Accurate liquid separation system and liquid separation method

Abstract

The invention belongs to the technical field of liquid separation, and particularly relates to a precise liquid separation system and a liquid separation method. The precise liquid separation system comprises a rotary cutting liquid separation valve, one end of the rotary cutting liquid separation valve is provided with a pipeline connector assembly, and the pipeline connector assembly comprises a to-be-distributed liquid inlet, a to-be-distributed liquid outlet, a gas inlet, a gas outlet, a cleaning liquid inlet and a cleaning liquid outlet. At least one quantitative pipe is arranged at the other end of the rotary cutting liquid separating valve, and the pipeline connector assemblies at the two ends of the rotary cutting liquid separating valve can be communicated with the quantitative pipes. According to the liquid separation rotary-cut valve, communication between different pipeline connector assemblies and quantitative pipes with different capacities is achieved through running fit of the three valve plates, different media communicated with the different pipeline connector assemblies correspond to different functions, and therefore matching of multiple functions and multiple capacities of the liquid separation rotary-cut valve is achieved, accurate quantification is achieved, a traditional rubber pump is replaced, and cost is saved.

Description

Technical Field

[0001] The present invention belongs to the field of liquid separation technology, and in particular relates to a precise liquid separation system and a liquid separation method. Background Art

[0002] The micro-dispensing pump is one of the key devices for taking a trace amount of photoresist, with high-precision flow control and pressure regulation functions. It can accurately control the amount of photoresist taken to ensure accuracy in the photolithography process. The core indicators of the micro-dispensing pump include dispensing repeatability, accuracy, stability, flow accuracy, degree of automation and applicability, etc. These indicators jointly determine the performance and application range of the equipment, and are of great significance for ensuring the accuracy and reliability of experiments and treatments. Among them, dispensing repeatability refers to the consistency between the dispensing amounts of the micro-dispensing pump when dispensing the same volume of liquid multiple times. High repeatability means that the volume of liquid dispensed each time is very close, which is particularly important for experiments or treatment processes that require highly precise control of the amount of liquid; accuracy refers to the deviation between the actual volume of liquid dispensed by the micro-dispensing pump and the set value. High accuracy means that the actual dispensing amount is very close to the set value with almost no deviation; stability refers to the stability of the output flow of the equipment during long-term operation. High-stability equipment can ensure consistent liquid dispensing effects over a long period of time; flow accuracy refers to the minimum flow value that the equipment can achieve when dispensing liquid and the accuracy of flow control. Equipment with high flow accuracy can achieve more precise liquid distribution; the degree of automation refers to the degree to which the equipment can automatically complete liquid distribution. Highly automated equipment can reduce manual operations and improve experimental efficiency and accuracy; applicability refers to the ability of the equipment to be suitable for containers of different specifications and types and different types of liquids. Equipment with wide applicability can meet more diverse experimental and treatment needs.

[0003] However, although the micro-dispensing pump has guaranteed accuracy, its accuracy may be limited to a certain extent when the amount used is extremely small, affecting the uniformity and consistency of the photoresist. In addition, the micro-dispensing pump is relatively expensive and usually requires more detailed maintenance, which increases the maintenance cost and difficulty of use of the equipment. Summary of the invention

[0004] In view of the above deficiencies in the prior art, an object of the present invention is to provide a precise liquid separation system and a liquid separation method.

[0005] To achieve the above objectives, the technical solutions adopted are:

[0006] One of the objects of the present invention is to provide a precise liquid dispensing system, including a rotary cutting liquid dispensing valve, wherein one end of the rotary cutting liquid dispensing valve is provided with a pipeline interface assembly, and the pipeline interface assembly is provided with at least three groups, and the three groups of pipeline interface assemblies are respectively an inlet for liquid to be distributed and an outlet for liquid to be distributed, a gas inlet and a gas outlet, and an inlet for cleaning liquid and an outlet for cleaning liquid. The other end of the rotary cutting liquid dispensing valve is provided with at least one quantitative tube, and the pipeline interface assemblies and the quantitative tubes at both ends of the rotary cutting liquid dispensing valve can be connected to each other, the inlet for liquid to be distributed and the outlet for liquid to be distributed are respectively connected to a container for liquid to be distributed through pipelines, the gas inlet is connected to a gas container through a pipeline, the gas outlet is connected to a container for distributed liquid through a pipeline, the cleaning liquid inlet is connected to a cleaning liquid container through a pipeline, and the cleaning liquid outlet is connected to a waste liquid tank through a pipeline.

[0007] The beneficial effect of adopting the above technical solution is that the design of multiple groups of pipeline interface components enables the liquid separation valve to simultaneously meet the input and output requirements of multiple fluids, such as the separate processing of liquids, cleaning fluids and gases, thereby improving the integration and utilization efficiency of the equipment.

[0008] On the basis of the above technical solution, the present invention can also make the following improvements:

[0009] Furthermore, a peristaltic pump is provided between the liquid container to be dispensed and the liquid inlet to be dispensed, a suck-back valve is provided between the dispensed liquid container and the gas outlet, and a cleaning pump is provided between the cleaning liquid inlet and the cleaning liquid container.

[0010] The beneficial effect of adopting the above further technical solution is that the suckback valve can solve the problem of liquid dripping from the nozzle or needle after liquid dispensing, and the suckback valve sucks back the recovered liquid into the dispensed liquid container. If the viscosity of the photoresist used does not have the problem of dripping, the expensive suckback valve can be replaced with an ordinary two-way air-controlled valve.

[0011] Furthermore, a visual window is provided on the pipeline between the outlet for the liquid to be dispensed and the container for the liquid to be dispensed.

[0012] Furthermore, four quantitative tubes are provided, with capacities of 1 μl, 2 μl, 5 μl, 10 μl, or appropriate multiples thereof, such as 2 μl, 4 μl, 1 ml, 2 ml, and 5 ml.

[0013] The beneficial effect of adopting the above further technical solution is that the multiple is determined according to the actual liquid dispensing amount, so that multiple liquid dispensing does not need to be performed. Providing quantitative tubes of various capacities allows users to select liquid dispensing amounts of different capacities according to actual needs, increasing the flexibility and applicability of the equipment and improving the accuracy of experiments or production. The combination of the four capacities can combine the capacity requirements of any integer multiple of 1 microliter. For example, if 4 microliters of liquid are needed, a 2 microliter quantitative tube can be used to take two times.

[0014] Furthermore, the dispensed liquid container is any one of a nozzle, a dropper, and a sampling needle.

[0015] Furthermore, the rotary cutting liquid dividing valve includes a valve plate assembly, the valve plate assembly includes a middle valve plate and two outer valve plates, the two outer valve plates are respectively located on both sides of the middle valve plate, the middle valve plate is arranged on a base, the two outer valve plates can rotate relative to the middle valve plate, one of the outer valve plates is provided with a pipeline interface assembly on the side away from the middle valve plate, and the other outer valve plate is connected to a quantitative tube on the side away from the middle valve plate, a positioning optical coupler is provided on one side of the valve plate assembly, and the two outer valve plates are provided with optical coupling baffles corresponding to the positioning optical coupler.

[0016] The beneficial effect of adopting the above-mentioned further technical scheme is that: the connection between different pipeline interface components and quantitative tubes of different capacities is realized through the rotational cooperation of the three valve plates. Different pipeline interface components connect different media, corresponding to different functions, thereby realizing the multi-function and multi-capacity combination of the liquid separation rotary cutting valve, and realizing precise quantification; the positioning optical coupler has a positioning hole, and realizes the conversion of electrical signals to optical signals and then to electrical signals through the light-emitting diode (LED) and photosensitive element (such as phototransistor or photosensitive diode) inside it. When used in combination with a baffle on an outer valve plate and another outer valve plate, the position change of the baffle will change the intensity of the optical signal received by the photosensitive element, thereby changing the state of the output electrical signal, and then realizing the positioning function, thereby realizing the precise alignment and connection between the pipeline interface component and the quantitative tube.

[0017] Furthermore, an outer valve plate and another outer valve plate at both ends of the valve plate assembly are respectively connected to motors. Furthermore, each of the quantitative tubes includes two ports, the valve plate assembly is provided with a through hole that can penetrate, and the two ports of the quantitative tube can be connected to the pipeline inlet and the pipeline outlet respectively through the through hole of the valve plate assembly.

[0018] Furthermore, the quantitative tube is U-shaped, and both ends of the quantitative tube are connected to the other outer valve plate.

[0019] The beneficial effect of adopting the above further technical solution is that: the U-shaped structure preferably enters from the bottom and exits from the top, and can also be coiled into a ring shape, which helps to reduce the residual liquid in the quantitative tube.

[0020] Furthermore, the pipeline interface assemblies are evenly distributed on the surface of the outer valve plate. For example, when three pipeline interface assemblies are provided, the interval angle between adjacent groups of pipeline interface assemblies is 120 degrees.

[0021] Furthermore, the quantitative tubes are evenly distributed on the surface of the other outer valve plate. For example, when four quantitative tubes are provided, the interval angle between two adjacent quantitative tubes is 90 degrees.

[0022] The beneficial effect of adopting the above further technical solution is that the quantitative tubes and pipeline interface components are evenly distributed, which is convenient for control and alignment.

[0023] Furthermore, the gas is nitrogen.

[0024] The beneficial effect of adopting the above further technical solution is that as long as the gas is insoluble in the photoresist, nitrogen is preferred because of its high content in the atmosphere and low cost.

[0025] Furthermore, a pair of first through holes are provided on the middle valve plate.

[0026] Furthermore, the outer valve plate is provided with a second through hole connected to the pipeline interface assembly.

[0027] Furthermore, the other outer valve plate is provided with a third through hole communicating with the two ends of the quantitative tube.

[0028] The beneficial effect of adopting the above-mentioned further technical solution is that the through hole passing through the valve plate assembly, that is, the first through hole, the second through hole, and the third through hole mentioned above, are connected, so that a group of pipeline interface assemblies are connected to a quantitative tube. The setting of the through hole can allow media such as gas and liquid to pass through the outer valve plate, the middle valve plate, and the other outer valve plate from the pipeline inlet in sequence to enter one port of the quantitative tube. After filling the quantitative tube, it returns to the pipeline outlet from the other port of the quantitative tube through the other outer valve plate, the middle valve plate, and the outer valve plate, thereby being discharged from the rotary cutting valve.

[0029] Furthermore, mounting shafts are provided on both sides of the middle valve plate, and shaft holes matched with the mounting shafts are respectively provided on the two outer valve plates, and the two outer valve plates can rotate with the mounting shafts as the axis.

[0030] Furthermore, both ends of the valve plate assembly are connected to the motor via a coupling, and shaft sleeves are also provided at both ends of the valve plate assembly, and the shaft sleeves are connected to the coupling.

[0031] Furthermore, the motor is a stepper motor and is mounted on the base via a motor bracket.

[0032] The beneficial effect of adopting the above-mentioned further technical scheme is that the use of stepper motor makes the rotation and positioning of the valve plate more precise and easy to control through program, thereby improving the degree of automation of the equipment and the accuracy of liquid separation. For example, the speed, acceleration, rotation angle and zero position of the stepper motor can be set through the program, wherein the zero position is the middle value of the angle from the beginning when the optical coupler baffle completely blocks the light of the positioning optical coupler to the end when the optical coupler baffle completely blocks the light of the positioning optical coupler as the positioning zero point, and then by adjusting the rotation angle of the stepper motors at both ends, the outer valve plate and the other outer valve plate are driven to rotate to the corresponding angles respectively, thereby realizing the connection between different pipeline interface components and the positioning tube; the fixed installation of the motor bracket enhances the stability of the motor and reduces the influence of vibration on the performance of the equipment.

[0033] Furthermore, a corrugated gasket is provided between the coupling and the shaft sleeve.

[0034] The beneficial effects of adopting the above-mentioned further technical solution are: the corrugated gasket is low-cost and continuously applies a pre-tightening force in the direction of the outer valve plate. This design effectively prevents liquid leakage between the outer valve plate and the middle valve plate, improves the sealing performance of the equipment, and ensures the safety and reliability of the liquid separation process.

[0035] Furthermore, the positioning optical coupler is installed on the base through an optical coupler bracket.

[0036] Furthermore, the liquid to be dispensed is photoresist.

[0037] The second object of the present invention is to provide a precise liquid separation method, comprising the following steps:

[0038] (1) The liquid to be dispensed enters the quantitative tube of the rotary cutting and dispensing valve from the liquid to be dispensed inlet of the rotary cutting and dispensing valve and fills the quantitative tube;

[0039] (2) gas enters the quantitative tube of step (1) through the gas inlet of the rotary cutting liquid separation valve, and the liquid in the quantitative tube enters the dispensed liquid container through the gas outlet of the rotary cutting liquid separation valve;

[0040] (3) The cleaning liquid enters the quantitative tube from the cleaning liquid inlet of the rotary cutting liquid separating valve, and enters the waste liquid tank from the cleaning liquid outlet of the rotary cutting liquid separating valve.

[0041] Furthermore, the precise liquid separation method comprises the following specific steps:

[0042] (1) Under the drive of the motor, one outer valve plate and another outer valve plate of the rotary liquid-dispensing valve rotate, and the positioning function of the positioning optical coupler is used to connect the inlet and outlet of the liquid to be distributed on one outer valve plate with the two ports of a metering tube of required capacity on the other outer valve plate. Driven by the peristaltic pump, the liquid to be distributed passes through the liquid container from the inlet of the liquid to be distributed through one outer valve plate and the middle valve plate, and enters the metering tube from one port of the metering tube on the other outer valve plate. When the metering tube is full of the liquid to be distributed, it will flow from the other port of the metering tube through the middle valve plate and an outer valve plate to the outlet of the liquid to be distributed. The liquid can be seen from the visual window on the pipeline between the outlet of the liquid to be distributed and the container of the liquid to be distributed as it continues to flow, and the excess liquid to be distributed flows back into the container of the liquid to be distributed;

[0043] (2) An outer valve plate is driven to rotate by a motor so that a gas inlet and a gas outlet are connected to two ports of the above-mentioned metering tube. The gas passes through an outer valve plate and a middle valve plate from the gas inlet and enters the metering tube from one port of the metering tube. The liquid to be dispensed in the metering tube flows out from the gas outlet through the other port of the metering tube, enters the dispensed liquid container with the cooperation of the back-sucking valve, and finally drips onto the rotating wafer or other surface to be dispensed.

[0044] (3) The motor continues to drive an outer valve plate to rotate, so that the cleaning liquid inlet and the cleaning liquid outlet are connected to the two ends of the quantitative tube. Under the power of the cleaning pump, the cleaning liquid passes through the cleaning liquid inlet, an outer valve plate, and a middle valve plate into the quantitative tube, and is discharged from the cleaning liquid outlet through the other end of the quantitative tube, and flows to the waste liquid tank through the pipeline.

[0045] Furthermore, the positioning zero point is taken as the state in which the optical coupling baffles of one outer valve plate and the other outer valve plate completely block the light of the positioning optical coupling. At this time, the positioning tube of the pipeline interface assembly is preferably connected. For example, at this time, the inlet and outlet of the liquid to be distributed are connected to the two ends of the 1 microliter quantitative tube, which is the positioning zero point state.

[0046] Furthermore, the cleaning solution can be used repeatedly for cleaning until it is clean.

[0047] Furthermore, when it is necessary to continue to take other volumes of liquid to be dispensed, rotate another outer valve plate so that the inlet and outlet of the liquid to be dispensed are connected to the two ends of the metering tube of other capacity, and repeat the above operation. It should be noted that the 1 microliter metering tube is not strictly 1 microliter. The volume of the liquid to be dispensed including the middle valve plate is a total of 1 microliter, and the other metering tubes are set in the same way.

[0048] Compared with the prior art, the present invention has the following beneficial effects:

[0049] Significant cost reduction: no expensive rubber pump is needed, and a more economical and efficient alternative is adopted. For example, the rotary cutting liquid separation valve of the present invention can be used in combination with a peristaltic pump, etc., to achieve a significant cost reduction. This not only reduces the initial investment in the equipment, but also reduces the maintenance cost in long-term operation.

[0050] Enhanced system stability: The introduction of peristaltic pumps effectively reduces the system failure rate. With its unique working principle and simple mechanical structure, peristaltic pumps reduce the wear and blockage problems that traditional pumps may encounter, thereby improving the stability and reliability of the entire liquid separation system. This means less downtime and higher production efficiency.

[0051] The liquid separation accuracy is significantly improved: The present invention has achieved a qualitative leap in liquid separation accuracy. By optimizing the design of the valve plate assembly, the liquid separation repeatability, accuracy, stability, and flow accuracy are high. The liquid separation volume can be customized according to actual needs and is no longer limited to the fixed specifications provided by the supplier. This high degree of flexibility ensures precise control during experiments or production processes, and improves product quality and consistency.

[0052] Strong expandability and customizability: The present invention has good expansion potential and customizability. Users can easily add new pipeline interface components or functional modules according to actual needs. It has strong applicability, such as adding another cleaning agent or two different photoresists at the same time. This flexibility not only reduces the cost of modification, but also speeds up product iteration and meets the rapidly changing market needs.

[0053] Simplified maintenance and upgrades: Due to the modular design and easily replaceable components, the present invention is easy to maintain and upgrade. Once a component fails or needs to be upgraded, the user can quickly replace or upgrade it without large-scale modifications to the entire system. This reduces the difficulty and cost of maintenance and increases the overall service life of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] Figure 1 It is a structural diagram of the precise liquid separation system of the present invention;

[0055] Figure 2 It is a schematic diagram of the three-dimensional structure of the rotary cutting liquid separating valve of the present invention;

[0056] Figure 3 It is a top view of the rotary cutting liquid separating valve of the present invention;

[0057] Figure 4 It is an axonometric view of the rotary cutting liquid separating valve of the present invention;

[0058] Figure 5 An exploded view of the rotary cutting liquid separation valve of the present invention hiding the positioning optical coupler and the optical coupler bracket;

[0059] Figure 6 This is an exploded view from another perspective of the rotary cutting liquid dispensing valve of the present invention, which hides the positioning optical coupler and the optical coupler bracket.

[0060] The accompanying drawings are marked as follows: 1. an outer valve plate; 2. a middle valve plate; 3. another outer valve plate; 4. a base; 5. a metering tube; 6. a positioning optical coupler; 7. an optical coupler baffle; 801. an inlet for liquid to be dispensed; 802. an outlet for liquid to be dispensed; 803. a gas inlet; 804. a gas outlet; 805. an inlet for cleaning liquid; 806. an outlet for cleaning liquid; 9. a first through hole; 10. an installation shaft; 11. a coupling; 12. a motor; 13. a bushing; 14. a motor bracket; 15. a corrugated gasket; 16. an optical coupler bracket; 17. a rotary cutting liquid dispensing valve; 18. a container for liquid to be dispensed; 19. a gas container; 20. a container for dispensed liquid; 21. a container for cleaning liquid; 22. a waste liquid tank; 23. a peristaltic pump; 24. a back-suction valve; 25. a cleaning pump. DETAILED DESCRIPTION

[0061] The present invention is described below in conjunction with examples, which are only used to explain the present invention and are not used to limit the scope of the present invention.

[0062] In the description of the present invention, it should be noted that the terms "vertical", "up", "down", "horizontal", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0063] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0064] refer to Figures 1 to 6, a precise liquid dispensing system comprises a rotary cutting liquid dispensing valve 17, one end of the rotary cutting liquid dispensing valve 17 is provided with a pipeline interface component, and the pipeline interface components are arranged in at least three groups, and the three groups of pipeline interface components are respectively an inlet 801 for liquid to be distributed and an outlet 802 for liquid to be distributed, a gas inlet 803 and a gas outlet 804, and a cleaning liquid inlet 805 and a cleaning liquid outlet 806. The other end of the rotary cutting liquid dispensing valve 17 is provided with at least one quantitative tube 5, and the pipeline interface components at both ends of the rotary cutting liquid dispensing valve 17 can be connected to the quantitative tube 5 with each other, the inlet 801 for liquid to be distributed and the outlet 802 for liquid to be distributed are respectively connected to a container 18 for liquid to be distributed through pipelines, the gas inlet 803 is connected to a gas container 19 through a pipeline, the gas outlet 804 is connected to a container 20 for distributed liquid through a pipeline, the cleaning liquid inlet 805 is connected to a cleaning liquid container 21 through a pipeline, and the cleaning liquid outlet 806 is connected to a waste liquid tank 22 through a pipeline.

[0065] In this embodiment, a peristaltic pump 23 is provided between the liquid container 18 to be dispensed and the liquid inlet 801 to be dispensed, a suck-back valve 24 is provided between the dispensed liquid container 20 and the gas outlet 804 , and a cleaning pump 25 is provided between the cleaning liquid inlet 805 and the cleaning liquid container 21 .

[0066] In an optional embodiment, a visible window is provided on the pipeline between the outlet 802 for the liquid to be dispensed and the container 18 for the liquid to be dispensed.

[0067] In this embodiment, four quantitative tubes 5 are provided, and the capacities are 1 μl, 2 μl, 5 μl, 10 μl, or appropriate multiples thereof, such as 2 μl, 4 μl, 1 ml, 2 ml, and 5 ml.

[0068] As a preferred embodiment, the dispensed liquid container 20 is any one of a nozzle, a dropper, and a sampling needle.

[0069] In an optional embodiment, the rotary cutting liquid dividing valve 17 includes a valve plate assembly, the valve plate assembly includes a middle valve plate 2 and two outer valve plates, the two outer valve plates are respectively located on both sides of the middle valve plate 2, the middle valve plate 2 is arranged on a base 4, the two outer valve plates can rotate relative to the middle valve plate 2, one of the outer valve plates 1 is provided with a pipeline interface assembly on the side away from the middle valve plate 2, the other outer valve plate 3 is connected to a quantitative tube 5 on the side away from the middle valve plate 2, a positioning optical coupler 6 is provided on one side of the valve plate assembly, and the two outer valve plates are provided with an optical coupling baffle 7 corresponding to the positioning optical coupler 6.

[0070] In this embodiment, an outer valve plate 1 and another outer valve plate 3 located at two ends of the valve plate assembly are respectively connected to a motor 12 .

[0071] In this embodiment, each of the quantitative tubes 5 includes two ports, and the valve plate assembly is provided with a through hole that can penetrate through it. The two ports of the quantitative tube 5 can be connected to the pipeline inlet and the pipeline outlet respectively through the through hole of the valve plate assembly.

[0072] In this embodiment, the quantitative tube 5 is U-shaped, and both ends of the quantitative tube 5 are connected to the other outer valve plate 3 .

[0073] In an optional embodiment, the pipeline interface assemblies are evenly distributed on the surface of the outer valve plate 1. For example, when three pipeline interface assemblies are provided, the interval angle between adjacent groups of pipeline interface assemblies is 120 degrees.

[0074] In an optional embodiment, the quantitative tubes 5 are evenly distributed on the surface of the other outer valve plate 3. For example, when four quantitative tubes 5 are provided, the interval angle between two adjacent quantitative tubes 5 is 90 degrees.

[0075] In this embodiment, the gas is nitrogen.

[0076] In an optional embodiment, a pair of first through holes 9 are provided on the middle valve plate 2 .

[0077] In an optional embodiment, the outer valve plate 1 is provided with a second through hole connected to the pipeline interface assembly.

[0078] In this embodiment, the other outer valve plate 3 is provided with a third through hole communicating with two ends of the quantitative tube 5 .

[0079] As a preferred embodiment, mounting shafts 10 are provided on both sides of the middle valve plate 2, and shaft holes matching the mounting shafts 10 are respectively provided on the two outer valve plates, and the two outer valve plates can rotate around the mounting shafts 10 as the axis.

[0080] As a preferred embodiment, both ends of the valve plate assembly are connected to the motor 12 through a coupling 11 , and shaft sleeves 13 are also provided at both ends of the valve plate assembly, and the shaft sleeves 13 are connected to the coupling 11 .

[0081] In an optional embodiment, the motor 12 is a stepper motor 12 and is mounted on the base 4 via a motor bracket 14 .

[0082] In this embodiment, a corrugated gasket 15 is provided between the coupling 11 and the shaft sleeve 13 .

[0083] In an optional embodiment, the positioning optical coupler 6 is installed on the base 4 via an optical coupler bracket 16 .

[0084] As a preferred embodiment, the liquid to be dispensed is photoresist.

[0085] The second object of the present invention is to provide a precise liquid separation method, comprising the following steps:

[0086] (1) The liquid to be dispensed enters the quantitative tube 5 of the rotary cutting liquid dispensing valve 17 through the liquid to be dispensed inlet 801 of the rotary cutting liquid dispensing valve 17 and fills the quantitative tube 5;

[0087] (2) Gas enters the quantitative tube 5 of step (1) through the gas inlet 803 of the rotary cutting liquid separation valve 17, and the liquid in the quantitative tube 5 enters the dispensed liquid container 20 through the gas outlet 804 of the rotary cutting liquid separation valve 17;

[0088] (3) The cleaning liquid enters the quantitative tube 5 through the cleaning liquid inlet 805 of the rotary cutting and liquid separating valve 17 , and enters the waste liquid tank 22 through the cleaning liquid outlet 806 of the rotary cutting and liquid separating valve 17 .

[0089] Furthermore, the precise liquid separation method comprises the following specific steps:

[0090] (1) Under the drive of the motor 12, an outer valve plate 1 and another outer valve plate 3 of the rotary liquid-dispensing valve 17 rotate, and the positioning function of the positioning optical coupler 6 is used to connect the inlet 801 of the liquid to be distributed and the outlet 802 of the liquid to be distributed on the outer valve plate 1 with the two ports of a metering tube 5 of a required capacity on the other outer valve plate 3. Driven by the peristaltic pump 23, the liquid to be distributed passes through the liquid container 18 from the inlet 801 of the liquid to be distributed through the outer valve plate 1 and the middle valve plate 2, and enters the metering tube 5 from one port of the metering tube 5 on the other outer valve plate 3. When the metering tube 5 is filled with the liquid to be distributed, it will flow from the other port of the metering tube 5 through the middle valve plate 2 and an outer valve plate 1 to the outlet 802 of the liquid to be distributed. The liquid can be seen from the visual window on the pipeline between the outlet 802 of the liquid to be distributed and the liquid container 18. The excess liquid to be distributed flows back into the liquid container 18.

[0091] (2) The motor 12 drives an outer valve plate 1 to rotate, so that the gas inlet 803 and the gas outlet 804 are connected to the two ports of the metering tube 5. The gas passes through the outer valve plate 1 and the middle valve plate 2 from the gas inlet 803 and enters the metering tube 5 from one port of the metering tube 5. The liquid to be dispensed in the metering tube 5 flows out from the gas outlet 804 through the other port of the metering tube 5 and enters the dispensed liquid container 20 with the cooperation of the back-sucking valve 24.

[0092] (3) The motor 12 continues to drive an outer valve plate 1 to rotate, so that the cleaning liquid inlet 805 and the cleaning liquid outlet 806 are connected to the two ends of the quantitative tube 5. Under the power of the cleaning pump 25, the cleaning liquid enters the quantitative tube 5 through the cleaning liquid inlet 805 via an outer valve plate 1 and a middle valve plate 2, and is discharged from the cleaning liquid outlet 806 through the other end of the quantitative tube 5, and flows to the waste liquid tank 22 through the pipeline.

[0093] As a preferred embodiment, the optical coupling baffle 7 of one outer valve plate 1 and the other outer valve plate 3 completely blocks the light of the positioning optical coupling 6 as the positioning zero point. At this time, the preferred state of the pipeline interface assembly positioning tube is connected. For example, at this time, the inlet 801 of the liquid to be dispensed and the outlet 802 of the liquid to be dispensed are connected to the two ends of the 1 microliter quantitative tube 5, which is the positioning zero point state.

[0094] As a preferred embodiment, the cleaning solution can be used repeatedly for cleaning until it is clean.

[0095] As a preferred embodiment, when it is necessary to continue to take other volumes of liquid to be dispensed, rotate another outer valve plate 3 so that the inlet 801 of the liquid to be dispensed and the outlet 802 of the liquid to be dispensed are connected to the two ends of the quantitative tube 5 of other volumes, and repeat the above operation. It should be noted that the 1 microliter quantitative tube 5 is not strictly 1 microliter. The volume of the liquid to be dispensed together with the middle valve plate 2 is a total of 1 microliter, and the other quantitative tubes 5 are set in the same way.

[0096] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A precise liquid dispensing system, characterized in that: It includes a rotary cutting liquid separating valve, one end of which is provided with a pipeline interface component, and at least three groups of the pipeline interface components are arranged, and the three groups of pipeline interface components are respectively an inlet and an outlet of the liquid to be distributed, a gas inlet and a gas outlet, and an inlet and an outlet of the cleaning liquid. The other end of the rotary cutting liquid separating valve is provided with at least one quantitative tube, and the pipeline interface components and the quantitative tubes at both ends of the rotary cutting liquid separating valve can be connected to each other, the inlet and the outlet of the liquid to be distributed are respectively connected to the container of the liquid to be distributed through pipelines, the gas inlet is connected to the gas container through a pipeline, the gas outlet is connected to the container of the distributed liquid through a pipeline, the cleaning liquid inlet is connected to the cleaning liquid container through a pipeline, and the cleaning liquid outlet is connected to the waste liquid tank through a pipeline.

2. The precise liquid separation system according to claim 1, characterized in that: A peristaltic pump is provided between the liquid container to be dispensed and the liquid inlet to be dispensed, a suck-back valve is provided between the dispensed liquid container and the gas outlet, and a cleaning pump is provided between the cleaning liquid inlet and the cleaning liquid container.

3. The precise liquid separation system according to claim 1, characterized in that: A visible window is arranged on the pipeline between the outlet for the liquid to be dispensed and the container for the liquid to be dispensed.

4. The precise liquid separation system according to claim 1, characterized in that: Four quantitative tubes are provided, with capacities of 1 μl, 2 μl, 5 μl and 10 μl respectively.

5. The precise liquid separation system according to claim 1, characterized in that: The dispensed liquid container is any one of a nozzle, a dropper, and a sample dividing needle.

6. The precise liquid separation system according to claim 1, characterized in that: The rotary cutting liquid dividing valve includes a valve plate assembly, and the valve plate assembly includes a middle valve plate and two outer valve plates, the two outer valve plates are respectively located on both sides of the middle valve plate, and the middle valve plate is arranged on a base, and the two outer valve plates can rotate relative to the middle valve plate, and a pipeline interface assembly is provided on the side of one of the outer valve plates away from the middle valve plate, and a quantitative tube is connected to the side of the other outer valve plate away from the middle valve plate, a positioning optical coupler is provided on one side of the valve plate assembly, and an optical coupler baffle corresponding to the positioning optical coupler is provided on the two outer valve plates.

7. The precise liquid dispensing system according to claim 6, characterized in that: An outer valve plate and another outer valve plate located at two ends of the valve plate assembly are respectively connected with motors.

8. A precise liquid separation method, characterized in that: The following steps are involved: (1) The liquid to be dispensed enters the quantitative tube of the rotary cutting and dispensing valve from the liquid to be dispensed inlet of the rotary cutting and dispensing valve and fills the quantitative tube; (2) gas enters the quantitative tube of step (1) through the gas inlet of the rotary cutting liquid separation valve, and the liquid in the quantitative tube enters the dispensed liquid container through the gas outlet of the rotary cutting liquid separation valve; (3) The cleaning liquid enters the quantitative tube from the cleaning liquid inlet of the rotary cutting liquid separating valve, and enters the waste liquid tank from the cleaning liquid outlet of the rotary cutting liquid separating valve.

9. The precise liquid separation method according to claim 8, characterized in that: The specific steps include: (1) Under the drive of the motor, one outer valve plate and another outer valve plate of the rotary liquid-dispensing valve rotate, and the positioning function of the positioning optical coupler is used to connect the inlet and outlet of the liquid to be distributed on one outer valve plate with the two ports of a metering tube of required capacity on the other outer valve plate. Driven by the peristaltic pump, the liquid to be distributed passes through the liquid container from the inlet of the liquid to be distributed through one outer valve plate and the middle valve plate, and enters the metering tube from one port of the metering tube on the other outer valve plate. When the metering tube is full of the liquid to be distributed, it will flow from the other port of the metering tube through the middle valve plate and an outer valve plate to the outlet of the liquid to be distributed. The liquid can be seen from the visual window on the pipeline between the outlet of the liquid to be distributed and the container of the liquid to be distributed as it continues to flow, and the excess liquid to be distributed flows back into the container of the liquid to be distributed; (2) An outer valve plate is driven to rotate by a motor so that a gas inlet and a gas outlet are connected to two ports of the metering tube. The gas passes through an outer valve plate and a middle valve plate from the gas inlet and enters the metering tube from one port of the metering tube. The liquid to be dispensed in the metering tube flows out from the gas outlet through the other port of the metering tube and enters the dispensed liquid container with the cooperation of the back-sucking valve. (3) The motor continues to drive an outer valve plate to rotate, so that the cleaning liquid inlet and the cleaning liquid outlet are connected to the two ends of the quantitative tube. Under the power of the cleaning pump, the cleaning liquid passes through the cleaning liquid inlet, an outer valve plate, and a middle valve plate into the quantitative tube, and is discharged from the cleaning liquid outlet through the other end of the quantitative tube, and flows to the waste liquid tank through the pipeline.

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