Adaptive focusing device and method for laser processing and processing system and method

Abstract

The present invention discloses an adaptive focusing device and method for laser processing, as well as a processing system and method, and belongs to the field of laser welding technology. The adaptive focusing device for laser processing includes a detection component and an adjustment component arranged corresponding to the laser processing component. The detection component uses a second optical path so that the detection light emitted by the detection light module can be divided into monochromatic detection lights with different wavelengths after being processed by a dispersion mirror, and after passing through the spectroscopic module, it is coaxially emitted into the galvanometer module with the processing light beam, and then coaxially emitted to the processing station. Through the third optical path, the monochromatic detection light of a specific wavelength reflected back from the processing station can be transmitted to the photoelectric sensor and generate a corresponding electrical signal. Finally, the adjustment component controls the focusing module according to the electrical signal to complete the adaptive focusing of the laser processing component. The adaptive focusing device for laser processing of the present invention can accurately obtain the position data of the processing station, complete the adaptive focusing of the laser processing component, and make the processing light beam reach the best working state.

Description

Technical Field

[0001] The invention belongs to the technical field of laser welding, and in particular relates to an adaptive focusing device and method for laser processing, and a processing system and method. Background Art

[0002] With the development of automated manufacturing, laser equipment has gradually replaced traditional equipment for production operations. Its high precision, fast speed, and high power have greatly improved production efficiency.

[0003] When the laser equipment is working, due to the characteristics of short welding time and high complexity of welded parts, the focus needs to be adjusted quickly in a short time. Therefore, it is crucial whether the laser equipment can adaptively focus on different workpieces during operation. At the same time, the accuracy of the adaptive focusing of the laser equipment will greatly affect the power of the laser equipment, affect the processing quality of the workpiece, and have a great impact on mass production. The traditional focusing method mainly relies on the operator to uniformly focus according to the batch of workpieces or set a single program to focus the laser equipment. The manual focusing process is cumbersome and inefficient, and the single program focusing cannot quickly adapt to various workpieces and has high requirements for the positioning of the workpieces.

[0004] Chinese patent 202310976258.4 discloses an adaptive focusing cutting head for a laser cutting machine, including a base, an upper protective mirror, a collimating mirror, a focusing mirror, a middle protective mirror, a lower protective mirror, and a laser head. The laser head is fixedly mounted on the bottom of the base, and an annular groove is respectively provided on the top and bottom surfaces of the inner wall of the base. The two ends of the vertical tube are respectively located in the corresponding annular grooves. A lens barrel is fixedly mounted in the vertical tube, and a focusing mirror is fixedly mounted in the lens barrel. The vertical tube is connected to the base through a displacement module, and a cooling device for cooling the focusing mirror is provided between the vertical tube and the lens barrel. When in use, the above device can realize automatic adjustment of the focusing mirror position through the displacement module, thereby replacing manual adjustment, with high adjustment accuracy and fast adjustment speed, which can greatly improve the work efficiency of the user. However, the device only uses one laser displacement sensor and target, which are arranged on one side of the inner wall of the base and are parallel to the laser optical path, resulting in mechanical coaxiality errors; the single sensor has poor accuracy and is close to the laser optical path, making it susceptible to damage or interference from high temperatures; the up and down adjustment range is limited by the sensor detection range; the device cannot obtain real-time changes in focus during processing, and cannot provide real-time focus position feedback and adjust the focus during laser equipment operation to form an adaptive closed-loop system.

[0005] At present, most laser devices on the market use laser displacement sensors or laser proofing comparison to determine the focus position. The method of using laser displacement sensors requires that the sensor and the optical path inside the laser device be kept consistent or coaxial, which not only limits the direction of the optical path inside the laser device, but also excessive laser energy can easily interfere with or damage the sensor. The laser proofing comparison method cannot provide real-time focus position feedback during the operation of the laser device, and the focus offset is irregular each time the laser device works. Proofing comparison adjustment is required before the laser device is operated. The process is very cumbersome and inefficient. Summary of the invention

[0006] In response to one or more of the above-mentioned defects or improvement needs of the prior art, the present invention provides an adaptive focusing device and method for laser processing, as well as a processing system and method, which can accurately obtain the position data of the processing station, complete the adaptive focusing of the laser processing component, and make the processing light beam reach the optimal working state.

[0007] To achieve the above-mentioned object, the present invention provides an adaptive focusing device for laser processing, which is arranged corresponding to a laser processing component, wherein the laser processing component comprises a laser, a focusing module, a light splitting module and a galvanometer module arranged in sequence along a first optical path, and a processing light beam emitted by the laser is transmitted along the first optical path and emitted to a processing station via the galvanometer module;

[0008] The adaptive focusing device comprises a detection component and an adjustment component;

[0009] The detection assembly includes a detection light module, a coupler and a dispersion mirror arranged in sequence, and a photoelectric sensor arranged corresponding to the coupler; the coupler includes a first interface connected to the detection light module and a second interface connected to the photoelectric sensor;

[0010] The detection light module, the coupler, the dispersion mirror, the spectroscopic module and the galvanometer module are arranged in sequence on the second optical path, so that the detection light emitted by the detection light module can be divided into monochromatic detection lights with different wavelengths after being processed by the dispersion mirror and can be coaxially emitted into the galvanometer module with the processing light beam after passing through the spectroscopic module;

[0011] The galvanometer module, the spectrometer module, the dispersion mirror, the coupler and the photoelectric sensor are arranged in sequence on a third optical path, so that the monochromatic detection light of a specific wavelength reflected by the processing station can be transmitted along the third optical path to the photoelectric sensor, and the photoelectric sensor generates a corresponding electrical signal according to the specific wavelength;

[0012] The adjustment component includes a numerical control unit which is respectively connected to the photoelectric sensor and the focusing module by signal. The numerical control unit is used to receive the electrical signal of the photoelectric sensor and control the focusing module to complete the adaptive focusing of the laser processing component.

[0013] As a further improvement of the present invention, the detection light is white light;

[0014] and / or,

[0015] The detection light emitted by the detection light module is a fusion of light emitted by multiple light sources.

[0016] As a further improvement of the present invention, the detection light is light of a special wavelength band, or a filter is provided at any position between the detection light module and the spectroscopic module along the second optical path for transmitting light of a special wavelength band in the detection light.

[0017] As a further improvement of the present invention, a magnifier is provided at any position between the detection light module and the light splitting module along the second light path to increase the intensity of each monochromatic detection light so as to increase the maximum distance that can be detected by each monochromatic detection light.

[0018] Another aspect of the present invention further provides an adaptive focusing method for laser processing. Based on the adaptive focusing device for laser processing, the focusing method comprises:

[0019] S1: placing the workpiece to be processed on the processing station;

[0020] S2: Controlling the detection component to detect the position of the workpiece to be processed;

[0021] S3: The adjusting component controls the focusing module to complete the adaptive focusing of the laser processing component according to the detection result.

[0022] Another aspect of the present invention further provides a laser processing system, the processing system comprising the above-mentioned laser processing adaptive focusing device and a laser processing component, the laser processing component comprising a laser, a focusing module, a spectrometer module and a galvanometer module arranged in sequence along a first optical path, the processing light beam emitted by the laser is transmitted along the first optical path and emitted to the processing station via the galvanometer module;

[0023] A processing platform is provided corresponding to the galvanometer module and / or the processing station, and the processing platform includes a displacement module, and the displacement module can drive the galvanometer module and / or the processing station to move, so that the relative position between the galvanometer module and the processing station changes.

[0024] As a further improvement of the present invention, the laser and the focusing module are arranged above the light splitting module in the vertical direction, and the processing station is arranged below the galvanometer module.

[0025] Another aspect of the present invention further provides a laser processing method, which is implemented using the above-mentioned laser processing system and is characterized in that it includes the following process:

[0026] (1) Using S1 to S3 in the above-mentioned adaptive focusing method for laser processing to focus the laser processing component on the workpiece to be processed;

[0027] (2) Controlling the laser processing assembly to process the workpiece to be processed, and simultaneously performing steps S2 to S3 in the above-mentioned laser processing adaptive focusing method.

[0028] As a further improvement of the present invention, the laser processing method further includes the following process:

[0029] (3) The displacement module drives the galvanometer module and / or the processing station to move, changes the processing part of the workpiece to be processed, and simultaneously performs step (2) until all processing parts of the workpiece to be processed are completely processed.

[0030] As a further improvement of the present invention, the laser processing method further includes the following process:

[0031] (4) The laser processing component stops emitting the processing light beam, the displacement module drives the galvanometer module and / or the processing station to be processed to move again along the processing trajectory, and the detection component detects each processing part of the completed workpiece and records the position value of each processing part to the CNC unit;

[0032] (5) The numerical control unit compares and analyzes each of the position values ​​with the real-time position data obtained during the machining process to obtain an error value of each machining part;

[0033] (6) Determine whether the error value of each processing part exceeds the error threshold. If so, the numerical control unit corrects the processing process of the next workpiece.

[0034] The above-mentioned improved technical features can be combined with each other as long as they do not conflict with each other.

[0035] In general, compared with the prior art, the above technical solution conceived by the present invention has the following beneficial effects:

[0036] (1) The adaptive focusing device for laser processing of the present invention sequentially arranges a detection light module, a coupler, a dispersion mirror, a spectroscopic module and a galvanometer module along the second optical path, so that the detection light emitted by the detection light module can be divided into monochromatic detection light of different wavelengths after being processed by the dispersion mirror and coaxially irradiated into the galvanometer module with the processing light beam after passing through the spectroscopic module, and then coaxially irradiated to the processing station; through the galvanometer module, the spectroscopic module, the dispersion mirror, the coupler and the photoelectric sensor on the third optical path, the monochromatic detection light of a specific wavelength reflected by the processing station can be transmitted to the photoelectric sensor along the third optical path, and the photoelectric sensor generates a corresponding electrical signal according to the specific wavelength; finally, the numerical control unit in the adjustment component receives the electrical signal of the photoelectric sensor and controls the focusing module to complete the adaptive focusing of the laser processing component. The adaptive focusing device for laser processing provided by the present invention can accurately obtain the position data of the processing station by setting the detection light to be coaxial with the processing light beam to irradiate the processing station, and the focusing module can be controlled by the position data to more accurately adjust the focal position, thereby completing the adaptive focusing of the laser processing component and making the processing light beam reach the best working state.

[0037] (2) The adaptive focusing device for laser processing of the present invention sets the detection light to white light or light of a special wavelength band, and sets a filter or a magnifying mirror at any position between the detection light module and the spectroscopic module along the second optical path, so that the adaptive focusing device is suitable for detection and focusing of different processing workpieces and different processing distances, thereby improving the adaptability of the adaptive focusing device for laser processing.

[0038] (3) The adaptive focusing method for laser processing of the present invention completes the focusing of the laser processing component on the workpiece to be processed by the above-mentioned adaptive focusing device for laser processing, and can adjust the focal position of the laser processing component to be consistent with the real-time position of the workpiece to be processed.

[0039] (4) The laser processing system of the present invention includes the above-mentioned laser processing adaptive focusing device and laser processing assembly, which is provided with a processing platform and a corresponding displacement module, so that the relative position between the galvanometer module and the processing station can be changed, thereby changing the position of the processing light beam on the processing station, so that the processing light beam can process different processing parts of the workpiece to be processed, so as to adapt to various complex processing workpieces.

[0040] (5) The laser processing method of the present invention is implemented by using the above-mentioned laser processing system. It first focuses by using the above-mentioned laser processing adaptive focusing method, and then controls the laser processing component to process the workpiece to be processed. During the processing, the detection light and the processing light beam are still coaxial in real time to detect the processing part and focus in real time, which greatly improves the real-time and accuracy of focus adjustment during the processing of complex workpieces. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0042] Figure 1 Schematic diagram of the overall structure of the laser processing system in the embodiment of the present invention;

[0043] Figure 2 is a schematic diagram of a dispersive mirror decomposing detection light in an embodiment of the present invention;

[0044] Figure 3 is a schematic diagram of a coupler optical path channel in an embodiment of the present invention;

[0045] Figure 4 is a flow chart of an adaptive focusing method for laser processing in an embodiment of the present invention;

[0046] Figure 5 4 is a flow chart of the laser processing method in an embodiment of the present invention.

[0047] In all the drawings, the same reference numerals represent the same technical features, specifically:

[0048] 1. Adaptive focusing device; 11. Detection component; 111. Detection light module; 112. Coupler; 1121. Second optical path channel; 1122. Third optical path channel; 113. Dispersion mirror; 114. Photoelectric sensor; 12. Adjustment component; 121. CNC unit; 2. Laser processing component; 201. Laser; 202. Focusing module; 203. Spectrometer module; 204. Galvanometer module; 3. Processing station; 4. Detection light; 401. First monochromatic detection light; 402. Second monochromatic detection light; 403. Third monochromatic detection light. DETAILED DESCRIPTION

[0049] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0050] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0051] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0052] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0053] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0054] Example:

[0055] See also Figure 1The adaptive focusing device 1 for laser processing in the preferred embodiment of the present invention is arranged corresponding to the laser processing component 2. The laser processing component 2 for laser processing includes a laser 201, a focusing module 202, a light splitting module 203 and a galvanometer module 204 arranged in sequence along a first optical path. The processing light beam emitted by the laser 201 is transmitted along the first optical path and emitted to the processing station 3 via the galvanometer module 204. The adaptive focusing device 1 includes a detection component 11 and an adjustment component 12.

[0056] Specifically, the detection component 11 includes a detection light module 111, a coupler 112 and a dispersion mirror 113, which are arranged in sequence, and a photoelectric sensor 114 arranged corresponding to the coupler 112; the coupler 112 includes a first interface connected to the detection light module 111 and a second interface connected to the photoelectric sensor 114; the detection light module 111, the coupler 112, the dispersion mirror 113, the spectroscopic module 203 and the galvanometer module 204 are arranged in sequence on the second optical path, so that the detection light emitted by the detection light module 111 can be divided into monochromatic detection lights with different wavelengths after being processed by the dispersion mirror 113 and can be coaxially emitted with the processing light beam after passing through the spectroscopic module. The laser processing component 2 is a laser beam processing component 200, which is a laser beam processing component 201. The laser beam processing component 201 is a laser beam processing component 202, which is a laser beam processing component 202. The laser beam processing component 201 is a laser beam processing component 201, which is a laser beam processing component 202. The laser beam processing component 201 is a laser beam processing component 202, which is a laser beam processing component 202. The laser beam processing component 201 is a laser beam processing component 202, which is a laser beam processing component 202. The laser beam processing component 201 is a laser beam processing component 202, which is a laser beam processing component 202. The laser beam processing component 201 is a laser beam processing component 202, which is a laser beam processing component 202. The laser beam processing component 201 is a laser beam processing component 202, which is a laser beam processing component 202. The laser beam processing component 201 is a laser beam processing component 202, which is a laser beam processing component 202.

[0057] In this embodiment, the detection light emitted by the detection light module 111 is dispersed into monochromatic detection lights with different wavelengths along the second optical path by the dispersion mirror 113. After passing through the spectroscopic module 203, each monochromatic detection light can be coaxially emitted to the galvanometer module 204 with the processing light beam of the first optical path, and coaxially emitted to the processing station 3 through the galvanometer module 204; since the monochromatic detection lights of different wavelengths have different focal lengths, the positions where the corresponding focal points are formed are different, such as Figure 2As shown, only the monochromatic detection light of a characteristic wavelength whose focus is exactly on the processing station 3 can be reflected back along the reverse direction of the original second optical path, and transmitted to the photoelectric sensor 114 through the third optical path. The photoelectric sensor 114 converts the acquired optical signal (the wavelength of the reflected monochromatic detection light) into an electrical signal and inputs it into the numerical control unit 121. The numerical control unit 121 can quickly and accurately obtain the distance value between the processing station 3 and the galvanometer module 204 by analyzing and processing the reflected monochromatic detection light of a specific wavelength. Each wavelength corresponds to a fixed distance value, and the accuracy of the distance value can reach 10 nanometers, which is much higher than the 500-nanometer accuracy of the traditional laser displacement sensor. The focusing module 202 can be controlled by the measurement data to more accurately adjust the focal position, complete the adaptive focusing of the laser processing component 2, and make the processing light beam reach the best working state.

[0058] Preferably, if Figure 3 As shown, the coupler 112 is provided with two optical path channels, namely, the second optical path channel 1121 and the third optical path channel 1122. Among them, the two ends of the second optical path channel 1121 are coaxially connected to the detection light module 111 and the dispersion mirror 113 through optical fibers, respectively, to provide a channel for the detection light emitted by the detection light module 111 to be emitted to the dispersion mirror 113 along the second optical path, for transmitting the detection light, and ensuring the stability of the output of the detection light module 111; the two ends of the third optical path channel 1122 are connected to the dispersion mirror 113 and the photoelectric sensor 114 through optical fibers, respectively, to provide a channel for the monochromatic detection light of a characteristic wavelength reflected from the processing station 3 to enter the photoelectric sensor 114 along the third optical path, and to change the transmission direction of the monochromatic detection light of a specific wavelength reflected back, so that the monochromatic detection light of a specific wavelength reflected back from the processing station 3 can be stably and reliably transmitted to the photoelectric sensor 114.

[0059] Preferably, the dispersion mirror 113 disperses the detection light emitted by the detection light module 111 into a plurality of monochromatic detection lights with different wavelengths, which may be 3, 5, 7 or other monochromatic detection lights with different wavelengths without limitation.

[0060] For example, Figure 2 As shown, the detection light 4 is decomposed into three monochromatic detection lights with different wavelengths after passing through the dispersion mirror 113, namely, the first monochromatic detection light 401, the second monochromatic detection light 402, and the third monochromatic detection light 403, wherein the focus of the second monochromatic detection light 402 is just located on the processing station 3. Therefore, in this embodiment, the second monochromatic detection light 402 is a monochromatic detection light of a specific wavelength, which can be reflected back along the reverse direction of the second optical path and transmitted to the photoelectric sensor 114 along the third optical path, and the photoelectric sensor 114 obtains its wavelength, while the first monochromatic detection light 401 and the third monochromatic detection light 403 cannot be reflected back along the reverse direction of the second optical path.

[0061] Preferably, the detection light 4 is white light, which is a mixture of multiple colored lights and can be dispersed into monochromatic detection lights of various wavelengths, corresponding to multiple detection distances, and is suitable for detection and focusing of complex structures.

[0062] Preferably, the detection light 4 emitted by the detection light module 111 is a fusion of lights emitted by multiple light sources, which can increase the light intensity of the detection light 4 .

[0063] Preferably, the detection light 4 is light of a special band, or a filter is provided at any position between the detection light module 111 and the spectroscopic module 203 along the second optical path, for transmitting light of a special band in the detection light, corresponding to a special detection distance, and suitable for detecting and focusing slightly simple structures.

[0064] Preferably, a magnifier is provided at any position between the detection light module 111 and the spectroscopic module 203 along the second optical path, for increasing the light intensity of each monochromatic detection light, so as to increase the maximum detectable distance of each monochromatic detection light, which is suitable for detection and focusing when the galvanometer module 204 is far away from the processing station 3.

[0065] like Figure 4 As shown, the present invention also provides an adaptive focusing method for laser processing, which is based on the adaptive focusing device for laser processing and includes the following steps:

[0066] S1: placing the workpiece to be processed on processing station 3;

[0067] S2: Control the detection component 11 to detect the position of the workpiece to be processed;

[0068] Specifically, the detection light module 111 emits detection light through the second optical path to the workpiece to be processed, and the workpiece to be processed reflects the monochromatic detection light of a specific wavelength to the photoelectric sensor 114, and the photoelectric sensor 114 generates a corresponding electrical signal.

[0069] S3: The adjustment component 12 controls the focusing module 202 to complete the adaptive focusing of the laser processing component according to the detection result.

[0070] Specifically, the numerical control unit 121 obtains the real-time position of the workpiece to be processed according to the received electrical signal, and controls the focusing module 202 to adjust the focal position of the laser processing assembly 2 to be consistent with the real-time position of the workpiece to be processed.

[0071] like Figure 1As shown, the present invention also provides a laser processing system, which includes the above-mentioned adaptive focusing device 1 for laser processing and a laser processing component 2, the laser processing component 2 includes a laser 201, a focusing module 202, a spectroscopic module 203 and a galvanometer module 204 arranged in sequence along a first optical path, and the processing light beam emitted by the laser 201 is transmitted along the first optical path and emitted to the processing station 3 via the galvanometer module 204.

[0072] Preferably, a processing platform is provided corresponding to the galvanometer module 204 and / or the processing station 3, and the processing platform includes a displacement module, which can drive the galvanometer module 204 and / or the processing station 3 to move, so that the relative position between the galvanometer module 204 and the processing station 3 changes, thereby changing the position of the processing light beam on the processing station 3.

[0073] In actual setting, the laser 201 and the focusing module 202 are preferably arranged above the light splitting module in the vertical direction, and the processing station 3 is preferably arranged below the galvanometer module 204. Figure 1 This is a layout diagram of the laser processing system in a vertical plane.

[0074] like Figure 5 As shown, the present invention also provides a laser processing method, which is implemented using the above laser processing system, including the following process:

[0075] (1) Using S1 to S3 of the above-mentioned adaptive focusing method for laser processing to focus the laser processing component 2 on the workpiece to be processed;

[0076] (2) Controlling the laser processing assembly to process the workpiece to be processed, and simultaneously performing steps S2 to S3 of the adaptive focusing method for laser processing.

[0077] The laser processing method in this embodiment improves the real-time performance of focus adjustment. When the workpiece to be processed appears on the processing station, the ranging speed of the device and method can reach thousands of measurements per second or even tens of thousands of measurements per second. Especially in the application scenario of continuous measurement, it has obvious advantages over traditional laser triangulation ranging, and greatly improves the real-time performance of focus adjustment during the processing process.

[0078] Further preferably, the laser processing method further comprises the following process:

[0079] (3) The displacement module drives the galvanometer module 204 and / or the processing station 3 to move, changes the processing part of the workpiece to be processed, and simultaneously performs step (2) until all processing parts of the workpiece to be processed are completely processed.

[0080] In this embodiment, the laser processing method adjusts the focus simultaneously when changing the processing part of the workpiece to be processed, which can adapt to processing workpieces with various complex structures, reduce the focusing time of the equipment, and greatly improve the processing efficiency.

[0081] Furthermore, the laser processing method also includes the following process:

[0082] (4) The laser processing component 2 stops emitting the processing light beam, the displacement module drives the galvanometer module 204 and / or the processing station 3 to be processed to move again along the processing trajectory, and the detection component 11 detects each processing part of the completed workpiece and records the position value of each processing part to the numerical control unit;

[0083] (5) The numerical control unit 121 compares and analyzes each position value with the real-time position data obtained during the machining process to obtain the error value of each machining part;

[0084] (6) It is determined whether the error value of each processing part exceeds the error threshold. If so, the numerical control unit 121 corrects the processing process of the next workpiece.

[0085] In this embodiment, by not emitting a processing light beam, but only emitting a detection light to follow the same processing trajectory, each processing part of the completed workpiece is re-inspected, and the position value of each processing part can be obtained. Combined with the real-time position data obtained in real time during the processing, a comparative analysis is performed to obtain the error value of each processing part, and it is determined whether each error value exceeds the error threshold. If the error value of a processing part exceeds the error threshold, the CNC unit will make corrections when the same workpiece to be processed is processed next time. Repeating this process multiple times can effectively improve the focusing accuracy of the processing system.

[0086] The adaptive focusing device for laser processing of the present invention arranges the detection light module 111, the coupler 112, the dispersion mirror 113, the spectroscopic module 203 and the galvanometer module 204 on the second optical path, so that the detection light emitted by the detection light module 111 can be divided into monochromatic detection light with different wavelengths after being processed by the dispersion mirror 113, and after passing through the spectroscopic module 203, it is coaxially emitted into the galvanometer module 204 with the processing light beam, and coaxially emitted to the processing station 3; through the galvanometer module 204, the spectroscopic module 203, the dispersion mirror 113, the coupler 112 and the photoelectric sensor 114 on the third optical path, the monochromatic detection light of a specific wavelength reflected by the processing station 3 can be transmitted to the photoelectric sensor 114 along the third optical path, and the photoelectric sensor 114 generates a corresponding electrical signal according to the specific wavelength; finally, the numerical control unit 121 in the adjustment component 12 receives the electrical signal of the photoelectric sensor 114 and controls the focusing module 202 to complete the adaptive focusing of the laser processing component 2. The adaptive focusing device for laser processing provided by the present invention can accurately obtain the position data of the processing station 3 by setting the detection light to be coaxial with the processing light beam and irradiating it to the processing station 3. According to the position data, the focusing module 202 can be controlled to more accurately adjust the focal position, thereby completing the adaptive focusing of the laser processing component 2 and making the processing light beam reach the optimal working state.

[0087] It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An adaptive focusing device for laser processing, which is arranged corresponding to a laser processing component, wherein the laser processing component comprises a laser, a focusing module, a beam splitting module and a galvanometer module arranged in sequence along a first optical path, wherein a processing light beam emitted by the laser is transmitted along the first optical path and is emitted to a processing station via the galvanometer module, wherein: The adaptive focusing device comprises a detection component and an adjustment component; The detection assembly includes a detection light module, a coupler and a dispersion mirror arranged in sequence, and a photoelectric sensor arranged corresponding to the coupler; the coupler includes a first interface connected to the detection light module and a second interface connected to the photoelectric sensor; The detection light module, the coupler, the dispersion mirror, the spectroscopic module and the galvanometer module are arranged in sequence on the second optical path, so that the detection light emitted by the detection light module can be divided into monochromatic detection lights with different wavelengths after being processed by the dispersion mirror and can be coaxially emitted into the galvanometer module with the processing light beam after passing through the spectroscopic module; The galvanometer module, the spectrometer module, the dispersion mirror, the coupler and the photoelectric sensor are arranged in sequence on a third optical path, so that the monochromatic detection light of a specific wavelength reflected by the processing station can be transmitted along the third optical path to the photoelectric sensor, and the photoelectric sensor generates a corresponding electrical signal according to the specific wavelength; The adjustment component includes a numerical control unit connected to the photoelectric sensor and the focusing module respectively, and the numerical control unit is used to receive the electrical signal of the photoelectric sensor and control the focusing module to complete the adaptive focusing of the laser processing component; The detection light is one of white light, light emitted by multiple light sources merged together, and light of a special wavelength band; A filter is provided at any position between the detection light module and the light splitting module along the second light path, for transmitting light of a special wavelength band in the detection light; A magnifier is provided at any position between the detection light module and the light splitting module along the second light path, for increasing the light intensity of each monochromatic detection light, so as to increase the maximum distance that can be detected by each monochromatic detection light.

2. An adaptive focusing method for laser processing, characterized in that: The focusing method is implemented based on the adaptive focusing device for laser processing described in claim 1, and the focusing method includes: S1: placing the workpiece to be processed on the processing station; S2: Controlling the detection component to detect the position of the workpiece to be processed; S3: The adjusting component controls the focusing module to complete the adaptive focusing of the laser processing component according to the detection result.

3. A laser processing system, characterized in that: The processing system comprises the adaptive focusing device for laser processing and the laser processing assembly as described in claim 1, wherein the laser processing assembly comprises a laser, a focusing module, a beam splitting module and a galvanometer module arranged in sequence along a first optical path, and the processing light beam emitted by the laser is transmitted along the first optical path and emitted to the processing station via the galvanometer module; A processing platform is provided corresponding to the galvanometer module and / or the processing station. The processing platform includes a displacement module. The displacement module can drive the galvanometer module and / or the processing station to move, so that the relative position between the galvanometer module and the processing station changes.

4. The laser processing system according to claim 3, characterized in that: In the vertical direction, the laser and the focusing module are arranged above the light splitting module, and the processing station is arranged below the galvanometer module.

5. A laser processing method, which is implemented by using the laser processing system described in claim 3 or 4, characterized in that: The process includes the following: (1) Using S1 to S3 of the adaptive focusing method for laser processing described in claim 2 to focus the laser processing component on the workpiece to be processed; (2) controlling the laser processing assembly to process the workpiece to be processed, and simultaneously performing steps S2 to S3 of the adaptive focusing method for laser processing described in claim 2; (3) The displacement module drives the galvanometer module and / or the processing station to move, changes the processing part of the workpiece to be processed, and simultaneously performs step (2) until all processing parts of the workpiece to be processed are completely processed.

6. The laser processing method according to claim 5, characterized in that: It also includes the following processes: (4) The laser processing component stops emitting the processing light beam, the displacement module drives the galvanometer module and / or the processing station to move again along the processing trajectory, and the detection component detects each processing part of the completed workpiece and records the position value of each processing part to the CNC unit; (5) The numerical control unit compares and analyzes each of the position values ​​with the real-time position data obtained during the machining process to obtain an error value of each machining part; (6) Determine whether the error value of each processing part exceeds the error threshold. If so, the numerical control unit corrects the processing process of the next workpiece.

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