A cleaning and processing device for quartz tube

Abstract

The present invention relates to the field of cleaning technology, and in particular to a cleaning and processing device for quartz tubes, comprising: a base, serving as a load-bearing carrier of the device; a cleaning cylinder, fixedly mounted on the base, with a circular opening for discharging materials on the front side of the cleaning cylinder; a cover plate, rotatably mounted in the circular opening of the cleaning cylinder; a placement mechanism, the placement mechanism is used to place and drive the quartz tube thereon to rotate in the cleaning cylinder, the placement mechanism comprising: a turntable, rotatably mounted on the rear inner wall of the cleaning cylinder. The present invention drives the turntable to rotate by a servo motor, so that the quartz tube automatically rotates in the cleaning cylinder, and cooperates with the spray head to sequentially spray pickling solution, neutralizing alkali solution and ammonia water, so as to realize an automated cleaning process, improve cleaning efficiency, and at the same time achieve the goal of cleaning the quartz tube and preventing its body from being corroded.

Description

Technical Field

[0001] The invention relates to the field of cleaning technology, and in particular to a cleaning and processing device for a quartz tube. Background Art

[0002] Quartz tube is a special industrial technical glass made of silicon dioxide. It is a very good basic material. Quartz glass has a series of excellent physical and chemical properties. Due to its high temperature resistance and good chemical stability, it is widely used in high-tech industries, especially in the semiconductor industry as a diffusion tube, reaction chamber and other key components. However, during use, quartz tubes may absorb particles, sediments or chemical residues in the air, which will affect the quality and performance of the product. Therefore, regular cleaning of quartz tubes is very necessary.

[0003] After searching, the patent with the authorization announcement number CN113953281B discloses a rotary quartz tube cleaning and drying device, including: a base, a bearing platform arranged in the base and clamping the lip of the quartz tube, a cleaning cap movably engaged with the bearing platform to cover the quartz tube as a whole, a first driving device for driving the cleaning cap to rotate axially, a second driving device for driving the cleaning cap and the first driving device to move up and down in the vertical direction as a whole, an inner nozzle arranged vertically with the bearing platform and passing through the bearing platform, and a third driving device for driving the inner nozzle to rotate axially; the inner wall surface of the cleaning cap is provided with a plurality of first nozzles arranged in a laterally continuous manner, and the inner nozzle is provided with a plurality of second nozzles extending vertically into the interior of the quartz tube, and when the cleaning cap is engaged with the bearing platform to cover the quartz tube as a whole, the cleaning cap is driven by the first driving device to perform axial rotation.

[0004] The above patent design is a rotating quartz tube cleaning and drying device, which avoids the shaking of the quartz tube during the cleaning process through mechanical design, and reduces the risk of scratching the inner and outer walls of the quartz tube during the cleaning and drying process. However, this method may not achieve the ideal cleaning effect for some more stubborn stains, such as metal ions, organic matter, inorganic salts, oxides and previous chemical residues. Therefore, it is necessary to design a cleaning and processing device for quartz tubes in view of the shortcomings of the prior art. Summary of the invention

[0005] In order to overcome the disadvantages of the existing quartz tube cleaning device that it is difficult to clean the stubborn stains on the quartz tube by spraying water and the ideal cleaning effect cannot be achieved, the present invention provides a cleaning and processing device for the quartz tube.

[0006] The technical solution is as follows: A cleaning and processing device for quartz tubes, comprising: a base, serving as a load-bearing carrier of the device; a cleaning cylinder, fixedly mounted on the base, with a circular opening for discharging materials on the front side of the cleaning cylinder; a cover plate, rotatably mounted in the circular opening of the cleaning cylinder; a placing mechanism, which is used to place and drive the quartz tube thereon to rotate in the cleaning cylinder, and the placing mechanism comprises: a turntable, rotatably mounted on the rear inner wall of the cleaning cylinder; a mounting frame, fixedly connected to the front side of the turntable; a servo motor, mounted on the rear outer wall of the cleaning cylinder, and the output shaft of the servo motor passes through the rear wall of the cleaning cylinder and is connected to the center of the turntable A placement frame is slidably mounted on the mounting frame, the placement frame is a placement carrier for the quartz tube, and a plurality of groups of circular grooves for placing the quartz tube are provided on the top of the placement frame; a cross bracket is rotatably mounted on the front side of the placement frame by a rotating shaft, and the cross bracket is used to lock the placement frame on the mounting frame; a limiter is arranged on the top of the placement frame, and the limiter is used to cooperate with the circular groove of the placement frame and clamp the placed quartz tube; a guide frame is symmetrically arranged on the left and right outer walls of the cleaning cylinder; a cleaning mechanism is arranged on the outside of the cleaning cylinder, and the cleaning mechanism passes through the guide frame into the cleaning cylinder to clean the quartz tube on the placement frame.

[0007] Preferably, the mounting frame is composed of four sliding rods and corresponding connecting strips, and the ends of the sliding rods of the mounting frame are provided with notches adapted to the cross bracket. The ends of the cross bracket are inserted into the notches of the sliding rods corresponding to the mounting frame, so that the placement frame can be stably limited in the mounting frame.

[0008] Preferably, the limiting member comprises: a limiting frame, which is slidably installed on the top of the placing frame, and the number of the limiting frames is consistent with the number of circular groove groups on the top of the placing frame; an electric push rod I, which is consistent in number with the limiting frames and is installed on the top of the placing frame, and the push rods of the electric push rod I are connected to the corresponding limiting frames, and multiple quartz tubes can be clamped synchronously by cooperating with the circular grooves of the corresponding placing frame through the arc frame on the limiting frame.

[0009] Preferably, corrosion-resistant buffer pads are provided in the circular groove on the top of the placement frame and in the clamping position of the limit frame.

[0010] Preferably, a lifting member is further provided in the placement frame, and the lifting member is used to cooperate with the limiting member to bounce the quartz tube upward from the placement frame, so as to clean the cleaning dead corner where the limiting frame clamps the quartz tube. The lifting member includes: a placement frame, slidably connected to the bottom inner side of the placement frame, and the placement frame is used to support and bounce up the clamped quartz tube; an elastic member is provided between the placement frame and the placement frame, and after the quartz tube is placed in the placement frame, a section of the quartz tube is continued to be pressed downward and clamped by the limiting frame, so that the elastic force of the elastic member compressed at the bottom of the placement frame is greater than the quartz tube placed on the placement frame, and after the limiting frame is released, the placement frame bounces the quartz tube upward, so that the original clamping place of the quartz tube and the limiting frame are offset by a section, so as to clean the clamping dead corner there.

[0011] Preferably, the cleaning mechanism comprises: an infusion valve, which is provided with three groups and is symmetrically installed in the guide frame respectively; a liquid storage frame, which is arranged at the top of the cleaning cylinder, and the liquid storage frame is provided with three compartments, and the three compartments store pickling solution, neutralizing alkali solution and ammonia water in turn; a connecting pipe I, which connects different compartments of the liquid storage frame and the corresponding infusion valves; a mounting ring, which is fixedly installed on the inner wall of the cleaning cylinder; a spray head, which is provided with six groups and is circumferentially arranged on the mounting ring; a connecting pipe, which is connected to the corresponding spray head; a connecting pipe II, which is symmetrically connected between the connecting pipe and the corresponding guide frame on the same side, and the connecting pipe II connected on the guide frame on the same side respectively corresponds to and adapts to the infusion valve, and the connecting pipe II corresponding to the three groups of the infusion valves are connected to the three connecting pipes on the same side in turn; a switching member, which is arranged on the guide frame, and the switching member is used to switch the different infusion valves and the corresponding connecting pipe II to be connected.

[0012] Preferably, the switching member includes: a slider, which is slidably connected in the guide frame, and a through groove is opened inside the slider, and the through groove is used to connect different infusion valves and corresponding connecting pipes II; a gear pump, which is installed in the slider through the through groove, and the gear pump is used to pump the pickling liquid, neutralizing alkali solution and ammonia water in the liquid storage frame into the corresponding spray heads respectively; an electric push rod II, which is installed on the left and right outer walls of the cleaning cylinder, and the push rods of the electric push rod II are respectively connected to the slider, and the slider is driven by the electric push rod II to slide quickly in the guide frame, so that the gear pump on the slider is connected to the infusion valve and the corresponding connecting pipe II in sequence.

[0013] Preferably, it also includes: sensor I, installed on the top of the placement frame; sensor II, installed on each group of the spray heads, the sensor I and the sensor II can sense each other, and the sensor II and the electric push rod II are electrically connected; a controller, installed on the outer wall of the cleaning cylinder, the controller is used to control the opening and closing of the sensor I and the sensor II, and whenever the rotating placement frame drives the sensor I thereon to sense the sensor II at one place, the sensor II will control the electric push rod II to push forward a section through an electrical signal, so that the gear pump aligns with a corresponding group of infusion valves and connecting pipe II, thereby sequentially controlling the spray heads to intermittently spray acid cleaning solution, neutralizing alkali solution and ammonia water, so that the quartz tube is cleaned by the acid cleaning solution and then neutralized by the alkali solution, and finally the salts that are not easily soluble such as silver chloride produced after the acid-base neutralization are removed by ammonia water, thereby reciprocating to achieve the purpose of cleaning the quartz tube while reducing damage to the quartz tube.

[0014] Preferably, a drain valve is provided at the bottom of the cleaning cylinder, and the drain valve is used to discharge the waste liquid after cleaning the quartz tube out of the cleaning cylinder, so as to facilitate the cleaning personnel to collect and treat it safely.

[0015] Compared with the prior art, the present invention has the following advantages: 1. The present invention drives the turntable to rotate by a servo motor, so that the quartz tube rotates automatically in the cleaning cylinder, and cooperates with the spray head to spray acid solution, neutralizing alkali solution and ammonia water in sequence, thereby realizing an automated cleaning process, improving the cleaning efficiency, and at the same time achieving the goal of cleaning the quartz tube while preventing its body from being corroded.

[0016] 2. The present invention can bounce the quartz tube upward during the cleaning process through the coordinated use of the limiter and the lifting member, ensuring that the quartz tube can be fully sprayed and cleaned at all positions, thereby avoiding contamination residues caused by dead corners that have not been cleaned.

[0017] 3. The present invention can also enable the cleaning device to accurately control the working timing of the spray head through the cooperation of sensor I and sensor II, ensuring that the pickling solution, neutralizing alkali solution and ammonia water are sprayed as needed, which not only saves the amount of chemicals, but also reduces the potential damage to the quartz tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention.

[0019] Figure 2 This is a connection diagram of the cleaning cylinder, placement mechanism and cleaning mechanism of the present invention.

[0020] Figure 3 It is a three-dimensional structural schematic diagram of specific components of the placement mechanism of the present invention.

[0021] Figure 4It is a three-dimensional structural schematic diagram of the turntable, mounting frame and servo motor of the present invention.

[0022] Figure 5 It is a schematic diagram of the three-dimensional structure of the placement frame, the limiting member and the lifting member of the present invention.

[0023] Figure 6 It is a three-dimensional structural schematic diagram of the cleaning mechanism of the present invention.

[0024] Figure 7 It is a schematic diagram of the three-dimensional structure of the cleaning mechanism, sensor I and sensor II of the present invention.

[0025] Figure 8 It is a three-dimensional structural schematic diagram of the cleaning mechanism and the switching member of the present invention.

[0026] Explanation of the reference numerals: 1: base, 2: cleaning cylinder, 3: cover plate, 4: placing mechanism, 401: turntable, 402: mounting frame, 403: servo motor, 404: placing frame, 405: cross bracket, 5: limit member, 501: limit frame, 502: electric push rod I, 6: lifting member, 601: placing frame, 602: elastic member, 7: guide frame, 8: cleaning mechanism, 801: infusion valve, 802: liquid storage frame, 803: connecting pipe I, 804: mounting ring, 805: spray head, 806: connecting pipe, 807: connecting pipe II, 9: switching member, 901: slider, 902: gear pump, 903: electric push rod II, 10: sensor I, 11: sensor II, 12: controller, 13: drain valve. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings. It is hereby stated that the directional terms such as up, down, left, right, front, back, inside, outside, etc. that appear or will appear in the text of the present invention are only based on the accompanying drawings of the present invention, and are not specific limitations of the present invention.

[0028] Embodiment 1: A cleaning and processing device for a quartz tube, such as Figure 1-Figure 4As shown, it includes: a base 1, which serves as a load-bearing carrier of the device; a cleaning cylinder 2, which is fixedly installed on the base 1, and a circular opening for discharging materials is opened on the front side of the cleaning cylinder 2; a cover plate 3, which is rotatably installed in the circular opening of the cleaning cylinder 2; a placement mechanism 4, which is used to place and drive the quartz tube thereon to rotate in the cleaning cylinder 2, and the placement mechanism 4 includes: a turntable 401, which is rotatably installed on the rear inner wall of the cleaning cylinder 2; a mounting frame 402, which is fixedly connected to the front side of the turntable 401; a servo motor 403, which is installed on the rear outer wall of the cleaning cylinder 2, and the output shaft of the servo motor 403 passes through the rear wall of the cleaning cylinder 2 and is connected to the center of the turntable 401; a placement frame 404, which is slidably installed on the On the mounting frame 402, the placement frame 404 is a placement carrier for the quartz tube, and the top of the placement frame 404 is provided with multiple groups of circular grooves for placing the quartz tube; the cross bracket 405 is rotatably installed on the front side of the placement frame 404 through a rotating shaft, and the cross bracket 405 is used to lock the placement frame 404 on the mounting frame 402; the limit member 5 is arranged on the top of the placement frame 404, and the limit member 5 is used to cooperate with the circular groove of the placement frame 404 and clamp the placed quartz tube; the guide frame 7 is symmetrically arranged on the left and right outer walls of the cleaning cylinder 2; the cleaning mechanism 8 is arranged on the outside of the cleaning cylinder 2, and the cleaning mechanism 8 passes through the guide frame 7 into the cleaning cylinder 2 to clean the quartz tube on the placement frame 404.

[0029] like Figure 3 and Figure 4 As shown, the mounting frame 402 is composed of four sliding rods and corresponding connecting strips. The ends of the sliding rods of the mounting frame 402 are provided with notches adapted to the cross bracket 405. The ends of the cross bracket 405 are inserted into the notches of the sliding rods corresponding to the mounting frame 402, so that the placement frame 404 can be stably limited in the mounting frame 402.

[0030] like Figure 3 and Figure 5 As shown, the limiting member 5 includes: a limiting frame 501, which is slidably installed on the top of the placement frame 404, and the number of the limiting frames 501 is consistent with the number of circular groove groups on the top of the placement frame 404; an electric push rod I502, the number of which is consistent with the limiting frames 501 and is installed on the top of the placement frame 404, and the push rod of the electric push rod I502 is connected to the corresponding limiting frame 501, and the arc frame on the limiting frame 501 cooperates with the circular groove corresponding to the placement frame 404, so that multiple quartz tubes can be clamped synchronously.

[0031] like Figure 3-Figure 5As shown, a corrosion-resistant buffer pad is provided in the circular groove at the top of the placement frame 404 and at the clamping position of the limit frame 501, and the buffer pad can be specifically made of polytetrafluoroethylene; a lifting member 6 is also provided in the placement frame 404, and the lifting member 6 is used to cooperate with the limit member 5 to bounce the quartz tube upward from the placement frame 404, so as to clean the cleaning dead corner where the limit frame 501 clamps the quartz tube, and the lifting member 6 includes: a placement frame 601, which is slidably connected to the bottom of the inner side of the placement frame 404, and the placement frame 601 is used to support and bounce The quartz tube is clamped; the elastic member 602 is arranged between the placement frame 404 and the placement rack 601. After the quartz tube is placed in the placement frame 404, a section of the quartz tube is continuously pressed downward and clamped by the limit frame 501, so that the elastic force of the elastic member 602 compressed at the bottom of the placement rack 601 is greater than the quartz tube placed on the placement frame 404. After releasing the limit frame 501, the placement rack 601 bounces the quartz tube upward, so that the original clamping position of the quartz tube and the limit frame 501 are offset for a section, so as to clean the clamping dead angle there.

[0032] like Figure 2 , Figure 6 and Figure 8 As shown, the cleaning mechanism 8 includes: a liquid infusion valve 801, which is provided with three groups and is symmetrically installed in the guide frame 7; a liquid storage frame 802, which is arranged on the top of the cleaning cylinder 2, and the liquid storage frame 802 is provided with three compartments, and the three compartments store pickling liquid, neutralizing alkali solution and ammonia water in sequence; a connecting pipe I 803, which connects the different compartments of the liquid storage frame 802 and the corresponding liquid infusion valve 801; a mounting ring 804, which is fixedly installed on the inner wall of the cleaning cylinder 2; a spray head 805, which is provided with six groups and is circumferentially arranged on the mounting ring 804; a connecting pipe 806, connected to the corresponding sprinkler head 805; connecting pipe II 807, symmetrically connected between the connecting pipe 806 and the corresponding guide frame 7 on the same side, the connecting pipe II 807 connected on the guide frame 7 on the same side respectively correspond to and adapt to the infusion valve 801, and the connecting pipe II 807 corresponding to the three groups of infusion valves 801 are sequentially connected to the three connecting pipes 806 on the same side; a switching member 9 is arranged on the guide frame 7, and the switching member 9 is used to switch the different infusion valves 801 and the corresponding connecting pipe II 807 to be connected.

[0033] like Figure 1 , Figure 6 and Figure 8As shown, the switching member 9 includes: a slider 901, which is slidably connected in the guide frame 7, and a through groove is opened inside the slider 901, and the through groove is used to connect different infusion valves 801 and the corresponding connecting pipes II 807; a gear pump 902, which is installed in the slider 901 through the through groove, and the gear pump 902 is used to pump the pickling liquid, neutralizing alkali solution and ammonia water in the liquid storage frame 802 into the corresponding spray head 805 respectively; an electric push rod II 903, which is installed on the left and right outer walls of the cleaning cylinder 2, and the push rods of the electric push rod II 903 are respectively connected to the slider 901, and the slider 901 is driven by the electric push rod II 903 to slide quickly in the guide frame 7, so that the gear pump 902 on the slider 901 is connected to the infusion valve 801 and the corresponding connecting pipe II 807 in sequence.

[0034] When using the device to clean the quartz tube, rotate and open the cover plate 3 and slide the placement frame 404 out of the mounting frame 402, then put the quartz tubes to be cleaned into the placement frame 404 in batches through the circular groove. At this time, the quartz tubes are placed on the placement frame 601 and press the elastic member 602 downward. When the placement frame 404 is full of quartz tubes, a section of quartz tubes is pressed downward manually, so that the placement frame 601 continues to press the elastic member 602 downward, so that the elastic force of the elastic member 602 is greater than the gravity of the full quartz tubes, and at the same time, the electric push rod Ⅰ502 is activated, the push rod of the electric push rod Ⅰ502 is extended and pushes the limit frame 501 to slide, so that the limit frame 501 cooperates with the circular groove on the placement frame 404 to stably clamp the placed quartz tubes. The quartz tube clamped in the placement frame 404 will be subjected to the upward rebound force of the elastic member 602, and then the placement frame 404 that stably clamps the quartz tube will be slid and pushed back onto the mounting frame 402. When the placement frame 404 is completely pushed into the mounting frame 402, by twisting the cross clamp 405, the ends of the cross clamp 405 will be respectively clamped into the corresponding sliding rod notches of the mounting frame 402, so that the placement frame 404 is stably installed on the mounting frame 402. By enabling the servo motor 403, the servo motor 403 drives the turntable 401 to rotate slowly through the output shaft, and the rotating turntable 401 will drive the mounting frame 402 to rotate synchronously, so that the placement frame 404 on the mounting frame 402 drives the quartz tube placed thereon to rotate slowly.

[0035] By controlling the electric push rod II 903, the push rod of the electric push rod II 903 drives the slider 901 to slide in the guide frame 7. When the slider 901 slides from back to front in the guide frame 7 and the gear pump 902 on the slider 901 is aligned with the first group of infusion valves 801, the gear pump 902 is enabled and the pickling liquid in the liquid storage frame 802 is pumped into the first group of infusion valves 801 through the connecting pipe I 803. The pumped pickling liquid flows into the corresponding connecting pipe II 807 after passing through the gear pump 902. The pickling liquid flows into the corresponding connecting pipe 806 and the spray head 805 after passing through the connecting pipe II 807, so that the quartz tube on the rotating placement frame 404 is pickled and cleaned. After pickling for a period of time, the push rod of the electric push rod II 903 continues to drive the slider 901 The slider 901 moves forward in the guide frame 7. When the gear pump 902 on the slider 901 is aligned with the second group of infusion valves 801, the neutralized alkali solution in the liquid storage frame 802 is connected to the gear pump 902. Similarly, a proper amount of neutralized alkali solution is pumped into the corresponding spray head 805 through the gear pump 902 for spraying, so that the acid on the quartz tube after pickling is neutralized by the alkali solution to avoid the acid staying on the quartz tube for a long time and possible corrosion. After the quartz tube on the rotating placement frame 404 is completed with acid-base neutralization, the push rod of the electric push rod II 903 continues to drive the slider 901 to move forward in the guide frame 7. When the gear pump 902 on the slider 901 is aligned with the third group of infusion valves 801, the ammonia water in the liquid storage frame 802 is connected to the gear pump 902, and a proper amount of ammonia water is pumped into the corresponding spray head 805 through the gear pump 902. The quartz tube is sprayed onto the corresponding spray head 805, and the salt precipitates such as silver chloride that are difficult to clean may be produced after the acid and alkali are neutralized by ammonia water, and the salt precipitates are dissolved for subsequent cleaning. When the appropriate amount of ammonia water is pumped, the electric push rod II 903 quickly pulls back the gear pump 902 on the slider 901 through the push rod and aligns it with the first group of infusion valves 801, and starts a round of pickling work. In this way, the quartz tube is cleaned and the quartz tube body is prevented from being corroded. Finally, when the quartz tube is basically cleaned, the servo motor 403 is turned off to place the quartz tube safely in the placement frame 404, and then the electric push rod I 502 is enabled, so that the electric push rod I 502 pulls the limit frame 501 through the push rod, so that the limit frame 501 temporarily releases the clamping of the quartz tube. At this time, Under the action of the elastic member 602, the rack is bounced upward for a distance, and the electric push rod I502 is enabled to drive the limit frame 501 to clamp the quartz tube again, so that the clamping part of the quartz tube can also be exposed from the limit frame 501, so that the clamping part of the quartz tube can be cleaned later. After the quartz tube on the placement frame 404 is rotated and cleaned through multiple rounds, the servo motor 403 is turned off and the cross bracket 405 is rotated to release the lock of the placement frame 404 by the cross bracket 405. Finally, the entire placement frame 404 is removed from the mounting frame 402, and the cleaned quartz tubes on the placement frame 404 are immersed in clean water for batch cleaning, so that the acid, alkali and other liquids remaining on the quartz tube can also be cleaned, thereby realizing batch and efficient cleaning of the quartz tube.

[0036] Embodiment 2: Based on embodiment 1, Figure 2 , Figure 3 and Figure 7 As shown, it also includes: a sensor I10, installed on the top of the placement frame 404; a sensor II11, installed on each group of the spray heads 805, the sensor I10 and the sensor II11 can sense each other, and the sensor II11 and the electric push rod II903 are electrically connected; a controller 12, installed on the outer wall of the cleaning cylinder 2, the controller 12 is used to control the opening and closing of the sensor I10 and the sensor II11, whenever the rotating placement frame 404 drives the sensor I10 thereon to sense When the sensor Ⅱ11 is at one place, the sensor Ⅱ11 will control the electric push rod Ⅱ903 to push forward a section through an electrical signal, so that the gear pump 902 aligns with a corresponding group of infusion valves 801 and connecting pipe Ⅱ807, thereby sequentially controlling the spray head 805 to intermittently spray pickling solution, neutralizing alkali solution and ammonia water, so that the quartz tube is cleaned by the pickling solution and then neutralized with alkali solution, and finally the salts such as silver chloride that are not easily soluble after acid-base neutralization are removed by ammonia water, so as to achieve the purpose of cleaning the quartz tube while reducing damage to the quartz tube.

[0037] like Figure 1 As shown, a drain valve 13 is provided at the bottom of the cleaning cylinder 2, and the drain valve 13 is used to discharge the waste liquid after cleaning the quartz tube from the cleaning cylinder 2, so as to facilitate the cleaning personnel to collect and treat it safely.

[0038] When the servo motor 403 drives the quartz tube on the entire placement frame 404 to rotate through the mounting frame 402, the controller 12 can be used to directly control the opening of the sensor Ⅰ10 and the sensor Ⅱ11, and the rotating placement frame 404 drives the sensor Ⅰ10 thereon to rotate synchronously. When the top of the placement frame 404 rotates to approach the sensor Ⅱ11 on the sprinkler head 805, when the sensor Ⅰ10 approaches and senses the sensor Ⅱ11, the sensor Ⅱ11 will control the electric push rod Ⅱ903 to be enabled, and the electric push rod Ⅱ903 can automatically drive the slider 901 to move in the guide frame 7 through the push rod, so that the slider 901 moves in the guide frame 7. The gear pump 902 in 01 can be aligned and connected to the infusion valve 801, and whenever the sensor Ⅰ10 and the corresponding sensor Ⅱ11 on the top of the rotating placement frame 404 are induced, the electric push rod Ⅱ903 can automatically drive the slider 901 and the gear pump 902 to move once through the push rod, thereby realizing automatic control of the gear pump 902 to connect the infusion valve 801, and spraying the pickling liquid, neutralizing alkali solution and ammonia water on the rotating quartz tube in the cleaning cylinder 2 in sequence, so that the quartz tube can be fully cleaned without being corroded. After the quartz tube is cleaned, the waste liquid after cleaning can be safely discharged and collected through the drain valve 13.

[0039] The above descriptions are merely embodiments of the present invention and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A cleaning and processing device for a quartz tube, comprising: A base (1) serving as a load-bearing carrier of the device; A cleaning cylinder (2) is fixedly mounted on the base (1), and a circular opening for discharging materials is provided on the front side of the cleaning cylinder (2); A cover plate (3) is rotatably mounted in the circular opening of the cleaning cylinder (2); It is characterized by further comprising: A placement mechanism (4), the placement mechanism (4) being used to place and drive the quartz tube thereon to rotate in the cleaning cylinder (2), the placement mechanism (4) comprising: A turntable (401) rotatably mounted on the rear inner wall of the cleaning cylinder (2); A mounting frame (402) fixedly connected to the front side of the rotating disk (401); A servo motor (403) is mounted on the rear outer wall of the cleaning cylinder (2), and an output shaft of the servo motor (403) passes through the rear outer wall of the cleaning cylinder (2) and is connected to the rotating disk (401); A placement frame (404) is slidably mounted on the mounting frame (402), and a plurality of groups of circular grooves for placing quartz tubes are provided on the top of the placement frame (404); A cross bracket (405) is rotatably mounted on the front side of the placement frame (404), and the cross bracket (405) is used to lock the placement frame (404) on the mounting frame (402); A limiting member (5) is arranged on the top of the placement frame (404), and the limiting member (5) is used to cooperate with the circular groove of the placement frame (404) and clamp the placed quartz tube; A guide frame (7) is symmetrically arranged on the left and right outer walls of the cleaning cylinder (2); A cleaning mechanism (8) is arranged outside the cleaning cylinder (2), and the cleaning mechanism (8) is used to clean the quartz tube on the placement frame (404); The mounting frame (402) is composed of four slide bars and corresponding connecting strips, and the ends of the slide bars of the mounting frame (402) are provided with notches adapted to the cross bracket (405), and the ends of the cross bracket (405) are snapped into the corresponding notches of the slide bars of the mounting frame (402); The limiting member (5) comprises: A limiting frame (501) is slidably mounted on the top of the placement frame (404), and the number of the limiting frames (501) is consistent with the number of the circular groove groups on the top of the placement frame (404); Electric push rods I (502), the number of which is the same as the limit frames (501) and which are installed on the top of the placement frame (404), and the push rods of the electric push rods I (502) are connected to the corresponding limit frames (501); The circular groove at the top of the placement frame (404) and the clamping position of the limit frame (501) are both provided with corrosion-resistant buffer pads; A lifting member (6) is also provided in the placement frame (404), and the lifting member (6) is used to cooperate with the limiting member (5) to bounce the quartz tube upward from the placement frame (404), so as to clean the cleaning dead corner where the limiting frame (501) clamps the quartz tube. The lifting member (6) comprises: A placement rack (601) is slidably connected to the inner bottom of the placement frame (404), and the placement rack (601) is used to support and pop up the clamped quartz tube; An elastic member (602) is arranged between the placement frame (404) and the placement rack (601); The cleaning mechanism (8) comprises: The infusion valves (801) are provided in three groups and are symmetrically installed in the guide frame (7); A liquid storage frame (802) is arranged on the top of the cleaning cylinder (2), and three compartments are arranged in the liquid storage frame (802), and the three compartments store pickling liquid, neutralizing alkali solution and ammonia water in sequence; A connecting pipe I (803) connecting different compartments of the liquid storage frame (802) and the corresponding liquid infusion valve (801); A mounting ring (804) fixedly mounted on the inner wall of the cleaning cylinder (2); The shower heads (805) are provided in six groups and are circumferentially arranged on the mounting ring (804); A connecting pipe (806) connected to the corresponding spray head (805); A connecting pipe II (807) symmetrically connects the connecting pipe (806) on the same side and the corresponding guide frame (7), the connecting pipes II (807) connected on the guide frame (7) on the same side respectively correspond to and are adapted to the infusion valves (801), and the connecting pipes II (807) corresponding to the three groups of infusion valves (801) are sequentially connected to the three connecting pipes (806) on the same side; A switching member (9) is arranged on the guide frame (7), and the switching member (9) is used to switch the connection between different infusion valves (801) and the corresponding connecting tubes II (807).

2. A cleaning and processing device for a quartz tube according to claim 1, characterized in that: The switching element (9) comprises: A sliding block (901) is slidably connected in the guide frame (7), and a through groove is formed inside the sliding block (901); a gear pump (902) installed in the slider (901) through the through slot, the gear pump (902) being used to pump the pickling liquid, neutralizing alkali solution and ammonia water in the liquid storage frame (802) into the corresponding spray heads (805); The electric push rod II (903) is installed on the left and right outer walls of the cleaning cylinder (2), and the push rods of the electric push rod II (903) are respectively connected to the slider (901).

3. A cleaning and processing device for a quartz tube according to claim 2, characterized in that: Also included are: A sensor I (10), mounted on the top of the placement frame (404); Sensor II (11), installed on each group of the sprinkler heads (805), the sensor I (10) and the sensor II (11) can sense each other, and the sensor II (11) and the electric push rod II (903) are electrically connected; A controller (12) is mounted on the outer wall of the cleaning cylinder (2), and the controller (12) is used to control the opening and closing of the sensor I (10) and the sensor II (11).

4. A cleaning and processing device for a quartz tube according to claim 3, characterized in that: A drain valve (13) is provided at the bottom of the cleaning cylinder (2).

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