Flexible ionizing three-dimensional force sensor and sensing array

Abstract

A dome structure is provided with a protrusion and a substrate, one end of the protrusion is attached to one side of the substrate, the other side of the substrate is attached to one side of a first flexible substrate, the other side of the first flexible substrate is attached to one side of a first electrode, and the other side of the first electrode is attached to the other side of a second electrode. The other face of the first electrode is attached to one face of the insulating spacer layer, the other face of the insulating spacer layer is attached to one face of the three-dimensional force sensitive layer, one face of the three-dimensional force sensitive layer is provided with a graded unstable microstructure, the other face of the three-dimensional force sensitive layer is attached to one face of the second electrode, and the other face of the second electrode is attached to one face of the second flexible substrate. The three-dimensional force sensitive layer is doped with a conductive filler, the conductive filler is composed of ionic liquid and conductive particles, the surface of the electrode is sprayed with a mixture of a micro-nano conductive material and a binder, and the electrode and the three-dimensional force sensitive layer are each in a circular equant sector shape.

Description

Technical Field

[0001] The invention belongs to the technical field of sensors, and in particular relates to a flexible ionization type three-dimensional force sensor and a sensor array. Background Art

[0002] At present, intelligent assembly has become the mainstream development direction of modern manufacturing industry. In the process of intelligent assembly, it is necessary to rely on manipulators and sensors to achieve high-precision and high-sensitivity operations to cope with increasingly complex work tasks. As the execution unit of the intelligent assembly system, the manipulator can perform a series of tasks from simple handling to complex assembly with its powerful programmability and precise motion control capabilities. Sensors, as "tentacles" for sensing external environmental information, are responsible for real-time collection and processing of various physical quantities in the working process of the manipulator, such as position, speed, force, etc., to provide accurate data support for decision-making. Especially in terms of three-dimensional force perception, high-precision sensors can capture subtle force changes during the assembly process, ensuring that every action is just right, avoiding damage or assembly failure due to improper force.

[0003] However, in the face of the growing demand for smart manufacturing, the application of traditional sensors in the field of smart assembly has gradually revealed its limitations. The problem of insufficient sensitivity limits the sensor's ability to capture subtle force changes, making it difficult to achieve ideal control accuracy in precision assembly; the narrow range means that the sensor is unable to cope with large-scale force changes, limiting its scope of application; and excessive interference further exacerbates the inaccuracy of the data and affects the stability and reliability of assembly operations. The combined effect of these problems not only increases the uncertainty in the assembly process, but also reduces the overall production efficiency and product quality, thus restricting the further development and popularization of smart assembly technology to a certain extent. Summary of the invention

[0004] The purpose of the present invention is to overcome the problem that the sensor has a narrow measuring range and insufficient sensitivity, which leads to the inability to realize intelligent assembly under various working conditions, and proposes a flexible ionizing three-dimensional force sensor and a sensor array.

[0005] In order to achieve the above object, the present invention adopts the following technical scheme:

[0006] A flexible ionization type three-dimensional force sensor comprises a dome structure, a flexible substrate, an electrode, an insulating spacer layer and a three-dimensional force sensitive layer. The flexible substrate comprises a first flexible substrate and a second flexible substrate, the electrode comprises a first electrode and a second electrode, the dome structure is provided with a protrusion and a substrate, one end of the protrusion is bonded to one side of the substrate, the other side of the substrate is bonded to one side of the first flexible substrate, the other side of the first flexible substrate is bonded to one side of the first electrode, the other side of the first electrode is bonded to one side of the insulating spacer layer, the other side of the insulating spacer layer is bonded to one side of the three-dimensional force sensitive layer, one side of the three-dimensional force sensitive layer has a graded unstable microstructure, the other side of the three-dimensional force sensitive layer is bonded to one side of the second electrode, the other side of the second electrode is bonded to one side of the second flexible substrate, the three-dimensional force sensitive layer is doped with a conductive filler, the conductive filler consists of an ionic liquid and conductive particles, a micro-nano conductive material and a binder mixture is sprayed on the surface of the electrode, and the electrode and the three-dimensional force sensitive layer are both circular and equally divided into sectors.

[0007] A method for preparing a flexible ionization type three-dimensional force sensor, wherein the method comprises the following steps: laminating a dome structure, a flexible substrate, an electrode, an insulating spacer layer and a three-dimensional force sensitive layer in the order of a protrusion, a substrate, a first flexible substrate, a first electrode, an insulating spacer layer, a three-dimensional force sensitive layer, a second electrode and a second flexible substrate;

[0008] The protrusions are made of flexible high molecular polymer material doped with inorganic materials;

[0009] The substrate is made of flexible high polymer material;

[0010] The flexible substrate adopts a flexible high molecular polymer elastomer film;

[0011] The electrode is a polymer film with a micro-nano conductive material on the surface. The electrode is prepared by: the micro-nano conductive material and the binder are evenly mixed and then sprayed on the surface of the polymer film;

[0012] The three-dimensional force sensitive layer adopts an elastomer composite film doped with a conductive filler, and the conductive filler and the elastomer in the elastomer composite film doped with a conductive filler are mixed in a solvent dispersion manner.

[0013] Furthermore, the other side of the substrate is bonded to one side of the first flexible substrate by dispensing, the other side of the first flexible substrate is bonded to one side of the first electrode, and the other side of the second electrode is bonded to one side of the second flexible substrate by hot pressing or dispensing.

[0014] Furthermore, the inorganic material in the flexible high molecular polymer material doped with inorganic material is selected from one or more of nano silicon dioxide and hexagonal boron nitride;

[0015] The flexible high molecular polymer material is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers and polyolefin elastomers;

[0016] The flexible polymer elastomer film is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers and polyolefin elastomers;

[0017] The micro-nano conductive material in the high molecular polymer film with the surface covered with micro-nano conductive material is selected from one or more of carbon-based conductive materials and two-dimensional inorganic compounds with metallic conductivity;

[0018] The polymer film in the polymer film with micro-nano conductive material on the surface is selected from polyethylene terephthalate film;

[0019] The adhesive is styrene-butadiene rubber;

[0020] The conductive filler in the conductive filler-doped elastomer composite film consists of ionic liquid and conductive particles;

[0021] The elastomer in the elastomer composite film doped with conductive fillers is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers and polyolefin elastomers.

[0022] Further, the carbon-based conductive material is selected from one or more of single-layer graphene, multi-layer graphene, carbon black, single-walled carbon nanotubes and multi-walled carbon nanotubes;

[0023] The two-dimensional inorganic compound with metallic conductivity is Mxene;

[0024] The conductive particles are one or more of Mxene, graphene, and carbon nanotubes;

[0025] The ionic liquid is selected from one or more of poly(3,4-ethylenedioxythiophene), polystyrene sulfonic acid, and 1-ethyl-3-methylimidazoline bis(trifluoromethylsulfonyl)imide.

[0026] A flexible ionization type three-dimensional force sensing array comprises a dome structure array, a flexible substrate, an electrode array, an insulating spacer layer array and a three-dimensional force sensitive layer array, wherein the flexible substrate comprises a first flexible substrate part and a second flexible substrate part, the electrode array comprises a first electrode array and a second electrode array, the dome structure array is provided with a protrusion array and a dome substrate, one side of the protrusion array is bonded to one side of the dome substrate, the other side of the dome substrate is bonded to one side of the first flexible substrate, the other side of the first flexible substrate part is bonded to one side of the first electrode array, the other side of the first electrode array is bonded to one side of the insulating spacer layer array, the other side of the insulating spacer layer array is bonded to one side of the three-dimensional force sensitive layer array, one side of the three-dimensional force sensitive layer array has a graded unstable microstructure, the other side of the three-dimensional force sensitive layer array is bonded to one side of the second electrode array, the other side of the second electrode array is bonded to one side of the second flexible substrate part, the three-dimensional force sensitive layer array is doped with a conductive filler, the conductive filler consists of an ionic liquid and conductive particles, and the surface of the electrode array is sprayed with a mixture of micro-nano conductive material and adhesive.

[0027] A method for preparing a flexible ionization type three-dimensional force sensing array, to prepare the flexible ionization type three-dimensional force sensing array, comprising the following steps: laminating a dome structure array, a flexible substrate, an electrode array, an insulating spacer layer array and a three-dimensional force sensitive layer array in the order of a protrusion array, a dome substrate, a first flexible substrate part, a first electrode array, an insulating spacer layer array, a three-dimensional force sensitive layer array, a second electrode array and a second flexible substrate part;

[0028] The protrusion array is made of flexible high molecular polymer material doped with inorganic materials;

[0029] The dome base is made of flexible high polymer material;

[0030] The dome structure array is manufactured by scraping a flexible high molecular polymer mixture doped with an inorganic material and a flexible high molecular polymer in batches in a dome structure array mold;

[0031] The flexible substrate adopts a flexible high molecular polymer elastomer film;

[0032] The electrode array uses a polymer film with a micro-nano conductive material on the surface. The electrode array is prepared by: the micro-nano conductive material and the binder are evenly mixed and then sprayed on the surface of the polymer film, and the polymer film pattern with the micro-nano conductive material on the surface is cut by laser etching to obtain the electrode array;

[0033] The three-dimensional force sensitive layer array uses an elastomeric composite film doped with conductive fillers. The specific preparation method of the three-dimensional force sensitive layer array is: an elastomeric composite film doped with conductive fillers and having a graded unstable microstructure is prepared by solvent dispersion and molding, and the three-dimensional force sensitive layer array is obtained by laser etching and cutting.

[0034] Furthermore, the other side of the dome substrate is bonded to one side of the first flexible substrate portion by dispensing, the other side of the first flexible substrate portion is bonded to one side of the first electrode array, and the other side of the second electrode array is bonded to one side of the second flexible substrate portion by hot pressing or dispensing.

[0035] Furthermore, the inorganic material in the flexible high molecular polymer material doped with inorganic material is selected from one or more of nano silicon dioxide and hexagonal boron nitride;

[0036] The flexible high molecular polymer material is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers and polyolefin elastomers;

[0037] The flexible polymer elastomer film is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers and polyolefin elastomers;

[0038] The micro-nano conductive material in the high molecular polymer film with the surface covered with micro-nano conductive material is selected from one or more of carbon-based conductive materials and two-dimensional inorganic compounds with metallic conductivity;

[0039] The polymer film in the polymer film with micro-nano conductive material on the surface is selected from polyethylene terephthalate film;

[0040] The adhesive is styrene-butadiene rubber;

[0041] The conductive filler in the conductive filler-doped elastomer composite film consists of ionic liquid and conductive particles;

[0042] The elastomer in the elastomer composite film doped with conductive fillers is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers and polyolefin elastomers.

[0043] Further, the carbon-based conductive material is selected from one or more of single-layer graphene, multi-layer graphene, carbon black, single-walled carbon nanotubes and multi-walled carbon nanotubes;

[0044] The two-dimensional inorganic compound with metallic conductivity is Mxene;

[0045] The conductive particles are one or more of Mxene, graphene, and carbon nanotubes;

[0046] The ionic liquid is selected from one or more of poly(3,4-ethylenedioxythiophene), polystyrene sulfonic acid, and 1-ethyl-3-methylimidazoline bis(trifluoromethylsulfonyl)imide.

[0047] Compared with the prior art, the present invention has the following beneficial technical effects:

[0048] The present invention proposes a flexible ionization three-dimensional force sensor, in which a mixture of micro-nano conductive material and adhesive is sprayed on the electrode surface so that the electrode surface has an irregular microstructure, which can work together with the graded unstable microstructure on the surface of the three-dimensional force sensitive layer to improve the sensitivity of the sensor. The graded unstable microstructure is some irregular concave-convex structures with uneven distribution similar to the sandpaper structure. Gradation refers to the inconsistent height of the concave-convex structure, and instability refers to the uneven convex part, for example, the head of the convex part has a larger diameter than its root. One side of the three-dimensional force sensitive layer has a graded unstable microstructure, which can enable the sensor to maintain a large deformation within a wide pressure range. The three-dimensional force sensitive layer is doped with a conductive filler composed of ionic liquid and conductive particles, which not only improves the sensitivity of the sensor but also widens the range of the sensor. Among them, the conductive particles increase the modulus of the three-dimensional force sensitive layer and widen the range of the flexible ionized three-dimensional force sensor. The ionic liquid improves the sensitivity of the flexible ionized three-dimensional force sensor, but too much ionic liquid will lead to an increase in the plasticity of the ion membrane, which is not conducive to the increase in the modulus of the three-dimensional force sensitive layer, thereby hindering the widening of the range of the sensor. By adjusting the ionic liquid and the conductive particles to reach a balanced state, a highly sensitive and wide-range flexible ionized three-dimensional force sensor is obtained. By constructing graded unstable microstructures on the surface of the three-dimensional force sensitive layer, doping conductive fillers in the three-dimensional force sensitive layer, constructing irregular microstructures on the electrode surface, and dividing the three-dimensional force sensitive layer and the electrode into circular blocks of fan-shaped blocks, the requirements of wide range, high sensitivity, and three-dimensional force perception are achieved, thereby realizing the application verification of intelligent assembly under various working conditions, and providing solid theoretical and technical support for the development of intelligent assembly towards refinement and accuracy. The experimental results show that the flexible ionization type three-dimensional force sensor provided by the present invention has the advantages of high sensitivity and wide range, among which, high sensitivity: the maximum capacitance change of positive pressure is about 12.5nF, and the maximum capacitance change of tangential force is about 10nF; wide range: the positive pressure sensing range is 0.2~13.05N, the X tangential force sensing range is 0.02~2.14N, and the Y tangential force sensing range is 0.0~2.5N.

[0049] The present invention proposes a method for preparing a flexible ionization type three-dimensional force sensor. The electrode is obtained by spraying a micro-nano conductive material and a binder uniformly on the surface of a polymer film, so that the electrode surface has an irregular microstructure, which can work together with the graded unstable microstructure on the surface of the three-dimensional force sensitive layer to improve the sensitivity of the sensor. A flexible ionization type three-dimensional force sensor prepared by the preparation method of the present invention has good flexibility and a wide range. The contact area between the dielectric layer and the electrode changes under force conditions, and the sensitivity is high. It can be used to realize precise grasping and intelligent assembly operations of a manipulator under multiple working conditions.

[0050] The present invention proposes a flexible ionization type three-dimensional force sensing array, in which the introduction of a spacer layer can effectively disperse the stress coupling generated by the excessively large Young's modulus of the material, thereby reducing the crosstalk between adjacent units of the ionization type sensing array.

[0051] A flexible ion-type three-dimensional force sensor array proposed in the present invention can be well attached to the surface of the robot finger, which plays a vital role in realizing intelligent assembly under various working conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] The drawings in the specification are used to provide further understanding of the present invention and constitute a part of the present invention. The schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0053] Figure 1 The figure is a schematic structural diagram of a flexible ion-type three-dimensional force sensor of the present invention.

[0054] Figure 2 The figure is a schematic structural diagram of a flexible ionized three-dimensional force sensing array of the present invention.

[0055] Figure 3 This is a schematic diagram of single-point performance of a first embodiment of a flexible ion-type three-dimensional force sensor of the present invention.

[0056] Figure 4 The figure is a schematic diagram of the dynamic response speed of a first embodiment of a flexible ion-type three-dimensional force sensor according to the present invention.

[0057] Figure 5 This is a schematic diagram of a cyclic test of a first embodiment of a flexible ionizing three-dimensional force sensor of the present invention.

[0058] Figure 6 This is a schematic diagram of the single-point performance of comparative example 1 of a flexible ion-type three-dimensional force sensor of the present invention.

[0059] Figure 7 This is a schematic diagram of the single-point performance of comparative example 2 of a flexible ion-type three-dimensional force sensor of the present invention.

[0060] Figure 8 This is an illustration of the partitioning of a three-dimensional force sensor of Embodiment 3 of a flexible ion-type three-dimensional force sensor of the present invention.

[0061] Fig. 9 This is a schematic diagram of the positive pressure response of a third embodiment of a flexible ion-type three-dimensional force sensor of the present invention.

[0062] Fig.10 This is a schematic diagram of the force response in the X direction when the positive pressure is 2N in Example 3 of a flexible ion-type three-dimensional force sensor of the present invention.

[0063] Fig.11 This is a schematic diagram of the force response in the Y direction when the positive pressure is 2N in Example 3 of a flexible ion-type three-dimensional force sensor of the present invention.

[0064] Among them, there are a flexible ionization three-dimensional force sensor 1; a protrusion 101; a substrate 102; a first flexible substrate 103; a first electrode 104; an insulating spacer layer 105; a three-dimensional force sensitive layer 106; a second electrode 107; a second flexible substrate 108; a flexible ionization three-dimensional force sensing array 2; a protrusion array 201; a dome substrate 202; a first flexible substrate portion 203; a first electrode array 204; an insulating spacer layer array 205; a three-dimensional force sensitive layer array 206; a second electrode array 207; and a second flexible substrate portion 208. DETAILED DESCRIPTION

[0065] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0066] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0067] Embodiment 1

[0068] This embodiment provides a method for preparing a flexible ion-type three-dimensional force sensor, and the method comprises the following steps:

[0069] (1) Preparation of dome structure: PDMS was mixed in a ratio of stock solution: curing agent = 10:1, the inorganic material and the mixed PDMS were dispersed, stirred evenly, and the inorganic material / PDMS mixed solution was scraped on the mold with the truncated cone groove to fully fill the truncated cone groove, and then PDMS was mixed in a ratio of stock solution: curing agent = 10:1 and scraped on the mold, and vacuumed for 30 minutes. The dome structure was obtained by heating and curing.

[0070] (2) Preparation of the first flexible substrate and the first electrode assembly: The micro-nano conductive material (MXene) and the binder (SBR) are evenly mixed and then sprayed on the surface of the polymer film (PET), and a specific electrode shape is obtained by laser etching technology. The micro-nano conductive material (MXene) and the binder (SBR) are evenly mixed and sprayed so that the electrode surface has an irregular microstructure. Subsequently, the first flexible substrate and the first electrode are combined by hot pressing or dispensing to finally obtain the first flexible substrate and the first electrode assembly.

[0071] (3) Preparation of three-dimensional force-sensitive layer: The thermoplastic polyurethane elastomer is thoroughly dispersed using a solvent under magnetic stirring at 80°C. Keeping the magnetic stirring temperature constant, conductive fillers (1-ethyl-3-methylimidazoline bis(trifluoromethylsulfonyl)imide and MXene) are added to the dispersed solution and mixed thoroughly. The fully mixed solution is transferred to a template with an anti-hierarchical unstable microstructure. Finally, the solvent is evaporated at 80°C to obtain a three-dimensional force-sensitive layer.

[0072] (4) Preparation of the lower electrode and lower flexible substrate assembly: The micro-nano conductive material (MXene) and the binder (SBR) are evenly mixed and then sprayed on the surface of the polymer film (PET), and a specific electrode shape is obtained by laser etching technology. The micro-nano conductive material (MXene) and the binder (SBR) are evenly mixed and sprayed so that the electrode surface has an irregular microstructure. Subsequently, the second flexible substrate and the second electrode are combined by hot pressing or dispensing to finally obtain the second electrode and the second flexible substrate assembly.

[0073] (5) Assembly of a flexible ion-type three-dimensional force sensor: Align and combine the first flexible substrate with the first electrode assembly, the insulating spacer layer, and the three-dimensional force sensitive layer by dispensing to obtain a first flexible substrate-first electrode-insulating spacer layer-three-dimensional force sensitive layer assembly. Then align and combine the assembly with the second electrode and the second flexible substrate assembly by hot pressing or dispensing to obtain a first flexible substrate-first electrode-insulating spacer layer-three-dimensional force sensitive layer-second electrode-second flexible substrate assembly. Finally, combine the dome structure with the first flexible substrate by dispensing to obtain a flexible ion-type three-dimensional force sensor, such as Figure 1 shown.

[0074] The single-point performance diagram of the pressure sensor is as follows: Figure 3 shown.

[0075] See also Figure 4 In order to evaluate the dynamic response speed of the sensor, a positive pressure of about 1.75N was manually loaded on a flexible ion-type three-dimensional force sensor and then quickly released. The results showed that the response time was 12ms and the relaxation time was 18ms.

[0076] See also Figure 5 For flexible sensors, high mechanical durability under long-term or cyclic use also plays a vital role in reliable input-output relationship. Under a peak pressure of 1.5N, more than 8000 repeated compression / release tests were conducted, and a flexible ion-type three-dimensional force sensor showed good capacitance response consistency during the cyclic test period.

[0077] Comparative Example 1

[0078] This comparative example provides a flexible ionization type three-dimensional force sensor, which is different from the first embodiment in that the conductive filler in the three-dimensional force sensitive layer is 1-ethyl-3-methylimidazoline bis(trifluoromethylsulfonyl)imide.

[0079] The single-point performance diagram of the pressure sensor is as follows: Figure 6 shown.

[0080] The test results of Example 1 and Comparative Example 1 show that adding MXene to the sensitive layer can broaden the measuring range of the sensor.

[0081] Comparative Example 2

[0082] This comparative example provides a flexible ionization type three-dimensional force sensor, which is different from the first embodiment in that the first electrode and the second electrode are both copper electrodes.

[0083] The single-point performance diagram of the pressure sensor is as follows: Figure 7 shown.

[0084] The test results of Example 1 and Comparative Example 2 show that, compared with ordinary metal electrodes, the electrode with irregular microstructure on the surface designed and prepared in Example 1 can improve the sensitivity of the sensor.

[0085] Embodiment 2

[0086] A flexible ionization type three-dimensional force sensor, comprising a dome structure, a flexible substrate, an electrode, an insulating spacer layer 105 and a three-dimensional force sensitive layer 106, wherein the flexible substrate comprises a first flexible substrate 103 and a second flexible substrate 108, and the electrode comprises a first electrode 104 and a second electrode 107. The dome structure is provided with a protrusion 101 and a substrate 102, wherein one end of the protrusion 101 is bonded to one side of the substrate 102, and the other side of the substrate 102 is bonded to one side of the first flexible substrate 103, and the other side of the first flexible substrate 103 is bonded to one side of the first electrode 104, and the other side of the first electrode 104 is bonded to the insulating spacer layer 105. One side of the insulating spacer layer 105 is bonded, the other side of the insulating spacer layer 105 is bonded to one side of the three-dimensional force sensitive layer 106, one side of the three-dimensional force sensitive layer 106 has a graded unstable microstructure, the other side of the three-dimensional force sensitive layer 106 is bonded to one side of the second electrode 107, the other side of the second electrode 107 is bonded to one side of the second flexible substrate 108, the three-dimensional force sensitive layer 106 is doped with conductive fillers, the conductive fillers are composed of ionic liquid and conductive particles, the surface of the electrode is sprayed with a mixture of micro-nano conductive materials and adhesives, and the electrode and the three-dimensional force sensitive layer 106 are both circular and equally divided into sectors.

[0087] Embodiment 3

[0088] A method for preparing a flexible ion-type three-dimensional force sensor, comprising the following steps:

[0089] The raised force-bearing part of the dome structure is made of a flexible high-molecular polymer doped with inorganic materials, and the base part is made of a flexible high-molecular polymer; the first flexible base and the second flexible base are flexible high-molecular polymer films; the first electrode and the second electrode are high-molecular polymer films with micro-nano conductive materials on the surface; and the three-dimensional force-sensitive layer is an elastomeric composite film doped with conductive fillers.

[0090] The inorganic material of the dome structure is selected from one or more of nano-silicon dioxide and hexagonal boron nitride; the flexible high molecular polymer is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers and polyolefin elastomers. The convex force-bearing part and the base part of the dome structure are prepared by mold inversion. The convex force-bearing part of the dome structure is truncated cone-shaped, with a top circular diameter of 2 to 3 mm, a bottom circular diameter of 3.5 to 4.5 mm, and a truncated cone height of 1.5 to 2 mm. The flexible high molecular polymer film of the first flexible substrate and the second flexible substrate is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers and polyolefin elastomers. The first flexible substrate and the dome structure are combined by dispensing.

[0091] The micro-nano conductive materials of the first electrode and the second electrode are selected from one or more of carbon-based conductive materials and two-dimensional inorganic compounds with metallic conductivity; the carbon-based conductive materials are selected from one or more of single-layer graphene, multi-layer graphene, carbon black, single-walled carbon nanotubes and multi-walled carbon nanotubes; the two-dimensional inorganic compound with metallic conductivity is Mxene; the polymer film of the first electrode and the second electrode is selected from polyethylene terephthalate (PET) film. The preparation method of the first electrode and the second electrode is that the micro-nano conductive material and the binder (SBR) are evenly mixed and then sprayed on the surface of the polymer film. The first electrode and the second electrode are divided into four parts by laser cutting or manual cutting, each part is a quarter circle with a radius of 2.25mm and the interval between each part is 0.5mm. The thickness of the first electrode and the second electrode is 55-65μm.

[0092] The conductive filler in the three-dimensional force sensitive layer is composed of ionic liquid and conductive particles; the conductive particles are one or more of Mxene, graphene, and carbon nanotubes; the ionic liquid is selected from one or more of poly (3,4-ethylenedioxythiophene), polystyrene sulfonic acid, and 1-ethyl-3-methylimidazoline bis (trifluoromethylsulfonyl) imide. The elastomer in the elastomer composite film is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers, and polyolefin elastomers. The mixing method of the conductive filler and the elastomer is solvent dispersion.

[0093] The three-dimensional force sensitive layer is divided into four equal parts by laser cutting or manual cutting, each part is a quarter circle with a radius of 2.25 mm and the interval between each part is 0.5 mm. The upper surface of the three-dimensional force sensitive layer has a graded unstable microstructure.

[0094] See also Figure 8, the performance of the three-dimensional force sensor prepared according to the above scheme was tested. Since the manipulator is often subjected to a certain positive pressure when sensing the tangential force during the intelligent assembly process, in order to make this test more suitable for actual use scenarios, the responses in the X and Y directions were performed under the condition of a positive pressure of 2N. The corresponding positive pressure response, X-direction force response, and Y-direction force response are shown in 7, Fig.10 and Fig.11 shown.

[0095] See also Fig. 9 It can be seen from the positive pressure response data graph that the three-dimensional force sensor designed and prepared in this embodiment has a good capacitive response to positive pressure.

[0096] See also Fig.10 and Fig.11 , from the capacitance response data graph of the X-direction and Y-direction forces (hereinafter referred to as tangential forces) when the positive pressure is 2N, it can be seen that when the sensor is subjected to a 2N positive pressure and a changing tangential force, the capacitance change of the two small sub-block sensors in the direction of the tangential force increases with the increase of the tangential force, and the capacitance change of the two small sub-block sensors in the opposite direction of the tangential force decreases with the increase of the tangential force. It can be concluded that the flexible ionization type three-dimensional force sensor designed and prepared by this embodiment has a three-dimensional force sensing function, and realizes the high sensitivity of the sensor: the maximum capacitance change of the positive pressure is about 12.5nF, the maximum capacitance change of the tangential force is about 10nF, and the wide range: the positive pressure sensing range is 0.2N~13.05N, the X tangential force sensing range is 0.02~2.14N, and the Y tangential force sensing range is 0.0~2.5N.

[0097] Embodiment 4

[0098] See also Figure 1 This embodiment provides a flexible ion-type three-dimensional force sensor, including a dome structure raised force-bearing part, a dome structure base part, an upper flexible substrate, an upper electrode, an insulating spacer layer, a three-dimensional force sensitive layer, a lower electrode and a lower flexible substrate arranged in sequence.

[0099] In this embodiment, the dome structure is made by scraping the flexible high molecular polymer mixture doped with inorganic materials and the flexible high molecular polymer in batches.

[0100] In this embodiment, the material of the upper electrode and the lower electrode can be formed by a combination of one or more of gold, platinum, copper, silver, indium, conductive carbon, and MXene. The upper electrode and the lower electrode can be respectively combined with the upper flexible substrate and the lower flexible substrate by hot pressing or dispensing.

[0101] In this embodiment, the three-dimensional force sensitive layer 106 is selected from an elastomer composite film doped with a conductive filler. The preparation method is as follows: the elastomer is thoroughly dispersed using a solvent under magnetic stirring at 80°C, the magnetic stirring temperature is kept constant, and a conductive filler is added to the dispersed solution and mixed thoroughly. The fully mixed solution is transferred to a template having an anti-graded unstable microstructure. Finally, the solvent is evaporated at 80°C to obtain an elastomer composite film doped with a conductive filler.

[0102] Furthermore, in a preferred embodiment, the ionic liquid is selected from one or more of poly(3,4-ethylenedioxythiophene), polystyrene sulfonic acid, and 1-ethyl-3-methylimidazoline bis(trifluoromethylsulfonyl)imide.

[0103] Furthermore, in a preferred embodiment, the conductive particles are MXene.

[0104] Furthermore, in a preferred embodiment, the elastomer in the elastomer composite film is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers and polyolefin elastomers.

[0105] Furthermore, in a preferred embodiment, the thickness of the three-dimensional force-sensitive layer 106 is 140-160 μm. The thickness of the three-dimensional force-sensitive layer 106 is controlled so that the product has good flexibility and consistency, can be bent and deformed, and fits the robot well.

[0106] Furthermore, in a preferred embodiment, the upper and lower electrodes are obtained by uniformly mixing the micro-nano conductive material and the binder (SBR) and then spraying them on the surface of the polymer film. The polymer film is polyethylene terephthalate (PET) film. The micro-nano conductive material is MXene.

[0107] The flexible off-state three-dimensional force sensor provided in Example 4 can be used to realize precise grasping control and intelligent assembly operations of the robot under multiple working conditions.

[0108] Embodiment 5

[0109] Reference Figure 2As shown, this embodiment proposes a flexible ionization type three-dimensional force sensing array, including a dome structure array, a flexible substrate, an electrode array, an insulating spacer layer array 205 and a three-dimensional force sensitive layer array 206, the flexible substrate includes a first flexible substrate part 203 and a second flexible substrate part 208, the electrode array includes a first electrode array 204 and a second electrode array 207, the dome structure array is provided with a protrusion array 201 and a dome substrate 202, one side of the protrusion array 201 is attached to one side of the dome substrate 202, the other side of the dome substrate 202 is attached to one side of the first flexible substrate 203, and the other side of the first flexible substrate part 203 is attached to the first electrode array The first electrode array 204 is bonded to one side of the insulating spacer layer array 205, the other side of the insulating spacer layer array 205 is bonded to one side of the three-dimensional force-sensitive layer array 206, one side of the three-dimensional force-sensitive layer array 206 has a graded unstable microstructure, the other side of the three-dimensional force-sensitive layer array 206 is bonded to one side of the second electrode array 207, the other side of the second electrode array 207 is bonded to one side of the second flexible substrate part 208, the three-dimensional force-sensitive layer array 206 is doped with conductive fillers, the conductive fillers are composed of ionic liquid and conductive particles, and the surface of the electrode array is sprayed with a mixture of micro-nano conductive materials and adhesives.

[0110] The flexible ion-type three-dimensional force sensing array provided in Example 5 can be used to realize precise grasping control and intelligent assembly operation of the robot under multiple working conditions.

[0111] Embodiment 6

[0112] A method for preparing a flexible ionization type three-dimensional force sensing array, comprising the following steps:

[0113] On the dome array structure template, a flexible high molecular polymer mixture doped with inorganic materials and a flexible high molecular polymer are scraped in batches, and the dome array structure is obtained after heating and curing;

[0114] The polymer film with micro-nano conductive material on the surface is patterned into an upper electrode array by laser etching technology, and the upper flexible substrate is combined with the upper electrode array by hot pressing or dispensing. The acquisition of the lower electrode array and the combination of the lower electrode array and the lower flexible substrate are the same as described above.

[0115] The elastomer composite film with graded unstable microstructure and the insulating spacer layer pattern are cut into array forms by laser etching technology.

[0116] The upper flexible substrate is aligned and combined with the upper electrode array assembly, the insulating spacer layer, and the three-dimensional force sensitive layer by dispensing to obtain an upper flexible substrate-upper electrode array-insulating spacer layer-three-dimensional force sensitive layer assembly. Then, the assembly is aligned and combined with the lower electrode array and the lower flexible substrate assembly by hot pressing or dispensing to obtain an upper flexible substrate-upper electrode array-insulating spacer layer-three-dimensional force sensitive layer array-lower electrode array-lower flexible substrate assembly. Finally, the dome array structure is combined with the upper flexible substrate by dispensing to finally obtain a flexible ionized three-dimensional force sensing array.

[0117] Furthermore, in a preferred embodiment, the materials of each part refer to the setting of the flexible ion-type three-dimensional force sensor described in Example 4 to obtain a flexible ion-type three-dimensional force sensor array.

[0118] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit its protection scope. Although the present invention has been described in detail with reference to the above embodiments, ordinary technicians in the field should understand that after reading the present invention, those skilled in the art can still make various changes, modifications or equivalent substitutions to the specific implementation methods of the invention, but these changes, modifications or equivalent substitutions are all within the protection scope of the pending claims of the invention.

Claims

1. A flexible ion-type three-dimensional force sensor, It is characterized in that The invention comprises a dome structure, a flexible substrate, an electrode, an insulating spacer layer (105) and a three-dimensional force sensitive layer (106), wherein the flexible substrate comprises a first flexible substrate (103) and a second flexible substrate (108), and the electrode comprises a first electrode (104) and a second electrode (107). The dome structure is provided with a protrusion (101) and a substrate (102), wherein one end of the protrusion (101) is bonded to one side of the substrate (102), the other side of the substrate (102) is bonded to one side of the first flexible substrate (103), the other side of the first flexible substrate (103) is bonded to one side of the first electrode (104), and the other side of the first electrode (104) is bonded to the insulating spacer layer (106). The three-dimensional force sensitive layer (106) is laminated to one side of the spacer (105), the other side of the insulating spacer layer (105) is laminated to one side of the three-dimensional force sensitive layer (106), one side of the three-dimensional force sensitive layer (106) has a graded unstable microstructure, the other side of the three-dimensional force sensitive layer (106) is laminated to one side of the second electrode (107), the other side of the second electrode (107) is laminated to one side of the second flexible substrate (108), the three-dimensional force sensitive layer (106) is doped with a conductive filler, the conductive filler is composed of ionic liquid and conductive particles, a micro-nano conductive material and a binder mixture is sprayed on the surface of the electrode, and the electrode and the three-dimensional force sensitive layer (106) are both circular and equally divided into sectors.

2. A method for preparing a flexible ion-type three-dimensional force sensor, comprising preparing a flexible ion-type three-dimensional force sensor as claimed in claim 1, It is characterized in that The method comprises the following steps: laminating the dome structure, the flexible substrate, the electrode, the insulating spacer layer (105) and the three-dimensional force sensitive layer (106) in the order of the protrusion (101), the substrate (102), the first flexible substrate (103), the first electrode (104), the insulating spacer layer (105), the three-dimensional force sensitive layer (106), the second electrode (107) and the second flexible substrate (108); The protrusion (101) is made of a flexible high molecular polymer material doped with an inorganic material; The substrate (102) is made of a flexible high molecular polymer material; The flexible substrate adopts a flexible high molecular polymer elastomer film; The electrode is a polymer film with a micro-nano conductive material on the surface. The electrode is prepared by: the micro-nano conductive material and the binder are evenly mixed and then sprayed on the surface of the polymer film; The three-dimensional force sensitive layer adopts an elastomer composite film doped with a conductive filler, and the conductive filler and the elastomer in the elastomer composite film doped with a conductive filler are mixed in a solvent dispersion manner.

3. A method for preparing a flexible ionization type three-dimensional force sensor according to claim 2, It is characterized in that The other side of the substrate (102) is bonded to one side of the first flexible substrate (103) by dispensing, the other side of the first flexible substrate (103) is bonded to one side of the first electrode (104), and the other side of the second electrode (107) is bonded to one side of the second flexible substrate (108) by hot pressing or dispensing.

4. The method for preparing a flexible ionization type three-dimensional force sensor according to claim 2, It is characterized in that The inorganic material in the flexible high molecular polymer material doped with inorganic material is selected from one or more of nano silicon dioxide and hexagonal boron nitride; The flexible high molecular polymer material is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers and polyolefin elastomers; The flexible polymer elastomer film is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers and polyolefin elastomers; The micro-nano conductive material in the high molecular polymer film with the surface covered with micro-nano conductive material is selected from one or more of carbon-based conductive materials and two-dimensional inorganic compounds with metallic conductivity; The polymer film in the polymer film with micro-nano conductive material on the surface is selected from polyethylene terephthalate film; The adhesive is styrene-butadiene rubber; The conductive filler in the conductive filler-doped elastomer composite film consists of ionic liquid and conductive particles; The elastomer in the elastomer composite film doped with conductive fillers is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers and polyolefin elastomers.

5. A method for preparing a flexible ionization type three-dimensional force sensor according to claim 4, It is characterized in that The carbon-based conductive material is selected from one or more of single-layer graphene, multi-layer graphene, carbon black, single-walled carbon nanotubes and multi-walled carbon nanotubes; The two-dimensional inorganic compound with metallic conductivity is Mxene; The conductive particles are one or more of Mxene, graphene, and carbon nanotubes; The ionic liquid is selected from one or more of poly(3,4-ethylenedioxythiophene), polystyrene sulfonic acid, and 1-ethyl-3-methylimidazoline bis(trifluoromethylsulfonyl)imide.

6. A flexible ionized three-dimensional force sensing array, It is characterized in that The invention comprises a dome structure array, a flexible substrate, an electrode array, an insulating spacer layer array (205) and a three-dimensional force sensitive layer array (206), wherein the flexible substrate comprises a first flexible substrate part (203) and a second flexible substrate part (208), the electrode array comprises a first electrode array (204) and a second electrode array (207), the dome structure array is provided with a protrusion array (201) and a dome substrate (202), one side of the protrusion array (201) is bonded to one side of the dome substrate (202), the other side of the dome substrate (202) is bonded to one side of the first flexible substrate (203), and the other side of the first flexible substrate part (203) is bonded to one side of the first electrode array (204). The other side of the first electrode array (204) is bonded to one side of the insulating spacer layer array (205), the other side of the insulating spacer layer array (205) is bonded to one side of the three-dimensional force sensitive layer array (206), one side of the three-dimensional force sensitive layer array (206) has a graded unstable microstructure, the other side of the three-dimensional force sensitive layer array (206) is bonded to one side of the second electrode array (207), the other side of the second electrode array (207) is bonded to one side of the second flexible substrate part (208), the three-dimensional force sensitive layer array (206) is doped with a conductive filler, the conductive filler is composed of ionic liquid and conductive particles, and the surface of the electrode array is sprayed with a mixture of micro-nano conductive material and adhesive.

7. A method for preparing a flexible ionization type three-dimensional force sensing array, to prepare the flexible ionization type three-dimensional force sensing array as claimed in claim 6, It is characterized in that The method comprises the following steps: laminating a dome structure array, a flexible substrate, an electrode array, an insulating spacer layer array (205) and a three-dimensional force sensitive layer array (206) in the order of a protrusion array (201), a dome substrate (202), a first flexible substrate portion (203), a first electrode array (204), an insulating spacer layer array (205), a three-dimensional force sensitive layer array (206), a second electrode array (207) and a second flexible substrate portion (208); The protrusion array (201) is made of a flexible high molecular polymer material doped with an inorganic material; The dome base (202) is made of a flexible high molecular polymer material; The dome structure array is manufactured by scraping a flexible high molecular polymer mixture doped with an inorganic material and a flexible high molecular polymer in batches in a dome structure array mold; The flexible substrate adopts a flexible high molecular polymer elastomer film; The electrode array uses a polymer film with a micro-nano conductive material on the surface. The electrode array is prepared by: the micro-nano conductive material and the binder are evenly mixed and then sprayed on the surface of the polymer film, and the polymer film pattern with the micro-nano conductive material on the surface is cut by laser etching to obtain the electrode array; The three-dimensional force sensitive layer array uses an elastomeric composite film doped with conductive fillers. The specific preparation method of the three-dimensional force sensitive layer array is: an elastomeric composite film doped with conductive fillers and having a graded unstable microstructure is prepared by solvent dispersion and molding, and the three-dimensional force sensitive layer array is obtained by laser etching and cutting.

8. A method for preparing a flexible ionization type three-dimensional sensor array according to claim 7, It is characterized in that The other side of the dome substrate (202) is bonded to one side of the first flexible substrate part (203) by glue dispensing, the other side of the first flexible substrate part (203) is bonded to one side of the first electrode array (204), and the other side of the second electrode array (207) is bonded to one side of the second flexible substrate part (208) by hot pressing or glue dispensing.

9. The method for preparing a flexible ionization type three-dimensional force sensing array according to claim 7, It is characterized in that The inorganic material in the flexible high molecular polymer material doped with inorganic material is selected from one or more of nano silicon dioxide and hexagonal boron nitride; The flexible high molecular polymer material is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers and polyolefin elastomers; The flexible polymer elastomer film is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers and polyolefin elastomers; The micro-nano conductive material in the high molecular polymer film with the surface covered with micro-nano conductive material is selected from one or more of carbon-based conductive materials and two-dimensional inorganic compounds with metallic conductivity; The polymer film in the polymer film with micro-nano conductive material on the surface is selected from polyethylene terephthalate film; The adhesive is styrene-butadiene rubber; The conductive filler in the conductive filler-doped elastomer composite film consists of ionic liquid and conductive particles; The elastomer in the elastomer composite film doped with conductive fillers is selected from one or more of thermoplastic polyurethane elastomers, polydimethylsiloxane elastomers and polyolefin elastomers.

10. A method for preparing a flexible ionization type three-dimensional force sensing array according to claim 9, It is characterized in that The carbon-based conductive material is selected from one or more of single-layer graphene, multi-layer graphene, carbon black, single-walled carbon nanotubes and multi-walled carbon nanotubes; The two-dimensional inorganic compound with metallic conductivity is Mxene; The conductive particles are one or more of Mxene, graphene, and carbon nanotubes; The ionic liquid is selected from one or more of poly(3,4-ethylenedioxythiophene), polystyrene sulfonic acid, and 1-ethyl-3-methylimidazoline bis(trifluoromethylsulfonyl)imide.

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