Liquid supply device and glue homogenizer

Abstract

The present invention provides a liquid supply device and a glue leveling machine, comprising: a frame, the frame is provided with an installation space and a glue leveling space; a shell, the shell is provided between the installation space and the glue leveling space; a valve island, the valve island is installed in the installation space; a glue leveling robot arm, the glue leveling robot arm is provided in the glue leveling space; a follower device, the follower device is installed at a position of the shell close to the glue leveling robot arm, and a through hole is provided on the follower device; wherein the valve island and the glue leveling robot arm are connected through a pipeline passing through the through hole; when the glue leveling robot arm drives the pipeline to move, the follower device will rotate with the movement of the pipeline. The present invention solves the technical problem that the pipeline of the traditional glue leveling machine is fixed on the shell, and the pipeline is easily squeezed and damaged during reciprocating motion, which seriously affects the spraying stability and working efficiency of the glue leveling machine.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a liquid supply device and a glue spreader. Background Art

[0002] Spread coaters play an important role in semiconductor manufacturing, and are mainly used to coat photoresist on the surface of silicon wafers for photolithography. When the liquid supply device of a traditional spread coater sprays photoresist on silicon wafers, the spray coater robot drives the nozzle and pipeline to reciprocate to achieve spread coater. However, the pipeline of a traditional spread coater is fixed on the shell. During reciprocating motion, the pipeline is easily squeezed and damaged, which seriously affects the spraying stability and working efficiency of the spread coater.

[0003] The existing problem is that the pipeline of the traditional glue-splitting machine is fixed on the shell, and the pipeline is easily squeezed and damaged during reciprocating motion, which seriously affects the spraying stability and working efficiency of the glue-splitting machine. Summary of the invention

[0004] The present invention solves the technical problem that the pipeline of the conventional glue-splitting machine is fixed on the shell, and the pipeline is easily squeezed and damaged during reciprocating motion, which seriously affects the spraying stability and working efficiency of the glue-splitting machine. By arranging a follower device on the shell, the pipeline passes through the through hole of the follower device and is connected to the valve island. The follower device will rotate with the movement of the pipeline, which effectively prevents the pipeline from being squeezed and damaged, increases the spraying stability of the glue-splitting machine, and improves the working efficiency of the glue-splitting machine.

[0005] In order to solve the above problems, the present invention provides a liquid supply device, including: a frame, the frame is provided with an installation space and a glue spreading space; a shell, the shell is arranged between the installation space and the glue spreading space; a valve island, the valve island is installed in the installation space; a glue spreading robot arm, the glue spreading robot arm is arranged in the glue spreading space; a follower device, the follower device is installed on the shell near the glue spreading robot arm, and the follower device is provided with a through hole; wherein the valve island and the glue spreading robot arm are connected through a pipeline passing through the through hole; when the glue spreading robot arm drives the pipeline to move, the follower device will rotate following the movement of the pipeline.

[0006] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: by setting a follower device on the shell, and connecting the valve island and the glue-splitting robot arm through a pipeline passing through a through hole, when the glue-splitting robot arm drives the pipeline to make reciprocating motion, the follower device rotates with the movement of the pipeline, which effectively avoids the pipeline from being squeezed and damaged; and the setting of the follower device allows the pipeline to rotate automatically when it moves, which simplifies the operation process and improves the operation efficiency. The pipeline passes through the through hole to connect the valve island and the glue-splitting robot arm, and the pipeline drives the follower device to rotate, which effectively ensures the smooth liquid supply between the valve island and the glue-splitting robot arm, reduces the possibility of failure of the liquid supply device, and improves the reliability and stability of the equipment.

[0007] Furthermore, a bellows is installed on the side of the shell facing the installation space; the pipeline between the valve island and the glue-spreading robot arm passes through the bellows.

[0008] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: through the setting of the bellows, the range of movement of the pipeline is effectively limited, avoiding damage to the pipeline caused by excessive movement, thereby improving the stability of the liquid supply device.

[0009] Furthermore, a detachable partition is provided on the shell.

[0010] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: by setting a detachable partition, the partition can be easily removed to expose the installation space, thereby realizing the repair and maintenance of the equipment in the installation space, thereby improving the convenience and efficiency of maintenance.

[0011] Furthermore, a boss is arranged on one side of the shell facing the glue-distributing space, a height difference is formed between the boss and the shell, and the follower device penetrates the boss and is installed on the side of the boss.

[0012] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: by arranging a boss on the side of the shell facing the glue-uniforming space, and allowing the follower device to pass through the boss and be installed on the side, the pipeline can better drive the follower device to rotate to offset the extrusion and shear force on the pipeline, thereby increasing the service life of the pipeline and improving the stability of the liquid supply device.

[0013] Furthermore, the follower device includes: a base, which is fixedly mounted on the boss; a rotating shaft, which is mounted on the center of the base; and a rotating disk, which is sleeved on the rotating shaft; wherein the base and the rotating disk are correspondingly provided with a plurality of through holes; and the rotating disk can rotate relative to the base.

[0014] Compared with the prior art, the technical effect achieved by adopting this technical solution is: by setting a number of through holes corresponding to the base and the rotating disk, the pipeline can be installed through the follower device, and the rotation of the follower device can be more flexible to meet the needs of different angles and directions. At the same time, the base is fixed to the boss, the rotating shaft is installed at the center of the base, and the rotating disk is sleeved on the rotating shaft, which makes the rotation of the follower device more stable.

[0015] Furthermore, a limiting column is arranged at the bottom of the rotating disk, and a movable groove is arranged at the top of the base; wherein, when the rotating disk is installed on the base, the limiting column corresponds to the movable groove.

[0016] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: by arranging a limit column at the bottom of the rotating disk and a movable groove at the top of the base, when the rotating disk is installed on the base, the cooperation between the limit column and the movable groove can enable the follower device to rotate within a specified range, effectively avoiding the pipeline from being squeezed and sheared due to the relative movement of the rotating disk and the base, thereby improving the reliability of the liquid supply device.

[0017] Furthermore, the rotating disk includes a rotating chassis and a plurality of rotating disk assemblies; wherein the plurality of rotating disk assemblies are installed on a side of the rotating chassis away from the base, and the rotating disk assemblies and the rotating chassis are assembled to form a plurality of first through holes.

[0018] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: by installing several turntable assemblies on a rotating chassis to form several first through holes, the detachable installation method increases the expandability of the rotating disk; and the first through holes formed by assembly can better fix the pipeline.

[0019] Furthermore, the base is provided with a plurality of second through holes corresponding to the plurality of first through holes; wherein the sizes of the plurality of second through holes are all larger than the sizes of the plurality of first through holes.

[0020] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: by making the sizes of the several second through holes larger than the sizes of the several first through holes, the pipeline can drive the rotating disk to move, thereby preventing the pipeline from being squeezed by the chassis.

[0021] Furthermore, the partition includes a first partition and a second partition; the glue spreading space includes a first glue spreading space and a second glue spreading space; the valve island includes a first valve island and a second valve island; wherein the first partition is correspondingly arranged in the first glue spreading space, and the second partition is correspondingly arranged in the second glue spreading space; after removing the second partition, the first valve island is exposed to the second glue spreading space.

[0022] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: by arranging the second partition corresponding to the second glue-distributing space, after removing the second partition, the first valve island is exposed to the second glue-distributing space, which improves the convenience of repair and maintenance of the first valve island, thereby improving the reliability and stability of the liquid supply device.

[0023] An embodiment of the present invention provides a glue spreader, which adopts a liquid supply device according to any technical solution of the present invention.

[0024] Compared with the prior art, the technical effect achieved by adopting this technical solution is as follows: the glue spreader of the present invention adopts the liquid supply device of any technical solution of the present invention, therefore, it has all the beneficial effects of the liquid supply device of any technical solution of the present invention, which will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 A schematic diagram of the structure of a liquid supply device according to an embodiment of the present invention Figure 1 ;

[0026] Figure 2 A schematic diagram of the structure of a liquid supply device according to an embodiment of the present invention Figure 2 ;

[0027] Figure 3 for Figure 2 A magnified image of area A;

[0028] Figure 4 A schematic diagram of the structure of a liquid supply device according to an embodiment of the present invention Figure 3 ;

[0029] Figure 5 A schematic diagram of the structure of a liquid supply device according to an embodiment of the present invention Figure 4 ;

[0030] Figure 6 The structure of the follower device of the embodiment of the present invention is shown in FIG. Figure 1 ;

[0031] Figure 7 The structure of the follower device of the embodiment of the present invention is shown in FIG. Figure 2 ;

[0032] Figure 8 The structure of the follower device of the embodiment of the present invention is shown in FIG. Figure 3 .

[0033] Description of reference numerals:

[0034] 11-frame; 12-installation space; 13-glue-smoothing space; 131-first glue-smoothing space; 132-second glue-smoothing space; 14-shell; 15-valve island; 151-first valve island; 152-second valve island; 16-glue-smoothing robot arm; 17-follow-up device; 171-base; 172-rotating shaft; 173-rotating disk; 1731-rotating chassis; 1732-turntable assembly; 174-limiting column; 175-movable groove; 18-bellows; 19-partition; 191-first partition; 192-second partition; 20-boss; 21-first through hole; 22-second through hole. DETAILED DESCRIPTION

[0035] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0036] See also Figures 1 to 8 The present embodiment provides a liquid supply device, including: a frame 11, a shell 14, a valve island 15, a glue-spreading robot arm 16 and a follower device 17, wherein the frame 11 is provided with an installation space 12 and a glue-spreading space 13; the shell 14 is provided between the installation space 12 and the glue-spreading space 13; the valve island 15 is installed in the installation space 12; the glue-spreading robot arm 16 is provided in the glue-spreading space 13; the follower device 17 is installed at a position of the shell 14 close to the glue-spreading robot arm 16, and a through hole is provided on the follower device 17; wherein the valve island 15 and the glue-spreading robot arm 16 are connected through a pipeline passing through the through hole; when the glue-spreading robot arm 16 drives the pipeline to move, the follower device 17 will rotate following the movement of the pipeline.

[0037] Specifically, in this embodiment, the shell 14 is installed on both sides of the frame 11, and an installation space 12 is formed between the two shells 14 and the frame 11, and valve islands 15 are installed in the installation spaces 12 on both sides of the frame 11. A glue-splitting space 13 is formed between the two shells 14, and four glue-splitting robotic arms 16 are installed in the glue-splitting space 13. A follower device 17 is provided at a position of the shell 14 near the glue-splitting robotic arm 16, and the pipeline connecting the valve island 15 and the glue-splitting robotic arm 16 passes through the through hole of the follower device 17. When the glue-splitting robotic arm 16 performs reciprocating motion to spray photoresist on the silicon wafer, it will drive the pipeline to move. The pipeline of a conventional liquid supply device is fixed to the shell, and the reciprocating motion of the glue-splitting robotic arm 16 may squeeze and pull the pipeline multiple times, causing damage to the pipeline. By installing a follower device on the shell 14, when the pipeline follows the movement of the glue-splitting robot arm 16, the follower device 17 rotates following the movement of the pipeline, which can effectively offset the squeezing and pulling of the glue-splitting robot arm 16 on the pipeline and ensure that the pipeline is not damaged.

[0038] In one embodiment of the present invention, a bellows 18 is installed on the side of the housing 14 facing the installation space 12 ; the pipeline between the valve island 15 and the glue-spreading robot arm 16 passes through the bellows 18 .

[0039] Specifically, in this embodiment, the bellows 18 is arranged in the installation space 12 corresponding to the through hole of the follower device 17 , and the pipeline is connected from the valve island 15 , passes through the bellows 18 , and then passes through the through hole of the follower device 17 to communicate with the glue-spreading robot arm 16 .

[0040] In one embodiment of the present invention, a detachable partition 19 is provided on the housing 14 .

[0041] Specifically, the removable partition 19 is arranged on the shell 14 between the installation space 12 and the glue-spreading space 13 . When the partition 19 is removed, the equipment in the installation space 12 will be exposed to the glue-spreading space 13 , which is convenient for maintenance personnel to repair the equipment in the installation space 12 .

[0042] In one embodiment of the present invention, a boss 20 is provided on one side of the shell 14 facing the glue-distributing space 13 , a height difference is formed between the boss 20 and the shell 14 , and the follower device 17 passes through the boss 20 and is installed on the side of the boss 20 .

[0043] Specifically, in this embodiment, four bosses 20 are arranged on the shell 14 on both sides of the frame 11, and a follower device 17 is arranged on the side of each boss 20; wherein the height difference formed between the boss 20 and the shell 14 gradually decreases in the direction away from the follower device 17 until the height difference is zero.

[0044] In one embodiment of the present invention, the follower device 17 includes: a base 171, a rotating shaft 172 and a rotating disk 173, the base 171 is installed and fixed on the boss 20; the rotating shaft 172 is installed at the center of the base 171; the rotating disk 173 is sleeved on the rotating shaft 172; wherein, the base 171 and the rotating disk 173 are correspondingly provided with a plurality of through holes; the rotating disk 173 can rotate relative to the base 171.

[0045] Specifically, in this embodiment, the rotating disk 173 and the base 171 are connected by a rotating shaft 172, the base 171 is fixed to the boss 20, and the rotating disk 173 can rotate relative to the base 171; wherein, the base 171 and the rotating disk 173 are correspondingly provided with three through holes, which can support three pipes to pass through.

[0046] In one embodiment of the present invention, a limiting column 174 is disposed at the bottom of the rotating disk 173 , and a movable groove 175 is disposed at the top of the base 171 ; wherein, when the rotating disk 173 is installed on the base 171 , the limiting column 174 corresponds to the movable groove 175 .

[0047] Specifically, in this embodiment, three limiting columns 174 are arranged at the bottom of the rotating disk 173, and three movable grooves 175 are correspondingly arranged at the top of the base 171. Each movable groove 175 is connected to the through hole on the base 171, and each limiting column 174 can only move in the corresponding movable groove 175 and through hole.

[0048] In one embodiment of the present invention, the rotating disk 173 includes a rotating chassis 1731 and a plurality of rotating disk assemblies 1732 ; wherein the plurality of rotating disk assemblies 1732 are installed on a side of the rotating chassis 1731 away from the base 171 , and the rotating disk assemblies 1732 and the rotating chassis 1731 are assembled to form a plurality of first through holes 21 .

[0049] Specifically, in this embodiment, the rotating disk 173 includes a rotating chassis 1731 and three rotating disk assemblies 1732 , wherein the three rotating disk assemblies 1732 are fixed to the rotating chassis 1731 by screws, and the three rotating disk assemblies 1732 and the rotating chassis 1731 together form three first through holes 21 .

[0050] In one embodiment of the present invention, the base 171 is provided with a plurality of second through holes 22 corresponding to the plurality of first through holes 21 ; wherein the sizes of the plurality of second through holes 22 are all larger than the sizes of the plurality of first through holes 21 .

[0051] Specifically, in this embodiment, the sizes of the three first through holes 21 are all smaller than the sizes of the three second through holes 22 on the base 171, and the pipeline is fixed on the first through hole 21. When the pipeline drives the rotating disk 173 to rotate, the pipeline can move back and forth in the second through hole 22. The size of the second through hole 22 is set to be larger than the size of the first through hole 21, which can prevent the pipeline from being squeezed and sheared by the second through hole 22 when the pipeline moves in the second through hole 22.

[0052] In one embodiment of the present invention, the partition 19 includes a first partition 191 and a second partition 192; the glue spreading space 13 includes a first glue spreading space 131 and a second glue spreading space 132; the valve island 15 includes a first valve island 151 and a second valve island 152; wherein, the first partition 191 is correspondingly arranged in the first glue spreading space 131, and the second partition 192 is correspondingly arranged in the second glue spreading space 132; after removing the second partition 192, the first valve island 151 is exposed to the second glue spreading space 132.

[0053] Specifically, in this embodiment, the glue-spreading space 13 includes a first glue-spreading space 131 and a second glue-spreading space 132, wherein the first partition 191 is correspondingly arranged in the first glue-spreading space 131, and the second partition 192 is correspondingly arranged in the second glue-spreading space 132. The two glue-spreading spaces 13 are each provided with two glue-spreading mechanical arms 16, which can spray photoresist on the silicon wafer separately. The valve island 15 includes a first valve island 151 and a second valve island 152. The first valve island 151 and the second glue-spreading space 132 are in the same layer. After the second partition 192 is removed, the first valve island 151 will be exposed to the second glue-spreading space 132, which can facilitate maintenance personnel to repair the first valve island 151.

[0054] An embodiment of the present invention provides a glue spreader, which adopts a liquid supply device according to any technical solution of the present invention.

[0055] Specifically, the glue spreader of the embodiment of the present invention adopts the liquid supply device of any technical solution of the present invention, and therefore, it has all the beneficial effects of the liquid supply device of any technical solution of the present invention, which will not be described in detail here.

[0056] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A liquid supply device, characterized in that: include: A frame (11), wherein the frame (11) is provided with an installation space (12) and a glue-distributing space (13); A shell (14), the shell (14) being arranged between the installation space (12) and the glue-splitting space (13); a boss (20) is arranged on a side of the shell (14) facing the glue-splitting space (13), and a height difference is formed between the boss (20) and the shell (14); A valve island (15), the valve island (15) being installed in the installation space (12); A glue spreading robot arm (16), the glue spreading robot arm (16) being arranged in the glue spreading space (13); A follower device (17), the follower device (17) is installed at a position of the housing (14) close to the glue-splitting robot arm (16), and a through hole is provided on the follower device (17); the follower device (17) passes through the boss (20) and is installed on the side of the boss (20); the follower device (17) comprises a base (171), a rotating shaft (172) and a rotating disk (173); the base (171) is installed and fixed on the boss (20), the rotating shaft (172) is installed at the center of the base (171), and the rotating disk (173) is sleeved on the rotating shaft (172); the base (171) and the rotating disk (173) are correspondingly provided with a plurality of the through holes; the rotating disk (173) can rotate relative to the base (171); A limiting column (174) is provided at the bottom of the rotating disk (173), and a movable groove (175) is provided at the top of the base (171); wherein, when the rotating disk (173) is mounted on the base (171), the limiting column (174) corresponds to the movable groove (175); the rotating disk (173) comprises a rotating chassis (1731) and a plurality of rotating disk assemblies (1732); the plurality of rotating disk assemblies (1732) are mounted on a side of the rotating chassis (1731) away from the base (171), and the rotating disk assemblies (1732) and the rotating chassis (1731) are assembled to form a plurality of first through holes (21); the base (171) is provided with a plurality of second through holes (22) corresponding to the plurality of first through holes (21); the size of the plurality of second through holes (22) is greater than the size of the plurality of first through holes (21); The valve island (15) and the glue spreading robot arm (16) are connected via a pipeline passing through the through hole; when the glue spreading robot arm (16) drives the pipeline to move, the follower device (17) will rotate along with the movement of the pipeline.

2. The liquid supply device according to claim 1, characterized in that: A bellows (18) is installed on the side of the shell (14) facing the installation space (12); a pipeline between the valve island (15) and the glue-spreading robot arm (16) passes through the bellows (18).

3. The liquid supply device according to claim 1, characterized in that: A detachable partition plate (19) is provided on the shell (14).

4. The liquid supply device according to claim 3, characterized in that: The partition (19) comprises a first partition (191) and a second partition (192); the glue-splitting space (13) comprises a first glue-splitting space (131) and a second glue-splitting space (132); the valve island (15) comprises a first valve island (151) and a second valve island (152); The first partition plate (191) is correspondingly arranged in the first glue-distributing space (131), and the second partition plate (192) is correspondingly arranged in the second glue-distributing space (132); after the second partition plate (192) is removed, the first valve island (151) is exposed to the second glue-distributing space (132).

5. A glue homogenizing machine, characterized in that: The glue spreading machine comprises the liquid supply device as described in any one of claims 1-4.

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