Airflow homogenization method, device, equipment, storage medium and program product

Abstract

The present application discloses a method, device, equipment, storage medium and program product for airflow homogenization, which relates to the technical field of vacuum cavity application, including: by setting a grid array in the target cavity, using the pressure distribution of the grid array at different openings to characterize the uniformity or turbulence of the airflow at the grid array, and further adjusting the opening of the grid array to make the airflow at the grid array homogenized. Compared with conventional means, the airflow homogenization method of the present application does not need to improve the surface quality of the cavity, optimize the internal structure of the cavity, or use a honeycomb core structure. It only needs to add a grid array, which is highly efficient, low cost, and effective, and can be applied to complex internal structures of the cavity and nonlinear vacuuming processes.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum chamber applications, and in particular to an airflow homogenization method, an airflow homogenization device, an airflow homogenization equipment, a storage medium, and a computer program product. Background Art

[0002] At present, in the application of vacuum chambers, a typical problem is the uneven airflow inside the chamber, which is usually caused by nonlinear changes in the internal structure of the chamber and the vacuuming process. For example, when vacuuming, the internal structure of the chamber may cause local obstruction of the airflow, thereby forming local turbulence inside the chamber, further leading to uneven pressure and velocity distribution inside the chamber, resulting in uneven airflow inside the chamber.

[0003] When faced with the problem of uneven airflow inside the cavity, it is necessary to effectively control the airflow to keep it in a uniform laminar state. Existing methods include improving the surface quality of the cavity, optimizing the internal structure of the cavity, or using a honeycomb core structure. However, these methods are either costly or ineffective. Therefore, a simple and efficient airflow homogenization method is urgently needed. Summary of the invention

[0004] The main purpose of the present application is to provide an airflow homogenization method, an airflow homogenization device, an airflow homogenization equipment, a storage medium and a computer program product, aiming to solve the technical problems of low efficiency, high cost and insignificant effect of the current airflow homogenization method.

[0005] To achieve the above-mentioned purpose, the present application proposes an airflow homogenization method, which is applied in the process of vacuuming a target cavity, and the airflow homogenization method comprises:

[0006] Scanning to obtain the pressure distribution of the grid array in the target cavity at the current opening;

[0007] determining whether turbulence exists in the airflow at the grid array according to the pressure distribution;

[0008] If turbulence exists, the current opening of the grid array is adjusted, and the step of scanning to obtain the pressure distribution of the grid array in the target cavity at the current opening is returned until it is determined that the airflow at the grid array is uniform.

[0009] In one embodiment, the step of scanning to obtain the pressure distribution of the grid array in the target cavity at the current opening comprises:

[0010] Scanning row by row to obtain the row pressure distribution of the grid array in the target cavity at the current opening;

[0011] And / or, scanning column by column to obtain the column pressure distribution of the grid array in the target cavity at the current opening.

[0012] In one embodiment, the step of determining whether there is turbulence in the airflow at the grid array according to the pressure distribution comprises:

[0013] Determining whether there is turbulence in the airflow at the row grid of the grid array according to the row pressure distribution obtained by row scanning;

[0014] And / or, determining whether turbulence exists in the airflow at the column grids of the grid array according to the column pressure distribution obtained by scanning column by column.

[0015] In one embodiment, the step of determining the uniformity of the airflow at the grid array comprises:

[0016] Calculating the pressure uniformity at the grid array according to the pressure distribution of the grid array in the target cavity at the current opening;

[0017] Whether the airflow at the grid array is uniform is determined based on a comparison result of the pressure uniformity with a preset pressure uniformity threshold.

[0018] In one embodiment, the air flow homogenization method further comprises:

[0019] When the current cavity pressure is less than the preset vacuum degree, the process of airflow homogenization is performed;

[0020] During the process of performing airflow homogenization, the current cavity pressure is maintained;

[0021] After the process of airflow homogenization is completed, the current opening of the grid array is maintained and vacuum extraction continues.

[0022] In one embodiment, the air flow homogenization method further comprises:

[0023] After the vacuum is drawn and before the air pressure in the target cavity rises again, the grids in the grid array that are opened during the process of drawing the vacuum on the target cavity are closed.

[0024] In addition, to achieve the above purpose, the present application also proposes an airflow homogenization device, which is used in the process of extracting a vacuum from a target cavity, and the airflow homogenization device includes:

[0025] A scanning module, used for scanning and obtaining the pressure distribution of the grid array in the target cavity at the current opening;

[0026] a determination module, configured to determine whether turbulence exists in the airflow at the grid array according to the pressure distribution;

[0027] The adjustment module is used to adjust the current opening of the grid array if turbulence exists, and return to the step of performing the scanning to obtain the pressure distribution of the grid array in the target cavity at the current opening until it is determined that the airflow at the grid array is uniform.

[0028] In addition, to achieve the above-mentioned purpose, the present application also proposes an airflow homogenization device, which includes: a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the computer program is configured to implement the steps of the airflow homogenization method described above.

[0029] In addition, to achieve the above-mentioned purpose, the present application also proposes a storage medium, which is a computer-readable storage medium, and a computer program is stored on the storage medium. When the computer program is executed by a processor, the steps of the airflow homogenization method described above are implemented.

[0030] In addition, to achieve the above-mentioned purpose, the present application also provides a computer program product, which includes a computer program, and when the computer program is executed by a processor, the steps of the airflow homogenization method described above are implemented.

[0031] One or more technical solutions proposed in this application have at least the following technical effects:

[0032] In the present application, a method for homogenizing airflow is proposed, which is applied in the process of extracting a vacuum from a target cavity. First, the pressure distribution of the grid array in the target cavity at the current opening is scanned, and then, based on the pressure distribution, it is determined whether there is turbulence in the airflow at the grid array. If there is turbulence, the current opening of the grid array is adjusted, and the pressure distribution of the grid array after the opening is adjusted is re-scanned to further determine whether there is turbulence in the airflow at the grid array after the opening is adjusted. This cycle is repeated until it is determined that the airflow at the grid array is homogenized.

[0033] In the present application, a grid array is set in the target cavity, and the pressure distribution of the grid array at different openings is used to characterize the uniformity or turbulence of the airflow at the grid array, so that the airflow at the grid array is further uniformed by adjusting the opening of the grid array. Compared with conventional means, the airflow uniformity method of the present application does not need to improve the surface quality of the cavity, optimize the internal structure of the cavity, or use a honeycomb core structure. It only needs to add a grid array, which is highly efficient, low cost, and effective. It can be applied to complex internal structures of cavities and nonlinear vacuuming processes. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the present application.

[0035] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0036] Figure 1 A schematic diagram of a flow chart provided for the first embodiment of the airflow homogenization method of the present application;

[0037] Figure 2 A schematic diagram of a vacuum chamber provided in Example 1 of the airflow homogenization method of the present application;

[0038] Figure 3 A schematic diagram of a grid array provided for the first embodiment of the airflow homogenization method of the present application;

[0039] Figure 4 A schematic diagram of the working process provided for the first embodiment of the airflow homogenization method of the present application;

[0040] Figure 5 A control flow diagram provided for the first embodiment of the airflow homogenization method of the present application;

[0041] Figure 6 This is a schematic diagram of the module structure of the airflow homogenization device according to an embodiment of the present application;

[0042] Figure 7 Schematic diagram of the equipment structure of the hardware operating environment involved in the airflow homogenization method in the embodiment of the present application.

[0043] The purpose, features and advantages of this application will be further described in conjunction with the embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0044] It should be understood that the specific embodiments described herein are only used to explain the technical solutions of the present application and are not used to limit the present application.

[0045] In order to better understand the technical solution of the present application, a detailed description will be given below in conjunction with the accompanying drawings and specific implementation methods.

[0046] It should be noted that the execution subject of this embodiment can be a computing service device with data processing, network communication and program running functions, such as a tablet computer, a personal computer, a mobile phone, etc., or an electronic device capable of realizing the above functions, etc. The following takes the air flow homogenization device as an example to illustrate this embodiment and the following embodiments.

[0047] Based on this, the present application embodiment provides a method for uniforming airflow, referring to Figure 1 , Figure 1 This is a flow chart of the first embodiment of the airflow homogenization method of the present application.

[0048] In this embodiment, the airflow homogenization method is applied in the process of vacuuming the target cavity, and the airflow homogenization method includes steps S10 to S30:

[0049] Step S10, scanning to obtain the pressure distribution of the grid array in the target cavity at the current opening;

[0050] In one embodiment, referring to Figure 2 and Figure 3 , a grid array is set in the target cavity, including multiple rows and columns of small hole grids. The valve corresponding to each grid is used to accurately control the opening and closing of each grid. The pressure sensor at the grid monitors the pressure of each grid. The controller connecting the sensor and the valve can accurately control the opening and closing of each grid according to the pressure distribution and adjust the airflow in real time.

[0051] In one embodiment, the size of the grid array can be designed to be 50 mm × 30 mm, including 100 columns × 60 rows of grids. The grid material is made of stainless steel and can be made into a modular structure, which is convenient for use with cavities of different sizes. A 50×30 pressure sensor array is used accordingly. The valve corresponding to each grid uses a micro solenoid valve, and the maximum opening can be adjusted to 0.2 mm. A chip-type pressure sensor is used, and the measurement range is selected as 0-1000Pa. The controller uses an ARM microcontroller, which includes a pressure distribution optimization algorithm, and outputs a PWM signal to control each valve to achieve precise control of the grid opening.

[0052] In an application scenario, refer to Figure 2 , when the material to be coated, such as semiconductor ink, is uniformly coated on Figure 2 When it is on the lower surface of the middle and upper cover plate, since there are liquids and solids in the ink, and the coating is very thin, only 1μm, the liquid on the coating needs to be extracted and volatilized so that the remaining solids can form a uniform film on the lower surface and the thickness of the coating can be consistent everywhere. It is necessary to make the airflow in the vacuum shell process area through the grid array uniform.

[0053] In a feasible implementation manner, the step S10 includes:

[0054] Scanning row by row to obtain the row pressure distribution of the grid array in the target cavity at the current opening;

[0055] And / or, scanning column by column to obtain the column pressure distribution of the grid array in the target cavity at the current opening.

[0056] In one embodiment, when scanning to obtain the pressure distribution of the grid array in the target cavity at the current opening, the row pressure distribution of the grid array in the target cavity at the current opening can be obtained by scanning row by row. For example, the row of grids is slightly opened row by row (assuming the opening is 20%), and then the pressure of the row of grids is detected, and the pressure of multiple rows of grids is recorded to obtain a pressure distribution graph.

[0057] In one embodiment, when scanning to obtain the pressure distribution of the grid array in the target cavity at the current opening, the column pressure distribution of the grid array in the target cavity at the current opening can be obtained by scanning column by column. For example, the grids in the column are slightly opened row by row in units of columns (assuming the opening is 20%), and then the pressure of the grid column is detected, and the pressure of multiple grid columns is recorded to obtain a pressure distribution graph.

[0058] In one embodiment, when scanning to obtain the pressure distribution of the grid array in the target cavity at the current opening, the row pressure distribution of the grid array in the target cavity at the current opening can be obtained by scanning row by row, and the column pressure distribution of the grid array in the target cavity at the current opening can be obtained by scanning column by column, and a pressure distribution diagram is determined based on the row pressure distribution and the column pressure distribution.

[0059] It should be noted that the pressure will be redistributed after adjusting the opening, so it is not chosen to directly record the pressure at each grid, but it is necessary to open the grid slightly before recording, so as to record the accurate pressure distribution at different openings.

[0060] Step S20, determining whether there is turbulence in the airflow at the grid array according to the pressure distribution;

[0061] In this embodiment, when determining whether there is turbulence in the airflow at the grille array based on the pressure distribution, it can be considered that there is turbulence in the airflow at the grille array with abnormal pressure distribution. For example, when scanning to obtain the pressure distribution of the grille array in the target cavity at the current opening, the row pressure distribution of the grille array in the target cavity at the current opening is obtained by scanning row by row. Then, if there is an obvious inconsistency between the pressure of a certain row and the pressures of other rows, it can be considered that there is airflow turbulence at the grille in that row.

[0062] In a feasible implementation manner, the step S20 includes:

[0063] Determining whether there is turbulence in the airflow at the row grid of the grid array according to the row pressure distribution obtained by row scanning;

[0064] And / or, determining whether turbulence exists in the airflow at the column grids of the grid array according to the column pressure distribution obtained by scanning column by column.

[0065] In one embodiment, it is possible to determine whether turbulence exists in the airflow at the row grids of the grid array based on the row pressure distribution obtained by scanning row by row.

[0066] In one embodiment, it is also possible to determine whether turbulence exists in the airflow at the column grids of the grid array based on the column pressure distribution obtained by scanning column by column.

[0067] It should be noted that the pressure distribution in the row direction and the column direction is different, so it is necessary to scan row by row or column by column to obtain the accurate pressure distribution and then determine the accurate airflow state.

[0068] In addition, it should be noted that the row and column pressure distribution can be scanned alternately to determine whether there is turbulence in the airflow at a certain grid of the grid array. For example, based on the scanning and adjustment of the grid in a certain direction in the previous round, scanning and adjustment in a different direction can be performed again.

[0069] Step S30, if turbulence exists, adjust the current opening of the grid array, and return to the step of performing the scanning to obtain the pressure distribution of the grid array in the target cavity at the current opening, until it is determined that the airflow at the grid array is uniform.

[0070] In this embodiment, the current opening of the grid array is adjusted so that the pressure of a row or column where turbulence exists is close to or equal to the pressure of other rows or columns.

[0071] It should be noted that the initial opening of the grille is 0, which is the closed state, and the positive and negative openings can represent the direction of the grille opening. In addition, the effect of opening clockwise and counterclockwise depends on the size of the grille. For example, when the size of the grille is large, the influence of the opening direction is greater, and vice versa, when the size of the grille is small, the influence of the opening direction is also smaller.

[0072] In a feasible implementation manner, the step S30 includes:

[0073] Calculating the pressure uniformity at the grid array according to the pressure distribution of the grid array in the target cavity at the current opening;

[0074] Whether the airflow at the grid array is uniform is determined based on a comparison result of the pressure uniformity with a preset pressure uniformity threshold.

[0075] When determining whether the airflow at the grille array is uniform, the pressure uniformity at the grille array can be calculated based on the pressure distribution of the grille array in the target cavity at the current opening. If the pressure uniformity reaches a preset pressure uniformity threshold corresponding to the uniformity of the airflow in the target cavity, it can be determined that the airflow at the grille array is uniform. Otherwise, it is necessary to continue to adjust the opening until the airflow at the grille array is uniform.

[0076] In a feasible implementation manner, the air flow homogenization method further includes:

[0077] When the current cavity pressure is less than the preset vacuum degree, the process of airflow homogenization is performed;

[0078] During the process of performing airflow homogenization, the current cavity pressure is maintained;

[0079] After the process of airflow homogenization is completed, the current opening of the grid array is maintained and vacuum extraction continues.

[0080] After installing the grid array on the inner wall of the target cavity and connecting it to the vacuum system using a valve group, start extracting the gas in the target cavity. Then start the vacuum system: close all the grids, and then start the vacuum system, which will gradually reduce the pressure of the target cavity and evacuate it. When the pressure of the target cavity drops to the preset vacuum level, the microcontroller will start the airflow homogenization program and execute the airflow homogenization process. During the airflow homogenization process, the vacuum system maintains the current cavity pressure. Once the pressure uniformity reaches the set standard, that is, after the airflow homogenization process is completed, the grid state will be maintained, the current opening of the grid array will be maintained, the airflow will be evenly distributed, and the vacuum will continue to be extracted.

[0081] In a feasible implementation manner, the air flow homogenization method further includes:

[0082] After the vacuum is drawn and before the air pressure in the target cavity rises again, the grids in the grid array that are opened during the process of drawing the vacuum on the target cavity are closed.

[0083] In one application scenario, when the glass substrate is switched, Figure 2 When the upper and middle layers are covered, the vacuum state of the target cavity needs to be switched to the normal atmospheric pressure state to restore the normal pressure, and then a new glass substrate is switched and the coating is re-applied. However, the process of restoring the normal pressure is an instantaneous process, and the instantaneous air pressure fluctuates greatly and the airflow is turbulent. At this time, the grids with different openings are at risk of being damaged by the strong airflow of the fluctuating turbulence.

[0084] In one embodiment, before the air pressure in the target cavity rises again after the vacuum is drawn, that is, when the normal air pressure needs to be restored, the grids in the grid array that were opened during the process of drawing the vacuum on the target cavity are closed, for example, one by one, row by row, column by column, or all at the same time, to maintain a uniform distribution of airflow, thereby avoiding uneven airflow caused by rapid changes in air pressure and protecting the grids.

[0085] In one embodiment, referring to Figure 2 and Figure 3 The present application proposes a vacuum chamber airflow homogenization device based on a grid array, the device comprising: 1. a grid array arranged in a target chamber, comprising a plurality of rows and columns of small hole grids; 2. a valve corresponding to each grid, for precisely controlling the opening and closing of each grid; 3. a pressure sensor at the grid, for monitoring the pressure of each grid; 4. a controller connecting the sensor and the valve, which can precisely control the opening and closing of each grid according to the pressure distribution and adjust the airflow in real time.

[0086] When vacuuming, the controller slightly opens the grids row by row or column by column to allow airflow to pass through, while detecting the pressure distribution. If the pressure at a certain grid is found to be abnormal, the opening of the grid can be precisely controlled to guide the airflow to change its path, avoid structural defects, and suppress the generation of vortices. After repeated optimization and control, the pressure at each grid can be made uniform, thereby achieving the purpose of laminar airflow in the cavity.

[0087] In this way, the pressure distribution of the cavity can be adjusted quickly and quantitatively in real time, and the pressure inside the cavity can be controlled to change evenly. The airflow can be adjusted in real time, and the airflow inside the cavity can be kept uniform. Finally, the airflow uniformity effect is significant, and the pressure uniformity inside the cavity can reach more than 95%.

[0088] In one embodiment, referring to Figure 4 , 1. Install the grid array module: First, install the grid array module on the inner wall of the chamber and connect it to the vacuum system using a valve group. This step is a preparation to ensure that the grid array can work with the vacuum system.

[0089] 2. Start the vacuum system: Close all grids and then start the vacuum system. The vacuum system will gradually reduce the pressure in the chamber and evacuate it.

[0090] 3. Start the airflow homogenization program: When the pressure of the cavity drops to the target primary vacuum, the microcontroller will start the airflow homogenization program. The goal of this program is to ensure that the airflow in the cavity is evenly distributed. There is a corresponding mapping relationship between vacuum and pressure.

[0091] 4. First round of scanning: In the first round of scanning, the grids are slightly opened row by row (opening degree 20%), and then the pressure of each grid is detected and the pressure distribution diagram is recorded. This helps to understand the uneven distribution of airflow. For example, if a row is fully opened by 20%, the corresponding pressure at the position of this row is obtained.

[0092] 5. Adjust the grid according to the pressure distribution map: According to the pressure distribution map, determine which rows of grids have abnormal airflow distribution. Then, the corresponding grids will be adjusted, and their opening may be increased or decreased to suppress the generation of vortices and achieve a more uniform airflow distribution.

[0093] 6. Second round of scanning: In the second round of scanning, steps 4 and 5 are repeated in units of columns to further optimize the pressure distribution of the airflow.

[0094] 7. Multiple rounds of scanning optimization: This step will be repeated multiple times, executing steps 4 and 5 over and over again until the airflow pressure distribution reaches the uniformity standard. Once the standard is reached, the state of the grid will be maintained to ensure that the airflow remains uniform.

[0095] 8. Complete the vacuum process: After the airflow is homogenized, continue to vacuum until the target final pressure is reached. Once the final pressure is reached, the vacuum process is complete.

[0096] 9. Air pressure recovery: When it is necessary to restore normal air pressure, gradually close all the grids to maintain an even distribution of airflow. This step helps avoid uneven airflow caused by rapid air pressure changes.

[0097] In one embodiment, referring to Figure 5 , 1. Automatically detect grid status: The system will automatically detect the grid status at startup to ensure that all grids are in the closed state.

[0098] 2. Initialize the flag: Set the initial value of the flag S to 0 to mark whether to enter the scanning process.

[0099] 3. Detect cavity pressure: The system will regularly detect the cavity pressure Pc.

[0100] 4. Check the primary vacuum: If the chamber pressure Pc is greater than the primary vacuum P1, the system will enter a waiting state until the conditions are met.

[0101] 5. Enter the scanning process: Once the chamber pressure Pc is less than or equal to the primary vacuum degree P1, the system will automatically switch to the scanning process.

[0102] 6. Adaptive selection of scanning mode: The system will automatically select the scanning mode according to the actual situation, which can be row scanning or column scanning to maximize efficiency.

[0103] 7. Automatically adjust the initial grid opening one by one: During the scanning process, the system will automatically open the grids slightly one by one and automatically set the initial grid opening , and monitor the pressure distribution in real time.

[0104] 8. Real-time monitoring of grid array pressure: Read the values ​​of each pressure sensor array in real time according to the scanning mode, and feedback the pressure distribution of the grid array ,in, represents the i-th row of the grid array, Represents the jth column; compare the pressure values ​​of each grid to determine which grids need to be adjusted.

[0105] 9. Pressure uniformity check: according to the pressure distribution Get the pressure uniformity:

[0106]

[0107] in, represents the mean of the pressure distribution; if the pressure uniformity ( is the set target parameter), the system is considered to have completed pressure homogenization and proceeds to step 11; otherwise, it proceeds to step 10 and continues to automatically adjust the grid opening to optimize the pressure distribution.

[0108] 10. Adjust the grid opening one by one: Automatically adjust the grid opening according to the pressure uniformity ,in, is the opening value of the grid corresponding to the i-th row and j-th column, is the opening adjustment function of the grid corresponding to the i-th row and j-th column, and returns to step 8 to detect the grid array pressure;

[0109] 11. Pressure uniformity completed: Once the pressure uniformity reaches the set standard, the system will maintain the grid state , ensuring even air distribution.

[0110] As mentioned above, the control process can accurately detect the pressure distribution, introduce automatic detection of grid status, adaptive selection of scanning mode, automatic adjustment of grid opening one by one, and real-time monitoring of pressure distribution status. The system has a high degree of automation and efficiency, and can effectively achieve pressure uniformity. Depending on the specific application and requirements, it may be necessary to implement these improvements based on available technology and hardware, so as to effectively improve the airflow distribution in the cavity and keep it in a stable laminar state.

[0111] It should be noted that the above examples are only used to understand the present application and do not constitute a limitation on the airflow homogenization method of the present application. More simple transformations based on this technical concept are all within the protection scope of the present application.

[0112] This application also provides an air flow homogenization device, please refer to Figure 6 The airflow homogenization device is used in the process of extracting vacuum from the target cavity, and the airflow homogenization device includes:

[0113] A scanning module 10, used for scanning and obtaining the pressure distribution of the grid array in the target cavity at the current opening;

[0114] A determination module 20, configured to determine whether there is turbulence in the airflow at the grid array according to the pressure distribution;

[0115] The adjustment module 30 is used to adjust the current opening of the grid array if turbulence exists, and return to the step of performing the scanning to obtain the pressure distribution of the grid array in the target cavity at the current opening until it is determined that the airflow at the grid array is uniform.

[0116] In one embodiment, the scanning module is further used for:

[0117] Scanning row by row to obtain the row pressure distribution of the grid array in the target cavity at the current opening;

[0118] And / or, scanning column by column to obtain the column pressure distribution of the grid array in the target cavity at the current opening.

[0119] In one embodiment, the determining module is further configured to:

[0120] Determining whether there is turbulence in the airflow at the row grid of the grid array according to the row pressure distribution obtained by row scanning;

[0121] And / or, determining whether turbulence exists in the airflow at the column grids of the grid array according to the column pressure distribution obtained by scanning column by column.

[0122] In one embodiment, the adjustment module is further used for:

[0123] Calculating the pressure uniformity at the grid array according to the pressure distribution of the grid array in the target cavity at the current opening;

[0124] Whether the airflow at the grid array is uniform is determined based on a comparison result of the pressure uniformity with a preset pressure uniformity threshold.

[0125] In one embodiment, the air flow homogenization device further includes a control module, which is used to:

[0126] When the current cavity pressure is less than the preset vacuum degree, the process of airflow homogenization is performed;

[0127] During the process of performing airflow homogenization, the current cavity pressure is maintained;

[0128] After the process of airflow homogenization is completed, the current opening of the grid array is maintained and vacuum extraction continues.

[0129] In one embodiment, the air flow homogenization device further includes a recovery module, which is used to:

[0130] After the vacuum is drawn and before the air pressure in the target cavity rises again, the grids in the grid array that are opened during the process of drawing the vacuum on the target cavity are closed.

[0131] The airflow homogenization device provided by the present application adopts the airflow homogenization method in the above embodiment, which can solve the technical problems of low efficiency, high cost and insignificant effect of the current airflow homogenization method. Compared with the prior art, the beneficial effects of the airflow homogenization device provided by the present application are the same as the beneficial effects of the airflow homogenization method provided by the above embodiment, and other technical features in the airflow homogenization device are the same as the features disclosed in the above embodiment method, which will not be repeated here.

[0132] The present application provides an airflow homogenization device, which includes: at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor so that the at least one processor can execute the airflow homogenization method in the above-mentioned embodiment 1.

[0133] Reference below Figure 7 , which shows a schematic diagram of the structure of an airflow homogenization device suitable for implementing the embodiment of the present application. The airflow homogenization device in the embodiment of the present application may include but is not limited to mobile terminals such as mobile phones, laptop computers, digital broadcast receivers, PDAs (Personal Digital Assistants), PADs (Portable Application Descriptions), PMPs (Portable Media Players), vehicle-mounted terminals (such as vehicle-mounted navigation terminals), etc., and fixed terminals such as digital TVs, desktop computers, etc. Figure 7 The air flow homogenization device shown is only an example and should not bring any limitation to the functions and scope of use of the embodiments of the present application.

[0134] like Figure 7As shown, the air flow homogenization device may include a processing device 1001 (e.g., a central processing unit, a graphics processing unit, etc.), which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM: Read Only Memory) 1002 or a program loaded from a storage device 1003 to a random access memory (RAM: Random Access Memory) 1004. In RAM1004, various programs and data required for the operation of the air flow homogenization device are also stored. The processing device 1001, ROM1002, and RAM1004 are connected to each other through a bus 1005. An input / output (I / O) interface 1006 is also connected to the bus. Generally, the following systems can be connected to the I / O interface 1006: an input device 1007 including, for example, a touch screen, a touch pad, a keyboard, a mouse, an image sensor, a microphone, an accelerometer, a gyroscope, etc.; an output device 1008 including, for example, a liquid crystal display (LCD: Liquid Crystal Display), a speaker, a vibrator, etc.; a storage device 1003 including, for example, a magnetic tape, a hard disk, etc.; and a communication device 1009. The communication device 1009 can allow the airflow homogenization device to communicate with other devices wirelessly or by wire to exchange data. Although the figure shows an airflow homogenization device with various systems, it should be understood that it is not required to implement or have all the systems shown. More or fewer systems can be implemented or have alternatively.

[0135] In particular, according to the embodiments disclosed in the present application, the process described above with reference to the flowchart can be implemented as a computer software program. For example, the embodiments disclosed in the present application include a computer program product, which includes a computer program carried on a computer-readable medium, and the computer program includes a program code for executing the method shown in the flowchart. In such an embodiment, the computer program can be downloaded and installed from a network through a communication device, or installed from a storage device 1003, or installed from a ROM 1002. When the computer program is executed by the processing device 1001, the above-mentioned functions defined in the method of the embodiment disclosed in the present application are executed.

[0136] The airflow homogenization device provided by the present application adopts the airflow homogenization method in the above embodiment, which can solve the technical problems of low efficiency, high cost and insignificant effect of the current airflow homogenization method. Compared with the prior art, the beneficial effects of the airflow homogenization device provided by the present application are the same as the beneficial effects of the airflow homogenization method provided by the above embodiment, and the other technical features in the airflow homogenization device are the same as the features disclosed in the method of the previous embodiment, which will not be repeated here.

[0137] It should be understood that the various parts disclosed in this application can be implemented by hardware, software, firmware or a combination thereof. In the description of the above embodiments, specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner.

[0138] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

[0139] The present application provides a computer-readable storage medium having computer-readable program instructions (ie, computer programs) stored thereon, and the computer-readable program instructions are used to execute the airflow homogenization method in the above-mentioned embodiment.

[0140] The computer-readable storage medium provided in the present application may be, for example, a USB flash drive, but is not limited to electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems or devices, or any combination of the above. More specific examples of computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM: Random Access Memory), a read-only memory (ROM: Read Only Memory), an erasable programmable read-only memory (EPROM: Erasable Programmable Read Only Memory or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM: CD-Read Only Memory), an optical storage device, a magnetic storage device, or any suitable combination of the above. In this embodiment, the computer-readable storage medium may be any tangible medium containing or storing a program, which may be used by or in combination with an instruction execution system or device. The program code contained on the computer-readable storage medium may be transmitted using any appropriate medium, including but not limited to: wires, optical cables, RF (Radio Frequency: Radio Frequency), etc., or any suitable combination of the above.

[0141] The computer-readable storage medium may be included in the airflow homogenization device; or may exist independently without being assembled into the airflow homogenization device.

[0142] The computer-readable storage medium carries one or more programs. When the one or more programs are executed by the airflow homogenization device, the airflow homogenization device: scans to obtain the pressure distribution of the grid array in the target cavity at the current opening; determines whether there is turbulence in the airflow at the grid array according to the pressure distribution; if there is turbulence, adjusts the current opening of the grid array, and returns to execute the step of scanning to obtain the pressure distribution of the grid array in the target cavity at the current opening, until it is determined that the airflow at the grid array is homogenized.

[0143] Computer program code for performing the operations of the present application may be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages ​​such as Java, Smalltalk, C++, and conventional procedural programming languages ​​such as "C" or similar programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, as a separate software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0144] The flow chart and block diagram in the accompanying drawings illustrate the possible architecture, function and operation of the system, method and computer program product according to various embodiments of the present application. In this regard, each square box in the flow chart or block diagram can represent a module, a program segment or a part of a code, and the module, the program segment or a part of the code contains one or more executable instructions for realizing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the square box can also occur in a sequence different from that marked in the accompanying drawings. For example, two square boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each square box in the block diagram and / or flow chart, and the combination of the square boxes in the block diagram and / or flow chart can be implemented with a dedicated hardware-based system that performs a specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions.

[0145] The modules involved in the embodiments described in this application may be implemented by software or hardware, wherein the name of the module does not constitute a limitation on the unit itself in some cases.

[0146] The readable storage medium provided in the present application is a computer-readable storage medium, which stores computer-readable program instructions (i.e., computer programs) for executing the above-mentioned airflow homogenization method, and can solve the technical problems of low efficiency, high cost, and insignificant effect of the current airflow homogenization method. Compared with the prior art, the beneficial effects of the computer-readable storage medium provided in the present application are the same as the beneficial effects of the airflow homogenization method provided in the above-mentioned embodiment, and will not be described in detail here.

[0147] The present application also provides a computer program product, including a computer program, which implements the steps of the above-mentioned airflow homogenization method when executed by a processor.

[0148] The computer program product provided by the present application can solve the technical problems of low efficiency, high cost and insignificant effect of the current airflow homogenization method. Compared with the prior art, the beneficial effects of the computer program product provided by the present application are the same as the beneficial effects of the airflow homogenization method provided by the above embodiment, which will not be described in detail here.

[0149] The above descriptions are only some embodiments of the present application, and are not intended to limit the patent scope of the present application. All equivalent structural changes made using the contents of the present application specification and drawings under the technical concept of the present application, or direct / indirect applications in other related technical fields are included in the patent protection scope of the present application.

Claims

1. A method for homogenizing air flow, characterized in that: The airflow homogenization method is applied in the process of extracting vacuum from a target cavity, and the airflow homogenization method includes: Scanning obtains the pressure distribution of the grid array in the target cavity at the current opening; wherein the grid array arranged in the target cavity includes a plurality of rows and columns of small hole grids; a valve corresponding to each grid is used to control the opening of each grid; a pressure sensor corresponding to each grid is used to monitor the pressure of each grid; a controller connected to the pressure sensor and the valve controls the opening of each grid according to the pressure distribution, thereby realizing real-time adjustment of the airflow; determining whether turbulence exists in the airflow at the grid array according to the pressure distribution; If turbulence exists, the current opening of the grid array is adjusted, and the step of returning to the scanning step to obtain the pressure distribution of the grid array in the target cavity at the current opening is performed until it is determined that the airflow at the grid array is uniform; After the process of airflow homogenization is completed, the current opening of the grid array is maintained and vacuum extraction continues.

2. The air flow homogenization method according to claim 1, characterized in that: The step of scanning to obtain the pressure distribution of the grid array in the target cavity at the current opening comprises: Scanning row by row to obtain the row pressure distribution of the grid array in the target cavity at the current opening; And / or, scanning column by column to obtain the column pressure distribution of the grid array in the target cavity at the current opening.

3. The air flow homogenization method according to claim 2, characterized in that: The step of determining whether the airflow at the grid array is turbulent according to the pressure distribution comprises: Determining whether there is turbulence in the airflow at the row grid of the grid array according to the row pressure distribution obtained by row scanning; And / or, determining whether turbulence exists in the airflow at the column grids of the grid array according to the column pressure distribution obtained by scanning column by column.

4. The air flow homogenization method according to claim 1, characterized in that: The step of determining the uniformity of airflow at the grid array comprises: Calculating the pressure uniformity at the grid array according to the pressure distribution of the grid array in the target cavity at the current opening; Whether the airflow at the grid array is uniform is determined based on a comparison result of the pressure uniformity with a preset pressure uniformity threshold.

5. The air flow homogenization method according to claim 1, characterized in that: The air flow homogenization method further comprises: When the current target cavity pressure is less than the preset vacuum degree, a process of airflow homogenization is performed; During the process of performing the airflow homogenization, the current target cavity pressure is maintained.

6. The air flow homogenization method according to claim 1, characterized in that: The air flow homogenization method further comprises: After the vacuum is drawn and before the air pressure in the target cavity rises again, the grids in the grid array that are opened during the process of drawing the vacuum on the target cavity are closed.

7. An air flow homogenization device, characterized in that: The airflow homogenizing device is used in the process of extracting vacuum from the target cavity, and the airflow homogenizing device comprises: A scanning module, used for scanning and obtaining the pressure distribution of the grid array in the target cavity at the current opening; wherein the grid array arranged in the target cavity includes a plurality of rows and columns of small hole grids; a valve corresponding to each grid, used for controlling the opening of each grid; a pressure sensor corresponding to each grid, used for monitoring the pressure of each grid; a controller connected to the pressure sensor and the valve, used for controlling the opening of each grid according to the pressure distribution, so as to realize real-time adjustment of the airflow; a determination module, configured to determine whether turbulence exists in the airflow at the grid array according to the pressure distribution; an adjustment module, configured to adjust the current opening of the grid array if turbulence exists, and return to the step of performing the scanning to obtain the pressure distribution of the grid array in the target cavity at the current opening, until it is determined that the airflow at the grid array is uniform; The air flow homogenization device further includes a control module, which is used for: After the process of airflow homogenization is completed, the current opening of the grid array is maintained and vacuum extraction continues.

8. An air flow homogenization device, characterized in that: The device comprises: a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the computer program is configured to implement the steps of the airflow homogenization method according to any one of claims 1 to 6.

9. A storage medium, characterized in that: The storage medium is a computer-readable storage medium, and a computer program is stored on the storage medium. When the computer program is executed by a processor, the steps of the airflow homogenization method according to any one of claims 1 to 6 are implemented.

10. A computer program product, characterized in that The computer program product comprises a computer program, and when the computer program is executed by a processor, the steps of the airflow homogenization method according to any one of claims 1 to 6 are implemented.

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