Inspection apparatus and inspection method using the same

Abstract

The invention provides an inspection apparatus and an inspection method using the same. The inspection device includes: a light source unit that emits a light source; a light distributor receiving the light source and distributing the light into first distributed light traveling along a first path and second distributed light traveling along a second path; a selection section that receives the first distribution light from the light distributor and selectively travels with a first selection light or a second selection light; a measurement unit that irradiates the second selection light received from the selection unit toward the irradiated surface of the inspection object, and transmits first reflected light obtained by reflecting the second selection light from the irradiated surface of the inspection object to the light distributor; a reference unit that generates second reflected light on the basis of the second distribution light and transmits the second reflected light to the light distributor; a detection unit that receives interference light formed by the first reflected light and the second reflected light from the light distributor and analyzes the spectrum of the interference light; and an image processing unit that generates a tomographic image of the test object on the basis of the spectrum of the interference light.

Description

Technical Field

[0001] The present invention relates to an inspection device and an inspection method using the inspection device. More specifically, the present invention relates to an inspection device for inspecting an inspection object providing visual information and an inspection method using the inspection device. Background Art

[0002] The display device may include a plurality of layers. Also, the display device may have a curvature. In the manufacturing process of the display device, defects may be generated in the plurality of layers. Accordingly, various inspection devices for inspecting whether there are defects in a display device having a curvature are being developed. Summary of the invention

[0003] An object of the present invention is to provide an inspection device with improved inspection efficiency and accuracy.

[0004] Another object of the present invention is to provide an inspection method using the inspection device.

[0005] However, the objects of the present invention are not limited to the above objects, and can be variously expanded within the scope of the idea and scope of the present invention.

[0006] In order to achieve the aforementioned one purpose of the present invention, an inspection device according to an embodiment of the present invention may include: a light source unit that emits a light source; a light distributor that receives the light source and distributes the light source into a first distribution light that travels along a first path and a second distribution light that travels along a second path different from the first path; a selection unit that receives the first distribution light from the light distributor and causes the first distribution light to selectively travel as a first selected light that travels along a first travel direction or a second selected light that travels along a second travel direction; and a measuring unit that irradiates a light beam from the first distribution light to an irradiated surface of an inspection object that is arranged on a plane defined by a first direction and a second direction that intersect each other. The selection unit receives the second selection light, and transmits the first reflected light obtained by reflecting the second selection light from the irradiated surface of the inspection object to the optical distributor; the reference unit generates the second reflected light based on the second distribution light received from the optical distributor, and transmits the second reflected light to the optical distributor; the detection unit receives the interference light formed by the first reflected light and the second reflected light transmitted to the optical distributor from the optical distributor, and analyzes the spectrum of the interference light; and the image processing unit generates a tomographic image of the inspection object based on the spectrum of the interference light analyzed by the detection unit.

[0007] In one embodiment, the measuring unit may include: a first module, receiving the first selected light from the selecting unit, irradiating the first selected light toward the irradiated surface of the inspection object, and measuring the position information of the inspection object based on the sub-reflected light obtained by reflecting the first selected light; and a second module, receiving the second selected light from the selecting unit, irradiating the second selected light toward the irradiated surface of the inspection object, and transmitting the first reflected light obtained by reflecting the second selected light to the optical distributor.

[0008] In one embodiment, the measuring unit may further include: a moving unit configured to adjust positions of the first module and the second module based on the position information of the inspection object.

[0009] In one embodiment, the position information may represent the minimum distance from the irradiated surface of the inspection object to the first module measured in the normal direction of the plane, and the moving unit may enable the first module and the second module to move back and forth along the normal direction of the plane.

[0010] In one embodiment, the first selected light and the second selected light may be irradiated onto the same position on the irradiated surface of the inspection object.

[0011] In one embodiment, the first module and the second module may be adjacent to each other.

[0012] In one embodiment, the second module may include: a galvanometer scanner to adjust the direction of the second selection light, and the light source may be a broadband light source.

[0013] In one embodiment, the detection unit may include a diffraction grating.

[0014] In one embodiment, the second module may include: a polygon scanner to adjust the direction of the second selection light, and the light source may be a wavelength scanning light source.

[0015] In an embodiment, the polygon scanner may include a rotary motor.

[0016] In one embodiment, the second module may further include: an auxiliary scanner for adjusting the direction of the second selection light in a direction different from the direction of the second selection light adjusted by the polygon scanner.

[0017] In one embodiment, the auxiliary scanner may be a galvanometer scanner.

[0018] In one embodiment, the first selected light and the sub-reflected light irradiated from the first module to the irradiated surface of the inspection object can travel in opposite directions on the same travel path, and the second selected light and the first reflected light irradiated from the second module to the irradiated surface of the inspection object can travel in opposite directions on the same travel path.

[0019] In one embodiment, the reference part may include: a first collimator that converts the first collimator into parallel light, and the detection part may include: a second collimator that converts the interference light into parallel light.

[0020] In one embodiment, the reference portion may further include a focusing lens and a mirror, and the first collimator, the focusing lens and the mirror may be separated from each other.

[0021] In order to achieve the aforementioned another purpose of the present invention, an inspection method according to an embodiment of the present invention may include the following steps: emitting a light source from a light source unit; using a light distributor to distribute the light source into a first distribution light traveling along a first path and a second distribution light traveling along a second path different from the first path; causing the first distribution light to selectively travel as a first selection light traveling along a first travel direction or a second selection light traveling along a second travel direction; irradiating the second selection light toward an irradiated surface of an inspection object arranged on a plane defined by a first direction and a second direction intersecting each other, and transmitting a first reflected light obtained by reflecting the second selection light from the irradiated surface of the inspection object to the light distributor; generating a second reflected light based on the second distribution light, and transmitting the second reflected light to the light distributor; analyzing a spectrum of interference light formed by the first reflection light and the second reflection light transmitted to the light distributor; and generating a tomographic image of the inspection object based on the spectrum of the interference light.

[0022] In one embodiment, the step of transmitting the first reflected light to the optical distributor may include the following steps: irradiating the first selected light traveling along the first traveling direction toward the irradiated surface of the inspection object through a first module; measuring the position information of the inspection object based on the sub-reflected light obtained by reflecting the first selected light; irradiating the second selected light traveling along the second traveling direction toward the irradiated surface of the inspection object through a second module; and transmitting the first reflected light obtained by reflecting the second selected light to the optical distributor.

[0023] In one embodiment, the step of transmitting the first reflected light to the light distributor may further include the following step: before the second selection light irradiates the irradiated surface, adjusting the positions of the first module and the second module based on the position information of the inspection object.

[0024] In one embodiment, the first selected light and the second selected light may be irradiated onto the same position on the irradiated surface of the inspection object.

[0025] In one embodiment, the first selected light and the sub-reflected light irradiated from the first module to the irradiated surface of the inspection object can travel in opposite directions on the same travel path, and the second selected light and the first reflected light irradiated from the second module to the irradiated surface of the inspection object can travel in opposite directions on the same travel path.

[0026] The inspection device according to an embodiment of the present invention may include a light source unit, a light distributor, a selection unit, a measurement unit, a reference unit, a detection unit, and an image processing unit. Accordingly, the inspection device can irradiate the first selected light transmitted from the selection unit toward the irradiated surface of the inspection object, and measure the position information of the inspection object based on the sub-reflected light obtained by reflecting the first selected light. In addition, the inspection device can irradiate the second selected light from the selection unit toward the irradiated surface of the inspection object, and analyze the interference light of the first reflected light obtained by reflecting the second selected light and the second reflected light generated in the reference unit to generate a tomographic image of the inspection object with curvature. Accordingly, the inspection device can grasp the position information about the inspection object in real time, and generate a tomographic image of the inspection object based on this. Therefore, the efficiency and accuracy of the inspection can be improved.

[0027] According to the inspection method of the embodiment of the present invention, the first module can irradiate the first selected light toward the irradiated surface of the inspection object, and the position information of the inspection object can be measured based on the sub-reflected light obtained by reflection, and the second module can irradiate the second selected light toward the irradiated surface of the inspection object, and the first reflected light obtained by reflection is transmitted to the light distributor. Accordingly, the position information about the inspection object can be grasped in real time, and a tomographic image of the inspection object can be generated based on this. Therefore, the efficiency and accuracy of the inspection can be improved.

[0028] However, the effects of the present invention are not limited to the above-mentioned effects, and can be variously extended within the scope of the idea and field of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 is a block diagram for explaining an inspection device according to an embodiment of the present invention.

[0030] Figure 2 It is used to illustrate Figure 1 A schematic diagram of the inspection device.

[0031] Figure 3 and Figure 4 It is used to describe the Figure 1 and Figure 2 A diagram of the operation of a measuring section in an inspection device.

[0032] Figure 5 It is shown that the Figure 1 and Figure 2 A diagram of a measuring section in an inspection device.

[0033] Figure 6 is a block diagram for explaining an inspection device according to another embodiment of the present invention.

[0034] Figure 7 It is used to illustrate Figure 6 A schematic diagram of the inspection device.

[0035] Figure 8 It is shown that the Figure 6 and Figure 7 A diagram of an example of a measuring section in an inspection device.

[0036] Fig. 9 It is shown that the Figure 6 and Figure 7 FIG. 1 is a diagram of another example of a measuring portion in an inspection device.

[0037] Fig.10 It is used to illustrate Figure 1 , Figure 2 , Figure 6 and Figure 7 A cross-sectional view of an example of an inspection object.

[0038] Fig.11 It is used to describe the Fig.10 A cross-sectional view of an example of a display panel in an inspection object.

[0039] Fig.12 It shows the use of Figure 1 and Figure 2 Flow chart of an inspection method for an inspection device.

[0040] Description of Reference Numerals

[0041] 1000, 2000: Inspection device 1, 1': Light source

[0042] 2: First distribution light 2-1: First selection light

[0043] 2-2: Second selection light 3: Second distribution light

[0044] 4: Sub-reflected light 5: Reflected light

[0045] 5-1: First reflected light 5-2: Second reflected light

[0046] 6, 6': Interference light 100, 100': Light source

[0047] 200: optical distributor 300: selection unit

[0048] 400, 400': measurement unit 410: first module

[0049] 420, 420': Second module 422: Polygon scanner

[0050] 424: Auxiliary scanner 430: Mobile unit

[0051] 440, 520, 640: Focusing lens

[0052] 500: reference part 510: first collimator

[0053] 530: mirror 600: detection unit

[0054] 610: Second collimator 620: Diffraction grating

[0055] 630: Photodetector IO: Inspection object

[0056] IO-S: Irradiated surface

[0057] P1: First point P2: Second point DETAILED DESCRIPTION

[0058] Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings. The same reference numerals are used for the same components in the drawings, and repeated description of the same components is omitted.

[0059] Figure 1 is a block diagram for explaining an inspection device according to an embodiment of the present invention. Figure 2 It is used to illustrate Figure 1 A schematic diagram of the inspection device.

[0060] Reference Figure 1 and Figure 2 The inspection device 1000 may include a light source unit 100 , a light distributor 200 , a selection unit 300 , a measurement unit 400 , a reference unit 500 , a detection unit 600 , and an image processing unit 700 .

[0061] The inspection object 10 of the inspection device 1000 may have a curvature. For example, the inspection object 10 may be a display device having a curvature. However, the present invention is not necessarily limited thereto, and the inspection object 10 may have a flat shape.

[0062] The light source unit 100 may emit a light source 1 and transmit it to the light distributor 200. In one embodiment, the light source 1 may be a broadband light source. That is, the light source 1 may output a light source 1 having a wide spectrum radiation spectrum including a near infrared region. Specifically, the wavelength of the radiation spectrum possessed by the light source 1 may be about 800 nm to about 1550 nm. However, the wavelength of the radiation spectrum possessed by the light source 1 is not limited thereto.

[0063] The light distributor 200 may distribute the light source 1 received from the light source part 100 into the first distributed light 2 traveling along a first path and the second distributed light 3 traveling along a second path different from the first path.

[0064] The optical distributor 200 may include a fiber coupler (FC), so that predetermined light distribution and output can be stably achieved regardless of the incident angle of the light transmitted to the optical distributor 200 .

[0065] The selection unit 300 may receive the first distribution light 2 from the optical distributor 200 and select the traveling direction of the first distribution light 2. For example, the selection unit 300 may cause the first distribution light 2 to selectively travel as the first selected light 2-1 traveling along the first traveling direction or the second selected light 2-2 traveling along the second traveling direction. That is, the traveling direction of the first distribution light 2 may be selected as the first traveling direction or the second traveling direction by the selection unit 300.

[0066] In other words, the first selection light 2-1 and the second selection light 2-2 are concepts that are distinguished from each other according to the direction in which the first distribution light 2 travels after passing through the selection unit 300. In this specification, the first distribution light 2 that travels along the first travel direction through the selection unit 300 is referred to as the first selection light 2-1, and the first distribution light 2 that travels along the second travel direction through the selection unit 300 is referred to as the second selection light 2-2. Therefore, the first distribution light 2, the first selection light 2-1, and the second selection light 2-2 differ from each other only in the travel direction, and may have substantially the same components (e.g., wavelength, frequency, intensity, etc.).

[0067] Furthermore, the selection unit 300 may include an optical switch. The optical switch may include an optical element capable of selecting a traveling direction of the traveling first distribution light 2. For example, the traveling direction of the first distribution light 2 may be selected by an electrical signal supplied to the optical switch. Specifically, the traveling direction of the first distribution light 2 may be selected as the first traveling direction or the second traveling direction according to the electrical signal.

[0068] The measuring unit 400 can irradiate the first selection light 2-1 or the second selection light 2-2 received from the selection unit 300 toward the irradiated surface 10-S of the inspection object 10 arranged on the plane, and can transmit the first reflected light 5-1 obtained by reflecting the second selection light 2-2 from the irradiated surface 10-S of the inspection object 10 to the optical distributor 200.

[0069] In this specification, the plane may be Figure 2 The first direction DR1 and the second direction DR2 crossing the first direction DR1 are defined. For example, the first direction DR1 and the second direction DR2 may be perpendicular.

[0070] In one embodiment, the measuring unit 400 may include a first module 410 , a second module 420 , a moving unit 430 and a focusing lens 440 .

[0071] The first module 410 may receive the first selection light 2-1 from the selection unit 300. Furthermore, the first module 410 may irradiate the first selection light 2-1 toward the irradiated surface 10-S of the inspection object 10, and may receive the sub-reflected light 4 obtained by reflecting the first selection light 2-1 from the irradiated surface 10-S.

[0072] The second module 420 may receive the second selection light 2-2 from the selection unit 300. Furthermore, the second module 420 may irradiate the second selection light 2-2 received from the selection unit 300 toward the irradiated surface 10-S of the inspection object 10, and may receive the first reflected light 5-1 obtained by reflecting the second selection light 2-2 from the irradiated surface 10-S.

[0073] The moving unit 430 can move the first module 410 and the second module 420 to move away from or closer to the irradiated surface 10-S of the inspection object 10.

[0074] Will refer to later Figure 3 and Figure 4 The first module 410 , the second module 420 , and the moving portion 430 are described in more detail.

[0075] The reference part 500 may generate the second reflected light 5 - 2 based on the second distributed light 3 received from the optical distributor 200 , and may transfer the second reflected light 5 - 2 to the optical distributor 200 .

[0076] In one embodiment, the reference portion 500 may include a first collimator 510 that converts the second distributed light 3 into parallel light.

[0077] In one embodiment, the reference part 500 may further include a focusing lens 520 and a mirror 530, and the first collimator 510, the focusing lens 520, and the mirror 530 may be separated from each other. For example, the parallel light may be irradiated to the focusing lens 520 through the first collimator 510 and focused to the mirror 530 to be reflected, and the reflected second reflected light 5-2 may be transmitted to the optical distributor 200.

[0078] The first reflected light 5-1 and the second reflected light 5-2 may be combined in the optical distributor 200. As the first reflected light 5-1 and the second reflected light 5-2 are combined, interference light 6 may be formed in the optical distributor 200.

[0079] The detection part 600 may analyze the spectrum of the interference light 6 received from the optical distributor 200. The detection part 600 may include a second collimator 610, a diffraction grating 620, a photodetector 630, and a focusing lens 640.

[0080] For example, the interference light 6 may be converted into parallel light by the second collimator 610. The parallel light travels toward the diffraction grating 620 to output the spectrum of the interference light 6, and its traveling direction is changed to a direction toward the photodetector 630, and may pass through a focusing lens 640 arranged in parallel with the direction toward the photodetector 630. Accordingly, the spectrum of the interference light 6 may be detected in the photodetector 630.

[0081] In one embodiment, the diffraction grating 620 can utilize the diffraction effect of light to output the spectrum of light at different angles according to the wavelength of light incident along a specific direction. For example, the diffraction grating 620 diffracts the interference light 6 converted into parallel light by the second collimator 610, and outputs the spectrum of the interference light 6 at different angles according to the wavelength of the light, and can make the output spectrum of the interference light 6 move toward the light detector 630. The light detector 630 can collect the spectrum of the interference light 6 and analyze it.

[0082] As the detection part 600 includes the diffraction grating 620 , the light source 1 emitted from the light source part 100 may be a broadband light source.

[0083] The image processing unit 700 can generate a tomographic image of the inspection object 10 based on the spectrum of the interference light 6 analyzed from the light detector 630. Specifically, by performing Fourier transformation on each pixel of the spectrum image of the interference light 6 to measure the depth information of the inspection object 10, an image of the tomographic image of the inspection object 10 can be generated.

[0084] Figure 3 and Figure 4 It is used to describe the Figure 1 and Figure 2 FIG. 1 is a diagram showing the operation of the measuring unit in the inspection device. Figures 1 to 3 The first module 410 may allow the first selection light 2-1 transmitted from the selection unit 300 to pass through the focusing lens 440 and irradiate the irradiated surface 10-S of the inspection object 10. Furthermore, the first module 410 may measure the position information of the inspection object 10 based on the sub-reflected light 4 reflected from the irradiated surface 10-S.

[0085] In one embodiment, the first selected light 2-1 and the sub-reflected light 4 irradiated from the first module 410 to the irradiated surface 10-S of the inspection object 10 may travel in opposite directions on the same travel path as each other. That is, the sub-reflected light 4 may travel toward the first module 410 in a direction opposite to the direction in which the first selected light 2-1 is irradiated from the first module 410 to the irradiated surface 10-S.

[0086] In one embodiment, the position information may be the minimum distance from the irradiated surface 10-S of the inspection object 10 to the first module 410 measured in the normal direction of the plane. That is, the normal direction may be a third direction DR3 perpendicular to the plane defined by the first direction DR1 and the second direction DR2 intersecting each other, and the minimum distance may be a straight-line distance.

[0087] The first module 410 may include an auto focusing module (AFM). For example, the auto focusing module may automatically adjust the focal length between the first module 410 and the irradiated surface 10-S based on the position information. Specifically, the position information may be measured in real time based on the sub-reflected light 4 reflected in real time from the irradiated surface 10-S of the inspection object 10 having a curvature, thereby automatically adjusting the focal length. Accordingly, the second module 420 may more accurately measure the tomographic image of the inspection object 10 based on the first reflected light 5-1 reflected from the irradiated surface 10-S of the inspection object 10.

[0088] Further references Figure 4 The second module 420 may allow the second selection light 2-2 transmitted from the selection unit 300 to pass through the focusing lens 440 and irradiate the irradiated surface 10-S of the inspection object 10. In addition, the second module 420 may transmit the first reflected light 5-1 reflected from the irradiated surface 10-S to the optical distributor 200.

[0089] In one embodiment, the second selected light 2-2 and the first reflected light 5-1 irradiated from the second module 420 to the irradiated surface 10-S of the inspection object 10 may travel in opposite directions on the same travel path as each other. That is, the first reflected light 5-1 may travel toward the second module 420 in a direction opposite to the direction in which the second selected light 2-2 is irradiated from the second module 420 to the irradiated surface 10-S.

[0090] The moving unit 430 may move the positions of the first module 410 and the second module 420 in a one-axis direction based on the position information obtained by the first module 410. For example, the moving unit 430 may move the first module 410 and the second module 420 in the third direction DR3 or in a direction opposite to the third direction DR3.

[0091] In general, by using the position information measured by the first module 410 based on the first selected light 2-1 and the sub-reflected light 4, the moving unit 430 moves the first module 410 and the second module 420 along the third direction DR3 or in a direction opposite to the third direction DR3, and then the second module 420 can transmit the first reflected light 5-1 obtained based on the second selected light 2-2 to the optical distributor 200. Accordingly, the position information about the irradiated surface 10-S can be grasped in real time to improve the efficiency of the inspection of the inspection object 10 with a curvature.

[0092] In one embodiment, the first module 410 and the second module 420 may be adjacent to each other. Accordingly, the position on the illuminated surface 10-S where the first selected light 2-1 is illuminated by the first module 410 and the position on the illuminated surface 10-S where the second selected light 2-2 is illuminated by the second module 420 may be adjacent to each other. For example, the first module 410 may be attached to one side of the second module 420. However, the present invention is not necessarily limited thereto.

[0093] In one embodiment, the first selection light 2-1 and the second selection light 2-2 may be irradiated to the same position on the irradiated surface 10-S of the inspection object 10. For example, the position on the irradiated surface 10-S irradiated with the first selection light 2-1 through the first module 410 may be the same as the position on the irradiated surface 10-S irradiated with the second selection light 2-2 through the second module 420.

[0094] Accordingly, the position where the first module 410 focuses on the inspection object 10 based on the first selected light 2-1 and the sub-reflected light 4 and the position where the second module 420 receives the first reflected light 5 as a basis for spectral analysis of the interference light 6 can be the same. Therefore, the accuracy of inspection for the inspection object 10 having a curvature can be further improved.

[0095] Figure 5 It is shown that the Figure 1 and Figure 2 A diagram of a measuring section in an inspection device.

[0096] Reference Figure 5In one embodiment, the second module 420 may include a galvanometer scanner for adjusting the direction of the second selection light 2-2. For example, the galvanometer scanner may be a 2D galvanometer scanner.

[0097] The galvanometer scanner can be adjusted in such a manner that the position where the second selection light 2-2 is irradiated onto the irradiated surface 10-S of the inspection object 10 can be moved along the first direction DR1 and the second direction DR2. Specifically, the galvanometer scanner is arranged in the travel path of the second selection light 2-2, and the travel direction of the second selection light 2-2 can be adjusted in such a manner that the second selection light 2-2 can irradiate the entire surface of the irradiated surface 10-S of the inspection object 10. Accordingly, the position where the second selection light 2-2 is irradiated onto the irradiated surface 10-S can be easily selected.

[0098] Figure 6 is a block diagram for explaining an inspection device according to another embodiment of the present invention. Figure 7 It is used to illustrate Figure 6 A schematic diagram of the inspection device.

[0099] Reference Figure 6 and Figure 7 In addition to including a light source unit 100', a measuring unit 400' and a detecting unit 600', the inspection device 2000 can be similar to the reference Figures 1 to 5 The inspection device 1000 described above is substantially the same. Therefore, the details of the inspection device 1000 described above are omitted or simplified. Figure 1 and Figure 2 The components of the inspection device 1000 described above are described repeatedly.

[0100] Reference Figure 6 The inspection device 2000 may include a light source unit 100 ′, a light distributor 200 , a selection unit 300 , a measurement unit 400 ′, a reference unit 500 , a detection unit 600 ′, and an image processing unit 700 .

[0101] The light source unit 100' can emit a light source 1' and transmit it to the optical distributor 200. In one embodiment, the light source 1' can include a wavelength swept source. For example, the light source 1' can have a central wavelength of about 1300nm, and the width of the wavelength can be about 100nm. However, the central wavelength and the width of the wavelength of the light source 1' are not limited thereto.

[0102] The light source 1' can be generated by a wavelength swept laser, and the wavelength swept source can change the wavelength of the light source 1' over time by optical sweeping. By optical sweeping, high-definition and high-speed images can be obtained.

[0103] The detection unit 600′ does not include the diffraction grating 620 (see Figure 2 ) Apart from this point, it can be essentially the same as the detection unit 600 of the inspection device 1000.

[0104] Specifically, since the light source 1' of the inspection device 2000 includes a wavelength swept light source, the diffraction grating 620 is not required when analyzing the interference light 6' toward the detection unit 600'. Figure 1 ) of the interference light 6 (refer to Figure 1 ) Differently, the interference light 6' may not need to be diffracted. Accordingly, the detection unit 600' may not include the diffraction grating 620.

[0105] Figure 8 It is shown that the Figure 6 and Figure 7 A diagram of an example of a measuring section in an inspection device.

[0106] Reference Figure 8 The measuring unit 400' may be similar to the reference unit except that it includes the second module 420'. Figures 1 to 5 The measuring unit 400 described above is substantially the same.

[0107] In one embodiment, the second module 420' of the measuring part 400' may include a polygon scanner 422 for adjusting the direction of the second selection light 2-2. For example, the polygon scanner 422 may have a plurality of reflection surfaces.

[0108] In one embodiment, the polygon scanner 422 may have a rotary motor. The rotary motor rotates at high speed and can Figure 5 The galvanometer scanner shown irradiates the inspection object 10 with the second selection light 2-2 more quickly, thereby being able to obtain high-definition and high-speed images.

[0109] In addition, the shape of the polygon scanner 422 is shown as a hexagonal cross section, but it is not necessarily limited to this. As long as the polygon scanner 422 is a structure that can rotate, it can have various shapes.

[0110] As the polygon scanner 422 rotates, the second selection light 2-2 is reflected by the reflection surface of the polygon scanner 422, so that the position where the second selection light 2-2 is irradiated on the irradiated surface 10-S of the inspection object 10 can be adjusted in a manner that moves along the first direction DR1 and the second direction DR2. Specifically, the polygon scanner 422 is arranged in the travel path of the second selection light 2-2, and the travel direction of the second selection light 2-2 can be adjusted in a manner that the second selection light 2-2 can irradiate the entire surface of the irradiated surface 10-S of the inspection object 10. Accordingly, the position where the second selection light 2-2 is irradiated on the irradiated surface 10-S can be easily selected.

[0111] Fig. 9 It is shown that the Figure 6 and Figure 7 FIG. 1 is a diagram of another example of a measuring portion in an inspection device.

[0112] Reference Fig. 9 In another embodiment, the second module 420 ′ of the measuring unit 400 ′ may include a polygon scanner 422 and an auxiliary scanner 424 .

[0113] The polygon scanner 422 and the auxiliary scanner 424 may adjust the direction of the second selection light 2-2 in directions different from each other.

[0114] For example, in the case where the polygon scanner 422 adjusts the direction of the second selection light 2-2 in the first direction DR1, the auxiliary scanner 424 may adjust the direction of the second selection light 2-2 in the second direction DR2. Conversely, in the case where the polygon scanner 422 adjusts the direction of the second selection light 2-2 in the second direction DR2, the auxiliary scanner may adjust the direction of the second selection light 2-2 in the first direction DR1.

[0115] Specifically, as the polygon scanner 422 rotates, the second selection light 2-2 is reflected by the reflection surface of the polygon scanner 422, so that the position of the second selection light 2-2 irradiated onto the irradiated surface 10-S of the inspection object 10 can be adjusted in such a manner that it can move along the first direction DR1 or the second direction DR2. After the direction of the polygon scanner 422 is adjusted, the auxiliary scanner 424 can adjust the position of the second selection light 2-2 irradiated onto the irradiated surface 10-S of the inspection object 10 in a direction different from the direction adjusted by the polygon scanner 422.

[0116] In one embodiment, the auxiliary scanner 424 may be a galvanometer scanner. However, the present invention is not necessarily limited thereto, and in another example, the auxiliary scanner 424 may also be an XY scanner.

[0117] Fig.10 It is used to illustrate Figure 1 , Figure 2 , Figure 6 and Figure 7 A cross-sectional view of an example of an inspection object.

[0118] Reference Fig.10 In one embodiment, the inspection object 10 may be a display device 10 that provides visual information.

[0119] The display device 10 may include a display panel PN, a polarizing member POL, an adhesive member AM, and a window member WN.

[0120] A polarizing member POL may be disposed on the display panel PN. The polarizing member POL may block external light incident to the display panel PN from the outside.

[0121] A window member WN may be disposed on the polarization member POL. The window member WN may have a transmissive portion corresponding to a display area of ​​the display device 10. The window member WN may protect the display panel PN from external impact.

[0122] An adhesive member AM may be disposed between the polarization member POL and the window member WN. For example, the adhesive member AM may attach the polarization member POL to the window member WN.

[0123] The adhesive member AM may include an optical clear adhesive (OCA), a pressure sensitive adhesive (PSA), a photocurable resin, a thermosetting resin, etc. These may be used alone or in combination with each other.

[0124] There may be defects such as foreign matter at the first point P1 and the second point P2 of the inspection object IO. For example, the first point P1 may be located at the boundary surface between the window component WN and the adhesive component AM, and the second point P2 may be located at the boundary surface between the adhesive component AM and the polarizing component POL. That is, the first point P1 and the second point P2 may exist at different positions on the cross section. However, when observed from the third direction DR3, the first point P1 and the second point P2 may overlap with each other. That is, the first point P1 and the second point P2 may overlap with each other on the plane. Accordingly, the first point P1 and the second point P2 can be identified as existing at the same position on the plane.

[0125] According to the inspection device of the present invention, a tomographic image of the inspection object IO can be generated by spectral analysis of the first reflected light 5-1 obtained by irradiating the first selected light 2-1 and the second selected light 2-2 to the irradiated surface IO-S of the inspection object IO and the interference light 6 of the second reflected light 5-2 obtained from the reference part 500. Based on this, it is possible to accurately grasp at which point of the first point P1 and the second point P2 overlapping on the plane the defect of the inspection object IO is located. That is, according to the inspection device of the present invention, although it will be recognized as occurring at the same point on the plane, it is possible to distinguish defects occurring on different boundary surfaces on the cross section. Therefore, the accuracy of the inspection can be improved.

[0126] Fig.11 It is used to describe the Fig.10 A cross-sectional view of an example of a display panel in an inspection object.

[0127] Reference Fig.11 The display panel PN may include a substrate SUB, a transistor TR, a buffer layer BFL, a first insulating layer IL1, a second insulating layer IL2, a third insulating layer IL3, a fourth insulating layer IL4, a light emitting element EL, and an encapsulation layer ENL. The transistor TR may include an active pattern ACT, a gate electrode GE, a first electrode E1, and a second electrode E2. The light emitting element EL may include a pixel electrode AE, a light emitting layer EM, and a common electrode CE.

[0128] The substrate SUB can be formed of glass, quartz, plastic, or the like.

[0129] The buffer layer BFL may be disposed on the substrate SUB. The buffer layer BFL may include an inorganic insulating substance. The buffer layer BFL may prevent impurities from diffusing from the substrate SUB to the active pattern ACT.

[0130] The active pattern ACT may be arranged on the buffer layer BFL. For example, the active pattern ACT may include a silicon semiconductor, an oxide semiconductor, etc. The silicon semiconductor may include amorphous silicon, polycrystalline silicon, etc. The active pattern ACT may include a source region, a drain region, and a channel region. The channel region may be arranged between the source region and the drain region.

[0131] The first insulating layer IL1 may be disposed on the buffer layer BFL. The first insulating layer IL1 may cover the active pattern ACT. The first insulating layer IL1 may include an inorganic insulating substance.

[0132] The gate electrode GE may be disposed on the first insulating layer IL1. The gate electrode GE may overlap the channel region of the active pattern ACT. The gate electrode GE may include metal, alloy, conductive metal oxide, conductive metal nitride, transparent conductive substance, etc.

[0133] The second insulating layer IL2 may be disposed on the first insulating layer IL1. The second insulating layer IL2 may cover the gate electrode GE. The second insulating layer IL2 may include an inorganic insulating substance.

[0134] The first electrode E1 and the second electrode E2 may be disposed on the second insulating layer IL2. The first electrode E1 and the second electrode E2 may contact the source region and the drain region of the active pattern ACT, respectively, through contact holes penetrating the first insulating layer IL1 and the second insulating layer IL2. The first electrode E1 and the second electrode E2 may include metal, alloy, conductive metal oxide, conductive metal nitride, transparent conductive material, etc. The active pattern ACT, the gate electrode GE, the first electrode E1, and the second electrode E2 may form a transistor TR.

[0135] The third insulating layer IL3 may be disposed on the second insulating layer IL2. The third insulating layer IL3 may cover the first electrode E1 and the second electrode E2. The third insulating layer IL3 may include an organic insulating substance.

[0136] The pixel electrode AE ​​may be disposed on the third insulating layer IL3 . The pixel electrode AE ​​may contact the first electrode E1 or the second electrode E2 through a contact hole penetrating the third insulating layer IL3 . Accordingly, the pixel electrode AE ​​may be electrically connected to the transistor TR.

[0137] The fourth insulating layer IL4 may be disposed on the third insulating layer IL3. The fourth insulating layer IL4 may partially cover the pixel electrode AE ​​on the third insulating layer IL3. The fourth insulating layer IL4 may have a pixel opening exposing at least a portion of the upper surface of the pixel electrode AE. The fourth insulating layer IL4 may include an organic insulating substance.

[0138] The light emitting layer EM may be arranged on the pixel electrode AE. For example, the light emitting layer EM may be arranged on the pixel electrode AE ​​exposed in the fourth insulating layer IL4. In one embodiment, the light emitting layer EM may have a multilayer structure including a hole injection layer, a hole transport layer, an organic light emitting layer, an electron transport layer, and an electron injection layer.

[0139] The common electrode CE may be disposed on the light emitting layer EM and the fourth insulating layer IL4. The light emitting layer EM may emit light based on a voltage difference between the pixel electrode AE ​​and the common electrode CE.

[0140] The encapsulation layer ENL may be disposed on the light emitting element EL. For example, the encapsulation layer ENL may be disposed on the common electrode CE. The encapsulation layer ENL may include at least one inorganic encapsulation layer and at least one organic encapsulation layer. The encapsulation layer ENL may prevent oxygen, moisture, etc. from penetrating into the light emitting element EL and / or the circuit element layer CL.

[0141] However, Fig.11The illustrated structure of the display panel PN is exemplary and may be variously changed.

[0142] Fig.12 It shows the use of Figure 1 and Figure 2 Flow chart of an inspection method for an inspection device.

[0143] Below, refer to Figure 1 , Figure 2 and Fig.12 , a method for inspecting defects of the inspection object IO using the inspection device 1000 is briefly described.

[0144] First, the light source 1 may be emitted from the light source unit 100 (S10). The light source 1 may be distributed into the first distributed light 2 and the second distributed light 3 by the light distributor 200 (S20). Thereafter, the first distributed light 2 may be made to travel as the first selected light 2-1 or the second selected light 2-2 by the selection unit 300 (S30).

[0145] Thereafter, the second selection light 2-2 may be irradiated to the inspection object 10 by the measuring section 400, and the first reflected light 5-1 reflected from the irradiated surface 10-S of the inspection object 10 may be transmitted to the optical distributor 200 (S40).

[0146] In one embodiment, if Figure 2 As shown, step S40 of irradiating the second selection light 2-2 to the inspection object IO and transmitting the first reflected light 5-1 reflected from the irradiated surface IO-S of the inspection object IO to the optical distributor 200 may include the following steps: measuring the position information of the inspection object IO based on the first selection light 2-1 and the sub-reflected light 4 through the first module 410, and transmitting the first reflected light 5-1 obtained by irradiating the second selection light 2-2 toward the irradiated surface IO-S to the optical distributor 200 through the second module 420.

[0147] That is, before the second selection light 2-2 is irradiated to the irradiated surface 10-S, the positions of the first module 410 and the second module 420 may be adjusted based on the position information of the inspection object 10 by using the moving unit 430.

[0148] In one embodiment, the first selected light 2-1 and the second selected light 2-2 may be irradiated onto the same position on the irradiated surface 10-S of the inspection object 10.

[0149] In one embodiment, if Figures 2 to 4 As shown, the traveling paths of the first selected light 2-1 and the sub-reflected light 4 can travel in opposite directions, and the traveling paths of the second selected light 2-2 and the first reflected light 5-1 can also travel in opposite directions.

[0150] The second reflected light 5-2 generated based on the second distributed light 3 can be transmitted to the optical distributor 200 by the reference unit 500 (S50). Thereafter, the spectrum of the interference light 6 formed by the first reflected light 5-1 and the second reflected light 5-2 transmitted to the optical distributor 200 can be analyzed, and a tomographic image of the inspection object 10 can be generated based on the spectrum of the interference light 6 (S60). Accordingly, defects of the inspection object 10 can be inspected.

[0151] In addition, using reference Figures 6 to 9 The method for inspecting defects of the inspection object IO using the inspection apparatus 2000 described above can be compared with the method described in the reference Fig.12 The inspection methods described are essentially the same.

[0152] Industrial Applicability

[0153] The present invention can be applied to a display device and an electronic device including the display device. For example, the present invention can be applied to a high-resolution smart phone, a mobile phone, a smart tablet, a smart watch, a tablet PC, a vehicle navigation system, a television, a computer monitor, a notebook computer, etc.

[0154] The above description is made with reference to exemplary embodiments of the present invention, but anyone with ordinary knowledge in the technical field to which the present invention belongs will understand that various modifications and changes can be made to the present invention without departing from the scope of the idea and field of the present invention described in the claims.

Claims

1. An inspection device, include: A light source part, emitting light; an optical distributor receiving the light source and distributing the light source into first distributed light traveling along a first path and second distributed light traveling along a second path different from the first path; a selection unit that receives the first distributed light from the optical distributor and causes the first distributed light to selectively travel as first selected light traveling along a first traveling direction or as second selected light traveling along a second traveling direction; a measuring section that irradiates the second selected light received from the selecting section toward an irradiated surface of an inspection object arranged on a plane defined by a first direction and a second direction intersecting each other, and transmits first reflected light obtained by reflecting the second selected light from the irradiated surface of the inspection object to the light distributor; a reference part that generates second reflected light based on the second distributed light received from the optical distributor and transmits the second reflected light to the optical distributor; a detection unit that receives interference light formed by the first reflected light and the second reflected light transmitted to the optical distributor from the optical distributor, and analyzes a spectrum of the interference light; as well as The image processing unit generates a tomographic image of the inspection object based on the spectrum of the interference light analyzed by the detection unit.

2. The inspection device according to claim 1, It is characterized in that The measuring unit comprises: a first module that receives the first selection light from the selection unit, irradiates the first selection light toward the irradiated surface of the inspection object, and measures position information of the inspection object based on sub-reflected light obtained by reflecting the first selection light; and The second module receives the second selection light from the selection unit, irradiates the second selection light toward the irradiated surface of the inspection object, and transmits the first reflected light obtained by reflecting the second selection light to the light distributor.

3. The inspection device according to claim 2, It is characterized in that The measuring unit further comprises: The moving unit adjusts the positions of the first module and the second module based on the position information of the inspection object.

4. The inspection device according to claim 3, It is characterized in that The position information represents the minimum distance from the irradiated surface of the inspection object to the first module measured in the normal direction of the plane, The moving unit reciprocates the first module and the second module along a normal direction of the plane.

5. The inspection device according to claim 1, It is characterized in that The first selected light and the second selected light are irradiated onto the same position on the irradiated surface of the inspection object.

6. The inspection device according to claim 2, It is characterized in that The first module and the second module are adjacent to each other.

7. The inspection device according to claim 2, It is characterized in that The first selected light and the sub-reflected light irradiated from the first module to the irradiated surface of the inspection object travel in opposite directions on the same travel path. The second selected light and the first reflected light irradiated from the second module to the irradiated surface of the inspection object travel in opposite directions on the same travel path as each other.

8. An inspection method comprising the following steps: A light source is emitted from the light source portion; Using a light distributor to distribute the light source into first distributed light traveling along a first path and second distributed light traveling along a second path different from the first path; causing the first distributed light to selectively travel as first selected light traveling along a first traveling direction or as second selected light traveling along a second traveling direction; irradiating the second selected light toward an irradiated surface of an inspection object arranged on a plane defined by a first direction and a second direction intersecting each other, and transmitting first reflected light obtained by reflecting the second selected light from the irradiated surface of the inspection object to the light distributor; generating a second reflected light based on the second distributed light, and transmitting the second reflected light to the optical distributor; analyzing a spectrum of interference light formed by the first reflected light and the second reflected light transmitted to the optical distributor; as well as A tomographic image of the inspection object is generated based on the spectrum of the interference light.

9. The inspection method according to claim 8, It is characterized in that The step of transmitting the first reflected light to the optical distributor comprises the following steps: irradiating the first selected light traveling along the first traveling direction toward the irradiated surface of the inspection object through a first module; measuring position information of the inspection object based on sub-reflected light obtained by reflecting the first selected light; irradiating the second selected light traveling along the second traveling direction toward the irradiated surface of the inspection object through a second module; as well as The first reflected light obtained by reflecting the second selected light is transmitted to the light distributor.

10. The inspection method according to claim 9, It is characterized in that The step of transmitting the first reflected light to the optical distributor further comprises the following steps: Before the second selection light is irradiated onto the irradiated surface, the positions of the first module and the second module are adjusted based on the position information of the inspection object.

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