Rod removal fixture and robot for automatic removal of polysilicon rods from furnace

Abstract

The present invention relates to the technical field of auxiliary equipment for reduction furnaces, and specifically discloses a rod-taking fixture and robot for automatically dismantling polycrystalline silicon rods from a furnace, wherein the rod-taking fixture comprises a fixture fixing frame, a top pressing cylinder assembly installed on the upper part of the fixture fixing frame, at least two sets of left-side clamping mechanisms installed on the fixture fixing frame and located below the top pressing cylinder assembly, and at least two sets of right-side clamping mechanisms installed on the fixture fixing frame and spaced apart from the left-side clamping mechanisms; the left-side clamping mechanism and the right-side clamping mechanism are respectively used to clamp the two side columns of the silicon rod; the right-side clamping mechanism has the same structure as the left-side clamping mechanism, and the clamping action is symmetrical. The present invention adopts a front-to-back clamping method, and the outer width of the clamping part of the rod-taking fixture is smaller than the outer width of the silicon rod, which solves the problem that the middle silicon rod cannot be clamped by automatic clamping.

Description

Technical Field

[0001] The invention relates to the technical field of reduction furnace auxiliary equipment, and in particular to a rod-taking fixture and a robot for automatically removing polycrystalline silicon rods from a furnace. Background Art

[0002] In the reduction furnace of polysilicon production, polysilicon rods (referred to as silicon rods) after the deposition process need to go through a professional disassembly procedure. When the polysilicon industry was just emerging in China, the reduction furnaces mostly used 12 pairs of rods and 18 pairs of rods. At that time, the furnaces were mostly disassembled manually. Later, with the development of the industry, after 2011, domestic manufacturers gradually developed power-assisted manipulators to disassemble the furnaces. The power-assisted manipulators are manually operated to complete operations such as rising, clamping, descending, and arranging, and balanced movement and positioning in space. The main operators of the power-assisted manipulators are no less than 4 people. The disadvantages of manually operated power-assisted manipulators are high labor costs, the dust in the working environment will bring occupational hazards to employees, and there are safety risks during manual operation.

[0003] With the development in recent years, the scale of domestic polysilicon projects has become larger and larger. The number of polysilicon rods in the reduction furnace has gradually been dominated by more than 40 pairs of rods. More and more people are needed to assemble and disassemble the furnace, and with the development of the national economy, labor costs are getting higher and higher. For reduction furnaces with more than 40 pairs of rods, the spacing of the polysilicon rods is getting smaller and smaller, especially the polysilicon rods close to the center, whose spacing is smaller than that of the polysilicon rods on the periphery. The current furnace dismantling manipulators all adopt the method of clamping from the two outer sides of the polysilicon rods, which cannot meet the requirements of the clamping and disassembly of polysilicon rods with small spacing. Usually manual cooperation is required for dismantling. Therefore, there is an urgent need for a rod removal fixture and robot that can meet the requirements of the disassembly of polysilicon rods with small spacing. Summary of the invention

[0004] The purpose of the present invention is to overcome the deficiencies of the prior art and to provide a polysilicon rod removal fixture and a robot for automatically removing polysilicon rods from a furnace.

[0005] In order to solve the above technical problems, the present invention is achieved through the following technical solutions:

[0006] A rod-taking fixture for automatically removing polycrystalline silicon rods from a furnace, comprising a fixture fixing frame, a top pressing cylinder assembly mounted on the fixture fixing frame, at least two sets of left-side clamping mechanisms mounted on the fixture fixing frame and located below the top pressing cylinder assembly, and at least two sets of right-side clamping mechanisms mounted on the fixture fixing frame and spaced apart from the left-side clamping mechanisms;

[0007] The left clamping mechanism and the right clamping mechanism are used to clamp the two side columns of the silicon rod respectively;

[0008] The left-side clamping mechanism includes a clamp seat fixedly connected to the clamp fixing frame, a slide rail fixedly connected to the clamp seat, a slider 1 and a slider 2 slidably mounted on the slide rail, a clamping plate seat fixedly connected to the slider 1, an outer clamping plate fixedly connected to the clamping plate seat, a fixed seat fixedly connected to the slider 2 and located on the inner side of the outer clamping plate, a sliding seat slidably mounted on the fixed seat, an inner clamping plate hinged at the end of the sliding seat and cooperating with the outer clamping plate, a pull rod hinged to the inner clamping plate and the fixed seat at both ends, a first driving cylinder fixedly connected to the fixed seat for driving the sliding seat to move, a second driving cylinder fixedly connected to the clamping plate seat for driving the fixed seat, and a pneumatic locking device fixedly connected to the clamping plate seat for locking with the slide rail;

[0009] The right clamping mechanism has the same structure as the left clamping mechanism, and the clamping actions are symmetrical.

[0010] Preferably, the top holding cylinder assembly includes a holding rod installed on the upper part of the clamp fixing frame through a linear guide rail, a holding plate fixedly connected to the lower end of the holding rod, a mounting frame fixedly connected to the clamp fixing frame and located below the holding rod, and a driving cylinder; the driving cylinder includes a cylinder body and a piston rod, the cylinder body is fixedly connected to the mounting frame, and the piston rod is fixedly connected to the holding rod.

[0011] Preferably, it also includes a plurality of guide cameras arranged at intervals along the vertical direction, and the plurality of guide cameras are installed on a fixing seat at corresponding positions through a mounting bracket.

[0012] A robot for automatically dismantling a polycrystalline silicon rod furnace comprises a base device and a manipulator mounted on the base device; the robot also comprises the rod taking fixture as described above; the rod taking fixture is mounted on the manipulator.

[0013] Preferably, the base device includes a counterweight base plate, a plurality of adjustment base plates evenly distributed and fixedly connected to the counterweight base plate, and electrically adjustable feet installed on the adjustment base plate.

[0014] Preferably, the electric adjustable foot includes a screw lift fixedly connected to the adjustment base plate, a joint rod, a first servo motor, and a base plate; the screw lift includes a shell and a screw; the shell is fixedly connected to the adjustment base plate, the upper end of the joint rod is coaxially rotatably connected to the lower end of the screw, and the lower end of the joint rod is hinged to the base plate; the output end of the first servo motor is drivingly connected to the input end of the screw lift.

[0015] Preferably, the manipulator includes a column fixedly connected to the base device, a swing arm installed at the upper end of the column and rotating along the vertical axis, a second servo motor for driving the swing arm to rotate, a rotating seat installed at the end of the swing arm and rotating along the vertical axis, a third servo motor for driving the rotating seat to rotate, a main lifting arm installed on the rotating seat and rotating along the horizontal axis, a fourth servo motor for driving the main lifting arm to rotate, a swing seat rotatably connected to the end of the main lifting arm, a fixed arm fixedly connected to the rotating seat, a secondary lifting arm hinged to the fixed arm and the swing seat at both ends, an auxiliary cylinder for driving the secondary lifting arm to rotate, a suspension rod installed on the swing seat and extending downward and rotating along the vertical axis, a fifth servo motor for driving the suspension rod to rotate, a connecting seat installed at the lower end of the suspension rod and rotating along the horizontal axis, a sixth servo motor for driving the connecting seat to rotate, and a counterweight mechanism for providing auxiliary torque for the sixth servo motor; the connecting seat is fixedly connected to the fixture fixing frame; the auxiliary cylinder includes a cylinder body and a piston rod, the cylinder body is hinged to the fixed arm, and the piston rod is hinged to the secondary lifting arm.

[0016] Preferably, the counterweight mechanism includes an upper connecting frame fixedly connected to the suspension rod, a lower connecting frame fixedly connected to the connecting seat, and a counterweight cylinder; the counterweight cylinder includes a counterweight cylinder body and a counterweight piston rod, the counterweight cylinder body is hinged to the upper connecting frame, and the counterweight piston rod is hinged to the lower connecting frame.

[0017] Preferably, a counterweight assembly is provided on one end of the swing arm relative to the rotating seat, and the counterweight assembly includes a counterweight frame fixedly connected to the swing arm, and a plurality of counterweight blocks detachably mounted on the counterweight frame.

[0018] Preferably, it also includes a camera calibration assembly, which includes a fixed bracket arranged at the lower part of the column, a light source assembly and a calibration camera installed on the fixed bracket, and a target fixing plate installed on the workshop floor when in use and used in conjunction with the calibration camera.

[0019] Compared with the prior art, the present invention has the following advantages:

[0020] The silicon rod taking method of the present invention adopts the front and rear positions of the silicon rod clamping, and the inner clamping plate extends into the silicon rod from the center of the silicon rod and flips to cooperate with the outer clamping plate to clamp the silicon rod, which greatly reduces the risk of friction between the inner clamping plate and the silicon rod during the insertion process, and improves the reliability and success rate of clamping the silicon rod; adopts the front and rear clamping method, and the outer width of the clamping part of the rod taking clamp is smaller than the outer width of the silicon rod, which solves the problem that the middle silicon rod cannot be clamped by automatic clamping.

[0021] The present invention adopts a front and back clamping method. During the flipping process after clamping the silicon rod, the inner clamping plate is in a posture of holding the silicon rod, thereby reducing the risk of the silicon rod slipping due to insufficient friction caused by air pressure fluctuations in the side clamping method. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 A three-dimensional diagram of the rod removal fixture.

[0024] Figure 2 for Figure 1 Enlarged front view of the clamping mechanism on the right side of the middle.

[0025] Figure 3 for Figure 2 Rear view of.

[0026] Figure 4 for Figure 2 Top view of the .

[0027] Figure 5 for Figure 2 Bottom view of .

[0028] Figure 6 for Figure 2 Stereoscopic diagram.

[0029] Figure 7 It is a front view of the robot of the present invention.

[0030] Figure 8 for Figure 7 Enlarged view of part A.

[0031] Fig. 9 for Figure 7 Enlarged view of part B.

[0032] Fig.10 for Figure 7 Top view of the .

[0033] Fig.11 for Figure 7 Left view of .

[0034] Fig.12 for Figure 7 Stereoscopic diagram.

[0035] Fig.13 A magnified top view of the camera calibration assembly.

[0036] Fig.14 for Fig.13 A cross-sectional view along CC in which the target fixing plate is omitted.

[0037] In the figure: 1-base device; 2-manipulator; 3-rod clamp; 4-guide camera; 5-mounting bracket; 6-camera calibration assembly; 101-weighted base plate; 102-adjustment base plate; 103-electric adjustable feet; 104-screw lifter; 105-joint rod; 106-first servo motor; 107-housing; 108-screw; 109-base plate; 201-column; 202-swing arm; 203-second servo motor; 204- Rotating seat; 205-third servo motor; 206-main lifting arm; 207-fourth servo motor; 208-swinging seat; 209-fixed arm; 210-secondary lifting arm; 211-auxiliary cylinder; 212-cylinder body 1; 213-piston rod 1; 214-suspender rod; 215-fifth servo motor; 216-connecting seat; 217-sixth servo motor; 218-counterweight mechanism; 219-upper connecting frame; 220-lower connecting frame; 221-counterweight cylinder ;222-counterweight cylinder;223-counterweight piston rod;224-counterweight assembly;225-counterweight frame;226-counterweight block;227-brace;301-clamp fixing frame;302-top pressing cylinder assembly;303-left clamping mechanism;304-right clamping mechanism;310-clamp seat;311-slide rail;312-slider 1;313-slider 2;314-clamping plate seat;315-outer clamping plate;316-fixing seat;317 - sliding seat; 318- inner clamping plate; 319- pulling rod; 320- first driving cylinder; 321- second driving cylinder; 322- pneumatic locking device; 323- linear guide; 324- holding rod; 325- holding plate; 326- mounting frame; 327- driving cylinder; 328- cylinder body 2; 329- piston rod 2; 330- reset torsion spring; 601- fixing bracket; 602- light source assembly; 603- calibration camera; 604- target fixing plate. DETAILED DESCRIPTION

[0038] In order to more clearly explain the purpose, technical solution and advantages of the present invention, the technical solution of the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiment of the present invention. Obviously, the embodiments described below are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention described below, all other embodiments obtained by ordinary technicians in this field without paying creative work belong to the scope of protection of the present invention.

[0039] Example 1

[0040] A polysilicon rod removal fixture for automatically removing polysilicon rods from a furnace, as shown in the attached Figure 1-6As shown, it includes a fixture fixing frame 301, a top pressing cylinder assembly 302 installed on the upper part of the fixture fixing frame 301, three sets of left clamping mechanisms 303 installed on the fixture fixing frame 301 and located below the top pressing cylinder assembly 302, and three sets of right clamping mechanisms 304 installed on the fixture fixing frame 301 and arranged at intervals with the left clamping mechanisms 303;

[0041] The left clamping mechanism 303 and the right clamping mechanism 304 are used to clamp the two side columns of the silicon rod respectively;

[0042] The left clamping mechanism 303 includes a clamp seat 310 fixedly connected to the clamp fixing frame 301, a slide rail 311 fixedly connected to the clamp seat 310, a slider 1 312 and a slider 2 313 slidably mounted on the slide rail 311, a clamp seat 314 fixedly connected to the slider 1 312, an outer clamp 315 fixedly connected to the clamp seat 314, a fixed seat 316 fixedly connected to the slider 2 313 and located on the inner side of the outer clamp 315, a sliding seat 317 slidably mounted on the fixed seat 316, an inner clamp 318 hinged at the end of the sliding seat 317 and cooperating with the outer clamp 315, and two ends of the inner clamp 318 and the fixed plate 315 are respectively connected to the inner clamp 318 and the fixed plate 315. The pull rod 319 hinged on the seat 316, the first driving cylinder 320 fixedly connected to the fixed seat 316 for driving the sliding seat 317 to move, the second driving cylinder 321 fixedly connected to the clamping plate seat 314 for driving the fixed seat 316, and the pneumatic locking device 322 fixedly connected to the clamping plate seat 314 for locking with the slide rail 311; the pneumatic locking device 322 and the slide rail 311 are locked by friction, which is an existing mechanism, similar to the brake mechanism, and the existing mechanism can be used, and no further description is given; the second driving cylinder 321 in this embodiment preferably adopts a double-acting cylinder to further improve the stability of clamping. In this embodiment, a reset torsion spring 330 is set at the hinge of the inner clamping plate 318 and the sliding seat 317 to cooperate with the first driving cylinder 320 to realize the flipping of the inner clamping plate 318.

[0043] The right clamping mechanism 304 has the same structure as the left clamping mechanism 303, and the clamping action is symmetrical. In this embodiment, the right clamping mechanism 304 and the left clamping mechanism 303 are rotated 180 degrees to achieve symmetry in the clamping action. Obviously, the symmetry of the clamping action can also be achieved by mirroring.

[0044] As a preferred technical solution of this embodiment, the top holding cylinder assembly 302 includes a holding rod 324 installed on the upper part of the clamp fixing frame 301 through a linear guide 323, a holding plate 325 fixedly connected to the lower end of the holding rod 324, a mounting frame 326 fixedly connected to the clamp fixing frame 301 and located below the holding rod 324, and a driving cylinder 327; the driving cylinder 327 includes a cylinder body 328 and a piston rod 329, the cylinder body 328 is fixedly connected to the mounting frame 326, and the piston rod 329 is fixedly connected to the holding rod 324. The top holding cylinder assembly 302 is used to press the U-shaped top of the silicon rod when removing the silicon rod. Obviously, the top holding cylinder assembly 302 can also adopt other existing structural forms.

[0045] As a further improved technical solution of this embodiment, it also includes three guide cameras 4 arranged at intervals along the vertical direction, and the three guide cameras 4 are installed on the fixing seat 316 at the corresponding position through the mounting bracket 5; by arranging the upper, middle and lower three guide cameras 4 in the same line, the camera object distance and recognition accuracy can be effectively improved, and the position and shape of the silicon rod to be taken can be identified with high precision, so that the recognition accuracy of the position and shape of the adjacent silicon rods in the front and back and left and right can meet the requirements of automatic rod taking.

[0046] Example 2

[0047] A robot for automatically dismantling a polysilicon rod furnace, as shown in the attached Figure 1-14 As shown, it includes a base device 1 and a manipulator 2 installed on the base device 1; it also includes a rod-taking fixture 3 as described in the first embodiment; the rod-taking fixture 3 is installed on the manipulator 2.

[0048] As a further improved technical solution of this embodiment, the base device 1 includes a counterweight base plate 101, four adjustment base plates 102 evenly connected to the counterweight base plate 101, and electrically adjustable feet 103 installed on the adjustment base plate 102. When in use, a gyroscope (not shown in the figure) can be set on the base device 1, and the control system controls the electrically adjustable feet 103 according to the feedback signal of the gyroscope to achieve rapid adjustment of the horizontality of the counterweight base plate 101, thereby improving the stability of the equipment. The electrically adjustable feet 103 in this embodiment can adopt common adjustable feet such as hydraulic lifting or screw lifting.

[0049] As a specific technical solution of this embodiment, the electric adjustable foot 103 includes a screw lift 104 fixedly connected to the adjustment base plate 102, a joint rod 105, a first servo motor 106, and a base plate 109; the screw lift 104 includes a housing 107 and a screw 108; the housing 107 is fixedly connected to the adjustment base plate 102, the upper end of the joint rod 105 is coaxially rotatably connected to the lower end of the screw 108, and the lower end of the joint rod 105 is hinged to the base plate 109; the output end of the first servo motor 106 is drivingly connected to the input end of the screw lift 104. The screw lift 104 in this embodiment can adopt a SWL5 type screw lift, and its specific structure and use method are existing technologies and will not be repeated.

[0050] As a specific technical solution of this embodiment, the manipulator 2 includes a column 201 fixedly connected to the base device 1, a swing arm 202 installed at the upper end of the column 201 and rotating along the vertical axis, a second servo motor 203 for driving the swing arm 202 to rotate, a rotating seat 204 installed at the end of the swing arm 202 and rotating along the vertical axis, a third servo motor 205 for driving the rotating seat 204 to rotate, a main lifting arm 206 installed on the rotating seat 204 and rotating along the horizontal axis, a fourth servo motor 207 for driving the main lifting arm 206 to rotate, a swing seat 208 rotatably connected to the end of the main lifting arm 206, and a fixed arm 209 fixedly connected to the rotating seat 204, and both ends are hinged to the fixed arm 209 and the swing seat 208 respectively. The auxiliary lifting arm 210, the auxiliary cylinder 211 driving the auxiliary lifting arm 210 to rotate, the suspension rod 214 installed on the swing seat 208 and extending downward along the vertical axis, the fifth servo motor 215 for driving the suspension rod 214 to rotate, the connecting seat 216 installed at the lower end of the suspension rod 214 along the horizontal axis, the sixth servo motor 217 for driving the connecting seat 216 to rotate, and the counterweight mechanism 218 for providing auxiliary torque to the sixth servo motor 217; the connecting seat 216 is fixedly connected to the clamp fixing frame 301; the auxiliary cylinder 211 includes a cylinder body 212 and a piston rod 213, the cylinder body 212 is hinged to the fixed arm 209, and the piston rod 213 is hinged to the auxiliary lifting arm 210.

[0051] The main lifting arm 206, the auxiliary lifting arm 210, the swing seat 208 and the rotating seat 204 (including the fixed arm 209 fixedly connected thereto) in this embodiment constitute a four-bar linkage. The fourth servo motor 207 drives the main lifting arm 206, and the auxiliary cylinder 211 drives the auxiliary lifting arm 210 to form a dual-drive mode, that is, the auxiliary cylinder 211 provides auxiliary torque, and the fourth servo motor 207 provides active torque to ensure the smoothness of the drive rotation and reduce the vibration of the equipment. The servo motors in this embodiment are all servo motors with a reduction structure, and their drive installation method is a prior art and will not be repeated. The manipulator 2 is driven by six servo motors, which can realize the six-degree-of-freedom movement of the rod-taking fixture 3 to ensure that the robot posture can better automatically adapt to the silicon rod.

[0052] As a further improved technical solution of this embodiment, the counterweight mechanism 218 includes an upper connecting frame 219 fixedly connected to the suspension rod 214, a lower connecting frame 220 fixedly connected to the connecting seat 216, and a counterweight cylinder 221; the counterweight cylinder 221 includes a counterweight cylinder body 222 and a counterweight piston rod 223, the counterweight cylinder body 222 is hinged to the upper connecting frame 219, and the counterweight piston rod 223 is hinged to the lower connecting frame 220. The counterweight mechanism 218 can also adopt other structures that can provide auxiliary torque, such as a hydraulic cylinder, etc., and the counterweight mechanism 218 provides auxiliary torque for the connecting seat 216 during rotation, which can effectively ensure the stability of the rotation of the connecting seat 216.

[0053] As a further improved technical solution of this embodiment, a counterweight assembly 224 is provided at one end of the swing arm 202 relative to the rotating seat 204, and the counterweight assembly 224 includes a counterweight frame 225 fixedly connected to the swing arm 202, and a plurality of counterweight blocks 226 detachably mounted on the counterweight frame 225. Different numbers of counterweight blocks 226 can be configured according to the specifications and weights of the silicon rods to improve the balance of the force on the equipment.

[0054] As a technical solution for further improvement of this embodiment, it also includes a camera calibration component 6, which includes a fixed bracket 601 arranged at the lower part of the column 201, a light source component 602 and a calibration camera 603 installed on the fixed bracket 601, and a target fixing plate 604 installed on the workshop floor when in use and used in conjunction with the calibration camera 603.

[0055] When in use, the robot is hoisted to the corresponding position of the reduction furnace and the base device 1 is leveled. Since there will be deviations in the placement position each time, the robot origin needs to be calibrated. The robot origin can be calibrated through the calibration camera 603 and the control system to achieve the goal of practical application. The light source component 602 is used to provide lighting for the target fixing plate 604 to ensure that the calibration camera 603 can effectively collect image information with brightness that meets the requirements.

[0056] As a further improved technical solution of this embodiment, the manipulator 2 further includes three diagonal braces 227 whose two ends are respectively fixedly connected to the column 201 and the base device 1 to improve the stability of the connection between the column 201 and the base device 1.

[0057] The working mode of the robot of the present invention is as follows:

[0058] 1) The equipment needs to be hoisted and used between multiple reduction furnaces. After hoisting, the base device 1 needs to be leveled first. The existing adjustment method is manual adjustment and verification with a level meter. The adjustment is time-consuming and labor-intensive, and the influence of human observation is large, and the stability of the equipment is difficult to ensure. The base device 1 of the present invention uses four first servo motors 106. When in use, a gyroscope is added to the base device 1. Through the feedback signal of the gyroscope, the control system controls the first servo motor 106 to first complete the robot's rapid, accurate, and automatic leveling;

[0059] 2) After the base device 1 is leveled, since there will be deviations in the placement position each time it is moved, the robot origin needs to be calibrated, and then the origin is calibrated by the calibration camera 603;

[0060] 3) The control system controls the manipulator 2 and the rod-taking fixture 3 to move horizontally and approach the silicon rod according to the real-time information provided by the guiding camera 4. The first driving cylinder 320 retracts the sliding seat 317 in advance to ensure that the inner clamping plate 318 is parallel to the moving direction of the sliding seat 317. Then, according to the information provided by the guiding camera 4, the control system makes the outer clamping plate 315 approach the front side of the silicon rod and stop. At this time, the first driving cylinder 320 drives the sliding seat 317 to extend, driving the inner clamping plate 318 to flip and be located on the rear side of the silicon rod. Then, the pneumatic locking device 322 is released, and the second driving cylinder 321 drives the clamping plate seat 314 and the fixed seat 316 to move relative to each other, thereby driving the inner clamping plate 318 and the outer clamping plate 315 to move together and clamp the silicon rod from the front and back sides. Then, the pneumatic locking device 322 is released. The device 322 locks the slide rail 311 again to lock the rod-taking fixture 3; then the top pressing cylinder assembly 302 presses the upper end of the silicon rod; then the control system controls the manipulator 2 to pull the silicon rod upward, and flips it over and moves it to the unloading station, then the top pressing cylinder assembly 302 is released, and the second driving cylinder 321 moves in the opposite direction, driving the clamping plate seat 314 and the fixed seat 316 to move in the opposite direction, and then drives the inner clamping plate 318 and the outer clamping plate 315 to release the silicon rod, and then the first driving cylinder 320 moves in the opposite direction, driving the inner clamping plate 318 to rotate in the opposite direction to be parallel to the moving direction of the sliding seat 317, and then the control system controls the manipulator 2 to drive the rod-taking fixture 3 to leave the silicon rod, completing the disassembly of the silicon rod, and repeating the above steps again to disassemble the next silicon rod.

[0061] The silicon rod taking method of the present invention adopts the front and rear positions of the silicon rod clamping, the inner clamping plate 318 extends into the silicon rod from the center of the silicon rod and flips over to cooperate with the outer clamping plate 315 to clamp the silicon rod, which greatly reduces the risk of the inner clamping plate 318 and the silicon rod rubbing against each other during the insertion process, and improves the reliability and success rate of clamping the silicon rod; the front and rear clamping method is adopted, the outer width of the clamping part of the rod taking clamp 3 is smaller than the outer width of the silicon rod, and the outer sides of the inner clamping plate 318 and the outer clamping plate 315 do not exceed the outer edge of the silicon rod, which solves the problem that the middle silicon rod cannot be clamped when automatically clamped.

[0062] The present invention adopts a front and back clamping method. During the flipping process after clamping the silicon rod, the inner clamping plate 318 is in a posture of holding the silicon rod, which reduces the risk of the silicon rod slipping due to insufficient friction caused by air pressure fluctuations in the side clamping method.

[0063] The above description is only a preferred embodiment of the present invention and is not intended to limit the protection scope of the present invention. For those skilled in the art, any modification, equivalent replacement and improvement of the technical solutions or partial technical features recorded in the above specific embodiments within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A rod removal fixture for automatically removing polycrystalline silicon rods from a furnace, characterized in that: It comprises a clamp fixing frame (301), a top pressing cylinder assembly (302) mounted on the upper part of the clamp fixing frame (301), at least two sets of left clamping mechanisms (303) mounted on the clamp fixing frame (301) and located below the top pressing cylinder assembly (302), and at least two sets of right clamping mechanisms (304) mounted on the clamp fixing frame (301) and arranged at intervals from the left clamping mechanisms (303); The left clamping mechanism (303) and the right clamping mechanism (304) are used to clamp the two side columns of the silicon rod respectively; The left clamping mechanism (303) comprises a clamp seat (310) fixedly connected to the clamp fixing frame (301), a slide rail (311) fixedly connected to the clamp seat (310), a slider 1 (312) and a slider 2 (313) slidably mounted on the slide rail (311), a clamp seat (314) fixedly connected to the slider 1 (312), an outer clamp (315) fixedly connected to the clamp seat (314), a fixed seat (316) fixedly connected to the slider 2 (313) and located on the inner side of the outer clamp (315), a sliding seat (317) slidably mounted on the fixed seat (316), and a hinged end of the sliding seat (317). an inner clamping plate (318) at a position cooperating with the outer clamping plate (315), a pull rod (319) with two ends respectively hinged to the inner clamping plate (318) and the fixed seat (316), a first driving cylinder (320) fixedly connected to the fixed seat (316) and used for driving the sliding seat (317) to move, a second driving cylinder (321) fixedly connected to the clamping plate seat (314) and used for driving the fixed seat (316), and a pneumatic locking device (322) fixedly connected to the clamping plate seat (314) and used for locking with the slide rail (311); a return torsion spring (330) is provided at the hinge of the inner clamping plate (318) and the sliding seat (317) to cooperate with the first driving cylinder (320) to realize the turning of the inner clamping plate (318); The right clamping mechanism (304) has the same structure as the left clamping mechanism (303), and the clamping actions are symmetrical; It also comprises a plurality of guide cameras (4) arranged at intervals in the vertical direction, wherein the plurality of guide cameras (4) are mounted on fixing seats (316) at corresponding positions via mounting brackets (5).

2. The rod removal fixture according to claim 1, characterized in that: The top holding cylinder assembly (302) comprises a holding rod (324) mounted on the upper part of the fixture fixing frame (301) via a linear guide rail (323), a holding plate (325) fixedly connected to the lower end of the holding rod (324), a mounting frame (326) fixedly connected to the fixture fixing frame (301) and located below the holding rod (324), and a driving cylinder (327); the driving cylinder (327) comprises a cylinder body (328) and a piston rod (329); the cylinder body (328) is fixedly connected to the mounting frame (326), and the piston rod (329) is fixedly connected to the holding rod (324).

3. A robot for automatically dismantling a polycrystalline silicon rod furnace, comprising a base device (1) and a manipulator (2) mounted on the base device (1); characterized in that: It also includes a rod-taking fixture (3) as described in any one of claims 1 to 2; the rod-taking fixture (3) is installed on the manipulator (2).

4. The robot for automatically dismantling a polycrystalline silicon rod furnace according to claim 3, characterized in that: The base device (1) comprises a counterweight base plate (101), a plurality of adjustment base plates (102) evenly distributed and fixedly connected to the counterweight base plate (101), and electrically adjustable feet (103) mounted on the adjustment base plate (102).

5. The robot for automatically dismantling a polycrystalline silicon rod furnace according to claim 4, characterized in that: The electrically adjustable support foot (103) comprises a screw lift (104) fixedly connected to the adjustment base plate (102), a joint rod (105), a first servo motor (106), and a base plate (109); the screw lift (104) comprises a housing (107) and a screw (108); the housing (107) is fixedly connected to the adjustment base plate (102); the upper end of the joint rod (105) is coaxially rotatably connected to the lower end of the screw (108); the lower end of the joint rod (105) is hinged to the base plate (109); and the output end of the first servo motor (106) is drivingly connected to the input end of the screw lift (104).

6. The robot for automatically dismantling a polycrystalline silicon rod furnace according to claim 3, characterized in that: The manipulator (2) comprises a column (201) fixedly connected to a base device (1), a swing arm (202) mounted at the upper end of the column (201) for rotation along a vertical axis, a second servo motor (203) for driving the swing arm (202) to rotate, a rotating seat (204) mounted at the end of the swing arm (202) for rotation along a vertical axis, a third servo motor (205) for driving the rotating seat (204) to rotate, a main lifting arm (206) mounted on the rotating seat (204) for rotation along a horizontal axis, a fourth servo motor (207) for driving the main lifting arm (206) to rotate, a swing seat (208) rotatably connected to the end of the main lifting arm (206), a fixed arm (209) fixedly connected to the rotating seat (204), and a secondary lifting arm (210) having two ends respectively hinged to the fixed arm (209) and the swing seat (208). ), an auxiliary cylinder (211) for driving the auxiliary lifting arm (210) to rotate, a suspension rod (214) installed on a swing seat (208) and extending downwardly and rotating along a vertical axis, a fifth servo motor (215) for driving the suspension rod (214) to rotate, a connecting seat (216) installed at the lower end of the suspension rod (214) and rotating along a horizontal axis, a sixth servo motor (217) for driving the connecting seat (216) to rotate, and a counterweight mechanism (218) for providing auxiliary torque to the sixth servo motor (217); the connecting seat (216) is fixedly connected to the clamp fixing frame (301); the auxiliary cylinder (211) includes a cylinder body (212) and a piston rod (213); the cylinder body (212) is hinged to the fixed arm (209), and the piston rod (213) is hinged to the auxiliary lifting arm (210).

7. The robot for automatically dismantling a polycrystalline silicon rod furnace according to claim 6, characterized in that: The counterweight mechanism (218) comprises an upper connecting frame (219) fixedly connected to the suspension rod (214), a lower connecting frame (220) fixedly connected to the connecting seat (216), and a counterweight cylinder (221); the counterweight cylinder (221) comprises a counterweight cylinder body (222) and a counterweight piston rod (223); the counterweight cylinder body (222) is hinged to the upper connecting frame (219), and the counterweight piston rod (223) is hinged to the lower connecting frame (220).

8. The robot for automatically dismantling a polycrystalline silicon rod furnace according to claim 6, characterized in that: A counterweight assembly (224) is provided at one end of the swing arm (202) relative to the rotating seat (204), and the counterweight assembly (224) comprises a counterweight frame (225) fixedly connected to the swing arm (202) and a plurality of counterweight blocks (226) detachably mounted on the counterweight frame (225).

9. The robot for automatically dismantling a polycrystalline silicon rod furnace according to claim 6, characterized in that: It also includes a camera calibration component (6), which includes a fixing bracket (601) arranged at the bottom of the column (201), a light source component (602) and a calibration camera (603) installed on the fixing bracket (601), and a target fixing plate (604) installed on the floor of the workshop when in use and used in conjunction with the calibration camera (603).

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