301, which is fixedly installed on one side of the outer side of the shell 1, and the output shaft of the first motor 301 is rotatably connected to the shell 1. A first screw rod 302 is fixedly connected to the output shaft of the first motor 301, and a first threaded sleeve 304 is threadedly connected to the first screw rod 302. A sliding table 306 is fixedly connected to the top of the first threaded sleeve 304. A first light rod 303 is fixedly connected to the inside of the shell 1, and a first column sleeve 305 is slidably connected to the first light rod 303. The top of the first column sleeve 305 is fixedly connected to the sliding table 306, and the first vertical plate 4 and the second vertical plate 5 are both fixedly connected to the sliding table 306.
[0042] In the initial state, the flip mechanism 6 is located on the side of the housing 1 close to the feed inlet 101, and the positioning frame 710 is located above the conveyor belt 8 at the feed inlet 101, the sliding rod 613 is at the bottom of the Z-shaped groove 615, and the soft rubber suction cup 712 is facing downward. The staff places the circuit board with the exposure film on the conveyor belt 8 of the feed inlet 101, and starts the conveyor belt 8 so that the conveyor belt 8 drives the circuit board into the housing 1. When the circuit board is located below the positioning frame 710, the conveyor belt 8 is stopped, and then the second motor 601 is started. The output shaft of the second motor 601 rotates to drive the second screw rod 602 to rotate synchronously. The second screw rod 602 rotates to make the second threaded sleeve 604 rotate along the axis of the second screw rod 602. The second threaded sleeve 604 moves in the central direction close to the conveyor belt 8, the second threaded sleeve 604 moves to drive the mounting plate 606 to slide synchronously, and when the mounting plate 606 slides, it drives the sliding shell 607 and the positioning shaft 608 to move, and the sliding shell 607 moves through the L-shaped support frame 612 to drive the sliding rod 613 to slide horizontally at the bottom of the Z-shaped groove 615, and the positioning shaft 608 moves to drive the air column 701 and the T-shaped shaft 616 to move synchronously, so that the flipping mechanism 6 pushes the suction cup mechanism 7 to move forward; on the one hand, the T-shaped shaft 616 slides into the groove 801 on the side of the conveyor belt 8 to prevent it from colliding with the conveyor belt 8; on the other hand, when the air column 701 moves, it drives the first air cylinder 702 to move through the first compression spring, and the first air cylinder 702 drives the L The L-shaped rotating frame 703 moves and contacts the conveyor belt 8. At this time, the first air cylinder 702 and the L-shaped rotating frame 703 are restricted by the conveyor belt 8 and remain stationary, while the positioning frame 710 is located directly above the circuit board. The second motor 601 continues to work, so that the air column 701 continues to push the first compression spring to compress the first compression spring. At the same time, the volume of the gas in the air column 701 and the first air cylinder 702 becomes smaller, and the gas inside them enters the first hose through the first vent hole, and enters the telescopic cylinder 704 through the second vent hole. The gas pressure in the telescopic cylinder 704 increases, so that the gas in the telescopic cylinder 704 pushes the telescopic rod 705 to slide downward, and the telescopic rod 705 slides downward to drive the angular gear plate 707 to move downward, and the second air cylinder 706 moves downward synchronously with the angle toothed disc 707 under the action of its own gravity, and the second air cylinder 706 moves through the positioning frame 710 to drive the suction cup shell 711 to move downward synchronously. When the suction cup shell 711 moves downward, the soft glue suction cup 712 approaches and contacts the circuit board. When the soft glue suction cup 712 moves downward and contacts the circuit board, the telescopic rod 705 continues to slide downward to make the inclined surface of one side of the triangular tooth 7071 of the angle toothed disc 707 contact the narrow ratchet 7081, and the triangular groove 7072 contacts the wide ratchet 7082. It is worth noting that in the initial state, the bottom end inclined surface of the ratchet block 709 is located at the ratchet angle groove 7083, so that the ratchet disc 708 is limited by the ratchet block 709 and cannot rotate.The angular toothed disk 707 continues to push the narrow ratchet teeth 7081 and the wide ratchet teeth 7082 downward to move downward, thereby causing the ratchet block 709 to disengage from the ratchet angular groove 7083, and the ratchet disk 708 is no longer limited by the ratchet block 709. The ratchet disk 708 can rotate, and at the same time, the ratchet disk 708 moves downward to compress the second compression spring, and the angular toothed disk 707 continues to slide downward, and the triangular teeth 7071 and the triangular groove 7072 squeeze the narrow ratchet teeth 7081 and the wide ratchet teeth 7082 respectively. The narrow ratchet teeth 7081 and the wide ratchet teeth 7082 rotate after being squeezed, and the top inclined surface of the narrow ratchet teeth 7081 rotates along the inclined surface of one side of the triangular teeth 7071, and the top inclined surface of the wide ratchet teeth 7082 rotates along the triangular groove 7072 until the top tooth tip of the wide ratchet teeth 7082 slides into the top of the triangular groove 7072 and is limited, thereby The ratchet disc 708 is limited, and the ratchet disc 708 cannot rotate at this time. Then the angle tooth disc 707 continues to slide downward, thereby pushing the ratchet disc 708 to slide downward, so that the volume of the gas between the ratchet disc 708 and the second air cylinder 706 is reduced, and the gas in the second air cylinder 706 enters the second hose through the fourth vent hole, and enters the suction cup shell 711 through the third vent hole. The air pressure in the suction cup shell 711 increases, causing the soft glue suction cup 712 to expand. The soft glue suction cup 712 can better fit the circuit board and push out the air under the soft glue suction cup 712, so that the suction cup mechanism 7 can absorb the circuit board; at the same time, the positioning frame 710 squeezes the third compression spring to make the third compression spring absorb pressure, thereby preventing the soft glue suction cup 712 from rigidly squeezing the circuit board and causing the circuit board to break. ;
[0043] Afterwards, the second motor 601 rotates in the opposite direction, and the output shaft of the second motor 601 rotates to drive the second screw rod 602 to rotate synchronously. The second screw rod 602 rotates to make the second threaded sleeve 604 move along the axial direction of the second screw rod 602 away from the conveyor belt 8. The movement of the second threaded sleeve 604 drives the mounting plate 606 to slide synchronously. When the mounting plate 606 slides, it drives the sliding shell 607 and the positioning shaft 608 to move. The sliding shell 607 moves through the L-shaped support frame 612 to drive the sliding rod 613 to slide horizontally at the bottom of the Z-shaped groove 615. The movement of the positioning shaft 608 drives the gas column 701 and the T-shaped shaft 616 to move synchronously, so that the flipping mechanism 6 pushes the suction cup mechanism 7 to move backward; on the one hand, the T-shaped shaft 616 slides out of the groove 801 on the side of the conveyor belt 8;On the other hand, when the gas column 701 moves, the first compression spring is gradually loosened, so that the volume of the gas between the gas column 701 and the first gas cylinder 702 increases and the air pressure decreases. The first gas cylinder 702 draws gas to the first hose through the first vent hole, and the first hose draws gas to the telescopic cylinder 704 through the second vent hole. The air pressure of the gas between the telescopic cylinder 704 and the telescopic rod 705 decreases, so that the gas pulls the telescopic rod 705 to slide upward. When the telescopic rod 705 slides upward, it drives the angular toothed plate 707 to move synchronously. At this time, the second compression spring is released to drive the ratchet plate 708 to slide upward, and the ratchet plate 708 drives the narrow ratchet 7081 and the wide ratchet 7082 to move upward synchronously until the inclined surface of the narrow ratchet 7081 contacts the bottom inclined surface of the ratchet block 709, so that the ratchet plate 708 08 is limited by the ratchet block 709 and cannot move upward. At this time, the ratchet plate 708 can rotate, and then the angle tooth plate 707 continues to slide upward, and the second compression spring continues to push the ratchet plate 708 to slide upward, so that the wide ratchet tooth 7082 disengages from the triangular groove 7072. Since the ratchet plate 708 is limited by the ratchet block 709 and cannot move upward, the second compression spring pushes the ratchet plate 708 to move, so that the narrow ratchet tooth 7081 squeezes the ratchet block 709 and rotates along the inclined surface of the ratchet block 709. Finally, the second sliding groove of the ratchet plate 708 rotates to the ratchet block 709. At this time, the ratchet plate 708 can slide upward, and the second compression spring continues to release and push the ratchet plate 708 to slide upward, and the ratchet block 709 will enter the second sliding groove to limit the ratchet plate 708 At this time, the ratchet plate 708 cannot rotate. As the second compression spring continues to be released, the ratchet plate 708 slides upward, causing the narrow ratchet tooth 7081 to contact the triangular groove 7072, and the wide ratchet tooth 7082 to contact the inclined surface of one side of the triangular tooth 7071. As the ratchet plate 708 slides upward, the volume of gas in the second gas cylinder 706 increases and the air pressure decreases, causing the second gas cylinder 706 to draw air to the second hose through the fourth vent hole, and the second hose then draws air to the suction cup shell 711 through the third vent hole, reducing the air pressure in the suction cup shell 711. The gas in the suction cup shell 711 pulls the soft rubber suction cup 712 inward, increasing the space between the soft rubber suction cup 712 and the circuit board. Since the quality of the gas between the soft rubber suction cup 712 and the circuit board has not changed, The air pressure is reduced, forming a suction cavity, so that the suction cup mechanism 7 can adsorb the circuit board; when the suction cup mechanism 7 completes the adsorption of the circuit board, the angle toothed disc 707 is pulled to the top of the second air cylinder 706 by the telescopic rod 705, and as the air column 701 continues to slide and releases the first compression spring, the telescopic rod 705 drives the second air cylinder 706 to slide upward through the angle toothed disc 707, and the second air cylinder 706 drives the positioning frame 710 to slide upward, and the positioning frame 710 drives the suction cup shell 711 to move upward. When the suction cup shell 711 moves upward, the circuit board is lifted through the soft rubber suction cup 712, so that the circuit board is separated from the conveyor belt 8. When the first compression spring is completely released, the air column 701 continues to slide, and drives the first air cylinder 702 to move synchronously through the first compression spring, and then stops the second motor 601. ;
[0044] The first motor 301 is started, and the output shaft of the first motor 301 rotates to drive the first screw rod 302 to rotate. When the first screw rod 302 rotates, the sliding table 306 is driven to slide axially close to the exposure platform 9 through the first threaded sleeve 304. When the sliding table 306 slides, the flip mechanism 6 is driven to move through the first vertical plate 4 and the second vertical plate 5. The flip mechanism 6 drives the suction cup mechanism 7 to move synchronously, so as to realize the left and right horizontal movement of the suction cup mechanism 7; the horizontal movement of the suction cup mechanism 7 drives the circuit board to move synchronously, and the first motor 301 controls the suction cup mechanism 7 to move toward the exposure platform 9. When the circuit board is located at When the exposure platform 9 is above the exposure platform 9, the first motor 301 is stopped and the second motor 601 is started, so that the flip mechanism 6 performs the forward movement in the above example again, so that the T-shaped shaft 616 and the gas column 701 slide forward. On the one hand, the positioning shaft 608 pushes the T-shaped shaft 616 forward to contact and squeeze the sealing plug 902, and the sealing plug 902 squeezes the hydraulic oil and compresses the fourth compression spring, so that the hydraulic oil enters the airtight channel 903 through the hydraulic channel 901 and pushes the sealing slider 904 to slide, and the sealing slider 904 discharges the air therein through the fifth vent hole at the top of the airtight channel 903;On the other hand, the air column 701 slides to make the suction cup mechanism 7 perform the downward movement in the above example again, so that the soft rubber suction cup 712 drives the circuit board to move downward, and the circuit board contacts with the exposure platform 9 and fits the fifth vent hole opened on the exposure platform 9. At this time, the telescopic rod 705 continues to move downward, so that the angle toothed disc 707 pushes the narrow ratchet 7081 and the wide ratchet 7082 to move downward, and then pushes the ratchet disc 708 to slide downward along the ratchet block 709, and the second compression spring contracts under the force, so that the ratchet disc 708 slides downward. The second sliding groove opened by the ratchet block 709 will be disengaged from the ratchet block 709. At this time, the ratchet block 709 no longer restricts the ratchet plate 708, and the ratchet plate 708 can rotate. Subsequently, the second compression spring is released and gives an upward force to the ratchet plate 708. Since the angle toothed plate 707 is still moving downward, the second compression spring cannot push the ratchet plate 708 to move upward, and the upward force of the ratchet plate 708 will be transmitted to the narrow ratchet teeth 7081 and the wide ratchet teeth 7082, causing the narrow ratchet teeth 7081 and the wide ratchet teeth 7082 to squeeze the three The narrow ratchet 7081 and the wide ratchet 7082 rotate under the reaction force, the wide ratchet 7082 rotates along the inclined surface of the triangular tooth 7071, and the narrow ratchet 7081 rotates along the triangular groove 7072. Finally, the narrow ratchet 7081 rotates to the top of the triangular groove 7072 and is limited. At this time, the ratchet plate 708 cannot rotate. Then the angular tooth plate 707 continues to push the ratchet plate 708 to the bottom end of the second air cylinder 706, so that the second compression spring is compressed. At the same time , the volume of gas between the second gas cylinder 706 is reduced, the gas in the second gas cylinder 706 enters the second hose through the fourth vent hole, and enters the suction cup shell 711 through the third vent hole, the air pressure in the suction cup shell 711 increases, causing the soft glue suction cup 712 to expand outward, the volume of the cavity between the soft glue suction cup 712 and the circuit board is reduced, the air pressure increases, causing the soft glue suction cup 712 to release the circuit board, and the circuit board is placed, and the positioning frame 710 absorbs the pressure by squeezing the third compression spring, thereby protecting the circuit board. ;
[0045] The second motor 601 is reversed again, so that the flip mechanism 6 moves backward again, and the T-axis 616 and the air column 701 slide backward. On the one hand, the T-axis 616 slides backward to release the fourth compression spring to push the sealing plug 902, so that the volume of the hydraulic channel 901 increases, and the hydraulic channel 901 absorbs hydraulic oil into the airtight channel 903, so that the sealing slider 904 slides with the hydraulic oil, and the sealing slider 904 draws air through the fifth air vent at the top of the airtight channel 903, so as to realize the action of air suction on the exposure platform 9, and there is a circuit board above the fifth air vent, so that suction is generated in the airtight channel 903 to adsorb the circuit board; on the other hand, the air column 701 moves backward to cause the first air cylinder 702 to draw air into the first hose through the first air vent. The first hose draws gas to the telescopic cylinder 704 through the second vent hole, and the gas pressure between the telescopic cylinder 704 and the telescopic rod 705 is reduced, so that the gas pulls the telescopic rod 705 to slide upward. When the telescopic rod 705 slides upward, it drives the angle toothed plate 707 to move synchronously. During the upward movement of the angle toothed plate 707, the second compression spring is released to drive the ratchet plate 708 to slide upward until the wide ratchet teeth 7082 contact the ratchet block 709, and the ratchet block 709 limits the ratchet plate 708 so that it cannot move upward. At this time, the angle toothed plate 707 continues to slide upward, so that the narrow ratchet teeth 7081 are disengaged from the limit of the triangular groove 7072 of the angle toothed plate 707. At this time, the ratchet plate 708 can rotate, and with the release of the second compression spring, the wide ratchet teeth 7082 The ratchet block 709 rotates along the inclined surface until the bottom inclined surface of the ratchet block 709 is stuck in the ratchet angle groove 7083, so that the ratchet plate 708 and the ratchet block 709 remain relatively still, and the angle tooth plate 707 continues to slide to the top of the second air cylinder 706. At this time, the gas volume in the second air cylinder 706 increases and the air pressure decreases, so that the second air cylinder 706 draws air to the second hose through the fourth vent hole, and the second hose then draws air to the suction cup shell 711 through the third vent hole, so that the air pressure in the suction cup shell 711 is reduced, and the gas in the suction cup shell 711 pulls the soft rubber suction cup 712 to shrink, so that the gas volume between the soft rubber suction cup 712 and the circuit board increases, and the air pressure decreases, forming a suction cavity. 06 slides upward over a small distance, so that the air pressure in the suction cup housing 711 only decreases slightly, and the airtight channel 903 of the exposure platform 9 adsorbs the circuit board, resulting in that the suction force of the cavity between the soft glue suction cup 712 and the circuit board is insufficient to lift the circuit board against gravity, and the suction cup mechanism 7 cannot grab the circuit board. As the positioning shaft 608 and the air column 701 continue to move, the suction cup mechanism 7 again moves the soft glue suction cup 712 upward to complete the resetting of the suction cup mechanism 7; then the second motor 601 is stopped and the extreme purple lamp 2 is started. The extreme purple lamp 2 irradiates parallel ultraviolet light through the exposure template 10 onto the circuit board, causing the exposure film on the circuit board to undergo a chemical reaction and adhere to the circuit board, thereby completing the exposure of the circuit board.
[0046] After the circuit board is exposed, the second motor 601 is started again, so that the flipping mechanism 6 performs the forward movement operation again, and the T-shaped shaft 616 and the air column 701 slide forward. On the one hand, the positioning shaft 608 pushes the T-shaped shaft 616 forward again to contact and squeeze the sealing plug 902. The sealing plug 902 squeezes the hydraulic oil and compresses the fourth compression spring, so that the hydraulic oil enters the airtight channel 903 through the hydraulic channel 901 and pushes the sealing slider 904 to slide. The sliding of the sealing slider 904 reduces the gas volume of the airtight channel 903 and increases the pressure. The fifth vent hole at the top of the airtight channel 903 cannot generate suction on the circuit board; on the other hand, the suction cup mechanism 7 performs the adsorption action on the circuit board again, so that the circuit board is adsorbed on the soft rubber suction cup 712.
[0047] The second motor 601 is started again to rotate in the opposite direction, so that the flipping mechanism 6 performs the backward movement operation again, and the T-axis 616 and the air column 701 slide backward. On the one hand, the air column 701 slides backward to make the suction cup mechanism 7 perform the upward movement of the soft glue suction cup 712 again; on the other hand, the T-axis 616 slides backward to release the fourth compression spring to push the sealing plug 902, so that the volume of the hydraulic channel 901 increases, and the hydraulic channel 901 absorbs hydraulic oil into the airtight channel 903, and the sealing slider 904 slides with the hydraulic oil. The sealing slider 904 draws air through the fifth air hole at the top of the airtight channel 903, and there is a circuit board above the fifth air hole, so that suction is generated in the airtight channel 903 to adsorb the circuit board, but in the process of gradually increasing the suction force of adsorbing the circuit board, the circuit board has been adsorbed by the soft glue suction cup 712 and lifted by the suction cup mechanism 7, so that the circuit board is separated from the fifth air hole at the top of the airtight channel 903, and the outside air enters the airtight channel 903.
[0048] The second motor 601 continues to rotate in the reverse direction, so that the flip mechanism 6 continues to perform the operation of moving backward. At this time, the sliding shell 607 moves away from the exposure platform 9. When the sliding shell 607 moves, the sliding rod 613 is driven by the L-shaped support frame 612 to continue to slide along the Z-shaped groove 615. When the sliding rod 613 slides on the inclined surface of the Z-shaped groove 615, the sliding rod 613 pushes the sliding shell 607 to move upward through the L-shaped support frame 612, so that when the sliding shell 607 moves, it drives the rack 609 to slide synchronously, and when the rack 609 slides, it drives the gear 610 to mesh and rotate until the bottom of the first sliding groove of the sliding shell 607 is aligned with the fixed When the positioning shaft 608 is in contact, the gear 610 rotates and squeezes the end face of the elastic ratchet piece 611 through the columnar ratchet groove, so that the elastic ratchet piece 611 rotates with the gear 610 and drives the positioning shaft 608 to rotate synchronously. When the positioning shaft 608 rotates, it drives the suction cup mechanism 7 to rotate synchronously, so that the circuit board is rotated 180° by the suction cup mechanism 7; the second motor 601 is started again to make the flip mechanism 6 continue to perform the forward movement operation. In this process, the sliding shell 607 pushes the sliding rod 613 to move forward through the L-shaped support frame 612 until the sliding rod 613 slides into the inclined surface of the Z-shaped groove 615, and the inclined surface of the Z-shaped groove 615 squeezes The sliding rod 613 pushes the sliding shell 607 downward through the L-shaped support frame 612. When the sliding shell 607 moves, it drives the rack 609 to slide synchronously, so that when the rack 609 slides, it drives the gear 610 to mesh and rotate until the top of the first sliding groove of the sliding shell 607 contacts the positioning shaft 608. When the gear 610 rotates, the gear 610 squeezes the side of the elastic ratchet piece 611 through the columnar ratchet groove, so that the columnar ratchet groove of the gear 610 rotates around the elastic ratchet piece 611, so that the suction cup mechanism 7 does not rotate, and the sliding shell 607 continues to approach the exposure platform 9. The sliding shell 607 pushes The dynamic air column 701 moves synchronously, and the movement of the air column 701 pushes the first air cylinder 702 to move through the first compression spring. When the first air cylinder 702 moves, it pushes the L-shaped rotating frame 703 to contact the exposure platform 9. When the L-shaped rotating frame 703 contacts the exposure platform 9, the second motor 601 stops working, the air column 701 stops moving, the first compression spring is not squeezed, the T-shaped shaft 616 contacts but does not squeeze the sealing plug 902, and the circuit board is located directly below the extreme purple lamp 2. At this time, the extreme purple lamp 2 is started, and the extreme purple lamp 2 irradiates parallel ultraviolet light to cause a chemical reaction in the exposure film, which adheres to the circuit board, thereby realizing the flipping exposure of the circuit board.
[0049] Then, the second motor 601 is started again, so that the flipping mechanism 6 executes the operation of moving backward again and rotating the circuit board again, so that the circuit board rotates 180° and resets, and the first motor 301 is started again. The first motor 301 controls the suction cup mechanism 7 to move away from the exposure platform 9 and moves the suction cup mechanism 7 toward the discharge port 102. When the suction cup mechanism 7 is located on the conveyor belt 8 of the discharge port 102, the first motor 301 stops working; ... The second forward movement is performed to move the positioning frame 710 to the top of the conveyor belt 8, and the T-shaped shaft 616 slides into the groove 801 of the conveyor belt 8 to prevent the T-shaped shaft 616 from colliding, and the positioning shaft 608 slides forward to make the L-shaped rotating frame 703 contact the conveyor belt 8, and then the suction cup mechanism 7 performs the action of moving the soft rubber suction cup 712 downward again to place the circuit board on the conveyor belt 8, and then the positioning shaft 608 continues to slide forward so that the suction cup mechanism 7 no longer absorbs the circuit board, thereby completing the circuit board placement action; the second movement is started again. The second motor 601 rotates in the opposite direction, causing the flip mechanism 6 to move backward again, so that the T-axis 616 and the air column 701 move backward. On the one hand, the T-axis 616 moves backward to slide out of the groove 801 of the conveyor belt 8. On the other hand, the positioning shaft 608 moves backward to cause the suction cup mechanism 7 to move the soft glue suction cup 712 upward again. At this time, the suction force of the cavity between the soft glue suction cup 712 and the circuit board is not enough to lift the circuit board against gravity, and the suction cup mechanism 7 completes the height reset; start the conveyor belt at the discharge port 102 8 causes the circuit board to be transported out of the shell 1, and the first motor 301 is started to reverse. The output shaft of the first motor 301 rotates to drive the first screw rod 302 to rotate. When the first screw rod 302 rotates, the sliding table 306 is driven to slide axially through the first threaded sleeve 304 to approach the conveyor belt 8 at the feed inlet 101. The movement of the sliding table 306 drives the first vertical plate 4 and the second vertical plate 5 to move synchronously, so that the first vertical plate 4 and the second vertical plate 5 drive the flipping mechanism 6 to move, and the movement of the flipping mechanism 6 causes the suction cup mechanism 7 to move synchronously, thereby completing the reset.
[0050] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.
Claims
1. An exposure machine with a suction cup mechanism, comprising a shell (1), an extreme purple lamp (2) is installed at the top of the shell (1), an exposure template (10) is fixedly connected to one side of the shell (1), and the exposure template (10) is located directly below the extreme purple lamp (2), a feed port (101) and a discharge port (102) are respectively opened on both sides of the shell (1), and a conveyor belt (8) is installed on the feed port (101) and the discharge port (102), an exposure platform (9) is fixedly connected to one side of the shell (1), a moving mechanism (3) is fixedly connected to the bottom of the inner side of the shell (1), and a first vertical plate (4) and a second vertical plate (5) are installed on the moving mechanism (3), characterized in that: The invention also comprises a flipping mechanism (6), the flipping mechanism (6) comprising a second motor (601), the second motor (601) being fixedly mounted on the first vertical plate (4), the output shaft of the second motor (601) being rotatably connected to a second screw rod (602), one end of the second screw rod (602) being rotatably connected to the second vertical plate (5), the second screw rod (602) being threadably connected to a second threaded sleeve (604), the second threaded sleeve (604) being fixedly connected to a mounting plate (606), the mounting plate (606) being slidably connected to a sliding shell (607), the sliding shell (607) being opened A first sliding groove is provided, a positioning shaft (608) is slidably connected to the first sliding groove of the sliding shell (607), one end of the positioning shaft (608) is rotatably connected to the mounting plate (606), a gear (610) is rotatably connected to the positioning shaft (608), a rack (609) is fixedly connected to the inner side of the sliding shell (607), the rack (609) is meshed with the gear (610), an elastic ratchet piece (611) is fixedly connected to the circumferential direction of the positioning shaft (608), a columnar ratchet groove is provided in the gear (610), and the elastic ratchet piece (611) cooperates with the columnar ratchet groove; The flip mechanism (6) further comprises an L-shaped support frame (612), the L-shaped support frames (612) are symmetrically distributed and fixedly connected to both sides of the sliding shell (607), a sliding rod (613) is fixedly connected to one side of the L-shaped support frame (612), a support plate (614) is symmetrically distributed and fixedly connected between the first vertical plate (4) and the second vertical plate (5), a Z-shaped groove (615) is formed on the support plate (614), and the sliding rod (613) is connected to the Z-shaped groove (615) in a through-type sliding manner; The flip mechanism (6) further comprises a second polished rod (603), the second polished rod (603) being rotatably connected to the first vertical plate (4), one end of the second polished rod (603) being rotatably connected to the second vertical plate (5), a second column sleeve (605) being slidably connected to the outer wall of the second polished rod (603), and the second column sleeve (605) being fixedly connected to the mounting plate (606); It also includes a suction cup mechanism (7), which includes an air column (701), the air column (701) is fixedly connected to the positioning shaft (608), a first air cylinder (702) is slidably connected to one side of the air column (701), and a first compression spring is connected between the air column (701) and the first air cylinder (702); The suction cup mechanism (7) further comprises an L-shaped rotating frame (703), one end of the first air cylinder (702) is fixedly connected to the L-shaped rotating frame (703), one end of the L-shaped rotating frame (703) is fixedly connected to a telescopic cylinder (704), a telescopic rod (705) is sealed and slidably connected inside the telescopic cylinder (704), a first vent hole is provided at the top of the first air cylinder (702), a second vent hole is provided at one side of the telescopic cylinder (704), and the first vent hole of the first air cylinder (702) and the second vent hole of the telescopic cylinder (704) are connected via a first hose; The suction cup mechanism (7) further comprises an angular toothed disc (707), the bottom end of the telescopic rod (705) being fixedly connected to the angular toothed disc (707), the angular toothed disc (707) being provided with circumferentially distributed triangular teeth (7071), a triangular groove (7072) being provided between two adjacent triangular teeth (7071), a second air cylinder (706) being slidably connected to the outer wall of the telescopic rod (705), a plurality of ratchet blocks (709) being circumferentially distributed and fixedly connected to the inside of the second air cylinder (706), the angular toothed disc (707) being slidably connected to the ratchet blocks (709), a ratchet disc (708) being slidably connected to the inside of the second air cylinder (706), and a plurality of first teeth (709) being provided circumferentially distributed on the ratchet disc (708). two sliding grooves, a group of narrow ratchet teeth (7081) and wide ratchet teeth (7082) are provided on both sides of the left and right sides of the second sliding groove, a single narrow ratchet tooth (7081) and a single wide ratchet tooth (7082) form a group, the narrow ratchet teeth (7081) in each group are fixedly connected to the wide ratchet teeth (7082), each group of narrow ratchet teeth (7081) and wide ratchet teeth (7082) are fixedly connected to the ratchet plate (708), a ratchet angle groove (7083) is provided between the top ends of each group of narrow ratchet teeth (7081) and wide ratchet teeth (7082), the width of the second sliding groove is the same as that of the ratchet block (709), and a second compression spring is rotatably connected between the second air cylinder (706) and the ratchet plate (708); The suction cup mechanism (7) further comprises a positioning frame (710), the positioning frame (710) being fixedly connected to the bottom of the second air cylinder (706), a plurality of suction cup shells (711) being arranged in a rectangular shape and slidably connected to the positioning frame (710), a soft rubber suction cup (712) being fixedly connected to the bottom of the suction cup shell (711), a third vent hole being provided at the top of the suction cup shell (711), a plurality of fourth vent holes being distributed circumferentially on the second air cylinder (706), and the third vent hole of the suction cup shell (711) and the fourth vent hole of the second air cylinder (706) being connected via a second hose; The suction cup mechanism (7) further comprises a limiting ring (713), both ends of the suction cup housing (711) are fixedly connected to the limiting ring (713), and a third compression spring is connected between the limiting ring (713) at the bottom end of the suction cup housing (711) and the positioning frame (710).
2. The exposure machine with a suction cup mechanism according to claim 1, characterized in that: The invention also comprises a T-shaped shaft (616), one end of the positioning shaft (608) is fixedly connected to the T-shaped shaft (616), a hydraulic channel (901) is provided through the exposure platform (9), one end of the hydraulic channel (901) is sealed and slidably connected to a sealing plug (902), a fourth compression spring is connected between the sealing plug (902) and the hydraulic channel (901), an airtight channel (903) is provided in the exposure platform (9) in a mirror image distribution with respect to the hydraulic channel (901), the airtight channel (903) is communicated with the hydraulic channel (901), a fifth vent hole is provided at the top of the exposure platform (9), the fifth vent hole is communicated with the airtight channel (903), a sealing slider (904) is slidably connected in the airtight channel (903), the hydraulic channel (901) is filled with hydraulic oil, and a groove (801) for placing the T-shaped shaft (616) is reserved on the side of the conveyor belt (8).
3. The exposure machine with a suction cup mechanism according to claim 2, characterized in that: The moving mechanism (3) comprises a first motor (301), the first motor (301) is fixedly mounted on one side of the outer side of the housing (1), the output shaft of the first motor (301) is rotatably connected to the housing (1), a first screw rod (302) is fixedly connected to the output shaft of the first motor (301), a first threaded sleeve (304) is threadedly connected to the first screw rod (302), a sliding platform (306) is fixedly connected to the top of the first threaded sleeve (304), a first light rod (303) is fixedly connected to both sides of the inner side of the housing (1), a first column sleeve (305) is slidably connected to the first light rod (303), a top of the first column sleeve (305) is fixedly connected to the sliding platform (306), and a first vertical plate (4) and a second vertical plate (5) are both fixedly connected to the sliding platform (306).
Citation Information
Patent Citations
Exposure machine mechanism capable of automatically performing double-sided exposure
CN113156771A
Method for inspecting extreme ultraviolet light source and inspection equipment
CN114859662A