Grabbing device

Abstract

The invention relates to a grabbing device. The grabbing device comprises a support (1); the lifting assembly (2) is mounted on the bracket (1); the mounting plate (3) is fixed to the support (1) through the lifting assembly (2), and the mounting plate (3) can move up and down under the control of the lifting assembly (2); and a plurality of gripping parts attached to the mounting plate (3) in a matrix shape and gripping the plurality of sheets (18) so as to be capable of moving up and down and left and right with respect to the sheets (18). According to the invention, fragments or hidden cracks are not easy to occur, the film-coated surface can be prevented from being contacted with impressions and the like, and in addition, the method can also be used in a vacuum cavity.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon wafer production and provides a grasping device, in particular a grasping device for grasping thin silicon wafers. Background Art

[0002] With the development of science and technology and the enhancement of environmental awareness, the size of products is getting thinner and thinner, such as glass sheets, silicon wafers and other fragile thin sheets. During the transportation of fragile thin sheets (such as transportation between different workstations), different tightening methods have different effects on fragile thin sheets. Suction cups are often used in the current industry to grab fragile thin sheets. The use of suction cups has the following problems: 1) When the suction cup is adsorbed on the fragile thin sheet, due to the effect of air pressure, the thin sheet will produce local deformation, resulting in defects such as hidden cracks. 2) The suction cup cannot be used in a vacuum environment. 3) The suction cup is easy to leave suction cup marks on the fragile thin sheet, affecting the quality of the fragile thin sheet. Summary of the invention

[0003] In order to solve the problems existing in the above-mentioned prior art, the present invention provides a gripping device, which is not easy to cause fragments or hidden cracks, and can avoid contact marks on the coating surface, etc. In addition, it can also be used inside a vacuum chamber.

[0004] In a first aspect, some embodiments of the present invention provide a grasping device comprising: a bracket; a lifting assembly mounted on the bracket; a mounting plate, the mounting plate being fixed by the lifting assembly and the bracket and being able to move up and down under the control of the lifting assembly; a plurality of grasping parts, mounted on the mounting plate in a matrix shape and clamping and grasping the plurality of thin sheets in a manner capable of moving up, down, left, and right relative to the sheets.

[0005] The embodiment of the present invention adopts a plurality of grabbing parts arranged in a matrix, which can grab a plurality of sheets at a time, thereby improving production efficiency.

[0006] In some embodiments, the gripping portion includes a first gripping portion and a second gripping portion, wherein the first gripping portion and the second gripping portion are disposed opposite to each other with a predetermined distance therebetween and cooperate with each other to clamp and grip the sheet.

[0007] In some embodiments, the first gripping portion includes a first linear sliding body, a first sliding body connecting portion, a first mounting link, a first double-layer finger assembly, a first finger portion, a first drive mounting link and a first drive assembly; one end of the first double-layer finger assembly is connected to the mounting plate through the first mounting link, the first sliding body connecting portion and the first linear sliding body in sequence; the other end of the first double-layer finger assembly is connected to the mounting plate through the first drive mounting link and the first drive assembly; the first finger portion is fixed to the first double-layer finger assembly and extends downward; the second gripping portion includes a second linear sliding body, a second sliding body connecting portion, a second mounting link, a second double-layer finger assembly, a second finger portion, a second drive mounting link and a second drive assembly; one end of the second double-layer finger assembly is connected to the mounting plate through the second mounting link, the second sliding body connecting portion and the second linear sliding body in sequence; the other end of the second double-layer finger assembly is connected to the mounting plate through the second drive mounting link and the second drive assembly; the second finger portion is fixed to the second double-layer finger assembly and extends downward.

[0008] In some embodiments, tips of the first finger portion and the second finger portion are L-shaped when viewed from the side.

[0009] In some embodiments, the sheet is square or rectangular; the first double-layer finger assembly and the second double-layer finger assembly are capable of moving toward each other, and the ends of the first finger portion and the second finger portion grasp the four sides of the sheet in an inclined grasping manner relative to the edge of the sheet.

[0010] In some embodiments, the ends of the first finger portion and the second finger portion grasp the four edges of the thin sheet at a 45° tilt relative to the edge of the thin sheet; the ends of the first finger portion and the second finger portion are in line contact with the thin sheet.

[0011] In some embodiments, when the grasping device reaches above the grasping position for grasping the thin sheet, the first drive assembly and the second drive assembly respectively move the first double-layer finger assembly and the second double-layer finger assembly in a direction away from the thin sheet to open the first double-layer finger assembly and the second double-layer finger assembly, and the lifting assembly moves the ends of the first finger portion and the second finger portion down to below the thin sheet, and then the first drive assembly and the second drive assembly respectively move the first double-layer finger assembly and the second double-layer finger assembly in a direction close to the thin sheet to close the first double-layer finger assembly and the second double-layer finger assembly until the contact surfaces of the ends of the first finger portion and the second finger portion contact below the thin sheet, at which time, the lifting assembly moves the first double-layer finger assembly and the second double-layer finger assembly up to complete the grasping action of grasping the thin sheet.

[0012] In some embodiments, when the grasping device reaches above the lowering position for placing the sheet, the sheet is aligned with the lowering position through visual positioning, and the lifting assembly moves the first double-layer finger assembly and the second double-layer finger assembly down to the lowering position, and then the first drive assembly and the second drive assembly respectively move the first double-layer finger assembly and the second double-layer finger assembly away from the sheet to open the first double-layer finger assembly and the second double-layer finger assembly. At this time, the lifting assembly moves the first double-layer finger assembly and the second double-layer finger assembly up to complete the lowering action of placing the sheet.

[0013] In some embodiments, distal ends of the first finger portion and the second finger portion have inclined surfaces.

[0014] In some embodiments, a plurality of the gripping portions are mounted on the mounting plate in a 5×6 matrix.

[0015] The present invention adopts the method of gripping the slices by hooking with a clamp, without downward pressure, and is not easy to cause fragments or hidden cracks. In addition, the clamp fingers and the fragile slices are in side line contact, without contact marks on the coating surface, etc. In addition, it can also be used inside a vacuum chamber. That is, it has the following advantages: 1) This device imitates the grabbing action of a person, the method is simpler, and the efficiency is higher; 2) This device uses a single group to drive a single column or multiple columns, the device is prioritized, and the shape is simpler; 3) The number of parts in this structure is reduced, and the cost is lower; 4) Therefore, the structure is simpler, and installation and debugging are more convenient; 5) The fragile slices of this structure are less damaged, and the battery energy conversion efficiency is higher; 6) Similarly, the number of parts in this structure is less, the structure is simpler, and maintenance is more convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and, together with the description, serve to explain the principles of the present disclosure.

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings required for use in the description of the embodiments or the prior art are briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 It is an overall schematic diagram of the grabbing device involved in the present invention;

[0019] Figure 2 It is a partial schematic diagram of a grabbing device involved in the present invention;

[0020] Figure 3 It is another partial schematic diagram of the grabbing device involved in the present invention;

[0021] Figure 4 It is a schematic diagram of the relationship between the mounting plate 3, the first double-layer finger assembly 7 and the first driving assembly 10 of the gripping device according to the present invention;

[0022] Figure 5 It is a schematic diagram of the thin film grabbing of the grabbing device involved in the present invention.

[0023] In the figure: 1-bracket, 2-lifting assembly, 3-mounting plate, 4-first linear sliding body, 5-first sliding body connecting part, 6-first mounting link, 7-first double-layer finger assembly, 8-first finger part, 9-first drive mounting link, 10-first drive assembly, 11-second linear sliding body, 12-second sliding body connecting part, 13-second mounting link, 14-second double-layer finger assembly, 15-second finger part, 16-second drive mounting link, 17-second drive assembly, 18-thin sheet. DETAILED DESCRIPTION

[0024] In order to more clearly understand the above-mentioned purposes, features and advantages of the present disclosure, the embodiments of the present disclosure will be further described below. It should be noted that the embodiments of the present disclosure and the features in the embodiments can be combined with each other without conflict.

[0025] In the following description, many specific details are set forth to facilitate a full understanding of the present disclosure, but the present disclosure may also be implemented in other ways different from those described herein; obviously, the embodiments in the specification are only part of the embodiments of the present disclosure, rather than all of the embodiments.

[0026] At least in order to achieve the above-mentioned technical problem of using multiple grasping parts arranged in a matrix to grasp multiple thin sheets at a time and improve production efficiency, the first embodiment of the present application provides a grasping device, including: a bracket; a lifting component, installed on the bracket; a mounting plate, the mounting plate is fixed by the lifting component and the bracket, and can move up and down under the control of the lifting component; multiple grasping parts are installed on the mounting plate in a matrix shape and clamp and grasp the multiple thin sheets in a manner that can move up, down, left and right relative to the thin sheets.

[0027] It can be understood that the gripping device provided by the embodiment of the present application can effectively improve the technical defects existing in the gripping device using related technologies.

[0028] Combine the following Figure 1-Figure 5 The above grabbing device is exemplified and the structure of the grabbing device is exemplified. It should be noted that those skilled in the art can design different grabbing devices based on the concept of the above grabbing device according to specific needs. Figure 1-Figure 5 device.

[0029] First, briefly introduce the Figure 1-Figure 5 corresponding components or units.

[0030] Reference numeral 1 is used to characterize the bracket; reference numeral 2 is used to characterize the lifting assembly; reference numeral 3 is used to characterize the mounting plate; reference numeral 4 is used to characterize the first linear sliding body; reference numeral 5 is used to characterize the first sliding body connecting portion; reference numeral 6 is used to characterize the first mounting link; reference numeral 7 is used to characterize the first double-layer finger assembly; reference numeral 8 is used to characterize the first finger portion; reference numeral 9 is used to characterize the first drive mounting link; reference numeral 10 is used to characterize the first drive assembly; reference numeral 11 is used to characterize the second linear sliding body; reference numeral 12 is used to characterize the second sliding body connecting portion; reference numeral 13 is used to characterize the second mounting link; reference numeral 14 is used to characterize the second double-layer finger assembly; reference numeral 15 is used to characterize the second finger portion; reference numeral 16 is used to characterize the second drive mounting link; reference numeral 17 is used to characterize the second drive assembly; reference numeral 18 is used to characterize the sheet.

[0031] Next, the gripping devices of some embodiments of the present application are exemplarily described in combination with the above-mentioned figure marks.

[0032] like Figure 1 As shown, the gripping device provided by the embodiment of the present invention includes: a bracket 1; a lifting component 2, which is installed on the bracket 1; a mounting plate 3, which is fixed by the lifting component 2 and the bracket 1 and can move up and down through the control of the lifting component 2; a plurality of gripping parts, which are installed on the mounting plate 3 in a matrix shape and can clamp and grip the plurality of thin sheets 18 in a manner that can move up, down, left and right relative to the thin sheets 18.

[0033] Here, the bracket 1 can be fixed to the ceiling of the factory. The thin sheet 18 can be a square or rectangular silicon sheet. The lifting component 2 can use a linear drive method such as a linear motor, a cylinder, a hydraulic cylinder, etc., but is not limited thereto.

[0034] like Figure 1 As shown, the gripping portion includes a first gripping portion and a second gripping portion, which are disposed opposite to each other with a predetermined distance therebetween and clamp the gripping sheet 18 in cooperation with each other.

[0035] like Figure 1 , Figure 2 , Figure 4 As shown, the first gripping portion includes a first linear sliding body 4, a first sliding body connecting portion 5, a first mounting link 6, a first double-layer finger assembly 7, a first finger portion 8, a first drive mounting link 9 and a first drive assembly 10; one end of the first double-layer finger assembly 7 is connected to the mounting plate 3 through the first mounting link 6, the first sliding body connecting portion 5 and the first linear sliding body 4 in sequence; the other end of the first double-layer finger assembly 7 is connected to the mounting plate 3 through the first drive mounting link 9 and the first drive assembly 10; the first finger portion 8 is fixed to the first double-layer finger assembly 7 and extends downward; the second gripping portion It includes a second linear sliding body 11, a second sliding body connecting part 12, a second mounting link 13, a second double-layer finger assembly 14, a second finger part 15, a second drive mounting link 16 and a second drive assembly 17; one end of the second double-layer finger assembly 14 is connected to the mounting plate 3 through the second mounting link 13, the second sliding body connecting part 12 and the second linear sliding body 11 in sequence; the other end of the second double-layer finger assembly 14 is connected to the mounting plate 3 through the second drive mounting link 16 and the second drive assembly 17; the second finger part 15 is fixed to the second double-layer finger assembly 14 and extends downward.

[0036] Here, the first driving assembly 10 and the second driving assembly 17 can use linear driving methods such as linear motors, air cylinders, and oil cylinders, but are not limited thereto.

[0037] like Figure 1 As shown, the distal ends of the first finger portion 8 and the second finger portion 15 are L-shaped when viewed from the side.

[0038] That is, from perpendicular to Figure 1 When viewed from the direction of the finger, the ends of the first finger portion 8 and the second finger portion 15 are L-shaped.

[0039] like Figure 1 , Figure 5 As shown, the sheet 18 is square or rectangular;

[0040] The first double-layer finger assembly 7 and the second double-layer finger assembly 14 are capable of moving toward each other, and the tips of the first finger portion 8 and the second finger portion 15 grasp the four sides of the sheet 18 in an inclined grasping manner relative to the edge of the sheet 18 .

[0041] like Figure 5 As shown, the tips of the first finger 8 and the second finger 15 grasp the four edges of the sheet 18 at a 45° angle relative to the edge of the sheet 18 ; the tips of the first finger 8 and the second finger 15 are in line contact with the sheet 18 .

[0042] In addition, the inclination angle is not limited to 45°, and other inclination angles such as 30°, 60°, etc. may also be used.

[0043] like Figure 1 , Figure 5 As shown, when the grasping device reaches above the grasping position for grasping the sheet 18, the first driving assembly 10 and the second driving assembly 17 respectively move the first double-layer finger assembly 7 and the second double-layer finger assembly 14 in a direction away from the sheet 18 to open the first double-layer finger assembly 7 and the second double-layer finger assembly 14, and the lifting assembly 2 moves the ends of the first finger portion 8 and the second finger portion 15 down to below the sheet 18, and then the first driving assembly 10 and the second driving assembly 17 respectively move the first double-layer finger assembly 7 and the second double-layer finger assembly 14 in a direction close to the sheet 18 to close the first double-layer finger assembly 7 and the second double-layer finger assembly 14, until the contact surfaces of the ends of the first finger portion 8 and the second finger portion 15 contact below the sheet 18, at which time, the lifting assembly 2 moves the first double-layer finger assembly 7 and the second double-layer finger assembly 14 up to complete the grasping action of grasping the sheet 18.

[0044] When the gripping device reaches above the lowering position for placing the sheet 18, the sheet 18 is aligned with the lowering position through visual positioning, and the lifting component 2 moves the first double-layer finger component 7 and the second double-layer finger component 14 down to the lowering position, and then the first drive component 10 and the second drive component 17 respectively move the first double-layer finger component 7 and the second double-layer finger component 14 away from the sheet 18 to open the first double-layer finger component 7 and the second double-layer finger component 14. At this time, the lifting component 2 moves the first double-layer finger component 7 and the second double-layer finger component 14 up to complete the lowering action of placing the sheet 18.

[0045] like Figure 1 As shown, the first finger portion 8 and the second finger portion 15 have inclined surfaces at their distal ends.

[0046] Here, the inclined surface is a flat surface, but the inclined surface may also be an arc surface or other curved surfaces.

[0047] like Figure 1 , Figure 3 As shown, a plurality of gripping portions are mounted on the mounting plate 3 in a 5×6 matrix arrangement.

[0048] Here, the 5×6 matrix is ​​only an example, and the present invention is not limited to the number of columns of sheets grasped each time, nor is it limited to the number of sheets in each column, etc. For example, multiple grasping parts can also be installed in a 6×5 matrix arrangement.

[0049] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0050] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0051] In the description of the invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the invention can be understood according to specific circumstances.

[0052] For those skilled in the art, any modifications and changes made according to the above-mentioned embodiments of the present invention should be included in the protection scope of the present invention without departing from the spirit of the present invention.

Claims

1. A gripping device, characterized in that: include: Bracket (1); A lifting assembly (2) mounted on the bracket (1); A mounting plate (3), wherein the mounting plate (3) is fixed by the lifting assembly (2) and the bracket (1), and is capable of moving up and down under the control of the lifting assembly (2); A plurality of gripping parts are mounted on the mounting plate (3) in a matrix shape and are capable of clamping and gripping the plurality of thin sheets (18) in a manner that allows them to move up, down, left, and right relative to the thin sheets (18).

2. The gripping device according to claim 1, characterized in that: The gripping portion comprises a first gripping portion and a second gripping portion, wherein the first gripping portion and the second gripping portion are arranged opposite to each other with a predetermined distance therebetween and cooperate with each other to clamp and grip the sheet (18).

3. The gripping device according to claim 2, characterized in that: The first gripping portion comprises a first linear sliding body (4), a first sliding body connecting portion (5), a first mounting link (6), a first double-layer finger assembly (7), a first finger portion (8), a first drive mounting link (9) and a first drive assembly (10); One end of the first double-layer finger assembly (7) is connected to the mounting plate (3) through the first mounting link (6), the first sliding body connecting portion (5), and the first linear sliding body (4) in sequence; The other end of the first double-layer finger assembly (7) is connected to the mounting plate (3) via the first drive mounting link (9) and the first drive assembly (10); The first finger portion (8) is fixed to the first double-layer finger assembly (7) and extends downward; The second gripping portion comprises a second linear sliding body (11), a second sliding body connecting portion (12), a second mounting link (13), a second double-layer finger assembly (14), a second finger portion (15), a second drive mounting link (16) and a second drive assembly (17); One end of the second double-layer finger assembly (14) is connected to the mounting plate (3) through the second mounting link (13), the second sliding body connecting portion (12), and the second linear sliding body (11) in sequence; The other end of the second double-layer finger assembly (14) is connected to the mounting plate (3) via the second drive mounting link (16) and the second drive assembly (17); The second finger portion (15) is fixed to the second double-layer finger assembly (14) and extends downward.

4. The gripping device according to claim 3, characterized in that: The ends of the first finger portion (8) and the second finger portion (15) are L-shaped when viewed from the side.

5. The gripping device according to claim 3, characterized in that: The thin sheet (18) is square or rectangular; The first double-layer finger assembly (7) and the second double-layer finger assembly (14) are capable of moving in opposite directions, and the ends of the first finger portion (8) and the second finger portion (15) grasp the four edges of the thin sheet (18) in an inclined grasping manner relative to the edge of the thin sheet (18).

6. The gripping device according to claim 5, characterized in that: The ends of the first finger portion (8) and the second finger portion (15) grasp the four edges of the thin sheet (18) in a manner of grasping at an angle of 45° relative to the edge of the thin sheet (18); The ends of the first finger portion (8) and the second finger portion (15) are in line contact with the sheet (18).

7. The gripping device according to claim 3, characterized in that: When the grasping device reaches above the grasping position for grasping the thin sheet (18), the first driving assembly (10) and the second driving assembly (17) respectively move the first double-layer finger assembly (7) and the second double-layer finger assembly (14) away from the thin sheet (18) to open the first double-layer finger assembly (7) and the second double-layer finger assembly (14), and the lifting assembly (2) moves the ends of the first finger portion (8) and the second finger portion (15) downward to below the thin sheet (18), and then the first driving assembly (10) and the second driving assembly (17) move upward to below the thin sheet (18). The second driving assembly (17) respectively moves the first double-layer finger assembly (7) and the second double-layer finger assembly (14) in a direction close to the thin sheet (18) to close the first double-layer finger assembly (7) and the second double-layer finger assembly (14) until the contact surfaces at the ends of the first finger portion (8) and the second finger portion (15) contact the bottom of the thin sheet (18). At this time, the lifting assembly (2) moves the first double-layer finger assembly (7) and the second double-layer finger assembly (14) upward to complete the grasping action of grasping the thin sheet (18).

8. The gripping device according to claim 3, characterized in that: When the gripping device reaches above the lowering position for lowering the sheet (18), the sheet (18) is aligned with the lowering position through visual positioning, and the lifting component (2) causes the first double-layer finger component (7) and the second double-layer finger component (14) to move downward to the lowering position, and then the first driving component (10) and the second driving component (17) respectively cause the first double-layer finger component (7) and the second double-layer finger component (14) to move away from the sheet (18) to open the first double-layer finger component (7) and the second double-layer finger component (14), and at this time, the lifting component (2) causes the first double-layer finger component (7) and the second double-layer finger component (14) to move upward to complete the lowering action of the sheet (18).

9. The gripping device according to claim 3, characterized in that: The ends of the first finger portion (8) and the second finger portion (15) have inclined surfaces.

10. The gripping device according to claim 1, characterized in that: The plurality of gripping portions are mounted on the mounting plate (3) in a 5×6 matrix arrangement.

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