A gantry machine tool for efficient processing of the bed of semiconductor cutting equipment

Abstract

The present invention provides a gantry machine tool for high-efficiency processing of a semiconductor cutting equipment bed, comprising a briquetting device, which is arranged inside a slide and is used to squeeze debris generated by processing into blocks; a filtering device, which is arranged at one end of the briquetting device and is used to further filter the debris in the cutting fluid; and a blowing device, which is arranged at one end of the slide and is used to blow the debris from the slide into the briquetting device for briquetting. By combining a translation mechanism and a valve mechanism, accurate blowing can be used to expand the wind force, and metal debris in the slide can be removed to the groove to prevent blockage. The block moving mechanism then squeezes large pieces of debris into blocks, and the block collecting mechanism sends them into a collecting barrel to achieve recycling. After the cutting fluid contains a small amount of impurities and is processed by the briquetting device, the metal and liquid are separated by the filtering device, and the extrusion mechanism accelerates the separation, so as to achieve the recycling of the cutting fluid.

Description

Technical Field

[0001] The invention relates to the technical field of machining machine tools, and in particular to a gantry machine tool for efficiently machining a bed of semiconductor cutting equipment. Background Art

[0002] Gantry machine tool is a high-precision, long-travel CNC machine tool. Its design is inspired by the traditional gantry-style building structure. It has strong rigidity and stability. It is mainly composed of bed, gantry, worktable, spindle system, control system, etc. Gantry machine tool adopts double-column or single-column support beam, on which the spindle box is installed, which can move laterally along the beam, while the worktable can move longitudinally and vertically along the bed. This structural design makes gantry machine tool have significant advantages in processing large and heavy workpieces, and can achieve high-precision and high-efficiency processing operations. It is widely used in aerospace, automobile manufacturing, mold processing, semiconductor manufacturing and other fields.

[0003] Existing patent CN114850949B discloses a gantry machine tool with a chain structure for automatic chip removal, including a machine tool, spiral chip conveyors are respectively installed on both sides of the interior of the machine tool, a table is slidably installed inside the machine tool, a chain plate chip conveyor is installed at the bottom of the machine tool, a protective structure is installed on the machine tool, a cleaning structure is arranged on the machine tool, a scraping structure is arranged on the table, a chip collecting structure is arranged at one end of the chain plate chip conveyor, and an automatic chip removal structure is installed on the chip collecting structure; through the arrangement of the protective structure, not only can the protection effect of the table top moving component be achieved to avoid jamming caused by chips, but it can also be conveniently connected to the table top in a detachable manner so as to be suitable for different working environments, and it is also convenient for assembly and later disassembly and maintenance, and the operation is convenient and quick.

[0004] However, in actual use, it was found that a large amount of metal debris was generated during the processing. The accumulation affected the accuracy and stability of the machine tool and may even cause failures. At the same time, it polluted the environment and cutting fluid, reducing its effectiveness. If the metal debris and cutting fluid are not treated, it is difficult to recycle and reuse, resulting in a waste of resources. Summary of the invention

[0005] The purpose of the present invention is to address the deficiencies of the prior art and provide a gantry machine tool for efficient processing of the bed of semiconductor cutting equipment, which realizes the recycling function of metal debris and cutting fluid through a briquetting device in conjunction with a filtering device, thereby solving the problem of metal debris accumulation.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] A gantry machine tool for efficiently processing a semiconductor cutting equipment bed, comprising:

[0008] A briquetting device, which is arranged inside the slide and is used to squeeze the debris generated by processing into briquettes;

[0009] A filter device, the filter device is arranged at one end of the briquetting device and is used to further filter the debris in the cutting fluid;

[0010] A blowing device, which is arranged at one end of the slide and is used to blow the debris on the slide into the briquetting device for briquetting;

[0011] During the machining process, the machining head processes the parts on the slide and sprays cutting fluid. The blowing device blows the mixture of cutting fluid and machining debris in the groove of the slide into the briquetting device. The briquetting device compresses the larger debris into blocks for collection. The smaller debris is filtered through the blowing device, and the filtered cutting fluid is collected.

[0012] Preferably, the briquetting device comprises:

[0013] A block moving mechanism, which is arranged on the top of the telescopic plate and is used to press the debris into blocks and push out the debris blocks;

[0014] A block receiving mechanism, which is disposed in a groove at one end of the slide and is used to cooperate with the block moving mechanism to push out the debris block;

[0015] A filter plate is disposed in a groove at one end of the slide, and the filter plate divides the groove into two grooves.

[0016] Preferably, the block shifting mechanism comprises:

[0017] A fixed plate, the fixed plate is arranged on the top of the telescopic plate and is symmetrically arranged;

[0018] A block moving motor, the block moving motor is installed on one side of the fixed plate;

[0019] A first screw rod, one end of which is drivingly connected to the output end of the block moving motor, and the first screw rod is also inserted into the interior of the fixing plate;

[0020] a first sliding bar, the first sliding bar being arranged on one side of the fixing plate;

[0021] A first thread sleeve, the first thread sleeve is arranged on the first threaded rod and the first sliding rod and is threadably matched with the first threaded rod, and a through groove is further provided inside the first thread sleeve;

[0022] A fixing seat, the fixing seat being arranged on the top of the first silk sleeve;

[0023] A lifting motor, the lifting motor is installed on the top of the fixing seat;

[0024] A threaded screw, one end of which is drivingly connected to the output end of the lifting motor;

[0025] An extrusion block is inserted into the through groove inside the first thread sleeve, and a threaded hole matching with the threaded screw rod is opened inside the extrusion block.

[0026] Preferably, the block receiving mechanism comprises:

[0027] A fixed block, the fixed block is arranged on one side of the slide;

[0028] a first telescopic rod, wherein the first telescopic rod is arranged on one side of the fixing block;

[0029] A push plate, the push plate being arranged at one end of the first telescopic rod;

[0030] A first spring, wherein the first spring is sleeved on the outer side of the first telescopic rod;

[0031] A push-pull plate, the push-pull plate being arranged in a groove inside the slide;

[0032] A cylinder, the cylinder is mounted on the top of the slide and its top rod is connected to the push-pull plate;

[0033] A hook, the hook being arranged on one side of the slide;

[0034] A collection bucket, the collection bucket is arranged on the hook;

[0035] A liquid outlet is arranged on one side of the slide.

[0036] Preferably, the filtering device comprises:

[0037] A liquid separation tank, which is arranged on the top of the support plate and has a through groove inside;

[0038] An extrusion mechanism, the extrusion mechanism is arranged at the bottom of the liquid separation tank;

[0039] A liquid collecting trough, the liquid collecting trough being arranged on one side of the support plate;

[0040] A liquid outlet pipe, the liquid outlet pipe is inserted into the interior of the support plate and communicated with the liquid collecting tank;

[0041] A liquid blocking mechanism is arranged on the top of the liquid separation tank.

[0042] Preferably, the extrusion mechanism comprises:

[0043] A mounting seat, the mounting seat being arranged on one side of the support plate;

[0044] A driving motor, the driving motor is mounted on one side of the mounting seat;

[0045] A driving rod, one end of which is drivingly connected to the output end of the driving motor;

[0046] A plug plate, which is disposed on one side of the support plate and is rotatably connected to the driving rod;

[0047] A main bevel gear, the main bevel gear being arranged on the outer side of the driving rod;

[0048] A slave helical gear meshing with the master helical gear;

[0049] A mounting plate, the mounting plate being arranged at the bottom of the liquid separation tank;

[0050] A rotating shaft, the rotating shaft is plugged into the interior of the mounting plate and one end of the rotating shaft is transmission-connected to the slave helical gear;

[0051] a second telescopic rod, the second telescopic rod being arranged on one side of the rotating shaft;

[0052] A connecting block, the connecting block is arranged on the top rod of the second telescopic rod;

[0053] A second spring, wherein the second spring is sleeved on an outer side of the second telescopic rod;

[0054] A squeezing roller, the squeezing roller is inserted into the interior of the connecting block;

[0055] A squeezing plate, the squeezing plate is arranged at the bottom of the liquid separation tank;

[0056] A filter cartridge is arranged at the bottom of the liquid separation tank.

[0057] Preferably, the liquid blocking mechanism comprises:

[0058] A fixed bottom plate, the fixed bottom plate is arranged on the top of the liquid separation tank;

[0059] A threaded rod with a handle, wherein the threaded rod with a handle is inserted into the interior of the fixed base plate and is threadably matched with the fixed base plate;

[0060] A rubber sealing sheet is arranged at the bottom end of the threaded rod with a handle.

[0061] Preferably, the blowing device comprises:

[0062] A sealing box, the sealing box is arranged at one end of the slide; a translation mechanism, the translation mechanism is arranged inside the sealing box;

[0063] A valve mechanism, wherein the valve mechanism is arranged on the inner wall of the sealing box;

[0064] An air pump, the air pump is arranged on the top of the sealed box and the air outlet of the air pump is communicated with the interior of the sealed box;

[0065] An air outlet pipe is arranged at one side of the sealed box and communicated with the interior of the sealed box.

[0066] Preferably, the translation mechanism comprises:

[0067] A translation motor, the translation motor is installed on one side of the sealing box;

[0068] A second screw rod, one end of which is drivingly connected to the output end of the translation motor;

[0069] A bearing, the bearing being arranged on the inner wall of the sealing box and being rotatably connected to the second screw rod;

[0070] a second sliding bar, the second sliding bar being arranged on the inner wall of the sealing box;

[0071] A second thread sleeve, the second thread sleeve is sleeved on the second threaded rod and the second sliding rod and is threadably matched with the second threaded rod;

[0072] A connecting shaft, the connecting shaft being arranged inside the second silk sleeve;

[0073] A roller is sleeved on the connecting shaft.

[0074] Preferably, the valve mechanism comprises:

[0075] A fixed bottom block, the fixed bottom block being arranged on the inner wall of the sealing box;

[0076] A sliding rod, the sliding rod is arranged between the two fixed bottom blocks;

[0077] A slider, the slider being slidably connected to the sliding rod;

[0078] a third spring, the third spring being sleeved on the outer side of the sliding rod;

[0079] A sliding sealing plate, the sliding sealing plate being arranged on one side of the sliding block;

[0080] A pressure plate is arranged on one side of the sliding sealing plate.

[0081] The beneficial effects of the present invention are:

[0082] (1) The present invention uses a translation mechanism in conjunction with a valve mechanism to open the sliding sealing plate in sequence to connect the air outlet pipe to the sealing box, so that air is blown to only one slide slot in the slide table each time, and the wind force is amplified. When the sliding sealing plate is not opened, the air pump will pressurize the air in the sealing box, thereby further amplifying the wind force and better blowing the metal debris in the slide slot into the groove at one end of the slide table, thereby avoiding the problem of metal debris clogging.

[0083] (2) The present invention uses the blowing device to blow metal debris and cutting fluid into the groove at one end of the slide, and then the block moving mechanism controls the extrusion block to extrude larger metal debris into blocks. Then, the block collecting mechanism cooperates to send the metal blocks to the collection bucket for storage, so that the metal debris can be recycled.

[0084] (3) The present invention uses a briquetting device to process the cutting fluid containing a small amount of metal impurities into a filtering device for further processing, and separates the metal chips and the cutting fluid through a filter cartridge. During the filtering process, the squeezing mechanism continuously squeezes the filter cartridge, which promotes faster separation of the cutting fluid and the metal chips, thereby realizing the recycling of the cutting fluid.

[0085] In summary, the present invention has the advantages of efficient cleaning and resource recycling. BRIEF DESCRIPTION OF THE DRAWINGS

[0086] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0087] Figure 2 For the present invention Figure 1 The enlarged structural diagram at A in the middle;

[0088] Figure 3 This is a schematic diagram of the structure of the collecting barrel of the present invention;

[0089] Figure 4 For the present invention Figure 3 The enlarged structural diagram at B in the middle;

[0090] Figure 5 It is a schematic diagram of the structure of the filtering device of the present invention;

[0091] Figure 6 For the present invention Figure 5 The enlarged structural diagram at C in the middle;

[0092] Figure 7 For the present invention Figure 5 The enlarged structural diagram at D in the middle;

[0093] Figure 8 This is a schematic diagram of the main structure of the filtering device of the present invention;

[0094] Fig. 9 It is a schematic diagram of the structure of the blowing device of the present invention;

[0095] Fig.10 This is a schematic cross-sectional view of the sealing box of the present invention;

[0096] Fig.11 This is a schematic diagram of the valve mechanism structure of the present invention;

[0097] Fig.12 For the present invention Fig.11 Enlarged structural diagram at E in the middle.

[0098] In the figure:

[0099] 1. Block pressing device; 11. Block moving mechanism; 111. Block moving motor; 112. Fixed plate; 113. First screw rod; 114. First slide rod; 115. First thread sleeve; 116. Fixed seat; 117. Lifting motor; 118. Threaded screw rod; 119. Extrusion block; 12. Block collecting mechanism; 121. Fixed block; 122. First telescopic rod; 123. Push plate; 124. First spring; 125. Push-pull plate; 126. Cylinder; 127. Collection bucket; 128. Hook; 13. Filter plate; 14. Liquid outlet;

[0100] 2. Filter device; 21. Liquid separation tank; 22. Support plate; 23. Extrusion mechanism; 231. Mounting seat; 232. Driving motor; 233. Driving rod; 234. Insert plate; 235. Main bevel gear; 236. Slave bevel gear; 237. Mounting plate; 238. Rotating shaft; 239. Second telescopic rod; 2310. Connecting block; 2311. Second spring; 2312. Extrusion roller; 2313. Extrusion plate; 2314. Filter cartridge; 24. Liquid collecting tank; 25. Liquid outlet pipe; 26. Liquid blocking mechanism; 261. Fixed bottom plate; 262. Threaded rod with handle; 263. Rubber sealing sheet;

[0101] 3. Blowing device; 31. Sealing box; 32. Translation mechanism; 321. Translation motor; 322. Second screw rod; 323. Bearing; 324. Second sliding rod; 325. Second thread sleeve; 326. Connecting shaft; 327. Roller; 33. Valve mechanism; 331. Fixed bottom block; 332. Sliding rod; 333. Sliding block; 334. Third spring; 335. Sliding sealing plate; 336. Pressing plate; 34. Air pump; 35. Air outlet pipe;

[0102] 4. Slide seat; 5. Slide table; 6. Telescopic plate; 7. Processing machine head. DETAILED DESCRIPTION

[0103] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0104] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0105] Embodiment 1

[0106] like Figure 1 As shown, this embodiment provides a gantry machine tool for efficiently processing a semiconductor cutting equipment bed, comprising:

[0107] A briquetting device 1, which is arranged inside the slide 5 and is used to squeeze the debris generated by processing into briquettes;

[0108] A filtering device 2, the filtering device 2 is arranged at one end of the briquetting device 1 and is used to further filter the debris in the cutting fluid;

[0109] A blowing device 3, which is disposed at one end of the slide 5 and is used to blow the debris on the slide 5 into the briquetting device 1 for briquetting;

[0110] During the machining process, the machining head 7 processes the parts on the slide 5 and sprays cutting fluid, and the blowing device 3 blows the mixture of cutting fluid and machining debris in the groove of the slide 5 into the briquetting device 1. The briquetting device 1 compresses the larger debris into blocks for collection, and the smaller debris is filtered through the blowing device 3, and the filtered cutting fluid is collected.

[0111] It should be noted that the workpiece is placed on the slide and fixed, the telescopic plate is slidably set on the slide, the slide can be extended and retracted following the movement of the slide to prevent debris generated by processing from falling onto the slide and hindering the movement of the slide, and a power component for controlling the movement of the slide is arranged inside the slide, and a plurality of chutes for the flow of cutting fluid are evenly arranged on the slide, and a groove is arranged at one end of the slide, and the cutting fluid flows into the groove along the chute, and a block pressing device is arranged inside the groove.

[0112] like Figures 1 to 4 As shown, the briquetting device 1 comprises:

[0113] A block moving mechanism 11, which is disposed on the top of the telescopic plate 6 and is used to press the debris into blocks and push out the debris blocks;

[0114] A block receiving mechanism 12, which is disposed in a groove at one end of the slide 5 and is used to cooperate with the block moving mechanism 11 to push out the debris block;

[0115] A filter plate 13 is disposed in a groove at one end of the slide 5 , and the filter plate 13 divides the groove into two grooves.

[0116] Wherein, the block shifting mechanism 11 comprises:

[0117] A fixed plate 112, wherein the fixed plate 112 is disposed on the top of the telescopic plate 6 and is symmetrically arranged;

[0118] A block moving motor 111, wherein the block moving motor 111 is installed on one side of the fixing plate 112;

[0119] A first screw rod 113, one end of which is drivingly connected to the output end of the block moving motor 111, and the first screw rod 113 is also inserted into the interior of the fixing plate 112;

[0120] a first sliding bar 114 , wherein the first sliding bar 114 is disposed on one side of the fixing plate 112 ;

[0121] A first thread sleeve 115, wherein the first thread sleeve 115 is disposed on the first threaded rod 113 and the first sliding rod 114 and is threadably matched with the first threaded rod 113, and a through groove is further provided inside the first thread sleeve 115;

[0122] A fixing seat 116, wherein the fixing seat 116 is disposed on the top of the first silk sleeve 115;

[0123] A lifting motor 117, wherein the lifting motor 117 is installed on the top of the fixing seat 116;

[0124] A threaded screw 118, one end of which is drivingly connected to the output end of the lifting motor 117;

[0125] The extrusion block 119 is inserted into the through groove inside the first thread sleeve 115 , and a threaded hole matching with the threaded screw rod 118 is formed inside the extrusion block 119 .

[0126] Wherein, the block receiving mechanism 12 comprises:

[0127] A fixing block 121, wherein the fixing block 121 is disposed on one side of the slide 5;

[0128] A first telescopic rod 122, wherein the first telescopic rod 122 is disposed on one side of the fixing block 121;

[0129] A push plate 123, wherein the push plate 123 is disposed at one end of the first telescopic rod 122;

[0130] A first spring 124, wherein the first spring 124 is sleeved on the outer side of the first telescopic rod 122;

[0131] A push-pull plate 125, wherein the push-pull plate 125 is disposed in a groove inside the slide 5;

[0132] A cylinder 126, wherein the cylinder 126 is mounted on the top of the slide 5 and its top rod is connected to the push-pull plate 125;

[0133] A hook 128, wherein the hook 128 is disposed on one side of the slide 5;

[0134] A collecting bucket 127, wherein the collecting bucket 127 is disposed on the hook 128;

[0135] The liquid outlet 14 is disposed on one side of the slide 5 .

[0136] In this embodiment, the block moving mechanism 11 drives the extrusion block 119 to reciprocate in the groove of the slide 5, squeezing larger metal debris into blocks. The smaller metal debris in the cutting fluid flows out through the filter plate 13 and then flows out through the liquid outlet 14 to the filter device 2 for further processing. The block moving mechanism 11 cooperates with the block collecting mechanism 12 to push the extruded metal debris blocks into the collection bucket 127 for collection.

[0137] In detail, the block moving motor 111 drives the first screw rod 113 to rotate, and the first screw rod 113 drives the first wire sleeve 115 to slide on the first slide rod 114, thereby driving the extrusion block 119 to reciprocate in the groove inside the slide 5, and pressurize the metal chips into blocks at both ends of the groove, and the smaller metal chips and cutting fluid will flow out through the holes on the filter plate 13 to the groove on the other side, and flow out along the liquid outlet 14 into the filter device 2;

[0138] When the metal debris is squeezed multiple times to form a metal debris block, the metal debris block is pushed into the collecting bucket 127 for collection. At this time, the lifting motor 117 drives the squeezing block 119 to slide upward through the threaded screw 118, and the block moving mechanism 11 drives the squeezing block 119 to push the push plate 123, so that the first telescopic rod 122 and the first spring 124 are both retracted toward one end of the fixed block 121. At this time, there is a gap between the push plate 123 and the metal debris block. The lifting motor 117 drives the squeezing block 119 again to move it downward, pushing the metal debris block to the other end of the internal groove of the slide table 5. At this time, the cylinder 126 contracts and drives the push-pull plate 125 to open, and the squeezing block 119 pushes the metal debris block to fall into the collecting bucket 127 for collection.

[0139] It should be noted that a slide groove for the push-pull plate 125 to move is provided on the slide 5, and the collecting barrel 127 is installed on the hook 128 by hanging, which is convenient for installation and disassembly.

[0140] Further, if Figures 5 to 8 As shown, the filtering device 2 comprises:

[0141] A liquid separation tank 21, wherein the liquid separation tank 21 is disposed on the top of the support plate 22, and a through groove is formed inside the liquid separation tank 21;

[0142] A squeezing mechanism 23, wherein the squeezing mechanism 23 is disposed at the bottom of the liquid separation tank 21;

[0143] A liquid collecting tank 24, wherein the liquid collecting tank 24 is disposed on one side of the support plate 22;

[0144] A liquid outlet pipe 25, the liquid outlet pipe 25 is inserted into the interior of the support plate 22 and communicated with the liquid collecting tank 24;

[0145] The liquid blocking mechanism 26 is disposed on the top of the liquid separation tank 21 .

[0146] Wherein, the extrusion mechanism 23 comprises:

[0147] A mounting seat 231, wherein the mounting seat 231 is disposed on one side of the support plate 22;

[0148] A driving motor 232, wherein the driving motor 232 is mounted on one side of the mounting seat 231;

[0149] A driving rod 233, one end of which is drivingly connected to the output end of the driving motor 232;

[0150] An inserting plate 234, the inserting plate 234 is disposed on one side of the supporting plate 22 and is rotatably connected to the driving rod 233;

[0151] A main bevel gear 235, wherein the main bevel gear 235 is disposed on the outer side of the driving rod 233;

[0152] A slave bevel gear 236, wherein the slave bevel gear 236 is gear-engaged with the master bevel gear 235;

[0153] A mounting plate 237, wherein the mounting plate 237 is disposed at the bottom of the liquid separation tank 21;

[0154] A rotating shaft 238, wherein the rotating shaft 238 is inserted into the interior of the mounting plate 237 and one end of the rotating shaft 238 is drivingly connected to the slave bevel gear 236;

[0155] a second telescopic rod 239, wherein the second telescopic rod 239 is disposed at one side of the rotating shaft 238;

[0156] A connecting block 2310, wherein the connecting block 2310 is disposed on the top rod of the second telescopic rod 239;

[0157] A second spring 2311, wherein the second spring 2311 is sleeved on the outer side of the second telescopic rod 239;

[0158] A squeezing roller 2312, wherein the squeezing roller 2312 is inserted into the interior of the connecting block 2310;

[0159] A squeezing plate 2313, wherein the squeezing plate 2313 is disposed at the bottom of the liquid separation tank 21;

[0160] The filter cartridge 2314 is disposed at the bottom of the liquid separation tank 21 .

[0161] Wherein, the liquid blocking mechanism 26 comprises:

[0162] A fixed bottom plate 261, wherein the fixed bottom plate 261 is disposed on the top of the liquid separation tank 21;

[0163] A threaded rod 262 with a handle, wherein the threaded rod 262 with a handle is inserted into the interior of the fixed base plate 261 and is threadably matched with the fixed base plate 261;

[0164] A rubber sealing sheet 263 is provided at the bottom end of the threaded rod 262 with a handle.

[0165] In this embodiment, the filter cartridge 2314 is squeezed by the squeezing mechanism 23 so that the cutting fluid in the filter cartridge 2314 flows out quickly. When the filter cartridge 2314 is replaced, the corresponding through groove on the corresponding liquid separation tank 21 is blocked by the liquid blocking mechanism 26 .

[0166] In detail, the metal scraps and cutting fluid after preliminary filtration flow into the liquid separation tank 21, and then flow into the filter cartridge 2314. On the one hand, the cutting fluid is filtered out of the filter cartridge 2314 by gravity, and on the other hand, the filter cartridge 2314 is squeezed by the liquid separation tank 21 to accelerate the filtration of the cutting fluid. The filtered cutting fluid falls into the interior of the liquid collection tank 24 and flows out through the liquid outlet pipe 25 for collection.

[0167] More specifically, the driving motor 232 drives the main bevel gear 235 on the driving rod 233 to rotate, and the insert plate 234 drives the slave bevel gear 236 to rotate, thereby driving the squeezing roller 2312 to cooperate with the squeezing plate 2313 to continuously squeeze the filter cartridge 2314 during the rotation process, thereby accelerating the filtration of the cutting fluid, and adjusting the length from the squeezing roller 2312 to the rotating shaft 238 through the second telescopic rod 239 and the second spring 2311, so that the filter cartridge 2314 is fully squeezed;

[0168] When the filter cartridge 2314 is filled with metal debris and needs to be replaced, the threaded rod 262 with a handle is rotated to drive the rubber sealing sheet 263 to move downward to block the through groove inside the liquid separation tank 21, and the filter cartridge 2314 is rotated to be unscrewed, cleaned and replaced, and the threaded rod 262 with a handle is rotated again to drive the rubber sealing sheet 263 to move upward to open the corresponding through groove.

[0169] It should be noted that a through groove is provided inside the liquid separation tank 21, and a threaded interface is provided at the bottom of the groove inside the liquid separation tank 21. The filter cartridge 2314 is rotatably installed on the liquid separation tank 21 through the internal thread on the top, which is convenient for cleaning and replacement. A groove is provided on the fixed bottom plate 261 to facilitate the cutting fluid to flow into the liquid separation tank 21.

[0170] Embodiment 2

[0171] like Figures 9 to 12 As shown, the components identical or corresponding to those in the first embodiment are marked with the corresponding reference numerals in the first embodiment. For the sake of simplicity, only the differences from the first embodiment are described below. The second embodiment differs from the first embodiment in that:

[0172] The blowing device 3 comprises:

[0173] A sealing box 31, the sealing box 31 is arranged at one end of the slide 5; a translation mechanism 32, the translation mechanism 32 is arranged inside the sealing box 31;

[0174] A valve mechanism 33, wherein the valve mechanism 33 is arranged on the inner wall of the sealing box 31;

[0175] An air pump 34, wherein the air pump 34 is disposed on the top of the sealed box 31 and an air outlet of the air pump 34 is communicated with the interior of the sealed box 31;

[0176] The air outlet pipe 35 is disposed at one side of the sealing box 31 and communicates with the interior of the sealing box 31 .

[0177] Wherein, the translation mechanism 32 comprises:

[0178] A translation motor 321, wherein the translation motor 321 is installed at one side of the sealing box 31;

[0179] A second screw rod 322, one end of which is drivingly connected to the output end of the translation motor 321;

[0180] A bearing 323, wherein the bearing 323 is disposed on the inner wall of the sealing box 31 and is rotatably connected to the second screw rod 322;

[0181] A second sliding bar 324, wherein the second sliding bar 324 is disposed on the inner wall of the sealing box 31;

[0182] A second thread sleeve 325, wherein the second thread sleeve 325 is sleeved on the second threaded rod 322 and the second sliding rod 324 and is threadably matched with the second threaded rod 322;

[0183] A connecting shaft 326, wherein the connecting shaft 326 is disposed inside the second wire sleeve 325;

[0184] The roller 327 is sleeved on the connecting shaft 326 .

[0185] Wherein, the valve mechanism 33 comprises:

[0186] A fixed bottom block 331, wherein the fixed bottom block 331 is disposed on the inner wall of the sealing box 31;

[0187] A sliding rod 332, wherein the sliding rod 332 is disposed between the two fixed bottom blocks 331;

[0188] A slider 333, wherein the slider 333 is slidably connected to the sliding rod 332;

[0189] a third spring 334, wherein the third spring 334 is sleeved on the outer side of the sliding rod 332;

[0190] A sliding sealing plate 335, wherein the sliding sealing plate 335 is disposed on one side of the sliding block 333;

[0191] The pressing plate 336 is disposed on one side of the sliding sealing plate 335 .

[0192] In this embodiment, air is injected into the sealing box 31 for pressurization through the air pump 34, and the translation mechanism 32 controls the sliding sealing plate 335 in the valve mechanism 33 to open in turn, so that the gas is blown out from the corresponding air outlet pipe 35 to blow away the metal debris in the slide groove on the slide table 5.

[0193] In detail, the translation motor 321 drives the second wire sleeve 325 to slide on the second sliding rod 324 through the second wire sleeve 325, and the second wire sleeve 325 drives the roller 327 thereon to move. During the movement of the roller 327, the roller 327 will squeeze the connecting shaft 326 to make the pressure plate 336 move downward, and the pressure plate 336 drives the sliding sealing plate 335 to move downward, and the air flows out along the air outlet pipe 35. When the roller 327 leaves the pressure plate 336, the sliding sealing plate 335 moves upward again under the push of the third spring 334, closing the corresponding air outlet pipe 35. When the roller 327 is not in contact with the pressure plate 336, the air injected into the sealing box 31 by the air pump 34 cannot flow out, so that the pressure in the sealing box 31 increases, and when the air flows out from the air outlet pipe 35 next time, the wind force also increases accordingly.

[0194] It should be noted that the air outlet pipe 35 is arranged in the slide groove on the slide 5, and the sliding sealing plate 335 controls whether the air outlet pipe 35 is connected to the inside of the sealing box 31, playing the role of a valve, and one side of the pressure plate 336 is provided with a rounded corner to facilitate the rolling of the roller 327.

[0195] Working process

[0196] To blow away the metal debris, the air pump 34 injects air into the sealing box 31, and the translation mechanism 32 sequentially controls the sliding sealing plate 335 in the valve mechanism 33 to open, so that the air flows out from the corresponding air outlet pipe 35 to blow away the metal debris in the slide groove of the slide table 5;

[0197] Metal debris pressing block, the block moving mechanism 11 controls the extrusion block 119 to move back and forth in the groove at one end of the slide 5, presses the larger metal debris into blocks, and cooperates with the block collecting mechanism 12 to push the metal debris blocks into the collection bucket 127 for collection;

[0198] The cutting fluid is filtered, and the cutting fluid and smaller metal debris enter the filter cartridge 2314 in the filter device 2 for filtration, and the cutting fluid is quickly squeezed out and collected in cooperation with the extrusion mechanism 23.

[0199] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A gantry machine tool for efficient processing of the bed of semiconductor cutting equipment, characterized in that: include: A briquetting device, which is arranged inside the slide and is used to squeeze the debris generated by processing into briquettes; A filter device, the filter device is arranged at one end of the briquetting device and is used to further filter the debris in the cutting fluid; A blowing device, which is arranged at one end of the slide and is used to blow the debris on the slide into the briquetting device for briquetting; During the machining process, the machining head processes the parts on the slide table and sprays cutting fluid, and the blowing device blows the mixture of cutting fluid and machining debris in the groove of the slide table into the briquetting device, and the briquetting device compresses the larger debris into blocks for collection, and the smaller debris is filtered through the blowing device, and the filtered cutting fluid is collected; The briquetting device comprises: A block moving mechanism, which is arranged on the top of the telescopic plate and is used to press the debris into blocks and push out the debris blocks; A block receiving mechanism, which is disposed in a groove at one end of the slide and is used to cooperate with the block moving mechanism to push out the debris block; A filter plate, the filter plate is arranged in the groove at one end of the slide, and the filter plate divides the groove into two grooves; The block shifting mechanism includes: A fixed plate, the fixed plate is arranged on the top of the telescopic plate and is symmetrically arranged; A block moving motor, the block moving motor is installed on one side of the fixed plate; A first screw rod, one end of which is drivingly connected to the output end of the block moving motor, and the first screw rod is also inserted into the interior of the fixing plate; a first sliding bar, the first sliding bar being arranged on one side of the fixing plate; A first thread sleeve, the first thread sleeve is arranged on the first threaded rod and the first sliding rod and is threadably matched with the first threaded rod, and a through groove is further provided inside the first thread sleeve; A fixing seat, the fixing seat being arranged on the top of the first silk sleeve; A lifting motor, the lifting motor is installed on the top of the fixing seat; A threaded screw, one end of which is drivingly connected to the output end of the lifting motor; An extrusion block, wherein the extrusion block is inserted into the through groove inside the first thread sleeve, and a threaded hole matching with the threaded screw rod is provided inside the extrusion block; The block receiving mechanism comprises: A fixed block, the fixed block is arranged on one side of the slide; a first telescopic rod, wherein the first telescopic rod is arranged on one side of the fixing block; A push plate, the push plate being arranged at one end of the first telescopic rod; A first spring, wherein the first spring is sleeved on the outer side of the first telescopic rod; A push-pull plate, the push-pull plate being arranged in a groove inside the slide; A cylinder, the cylinder is mounted on the top of the slide and its top rod is connected to the push-pull plate; A hook, the hook being arranged on one side of the slide; A collection bucket, the collection bucket is arranged on the hook; A liquid outlet, the liquid outlet being arranged on one side of the slide; The blowing device comprises: A sealing box, the sealing box is arranged at one end of the slide; a translation mechanism, the translation mechanism is arranged inside the sealing box; A valve mechanism, wherein the valve mechanism is arranged on the inner wall of the sealing box; An air pump, the air pump is arranged on the top of the sealed box and the air outlet of the air pump is communicated with the interior of the sealed box; An air outlet pipe, the air outlet pipe is arranged at one side of the sealed box and communicated with the interior of the sealed box; The translation mechanism comprises: A translation motor, the translation motor is installed on one side of the sealing box; A second screw rod, one end of which is drivingly connected to the output end of the translation motor; A bearing, the bearing being arranged on the inner wall of the sealing box and being rotatably connected to the second screw rod; a second sliding bar, the second sliding bar being arranged on the inner wall of the sealing box; A second thread sleeve, the second thread sleeve is sleeved on the second threaded rod and the second sliding rod and is threadably matched with the second threaded rod; A connecting shaft, the connecting shaft being arranged inside the second silk sleeve; A roller, wherein the roller is sleeved on the connecting shaft; The valve mechanism comprises: A fixed bottom block, the fixed bottom block being arranged on the inner wall of the sealing box; A sliding rod, the sliding rod is arranged between the two fixed bottom blocks; A slider, the slider being slidably connected to the sliding rod; a third spring, the third spring being sleeved on the outer side of the sliding rod; A sliding sealing plate, the sliding sealing plate being arranged on one side of the sliding block; A pressure plate is arranged on one side of the sliding sealing plate.

2. A gantry machine tool for high-efficiency processing of a semiconductor cutting equipment bed according to claim 1, characterized in that: The filtering device comprises: A liquid separation tank, which is arranged on the top of the support plate and has a through groove inside; An extrusion mechanism, the extrusion mechanism is arranged at the bottom of the liquid separation tank; A liquid collecting trough, the liquid collecting trough being arranged on one side of the support plate; A liquid outlet pipe, the liquid outlet pipe is inserted into the interior of the support plate and communicated with the liquid collecting tank; A liquid blocking mechanism is arranged on the top of the liquid separation tank.

3. A gantry machine tool for high-efficiency processing of a semiconductor cutting equipment bed according to claim 2, characterized in that: The extrusion mechanism comprises: A mounting seat, the mounting seat being arranged on one side of the support plate; A driving motor, the driving motor is mounted on one side of the mounting seat; A driving rod, one end of which is drivingly connected to the output end of the driving motor; A plug plate, which is disposed on one side of the support plate and is rotatably connected to the driving rod; A main bevel gear, the main bevel gear being arranged on the outer side of the driving rod; A slave helical gear meshing with the master helical gear; A mounting plate, the mounting plate being arranged at the bottom of the liquid separation tank; A rotating shaft, the rotating shaft is plugged into the interior of the mounting plate and one end of the rotating shaft is transmission-connected to the slave helical gear; a second telescopic rod, the second telescopic rod being arranged on one side of the rotating shaft; A connecting block, the connecting block being arranged on the top rod of the second telescopic rod; A second spring, wherein the second spring is sleeved on an outer side of the second telescopic rod; A squeezing roller, the squeezing roller is inserted into the interior of the connecting block; A squeezing plate, the squeezing plate is arranged at the bottom of the liquid separation tank; A filter cartridge is arranged at the bottom of the liquid separation tank.

4. The semiconductor cutting equipment bed high-efficiency processing gantry machine tool according to claim 2, characterized in that: The liquid blocking mechanism comprises: A fixed bottom plate, the fixed bottom plate is arranged on the top of the liquid separation tank; A threaded rod with a handle, wherein the threaded rod with a handle is inserted into the interior of the fixed base plate and is threadably matched with the fixed base plate; A rubber sealing sheet is arranged at the bottom end of the threaded rod with a handle.

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