Self-adaptive thermal compensation mirror bracket and light path adjusting system

Abstract

The invention relates to a self-adaptive thermal compensation mirror bracket and a light path adjusting system. The self-adaptive thermal compensation lens bracket comprises three micro servo motors, a self-adaptive coupling adjusting assembly, an adjusting supporting plate and an optical supporting seat, the adjusting supporting plate is connected with the optical supporting seat through an extension spring, and a circular clamping ring is arranged in the center of the adjusting supporting plate and used for fixing an optical lens; one end of the extension spring is fixed on an extension spring strut on the optical supporting seat, and the other end of the extension spring is fixed on a positioning pin on the adjusting supporting plate; the micro servo motors are installed on the adjusting supporting plate through the self-adaptive coupling adjusting assemblies and used for adjusting the adjusting nuts on the adjusting supporting plate so as to adjust the position of the adjusting supporting plate. The position of the adjusting supporting plate is adjusted in a self-adaptive mode through the micro servo motor and the self-adaptive coupling adjusting assembly, and compared with the mode that the three-dimensional position of the optical lens is adjusted manually, the stability and accuracy of the optical system can be improved.

Description

Technical Field

[0001] The present application relates to the field of optical technology, and in particular to an adaptive thermal compensation frame and an optical path adjustment system. Background Art

[0002] With the rapid development of high-precision optical instruments (such as photolithography machines, ophthalmic equipment, dental equipment, microscopes, and femtosecond laser equipment), the stability and accuracy of optical systems are increasingly required. During the operation of these optical instruments, the heat generated by long-term laser irradiation or the operation of electronic components inside the instrument is an important factor leading to the degradation of optical performance. Specifically, due to the differences in thermal expansion coefficients of different materials, temperature changes can cause slight deformations of optical components (such as lenses, reflectors, etc.), which in turn causes changes in the three-dimensional position of the optical path, ultimately affecting the imaging quality and equipment performance.

[0003] Traditionally, the industry has adopted the following solutions to this thermal drift problem: Temperature control: By building a high-precision temperature control system, the working environment temperature of the optical instrument is strictly controlled to reduce the impact of temperature changes on the optical system. However, this method requires complex temperature control equipment and energy consumption, and it is difficult to completely eliminate thermal drift under certain extreme working conditions; Structural design optimization: Optical components are manufactured using materials with low thermal expansion coefficients, and the structural design is optimized to reduce thermal stress concentration. Although this reduces the risk of thermal drift to a certain extent, the increase in material selection and processing costs limits its widespread application.

[0004] Real-time monitoring and compensation: Use sensors to monitor the temperature of optical instruments and the position of key components in real time, and actively cool or mechanically adjust the heat-generating components through feedback control systems to achieve real-time compensation of thermal drift. However, this method usually requires complex control systems and fast-response actuators, and it is difficult to achieve precise adjustment at the sub-micron level.

[0005] It is worth noting that although the current lithography machines are equipped with relatively advanced adaptive thermal compensation systems, other high-precision optical instruments, such as ophthalmic laser therapy devices, dental oral scanners, and femtosecond laser equipment, generally lack effective adaptive thermal compensation mechanisms. When these devices face optical path deviations caused by temperature changes, they can often only be corrected by manually adjusting components such as reflectors. Manual adjustment is not only inefficient, but also difficult to achieve high-precision adjustments, and cannot effectively deal with the optical path thermal drift caused by high laser temperatures.

[0006] In summary, the existing technology has many shortcomings in solving the thermal drift problem of high-precision optical instruments. Especially for equipment that cannot adopt complex temperature control systems or faces special working conditions, an innovative adaptive thermal compensation solution is urgently needed to improve the stability and accuracy of the optical system, adaptive thermal compensation mirror frame and optical path adjustment system. Summary of the invention

[0007] Based on this, it is necessary to provide an adaptive thermal compensation frame and optical path adjustment system that can improve the stability and accuracy of the optical system in order to address the above technical problems.

[0008] In a first aspect, the present application provides an adaptive thermal compensation frame, characterized in that the adaptive thermal compensation frame includes three micro servo motors, an adaptive coupling adjustment assembly, an adjustment support plate and an optical support seat, wherein:

[0009] The adjustment support plate is connected to the optical support seat through a tension spring, and a circular clamp is provided at the center for fixing the optical lens; one end of the tension spring is fixed to the tension spring support on the optical support seat, and the other end is fixed to the positioning pin on the adjustment support plate;

[0010] Each of the micro servo motors is mounted on the adjustment support plate through the adaptive coupling adjustment assembly, and is used to adjust the adjustment nut on the adjustment support plate to adjust the position of the adjustment support plate.

[0011] In one of the embodiments, three adjusting bolts and adjusting nuts are provided on the adjusting support plate. The adjusting nuts are fixed to the threaded holes provided on the adjusting support plate through external threads. The adjusting bolts cooperate with the adjusting nuts through external threads to enable the adjusting support plate to move up and down along the axis direction of the adjusting nut.

[0012] In one embodiment, the adaptive coupling adjustment assembly includes a motor support, a coupling flange support and a motor adapter;

[0013] The micro servo motor is fixed to the motor support by four hexagon socket bolts, the motor support is flexibly connected to the coupling flange support, the coupling flange support is fixed to the adjustment support plate by hexagon socket bolts and rubber gaskets, the D-shaped output shaft of the micro servo motor is inserted into the D-shaped groove of the motor adapter, and the motor adapter is connected to the adjustment bolts.

[0014] In one of the embodiments, a compression spring is provided between the motor adapter and the motor support to reduce the backlash error generated when the motor moves.

[0015] In one embodiment, a groove is formed on the contact surface between the optical support seat and the adjusting bolt, and a stainless steel disc is disposed in the groove.

[0016] In one of the embodiments, the adjustment support plate is set at 45°.

[0017] In one embodiment, the micro servo motor is equipped with an encoder with 1024 counts / revolution, and the pitch of the adjusting screw is 0.25 mm.

[0018] In a second aspect, the present application further provides an optical path adjustment system, characterized in that the system comprises a light source, a reflector, a beam splitter, a semi-transparent and semi-reflective mirror, a focusing lens and a beam quality analyzer sequentially arranged in the optical path; wherein the reflector is fixed to an adaptive thermal compensation frame as described in any one of claims 1 to 7;

[0019] The light source is used to generate femtosecond laser;

[0020] The reflecting mirror is used to reflect the femtosecond laser to the beam splitter;

[0021] The beam splitter is coated with a semi-transparent and semi-reflective film, so as to allow the transmitted femtosecond laser to reach the semi-transparent and semi-reflective mirror;

[0022] The focusing lens is used to focus the femtosecond laser reflected by the semi-transparent and semi-reflective mirror to the beam splitter onto the beam quality analyzer.

[0023] In one of the embodiments, the adaptive thermal compensation mirror frame is used to adaptively adjust the three-dimensional position of the reflector according to the three-dimensional position information fed back by the beam quality analyzer.

[0024] The above-mentioned adaptive thermal compensation frame includes three micro servo motors, an adaptive coupling adjustment component, an adjustment support plate and an optical support seat, wherein: the adjustment support plate is connected to the optical support seat through a tension spring, and a circular clamp is provided at the center position for fixing the optical lens; one end of the tension spring is fixed to the tension spring support on the optical support seat, and the other end is fixed to the positioning pin on the adjustment support plate; each micro servo motor is installed on the adjustment support plate through an adaptive coupling adjustment component, and is used to adjust the adjustment nut on the adjustment support plate to adjust the position of the adjustment support plate. By using the micro servo motor and the adaptive coupling adjustment component, the position of the adjustment support plate is adaptively adjusted, which can improve the stability and accuracy of the optical system compared to manually adjusting the three-dimensional position of the optical lens. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the related technologies, the drawings required for use in the embodiments or the related technical descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1a-1c A schematic diagram of the structure of an adjustable support plate and an optical support seat in one embodiment;

[0027] Figure 2a-2c A schematic diagram of the structure of an adaptive thermal compensation frame in one embodiment;

[0028] Figure 3 Schematic diagram of an optical path adjustment system in an embodiment.

[0029] Figure markings: 1-adjusting support plate, 2-adjusting bolt, 3-adjusting nut, 4-retaining ring, 5-reflector, 6-tension spring, 7-optical support seat, 8-cylindrical pin, 9-tension spring support, 10-stainless steel disc, 11-cylindrical pin, 12-micro servo motor, 13-motor support, 14-coupling flange support, 15-compression spring, 16-motor adapter, 17-hexagon socket bolt, 18-rubber gasket. DETAILED DESCRIPTION

[0030] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the following specifically cites a preferred embodiment and describes it in detail with the accompanying drawings as follows.

[0031] It should be noted that it is explicitly and implicitly understood by those of ordinary skill in the art that the embodiments described in the present invention can be combined with other embodiments without conflict. Unless otherwise defined, the technical terms or scientific terms involved in the present invention should be the usual meanings understood by people with ordinary skills in the technical field to which the present invention belongs. The words "one", "a", "a", "the" and the like involved in the present invention do not indicate a quantitative limitation and may represent the singular or plural. The terms "including", "comprising", "having" and any of their variations involved in the present invention are intended to cover non-exclusive inclusions; the terms "first", "second", "third", etc. involved in the present invention are merely to distinguish similar objects and do not represent a specific ordering of objects.

[0032] When it comes to method steps, the sequence illustrated in this document represents an exemplary solution, but does not mean a limitation on the sequence.

[0033] In an exemplary embodiment, as shown in FIGS. 1-2 , Figure 1a To adjust the cross-sectional view of the support plate 1 and the optical support seat 7, Figure 1b To adjust the cross-sectional view of the support plate 1 and the optical support seat 7, Figure 1c To adjust the top view of the support plate 1 and the optical support seat 7; Figure 2a is the front view of the adaptive thermal compensation frame. Figure 2b Cross-sectional view of the adaptive thermal compensation frame, Figure 2c A side view of the adaptive thermal compensation frame.

[0034] The adaptive thermal compensation mirror frame includes three micro servo motors 12, an adaptive coupling adjustment component, an adjustment support plate 1 and an optical support seat 7. Among them:

[0035] The adjustment support plate 1 is connected to the optical support seat 7 through a tension spring 6, and a circular clamping ring 4 is provided at the center position for fixing the optical lens 5; one end of the tension spring 6 is fixed to the tension spring support pillar 9 on the optical support seat 7, and the other end is fixed to the positioning pin 8 on the adjustment support plate 1.

[0036] Exemplarily, the optical lens 5 is a reflector, and the support plate 1 is adjusted to be set at 45°.

[0037] Each micro servo motor 12 is installed on the adjustment support plate 1 through an adaptive coupling adjustment component, and is used to adjust the adjustment nut 3 on the adjustment support plate 1 to adjust the position of the adjustment support plate 1 .

[0038] Specifically, the micro servo motor 12 is a servo motor equipped with a (1024 counts / revolution) encoder, and the micro servo motor 12 has a self-locking function.

[0039] The adaptive thermal compensation frame includes three micro servo motors 12, an adaptive coupling adjustment component, an adjustment support plate 1 and an optical support seat 7, wherein: the adjustment support plate 1 is connected to the optical support seat 7 through a tension spring 6, and a circular clamp 4 is provided at the center position for fixing the optical lens 5; one end of the tension spring 6 is fixed to the tension spring support 9 on the optical support seat 7, and the other end is fixed to the positioning pin 8 on the adjustment support plate 1; each micro servo motor 12 is installed on the adjustment support plate 1 through an adaptive coupling adjustment component, and is used to adjust the adjustment nut 3 on the adjustment support plate 1 to adjust the position of the adjustment support plate 1. The position of the adjustment support plate 1 is adaptively adjusted through the micro servo motor 12 and the adaptive coupling adjustment component, which can improve the stability and accuracy of the optical system compared to manually adjusting the three-dimensional position of the optical lens 5.

[0040] In an exemplary embodiment, three adjusting bolts 2 and adjusting nuts 3 are provided on the adjusting support plate 1. The adjusting nuts 3 are fixed to the threaded holes opened in the adjusting support plate 1 through external threads. The adjusting bolts 2 cooperate with the adjusting nuts 3 through external threads to make the adjusting support plate 1 move up and down along the axis direction of the adjusting nuts 3.

[0041] A groove is formed on the contact surface between the optical support seat 7 and the adjusting bolt 2 , and a stainless steel disc 10 is arranged in the groove.

[0042] Exemplarily, the pitch of the adjusting screw is 0.25 mm, at which point the adaptive thermal compensation frame can theoretically achieve a minimum resolution of 0.25 mm / 1024=0.24 um.

[0043] In this embodiment, the adjustment support plate 1 is fixed on the optical support seat 7 by adjusting the bolt 2 and the adjusting nut 3, and the adjustment support plate 1 is moved up and down along the axis direction of the adjusting nut 3, so that the position of the optical lens 5 in the direction perpendicular to the adjustment support plate 1 can be precisely controlled.

[0044] In an exemplary embodiment, the adaptive coupling adjustment assembly includes a motor support 13 , a coupling flange support 14 and a motor adapter 16 .

[0045] Among them, the micro servo motor 12 is fixed to the motor support 13 by four hexagon socket bolts 17, the motor support 13 is flexibly connected to the coupling flange support 14, the coupling flange support 14 is fixed to the adjustment support plate 1 by the hexagon socket bolts 17 and the rubber gasket 18, the D-shaped output shaft of the micro servo motor 12 is inserted into the D-shaped groove of the motor adapter 16, and the motor adapter 16 is connected to the adjusting bolt 2.

[0046] Specifically, the coupling flange support 14 is made of spring steel and has a plurality of slots thereon for use as a coupling. It is fixed to the adjustment support plate 1 by means of hexagon socket bolts 17 and rubber washers 18, in order to compensate for the offset (including axial offset, radial offset, angular offset or combined offset) between the output shaft of the micro servo motor 12 and the adjustment bolt 2 due to inaccurate manufacturing and installation, deformation during operation or thermal expansion, as well as shock and vibration absorption. The front of the motor adapter 16 is a hexagonal protrusion, the size of which is adapted to the adjustment bolt 2 and can be inserted therein. The size of the D-shaped groove on the motor adapter 16 is adapted to the size of the D-shaped output shaft of the micro servo motor 12 and can be inserted therein. The D-shaped groove on the motor adapter 16 has a guiding function, so that the D-shaped output shaft of the micro servo motor 12 can achieve axial up and down movement of several millimeters in the D-shaped groove on the motor adapter 16. The micro servo motor 12 (with self-locking function) is fixed to the motor support 13 by four hexagon socket bolts 17, and the motor support 13 is flexibly connected to the coupling flange support 14. There is a compression spring 15 between the motor adapter 16 and the motor support 13, which is used to reduce the backlash error generated when the motor moves when the D-shaped output shaft of the micro servo motor 12 is inserted into the D-shaped groove on the motor adapter 16.

[0047] In this embodiment, the adaptive coupling adjustment assembly includes a motor support 13, a coupling flange support 14 and a motor adapter 16; the micro servo motor 12 is fixed to the motor support 13 by four hexagon socket bolts 17, the motor support 13 is flexibly connected to the coupling flange support 14, the coupling flange support 14 is fixed to the adjustment support plate 1 by the hexagon socket bolts 17 and the rubber gasket 18, the D-shaped output shaft of the micro servo motor 12 is inserted into the D-shaped groove of the motor adapter 16, and the motor adapter 16 is connected to the adjustment bolt 2. The micro servo motor 12 is connected to the adjustment adjustment bolt 2 on the adjustment support plate 1 through the motor support 13, the coupling flange support 14 and the motor adapter 16, and the micro servo motor 12 can drive the adjustment bolt 2 to rotate, so as to achieve precise adjustment of the adjustment support plate 1, thereby changing the three-dimensional position of the optical lens 5.

[0048] In an exemplary embodiment, Figure 3 As shown, a light path adjustment system is provided, which includes a light source, a reflector, a beam splitter, a semi-transparent and semi-reflective mirror, a focusing lens and a beam quality analyzer which are sequentially arranged in the light path.

[0049] Among them, the reflecting mirror is fixed on an adaptive thermal compensation mirror frame as any one of the above embodiments; the light source is used to generate femtosecond laser; the reflecting mirror is used to reflect the femtosecond laser to the beam splitter; the beam splitter is coated with a semi-transparent and semi-reflective film to allow the transmitted femtosecond laser to reach the semi-transparent and semi-reflective mirror; the focusing lens is used to focus the femtosecond laser reflected from the semi-transparent and semi-reflective mirror to the beam splitter to the beam quality analyzer.

[0050] The adaptive thermal compensation mirror frame is used to adaptively adjust the three-dimensional position of the reflector according to the three-dimensional position information fed back by the beam quality analyzer.

[0051] Specifically, the adaptive thermal compensation mirror frame adjusts the micro servo motor 12 according to the three-dimensional position information fed back by the beam quality analyzer, so as to drive the adjustment bolt 2 to rotate through the adaptive coupling adjustment assembly, thereby adjusting the three-dimensional position of the reflector.

[0052] In this embodiment, a light path adjustment system is provided. The system includes a light source, a reflector, a beam splitter, a semi-transparent and semi-reflective mirror, a focusing lens and a beam quality analyzer which are sequentially arranged in the light path. Among them, the reflector is fixed to an adaptive thermal compensation frame such as any one of the above embodiments; the light source is used to generate a femtosecond laser; the reflector is used to reflect the femtosecond laser to the beam splitter; the beam splitter is coated with a semi-transparent and semi-reflective film to allow the transmitted femtosecond laser to reach the semi-transparent and semi-reflective mirror; the focusing lens is used to focus the femtosecond laser reflected by the semi-transparent and semi-reflective mirror to the beam splitter to the beam quality analyzer. The adaptive thermal compensation frame is used to adaptively adjust the three-dimensional position of the reflector according to the three-dimensional position information fed back by the beam quality analyzer. Through this light path adjustment system, the optical path thermal drift phenomenon caused by the high temperature of the laser can be effectively dealt with, and the stability and accuracy of the optical system can be improved.

[0053] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0054] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. An adaptive thermal compensation frame, It is characterized in that The adaptive thermal compensation mirror frame includes three micro servo motors, an adaptive coupling adjustment component, an adjustment support plate and an optical support seat, wherein: The adjustment support plate is connected to the optical support seat through a tension spring, and a circular clamp is provided at the center for fixing the optical lens; one end of the tension spring is fixed to the tension spring support on the optical support seat, and the other end is fixed to the positioning pin on the adjustment support plate; Each of the micro servo motors is mounted on the adjustment support plate through the adaptive coupling adjustment assembly, and is used to adjust the adjustment nut on the adjustment support plate to adjust the position of the adjustment support plate.

2. The adaptive thermal compensation frame according to claim 1, It is characterized in that The adjustment support plate is provided with three adjustment bolts and an adjustment nut. The adjustment nut is fixed to the threaded hole provided in the adjustment support plate through an external thread. The adjustment bolt cooperates with the adjustment nut through the external thread to enable the adjustment support plate to move up and down along the axis direction of the adjustment nut.

3. The adaptive thermal compensation frame according to claim 2, It is characterized in that The adaptive coupling adjustment assembly includes a motor support, a coupling flange support and a motor adapter; The micro servo motor is fixed to the motor support by four hexagon socket bolts, the motor support is flexibly connected to the coupling flange support, the coupling flange support is fixed to the adjustment support plate by hexagon socket bolts and rubber gaskets, the D-shaped output shaft of the micro servo motor is inserted into the D-shaped groove of the motor adapter, and the motor adapter is connected to the adjustment bolts.

4. The adaptive thermal compensation frame according to claim 3, It is characterized in that A compression spring is arranged between the motor adapter and the motor support to reduce the backlash error generated when the motor moves.

5. The adaptive thermal compensation frame according to claim 2, It is characterized in that A groove is formed on the contact surface between the optical support seat and the adjusting bolt, and a stainless steel disc is arranged in the groove.

6. The adaptive thermal compensation frame according to claim 1, It is characterized in that The adjustment support plate is arranged at 45 degrees.

7. The adaptive thermal compensation frame according to claim 5, It is characterized in that The micro servo motor is equipped with an encoder with 1024 counts / revolution, and the pitch of the adjusting screw is 0.25 mm.

8. An optical path adjustment system, It is characterized in that The system comprises a light source, a reflector, a beam splitter, a semi-transparent and semi-reflective mirror, a focusing lens and a beam quality analyzer which are sequentially arranged in the optical path; wherein the reflector is fixed to an adaptive thermal compensation frame as described in any one of claims 1 to 7; The light source is used to generate femtosecond laser; The reflecting mirror is used to reflect the femtosecond laser to the beam splitter; The beam splitter is coated with a semi-transparent and semi-reflective film, so as to allow the transmitted femtosecond laser to reach the semi-transparent and semi-reflective mirror; The focusing lens is used to focus the femtosecond laser reflected by the semi-transparent and semi-reflective mirror to the beam splitter onto the beam quality analyzer.

9. The optical path adjustment system according to claim 8, It is characterized in that The adaptive thermal compensation mirror frame is used to adaptively adjust the three-dimensional position of the reflector according to the three-dimensional position information fed back by the beam quality analyzer.

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