Waste gas circulation treatment method and system and electronic equipment

Abstract

The invention provides a waste gas circulation treatment method and system, electronic equipment and a controller applied to the waste gas circulation treatment system.The method comprises the steps that the treatment priority of each kind of special gas to be purified is determined according to the detection result, detected by a gas inlet gas analyzer, of each kind of special gas to be purified; according to the treatment priority, the gas purification devices corresponding to all the to-be-purified special gases are sequentially used for conducting purification treatment on the waste gas, so that the purified waste gas is obtained; determining whether the purified waste gas meets the gas emission requirement or not according to the detection result of the purified waste gas by the exhaust port gas analyzer; and if the waste gas does not meet the gas emission requirement, the purified waste gas is conveyed back to a gas inlet of the waste gas circulating treatment system through the waste gas back conveying channel so as to be subjected to waste gas circulating treatment. By adopting the waste gas circulating treatment method and system and the electronic equipment, the problem of low waste gas treatment efficiency in the prior art is solved.

Description

Technical Field

[0001] The present application relates to the technical field of industrial waste gas treatment, and more specifically, to a waste gas recycling treatment method, system and electronic equipment. Background Art

[0002] The semiconductor chip manufacturing process includes a variety of manufacturing processes, from the generation of a single chip to the final device packaging, and almost every process link is inseparable from special gases. However, in the semiconductor chip manufacturing process, if untreated waste gas is discharged into the atmosphere, it will pollute the environment and cause molecular contamination (airborne molecular contaminants, AMC) problems.

[0003] However, currently, when treating industrial waste gas, the industrial waste gas mixed with multiple special gases is usually transported to a machine for centralized treatment. Since the optimal treatment environment of different special gases is different, the waste gas treatment efficiency is low. Summary of the invention

[0004] In view of this, the purpose of the present application is to provide a waste gas recycling treatment method, system and electronic equipment to solve the problem of low waste gas treatment efficiency in the process of industrial waste gas treatment.

[0005] In a first aspect, an embodiment of the present application provides an exhaust gas circulation treatment method, which is applied to a controller of an exhaust gas circulation treatment system, wherein the exhaust gas circulation treatment system includes an inlet gas analyzer, an exhaust gas analyzer, an exhaust gas pre-transmission channel, an exhaust gas return channel, and a plurality of gas purification subsystems, each of which includes a gas purification device, and each gas purification subsystem is used to purify a special gas in the exhaust gas. The method includes:

[0006] Determine the processing priority of each special gas to be purified according to the detection result of each special gas to be purified detected by the gas analyzer at the air inlet;

[0007] According to the treatment priority, the waste gas is purified in turn using the gas purification device corresponding to each special gas to be purified to obtain the purified waste gas;

[0008] According to the test results of the exhaust gas analyzer at the exhaust port, determine whether the purified exhaust gas meets the gas emission requirements;

[0009] If the gas emission requirements are not met, the exhaust gas recirculation channel is used to transport the purified exhaust gas back to the air inlet of the exhaust gas circulation treatment system for exhaust gas circulation treatment.

[0010] Optionally, the detection results include gas proportion and gas concentration, and determine the processing priority of each special gas to be purified, including: determining the processing priority of each special gas to be purified according to the gas proportion and gas concentration.

[0011] Optionally, the processing priority of each special gas to be purified is determined according to the gas proportion and gas concentration, including: determining the risk level of the target special gas to be purified according to the gas concentration, and determining whether the risk level meets the risk level requirements; if it meets the risk level requirements, determining the processing priority of each special gas to be purified according to the gas proportion.

[0012] Optionally, after determining whether the risk level meets the risk level requirements, it also includes: if it does not meet the risk level requirements, setting the processing priority of the target special gas to be purified to the highest, and determining the processing priority of other special gases to be purified except the target special gas to be purified according to the gas proportion.

[0013] Optionally, each gas purification subsystem also includes a two-way valve, which uses the gas purification device corresponding to each special gas to be purified in turn to purify the exhaust gas, including: determining the target gas purification device corresponding to the current special gas to be purified; by controlling the opening and closing of the target two-way valve, the current special gas to be purified is transported to the target gas purification device for purification, and the channel for the current special gas to be purified to enter other gas purification devices is cut off; after purifying the current special gas to be purified, the channel entering the target gas purification device is cut off and the channel entering other subsequent gas purification devices is opened by controlling the target two-way valve; select a special gas to be purified with a lower processing priority level than the current one as the new current special gas to be purified, and return to the step of determining the target gas purification device corresponding to the current special gas to be purified, until each special gas to be purified is purified.

[0014] Optionally, the target two-way valve includes a target front-transmission channel two-way valve and a target air intake channel two-way valve, which deliver the current special gas to be purified to the target gas purification device and cut off the passage to other gas purification devices in the following manner: close the target front-transmission channel two-way valve to prevent the exhaust gas from passing through the target gas purification device and entering other gas purification devices; and simultaneously open the target air intake channel two-way valve to allow the exhaust gas to enter the target gas purification device via the exhaust gas front-transmission channel, wherein the other air intake channel two-way valves are in a normally closed state, and the other front-transmission channel two-way valves are in a normally open state.

[0015] Optionally, the selection of the target forward transmission channel two-way valve and the target intake channel two-way valve is determined by the processing priority and the positional relationship between different gas purification devices.

[0016] Optionally, the exhaust gas circulation treatment system also includes a fan and a two-way valve for a recirculation channel, which are arranged on the exhaust gas recirculation channel to transport the purified exhaust gas back to the air inlet of the exhaust gas circulation treatment system in the following manner: controlling the opening of the two-way valve for the recirculation channel and the fan to transport the purified exhaust gas back to the air inlet of the exhaust gas circulation treatment system.

[0017] In a second aspect, an embodiment of the present application further provides an exhaust gas circulation treatment system, the system comprising a controller, an air inlet gas analyzer, an exhaust outlet gas analyzer, an exhaust gas pre-transmission channel, an exhaust gas return channel and a plurality of gas purification subsystems;

[0018] A controller for the above-mentioned exhaust gas circulation treatment method;

[0019] An inlet gas analyzer is used to detect the exhaust gas at the inlet of the exhaust gas circulation treatment system to obtain the detection results for each special gas to be purified;

[0020] Exhaust port gas analyzer, used to detect the exhaust gas at the exhaust port of the exhaust gas circulation treatment system to determine whether the purified exhaust gas meets the gas emission requirements;

[0021] An exhaust gas forwarding channel, used for conveying the exhaust gas to each gas purification subsystem;

[0022] The exhaust gas retransmission channel is used to transport the purified exhaust gas back to the air inlet of the exhaust gas circulation treatment system when the purified exhaust gas does not meet the gas emission requirements;

[0023] Each gas purification subsystem is used to purify the corresponding special gas respectively.

[0024] In a third aspect, an embodiment of the present application further provides an electronic device, comprising: a processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor and the memory communicate via the bus, and when the machine-readable instructions are executed by the processor, the steps of the exhaust gas circulation treatment method as described above are performed.

[0025] The embodiments of the present application bring the following beneficial effects:

[0026] An exhaust gas recycling treatment method, system and electronic equipment provided in the embodiments of the present application can purify each special gas to be purified in turn using a gas purification device corresponding to the special gas to be purified according to the treatment priority of each special gas to be purified. An independent gas purification device is set for each special gas to be purified, so that each special gas to be purified can be gas purified in the best treatment environment and conditions, avoiding the problem of low purification efficiency caused by mixing all the special gases to be purified in one machine for treatment. At the same time, before the exhaust gas is discharged into the atmosphere, the exhaust port gas analyzer is used to detect the purified exhaust gas to determine whether to recycle the exhaust gas based on the detection result, so as to prevent unclean exhaust gas from being discharged into the atmosphere. Compared with the exhaust gas treatment method in the prior art, the problem of low exhaust gas treatment efficiency is solved.

[0027] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 A schematic diagram of the structure of the exhaust gas circulation treatment system provided in an embodiment of the present application is shown;

[0030] Figure 2 A schematic diagram showing the structure of a channel cleaning subsystem in an exhaust gas circulation treatment system provided in an embodiment of the present application is shown;

[0031] Figure 3 A flow chart showing the exhaust gas recycling treatment method provided by an embodiment of the present application is shown;

[0032] Figure 4 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application is shown. DETAILED DESCRIPTION

[0033] To make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application usually described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, each other embodiment obtained by those skilled in the art without making creative work belongs to the scope of protection of the present application.

[0034] It is worth noting that before the present application was proposed, the semiconductor chip manufacturing process included a variety of manufacturing processes, from the generation of a single chip to the packaging of the final device, and almost every process link is inseparable from special gases. However, in the semiconductor chip manufacturing process, if the untreated waste gas is discharged into the atmosphere, it will pollute the environment and cause molecular contamination (airborne molecular contaminants, AMC) problems. However, at present, when industrial waste gas is treated, the industrial waste gas mixed with a variety of special gases is usually transported to an all-in-one machine, that is, transported to a machine equipment for centralized treatment. However, the optimal treatment environment or conditions for different special gases are different. For example: for strong acid corrosive special gases, water washing treatment is required, for toxic special gases, adsorption treatment is required, and for inert special gases, high temperature treatment is required. In the prior art, no matter which special gases are mixed in the industrial waste gas, the same treatment is performed in the all-in-one machine, resulting in the problem of low waste gas treatment efficiency.

[0035] Based on this, an embodiment of the present application provides an exhaust gas circulation treatment system to improve the exhaust gas treatment efficiency.

[0036] See also Figure 1 , Figure 1 This is a schematic diagram of the structure of an exhaust gas recycling treatment system provided in an embodiment of the present application. Figure 1 As shown in the figure, the exhaust gas circulation treatment system 10 includes: a controller (not shown in the figure), an air inlet gas analyzer 101, an exhaust outlet gas analyzer 102, an exhaust gas pre-transmission channel 103, an exhaust gas retransmission channel 104 and multiple gas purification subsystems.

[0037] Among them, the inlet gas analyzer 101 is set at the inlet position of the exhaust gas circulation treatment system 10 and is connected to the controller, which is used to detect the exhaust gas at the inlet of the exhaust gas circulation treatment system to obtain the detection results for each special gas to be purified, and send the detection results to the controller. The exhaust gas analyzer 102 is set at the exhaust port position of the exhaust gas circulation treatment system 10 and is connected to the controller. It is used to detect the exhaust gas at the exhaust port of the exhaust gas circulation treatment system and send the detection results to the controller to determine whether the purified exhaust gas meets the gas emission requirements. Among them, the gas analyzer can detect the proportion and gas concentration of each special gas in the exhaust gas, and the gas analyzer can perform gas detection according to the preset detection frequency, for example: once every 1 second.

[0038] The exhaust gas forward transmission channel 103 is used to transport the exhaust gas from the air inlet to the exhaust port, and the exhaust gas return channel 104 is used to transport the purified exhaust gas back to the air inlet of the exhaust gas circulation treatment system for circulation purification treatment when the purified exhaust gas does not meet the gas emission requirements.

[0039] The exhaust gas recycle treatment system 10 also includes a two-way valve 106 for the recycle channel and a fan 107. The two-way valve 106 for the recycle channel is used to control the opening and closing of the exhaust gas recycle channel, and the fan 107 is used to provide conveying power for the exhaust gas returned to the air inlet in the exhaust gas recycle channel. The two-way valve 106 for the recycle channel is in a normally closed state, and the fan 107 is not started. When the controller determines that the exhaust gas does not meet the gas emission requirements, the two-way valve 106 for the recycle channel and the fan 107 are controlled to open to convey the exhaust gas that does not meet the gas emission requirements back to the air inlet.

[0040] The exhaust gas recycle treatment system 10 further includes an exhaust valve 105, which is used to discharge the exhaust gas into the atmosphere. The exhaust valve 105 is in a normally open state. When the controller determines that the exhaust gas does not meet the gas emission requirements, the exhaust valve 105 is controlled to be closed to prevent the exhaust gas that does not meet the gas emission requirements from being discharged into the atmosphere.

[0041] The number of multiple gas purification subsystems is determined by the type of special gases that can be processed. Each gas purification subsystem is used to purify the corresponding special gas. For example, the multiple gas purification subsystems include a first gas purification subsystem 110, a second gas purification subsystem 120, a third gas purification subsystem 130, a fourth gas purification subsystem 140, and a fifth gas purification subsystem 150.

[0042] Each gas purification subsystem includes a gas purification device and a two-way valve. The two-way valve includes a two-way valve for the front transmission channel and a two-way valve for the intake channel. The two-way valve for the front transmission channel is in a normally open state, and the two-way valve for the intake channel is in a normally closed state. Among them, the two-way valve for the front transmission channel includes a first two-way valve for the front transmission channel 111, a second two-way valve for the front transmission channel 121, a third two-way valve for the front transmission channel 131, a fourth two-way valve for the front transmission channel 141, and a fifth two-way valve for the front transmission channel 151. The two-way valves for the front transmission channel are all arranged on the exhaust gas front transmission channel 103, and these two-way valves for the front transmission channel are used to control whether the exhaust gas can be directly transported to the next gas purification subsystem. The intake channel two-way valves include a first intake channel two-way valve 112, a second intake channel two-way valve 122, a third intake channel two-way valve 132, a fourth intake channel two-way valve 142, and a fifth intake channel two-way valve 152. Each intake channel two-way valve is arranged on the intake channel of the gas purification device corresponding to the intake channel two-way valve. These intake channel two-way valves are used to control whether the exhaust gas can enter the gas purification device corresponding to the intake channel two-way valve for gas purification treatment.

[0043] Each gas purification device is used to purify a special gas in the waste gas, which includes dozens of gases. These gases can be divided into multiple special gases according to the properties of the gases. The multiple special gases include but are not limited to: strong acid corrosive special gases, flammable special gases, toxic special gases, dust-type special gases, and hydrogen. Exemplarily, the multiple gas purification devices can be multiple machines for gas purification. The multiple gas purification devices include a first gas purification device 113, a second gas purification device 123, a third gas purification device 133, a fourth gas purification device 143, and a fifth gas purification device 153. Exemplarily, the first gas purification device 113 is a device for purifying strong acid corrosive special gases, the second gas purification device 123 is a device for purifying flammable special gases, the third gas purification device 133 is a device for purifying toxic special gases, the fourth gas purification device 143 is a device for purifying dust-type special gases, and the fifth gas purification device 153 is a device for purifying hydrogen. In addition, each gas purification device corresponds to an intake channel and an exhaust channel, and the gas purification device is connected to the exhaust gas pre-transmission channel through the intake channel and the exhaust channel. It should be noted that the position of each gas purification device is not necessarily fixed, and those skilled in the art can select the order between each gas purification device according to actual conditions.

[0044] It should be noted that all gas purification devices, gas analyzers, two-way valves, return channel two-way valves, fans and exhaust valves are connected to the controller so that the controller can control these devices.

[0045] In addition, the exhaust gas recirculation treatment system 10 also includes a channel cleaning subsystem 160, which is described below with reference to Figure 2 Let's introduce the channel cleaning subsystem 160.

[0046] Figure 2 The schematic diagram of the structure of the channel cleaning subsystem in the exhaust gas circulation treatment system provided in the embodiment of the present application is shown as follows: Figure 2 As shown, the channel cleaning subsystem 160 includes a gas source 161, a pressure regulating valve 162 and a flow meter 163. The channel cleaning subsystem is used to clean the exhaust gas pre-transmission channel and the connecting channel connecting each gas purification treatment device and the exhaust gas pre-transmission channel to remove the residual gas in the channel. Among them, the gas source 161 is used to generate nitrogen for cleaning the residual gas, the pressure regulating valve 162 is used to send the gas generated by the gas source 161 into the channel to be cleaned, and the flow meter 163 is used to measure the flow rate of the sent gas.

[0047] Based on the same inventive concept, an exhaust gas circulation treatment method corresponding to the exhaust gas circulation treatment system is also provided in the embodiment of the present application. Since the principle of solving the problem by the method in the embodiment of the present application is similar to the above-mentioned exhaust gas circulation treatment method in the embodiment of the present application, the implementation of the system can refer to the implementation of the method, and the repeated parts will not be repeated.

[0048] See also Figure 3 , Figure 3 This is a flow chart of an exhaust gas recycling treatment method provided in an embodiment of the present application. Figure 3 As shown, the exhaust gas circulation treatment method provided in the embodiment of the present application is applied to the controller of the exhaust gas circulation treatment system, and the method includes:

[0049] Step S201, determining the processing priority of each special gas to be purified according to the detection result of each special gas to be purified detected by the gas analyzer at the air inlet;

[0050] Step S202, purifying the waste gas in turn using the gas purification device corresponding to each special gas to be purified according to the processing priority to obtain the purified waste gas;

[0051] Step S203, determining whether the purified exhaust gas meets the gas emission requirements based on the detection result of the exhaust gas analyzer at the exhaust port;

[0052] Step S204: If the gas emission requirements are not met, the exhaust gas after the purification treatment is transported back to the air inlet of the exhaust gas circulation treatment system through the exhaust gas recirculation channel for exhaust gas circulation treatment.

[0053] Through the above-mentioned waste gas circulation treatment method, the present application can purify each special gas to be purified in accordance with the treatment priority of each special gas to be purified, and sequentially utilize the gas purification device corresponding to the special gas to be purified. An independent gas purification device is respectively provided for each special gas to be purified, so that each special gas to be purified can be subjected to gas purification treatment in the best treatment environment and conditions, thereby avoiding the problem of low purification efficiency caused by mixing all the special gases to be purified in one machine for treatment. At the same time, before the waste gas is discharged into the atmosphere, the exhaust port gas analyzer is used to detect the purified waste gas to determine whether to recycle the waste gas based on the detection results, thereby preventing unclean waste gas from being discharged into the atmosphere. Compared with the waste gas treatment method in the prior art, the problem of low waste gas treatment efficiency is solved.

[0054] Below Figure 3 Each step is described in detail.

[0055] In step S201, the processing priority of each special gas to be purified is determined according to the detection result of each special gas to be purified detected by the inlet gas analyzer.

[0056] In the embodiment of the present application, the exhaust gas first enters the exhaust gas circulation treatment system through the air inlet. At this time, the air inlet gas analyzer sends the detection results of each special gas to be purified at the air inlet to the controller, so that the controller determines the processing priority of each special gas to be purified according to the detection results. Among them, the detection results of the air inlet gas analyzer include gas proportion and gas concentration. The gas proportion may refer to the proportion of the volume of the special gas in the exhaust gas, and the gas concentration may refer to the mass of the gas per unit volume. Taking hydrogen as an example, when the gas concentration of hydrogen exceeds 4%, there will be an explosion risk. If hydrogen exists in the exhaust gas, it needs to be purified in time.

[0057] Before determining the treatment priority of each special gas to be purified, first determine which special gases belong to the special gases to be purified. At this time, it can be determined whether each special gas in the exhaust gas meets the gas emission requirements. If a special gas does not meet the gas emission requirements, the special gas will be treated as a special gas to be purified.

[0058] When determining the processing priority of each special gas to be purified, the processing priority of each special gas to be purified can be determined based on the gas proportion and gas concentration. Specifically, the risk level of the target special gas to be purified can be determined based on the gas concentration, and it can be determined whether the risk level meets the risk level requirements. If it meets the risk level requirements, the processing priority of each special gas to be purified is determined based on the gas proportion. For example: There are two special gases to be purified in the waste gas, namely hydrogen and strong acid corrosive special gas. First, hydrogen with a higher explosive risk will be used as the target special gas to be purified, and it will be determined whether the gas concentration of hydrogen exceeds the set gas concentration threshold of 4%. If the gas concentration of hydrogen is greater than or equal to the set gas concentration threshold of 4%, it is determined that the risk level of the target special gas to be purified is high and does not meet the risk level requirements. On the contrary, if the gas concentration of hydrogen is less than the set gas concentration threshold of 4%, it is determined that the risk level of the target special gas to be purified is low, which meets the risk level requirements.

[0059] If the risk level requirements are met, the processing priority of each special gas to be purified is determined only based on the gas proportion. If at this time, the gas proportion of strong acid corrosive special gases is greater than the gas proportion of hydrogen, the processing priority of strong acid corrosive special gases is determined to be higher than the processing priority of hydrogen. On the contrary, if the risk level requirements are not met, the processing priority of the target special gas to be purified is set to the highest, and then the processing priority of other special gases to be purified except the target special gas to be purified is determined according to the gas proportion. At this time, even if the gas proportion of strong acid corrosive special gases is greater than the gas proportion of hydrogen, since the gas concentration of hydrogen is greater than or equal to 4%, hydrogen is used as the target special gas to be purified with the highest processing priority, and the processing priority of strong acid corrosive special gases is lower than the processing priority of hydrogen. If the risk level requirements are not met, and the waste gas also includes other special gases to be purified such as toxic special gases, the processing priority of each other special gas to be purified is set in order from high to low according to the gas proportions of other special gases except hydrogen.

[0060] It should be noted that if there are multiple types of highly dangerous target special gases to be purified, the multiple target special gases to be purified are ranked in order of treatment priority from high to low according to the gas concentration. Those skilled in the art can select which special gases are highly dangerous target special gases to be purified according to actual conditions, and this application does not limit this.

[0061] In step S202, the waste gas is purified in turn using the gas purification device corresponding to each special gas to be purified according to the processing priority to obtain the purified waste gas.

[0062] After determining the treatment priority of each special gas to be purified, the two-way valve corresponding to each gas purification device can be used to adjust the flow direction of the exhaust gas to select the corresponding gas purification device for gas purification treatment.

[0063] Specifically, for the special gas to be purified currently, the target gas purification device corresponding to the special gas to be purified currently is determined, and by controlling the opening and closing of the target two-way valve, the special gas to be purified currently is transported to the target gas purification device for purification, and the channel for the special gas to be purified currently to enter other gas purification devices is cut off.

[0064] For example, there are three types of special gases to be purified in the waste gas, and they are hydrogen, strong acid corrosive special gases and toxic gases in descending order of treatment priority. Since hydrogen has the highest treatment priority, hydrogen is selected as the current special gas to be purified first. And determine the target gas purification device corresponding to the current special gas to be purified, that is, Figure 2 The fifth gas purification device in the embodiment serves as a target gas purification device for purifying hydrogen.

[0065] Then, close the two-way valve of the target forward transmission channel, and at the same time, open the two-way valve of the target intake channel. Since the two-way valves of other intake channels are in a normally closed state, there is no need to close the two-way valves of other intake channels. Since the two-way valves of other forward transmission channels are in a normally open state, there is no need to open the two-way valves of other forward transmission channels. The purpose of closing the two-way valve of the target forward transmission channel is to prevent the exhaust gas from passing through the target gas purification device and entering other subsequent gas purification devices. The purpose of opening the two-way valve of the target intake channel is to allow the exhaust gas to enter the target gas purification device through the intake channel.

[0066] The selection of the target forward transmission channel two-way valve and the target intake channel two-way valve is determined by the current processing priority of each special gas to be purified in the exhaust gas and the positional relationship between different gas purification devices.

[0067] In this example (hydrogen has the highest processing priority and the gas purification device corresponding to hydrogen is located at the last position of all gas purification devices), the target front-transmission channel two-way valve may refer to the front-transmission channel two-way valve corresponding to the target gas purification device, and other front-transmission channel two-way valves may refer to other front-transmission channel two-way valves except the target front-transmission channel two-way valve. Taking the above example, the target front-transmission channel two-way valve is the fifth front-transmission channel two-way valve 151, and the other front-transmission channel two-way valves are the first front-transmission channel two-way valve 111, the second front-transmission channel two-way valve 121, the third front-transmission channel two-way valve 131, and the fourth front-transmission channel two-way valve 141.

[0068] The target air intake channel two-way valve may refer to the air intake channel two-way valve corresponding to the target gas purification device, other air intake channel two-way valves may refer to the air intake channel two-way valves other than the target air intake channel two-way valve, the target forward transmission channel two-way valve is the fifth forward transmission channel two-way valve 152 in the fifth gas purification subsystem, and other air intake channel two-way valves are the first air intake channel two-way valve 112, the second air intake channel two-way valve 122, the third air intake channel two-way valve 132, and the fourth air intake channel two-way valve 152.

[0069] After the current special gas to be purified is purified, it is necessary to cut off the channel entering the target gas purification device by controlling the target air intake channel two-way valve. For example: the exhaust port gas analyzer detects the exhaust gas at the exhaust port and sends the detection result to the controller. The controller determines whether the current special gas to be purified has been purified according to the detection result at the exhaust port. If it is determined that the current special gas to be purified has been purified, the fifth air intake channel two-way valve 152 is used as the target air intake channel two-way valve, and the fifth front input channel two-way valve 151 is used as the target front input channel two-way valve. Then, the fifth front input channel two-way valve 151 is opened so that the fifth front input channel two-way valve 151 is restored to the normally open state, and the fifth air intake channel two-way valve 152 is closed so that the fifth air intake channel two-way valve 152 is restored to the normally closed state to prevent the current special gas to be purified from entering the fifth gas purification device. At this time, the purification of hydrogen as the current special gas to be purified is completed, and it is necessary to start reselecting a new current special gas to be purified to continue to purify other special gases to be purified.

[0070] When selecting a new current special gas to be purified, a special gas to be purified that is one level lower than the current processing priority can be selected as the new current special gas to be purified, and the step of determining the target gas purification device corresponding to the current special gas to be purified is returned to execute until each special gas to be purified is purified. For example: the processing priority of strong acid corrosive special gas ranks second, and the processing priority of toxic special gas ranks third. Then, after purifying hydrogen, the strong acid corrosive special gas is selected as the new current special gas to be purified. Then, the above process is repeated for the strong acid corrosive special gas, that is, the first gas purification device 113 is used as the new target gas purification device, and then the first front transmission channel two-way valve 111 is closed, and the first air inlet channel two-way valve 112 is opened at the same time, so that the first gas purification device 113 purifies the new current special gas to be purified. And so on, until the processing of all special gases to be purified is completed.

[0071] In another example, if hydrogen meets the risk level requirements, and it is determined that the processing priority of the strong acid corrosive special gas is set to the highest, the processing priority of hydrogen is the second highest, and the processing priority of the toxic special gas is the lowest, then after determining the processing priority, since the strong acid corrosive special gas is the first special gas to be processed, hydrogen is the second special gas to be processed, and the first gas purification device 113 corresponding to the strong acid corrosive special gas is located before the fifth gas purification device 153 corresponding to the hydrogen, therefore, when controlling the target two-way valve, the first front transmission channel two-way valve 111 and the fifth front transmission channel two-way valve 153 can be controlled. 51 is closed, and the first air intake channel two-way valve 112 and the fifth air intake channel two-way valve 152 are opened at the same time. In this way, since the second front-transmission channel two-way valve 121, the third front-transmission channel two-way valve 131, and the fourth front-transmission channel two-way valve 141 are in a normally open state, and the second air intake channel two-way valve 122, the third air intake channel two-way valve 132, and the fourth air intake channel two-way valve 142 are in a normally closed state, the exhaust gas first enters the first gas purification device 113, and the strong acid corrosive special gas is first purified, and then enters the fifth gas purification device 153 to purify the hydrogen, thereby improving the gas purification efficiency. In this example, the first front-transmission channel two-way valve 111 and the fifth front-transmission channel two-way valve 151 are the target front-transmission channel two-way valves, and the first air intake channel two-way valve 112 and the fifth air intake channel two-way valve 152 are the target air intake channel two-way valves.

[0072] It can be seen that when the controller controls the target two-way valve, it determines the target two-way valve based on the current processing priority of each special gas and the positional relationship of different gas purification devices. Here, it is called the current processing priority because after a purification treatment is performed by a gas purification device, the processing priority between each special gas to be purified in the exhaust gas may change. Therefore, the current processing priority also changes with each purification treatment.

[0073] In step S203, based on the detection result of the exhaust gas after purification by the exhaust port gas analyzer, it is determined whether the exhaust gas after purification meets the gas emission requirements.

[0074] After a round of exhaust gas purification, the exhaust gas comes to the exhaust port through the exhaust gas front channel. The exhaust port gas analyzer detects the exhaust gas at the exhaust port and sends the test results to the controller. The controller determines whether the exhaust gas after purification meets the gas emission requirements based on the test results of each gas to be purified at the exhaust port. Among them, the gas emission requirements are formulated in accordance with relevant regulations such as atmospheric pollution emission standards. It stipulates the emission indicators that each gas to be purified should meet when it is discharged into the atmosphere, such as: the maximum allowable emission concentration and maximum allowable emission rate corresponding to each special gas to be purified.

[0075] If the gas emission requirements are met, the waste gas is discharged into the atmosphere through the exhaust valve 105. If the gas emission requirements are not met, step S204 is executed to perform a cyclic purification process until the gas emission requirements are met.

[0076] In step S204, if the gas emission requirements are not met, the exhaust gas after the purification treatment is transported back to the air inlet of the exhaust gas circulation treatment system through the exhaust gas recirculation channel for exhaust gas circulation treatment.

[0077] In an embodiment of the present application, the exhaust gas purification process may require multiple rounds of purification treatments. Each round of purification treatment refers to the process in which the exhaust gas enters the air inlet, undergoes gas purification treatment, and then returns to the air inlet. The special gases to be purified treated in each round of purification treatment may be the same or different.

[0078] Taking the above example as an example, since the exhaust valve 105 is in a normally open state, when it is determined that the exhaust gas at the exhaust port gas analyzer 102 does not meet the gas emission requirements, the exhaust valve 105 is closed, and the return channel two-way valve 106 and the fan 107 are opened to transport the untreated exhaust gas back to the air inlet of the exhaust gas circulation treatment system through the exhaust gas return channel 104. The exhaust gas analyzer 101 is used at the air inlet to perform an inlet gas detection on the exhaust gas under the second round of purification treatment to re-determine the treatment priority of each special gas to be purified in the exhaust gas under the second round of purification treatment. After the exhaust gas after the first round of purification treatment is transported back to the air inlet, the return channel two-way valve 106 and the fan 107 are controlled to be closed to restore their initial normally closed state.

[0079] It should be noted that the flow rate of exhaust gas entering the exhaust gas circulation treatment system can be controlled by adding a one-way valve at the air inlet, so that the exhaust gas at this flow rate can be treated separately. It is also possible not to set a one-way valve and continuously treat the exhaust gas entering the exhaust gas circulation treatment system. During continuous treatment, the exhaust gas that has been purified will enter the air inlet again for circulation treatment. Usually, only a small part of the special gas to be purified in the circulating exhaust gas has not been completely treated, and this part of the exhaust gas that has not been completely purified will be treated together with the newly entering exhaust gas.

[0080] See also Figure 4 , Figure 4 This is a schematic diagram of the structure of an electronic device provided in an embodiment of the present application. Figure 4 As shown in , the electronic device 300 includes a processor 310 , a memory 320 and a bus 330 .

[0081] The memory 320 stores machine-readable instructions executable by the processor 310. When the electronic device 300 is running, the processor 310 communicates with the memory 320 via the bus 330. When the machine-readable instructions are executed by the processor 310, the above-mentioned Figure 3 The steps of the exhaust gas circulation treatment method in the method embodiment shown, the specific implementation method can be found in the method embodiment, and will not be repeated here.

[0082] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0083] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of devices or units can be electrical, mechanical or other forms.

[0084] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0085] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0086] If the functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a non-volatile computer-readable storage medium that is executable by a processor. Based on this understanding, the technical solution of the present application can essentially be embodied in the form of a software product, or in other words, the part that contributes to the prior art or the part of the technical solution. The computer software product is stored in a storage medium, including several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.

[0087] Finally, it should be noted that the above-described embodiments are only specific implementation methods of the present application, which are used to illustrate the technical solutions of the present application, rather than to limit them. The protection scope of the present application is not limited thereto. Although the present application is described in detail with reference to the above-mentioned embodiments, ordinary technicians in the field should understand that any technician familiar with the technical field can still modify the technical solutions recorded in the above-mentioned embodiments within the technical scope disclosed in the present application, or can easily think of changes, or make equivalent replacements for some of the technical features therein; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A method for treating waste gas circulation, characterized in that: A controller applied to an exhaust gas circulation treatment system, wherein the exhaust gas circulation treatment system includes an intake gas analyzer, an exhaust gas analyzer, an exhaust gas pre-transmission channel, an exhaust gas return channel, and a plurality of gas purification subsystems, each of which includes a gas purification device, and each gas purification subsystem is used to purify a special gas in the exhaust gas, and the method includes: Determining the processing priority of each special gas to be purified according to the detection result of each special gas to be purified detected by the gas analyzer at the air inlet; According to the processing priority, the waste gas is purified in turn using the gas purification device corresponding to each special gas to be purified to obtain the purified waste gas; Determining whether the purified exhaust gas meets the gas emission requirements according to the detection result of the exhaust gas analyzer at the exhaust port on the purified exhaust gas; If the gas emission requirements are not met, the exhaust gas recirculation channel is used to transport the purified exhaust gas back to the air inlet of the exhaust gas circulation treatment system for exhaust gas circulation treatment.

2. The method according to claim 1, characterized in that The detection results include gas proportion and gas concentration, and the determination of the processing priority of each special gas to be purified includes: The processing priority of each special gas to be purified is determined according to the gas proportion and the gas concentration.

3. The method according to claim 2, characterized in that Determining the processing priority of each special gas to be purified according to the gas proportion and the gas concentration includes: Determine the risk level of the target special gas to be purified according to the gas concentration, and determine whether the risk level meets the risk level requirements; If the risk level requirements are met, the processing priority of each special gas to be purified will be determined based on the proportion of the gas.

4. The method according to claim 3, characterized in that After determining whether the risk level meets the risk level requirements, it also includes: If the risk level requirement is not met, the processing priority of the target special gas to be purified is set to the highest, and the processing priority of other special gases to be purified except the target special gas to be purified is determined according to the proportion of the gas.

5. The method according to claim 1, characterized in that Each gas purification subsystem also includes a two-way valve, and the waste gas is purified by using the gas purification device corresponding to each special gas to be purified in turn, including: Determine the target gas purification device corresponding to the special gas to be purified; By controlling the opening and closing of the target two-way valve, the special gas to be purified is transported to the target gas purification device for purification, and the passage of the special gas to be purified into other gas purification devices is cut off; After purifying the special gas to be purified, the target two-way valve is controlled to cut off the passage into the target gas purification device and open the passage into other subsequent gas purification devices; A special gas to be purified that is one level lower than the current processing priority is selected as the new current special gas to be purified, and the step of determining the target gas purification device corresponding to the current special gas to be purified is returned to execute until each special gas to be purified is purified.

6. The method according to claim 5, characterized in that The target two-way valve includes a target forward delivery channel two-way valve and a target intake channel two-way valve, which delivers the current special gas to be purified to the target gas purification device and cuts off the channel to other gas purification devices in the following manner: Closing the two-way valve of the target forward transmission channel to prevent the exhaust gas from passing through the target gas purification device and entering other gas purification devices; At the same time, the two-way valve of the target air intake channel is opened to allow the exhaust gas to enter the target gas purification device through the exhaust gas front channel, wherein the two-way valves of other air intake channels are in a normally closed state, and the two-way valves of other front channels are in a normally open state.

7. The method according to claim 6, characterized in that The selection of the target forward delivery channel two-way valve and the target intake channel two-way valve is determined by the processing priority and the positional relationship between different gas purification devices.

8. The method according to claim 1, characterized in that: The exhaust gas recycling treatment system further includes a fan and a two-way valve for a return channel, wherein the fan and the two-way valve for the return channel are arranged on the exhaust gas return channel, and the purified exhaust gas is transported back to the air inlet of the exhaust gas recycling treatment system in the following manner: The two-way valve of the return channel and the fan are controlled to open so as to transport the purified exhaust gas back to the air inlet of the exhaust gas circulation treatment system.

9. An exhaust gas recycling treatment system, characterized in that: It includes a controller, an air inlet gas analyzer, an exhaust gas analyzer, an exhaust gas forward transmission channel, an exhaust gas return transmission channel and multiple gas purification subsystems; The controller is used to perform the exhaust gas circulation treatment method according to any one of claims 1 to 8; The air inlet gas analyzer is used to detect the exhaust gas at the air inlet of the exhaust gas circulation treatment system to obtain the detection result for each special gas to be purified, and send the detection result to the controller; The exhaust port gas analyzer is used to detect the exhaust gas at the exhaust port of the exhaust gas circulation treatment system to determine whether the purified exhaust gas meets the gas emission requirements; The exhaust gas forward transmission channel is used to transmit the exhaust gas to each gas purification subsystem; The exhaust gas retransmission channel is used to transport the purified exhaust gas back to the air inlet of the exhaust gas circulation treatment system when the purified exhaust gas does not meet the gas emission requirements; Each gas purification subsystem is used to purify the corresponding special gas respectively.

10. An electronic device, characterized in that: include: A processor, a storage medium and a bus, wherein the storage medium stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor and the storage medium communicate via the bus, and the processor executes the machine-readable instructions to perform the steps of the exhaust gas recirculation treatment method as described in any one of claims 1 to 8.

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