A high-purity large-size alumina ceramic substrate grinding machine and process

Abstract

The invention relates to the technical field of ceramic substrate grinders, and discloses a high-purity large-size alumina ceramic substrate grinder and a process, wherein the grinder comprises: a grinding table; an assembly box, on which a rotating shaft is rotatably mounted, the bottom of the rotating shaft is coaxially fixedly connected with a grinding head, and a positioning disk for positioning the substrate is clamped at the bottom of the grinding head; and an arc box; when the rotating shaft rotates, the arc box is driven by a transmission component to rotate in the same direction to one side of the substrate, and then a plurality of nozzles drip grinding liquid in an arc shape along the edge of the grinding head. When the grinding disc rotates, the grinding liquid dripped in an arc shape under the action of centrifugal force will diffuse along the arc to form an arc area, and the diffusion direction is toward the center of the arc, so that the grinding liquid will not converge and overlap when flowing, and the grinding liquid can diffuse in a surface shape, which greatly increases the area of ​​the grinding liquid flow area, so as to increase the area of ​​the ceramic substrate and the area in contact with the grinding liquid, and realize that a small amount of grinding liquid can fully infiltrate the ceramic substrate.

Description

Technical Field

[0001] The invention relates to the technical field of ceramic substrate grinders, and in particular to a high-purity large-size alumina ceramic substrate grinder and a process. Background Art

[0002] Alumina is the most commonly used substrate material for thick-film and thin-film hybrid integrated circuits due to its high insulation, high thermal conductivity, high strength, stable dielectric constant, extremely low dielectric loss, thermal expansion coefficient close to that of semiconductor chips, and smooth surface.

[0003] For the production of high-purity large-size (6-inch) alumina ceramic substrates, a grinder is required to grind the substrate. The grinder is usually equipped with a variety of grinding discs or polishing discs of different materials and particle sizes to meet different materials and processing requirements. It uses high-speed rotating grinding discs or polishing discs to use friction to grind the raised parts of the workpiece surface flat. The applicant has retrieved some prior art to achieve grinding of workpieces by grinding discs. For example, the patent publication number is CN113770912A. Its main technical means is to drive the carrier to rotate through a rotating structure, drive the workpiece to rotate, thereby destroying the inherent grinding trajectory, making the grinding disc grind the workpiece more uniformly, and preventing the grinding position from being unchanged, resulting in different degrees of grinding of the workpiece and affecting the flatness of the workpiece grinding surface. After analysis by the applicant, the disadvantage of this technical solution is that grinding fluid needs to be dripped during grinding, but the grinding fluid drops dripped at the axis of the grinding disc will be in an arc after the grinding disc starts to rotate at high speed. The arc-shaped grinding liquid flows in the substrate rotating in the opposite direction to the grinding wheel, and only the half area close to the grinding nozzle can contact the arc-shaped grinding liquid. The large-sized alumina ceramic substrate cannot fully contact the grinding liquid. If the area of ​​the substrate contacting the grinding liquid needs to be increased, the amount of grinding liquid dripping needs to be greatly increased, resulting in a large loss of grinding liquid, which increases the production cost of the alumina ceramic substrate, and the grinding liquid spraying time increases, and the production efficiency of the alumina ceramic substrate decreases. Based on this, the present invention provides a simple and ingenious structure, which can expand the grinding liquid flow area in a surface shape and increase the area of ​​the ceramic substrate contacting the grinding liquid. Summary of the invention

[0004] The purpose of the present invention is to address the shortcomings of the prior art and provide a high-purity large-size alumina ceramic substrate grinding machine and process to solve the technical problem that the grinding liquid flows in an arc on the high-speed rotating grinding wheel and can only contact the half area of ​​the ceramic substrate close to the grinding nozzle.

[0005] The purpose of the present invention can be achieved through the following technical solutions:

[0006] A high-purity large-size alumina ceramic substrate grinding machine, comprising:

[0007] A grinding table, in which a grinding chamber for positioning a grinding disc is provided, and the grinding disc is driven to rotate by a driving source;

[0008] An assembly box is fixed on the grinding table and connected to the control component. A rotating shaft is rotatably mounted on the assembly box. The bottom of the rotating shaft is coaxially fixedly connected to the grinding head, and a positioning plate for positioning the substrate is clamped at the bottom of the grinding head. The control component drives the rotating shaft to rotate, and its rotation direction is opposite to that of the grinding plate; and

[0009] An arc box is connected to the grinding liquid box, and its arc is arranged concentrically with the rotating shaft. The grinding liquid box is slidably installed on the box body, and the box body is fixedly installed on the assembly box. The arc box is fixed to the bottom of the grinding liquid box. A plurality of equidistantly arranged nozzles are connected to the bottom of the arc box, and the nozzles face the contact surface between the substrate and the grinding disc. When the rotating shaft rotates, it drives the arc box to rotate in the same direction to one side of the substrate through the transmission assembly, and then the arc box remains stationary.

[0010] As a further solution of the present invention: a plurality of partitions are fixed in the arc box, and there is a gap between the top of the partition and the top plate of the arc box, the top plate of the arc box is provided with a through opening connected to the grinding liquid tank, and the arc box is divided into a plurality of cavities by the plurality of partitions, and the plurality of cavities are connected to a plurality of nozzles and correspond one to one.

[0011] As a further solution of the present invention: the transmission assembly comprises:

[0012] A driving gear is coaxially fixedly mounted on the rotating shaft;

[0013] A connecting block, the top of which is fixedly connected to the grinding liquid box, and the bottom of which is rotatably mounted with a shaft body, the shaft body is coaxially fixedly connected to the driven gear, and the driven gear is meshed with the driving gear, and the two ends of the connecting block are respectively connected to the inner wall of the box through two elastic expansion members; and

[0014] The slide rail is fixed on the assembly box and slides with the slide groove that runs through the shaft body; when the shaft body is located at both ends of its moving path, the slide groove is separated from the slide rail, and the two ends of the shaft body moving path are symmetrically arranged on both sides of the positioning plate.

[0015] As a further solution of the present invention: the number of the rotating shafts is multiple, and the multiple rotating shafts are arranged in a circle; when the elastic telescopic part is in a free state, the centers of the driving gear, the driven gear and the grinding disc are arranged in a colinear manner, and the slide rail is located in the slide groove; when the shaft body is located at both ends of its moving path, the rotating shaft drives the driving gear to continue rotating, and drives the driven gear to rotate, then the shaft body rotates on the connecting block, and the slide groove cannot be aligned with the slide rail.

[0016] As a further solution of the present invention: when the control assembly drives the rotating shaft to stop rotating, the driven gear rotates until the slide groove is aligned with the slide rail.

[0017] As a further solution of the present invention: the slide rail is fixed to the assembly box through a connecting rod, and the shaft body is provided with a groove that slides with the connecting rod; when the slide rail is aligned with the slide groove and the shaft body slides to the connecting rod, the connecting rod is aligned with the groove and the two then slide relative to each other.

[0018] A high-purity large-size alumina ceramic substrate grinding process, the process uses the high-purity large-size alumina ceramic substrate grinding machine as described above, the process comprises the following steps:

[0019] Step S1: adjusting the clamping assembly on the positioning plate to mount the substrate on the positioning plate, and then clamping the positioning plate with the substrate mounted thereon to the grinding head;

[0020] Step S2: adjusting the parameters of the control component so that the control component controls the grinding head to descend until the substrate contacts the grinding disc;

[0021] Step S3: the control component controls the driving source to drive the grinding disc to rotate, and at the same time, the control component drives the rotating shaft to rotate, so as to drive the grinding head to rotate, and the rotation direction of the grinding head is opposite to the rotation direction of the grinding disc; when the grinding head starts to rotate, the rotating shaft drives the arc box to rotate in the same direction to one side of the substrate through the transmission component until the arc box rotates to the end of its moving path, and the rotating shaft continues to rotate and drives the grinding head to continue to rotate, and at this time the arc box remains stationary in the box;

[0022] Step S4: the control component starts the spray head to spray the polishing liquid on the contact surface between the substrate and the grinding disc;

[0023] Step S5: After the grinding liquid falls onto the grinding disc, it spreads in a planar shape under the action of centrifugal force, and the edge of the liquid surface is arc-shaped, and the spreading direction of the grinding liquid is toward the center of the arc;

[0024] Step S6: When the polishing liquid contacts the substrate, the substrate first contacts the polishing liquid at the edge of the arc and rotates synchronously, and then each area on the substrate contacts all the polishing liquid inside the arc.

[0025] As a further solution of the present invention: the step S3 specifically comprises the following steps:

[0026] Step S31: the control component controls the driving source to drive the grinding disc to rotate, and at the same time, the control component drives the rotating shaft to rotate, so as to drive the grinding head to rotate, and the rotation direction of the grinding head is opposite to the rotation direction of the grinding disc; when the grinding head starts to rotate, the rotating shaft rotates synchronously, and drives the driving gear to rotate synchronously. Since the slide rail is located in the slide groove, the shaft body cannot rotate by itself, and the driving gear rotates to drive the driven gear and the shaft body to rotate with the axis of the rotating shaft as the center axis until the shaft body rotates to the end of its moving path;

[0027] Step S32: The rotating shaft drives the driving gear and the grinding head to continue rotating, and drives the driven gear to rotate, so that the shaft body rotates on the connecting block. At this time, the slide groove cannot be aligned with the slide rail, and the connecting block remains stationary here, that is, the grinding liquid box and the arc box remain stationary.

[0028] Beneficial effects of the present invention:

[0029] (1) In the present invention, when the shaft rotates, the transmission assembly drives the arc box to rotate in the same direction to one side of the substrate, and then a plurality of nozzles drip the grinding liquid in an arc shape along the edge of the grinding head. When the grinding disc rotates, the grinding liquid dripped in the arc shape will diffuse into an arc-shaped area under the action of centrifugal force, and the diffusion direction is toward the center of the arc shape, so that the grinding liquid will not converge and overlap when flowing, and the grinding liquid can diffuse in a surface shape, which greatly increases the area of ​​the grinding liquid flow area, thereby increasing the area of ​​the ceramic substrate and the area in contact with the grinding liquid, and achieving that a small amount of grinding liquid can fully infiltrate the ceramic substrate;

[0030] (2) In the present invention, the polishing liquid in the polishing liquid box first enters the arc box after being discharged, and the gap between the top of the partition plate and the top plate of the arc box can make the multiple cavities connected, so that the multiple cavities can be evenly filled with polishing liquid, thereby ensuring that the polishing liquid sprayed by the multiple nozzles each time is equal, and the polishing liquid in the arc area that is subsequently diffused is more uniform, thereby improving the uniformity of contact between the ceramic substrate and the polishing liquid;

[0031] (3) In the present invention, when the control component drives the rotating shaft to stop rotating, the driven gear rotates until the slide groove is aligned with the slide rail, and then stops rotating. The elastic expansion member restores the deformation force to drive the shaft body to reset, and the slide rail slides into the slide groove. The shaft body slides on the slide rail and finally resets, which is convenient for adjusting the moving direction of the arc box in real time according to the rotation direction of the grinding head next time, and then adjusting the relative position of the arc box and the grinding head, so as to ensure that the diffusion direction of the grinding liquid is toward the center of the arc where it is distributed. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The present invention will be further described below in conjunction with the accompanying drawings.

[0033] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0034] Figure 2 It is a structural schematic diagram of the grinding head in the present invention;

[0035] Figure 3 It is a structural schematic diagram of the box body in the present invention;

[0036] Figure 4 It is a structural schematic diagram of the arc box in the present invention;

[0037] Figure 5 It is a structural schematic diagram of the transmission assembly in the present invention;

[0038] Figure 6 It is a structural schematic diagram of the state where the arc box in the present invention is located at the end of the moving path;

[0039] Figure 7 It is a structural schematic diagram of the slide rail in the present invention;

[0040] Figure 8 It is a structural schematic diagram of the axis body in the present invention.

[0041] In the figure: 1. grinding table; 2. grinding disc; 3. grinding head; 4. positioning plate; 5. rotating shaft; 6. assembly box; 7. arc box; 8. transmission assembly; 801. driving gear; 802. driven gear; 803. shaft; 804. slide groove; 805. slide rail; 806. connecting rod; 807. groove; 808. connecting block; 809. elastic telescopic member; 9. nozzle; 10. partition; 11. box; 12. grinding liquid box. DETAILED DESCRIPTION

[0042] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0043] See also Figure 1-Figure 8 As shown, the present invention is a high-purity large-size alumina ceramic substrate grinding machine, comprising:

[0044] A grinding table 1 is provided with a grinding chamber for positioning a grinding disc 2, and the grinding disc 2 is driven to rotate by a driving source;

[0045] An assembly box 6 is fixed on the grinding table 1 and connected to the control component. A rotating shaft 5 is rotatably mounted on the assembly box 6. The bottom of the rotating shaft 5 is coaxially fixedly connected to the grinding head 3, and a positioning plate 4 for positioning the substrate is clamped at the bottom of the grinding head 3. The control component drives the rotating shaft 5 to rotate, and its rotation direction is opposite to that of the grinding disc 2; and

[0046] The arc box 7 is connected to the grinding liquid box 12, and its arc is arranged concentrically with the rotating shaft 5. The grinding liquid box 12 is slidably installed on the box body 11, and the box body 11 is fixedly installed on the assembly box 6. The arc box 7 is fixed to the bottom of the grinding liquid box 12. A plurality of equidistantly arranged nozzles 9 are connected to the bottom of the arc box 7, and the nozzles 9 face the contact surface between the substrate and the grinding wheel 2. When the rotating shaft 5 rotates, it drives the arc box 7 to rotate in the same direction to one side of the substrate through the transmission assembly 8, and then the arc box 7 remains stationary.

[0047] In one case of this embodiment, the driving source can be a motor assembly, or a gear assembly or a pulley assembly driven by a motor, as long as it can make the grinding disc 2 rotate, this embodiment does not make any specific limitations here; the control assembly includes a controller and a rotating motor, a hydraulic cylinder and other structures connected thereto, the control assembly is a prior art, and this application does not improve it, therefore, there is no need to disclose its specific mechanical structure and circuit structure, and does not affect the integrity of this application; the arc box 7 is arc-shaped, and the center of the arc is the same as the center of the rotating shaft 5, then multiple nozzles 9 are distributed along an arc concentric with the grinding head 3; a clamping assembly is provided on the positioning plate 4, and the clamping assembly can be a bolt and nut structure, or other structural components with clamping and positioning functions, which are not specifically limited here.

[0048] It should be noted that the current grinding machine drips grinding liquid at the center of the grinding disk 2, and the grinding liquid is in the form of dots. Then the grinding disk 2 rotates, and the grinding liquid flows in an arc shape under the action of centrifugal force. The flowing area is small. When the linear grinding liquid comes into contact with the substrate, the substrate rotating in the opposite direction can only contact the grinding liquid in the first half edge area, and cannot fully contact the grinding liquid.

[0049] When multiple nozzles 9 are used and the multiple nozzles 9 are distributed along an arc concentric with the grinding head 3, the multiple nozzles 9 can drip grinding liquid along the edge of the positioning disk 4, and the rotation of the grinding disk 2 can make the grinding liquid diffuse in a surface shape, and its edge is an arc, and the diffusion area is larger than the area of ​​linear flow; if the rotation of the rotating shaft 5 drives the arc box 7 to rotate in the opposite direction, taking the case where the grinding disk 2 rotates counterclockwise and the grinding head 3 rotates clockwise, the arc box 7 is located on the left side of the grinding head 3, and the grinding disk 2 rotates counterclockwise to drive the grinding liquid to flow in a direction away from the center of the arc, then the grinding liquid at the top of the arc area will flow downward in an arc shape, and the center of the flowing arc is located outside the arc area. That is, the grinding liquid in the arc area must overlap when it flows, and the diffusion area of ​​the grinding liquid is the smallest at this time; if the arc box 7 is always located directly above the rotating shaft 5, that is, the driving gear 801, the driven gear 802 and the center of the grinding disc 2 are arranged in a colinear manner, taking the grinding disc 2 rotating counterclockwise and the grinding head 3 rotating clockwise as an example, the arc box 7 is located between the center of the grinding disc 2 and the grinding head 3, then when the grinding disc 2 rotates counterclockwise, the grinding liquid flows in an arc shape under the action of centrifugal force, and the grinding liquid on the right side of the arc area will flow to the left and merge with the grinding liquid on the left side of the arc area, then the arc area will flow linearly again, and the diffusion area of ​​the grinding liquid is smaller in this way.

[0050] When this embodiment is actually used, the clamping assembly on the positioning disk 4 is adjusted to mount the substrate on the positioning disk 4, and then the positioning disk 4 with the substrate mounted thereon is clamped with the grinding head 3, and then the parameters of the control assembly are adjusted so that the control assembly controls the grinding head 3 to descend until the substrate contacts the grinding disc 2, and the control assembly controls the driving source to drive the grinding disc 2 to rotate, and at the same time, the control assembly drives the rotating shaft 5 to rotate to drive the grinding head 3 to rotate, and the rotation direction of the grinding head 3 is opposite to that of the grinding disc 2. The reverse rotation design helps to disperse the grinding force and reduce the concentration of thermal stress, thereby protecting the integrity and flatness of the ceramic substrate; when the grinding head 3 starts to rotate, the rotating shaft 5 drives the arc box 7 to rotate in the same direction to one side of the substrate through the transmission assembly 8 until the arc box 7 rotates to the end of its moving path, and the rotating shaft 5 continues to rotate and drives the grinding head 3 to continue to rotate. At this time, the arc box 7 remains stationary in the box body 11, and then the control assembly starts the nozzle 9 to contact the substrate with the grinding disc 2. The grinding liquid is sprayed on the contact surface, and after the grinding liquid falls on the grinding disc 2, it spreads in a planar shape under the action of centrifugal force, and the edge of the liquid surface is arc-shaped, and the direction of the grinding liquid spreading is toward the center of the arc. When the grinding liquid contacts the substrate, the substrate first contacts the grinding liquid at the edge of the arc and rotates synchronously, and then each area on the substrate contacts all the grinding liquid inside the arc; when the grinding liquid is dripped, it is dripped in an arc shape along the edge of the grinding head 3, and the arc box 7 can automatically rotate in the same direction as the shaft 5 to the side of the grinding head 3 when the shaft 5 starts to rotate, which can ensure that when the grinding disc 2 rotates, the grinding liquid dripped in an arc shape under the action of centrifugal force will diffuse into an arc area along the arc, and the diffusion direction is toward the center of the arc, so that the grinding liquid will not converge and overlap when flowing, and the grinding liquid can diffuse in a planar shape, which greatly increases the area of ​​the grinding liquid flow area, so as to increase the area of ​​the ceramic substrate and the area in contact with the grinding liquid, so that a small amount of grinding liquid can fully infiltrate the ceramic substrate.

[0051] like Figure 1-Figure 6 As shown, as a preferred embodiment of the present invention, a plurality of partitions 10 are fixed in the arc box 7, and a gap is provided between the top of the partition 10 and the top plate of the arc box 7, the top plate of the arc box 7 is provided with a through opening connected to the grinding liquid tank 12, and the arc box 7 is divided into a plurality of cavities by the plurality of partitions 10, and the plurality of cavities are connected to a plurality of nozzles 9 and correspond one to one.

[0052] In one case of this embodiment, a solenoid valve is installed on the nozzle 9, and the solenoid valve is connected to the control component. The solenoid valve is a prior art and is not improved in this application. Therefore, there is no need to disclose its specific mechanical structure and circuit structure, and it does not affect the integrity of this application.

[0053] In actual application of this embodiment, the grinding liquid in the grinding liquid box 12 first enters the arc box 7 after being output, and the gap between the top of the partition 10 and the top plate of the arc box 7 can make the multiple cavities connected, so that the multiple cavities can be evenly filled with grinding liquid, thereby ensuring that the grinding liquid sprayed by the multiple nozzles 9 each time is equal, and the grinding liquid in the arc area that subsequently diffuses is more uniform, thereby improving the uniformity of contact between the ceramic substrate and the grinding liquid.

[0054] like Figure 1-Figure 8 As shown, as a preferred embodiment of the present invention, the transmission assembly 8 includes:

[0055] The driving gear 801 is coaxially fixedly mounted on the rotating shaft 5;

[0056] A connecting block 808, the top of which is fixedly connected to the grinding liquid box 12, and the bottom of which is rotatably mounted with a shaft 803, the shaft 803 is coaxially fixedly connected to a driven gear 802, and the driven gear 802 is meshed with the driving gear 801, and the two ends of the connecting block 808 are respectively connected to the inner wall of the box body 11 through two elastic expansion members 809; and

[0057] The slide rail 805 is fixed on the assembly box 6, and it slides with the slide groove 804 that runs through the shaft body 803; when the shaft body 803 is located at both ends of its moving path, the slide groove 804 is separated from the slide rail 805, and the two ends of the moving path of the shaft body 803 are symmetrically arranged on both sides of the positioning plate 4.

[0058] In one case of the present embodiment, there are multiple rotating shafts 5, and the multiple rotating shafts 5 are arranged in a circle; when the elastic telescopic member 809 is in a free state, the centers of the driving gear 801, the driven gear 802 and the grinding disc 2 are arranged in a colinear manner, and at this time the slide rail 805 is located in the slide groove 804; when the shaft body 803 is located at both ends of its moving path, the rotating shaft 5 drives the driving gear 801 to continue rotating, and drives the driven gear 802 to rotate, then the shaft body 803 rotates on the connecting block 808, and at this time the slide groove 804 cannot be aligned with the slide rail 805.

[0059] The elastic telescopic member 809 is a structure formed by nesting multiple tubes and has a spring inside. In actual application, a gear rack or electric telescopic rod structure may also be adopted, which is not specifically limited in this embodiment.

[0060] It should be noted that the top of the connecting block 808 is fixedly connected to the grinding liquid box 12, the grinding liquid box 12 is slidably installed on the box body 11, and the box body 11 is fixedly installed on the assembly box 6, that is, the box body 11 is always in a fixed state, and the box body 11 is provided with a limit groove that slides with the grinding liquid box 12, and the limit groove is an arc groove, and the arc groove is concentrically arranged with the rotating shaft 5. When the grinding liquid box 12 slides on the box body 11, the grinding liquid box 12 rotates with the axis of the rotating shaft 5 as the center axis, and the arc box 7 and the nozzle 9 thereon move synchronously with the grinding liquid box 12, and the limit groove limits the grinding liquid box 12, and the grinding liquid box 12 cannot rotate on its own.

[0061] When the present embodiment is actually used, in the initial state, the elastic expansion member 809 is in a free state, at which time the driving gear 801, the driven gear 802 and the center of the grinding disc 2 are arranged in a colinear manner, that is, the arc box 7 is located between the center of the grinding disc 2 and the grinding head 3, and the slide rail 805 is located in the slide groove 804; when the control component drives the rotating shaft 5 to rotate to drive the grinding head 3 to rotate, the driving gear 801 rotates synchronously, and due to the limiting effect of the slide rail 805, the driven gear 802 cannot rotate on its own at this time, that is, the driving gear 801 and the driven gear 802 are engaged, and the two remain relatively stationary, then the driving gear 801 rotates to drive the driven gear 802 to rotate with the axis of the driving gear 801, that is, the axis of the rotating shaft 5, as the central axis, and the rotation direction is the same as the rotation direction of the rotating shaft 5, during which the slide rail 805 and the slide groove 804 are in contact with each other. Relative sliding, that is, the shaft body 803 slides on the slide rail 805 until the shaft body 803 slides to the end of its moving path. At this time, the shaft body 803 is located on one side of the grinding head 3, and the elastic telescopic member 809 on this side is in a contracted state, and the elastic telescopic member 809 on the other side is in a stretched state, and at this time the slide groove 804 is separated from the slide rail 805, and then the rotating shaft 5 drives the active gear 801 to continue to rotate, and the slide rail 805 no longer limits the shaft body 803, then the active gear 801 drives the driven gear 802 to rotate under the meshing transmission, and the shaft body 803 rotates at the bottom of the connecting block 808, at this time the shaft body 803 loses the moving power source, and the slide groove 804 cannot be aligned with the slide rail 805, then the connecting block 808 can be stationary here, that is, the grinding liquid box 12 and the arc box 7 are both stationary here, which is convenient for dripping grinding liquid during this grinding process.

[0062] like Figure 6-Figure 8 As shown, as a preferred embodiment of the present invention, when the control component drives the rotating shaft 5 to stop rotating, the driven gear 802 rotates until the slide groove 804 is aligned with the slide rail 805.

[0063] In actual application of this embodiment, when the control component drives the rotating shaft 5 to stop rotating, the driven gear 802 rotates until the slide groove 804 is aligned with the slide rail 805, and then stops rotating. The elastic telescopic member 809 restores the deformation force to drive the shaft body 803 to reset, and the slide rail 805 slides into the slide groove 804, and the shaft body 803 slides on the slide rail 805 and finally resets, so that it is convenient to adjust the moving direction of the arc box 7 in real time according to the rotation direction of the grinding head 3 next time, and then adjust the relative position of the arc box 7 and the grinding head 3, so as to ensure that the diffusion direction of the grinding liquid is toward the center of the arc where it is distributed.

[0064] like Figure 5-Figure 8 As shown, as a preferred embodiment of the present invention, the slide rail 805 is fixed to the assembly box 6 through the connecting rod 806, and the shaft body 803 is provided with a groove 807 that slides with the connecting rod 806; when the slide rail 805 is aligned with the slide groove 804 and the shaft body 803 slides to the connecting rod 806, the connecting rod 806 is aligned with the groove 807 and the two then slide relative to each other.

[0065] In one case of this embodiment, the diameter of the slide groove 804 is not less than the diameter of the slide rail 805, and the groove 807 can accommodate the connecting rod 806; in actual application, when the shaft 803 slides on the slide rail 805, relative sliding will occur between the connecting rod 806 and the groove 807, thereby avoiding interference between components.

[0066] See also Figure 1-Figure 8 As shown, the present invention is a high-purity large-size alumina ceramic substrate grinding process, the process uses the high-purity large-size alumina ceramic substrate grinding machine as described in the above embodiment, and the process includes the following steps:

[0067] Step S1: adjusting the clamping assembly on the positioning plate 4 to mount the substrate on the positioning plate 4, and then clamping the positioning plate 4 with the substrate mounted thereon to the grinding head 3;

[0068] Step S2: adjusting the parameters of the control component so that the control component controls the grinding head 3 to descend until the base plate contacts the grinding disc 2;

[0069] Step S3: the control component controls the driving source to drive the grinding disc 2 to rotate, and at the same time, the control component drives the rotating shaft 5 to rotate, so as to drive the grinding head 3 to rotate, and the rotation direction of the grinding head 3 is opposite to the rotation direction of the grinding disc 2; when the grinding head 3 starts to rotate, the rotating shaft 5 drives the arc box 7 to rotate in the same direction to one side of the substrate through the transmission component 8, until the arc box 7 rotates to the end of its moving path, and the rotating shaft 5 continues to rotate and drives the grinding head 3 to continue to rotate, and at this time the arc box 7 remains stationary in the box body 11;

[0070] Step S4: the control component starts the spray head 9 to spray the polishing liquid on the contact surface between the substrate and the grinding disc 2;

[0071] Step S5: After the grinding liquid falls onto the grinding disc 2, it spreads in a planar shape under the action of centrifugal force, and the edge of the liquid surface is arc-shaped, and the spreading direction of the grinding liquid is toward the center of the arc;

[0072] Step S6: When the polishing liquid contacts the substrate, the substrate first contacts the polishing liquid at the edge of the arc and rotates synchronously, and then each area on the substrate contacts all the polishing liquid inside the arc.

[0073] In one case of this embodiment, step S3 specifically includes the following steps:

[0074] Step S31: the control component controls the driving source to drive the grinding disc 2 to rotate, and at the same time, the control component drives the rotating shaft 5 to rotate, so as to drive the grinding head 3 to rotate, and the rotation direction of the grinding head 3 is opposite to the rotation direction of the grinding disc 2; when the grinding head 3 starts to rotate, the rotating shaft 5 rotates synchronously, and drives the driving gear 801 to rotate synchronously. Since the slide rail 805 is located in the slide groove 804, the shaft body 803 cannot rotate by itself, and the driving gear 801 rotates to drive the driven gear 802 and the shaft body 803 to rotate with the axis of the rotating shaft 5 as the central axis until the shaft body 803 rotates to the end of its moving path;

[0075] Step S32: The rotating shaft 5 drives the driving gear 801 and the grinding head 3 to continue rotating, and drives the driven gear 802 to rotate, so that the shaft 803 rotates on the connecting block 808. At this time, the slide groove 804 cannot be aligned with the slide rail 805, so the connecting block 808 remains stationary here, that is, the grinding liquid box 12 and the arc box 7 both remain stationary.

[0076] Working principle of the present invention: The above embodiment of the present invention provides a high-purity large-size alumina ceramic substrate grinding machine and process. The rotating shaft 5 drives the arc box 7 to rotate in the same direction to one side of the substrate through the transmission component 8 until the arc box 7 rotates to the end of its moving path. The rotating shaft 5 continues to rotate and drives the grinding head 3 to continue to rotate. At this time, the arc box 7 remains stationary in the box body 11. Then the control component starts the nozzle 9 to spray the grinding liquid on the contact surface between the substrate and the grinding disc 2. After the grinding liquid falls on the grinding disc 2, it spreads in a planar shape under the action of centrifugal force, and the edge of the liquid surface is arc-shaped. The diffusion direction of the grinding liquid is toward the center of the arc. When the grinding liquid contacts the substrate, the substrate first contacts the grinding head at the edge of the arc. The grinding liquid contacts and rotates synchronously, and then each area on the substrate contacts all the grinding liquid inside the arc; when the grinding liquid is dripped, it is dripped in an arc shape along the edge of the grinding head 3, and the arc box 7 can automatically rotate in the same direction as the rotating shaft 5 to the side of the grinding head 3 when the rotating shaft 5 starts to rotate, which can ensure that when the grinding disc 2 rotates, the grinding liquid dripped in the arc shape will diffuse into an arc-shaped area along the arc under the action of centrifugal force, and the diffusion direction is toward the center of the arc, so that the grinding liquid will not converge and overlap when flowing, and the grinding liquid can diffuse in a surface shape, which greatly increases the area of ​​the grinding liquid flow area, so as to increase the area of ​​the ceramic substrate and the area in contact with the grinding liquid, and achieve that a small amount of grinding liquid can fully infiltrate the ceramic substrate.

[0077] The above is a detailed description of an embodiment of the present invention, but the content is only a preferred embodiment of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A high-purity large-size alumina ceramic substrate grinding machine, characterized in that: include: A grinding table (1) is provided with a grinding chamber for positioning a grinding disc (2), and the grinding disc (2) is driven to rotate by a driving source; An assembly box (6) is fixed on the grinding table (1) and connected to the control component. A rotating shaft (5) is rotatably mounted on the assembly box (6). The bottom of the rotating shaft (5) is coaxially fixedly connected to the grinding head (3). A positioning plate (4) for positioning the substrate is clamped on the bottom of the grinding head (3). The control component drives the rotating shaft (5) to rotate, and its rotation direction is opposite to that of the grinding plate (2); and An arc box (7) is connected to a grinding liquid box (12), and its arc is arranged concentrically with the rotating shaft (5); the grinding liquid box (12) is slidably mounted on a box body (11), and the box body (11) is fixedly mounted on an assembly box (6); the arc box (7) is fixed to the bottom of the grinding liquid box (12); a plurality of nozzles (9) arranged at equal intervals are connected to the bottom of the arc box (7), and the nozzles (9) face the contact surface between the substrate and the grinding disc (2); when the rotating shaft (5) rotates, it drives the arc box (7) to rotate in the same direction to one side of the substrate through the transmission assembly (8), and then the arc box (7) remains stationary; A plurality of partitions (10) are fixed in the arc box (7), and a gap is provided between the top of the partition (10) and the top plate of the arc box (7); the top plate of the arc box (7) is provided with a through opening connected to the grinding liquid tank (12); and the arc box (7) is divided into a plurality of cavities by the plurality of partitions (10), and the plurality of cavities are connected to the plurality of nozzles (9) and correspond to each other one by one; The transmission assembly (8) comprises: A driving gear (801) is coaxially fixedly mounted on the rotating shaft (5); A connecting block (808), the top of which is fixedly connected to the grinding liquid box (12), and the bottom of which is rotatably mounted with a shaft (803), the shaft (803) being coaxially fixedly connected to the driven gear (802), the driven gear (802) being meshed with the driving gear (801), and the two ends of the connecting block (808) being connected to the inner wall of the box (11) via two elastic expansion members (809); and The slide rail (805) is fixed on the assembly box (6) and is slidably matched with the slide groove (804) which is arranged on the shaft body (803); when the shaft body (803) is located at both ends of its moving path, the slide groove (804) is separated from the slide rail (805), and the two ends of the moving path of the shaft body (803) are symmetrically arranged on both sides of the positioning plate (4); The number of the rotating shafts (5) is multiple, and the multiple rotating shafts (5) are arranged in a circle; when the elastic telescopic member (809) is in a free state, the centers of the driving gear (801), the driven gear (802) and the grinding disc (2) are arranged in a colinear manner, and at this time the slide rail (805) is located in the slide groove (804); when the shaft body (803) is located at both ends of its moving path, the rotating shaft (5) drives the driving gear (801) to continue rotating, and drives the driven gear (802) to rotate, then the shaft body (803) rotates on the connecting block (808), and at this time the slide groove (804) cannot be aligned with the slide rail (805); Abrasive liquid is sprayed on the contact surface between the substrate and the grinding disc (2). After the abrasive liquid falls on the grinding disc (2), it spreads in a planar shape under the action of centrifugal force, and the edge of the liquid surface is in an arc shape. The spreading direction of the abrasive liquid is toward the center of the arc. When the abrasive liquid contacts the substrate, the substrate first contacts the abrasive liquid at the edge of the arc and rotates synchronously. Subsequently, various areas on the substrate contact all the abrasive liquid inside the arc.

2. A high-purity large-size alumina ceramic substrate grinding machine according to claim 1, characterized in that: When the control assembly drives the rotating shaft (5) to stop rotating, the driven gear (802) rotates until the slide groove (804) is aligned with the slide rail (805).

3. A high-purity large-size alumina ceramic substrate grinding machine according to claim 1, characterized in that: The slide rail (805) is fixed to the assembly box (6) via a connecting rod (806), and a groove (807) is provided on the shaft body (803) for slidingly cooperating with the connecting rod (806); when the slide rail (805) is aligned with the slide groove (804) and the shaft body (803) slides to the connecting rod (806), the connecting rod (806) is aligned with the groove (807) and the two then slide relative to each other.

4. A high-purity large-size alumina ceramic substrate grinding process, characterized in that: The process uses a high-purity large-size alumina ceramic substrate grinding machine as described in any one of claims 1 to 3 above, and the process includes the following steps: Step S1: adjusting the clamping assembly on the positioning plate (4) to mount the substrate on the positioning plate (4), and then clamping the positioning plate (4) with the substrate mounted thereon to the grinding head (3); Step S2: adjusting the parameters of the control component so that the control component controls the grinding head (3) to descend until the base plate contacts the grinding disc (2); Step S3: the control component controls the driving source to drive the grinding disc (2) to rotate, and at the same time, the control component drives the rotating shaft (5) to rotate, so as to drive the grinding head (3) to rotate, and the rotation direction of the grinding head (3) is opposite to the rotation direction of the grinding disc (2); when the grinding head (3) starts to rotate, the rotating shaft (5) drives the arc box (7) to rotate in the same direction to one side of the base plate through the transmission component (8), until the arc box (7) rotates to the end of its moving path, and the rotating shaft (5) continues to rotate and drives the grinding head (3) to continue to rotate, and at this time, the arc box (7) remains stationary in the box body (11); Step S4: the control component starts the spray head (9) to spray the polishing liquid on the contact surface between the substrate and the grinding disc (2); Step S5: After the grinding liquid falls onto the grinding disc (2), it spreads in a planar shape under the action of centrifugal force, and the edge of the liquid surface is arc-shaped, and the direction of the grinding liquid spreading is toward the center of the arc; Step S6: When the polishing liquid contacts the substrate, the substrate first contacts the polishing liquid at the edge of the arc and rotates synchronously, and then each area on the substrate contacts all the polishing liquid inside the arc.

5. A high-purity large-size alumina ceramic substrate grinding process according to claim 4, characterized in that: The step S3 specifically comprises the following steps: Step S31: the control component controls the driving source to drive the grinding disc (2) to rotate, and at the same time, the control component drives the rotating shaft (5) to rotate, so as to drive the grinding head (3) to rotate, and the rotation direction of the grinding head (3) is opposite to the rotation direction of the grinding disc (2); when the grinding head (3) starts to rotate, the rotating shaft (5) rotates synchronously, and drives the driving gear (801) to rotate synchronously. Since the slide rail (805) is located in the slide groove (804), the shaft body (803) cannot rotate by itself, and the driving gear (801) rotates to drive the driven gear (802) and the shaft body (803) to rotate with the axis of the rotating shaft (5) as the center axis until the shaft body (803) rotates to the end of its moving path; Step S32: The rotating shaft (5) drives the driving gear (801) and the grinding head (3) to continue rotating, and drives the driven gear (802) to rotate, so that the shaft (803) rotates on the connecting block (808). At this time, the slide groove (804) cannot be aligned with the slide rail (805), and the connecting block (808) remains stationary here, that is, the grinding liquid box (12) and the arc box (7) both remain stationary.

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