A method and system for automatically connecting radio frequency cables for semiconductor chip error analysis

Abstract

The present invention belongs to the field of chip testing technology, and specifically discloses a method and system for automatically connecting radio frequency cables for error code analysis of semiconductor chips. The spatial relative position image of the radio frequency cable connection end and the radio frequency connector is collected by a visual imaging module, and then the control center performs image analysis on the spatial relative position image to determine the spatial relative position information between the radio frequency cable connection end and the radio frequency connector. Then, according to the spatial relative position information, the five-axis displacement module is controlled to adjust the position of the radio frequency cable connection end to align the radio frequency connector. Finally, the automatic tightening and torque detection module is controlled to rotate and dock the radio frequency connector with the radio frequency cable connection end until the tightening torque between the radio frequency connector and the frequency cable connection end reaches a set value. The present invention can replace the traditional manual wiring method, realize the automatic radio frequency cable connection for error code analysis of semiconductor chips, ensure the reliability and efficiency of the radio frequency cable connection, and save manpower.

Description

Technical Field

[0001] The present invention belongs to the technical field of chip testing, and in particular relates to an automated radio frequency cable connection method and system for semiconductor chip error analysis. Background Art

[0002] Semiconductor chips refer to semiconductor devices that can achieve certain functions by using processes such as etching and wiring on semiconductor sheets. They are not just silicon chips, but also commonly include chips based on semiconductor materials such as gallium arsenide and germanium. In the production process of semiconductor chips, corresponding bit error analysis is required. By performing bit error tests on wafers, bars or chips, possible connection problems, performance problems, etc. can be detected, so that these problems can be discovered early, problematic products can be screened out, the yield of finished chips can be improved, and costs can be reduced.

[0003] Before performing bit error testing on wafers, bars or chips, the bit error meter and the test probe need to be reliably connected with an RF cable. Currently, the connection of such RF cables is mainly done manually. However, due to the small operating space, manual operation is difficult and requires reliance on skilled workers, which is very time-consuming and labor-intensive, and the reliability of the connection is difficult to guarantee. Summary of the invention

[0004] The object of the present invention is to provide a method and system for automatically connecting radio frequency cables for semiconductor chip error analysis, so as to solve the above-mentioned problems existing in the prior art.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] In a first aspect, the present invention provides a method for automatically connecting radio frequency cables for semiconductor chip error analysis, comprising:

[0007] S1. Acquire the spatial relative position image of the RF cable connection end and the RF connector collected by the visual imaging module, wherein the RF cable connection end is arranged on the five-axis displacement module, and the RF connector is arranged on the automatic tightening and torque detection module;

[0008] S2. Perform image analysis on the spatial relative position image of the RF cable connection end and the RF connector to determine the spatial relative position information between the RF cable connection end and the RF connector;

[0009] S3 sends a corresponding five-axis displacement control command to the five-axis displacement module according to the spatial relative position information between the RF cable connection end and the RF connector, so that the five-axis displacement module adjusts the spatial position of the RF cable connection end relative to the RF connector according to the five-axis displacement control command;

[0010] S4. Repeat steps S1 to S3 until the RF cable connection end is moved to align closely with the RF connector;

[0011] S5. Send an automatic tightening instruction to the automatic tightening and torque detection module, so that the automatic tightening and torque detection module rotates and docks the RF connector and the RF cable connection end according to the automatic tightening instruction until the tightening torque between the RF connector and the RF cable connection end reaches a set value.

[0012] In a possible design, the performing image analysis on the spatial relative position image of the RF cable connection end and the RF connector to determine the spatial relative position information between the RF cable connection end and the RF connector includes:

[0013] Performing image target detection on the spatial relative position image of the RF cable connection end and the RF connector to determine image position information of the RF cable connection end and image position information of the RF connector in the spatial relative position image;

[0014] The image position information of the RF cable connection end and the image position information of the RF connector are used to determine the spatial relative position information of the RF cable connection end and the RF connector in the three-dimensional space.

[0015] In a possible design, determining the spatial relative position information of the RF cable connection end and the RF connector in three-dimensional space according to the image position information of the RF cable connection end and the image position information of the RF connector includes:

[0016] According to the image position information of the RF cable connection end and the image position information of the RF connector, mapping is performed to determine the relative position information of the RF cable connection end and the RF connector in a certain spatial direction;

[0017] According to the relative position information of the RF cable connection end and the RF connector in each spatial direction, the spatial relative position information of the RF cable connection end and the RF connector in the three-dimensional space is calculated and determined.

[0018] In a possible design, sending a corresponding five-axis displacement control instruction to the five-axis displacement module according to the spatial relative position information between the RF cable connection end and the RF connector includes:

[0019] Determine a motion trajectory of the RF cable connection end moving toward the RF connector according to spatial relative position information between the RF cable connection end and the RF connector;

[0020] Generate corresponding five-axis displacement control instructions according to the motion trajectory.

[0021] In a second aspect, the present invention provides an automated RF cable connection system for error analysis of semiconductor chips, comprising a visual imaging module, a control center, a five-axis displacement module, and an automatic tightening and torque detection module, wherein a RF cable connection end is provided on the five-axis displacement module, and a RF connector is provided on the automatic tightening and torque detection module, wherein:

[0022] A visual imaging module is used to collect a spatial relative position image of the RF cable connection end and the RF connector, and transmit the spatial relative position image of the RF cable connection end and the RF connector to a control center;

[0023] A five-axis displacement module, used to receive a five-axis displacement control instruction from a control center, and adjust the spatial position of the RF cable connection end relative to the RF connector according to the five-axis displacement control instruction;

[0024] The automatic tightening and torque detection module is used to receive the automatic tightening instruction from the control center, and rotate and dock the RF connector with the RF cable connection end according to the automatic tightening instruction until the tightening torque between the RF connector and the RF cable connection end reaches the set value;

[0025] A control center is used to implement any one of the semiconductor chip error analysis automated radio frequency cable connection methods described in the first aspect.

[0026] In a possible design, the control center includes an image acquisition unit, an image analysis unit, a first control unit and a second control unit, wherein:

[0027] An image acquisition unit, used to acquire a spatial relative position image of a radio frequency cable connection end and a radio frequency connector collected by a visual imaging module, wherein the radio frequency cable connection end is arranged on a five-axis displacement module, and the radio frequency connector is arranged on an automatic tightening and torque detection module;

[0028] An image analysis unit, used to perform image analysis on the spatial relative position image of the RF cable connection end and the RF connector, and determine the spatial relative position information between the RF cable connection end and the RF connector;

[0029] The first control unit is used to send a corresponding five-axis displacement control instruction to the five-axis displacement module according to the spatial relative position information between the RF cable connection end and the RF connector, so that the five-axis displacement module adjusts the spatial position of the RF cable connection end relative to the RF connector according to the five-axis displacement control instruction;

[0030] The second control unit is used to send an automatic tightening instruction to the automatic tightening and torque detection module, so that the automatic tightening and torque detection module rotates and docks the RF connector and the RF cable connection end according to the automatic tightening instruction until the tightening torque between the RF connector and the RF cable connection end reaches a set value.

[0031] In one possible design, the visual imaging module includes several high-definition cameras.

[0032] In one possible design, the five-axis displacement module includes a five-axis robotic arm.

[0033] In one possible design, the automatic tightening and torque detection module includes an automatic tightening machine and a torque detector.

[0034] In one possible design, the control center includes a computer, and the computer includes:

[0035] A memory for storing execution instructions;

[0036] A processor is used to read the execution instruction stored in the memory and execute any one of the semiconductor chip error analysis automated radio frequency cable connection methods described in the first aspect according to the execution instruction.

[0037] Beneficial effect: The present invention collects the spatial relative position image of the RF cable connection end and the RF connector through the visual imaging module, and then the control center performs image analysis on the spatial relative position image to determine the spatial relative position information between the RF cable connection end and the RF connector, and then controls the five-axis displacement module to adjust the position of the RF cable connection end according to the spatial relative position information to align the RF connector, and finally controls the automatic tightening and torque detection module to rotate and dock the RF connector with the RF cable connection end until the tightening torque between the RF connector and the RF cable connection end reaches the set value, thereby realizing the automated RF cable connection. The present invention can replace the traditional manual wiring method, realize the automated RF cable connection for semiconductor chip error analysis, ensure the reliability and efficiency of the RF cable connection, and save manpower. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0039] Figure 1 A schematic diagram of the method steps provided in Example 1 of the present invention;

[0040] Figure 2 A schematic diagram of the system structure provided in Example 2 of the present invention;

[0041] Figure 3 This is a schematic diagram of the system structure provided in Example 3 of the present invention. DETAILED DESCRIPTION

[0042] It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention. The specific structures and functional details disclosed herein are only used to describe the exemplary embodiments of the present invention. However, the present invention can be embodied in many alternative forms, and it should not be understood that the present invention is limited to the embodiments set forth herein.

[0043] It should be understood that, unless otherwise clearly specified and limited, the term "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments can be understood according to specific circumstances.

[0044] In the following description, certain details are provided to facilitate a complete understanding of the example embodiments. However, it will be appreciated by those of ordinary skill in the art that the example embodiments may be implemented without these certain details. For example, the system may be shown in a block diagram to avoid obscuring the example with unnecessary details. In other embodiments, well-known processes, structures, and techniques may not be shown in unnecessary detail to avoid obscuring the embodiments.

[0045] Embodiment 1:

[0046] This embodiment provides a method for automatically connecting radio frequency cables for error analysis of semiconductor chips, which can be applied to a control center, wherein the control center is respectively connected to a visual imaging module, a five-axis displacement module, and an automatic tightening and torque detection module, such as Figure 1 As shown, the method comprises the following steps:

[0047] S1. Acquire a spatial relative position image of a radio frequency cable connection end and a radio frequency connector collected by a visual imaging module, wherein the radio frequency cable connection end is arranged on a five-axis displacement module, and the radio frequency connector is arranged on an automatic tightening and torque detection module.

[0048] During the specific implementation, the RF cable is first set on the five-axis displacement module so that the five-axis displacement module can adjust the spatial position of the RF cable connection end, and the RF connector is set on the automatic tightening and torque detection module so that the automatic tightening and torque detection module can automatically tighten the RF connector. After the preparation is completed, the visual imaging module collects the spatial relative position image of the RF cable connection end and the RF connector. Multiple spatial relative position images can be collected at the same time, each spatial relative position image corresponds to a different spatial direction, and each spatial relative position image includes the RF cable connection end and the RF connector. The visual imaging module transmits the collected spatial relative position image of the RF cable connection end and the RF connector to the control center, and the control center performs subsequent processing after obtaining the spatial relative position image of the RF cable connection end and the RF connector collected by the visual imaging module.

[0049] S2. Perform image analysis on the spatial relative position image of the RF cable connection end and the RF connector to determine the spatial relative position information between the RF cable connection end and the RF connector.

[0050] In specific implementation, the control center can perform image target detection on the spatial relative position image of the RF cable connection end and the RF connector, and determine the image position information of the RF cable connection end and the image position information of the RF connector in the spatial relative position image. Then, based on the image position information of the RF cable connection end and the image position information of the RF connector, the relative position information of the RF cable connection end and the RF connector in a certain spatial direction is mapped and determined. Finally, based on the relative position information of the RF cable connection end and the RF connector in each spatial direction, the spatial relative position information of the RF cable connection end and the RF connector in three-dimensional space is calculated and determined.

[0051] S3. Send a corresponding five-axis displacement control instruction to the five-axis displacement module according to the spatial relative position information between the RF cable connection end and the RF connector, so that the five-axis displacement module adjusts the spatial position of the RF cable connection end relative to the RF connector according to the five-axis displacement control instruction.

[0052] In specific implementation, the control center determines the motion trajectory of the RF cable connection end moving toward the RF connector based on the spatial relative position information between the RF cable connection end and the RF connector, and generates a corresponding five-axis displacement control instruction based on the motion trajectory. The five-axis displacement control instruction is then sent to the five-axis displacement module, so that the five-axis displacement module adjusts the spatial position of the RF cable connection end relative to the RF connector according to the five-axis displacement control instruction.

[0053] S4. Repeat steps S1 to S3 until the RF cable connection end is moved to be closely aligned with the RF connector.

[0054] In specific implementation, the control center may repeatedly execute steps S1 to S3 during the process of adjusting the spatial position of the RF cable connection end until the RF cable connection end is moved to a set position so that the RF cable connection end is closely aligned with the RF connector.

[0055] S5. Send an automatic tightening instruction to the automatic tightening and torque detection module, so that the automatic tightening and torque detection module rotates and docks the RF connector and the RF cable connection end according to the automatic tightening instruction until the tightening torque between the RF connector and the RF cable connection end reaches a set value.

[0056] In specific implementation, when the RF cable connection end and the RF connector are aligned at the set position, the control center sends an automatic tightening instruction to the automatic tightening and torque detection module, so that the automatic tightening and torque detection module rotates and docks the RF connector and the RF cable connection end according to the automatic tightening instruction until the tightening torque between the RF connector and the RF cable connection end reaches the set value.

[0057] The method of this embodiment can replace the traditional manual wiring method, realize the automatic RF cable connection of semiconductor chip error analysis, ensure the reliability and efficiency of RF cable connection, and save manpower.

[0058] Embodiment 2:

[0059] This embodiment provides a semiconductor chip error analysis automated radio frequency cable connection system, such as Figure 2 As shown, it includes a visual imaging module, a control center, a five-axis displacement module, and an automatic tightening and torque detection module. The five-axis displacement module is provided with a radio frequency cable connection end, and the automatic tightening and torque detection module is provided with a radio frequency connector, wherein:

[0060] A visual imaging module is used to collect a spatial relative position image of the RF cable connection end and the RF connector, and transmit the spatial relative position image of the RF cable connection end and the RF connector to a control center;

[0061] A five-axis displacement module, used to receive a five-axis displacement control instruction from a control center, and adjust the spatial position of the RF cable connection end relative to the RF connector according to the five-axis displacement control instruction;

[0062] The automatic tightening and torque detection module is used to receive the automatic tightening instruction from the control center, and rotate and dock the RF connector with the RF cable connection end according to the automatic tightening instruction until the tightening torque between the RF connector and the RF cable connection end reaches the set value;

[0063] The control center is used to implement the automated radio frequency cable connection method for semiconductor chip error analysis described in Example 1.

[0064] Furthermore, the control center includes an image acquisition unit, an image analysis unit, a first control unit and a second control unit, wherein:

[0065] An image acquisition unit, used to acquire a spatial relative position image of a radio frequency cable connection end and a radio frequency connector collected by a visual imaging module, wherein the radio frequency cable connection end is arranged on a five-axis displacement module, and the radio frequency connector is arranged on an automatic tightening and torque detection module;

[0066] An image analysis unit, used to perform image analysis on the spatial relative position image of the RF cable connection end and the RF connector, and determine the spatial relative position information between the RF cable connection end and the RF connector;

[0067] The first control unit is used to send a corresponding five-axis displacement control instruction to the five-axis displacement module according to the spatial relative position information between the RF cable connection end and the RF connector, so that the five-axis displacement module adjusts the spatial position of the RF cable connection end relative to the RF connector according to the five-axis displacement control instruction;

[0068] The second control unit is used to send an automatic tightening instruction to the automatic tightening and torque detection module, so that the automatic tightening and torque detection module rotates and docks the RF connector and the RF cable connection end according to the automatic tightening instruction until the tightening torque between them reaches a set value.

[0069] The visual imaging module includes a number of high-definition cameras, each of which is used to collect high-resolution spatial relative position images of the RF cable connection end and the RF connector from various spatial directions. The five-axis displacement module includes a five-axis robotic arm, through which the RF cable connection end can be adjusted to any angle and orientation. The automatic tightening and torque detection module includes an automatic tightening machine and a torque detector. The automatic tightening machine is used to rotate and dock the RF connector with the RF cable connection end, and the torque detector is used to detect the tightening torque between the RF connector and the RF cable connection end. When the torque reaches the set value, the automatic tightening machine stops rotating the RF connector.

[0070] Embodiment 3:

[0071] This embodiment provides a semiconductor chip error analysis automated radio frequency cable connection system, such as Figure 3 As shown, including:

[0072] Data interface, used to establish data connection between the processor and the visual imaging module, the five-axis displacement module, and the automatic tightening and torque detection module;

[0073] A memory for storing execution instructions;

[0074] The processor is used to read the execution instruction stored in the memory and execute the automatic radio frequency cable connection method in Example 1 according to the execution instruction.

[0075] Optionally, the system further includes an internal bus, through which the processor, the memory and the data interface can be interconnected, and the internal bus can be an ISA (Industry Standard Architecture) bus, a PCI (Peripheral Component Interconnect) bus or an EISA (Extended Industry Standard Architecture) bus, etc. The bus can be divided into an address bus, a data bus, a control bus, etc.

[0076] The memory may include, but is not limited to, random access memory (RAM), read only memory (ROM), flash memory, first input first output (FIFO) and / or first in last out (FILO), etc. The processor may be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc.; it may also be a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components.

[0077] Embodiment 4:

[0078] This embodiment provides a computer-readable storage medium, on which execution instructions are stored. When the execution instructions are executed on a computer, the computer executes the automated radio frequency cable connection method in Embodiment 1. The computer-readable storage medium refers to a carrier for storing data, which may include but is not limited to a floppy disk, an optical disk, a hard disk, a flash memory, a USB flash drive, and / or a memory stick, etc. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices.

[0079] This embodiment also provides a computer program product, which, when executed on a computer, executes the automated radio frequency cable connection method in Embodiment 1. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices.

[0080] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the protection scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A method for automatically connecting radio frequency cables for semiconductor chip error analysis. It is characterized in that include: S1. Acquire the spatial relative position image of the RF cable connection end and the RF connector collected by the visual imaging module, wherein the RF cable connection end is arranged on the five-axis displacement module, and the RF connector is arranged on the automatic tightening and torque detection module; S2. Perform image analysis on the spatial relative position image of the RF cable connection end and the RF connector to determine the spatial relative position information between the RF cable connection end and the RF connector; S3 sends a corresponding five-axis displacement control command to the five-axis displacement module according to the spatial relative position information between the RF cable connection end and the RF connector, so that the five-axis displacement module adjusts the spatial position of the RF cable connection end relative to the RF connector according to the five-axis displacement control command; S4. Repeat steps S1 to S3 until the RF cable connection end is moved to align closely with the RF connector; S5. Send an automatic tightening command to the control automatic tightening and torque detection module, so that the automatic tightening and torque detection module rotates and docks the RF connector with the RF cable connection end according to the automatic tightening command until the tightening torque between the RF connector and the frequency cable connection end reaches the set value; The performing image analysis on the spatial relative position image of the RF cable connection end and the RF connector to determine the spatial relative position information between the RF cable connection end and the RF connector includes: Performing image target detection on the spatial relative position image of the RF cable connection end and the RF connector, and determining image position information of the RF cable connection end and image position information of the RF connector in the spatial relative position image; Determine spatial relative position information of the RF cable connection end and the RF connector in three-dimensional space using the image position information of the RF cable connection end and the image position information of the RF connector; The determining, according to the image position information of the RF cable connection end and the image position information of the RF connector, the spatial relative position information of the RF cable connection end and the RF connector in the three-dimensional space includes: According to the image position information of the RF cable connection end and the image position information of the RF connector, mapping is performed to determine the relative position information of the RF cable connection end and the RF connector in a certain spatial direction; According to the relative position information of the RF cable connection end and the RF connector in each spatial direction, the spatial relative position information of the RF cable connection end and the RF connector in the three-dimensional space is calculated and determined.

2. According to claim 1, a method for automatically connecting radio frequency cables for semiconductor chip error analysis, It is characterized in that The sending of a corresponding five-axis displacement control instruction to the five-axis displacement module according to the spatial relative position information between the RF cable connection end and the RF connector includes: Determine a motion trajectory of the RF cable connection end moving toward the RF connector according to spatial relative position information between the RF cable connection end and the RF connector; Generate corresponding five-axis displacement control instructions according to the motion trajectory.

3. A semiconductor chip error analysis automated RF cable connection system, It is characterized in that It includes a visual imaging module, a control center, a five-axis displacement module, and an automatic tightening and torque detection module. The five-axis displacement module is provided with a radio frequency cable connection end, and the automatic tightening and torque detection module is provided with a radio frequency connector, wherein: A visual imaging module is used to collect a spatial relative position image of the RF cable connection end and the RF connector, and transmit the spatial relative position image of the RF cable connection end and the RF connector to a control center; A five-axis displacement module, used to receive a five-axis displacement control instruction from a control center, and adjust the spatial position of the RF cable connection end relative to the RF connector according to the five-axis displacement control instruction; The automatic tightening and torque detection module is used to receive the automatic tightening instruction from the control center, and rotate and dock the RF connector with the RF cable connection end according to the automatic tightening instruction until the tightening torque between the RF connector and the RF cable connection end reaches the set value; A control center is used to implement the automated radio frequency cable connection method for semiconductor chip error analysis as described in claim 1 or 2.

4. The semiconductor chip error analysis automated radio frequency cable connection system according to claim 3, It is characterized in that The control center includes an image acquisition unit, an image analysis unit, a first control unit and a second control unit, wherein: An image acquisition unit, used to acquire a spatial relative position image of a radio frequency cable connection end and a radio frequency connector collected by a visual imaging module, wherein the radio frequency cable connection end is arranged on a five-axis displacement module, and the radio frequency connector is arranged on an automatic tightening and torque detection module; An image analysis unit, used to perform image analysis on the spatial relative position image of the RF cable connection end and the RF connector, and determine the spatial relative position information between the RF cable connection end and the RF connector; The first control unit is used to send a corresponding five-axis displacement control instruction to the five-axis displacement module according to the spatial relative position information between the RF cable connection end and the RF connector, so that the five-axis displacement module adjusts the spatial position of the RF cable connection end relative to the RF connector according to the five-axis displacement control instruction; The second control unit is used to send an automatic tightening instruction to the automatic tightening and torque detection module, so that the automatic tightening and torque detection module rotates and docks the RF connector and the RF cable connection end according to the automatic tightening instruction until the tightening torque between the RF connector and the RF cable connection end reaches a set value.

5. The semiconductor chip error analysis automated radio frequency cable connection system according to claim 3, It is characterized in that The visual imaging module includes a plurality of high-definition cameras.

6. The semiconductor chip error analysis automated radio frequency cable connection system according to claim 3, It is characterized in that The five-axis displacement module includes a five-axis robotic arm.

7. The semiconductor chip error analysis automated radio frequency cable connection system according to claim 3, It is characterized in that The automatic tightening and torque detection module includes an automatic tightening machine and a torque detector.

8. The semiconductor chip error analysis automated radio frequency cable connection system according to claim 3, It is characterized in that The control center includes a computer, and the computer includes: A memory for storing execution instructions; A processor is used to read the execution instruction stored in the memory and execute the semiconductor chip error analysis automated radio frequency cable connection method according to claim 1 or 2 according to the execution instruction.

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