Method and system for transferring a sample in an ultrahigh vacuum from one sample holder to another

Abstract

The application discloses a kind of transfer methods and systems of sample in ultrahigh vacuum in different sample holder, comprising the following steps S1: using Omicron conversion frame is completed in the ultrahigh vacuum cavity of Omicron MBE system Thin film growth;S2: install the portable cavity of ultrahigh vacuum to the Loadlock of Omicron MBE system by conical adapter flange, by baking outgas Loadlock is extracted to ultrahigh vacuum, and the Omicron conversion frame of completed growth is transmitted into the Loadlock of Omicron MBE system;S3: open manual gate valve, and the sample storage platform in the portable cavity of ultrahigh vacuum is stretched into the Loadlock of Omicron MBE system downward.The application is realized by designing compatible sample support, and the sample grown on Omicron MBE system can be transmitted into Unisoku STM system for STM measurement in situ without taking out ultrahigh vacuum, solve the problem that two-dimensional sample grown in Omicron thin film growth system cannot be studied in situ (refers to not taking out ultrahigh vacuum) on Unisoku STM system.

Description

Technical Field

[0001] This invention relates to the field of quantum information technology, and in particular to a method and system for transferring samples in different sample holders within an ultra-high vacuum. Background Technology

[0002] With the development of quantum information science, topological and superconducting quantum computing offer new possibilities for solving complex problems that classical computers struggle to handle, and are expected to find wide applications in areas such as cryptography, materials design, and artificial intelligence. Developing quantum computers is key to realizing quantum computing. Regardless of the approach taken, quantum computers use qubits as their basic operational units. Superconducting Josephson junctions, acting as atomic systems with only two energy levels (ground and excited states), can be used to realize perfect qubits. In the fabrication of chip devices, high-quality two-dimensional thin films need to be grown using MBE (Metal-Based Electrode) technology. The study of their physical properties requires in-situ characterization techniques such as STM (Short Scale Transform) and ARPES (Advanced Particulate Spectroscopy). Currently, the leading STM manufacturer on the market is Unisooku of Japan. Major MBE equipment manufacturers include Veeco (USA), Riber (France), DCA (Finland), and Sienta Omicron (Germany). However, the sample racks of these equipment manufacturers are largely not interchangeable. Therefore, many research teams specializing in STM cannot measure samples they cannot grow themselves, while many research teams using Omicron MBE cannot perform STM measurements on their grown thin films. However, most MBE-grown films undergo denaturation or contamination after being exposed to the atmosphere due to atmospheric dust, oxygen, and water vapor. This prevents research teams using the Omicron MBE system and the Unisokoo STM system in different locations, or even two systems purchased within the same research team, from effectively collaborating.

[0003] Ultra-high vacuum carrying cases that use the same sample holder on different ultra-high vacuum equipment can transfer the same sample holder between systems using the same sample holder system, but they cannot transfer the sample holder between different systems because the sample holders, sample stages, and mechanical grippers used on different ultra-high vacuum systems are different. Summary of the Invention

[0004] To address the problems mentioned in the background section, this invention provides a method and system for transferring samples in different sample holders within an ultra-high vacuum.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A method for transferring samples between different sample holders in ultra-high vacuum includes the following steps:

[0007] S1: Thin film growth is completed in the ultra-high vacuum chamber of the Omicron MBE system using an Omicron conversion rack;

[0008] S2: Install the ultra-high vacuum portable chamber onto the Loadlock of the Omicron MBE system via a conical adapter flange. Bake and degas the Loadlock to ultra-high vacuum, and transfer the grown Omicron conversion frame into the Loadlock of the Omicron MBE system.

[0009] S3: Open the CF35 manual gate valve, extend the sample storage stage in the ultra-high vacuum portable chamber downwards into the Loadlock of the Omicron MBE system, and use the sample transfer rod on the Loadlock to grab the Omicron conversion rack that has been grown and place it on the sample storage stage at the position specifically used to store the Omicron conversion rack.

[0010] S4: Pull the sample storage stage upward from the Omicron Loadlock into the ultra-high vacuum portable chamber, close the CF35 manual gate valve, seal the ultra-high vacuum portable chamber, and maintain the ultra-high vacuum only through the built-in small ion pump.

[0011] S5: Use the mechanical gripper inside the ultra-high vacuum portable chamber to unscrew the sample transfer tray from the Omicron transfer frame, move and rotate the sample storage stage, and screw the sample transfer tray onto the Unisoo sample holder;

[0012] S6: Disassemble the conical adapter flange and remove the ultra-high vacuum portable chamber from the Loadlock of the Omicron system. The ultra-high vacuum is maintained for a short time by the getter pump inside the portable chamber. During long-distance transportation, it is plugged in and the ultra-high vacuum is maintained by a small ion pump.

[0013] S7: Transport to the destination of the Unisoku system and install it onto the Loadlock of the Unisoku STM via a tapered adapter flange;

[0014] S8: Bake the Loadlock to an ultra-high vacuum, open the CF35 hand valve, extend the sample storage stage downwards into the Loadlock of the Unisoo STM, and remove the sample holder using the mechanical gripper of the sample transfer rod built into the Loadlock, transferring it into the Unisoo STM cavity to complete the STM study.

[0015] A system for transferring samples in an ultra-high vacuum to different sample holders includes an ultra-high vacuum portable cavity, on which a first sample transfer rod and a second sample transfer rod are respectively installed. A sample storage stage is fixed to the output end of the first sample transfer rod, and a mechanical gripper is fixed to the output end of the second sample transfer rod.

[0016] The sample storage platform has two storage positions, which respectively store a Unisoo conversion tray and an Omicron conversion tray. Both the Unisoo and Omicron conversion trays are equipped with quick-release structures that correspond to and match the sample conversion trays. The sample conversion trays can be removed from and installed on the Unisoo and Omicron conversion trays by means of a mechanical gripper.

[0017] The first sample transfer rod is fixed at the top of the ultra-high vacuum portable cavity. The bottom of the ultra-high vacuum portable cavity is connected to a tapered adapter flange, and a manual gate valve is provided between the tapered adapter flange and the ultra-high vacuum portable cavity.

[0018] Preferably, the first sample transfer rod is set vertically, the second sample transfer rod is set horizontally, and the axes of the first sample transfer rod and the second sample transfer rod are coplanar.

[0019] Preferably, a small pump is installed on the ultra-high vacuum portable cavity to maintain the ultra-high vacuum state inside the ultra-high vacuum portable cavity.

[0020] Preferably, the ultra-high vacuum portable cavity is equipped with an observation window.

[0021] Preferably, the sample transfer trays of the Unisoo transfer tray and the Omicron transfer tray on the sample storage stage are connected in different directions.

[0022] Preferably, the quick-release structure includes a threaded post fixed on the Unisokoo and Omicron conversion trays, and the sample conversion tray has a threaded groove on the side away from the sample storage area that mates with the threaded post.

[0023] Preferably, the mechanical gripper has a sleeve-shaped structure, and a first limiting protrusion is provided on the side of the mechanical gripper away from the second sample transfer rod, and a second limiting protrusion corresponding to and matching the first limiting protrusion is fixed on the sample transfer holder.

[0024] Preferably, the sample transfer holder has a first sample slot and a second sample slot.

[0025] Preferably, the first sample slot is used to store samples with a size of 5mm*5mm, and the second sample slot is used to store samples with a size of 2mm*10mm.

[0026] Compared with the prior art, the beneficial effects of the present invention are:

[0027] 1. Seamless transfer of samples between different sample holders in ultra-high vacuum was achieved, solving the problem that different research teams could not cooperate due to the lack of interoperability of sample holders, and promoting the sharing and cooperation of scientific research resources.

[0028] 2. It effectively protects the ultra-high vacuum environment of the sample during the transfer process, avoiding sample denaturation or contamination due to atmospheric exposure, and ensuring the quality of the sample and the accuracy of the experimental results.

[0029] 3. The uniquely designed compatible sample holder and quick-release structure improve the convenience and efficiency of sample transfer, and reduce the difficulty of operation and time cost.

[0030] 4. The various high-performance components, such as miniature pumps and observation windows, ensure the reliability and stability of the transfer system, enabling it to meet complex experimental requirements.

[0031] 5. The rational layout of the sample transfer rod and the ingenious design of the mechanical gripper increase the flexibility and accuracy of operation, and reduce interference and errors during operation.

[0032] 6. The entire transfer method and system have high versatility and scalability, and can be applied to a variety of different types of ultra-high vacuum equipment and sample holders, showing broad application prospects.

[0033] In summary, this invention, through the design of a compatible sample holder, enables the in-situ transfer of samples grown on the Omicron system into the Unisoku system for STM measurement without removing them from the ultra-high vacuum. This solves the problem of STM research teams being unable to collaborate with each other due to differences in their thin film growth systems. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 This is a schematic diagram showing the connection status between the transfer system of the present invention and Loadlock;

[0036] Figure 2 This is a three-dimensional detailed view of the transfer system of the present invention;

[0037] Figure 3 This is a cross-sectional view of the ultra-high vacuum portable cavity in the transfer system of the present invention;

[0038] Figure 4 for Figure 3 Enlarged diagram of position A in the middle;

[0039] Figure 5 This is an enlarged detail view of the sample storage stage of the present invention;

[0040] Figure 6 This is a schematic diagram showing the mating of the Omicron transfer holder and the sample transfer holder according to the present invention;

[0041] Figure 7 This is a schematic diagram of the Unisoo transfer holder and the sample transfer holder of the present invention.

[0042] Figure 8 This is a magnified detail view of the sample conversion tray of the present invention from a first-view perspective (the sample size is 5mm*5mm);

[0043] Figure 9 This is a magnified detail view of the sample conversion holder from a second perspective, as shown in the present invention.

[0044] Figure 10 This is an enlarged detail view of the mechanical gripper of the present invention;

[0045] Figure 11 This is an enlarged detail view of the original Unisoku sample holder of the present invention;

[0046] Figure 12 This is a magnified detail of the original Omicron sample holder of the present invention;

[0047] Figure 13 This is a detailed view of the sample transfer tray and sample storage slot of the present invention;

[0048] Figure 14 This is a magnified detail view of the sample conversion tray of the present invention from a second perspective (the sample size is 2mm*10mm).

[0049] In the diagram: 1. Ultra-high vacuum portable chamber; 101. Miniature pump; 102. Observation window; 103. Second sample transfer rod; 1031. Mechanical gripper; 1032. First limiting protrusion; 104. First sample transfer rod; 1041. Sample storage stage; 105. Manual gate valve; 106. Conical adapter flange; 2. Loadlock; 3. Unisoku original sample holder; 4. Omicron original sample holder; 5. Unisoku conversion tray; 6. Omicron conversion tray; 7. Threaded post; 8. Sample conversion tray; 801. Second limiting protrusion; 802. Threaded groove; 803. First sample slot; 804. Second sample slot. Detailed Implementation

[0050] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0051] Example 1

[0052] A method for transferring samples between different sample holders in ultra-high vacuum includes the following steps:

[0053] S1: Thin film growth is completed in the ultra-high vacuum chamber of the Omicron MBE system using an Omicron conversion rack;

[0054] S2: Install the ultra-high vacuum portable chamber onto the Loadlock of the Omicron MBE system via a conical adapter flange. Bake and degas the Loadlock to ultra-high vacuum, and transfer the grown Omicron conversion frame into the Loadlock of the Omicron MBE system.

[0055] S3: Open the CF35 manual gate valve, extend the sample storage stage in the ultra-high vacuum portable chamber downwards into the Loadlock of the Omicron MBE system, and use the sample transfer rod on the Loadlock to grab the Omicron conversion rack that has been grown and place it on the sample storage stage at the position specifically used to store the Omicron conversion rack.

[0056] S4: Pull the sample storage stage upward from the Omicron Loadlock into the ultra-high vacuum portable chamber, close the CF35 manual gate valve, seal the ultra-high vacuum portable chamber, and maintain the ultra-high vacuum only through the built-in small ion pump.

[0057] S5: Use the mechanical gripper inside the ultra-high vacuum portable chamber to unscrew the sample transfer tray from the Omicron transfer frame, move and rotate the sample storage stage, and screw the sample transfer tray onto the Unisoo sample holder;

[0058] S6: Disassemble the conical adapter flange and remove the ultra-high vacuum portable chamber from the Loadlock of the Omicron system. The ultra-high vacuum is maintained for a short time by the getter pump inside the portable chamber. During long-distance transportation, it is plugged in and the ultra-high vacuum is maintained by a small ion pump.

[0059] S7: Transport to the destination of the Unisoku system and install it onto the Loadlock of the Unisoku STM via a tapered adapter flange;

[0060] S8: Bake the Loadlock to an ultra-high vacuum, open the CF35 hand valve, extend the sample storage stage downwards into the Loadlock of the Unisoo STM, and remove the sample holder using the mechanical gripper of the sample transfer rod built into the Loadlock, transferring it into the Unisoo STM cavity to complete the STM study.

[0061] Example 2

[0062] Reference Figure 1-14 A sample transfer system in ultra-high vacuum for different sample holders includes an ultra-high vacuum portable cavity 1, the cavity 1 is made of 304 stainless steel, a first sample transfer rod 104 and a second sample transfer rod 103 are respectively installed on the ultra-high vacuum portable cavity 1, a sample storage stage 1041 is fixed to the output end of the first sample transfer rod 104, and a mechanical gripper 1031 is fixed to the output end of the second sample transfer rod 103.

[0063] The sample storage stage 1041 has two storage positions, which respectively store Unisokoo conversion tray 5 and Omicron conversion tray 6. Both Unisokoo conversion tray 5 and Omicron conversion tray 6 are equipped with quick-release structures that correspond to and match the sample conversion tray 8. The sample conversion tray 8 can be removed from and installed on Unisokoo conversion tray 5 and Omicron conversion tray 6 by means of mechanical gripper 1031.

[0064] The first sample transfer rod 104 is fixed at the top of the ultra-high vacuum portable cavity 1. The bottom end of the ultra-high vacuum portable cavity 1 is connected to a tapered adapter flange 106. The tapered adapter flange 106 is a tapered adapter flange that converts CF35 to CF63. A manual gate valve 105 is provided between the tapered adapter flange 106 and the ultra-high vacuum portable cavity 1. The manual gate valve 105 is a VAT company CF35 gate valve.

[0065] The first sample transfer rod 104 is vertically arranged, and the second sample transfer rod 103 is horizontally arranged. The axes of the first sample transfer rod 104 and the second sample transfer rod 103 are coplanar. The output shafts of the first sample transfer rod 104 and the second sample transfer rod 103 can move or rotate along the axial direction. By cooperating with the first sample transfer rod 104 and the second sample transfer rod 103, the mechanical gripper 1031 can be aligned with the Unisokoo conversion tray 5 and the Omicron conversion tray 6 respectively, so that the sample conversion tray 8 can be converted between the two.

[0066] The ultra-high vacuum portable chamber 1 is equipped with a small pump 101, which is a small pump manufactured by SAES Corporation. It includes a small ion pump and a getter pump. It can maintain the ultra-high vacuum during power outages by relying on the getter pump, and is used to maintain the ultra-high vacuum state inside the ultra-high vacuum portable chamber 1.

[0067] The ultra-high vacuum portable cavity 1 is equipped with an observation window 102, which has a size of CF35 and is used to observe the internal condition of the ultra-high vacuum portable cavity 1 during the sample transfer process.

[0068] Among them, the sample conversion trays 8 of Unisokoo conversion tray 5 and Omicron conversion tray 6 on the sample storage stage 1041 are connected in different directions. By staggering the orientation of the sample conversion trays 8 on Unisokoo conversion tray 5 and Omicron conversion tray 6, the mechanical gripper 1031 has more operating space when assembling and disassembling the sample conversion trays 8, and is less likely to cause interference.

[0069] The quick-release structure includes a threaded post 7 fixed to the Unisoo conversion tray 5 and the Omicron conversion tray 6. The sample conversion tray 8 has a threaded groove 802 on the side away from the sample storage area that mates with the threaded post 7. The sample conversion tray 8 can be disassembled or installed on the Unisooku conversion tray 5 and the Omicron conversion tray 6 by screwing it on. (Refer to...) Figure 6-12 Unisoku converter tray 5 plus sample converter tray 8 can be used as a sample converter tray. Figure 11 Just like the original Unisoku sample holder 3, samples can be manipulated within the Unisoku STM chamber. The Omicron transfer tray 6, combined with the sample transfer tray 8, allows for sample manipulation within the Omicron MBE system, similar to the original Omicron sample holder 4. Different sample holders can be formed by screwing them onto different base trays, making them compatible with different systems. This enables the same sample to be transferred from one system to an ultra-high vacuum device using a different sample holder system for STM measurements under ultra-high vacuum conditions, thus protecting the sample under ultra-high vacuum.

[0070] Among them, the mechanical gripper 1031 has a sleeve-shaped structure, and a first limiting protrusion 1032 is provided on the side of the mechanical gripper 1031 away from the second sample transfer rod 103. A second limiting protrusion 801 corresponding to and matching the first limiting protrusion 1032 is fixed on the sample transfer tray 8.

[0071] By rotating the mechanical gripper 1031, the positions of the first limiting protrusion 1032 and the second limiting protrusion 801 are misaligned, allowing the sleeve of the mechanical gripper 1031 to be placed over the sample conversion tray 8. Then, by rotating the mechanical gripper 1031, the first limiting protrusion 1032 is locked onto the side of the sample conversion tray 8. Continuing to rotate the gripper will cause the sample conversion tray 8 to rotate, thereby achieving the purpose of assembling and disassembling the sample conversion tray 8. When the positions of the first limiting protrusion and the second limiting protrusion 801 are misaligned, the mechanical gripper 1031 can be separated from the sample conversion tray 8.

[0072] The sample conversion tray 8 has a first sample slot 803 and a second sample slot 804. The first sample slot 803 is used to store a sample with a size of 5mm*5mm, and the second sample slot 804 is used to store a sample with a size of 2mm*10mm. The sample conversion tray 8 has a wider range of applications and can stably fix two different sizes of samples.

[0073] MBE stands for Molecular Beam Epitaxy, a new technology for preparing single-crystal thin films. It is a method of growing thin films layer by layer along the crystal axis of the substrate material using an atomic or molecular beam provided by an evaporation source under appropriate substrate and ultra-high vacuum conditions.

[0074] Loadlock is a rapid sample introduction chamber, typically a pre-positioned chamber for the MBE chamber. It uses a pump assembly consisting of molecular and mechanical pumps to create a vacuum of 1e10^-8 Torr. After baking, an ultra-high vacuum of 1e10^-10 Torr can be achieved. It includes a sample storage stage for pre-storing substrates used for sample growth. It is connected to the MBE chamber via an ultra-high vacuum gate valve. Essentially, it acts as a differential chamber between atmospheric pressure and ultra-high vacuum.

[0075] STM stands for Scanning Tunneling Microscope. It can observe the arrangement of individual atoms on the surface of a material and the physicochemical properties related to the surface electronic behavior in real time using the principle of quantum tunneling. It has great significance and broad application prospects in research fields such as surface science, materials science, and life science.

[0076] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0077] In this invention, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," "link," and "fix" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, a direct connection, or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0078] The control method of this invention is automatic control through a controller. The control circuit of the controller can be implemented by simple programming by those skilled in the art. The power supply is also common knowledge in the field. Furthermore, since this invention is mainly used to protect mechanical devices, the control method and circuit connection will not be explained in detail here.

[0079] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A system for transferring a sample in an ultrahigh vacuum from one sample holder to a different sample holder, characterized in that: Including ultra-high vacuum portable cavity (1), first sample transmission rod (104) and second sample transmission rod (103) are respectively installed on the ultra-high vacuum portable cavity (1), the output end of first sample transmission rod (104) is fixed with sample storage platform (1041), the output end of second sample transmission rod (103) is fixed with mechanical gripper (1031); Two storage positions are provided on the sample storage platform (1041), and Unisoku conversion support (5) and Omicron conversion support (6) are respectively stored on the two storage positions, the Unisoku conversion support (5) and the Omicron conversion support (6) are provided with quick release structures corresponding to the sample conversion support (8), and the sample conversion support (8) can be taken off and installed on the Unisoku conversion support (5) and the Omicron conversion support (6) by the mechanical gripper (1031); The first sample transmission rod (104) is fixed at the top end of the ultra-high vacuum portable cavity (1), the bottom end of the ultra-high vacuum portable cavity (1) is connected with a tapered adapter flange (106), and a hand-operated gate valve (105) is arranged between the tapered adapter flange (106) and the ultra-high vacuum portable cavity (1); The first sample transmission rod (104) is vertically arranged, the second sample transmission rod (103) is horizontally arranged, and the axes of the first sample transmission rod (104) and the second sample transmission rod (103) are coplanar; A small pump (101) is installed on the ultra-high vacuum portable cavity (1); The sample conversion support (8) of the Unisoku conversion support (5) and the Omicron conversion support (6) on the sample storage platform (1041) is connected in different directions.

2. The sample transfer system in an ultrahigh vacuum according to claim 1, wherein: The small pump (101) is used to maintain the ultra-high vacuum state in the ultra-high vacuum portable cavity (1).

3. The sample transfer system in an ultrahigh vacuum chamber according to claim 1, wherein: An observation window (102) is installed on the ultra-high vacuum portable cavity (1).

4. The sample transfer system in an ultrahigh vacuum chamber according to claim 1, wherein: The quick release structure includes a threaded column (7) fixed on the Unisoku conversion support (5) and the Omicron conversion support (6), and the sample conversion support (8) is provided with a threaded groove (802) matched with the threaded column (7) on the side away from the sample.

5. The sample transfer system in an ultrahigh vacuum chamber according to claim 4, wherein: The mechanical gripper (1031) is a sleeve structure, and a first limiting tab (1032) is arranged on the side of the mechanical gripper (1031) away from the second sample transmission rod (103), and a second limiting tab (801) matched with the first limiting tab (1032) is fixed on the sample conversion support (8).

6. The system for transferring a sample in an ultrahigh vacuum from one sample holder to another sample holder according to claim 1, characterized in that: A first sample groove (803) and a second sample groove (804) are arranged on the sample conversion support (8).

7. The system of claim 6, wherein: The first sample slot (803) is used to store 5mm 5mm samples. The second sample slot (804) is used to store 2mm 10mm samples.

8. A method for transferring a sample in an ultrahigh vacuum from one sample holder to another sample holder, by means of a system for transferring a sample in an ultrahigh vacuum from one sample holder to another sample holder according to any one of claims 1 to 7, characterized in that: The method comprises the following steps: S1: using the Omicron conversion frame to complete the thin film growth in the ultra-high vacuum cavity of the Omicron MBE system; S2: the ultra-high vacuum portable cavity is installed on the Loadlock of the Omicron MBE system through the tapered adapter flange, the Loadlock is pumped to ultra-high vacuum through baking and degassing, and the completed Omicron conversion frame is transmitted into the Loadlock of the Omicron MBE system; S3: Open the CF35 manual gate valve, and extend the sample storage platform in the ultra-high vacuum portable chamber into the Loadlock of the Omicron MBE system, and use the sample transfer rod in the Loadlock to grab the Omicron transfer holder that has been grown to the position specially used for storing the Omicron transfer holder on the sample storage platform; S4: Pull the sample storage platform out of the Loadlock of the Omicron upward to the ultra-high vacuum portable chamber, close the manual gate valve, and seal the ultra-high vacuum portable chamber, and maintain the ultra-high vacuum only by the small ion pump built-in; S5: Use the mechanical gripper inside the ultra-high vacuum portable chamber to unscrew the sample transfer holder from the Omicron transfer holder, move and rotate the sample storage platform, and screw the sample transfer holder to the Unisoku sample holder; S6: Disassemble the conical adapter flange, remove the ultra-high vacuum portable chamber from the Loadlock of the Omicron system, maintain the ultra-high vacuum by the getter pump inside the portable chamber, plug in during long-distance transportation, and maintain the ultra-high vacuum by the small ion pump; S7: Transport to the destination of the Unisoku system, and install the conical adapter flange to the Loadlock of the Unisoku STM; S8: Bake the Loadlock to ultra-high vacuum, open the CF35 manual valve, extend the sample storage platform into the Loadlock of the Unisoku STM, use the mechanical gripper of the sample transfer rod built-in the Loadlock to take down the sample holder, and transfer it into the Unisoku STM cavity to complete the STM research.

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