Metal Mask Processing Equipment and Processing Method

Abstract

The present invention relates to the technical field of metal mask processing, and particularly relates to a metal mask processing equipment and a processing method, which include a base, a platform installed on the base, brackets installed on the platform and arranged at the left and right ends of the platform, and a laser system arranged above the platform. A waste material groove is opened in the middle of the base, and a waste material opening corresponding to the waste material groove is opened in the middle of the platform. The invention further includes a supporting mechanism, a fixing and flattening mechanism, and a three-dimensional motion mechanism installed on the platform, and a material taking mechanism installed on the brackets, which are used for loading and unloading products; the fixing and flattening mechanism is arranged on the left and right sides of the waste material opening and is used for fixing and flattening products; the supporting mechanism is arranged below the fixing and flattening mechanism and is used for supporting the area to be cut of the product; the three-dimensional motion mechanism is arranged above the fixing and flattening mechanism and is used for driving the three-dimensional motion of the laser system; the structure of the present invention is simply designed, with high efficiency and high qualified product rate, and can effectively remove waste materials.

Description

Technical Field

[0001] The present invention relates to the technical field of metal mask processing, and particularly relates to a metal mask processing equipment and a processing method. Background Art

[0002] Open Mask (abbreviation: OM) is a CMM mask used in the manufacture of OLED displays, mainly used to control the deposition at specific positions during the evaporation process. It belongs to an open mask, that is, there is no blocked part within the range where the display screen is activated. Open Mask is usually used for depositing on the entire surface of the display screen and is used when depositing a light-emitting layer with a certain color of light-emitting material or depositing to the EIL (injection layer) and HTL (hole transport layer).

[0003] The existing Open Mask processing technology is mainly etching processing, with low efficiency and low yield. Currently, laser cutting devices are also used to process CMM masks. When designing the pattern of the CMM mask, there are often closely arranged blank spaces the size of the display screen (such as Figure 1 ). Since the CMM mask itself is relatively thin and the pattern is closely arranged, the connecting material is very narrow. During the laser cutting process, affected by the gravity of the waste material the size of the display screen, the waste material will pull the connecting material, easily causing it to deform or be damaged, and then resulting in an uneven laser cut, not meeting the product requirements of the CMM mask, and the yield is not high. In addition, the existing laser cutting device cannot effectively remove the waste material after cutting, affecting the cutting quality of the product. Summary of the Invention

[0004] The technical problem to be solved by the present invention is: to overcome the deficiencies in the prior art and provide a metal mask processing equipment and a processing method with a simple structure design, high efficiency and yield, and effective waste material removal.

[0005] The technical solution adopted by the present invention to solve its technical problems is: a metal mask processing equipment, including a base, a platform installed on the base, brackets installed on the platform and arranged at the left and right ends of the platform, and a laser system arranged above the platform. A waste material groove is opened in the middle of the base, and a waste material port corresponding to the waste material groove is opened in the middle of the platform. It further includes:

[0006] A supporting mechanism, a fixing and flattening mechanism, and a three-dimensional motion mechanism, all installed on the platform;

[0007] And a material taking mechanism, installed on the bracket, for loading and unloading products;

[0008] The fixed flattening mechanism is arranged on the left and right sides of the waste port, and is used for fixing and flattening the product; the supporting mechanism is arranged below the fixed flattening mechanism, and is used for supporting the area to be cut of the product; the three-dimensional motion mechanism is arranged above the fixed flattening mechanism, and is used for driving the three-dimensional motion of the laser system.

[0009] Furthermore, the supporting mechanism includes a longitudinal movement module, a transverse movement plate, a lifting module, a lifting plate, a supporting frame, a supporting assembly, a lifting plate, a transverse movement drive assembly and a lifting drive assembly. The longitudinal movement module is installed on the platform and is arranged at the left and right ends of the platform. The left and right ends of the transverse movement plate are respectively connected to the upper slide plate of the longitudinal movement module. The lifting plate is transversely arranged above the transverse movement plate and is connected to the transverse movement plate through a number of lifting modules. The supporting frame is transversely installed on the lifting plate and is arranged at the front of the lifting plate. The supporting assembly is movably arranged in the supporting frame. The lifting plates are respectively transversely arranged at the front and rear sides of the supporting frame and are respectively slidably connected to the supporting frame. The transverse movement drive assembly is installed on the lifting plate to drive the supporting assembly to move transversely. The lifting drive assembly is installed on the lifting plate and is arranged at the rear of the lifting plate to drive the lifting plate to rise and fall.

[0010] Furthermore, the supporting assembly includes a supporting plate, a sliding shaft, a sleeve, a ball head, a support cover, a return spring and a magnet. A through hole is provided in the middle of the supporting plate, and shaft holes are respectively provided at the front and rear ends thereof. Avoidance grooves are relatively provided on the front and rear side walls of the through hole. The sliding shaft passes through the shaft hole and is clearance-matched with the shaft hole. The sleeve is slidably sleeved on the sliding shaft and installed at the end of the shaft hole close to the avoidance groove. The end of the sliding shaft away from the through hole is connected to the ball head, and the end close to the through hole is connected to the support cover. The ball head is arranged in a groove provided in the support frame. The return spring is sleeved on the sliding shaft, one end of the return spring is in contact with the sleeve, and the other end is in contact with the ball head. The magnet is installed at the bottom end of the supporting plate.

[0011] Furthermore, the cross-section of the groove is in the shape of a Chinese character "匚", and the upper side walls of the two grooves form an "八" shape.

[0012] Furthermore, the transverse movement driving assembly includes a connecting plate and a linear motor, the connecting plates are respectively arranged on the front and rear sides of the supporting plate, one end of the connecting plate is slidably connected to the outer side of the lifting plate, and the other end thereof extends into the supporting frame and is connected to the bottom end of the supporting plate, the linear motor is laterally installed on the outer side of one of the lifting plates, and its driving end is connected to the connecting plate on the lifting plate; the lifting driving assembly includes a rotating shaft, a cam, a convex plate, a gap spring, a driving motor and a synchronization group, the rotating shaft is rotatably installed on the left and right ends of the supporting frame, the cams are respectively arranged on the front and rear sides of the supporting frame, and are sleeved on the two ends of the rotating shaft, the convex plates are respectively installed on the bottom of the left and right ends of the lifting plate, and are in contact with the cam, the gap springs are respectively arranged on the left and right sides of the lifting plate, one end of the gap spring is connected to the supporting frame, and the other end thereof is connected to the lifting plate, the driving motor is installed on the lifting plate, and its output end is respectively connected to the rear ends of the two rotating shafts through the synchronization group.

[0013] Furthermore, the fixed flattening mechanism includes a base frame, a fixed assembly and a flattening assembly, the base frame is installed on the platform and is arranged on the left and right sides of the waste port, and the fixed assembly and the flattening assembly are respectively longitudinally installed on the top ends of the two base frames; the fixed assembly includes a fixed base plate, a fixed clamping plate and a fixed cylinder, the fixed base plate is longitudinally installed on the top end of the base frame, the fixed cylinder is vertically installed on the fixed base plate, the fixed clamping plate is installed on the driving end of the fixed cylinder and corresponds to the fixed base plate; the flattening assembly includes a flattening base plate, a flattening module group, a flattening clamping plate and a flattening cylinder, the flattening base plate is longitudinally arranged above the base frame and is slidably connected to the base frame, the flattening module group is transversely installed in the middle of the top end of the base frame, and its upper slide plate is connected to the middle of the bottom end of the flattening base plate, the flattening cylinder is vertically installed on the flattening base plate, the flattening clamping plate is installed on the driving end of the flattening base plate and corresponds to the flattening base plate.

[0014] Furthermore, the material picking mechanism includes a feed shaft, a crossbeam, a numerical motion shaft, a suction cup and an ion air gun, the feed shaft is longitudinally installed at the top of the bracket, the left and right ends of the crossbeam are respectively connected to the driving end of the feed shaft, the numerical motion shaft is vertically installed in the middle of the crossbeam, the suction cup is installed at the bottom end of the numerical motion shaft, and the ion air gun is distributed in the suction cup.

[0015] Furthermore, a guide plate is installed in the waste opening, the bottom end of the guide plate extends into the waste trough, and an air suction port is provided on the guide plate.

[0016] Furthermore, the laser system includes a laser head, a visual camera and a height adjuster. The laser head and the visual camera are arranged in parallel, and the height adjuster is arranged above the visual camera.

[0017] A metal mask processing method comprises the following steps:

[0018] S1. Material taking: The material taking mechanism adsorbs the product on the feeding trolley and transports it to the fixed flattening mechanism for fixation and flattening.

[0019] S2. Laser cutting: The three-dimensional motion mechanism drives the laser system to move above the area to be cut of the product. At the same time, the supporting component in the supporting mechanism moves below the area to be cut of the product and rises to support the area to be cut of the product. Then, the laser system performs laser cutting on the area to be cut.

[0020] S3. Scrap collection: The supporting component in the supporting mechanism descends, and the scrap falls into the scrap chute through the scrap outlet.

[0021] The beneficial effects of the present invention are as follows:

[0022] (1) The present invention fixes and flattens the product through the fixed flattening mechanism to ensure the flatness of the product. Then, in combination with the supporting mechanism to support the area to be cut of the product, it maintains the flatness of the cutting area and supports the internal scrap, thereby avoiding poor cutting of the interface due to the influence of the gravity of the scrap and the suction force below when the cutting trajectory is closed, and thus improving the processing efficiency and the product qualification rate.

[0023] (2) Through the setting of the scrap outlet and the scrap chute, during the reset process of the supporting mechanism, the scrap automatically falls into the scrap chute through the scrap outlet, ensuring the timely and effective removal of the cut scrap, avoiding the influence of the scrap on subsequent cutting, and ensuring the cutting quality of the product. Brief description of the drawings

[0024] The present invention will be further described below with reference to the drawings and embodiments.

[0025] Figure 1 is a schematic diagram of the product in the present invention;

[0026] Figure 2 is a schematic diagram of the structure of the equipment in the present invention;

[0027] Figure 3 is a schematic diagram of the equipment in the present invention excluding the protective cover;

[0028] Figure 4 is a schematic diagram of the scrap chute in the present invention;

[0029] Figure 5 is a schematic diagram of the guide plate in the present invention;

[0030] Figure 6 is a schematic diagram of the supporting mechanism in the present invention;

[0031] Figure 7 is a schematic diagram of the lifting drive assembly in the present invention;

[0032] Figure 8Yes Figure 7 An enlarged view of part A in it;

[0033] Figure 9 A schematic diagram of the supporting component in the present invention;

[0034] Figure 10 A schematic diagram of the magnet in the present invention;

[0035] Figure 11 A partial cross-sectional view of the supporting plate in the present invention;

[0036] Figure 12 A schematic diagram of the fixing component in the present invention;

[0037] Figure 13 A schematic diagram of the flattening component in the present invention;

[0038] Figure 14 A schematic diagram of the three-dimensional motion mechanism in the present invention;

[0039] Figure 15 A schematic diagram of the material taking mechanism in the present invention;

[0040] Figure 16 A distribution diagram of the ion air gun in the present invention.

[0041] In the figure: 100, base; 110, waste chute; 200, platform; 210, waste outlet; 300, bracket; 400, laser system; 410, laser head; 420, vision camera; 430, height adjuster; 500, supporting mechanism; 510, longitudinal movement module; 520, transverse movement plate; 530, lifting module; 540, lifting plate; 550, support frame; 551, groove; 560, supporting component; 561, supporting plate; 5611, through hole; 5612, shaft hole; 5613, avoidance groove; 562, sliding shaft; 563, bushing; 564, ball head; 565, support cover; 566, return spring; 567, magnet; 570, lifting plate; 580, transverse movement drive component; 581, connecting plate; 582, linear motor; 590, lifting drive component; 591, rotating shaft; 592, cam; 593, convex plate; 594, clearance spring; 595, drive motor; 596, synchronous group; 600, fixed flattening mechanism; 610, chassis; 620, fixing component; 621, fixed bottom plate; 622, fixed clamping plate; 623, fixed cylinder; 630, flattening component; 631, flattening bottom plate; 632, flattening module; 633, flattening clamping plate; 634, flattening cylinder; 700, three-dimensional movement mechanism; 710, Y-direction module; 720, X-direction module; 730, Z-direction module; 800, material taking mechanism; 810, feed shaft; 820, cross beam; 830, numerical movement shaft; 840, suction cup; 850, ion air gun; 900, guide plate; 910, air suction port; 1000, protective cover; 1100, fan filter unit; 1200, dust collector; 1300, operation platform. Detailed implementation manners

[0042] Now, the present invention will be further described in conjunction with the accompanying drawings and preferred embodiments. These drawings are all simplified schematic diagrams, only illustrating the basic structure of the present invention in a schematic manner, so they only show the components related to the present invention.

[0043] Embodiment 1

[0044] As Figures 2 - 4As shown in the figure, a metal mask processing equipment includes a base 100, a platform 200 installed on the base 100, brackets 300 installed on the platform 200 and arranged at the left and right ends of the platform 200, and a laser system 400 arranged above the platform 200. A waste slot 110 is opened in the middle of the base 100, and a waste opening 210 corresponding to the waste slot 110 is opened in the middle of the platform 200. It also includes a supporting mechanism 500, a fixing and flattening mechanism 600, a three-dimensional motion mechanism 700 installed on the platform 200, and a material taking mechanism 800 installed on the brackets 300. The material taking mechanism 800 is used for loading and unloading products; the fixing and flattening mechanism 600 is arranged on the left and right sides of the waste opening 210 and is used for fixing and flattening products; the supporting mechanism 500 is arranged below the fixing and flattening mechanism 600 and is used for supporting the area to be cut of the product; the three-dimensional motion mechanism 700 is arranged above the fixing and flattening mechanism 600 and is used for driving the laser system 400 to move three-dimensionally. The product is fixed and flattened by the fixing and flattening mechanism 600 to ensure the flatness of the product. Then, combined with the supporting mechanism 500 to support the area to be cut of the product, the flatness of the cutting area is maintained and the internal waste is supported, thereby avoiding poor interface cutting caused by the gravity of the waste and the suction force below when the cutting trajectory is closed, thus improving the processing efficiency and the product qualification rate. Through the settings of the waste opening 210 and the waste slot 110, during the reset process of the supporting mechanism 500, the waste automatically falls into the waste slot 110 from the waste opening 210, ensuring the timely and effective removal of the waste after cutting, avoiding the influence of the waste on subsequent cutting, and ensuring the cutting quality of the product.

[0045] Specifically, as Figure 2 , Figure 4 and Figure 14 shown, the waste slot 110 is designed in the form of a drawer for convenient removal and cleaning of waste; the three-dimensional motion mechanism 700 includes a Y-direction module 710, an X-direction module 720, and a Z-direction module 730. The Y-direction module 710 is installed on the platform 200 and is respectively arranged outside the fixing and flattening mechanism 600. The X-direction module 720 is arranged horizontally, and its two ends are respectively connected to the upper slide plates of the Y-direction module 710. The Z-direction module 730 is vertically installed on the slide plate of the X-direction module 720, and the laser system 400 is installed on the slide plate of the Z-direction module 730. The Y-direction module 710, the X-direction module 720, and the Z-direction module 730 are all linear modules; the metal mask laser cutting equipment also includes a protective cover 1000, a fan filter unit 1100, a dust collector 1200, and an operation platform 1300. The protective cover 1000 protects the entire equipment. The fan filter unit 1100 is composed of several groups and is arrayed at the top of the protective cover 1000 to provide high-quality clean air for the equipment and ensure the cleanliness inside the equipment. The dust collector 1200 and the operation platform 1300 are arranged on one side of the protective cover 1000. The dust collector 1200 collects the dust generated during the laser cutting process, and the operation platform 1300 controls the entire equipment.

[0046] As Figures 3 - 7 shown, the supporting mechanism 500 includes a longitudinal movement module 510, a transverse movement plate 520, a lifting module 530, a lifting plate 540, a support frame 550, a supporting component 560, a lifting plate 570, a transverse movement driving component 580, and a lifting driving component 590. The longitudinal movement module 510 is installed on the platform 200 and is arranged at the left and right ends of the platform 200. The left and right ends of the transverse movement plate 520 are respectively connected to the upper slides of the longitudinal movement module 510. The lifting plate 540 is horizontally arranged above the transverse movement plate 520 and is connected to the transverse movement plate 520 through a plurality of lifting modules 530. The support frame 550 is horizontally installed on the lifting plate 540 and is arranged at the front part of the lifting plate 540. The supporting component 560 is movably arranged inside the support frame 550. The lifting plates 570 are respectively horizontally arranged on the front and rear sides of the support frame 550 and are respectively slidably connected to the support frame 550. The transverse movement driving component 580 is installed on the lifting plate 570 to drive the supporting component 560 to move transversely. The lifting driving component 590 is installed on the lifting plate 540 and is arranged at the rear part of the lifting plate 540 to drive the lifting plate 570 to lift. Before laser cutting, the longitudinal movement module 510 and the transverse movement driving component 580 cooperate to make the supporting component 560 come to directly below the area of the product to be cut. Then, the lifting module 530 lifts the lifting plate 540 until the support frame 550 contacts the product, forming a linear support area to prevent the influence of local cutting on the product. Then, the lifting driving component 590 drives the lifting plate 570 to rise, thereby synchronously driving the supporting component 560 to rise until the supporting component 560 contacts the area of the product to be cut, maintaining the flatness of the cutting area and supporting the internal waste. Finally, laser cutting is performed. Specifically, the longitudinal movement module 510 is a linear module; the lifting module 530 is a prior art.

[0047] As Figure 7 、 Figures 9 - 11As shown, the supporting assembly 560 includes a supporting plate 561, a sliding shaft 562, a shaft sleeve 563, a ball head 564, a support cover 565, a reset spring 566 and a magnet 567. A through hole 5611 is provided in the middle of the supporting plate 561, and shaft holes 5612 are provided at the front and rear ends thereof respectively. Avoidance grooves 5613 are provided on the front and rear side walls of the through hole 5611. The sliding shaft 562 passes through the shaft hole 5612 and is in clearance fit with the shaft hole 5612. The shaft sleeve 563 is slidably sleeved on the sliding shaft 562. The end of the sliding shaft 562 away from the through hole 5611 is connected to the ball head 564, and the end close to the through hole 5611 is connected to the support cover 565. The ball head 564 is arranged in the groove 551 provided in the support frame 550. The return spring 566 is sleeved on the sliding shaft 562. One end of the return spring 566 abuts against the shaft sleeve 563, and the other end abuts against the ball head 564. The magnet 567 is installed at the bottom end of the support plate 561. The arrangement of the magnet 567 enables the support plate 561 to be fixed on the connecting plate 581 and provides a weak magnetic force to adsorb the product. Specifically, the groove 551 extends horizontally, the cross section of the groove 551 is in the shape of a "匚" character, and the upper side walls of the two grooves 551 form an "八" character. During the process of the lifting plate 570 rising and then synchronously driving the supporting assembly 560 to rise, the ball head 564 moves upward along the upper side wall of the groove 551, and then pushes the sliding shaft 562 to slide in the direction of the through hole 5611, until the support cover 565 extends out of the avoidance groove 5613 and enters the through hole 5611, and the support cover 565 is supported under the waste material, and the cutting process begins. After the processing is completed, when the supporting assembly 560 moves downward, the ball head 564 moves downward along the upper side wall of the groove 551 and resets to the groove 551 under the action of the reset spring 566, and the support cover 565 completely enters the avoidance groove 5613, and the waste material loses the support of the support cover 565, and automatically falls into the waste groove 110 from the waste opening 210 under the action of gravity. It should be noted that in order to avoid the overcutting and ablation of the supporting assembly 560 by laser cutting, and to improve the accuracy of laser cutting in actual applications, the support cover 565 and / or the sliding shaft 562 are made of cutting-resistant materials and are replaced regularly.

[0048] like Figure 7As shown, the transverse driving assembly 580 includes a connecting plate 581 and a linear motor 582. The connecting plates 581 are respectively arranged on the front and rear sides of the supporting plate 561. One end of the connecting plate 581 is slidably connected to the outer side of the lifting plate 570, and the other end thereof extends into the support frame 550 and is connected to the bottom end of the supporting plate 561. The linear motor 582 is transversely installed on the outer side of one of the lifting plates 570, and its driving end is connected to the connecting plate 581 on the lifting plate 570. The linear motor 582 drives the supporting assembly 560 to move transversely through the connecting plate 581 to support waste in different transverse areas. Specifically, the cross section of the connecting plate 581 is "U"-shaped; the connecting plate 581 is close to the end pin of the supporting plate 561, and the end of the supporting plate 561 is correspondingly provided with a pin hole for rapid positioning of the replacement supporting assembly 560.

[0049] like Figures 6 - 8 As shown, the lifting drive assembly 590 includes a rotating shaft 591, a cam 592, a convex plate 593, a gap spring 594, a driving motor 595 and a synchronization group 596. The rotating shaft 591 is rotatably mounted on the left and right ends of the supporting frame 550, the cams 592 are respectively arranged on the front and rear sides of the supporting frame 550 and are sleeved on the two ends of the rotating shaft 591, the convex plates 593 are respectively installed at the bottom of the left and right ends of the lifting plate 570 and abut against the cams 592, the gap springs 594 are respectively arranged on the left and right sides of the lifting plate 570, one end of the gap spring 594 is connected to the supporting frame 550, and the other end thereof is connected to the lifting plate 570, the driving motor 595 is installed on the lifting plate 540, and its output end is respectively connected to the rear ends of the two rotating shafts 591 through the synchronization group 596. The setting of the gap spring 594 makes the convex plate 593 always press against the surface of the cam 592 to eliminate the movement gap. The driving motor 595 drives the two rotating shafts 591 to rotate synchronously through the synchronization group 596, thereby synchronously driving the cam 592 to rotate, driving the convex plate 593 to rise and fall, thereby driving the lifting plate 570 to rise and fall. Specifically, the synchronization group 596 is a prior art.

[0050] like Figure 4 , Figure 5 , Figure 12 and Figure 13As shown in the figure, the fixed flattening mechanism 600 includes a chassis 610, a fixing component 620 and a flattening component 630. The chassis 610 is longitudinally installed on the platform 200 and is arranged on the left and right sides of the waste outlet 210. The fixing component 620 and the flattening component 630 are respectively longitudinally installed at the top of the two chassis 610. The fixing component 620 includes a fixing bottom plate 621, a fixing clamping plate 622 and a fixing cylinder 623. The fixing bottom plate 621 is longitudinally installed at the top of the chassis 610. The fixing cylinder 623 is vertically installed on the fixing bottom plate 621. The fixing clamping plate 622 is installed at the driving end of the fixing cylinder 623 and corresponds to the fixing bottom plate 621. The flattening component 630 includes a flattening bottom plate 631, a flattening module 632, a flattening clamping plate 633 and a flattening cylinder 634. The flattening bottom plate 631 is longitudinally arranged above the chassis 610 and is slidably connected to the chassis 610. The flattening module 632 is horizontally installed in the middle of the top of the chassis 610, and its upper slide plate is connected to the middle of the bottom end of the flattening bottom plate 631. The flattening cylinder 634 is vertically installed on the flattening bottom plate 631. The flattening clamping plate 633 is installed at the driving end of the flattening bottom plate 631 and corresponds to the flattening bottom plate 631. The material taking mechanism 800 places the product on the fixing bottom plate 621 and the flattening bottom plate 631. Then, the fixing cylinder 623 drives the fixing clamping plate 622 to press the product, and the flattening cylinder 634 drives the flattening clamping plate 633 to press the product to fix the product. Finally, the flattening module 632 drives the flattening bottom plate 631 to move away from the fixing bottom plate 621 to flatten the product. Specifically, both the fixing cylinder 623 and the flattening cylinder 634 are lever cylinders; the flattening module 632 is a linear module.

[0051] As Figure 4 , Figure 15 and Figure 16 shown in the figure, the material taking mechanism 800 includes a feed shaft 810, a cross beam 820, a numerical motion shaft 830, a suction cup 840 and an ion air gun 850. The feed shaft 810 is respectively longitudinally installed at the top of the bracket 300. The left and right ends of the cross beam 820 are respectively connected to the driving ends of the feed shaft 810. The numerical motion shaft 830 is vertically installed in the middle of the cross beam 820. The suction cup 840 is installed at the bottom end of the numerical motion shaft 830. The ion air guns 850 are distributed in the suction cup 840. The suction cup 840 uses static electricity to adsorb the product for the material taking action, and the ion air gun 850 removes the residual static electricity. Specifically, both the feed shaft 810 and the numerical motion shaft 830 belong to the prior art.

[0052] As Figure 5As shown, a guiding plate 900 is installed in the waste outlet 210. The bottom end of the guiding plate 900 extends into the waste chute 110, and an air suction port 910 is formed on the guiding plate 900. The guiding plate 900 guides the waste into the waste chute 110, and the air suction port 910 keeps a high-flow negative pressure area below the cutting area, ensuring that cutting sparks and dust do not splash upward, improving the cutting quality of the product, and adsorbing the waste into the waste chute 110.

[0053] As Figure 4 and Figure 14 shown, the laser system 400 includes a laser head 410, a vision camera 420, and a height adjuster 430. The laser head 410 and the vision camera 420 are arranged in parallel, and the height adjuster 430 is arranged above the vision camera 420. Since the product size is relatively large, it is impossible to ensure the flatness consistency of the product plane. By detecting the product height in real time through the height adjuster 430, the laser processing quality is better.

[0054] During operation, the suction cup 840 on the material taking mechanism 800 adsorbs the product on the feeding trolley and transports it to the fixed flattening mechanism 600 for fixing and flattening; the three-dimensional motion mechanism 700 drives the laser system 400 to move above the product area to be cut, and the supporting component 560 in the supporting mechanism 500 moves below the product area to be cut. The supporting component 560 rises until the supporting cover 565 contacts the waste to form a support, and the laser head 410 in the laser system 400 performs laser cutting; after the cutting in this area is completed, the supporting component 560 descends, the supporting cover 565 no longer supports the waste, and the waste falls into the waste chute 110; the supporting component 560 moves below the next product area to be cut, and the above actions are repeated until the laser cutting of all areas to be cut on the product is completed; finally, the suction cup 840 on the material taking mechanism 800 adsorbs the product for discharging.

[0055] Embodiment 2

[0056] A method for processing a metal mask plate includes the following steps:

[0057] S1. Material taking: The material taking mechanism 800 adsorbs the product on the feeding trolley and transports it to the fixed flattening mechanism 600 for fixing and flattening;

[0058] S2. Laser cutting: The three-dimensional motion mechanism 700 drives the laser system 400 to move above the product area to be cut. At the same time, the supporting component 560 in the supporting mechanism 500 moves below the product area to be cut and rises to support the product area to be cut, and then the laser system 400 performs laser cutting on the area to be cut;

[0059] S3. Waste collection: The supporting component 560 in the supporting mechanism 500 descends, and the waste falls into the waste chute 110 from the waste outlet 210.

[0060] The above embodiments are only used to illustrate the technical concept and features of the present invention, and the purpose is to enable those skilled in the art to understand the content of the present invention and implement it. However, it cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit and essence of the present invention should be covered within the protection scope of the present invention.

Claims

1. A metal mask processing equipment, comprising a base (100), a platform (200) mounted on the base (100), a bracket (300) mounted on the platform (200) and arranged at the left and right ends of the platform (200), and a laser system (400) arranged above the platform (200), wherein a waste groove (110) is provided in the middle of the base (100), and a waste opening (210) corresponding to the waste groove (110) is provided in the middle of the platform (200), characterized in that: Also includes: The supporting mechanism (500), the fixed flattening mechanism (600), and the three-dimensional motion mechanism (700) are all installed on the platform (200); and a material taking mechanism (800), mounted on the bracket (300) and used for loading and unloading products; The fixed flattening mechanism (600) is arranged on the left and right sides of the waste opening (210) and is used for fixing and flattening the product; the supporting mechanism (500) is arranged below the fixed flattening mechanism (600) and is used for supporting the area of ​​the product to be cut; the three-dimensional motion mechanism (700) is arranged above the fixed flattening mechanism (600) and is used for driving the laser system (400) to move three-dimensionally; The supporting mechanism (500) comprises a longitudinal movement module (510), a transverse movement plate (520), a lifting module (530), a lifting plate (540), a support frame (550), a supporting assembly (560), a lifting plate (570), a transverse movement drive assembly (580) and a lifting drive assembly (590). The longitudinal movement module (510) is installed on the platform (200) and is arranged at the left and right ends of the platform (200). The left and right ends of the transverse movement plate (520) are respectively connected to the upper slide plate of the longitudinal movement module (510). The lifting plate (540) is arranged horizontally above the transverse movement plate (520) and is connected to the transverse movement plate (520) through a plurality of lifting modules (530). 20), the support frame (550) is laterally mounted on the lifting plate (540) and is arranged at the front of the lifting plate (540), the support assembly (560) is movably arranged in the support frame (550), the lifting plate (570) is laterally arranged at the front and rear sides of the support frame (550), and is respectively slidably connected to the support frame (550), the transverse driving assembly (580) is mounted on the lifting plate (570) to drive the support assembly (560) to move laterally, and the lifting driving assembly (590) is mounted on the lifting plate (540) and is arranged at the rear of the lifting plate (540) to drive the lifting plate (570) to move up and down; The supporting assembly (560) comprises a supporting plate (561), a sliding shaft (562), a shaft sleeve (563), a ball head (564), a support cover (565), a return spring (566) and a magnet (567); a through hole (5611) is provided in the middle of the supporting plate (561), and shaft holes (5612) are provided at the front and rear ends thereof respectively; front and rear side walls of the through hole (5611) are provided with avoidance grooves (5613) opposite to each other; the sliding shaft (562) passes through the shaft hole (5612) and is clearance-matched with the shaft hole (5612); the shaft sleeve (563) is slidably sleeved on the sliding shaft (562), and The end of the sliding shaft (562) which is away from the through hole (5611) is connected to the ball head (564), and the end of the sliding shaft (562) which is close to the through hole (5611) is connected to the support cover (565). The ball head (564) is arranged in a groove (551) provided in the support frame (550). The return spring (566) is sleeved on the sliding shaft (562). One end of the return spring (566) contacts the shaft sleeve (563), and the other end contacts the ball head (564). The magnet (567) is installed at the bottom end of the support plate (561). The transverse movement driving assembly (580) comprises a connecting plate (581) and a linear motor (582), wherein the connecting plates (581) are respectively arranged on the front and rear sides of the supporting plate (561), one end of the connecting plate (581) is slidably connected to the outer side of the lifting plate (570), and the other end thereof extends into the supporting frame (550) and is connected to the bottom end of the supporting plate (561), and the linear motor (582) is transversely installed on the outer side of one of the lifting plates (570), and the driving end thereof is connected to the connecting plate (581) on the lifting plate (570); the lifting driving assembly (590) comprises a rotating shaft (591), a cam (592), a convex plate (593), a gap spring (594), a driving motor (595) and a synchronization group (596). 6), the rotating shaft (591) is rotatably mounted on the left and right ends of the supporting frame (550), the cams (592) are respectively arranged on the front and rear sides of the supporting frame (550) and are sleeved on the two ends of the rotating shaft (591), the convex plates (593) are respectively installed at the bottoms of the left and right ends of the lifting plate (570) and are in contact with the cams (592), the gap springs (594) are respectively arranged on the left and right sides of the lifting plate (570), one end of the gap spring (594) is connected to the supporting frame (550), and the other end thereof is connected to the lifting plate (570), the driving motor (595) is installed on the lifting plate (540), and the output end thereof is respectively connected to the rear ends of the two rotating shafts (591) through the synchronization group (596); The fixed flattening mechanism (600) includes a chassis (610), a fixing component (620), and a flattening component (630). The chassis (610) is installed on the platform (200) and is disposed on the left and right sides of the waste outlet (210). The fixing component (620) and the flattening component (630) are longitudinally installed at the top ends of the two chassis (610) respectively. The fixing component (620) includes a fixing bottom plate (621), a fixing clamping plate (622), and a fixing cylinder (623). The fixing bottom plate (621) is longitudinally installed at the top end of the chassis (610). The fixing cylinder (623) is vertically installed on the fixing bottom plate (621). The fixing clamping plate (622) is installed at the driving end of the fixing cylinder (623) and corresponds to the fixing bottom plate (621). The flattening component (630) includes a flattening bottom plate (631), a flattening module (632), a flattening clamping plate (633), and a flattening cylinder (634). The flattening bottom plate (631) is longitudinally disposed above the chassis (610) and is slidably connected to the chassis (610). The flattening module (632) is horizontally installed in the middle of the top end of the chassis (610), and its upper slide plate is connected to the middle of the bottom end of the flattening bottom plate (631). The flattening cylinder (634) is vertically installed on the flattening bottom plate (631). The flattening clamping plate (633) is installed at the driving end of the flattening bottom plate (631) and corresponds to the flattening bottom plate (631). The material taking mechanism (800) includes a feed shaft (810), a cross beam (820), a numerical motion shaft (830), a suction cup (840), and an ion air gun (850). The feed shafts (810) are longitudinally installed at the top ends of the brackets (300) respectively. The left and right ends of the cross beam (820) are respectively connected to the driving ends of the feed shafts (810). The numerical motion shaft (830) is vertically installed in the middle of the cross beam (820). The suction cup (840) is installed at the bottom end of the numerical motion shaft (830). The ion air guns (850) are distributed inside the suction cup (840).

2. The metal mask processing equipment according to claim 1, characterized in that: The cross section of the groove (551) is in a "C" shape, and the upper side walls of the two grooves (551) form an "eight" shape.

3. The metal mask processing equipment according to claim 1, characterized in that: A guiding plate (900) is installed inside the waste outlet (210). The bottom end of the guiding plate (900) extends into the waste chute (110). An air suction port (910) is formed on the guiding plate (900).

4. The metal mask processing equipment according to claim 1, characterized in that: The laser system (400) includes a laser head (410), a vision camera (420), and a height adjuster (430). The laser head (410) and the vision camera (420) are arranged side by side. The height adjuster (430) is disposed above the vision camera (420).

5. A processing method based on the metal mask processing equipment according to any one of claims 1 to 4, characterized in that: It includes the following steps: S1. Material taking: The material taking mechanism (800) adsorbs the products on the feeding trolley and transports them to the fixed flattening mechanism (600) for fixing and flattening. S2. Laser cutting: the three-dimensional motion mechanism (700) drives the laser system (400) to move above the area to be cut of the product, and at the same time the supporting assembly (560) in the supporting mechanism (500) moves below the area to be cut of the product and rises to support the area to be cut of the product, and then the laser system (400) performs laser cutting on the area to be cut; S3. Waste collection: the supporting assembly (560) in the supporting mechanism (500) descends, and the waste falls into the waste trough (110) through the waste opening (210).

Images