Silicon carbide product surface finishing device and method

Abstract

The present invention relates to the field of surface processing technology, and specifically discloses a surface finishing device and method for silicon carbide products, comprising a machine body, a workbench fixedly installed on the top of the machine body, and a gantry fixedly installed on the top of the workbench, a cylinder is fixedly installed on the top of the gantry, a first finishing unit is arranged at the output end of the cylinder, and a second finishing unit is arranged on the workbench for grinding a silicon carbide ceramic sealing ring in cooperation with the first finishing unit. By adjusting the first grinding piece and the second grinding piece, the silicon carbide ceramic sealing ring does not need to be moved during the entire grinding process, and each surface of the silicon carbide ceramic sealing ring can be ground and finished, thereby not only ensuring the consistency of the processing quality of each surface and improving the overall performance of the sealing ring, but also realizing the function of grinding multiple surfaces of the silicon carbide ceramic sealing ring at one time, thereby shortening the processing cycle and improving the grinding efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of surface processing, and more specifically, to a device and method for finishing the surface of a silicon carbide product. Background Art

[0002] Silicon carbide products are made of high-performance silicon carbide through a series of precision processes. Silicon carbide itself has excellent physical and chemical properties, including excellent high temperature resistance, high strength, good thermal conductivity and excellent impact resistance. These properties make silicon carbide products widely used in many industrial fields.

[0003] Silicon carbide ceramic sealing ring is one of the common silicon carbide products. The production process of silicon carbide ceramic sealing ring generally includes: raw material preparation, mixing and granulation, molding, sintering, post-processing and packaging. Among them, after the sealing ring blank is placed in a sintering furnace, sintered at high temperature and cooled, the cooled sealing ring needs to be sent to the post-processing section for cleaning and surface treatment. At present, in the process of surface treatment of silicon carbide ceramic sealing rings, the sealing ring is fixed by a V-shaped block or a concentric circle clamp, and then the corresponding surface of the sealing ring is polished with a polishing sheet. After a single polishing is completed, the position of the sealing ring is adjusted and repositioned and fixed, and then the new surface is polished. However, this polishing method still has certain defects: first, after each surface is polished, the position of the sealing ring needs to be adjusted and positioned and clamped, and during multiple positioning and clamping processes, positioning deviations may occur. Inaccurate positioning will result in inconsistent surface quality of the polished sealing ring, thereby affecting the sealing performance of the sealing ring, and multiple positioning and fixation increase the operation time. In the mass production process, the time consumed by each positioning and fixation gradually accumulates, which will greatly reduce the production efficiency of the sealing ring.

[0004] Secondly, single-time grinding of a single surface not only has low grinding efficiency, but also increases the number of positioning and clamping times, further affecting the production efficiency of the sealing ring. Summary of the invention

[0005] The invention provides a silicon carbide product surface finishing device and method, which solves the technical problem in the prior art that the silicon carbide ceramic sealing ring needs to be positioned and clamped multiple times during the grinding process.

[0006] The present invention provides a surface finishing device for silicon carbide products, comprising a machine body, a workbench fixedly mounted on the top of the machine body and a gantry fixedly mounted on the top of the workbench, a cylinder fixedly mounted on the top of the gantry, a first finishing unit arranged at the output end of the cylinder, a second finishing unit arranged on the workbench for cooperating with the first finishing unit to grind a silicon carbide ceramic sealing ring, the first finishing unit comprising a first driving member mounted on the gantry, a first grinding member mounted on the first driving member and a first adjusting member mounted on the first grinding member, the first driving member being used to drive the first grinding member, the second finishing unit comprising a second grinding member mounted on the top of the workbench, a second adjusting member mounted on the second grinding member and a second driving member mounted on the bottom of the workbench and used to drive the second grinding member.

[0007] The first grinding member includes a mounting plate and a plurality of mounting grooves 1 and 2 which are circumferentially opened on the mounting plate and alternate with each other, wherein a slide bar 1 and a slide bar 2 are respectively slidably connected in the mounting groove 1 and the mounting groove 2, and a side grinding sheet 1 and an inner support plate are respectively fixedly installed at one end of the slide bar 1 and the slide bar 2 away from the mounting plate.

[0008] The first adjusting member and the second adjusting member respectively control the first grinding member and the second grinding member to adjust and switch between grinding and fixing the silicon carbide ceramic sealing ring, so as to perform all-round grinding of the inner side surface, top surface, outer side surface and bottom surface of the silicon carbide ceramic sealing ring.

[0009] Furthermore, the first grinding member also includes two connecting plates installed on the first driving member, and upper grinding plates are commonly installed on the outer sides of the two connecting plates.

[0010] Furthermore, the second polishing part includes a rotating box rotatably installed on the top of the workbench and four sleeves fixedly installed on the inner wall of the top of the rotating box and distributed in a circle, a transverse screw rod is rotatably installed in the left and right sleeves, a longitudinal screw rod is rotatably installed in the front and rear sleeves, and a movable plate is threadedly connected to the outer side of the transverse screw rod and the longitudinal screw rod.

[0011] Furthermore, four slide grooves slidably connected to the corresponding movable plates are provided on the top of the rotating box, and two side grinding plates are fixedly installed on the adjacent sides of the left and right movable plates, and outer clamping plates are fixedly installed on the adjacent sides of the front and rear movable plates.

[0012] Furthermore, the first adjusting member includes an adjusting motor 1 which is fixedly mounted on the top of the mounting plate, and the output shaft of which slides through the mounting plate. An adjusting plate is fixedly mounted on the outer side of the output shaft of the adjusting motor 1. An adjusting groove 1 and an adjusting groove 2 are provided on the adjusting plate. A plurality of through grooves are provided on the bottom of the mounting plate. Adjusting rod 1 and adjusting rod 2 are fixedly mounted on sliding rod 1 and sliding rod 2 respectively. Adjusting rod 1 and adjusting rod 2 respectively pass through the corresponding through grooves and are slidably connected to the corresponding adjusting groove 1 and adjusting groove 2 respectively.

[0013] Furthermore, the second adjusting member includes a mounting cover fixedly mounted on the bottom of the rotating box and slidingly passing through the workbench, and an adjusting motor 2 fixedly mounted on the inner wall of the bottom of the mounting cover. A driving bevel gear is fixedly mounted on the top of the output shaft of the adjusting motor 2, and a driven bevel gear meshing with the driving bevel gear is fixedly sleeved on one end of the transverse screw rod and the longitudinal screw rod.

[0014] Furthermore, a locking bearing is fixedly sleeved at the bottom end of an output shaft of the adjusting motor, and a bearing slot matched with the locking bearing is opened at the top of the rotating box. When the locking bearing is inserted into the bearing slot, the horizontal direction of the first grinding piece is limited and strengthened.

[0015] Furthermore, the first driving component includes guide rails fixedly installed on the inner walls on the left and right sides of the gantry and a lifting frame slidably connected between the two guide rails and fixedly connected to the output end of the cylinder, a driving motor 1 is fixedly installed at the bottom of the lifting frame, and a mounting frame fixedly connected to the mounting plate and covered on the outside of the adjusting motor 1 is fixedly installed at the bottom end of the output shaft of the driving motor 1, and two connecting plates are symmetrically installed on the outside of the mounting frame.

[0016] Furthermore, the second driving member includes a U-shaped frame fixedly installed at the bottom of the workbench and a second driving motor fixedly installed at the bottom of the U-shaped frame, and the output shaft of the second driving motor slides through the U-shaped frame and is fixedly connected to the mounting cover.

[0017] The present invention also provides a method for surface finishing of silicon carbide products, which is completed in cooperation with the above-mentioned device for surface finishing of silicon carbide products, and specifically includes the following steps: S1, placing the silicon carbide ceramic sealing ring to be finished on the top of the second grinding piece and fixing the silicon carbide ceramic sealing ring through the second grinding piece, while controlling the first grinding piece to be close to the top surface and inner side surface of the silicon carbide ceramic sealing ring.

[0018] S2. The first driving member drives the first grinding member to rotate to grind and fine-process the top surface and the inner side surface of the silicon carbide ceramic sealing ring.

[0019] S3. After the inner side surface and the top surface of the silicon carbide ceramic sealing ring are polished, the first polishing piece is controlled to internally support and fix the silicon carbide ceramic sealing ring, and at the same time, the second polishing piece is controlled to be close to the outer side surface of the silicon carbide ceramic sealing ring.

[0020] S4. The second driving member drives the second grinding member to rotate at a high speed to grind and fine-process the outer side surface and the bottom surface of the silicon carbide ceramic sealing ring.

[0021] The beneficial effects of the present invention are: 1. By adjusting the first grinding piece and the second grinding piece, the silicon carbide ceramic sealing ring does not need to be moved during the entire grinding process, so that each surface of the silicon carbide ceramic sealing ring can be polished and fine-processed, thereby not only ensuring the consistency of the processing quality of each surface and improving the overall performance of the sealing ring, but also realizing the function of polishing multiple surfaces of the silicon carbide ceramic sealing ring at one time, thereby shortening the processing cycle and improving the grinding efficiency.

[0022] 2. The positions of the side grinding plate 1 and the inner support plate are controlled respectively by moving the adjusting rod 1 and the adjusting rod 2, so as to adapt to silicon carbide ceramic sealing rings of different sizes, and then process silicon carbide products of different specifications, thereby improving the versatility and flexibility of the device.

[0023] 3. By respectively moving the adjusting rod 1 and the adjusting rod 2 through the adjusting slot 1 and the adjusting slot 2, the sliding rod 1 and the sliding rod 2 are adjusted to ensure that the side grinding sheet 1 fits tightly with the inner side of the silicon carbide ceramic sealing ring, thereby avoiding the problem of uneven grinding caused by the insufficient fit between the side grinding sheet 1 and the silicon carbide ceramic sealing ring.

[0024] 4. Through the cooperation of the locking bearing and the bearing slot, the first grinding piece can be locked and limited in the horizontal direction to ensure that the first grinding piece will not move in the horizontal direction, thereby improving the grinding accuracy. At the same time, during the grinding process, the locking limit can enhance the stability of the first grinding piece and prevent the first grinding piece from shifting due to uneven force or excessive vibration, thereby further improving the grinding accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a three-dimensional structural schematic diagram of the present invention.

[0026] Figure 2 It is a schematic diagram of the three-dimensional structure of the first finishing unit, the second finishing unit, the gantry, the cylinder and the workbench of the present invention.

[0027] Figure 3 It is a three-dimensional structural schematic diagram of the driving motor 1, the upper grinding plate, the side grinding plate 2, the slide groove and the U-shaped frame part of the present invention.

[0028] Figure 4 It is a three-dimensional structural schematic diagram of the mounting frame, the outer clamping plate, the moving plate, the rotating box and the driving motor of the present invention.

[0029] Figure 5 It is a three-dimensional structural schematic diagram of a connecting plate, a side grinding plate, an inner support plate, an adjusting motor and a part of a driving motor of the present invention.

[0030] Figure 6It is a schematic diagram of the three-dimensional structure of the silicon carbide ceramic sealing ring, the mounting cover, the U-shaped frame, the slide groove and the side grinding plate of the present invention.

[0031] Figure 7 It is a three-dimensional structural schematic diagram of an inner support plate, a side grinding sheet 1, an adjustment groove 1, an adjustment groove 2 and a part of a slide rod of the present invention.

[0032] Figure 8 It is an exploded view of the three-dimensional structure of the regulating motor 1, the regulating disk, the regulating rod 1, the regulating rod 2 and the sliding rod 2 of the present invention.

[0033] Fig. 9 It is a three-dimensional structural schematic diagram of the shaft sleeve, the rotating box, the transverse screw rod, the longitudinal screw rod, the second side grinding sheet and the outer clamping plate of the present invention.

[0034] Fig.10 It is a schematic diagram of the three-dimensional structure of the movable plate, the driving bevel gear and the driven bevel gear of the present invention.

[0035] In the figure: 1, machine body; 2, workbench; 3, gantry; 4, cylinder; 5, first finishing unit; 6, second finishing unit; 7, locking bearing; 8, bearing slot; 9, silicon carbide ceramic sealing ring; 501, first grinding member; 502, first adjusting member; 503, first driving member; 5011, mounting plate; 5012, mounting slot 1; 5013, mounting slot 2; 5014, slide bar 1; 5015, slide bar 2; 5016, side grinding sheet 1; 5017, inner support plate; 5018, connecting plate; 5019, upper grinding sheet; 5021, adjusting motor 1; 5022, adjusting plate; 5023, adjusting slot 1; 5024, adjusting slot 2; 50 25. Adjustment rod one; 5026. Adjustment rod two; 5027. Through slot; 5031. Guide rail; 5032. Lifting frame; 5033. Drive motor one; 5034. Mounting frame; 601. Second grinding piece; 602. Second adjustment piece; 603. Second drive piece; 6011. Rotating box; 6012. Bushing; 6013. Horizontal screw rod; 6014. Longitudinal screw rod; 6015. Moving plate; 6016. Side grinding sheet two; 6017. Outer clamping plate; 6018. Slide slot; 6021. Mounting cover; 6022. Adjustment motor two; 6023. Drive bevel gear; 6024. Driven bevel gear; 6031. U-shaped frame; 6032. Drive motor two. DETAILED DESCRIPTION

[0036] The subject matter described herein will now be discussed with reference to example embodiments. It should be understood that the discussion of these embodiments is to enable those skilled in the art to better understand and implement the subject matter described herein. The functions and arrangements of the elements discussed may be changed without departing from the scope of protection of the present specification. Various examples may omit, replace or add various processes or components as needed. In addition, the features described relative to some examples may also be combined in other examples.

[0037] See also Figure 1 and Figure 2 In this embodiment, a surface finishing device for silicon carbide products is proposed, including a body 1, a workbench 2 fixedly installed on the top of the body 1 and a gantry 3 fixedly installed on the top of the workbench 2, a cylinder 4 is fixedly installed on the top of the gantry 3, and a first finishing unit 5 is arranged at the output end of the cylinder 4, and a second finishing unit 6 is arranged on the workbench 2 to cooperate with the first finishing unit 5 to grind the silicon carbide ceramic sealing ring 9, the first finishing unit 5 includes a first driving member 503 installed on the gantry 3, a first grinding member 501 installed on the first driving member 503 and a first adjusting member 502 installed on the first grinding member 501, the first driving member 503 is used to drive the first grinding member 501, the second finishing unit 6 includes a second grinding member 601 installed on the top of the workbench 2, a second adjusting member 602 installed on the second grinding member 601 and a second driving member 603 installed at the bottom of the workbench 2 and used to drive the second grinding member 601.

[0038] See also Figure 1 , Figure 2 and Figure 3 The first driving member 503 includes a guide rail 5031 fixedly installed on the inner walls of the left and right sides of the gantry 3 and a lifting frame 5032 slidably connected between the two guide rails 5031 and fixedly connected to the output end of the cylinder 4, and a driving motor 5033 is fixedly installed at the bottom of the lifting frame 5032.

[0039] See also Figure 4 , Figure 5 , Figure 7 , Figure 8The first grinding member 501 includes a mounting plate 5011 and a plurality of mounting grooves 1 5012 and a plurality of mounting grooves 2 5013 which are circumferentially arranged on the mounting plate 5011 and alternate with each other. The first adjusting member 502 includes an adjusting motor 1 5021 which is fixedly mounted on the top of the mounting plate 5011 and whose output shaft slides through the mounting plate 5011. The bottom end of the output shaft of the driving motor 1 5033 is fixedly mounted with a motor 1 5033 which is fixedly connected to the mounting plate 5011 and is covered by the adjusting motor 1 50 The mounting frame 5034 on the outside of 21, the mounting slot 1 5012 and the mounting slot 2 5013 are slidably connected with a slide bar 1 5014 and a slide bar 2 5015 respectively, and the slide bar 1 5014 and the slide bar 2 5015 are fixedly installed with a side grinding sheet 1 5016 and an inner support plate 5017 at one end away from the mounting plate 5011 respectively, and two left-right symmetrical connecting plates 5018 are fixedly installed on the outside of the mounting frame 5034, and an upper grinding sheet 5019 is commonly installed on the outside of the two connecting plates 5018.

[0040] See also Figure 4 , Figure 6 , Figure 7 , Fig. 9 and Fig.10 The second grinding piece 601 includes a rotating box 6011 rotatably mounted on the top of the workbench 2, a locking bearing 7 is fixedly sleeved at the bottom end of the output shaft of the adjusting motor 5021, and a bearing slot 8 matched with the locking bearing 7 is opened on the top of the rotating box 6011. When the locking bearing 7 is inserted into the bearing slot 8, the horizontal direction of the first grinding piece 501 is limited and strengthened.

[0041] During specific use, first, the silicon carbide ceramic sealing ring 9 to be finely processed is placed on the second grinding piece 601 and the silicon carbide ceramic sealing ring 9 is fixed by the second grinding piece 601, then, the cylinder 4 is started, and the output end of the cylinder 4 pushes the lifting frame 5032 to slide downward along the guide rail 5031, thereby driving the upper grinding plate 5019 and the mounting plate 5011 to move downward through the mounting frame 5034 until the locking bearing 7 is inserted into the bearing slot 8, and the output end of the cylinder 4 stops. At this time, the upper grinding plate 5019 is close to the top surface of the silicon carbide ceramic sealing ring 9, and the first grinding piece 501 can be locked and limited in the horizontal direction through the cooperation of the locking bearing 7 and the bearing slot 8, to ensure that the first grinding piece 501 does not move in the horizontal direction. It will move, thereby improving the grinding accuracy. At the same time, during the grinding process, the locking limit can enhance the stability of the first grinding piece 501 and prevent the first grinding piece 501 from shifting due to uneven force or excessive vibration, thereby further improving the grinding accuracy. Then, the side grinding sheet 5016 is controlled to be close to the inner side of the silicon carbide ceramic sealing ring 9 through the first adjusting piece 502, and then the driving motor 5033 is started. The output shaft of the driving motor 5033 rotates to drive the mounting frame 5034 to rotate, thereby driving the mounting disk 5011 and the upper grinding sheet 5019 to rotate, and then driving the upper grinding sheet 5019 and several side grinding sheets 5016 to rotate at high speed, and the top surface and inner side surface of the silicon carbide ceramic sealing ring 9 are ground and finished.

[0042] When the inner side surface and top surface of the silicon carbide ceramic sealing ring 9 are polished, the first adjusting member 502 is used to control the inner support plate 5017 to be close to the silicon carbide ceramic sealing ring 9, so as to internally support and fix the silicon carbide ceramic sealing ring 9. At the same time, the side polishing sheet 5016 is separated from the silicon carbide ceramic sealing ring 9, and then the silicon carbide ceramic sealing ring 9 is polished by the second polishing member 601. By adjusting the first polishing member 501 and the second polishing member 601, the silicon carbide ceramic sealing ring 9 does not need to be moved during the entire polishing process, so that each surface of the silicon carbide ceramic sealing ring 9 can be polished and finely processed, thereby ensuring the consistency of the processing quality of each surface and improving the overall performance of the sealing ring, and multiple surfaces of the silicon carbide ceramic sealing ring 9 can be polished at one time, thereby shortening the processing cycle and improving the polishing efficiency.

[0043] See also Figure 2 , Figure 7 and Figure 8The first adjusting member 502 also includes an adjusting disk 5022 fixedly mounted on the outer side of the output shaft of the adjusting motor 1 5021, and an adjusting slot 1 5023 and an adjusting slot 2 5024 are provided on the adjusting disk 5022. A plurality of through slots 5027 are provided at the bottom of the mounting disk 5011. The sliding rod 1 5014 and the sliding rod 2 5015 are respectively fixedly mounted with an adjusting rod 1 5025 and an adjusting rod 2 5026. The adjusting rod 1 5025 and the adjusting rod 2 5026 respectively pass through the corresponding through slots 5027 and are respectively slidably connected with the corresponding adjusting slot 1 5023 and the adjusting slot 2 5024. The adjusting slot 1 5023 and the adjusting slot 2 5024 correspond to each other one by one and are symmetrically distributed.

[0044] During specific use, when the locking bearing 7 is inserted into the bearing slot 8, the adjusting motor 5021 is started, and the output shaft of the adjusting motor 5021 rotates to drive the adjusting disk 5022 to rotate, thereby respectively moving the adjusting rod 1 5025 and the adjusting rod 2 5026 through the adjusting slot 1 5023 and the adjusting slot 2 5024, and then driving the sliding rod 1 5014 to move toward the side close to the silicon carbide ceramic sealing ring 9 through the adjusting rod 1 5025, and driving the sliding rod 2 5015 to move away from the silicon carbide ceramic sealing ring 9 through the adjusting rod 2 5026, so that the inner support plate 5017 is away from the silicon carbide ceramic sealing ring 9, and at the same time, the side grinding sheet 1 5016 is close to the inner side of the silicon carbide ceramic sealing ring 9, and then, the top surface and the inner side surface of the silicon carbide ceramic sealing ring 9 are polished and finished.

[0045] When the inner side and top surface of the silicon carbide ceramic sealing ring 9 are polished, the adjusting motor 5021 is started, and the output shaft of the adjusting motor 5021 rotates to drive the adjusting disk 5022 to rotate, and the adjusting rod 1 5025 and the adjusting rod 2 5026 are respectively moved through the adjusting slot 1 5023 and the adjusting slot 2 5024, and the sliding rod 1 5014 is driven by the adjusting rod 1 5025 to move to the side away from the silicon carbide ceramic sealing ring 9, and the sliding rod 2 5015 is driven by the adjusting rod 2 5026 to move to the side close to the silicon carbide ceramic sealing ring 9, so that the inner support plate 5017 is close to the silicon carbide ceramic sealing ring 9, and the silicon carbide ceramic sealing ring 9 is internally supported and fixed, and at the same time, the side polishing sheet 1 5016 is separated from the silicon carbide ceramic sealing ring 9, and then the silicon carbide ceramic sealing ring 9 is polished by the second polishing piece 601.

[0046] By respectively moving the adjusting rod 1 5025 and the adjusting rod 2 5026 through the adjusting groove 1 5023 and the adjusting groove 2 5024, the sliding rod 1 5014 and the sliding rod 2 5015 are adjusted, which can ensure that the side grinding plate 1 5016 and the inner side surface of the silicon carbide ceramic sealing ring 9 are tightly fitted, thereby avoiding the problem of uneven grinding caused by the insufficient fit between the side grinding plate 1 5016 and the silicon carbide ceramic sealing ring 9, and the movement of the adjusting rod 1 5025 and the adjusting rod 2 5026 can respectively control the positions of the sliding rod 1 5014 (driving the side grinding plate 1 5016) and the sliding rod 2 5015 (driving the inner support plate 5017), so as to adapt to silicon carbide ceramic sealing rings 9 of different sizes, and then can process silicon carbide products of different specifications, thereby improving the versatility and flexibility of the device.

[0047] See also Figure 2 , Figure 3 , Figure 4 , Figure 6 , Fig. 9 and Fig.10 The second grinding member 601 also includes four shaft sleeves 6012 fixedly installed on the inner wall of the top of the rotating box 6011 and distributed in a circle, and a transverse screw rod 6013 is rotatably installed in the left and right shaft sleeves 6012, and a longitudinal screw rod 6014 is rotatably installed in the front and rear shaft sleeves 6012, and a movable plate 6015 is threadedly connected to the outer side of the transverse screw rod 6013 and the longitudinal screw rod 6014. The top of the rotating box 6011 is provided with grinding particles, which is a grinding surface. Four sliding grooves 6018 that are slidably connected to the corresponding movable plates 6015 are opened on the top of the rotating box 6011. A side grinding sheet 2 6016 is fixedly installed on the adjacent side of the left and right movable plates 6015, and an outer clamping plate 6017 is fixedly installed on the adjacent side of the front and rear movable plates 6015.

[0048] See also Figure 2 , Figure 4 , Figure 6 , Fig. 9 and Fig.10 The second driving member 603 includes a U-shaped frame 6031 fixedly installed at the bottom of the workbench 2 and a driving motor 6032 fixedly installed at the bottom of the U-shaped frame 6031. The second adjusting member 602 includes a mounting cover 6021 fixedly installed at the bottom of the rotating box 6011 and sliding through the workbench 2. The output shaft of the driving motor 6032 slides through the U-shaped frame 6031 and is fixedly connected to the mounting cover 6021.

[0049] When used specifically, after the silicon carbide ceramic sealing ring 9 to be finely processed is placed on the top of the rotating box 6011, the front and rear outer clamping plates 6017 are controlled to approach each other by the second adjusting member 602 to clamp and fix the silicon carbide ceramic sealing ring 9. Then, the inner side surface and the top surface of the silicon carbide ceramic sealing ring 9 are finely polished by the first polishing member 501. After the inner side surface and the top surface of the silicon carbide ceramic sealing ring 9 are polished, the inner support plate 5017 is controlled by the first adjusting member 502 to internally support and fix the silicon carbide ceramic sealing ring 9. After the sealing ring 9 is formed, the front and rear outer clamping plates 6017 are controlled by the second adjusting member 602 to move away from each other and separate from the silicon carbide ceramic sealing ring 9. At the same time, the left and right side grinding discs 6016 are close to and close to the outer side surface of the silicon carbide ceramic sealing ring 9, and then the driving motor 6032 is started. The output shaft of the driving motor 6032 rotates to drive the mounting cover 6021 to rotate, thereby driving the rotating box 6011 and the side grinding disc 6016 to rotate at high speed, and the outer side surface and bottom surface of the silicon carbide ceramic sealing ring 9 are polished and finished.

[0050] See also Figure 2 , Figure 4 , Figure 6 , Fig. 9 and Fig.10 The second adjusting member 602 also includes an adjusting motor 6022 fixedly mounted on the bottom inner wall of the mounting cover 6021, a driving bevel gear 6023 is fixedly mounted on the top of the output shaft of the adjusting motor 6022, and a driven bevel gear 6024 meshing with the driving bevel gear 6023 is fixedly sleeved on one end of the transverse screw rod 6013 and the longitudinal screw rod 6014.

[0051] During specific use, after the silicon carbide ceramic sealing ring 9 to be finely processed is placed on the top of the rotating box 6011, the adjusting motor 2 6022 is started, and the output shaft of the adjusting motor 2 6022 rotates to drive the driving bevel gear 6023 to engage with the driven bevel gear 6024, thereby driving the transverse screw 6013 and the longitudinal screw 6014 to rotate, and then driving the movable plates 6015 on the left and right sides to move away from each other, and the movable plates 6015 on the front and back sides to move closer to each other, so that the two side grinding plates 6016 are away from the silicon carbide ceramic sealing ring 9, and at the same time, the two outer clamping plates 6017 are close to each other, the silicon carbide ceramic sealing ring 9 is clamped and fixed, and then the silicon carbide ceramic sealing ring 9 is polished by the first polishing piece 501.

[0052] When the inner side and top surfaces of the silicon carbide ceramic sealing ring 9 are polished and the inner support plate 5017 is controlled by the first adjusting member 502 to support and fix the silicon carbide ceramic sealing ring 9, the adjusting motor 6022 is started, and the output shaft of the adjusting motor 6022 rotates to drive the driving bevel gear 6023 to engage with the driven bevel gear 6024, thereby driving the transverse screw 6013 and the longitudinal screw 6014 to rotate, thereby making the two side grinding plates 6016 close to the silicon carbide ceramic sealing ring 9, and at the same time, the two outer clamping plates 6017 move away from each other, releasing the clamping fixation of the silicon carbide ceramic sealing ring 9, and then the silicon carbide ceramic sealing ring 9 is polished by the second grinding member 601.

[0053] See also Figure 3 , Figure 4 , Figure 5 , Figure 7 , Figure 8 and Fig. 9 In this embodiment, a method for surface finishing of silicon carbide products is proposed, which is completed by using the above-mentioned silicon carbide product surface finishing device, and specifically includes the following steps: S1, placing the silicon carbide ceramic sealing ring 9 to be finished on the top of the rotating box 6011 and fixing the silicon carbide ceramic sealing ring 9 through two outer clamping plates 6017, while controlling the upper grinding sheet 5019 and the side grinding sheet 5016 to be close to the top surface and inner side surface of the silicon carbide ceramic sealing ring 9.

[0054] S2. The driving motor 5033 drives the upper grinding disc 5019 and the side grinding discs 5016 to rotate at high speed to grind and fine-process the top surface and inner side surface of the silicon carbide ceramic sealing ring 9.

[0055] S3. After the inner side and top surface of the silicon carbide ceramic sealing ring 9 are polished, the inner support plate 5017 is controlled to internally support and fix the silicon carbide ceramic sealing ring 9. At the same time, the side polishing sheet 2 6016 is controlled to be close to the outer side surface of the silicon carbide ceramic sealing ring 9.

[0056] S4, the second driving motor 6032 drives the rotating box 6011 and the second side grinding plate 6016 to rotate at high speed to grind and finish the outer side surface and bottom surface of the silicon carbide ceramic sealing ring 9.

[0057] Finally, it should be noted that: Obviously, the above embodiments are only examples for clearly explaining the present invention, and are not intended to limit the implementation methods. For ordinary technicians in the relevant field, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from this are still within the scope of protection of the present invention.

Claims

1. A surface finishing device for silicon carbide products, characterized in that: include: A machine body (1), a workbench (2) fixedly mounted on the top of the machine body (1), and a gantry (3) fixedly mounted on the top of the workbench (2); a cylinder (4) fixedly mounted on the top of the gantry (3); a first finishing unit (5) being arranged at the output end of the cylinder (4); a second finishing unit (6) being arranged on the workbench (2) and cooperating with the first finishing unit (5) to grind the silicon carbide ceramic sealing ring (9); the first finishing unit (5) comprising a first driving member (503) mounted on the gantry (3); a first grinding member (501) mounted on a first driving member (503) and a first adjusting member (502) mounted on the first grinding member (501), the first driving member (503) being used to drive the first grinding member (501), the second finishing unit (6) comprising a second grinding member (601) mounted on the top of the workbench (2), a second adjusting member (602) mounted on the second grinding member (601), and a second driving member (603) mounted on the bottom of the workbench (2) and being used to drive the second grinding member (601); The first grinding member (501) comprises a mounting plate (5011) and a plurality of mounting grooves 1 (5012) and a plurality of mounting grooves 2 (5013) which are circumferentially opened on the mounting plate (5011) and alternate with each other, wherein a slide bar 1 (5014) and a slide bar 2 (5015) are slidably connected in the mounting grooves 1 (5012) and 2 (5013), respectively, and a side grinding sheet 1 (5016) and an inner support plate (5017) are fixedly mounted on the ends of the slide bar 1 (5014) and the slide bar 2 (5015) away from the mounting plate (5011); The first grinding member (501) further comprises two connecting plates (5018) mounted on the first driving member (503), and upper grinding plates (5019) are mounted on the outer sides of the two connecting plates (5018); The second grinding member (601) comprises a rotating box (6011) rotatably mounted on the top of the workbench (2) and four shaft sleeves (6012) fixedly mounted on the inner wall of the top of the rotating box (6011) and distributed in a circle, wherein a transverse screw rod (6013) is rotatably mounted in the left and right shaft sleeves (6012), and a longitudinal screw rod (6014) is rotatably mounted in the front and rear shaft sleeves (6012), and a movable plate (6015) is threadedly connected to the outer sides of the transverse screw rod (6013) and the longitudinal screw rod (6014); The top of the rotating box (6011) is provided with four sliding grooves (6018) slidably connected to the corresponding moving plates (6015); a second side grinding plate (6016) is fixedly installed on the adjacent sides of the left and right moving plates (6015); and an outer clamping plate (6017) is fixedly installed on the adjacent sides of the front and rear moving plates (6015); The first adjusting member (502) comprises an adjusting motor 1 (5021) fixedly mounted on the top of the mounting plate (5011), and the output shaft of which slides through the mounting plate (5011); an adjusting plate (5022) is fixedly mounted on the outer side of the output shaft of the adjusting motor 1 (5021); an adjusting groove 1 (5023) and an adjusting groove 2 (5024) are provided on the adjusting plate (5022); a plurality of through grooves (5027) are provided on the bottom of the mounting plate (5011); an adjusting rod 1 (5025) and an adjusting rod 2 (5026) are fixedly mounted on the sliding rod 1 (5014) and the sliding rod 2 (5015), respectively; the adjusting rod 1 (5025) and the adjusting rod 2 (5026) respectively pass through the corresponding through grooves (5027) and are slidably connected to the corresponding adjusting groove 1 (5023) and the adjusting groove 2 (5024); The second adjusting member (602) comprises a mounting cover (6021) fixedly mounted on the bottom of the rotating box (6011) and slidingly passing through the workbench (2), and a second adjusting motor (6022) fixedly mounted on the inner wall of the bottom of the mounting cover (6021); a driving bevel gear (6023) is fixedly mounted on the top of the output shaft of the second adjusting motor (6022); and a driven bevel gear (6024) meshing with the driving bevel gear (6023) is fixedly sleeved on the ends of the transverse screw rod (6013) and the longitudinal screw rod (6014); The first adjusting member (502) and the second adjusting member (602) respectively control the first grinding member (501) and the second grinding member (601) to perform adjustment switching between grinding and fixing the silicon carbide ceramic sealing ring (9), so as to perform all-round grinding of the inner side surface, top surface, outer side surface and bottom surface of the silicon carbide ceramic sealing ring (9).

2. A silicon carbide product surface finishing device according to claim 1, characterized in that: A locking bearing (7) is fixedly sleeved at the bottom end of the output shaft of the regulating motor 1 (5021), and a bearing slot (8) adapted to the locking bearing (7) is opened at the top of the rotating box (6011). When the locking bearing (7) is inserted into the bearing slot (8), the first grinding member (501) is limited and strengthened in the horizontal direction.

3. A silicon carbide product surface finishing device according to claim 1, characterized in that: The first driving member (503) comprises guide rails (5031) fixedly mounted on the inner walls on the left and right sides of the gantry (3) and a lifting frame (5032) slidably connected between the two guide rails (5031) and fixedly connected to the output end of the cylinder (4); a driving motor 1 (5033) is fixedly mounted on the bottom of the lifting frame (5032); a mounting frame (5034) fixedly connected to the mounting plate (5011) and covering the outside of the adjusting motor 1 (5021) is fixedly mounted on the bottom end of the output shaft of the driving motor 1 (5033); and two connecting plates (5018) are symmetrically mounted on the outside of the mounting frame (5034).

4. A silicon carbide product surface finishing device according to claim 1, characterized in that: The second driving member (603) comprises a U-shaped frame (6031) fixedly mounted on the bottom of the workbench (2) and a second driving motor (6032) fixedly mounted on the bottom of the U-shaped frame (6031); an output shaft of the second driving motor (6032) slides through the U-shaped frame (6031) and is fixedly connected to the mounting cover (6021).

5. A method for surface finishing of a silicon carbide product, characterized in that: The process is completed by using a silicon carbide product surface finishing device as claimed in any one of claims 1 to 4, and specifically comprises the following steps: S1, placing the silicon carbide ceramic sealing ring (9) to be finely processed on the top of the second grinding piece (601) and fixing the silicon carbide ceramic sealing ring (9) through the second grinding piece (601), while controlling the first grinding piece (501) to be in close contact with the top surface and inner side surface of the silicon carbide ceramic sealing ring (9); S2, the first driving member (503) drives the first grinding member (501) to rotate, and grinds and finishes the top surface and the inner side surface of the silicon carbide ceramic sealing ring (9); S3, after the inner side surface and the top surface of the silicon carbide ceramic sealing ring (9) have been polished, the first polishing member (501) is controlled to internally support and fix the silicon carbide ceramic sealing ring (9), and at the same time, the second polishing member (601) is controlled to be in close contact with the outer side surface of the silicon carbide ceramic sealing ring (9); S4. The second driving member (603) drives the second grinding member (601) to rotate at a high speed to grind and fine-process the outer side surface and the bottom surface of the silicon carbide ceramic sealing ring (9).

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