A dynamic airflow simulation method and device for a stocker device inside an AMHS system

Abstract

A method and device for simulating dynamic airflow of a Stocker device inside an AMHS system. The method couples the mesh division results of the fluid space and the mesh division results of the motion scene through dynamic mesh technology to obtain a dynamic simulation calculation grid model of the Stocker device. The dynamic simulation calculation grid model includes physical objects in the Stocker fluid space geometric model and physical objects in the Stocker motion scene geometric model; through the simplified dynamic simulation calculation grid model, a fluid simulation calculation is performed on the specified specific working conditions of the Stocker device to obtain the fluid simulation results of the Stocker device; the fluid simulation results are analyzed, and based on the results, the DPM discrete phase model is used to simulate and further analyze the influence of the airflow in a certain area on the dust particles when the Stocker device is moving. The present invention provides a method and device capable of analyzing the internal gas flow field law of the Stocker device when it is running, which can effectively evaluate the cleanliness of the internal space of the device and ensure that the final device meets the cleanliness requirements of the process.

Description

Technical Field

[0001] The invention belongs to the technical field of clean room equipment analysis, and in particular relates to a method and a device for simulating dynamic airflow of a Stocker device inside an AMHS system. Background Art

[0002] As a key component in a cleanroom, the cleanliness standards of the AMHS (Automatic Material Handling System) system must also meet or exceed industry requirements. However, the stocker equipment in the AMHS system is usually large in size, runs at a high speed, and starts and stops frequently, which interferes with the gas flow pattern inside the system. This undoubtedly poses a major challenge to maintaining a high standard of cleanliness inside the system. For example, a wake will be formed behind the stocker trolley, which will lift up the dust particles deposited on the ground. When the dust height exceeds the passline (the minimum height of the workpiece defined in the fluid space), it will cause pollution.

[0003] At present, the conventional method in the industry is to use static gas flow field simulation to simulate the flow field space. However, since the AMHS system usually contains Stocker equipment that moves rapidly and frequently, the impact on the flow field space cannot be evaluated through static flow field simulation, and dynamic airflow simulation that can take into account the motion state of the equipment must be used to calculate. However, Stocker equipment usually has the characteristics of large size, high space occupancy, irregular appearance and structure, and fast running speed, which makes dynamic airflow simulation difficult and computationally intensive, making it difficult to achieve.

[0004] In summary, traditional technologies for fluid simulation of such problems all use static gas flow field simulation. The simulation results deviate greatly from the actual working conditions and cannot reflect the impact of equipment operation on the clean room. Dynamic airflow simulation is difficult and computationally expensive. Currently, there is no specific and implementable dynamic airflow simulation method. Summary of the invention

[0005] To this end, the present invention provides a dynamic airflow simulation method and device for a Stocker device inside an AMHS system, which can evaluate and analyze the internal gas flow field law of the Stocker device during operation, ensuring that the equipment can meet the cleanliness requirements of the process.

[0006] In order to achieve the above object, the present invention provides the following technical solution: a method for simulating dynamic airflow of a Stocker device inside an AMHS system, comprising the following steps:

[0007] Constructing a Stocker fluid space geometric model, and performing mesh division on the Stocker fluid space geometric model to obtain a fluid space mesh division result;

[0008] Constructing a Stocker motion scene geometric model, and performing mesh division on the Stocker motion scene geometric model to obtain a motion scene mesh division result;

[0009] The fluid space grid division result and the motion scene grid division result are grid-coupled by a dynamic grid technology to obtain a dynamic simulation calculation grid model of the Stocker device, wherein the dynamic simulation calculation grid model includes physical objects in the Stocker fluid space geometric model and physical objects in the Stocker motion scene geometric model;

[0010] Simplifying the specified physical objects in the dynamic simulation calculation grid model to obtain the simplified dynamic simulation calculation grid model;

[0011] Through the simplified dynamic simulation calculation grid model, a fluid simulation calculation is performed on the specified specific working condition of the Stocker device to obtain the fluid simulation result of the Stocker device, and the fluid simulation result includes the internal air flow velocity and pressure cloud map of the Stocker device;

[0012] According to the fluid simulation results, the DPM discrete phase model is used to simulate and analyze the influence of the rear airflow on the dust particles when the Stocker device is moving.

[0013] As a preferred solution for the dynamic airflow simulation method of the Stocker equipment in the AMHS system, the physical objects in the Stocker fluid space geometric model include lanes, storage positions, ports, mesh plates, sinking spaces and equipment-end fan filter units; the physical objects in the Stocker motion scene geometric model include the Stocker trolley body structure and the square fluid area around the trolley;

[0014] The air supply conditions and arrangement rate of the fan filter unit at the equipment end in the dynamic simulation calculation grid model are simplified by boundary conditions, and the mesh plate in the dynamic simulation calculation grid model is simplified by using a Porous Jump boundary.

[0015] As a preferred solution for the dynamic airflow simulation method of the Stocker device in the AMHS system, the storage space in the dynamic simulation calculation grid model is simplified and replaced by a block entity;

[0016] The mesh plates in the dynamic simulation calculation grid model are replaced by square faces, and parameters are specified for each square face to simulate mesh plates with different opening ratios and irregularly arranged mesh plates.

[0017] As a preferred solution for the dynamic airflow simulation method of the Stocker device in the AMHS system, the length of the lanes in the dynamic simulation calculation grid model is simplified. The calculation formula for the shortest length of the lanes in the dynamic simulation calculation grid model is:

[0018] The shortest length of the lane = the shortest distance required for the trolley body to accelerate while reciprocating in the lane + (the maximum speed of the trolley body × 1 second) + the shortest distance required for the trolley body to decelerate.

[0019] As a preferred solution for the dynamic airflow simulation method of the Stocker device in the AMHS system, the Stocker trolley body structure in the dynamic simulation calculation grid model is simplified, the surface detail features of the trolley body are removed, and the shape and additional structures reaching the preset size are retained;

[0020] The square fluid region around the trolley in the dynamic simulation calculation grid model is simplified, and the square fluid region around the trolley includes the trolley body structure but does not exceed the fluid space of the Stocker device.

[0021] As a preferred solution for the dynamic airflow simulation method of the Stocker device inside the AMHS system, in the process of simplifying the boundary conditions of the mesh plate in the dynamic simulation calculation grid model through the Porous Jump boundary, before setting the Porous Jump boundary, the relationship between the pressure loss ΔP of the mesh plate with a set opening rate and the flow velocity v is obtained through experiments and fluid simulation methods, and the quadratic term coefficients n2 and n1 are obtained by quadratic polynomial fitting, and then the simplified parameters are obtained: the surface permeability α and the pressure jump coefficient C2.

[0022] As a preferred solution for the dynamic airflow simulation method of the Stocker device in the AMHS system, it also includes:

[0023] The fluid simulation results are analyzed to obtain a structural improvement plan. The analysis objects of the fluid simulation results include: the air supply situation and layout rate of the fan filter unit at the equipment end; the pressure distribution in the tunnel and port space; the wind speed flow direction at the intersection of the port and the tunnel; the number of dust particles at the passline height level; and the velocity vector distribution diagram.

[0024] The obtained structural improvement plan includes: increasing the arrangement rate of the fan filter unit at the equipment end or increasing the opening rate of the mesh plate; reducing the opening rate of the mesh plate in the local area of ​​the tunnel or reducing the size of the port opening; improving the external structure of the Stocker trolley to weaken the interference to the flow field during movement; adjusting the storage space distribution to avoid the formation of vortex areas; reducing the opening rate of the mesh plate in the local area to increase the pressure difference between the inside and outside of the equipment.

[0025] The present invention also provides a dynamic airflow simulation device for a Stocker device inside an AMHS system, comprising:

[0026] A fluid space meshing module is used to construct a Stocker fluid space geometric model, mesh the Stocker fluid space geometric model, and obtain a fluid space meshing result;

[0027] A motion scene meshing module is used to construct a Stocker motion scene geometric model, mesh the Stocker motion scene geometric model, and obtain a motion scene meshing result;

[0028] A meshing result coupling module is used to mesh-couple the fluid space meshing result and the motion scene meshing result through a dynamic meshing technology to obtain a dynamic simulation calculation mesh model of the Stocker device, wherein the dynamic simulation calculation mesh model includes physical objects in the Stocker fluid space geometric model and physical objects in the Stocker motion scene geometric model;

[0029] A grid model simplification module, used to simplify the specified physical objects in the dynamic simulation calculation grid model to obtain the simplified dynamic simulation calculation grid model;

[0030] A fluid simulation analysis module, used to perform fluid simulation calculation on a specified specific working condition of the Stocker device through the simplified dynamic simulation calculation grid model, and obtain a fluid simulation result of the Stocker device, wherein the fluid simulation result includes an internal air flow velocity and a pressure cloud map of the Stocker device;

[0031] The moving airflow dust impact analysis module is used to simulate and analyze the impact of the rear airflow on the dust particles during the movement of the Stocker device based on the fluid simulation results using the DPM discrete phase model.

[0032] As a preferred solution for the dynamic airflow simulation device of the Stocker equipment in the AMHS system, in the meshing result coupling module:

[0033] The physical objects in the Stocker fluid space geometric model include lanes, storage locations, ports, mesh plates, sinking spaces, and fan filter units at the equipment end; the physical objects in the Stocker motion scene geometric model include the Stocker trolley body structure and the square fluid area around the trolley;

[0034] In the grid model simplification module, the air supply condition and layout rate of the fan filter unit at the device end in the dynamic simulation calculation grid model are simplified by boundary conditions, and the boundary conditions of the mesh plate in the dynamic simulation calculation grid model are simplified by the Porous Jump boundary;

[0035] In the grid model simplification module, the storage space in the dynamic simulation calculation grid model is simplified and replaced by a block entity; the mesh plate in the dynamic simulation calculation grid model is replaced by a square surface, and parameters are specified for each square surface to simulate mesh plates with different opening rates and irregularly arranged mesh plates;

[0036] In the grid model simplification module, the length of the lanes in the dynamic simulation calculation grid model is simplified. The formula for calculating the shortest length of the lanes in the dynamic simulation calculation grid model is:

[0037] The shortest length of the lane = the shortest distance required for the trolley body to accelerate when doing reciprocating motion in the lane + (the maximum speed of the trolley body × 1 second) + the shortest distance required for the trolley body to decelerate;

[0038] In the mesh model simplification module, the Stocker trolley body structure in the dynamic simulation calculation mesh model is simplified, the surface detail features of the trolley body are removed, and the shape and additional structures reaching the preset size are retained;

[0039] In the grid model simplification module, the square fluid area around the trolley in the dynamic simulation calculation grid model is simplified, and the square fluid area around the trolley includes the trolley body structure but does not exceed the fluid space of the Stocker device;

[0040] In the fluid simulation analysis module, before setting the Porous Jump boundary, the relationship between the pressure loss ΔP of the mesh plate with a set opening rate and the flow velocity v is obtained through experiments and fluid simulation methods, and the quadratic term coefficients n2 and n1 are obtained through quadratic polynomial fitting, thereby obtaining simplified parameters: surface permeability α and pressure jump coefficient C2.

[0041] As the preferred solution for the dynamic airflow simulation device of the Stocker equipment in the AMHS system, it also includes:

[0042] The structural improvement plan analysis module is used to analyze the fluid simulation results to obtain a structural improvement plan. The analysis objects of the fluid simulation results include: the air supply situation and layout rate of the fan filter unit at the equipment end; the pressure distribution in the tunnel and port space; the wind speed flow direction at the intersection of the port and the tunnel; the number of dust particles at the passline height level; and the velocity vector distribution diagram.

[0043] The obtained structural improvement plan includes: increasing the arrangement rate of the fan filter unit at the equipment end or increasing the opening rate of the mesh plate; reducing the opening rate of the mesh plate in the local area of ​​the tunnel or reducing the size of the port opening; improving the external structure of the Stocker trolley to weaken the interference to the flow field during movement; adjusting the storage space distribution to avoid the formation of vortex areas; reducing the opening rate of the mesh plate in the local area to increase the pressure difference between the inside and outside of the equipment.

[0044] The present invention has the following advantages: it can realize dynamic airflow simulation analysis, evaluate and analyze the internal gas flow field law of the Stocker equipment during operation in the early stage of program planning, ensure that the equipment can meet the cleanliness requirements of the process, and ensure the smooth commissioning of the project; ensure the stability of the production environment, so that the final quality of the product and the continuity of production are guaranteed, and achieve high efficiency and high reliability of industrial production. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] In order to more clearly illustrate the implementation methods of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for the implementation methods or the description of the prior art. Obviously, the drawings in the following description are only exemplary, and for ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0046] Figure 1 A schematic flow chart of a dynamic airflow simulation method for a Stocker device inside an AMHS system provided by an embodiment of the present invention;

[0047] Figure 2 A schematic diagram of a technical route of a dynamic airflow simulation method for a Stocker device inside an AMHS system provided by an embodiment of the present invention;

[0048] Figure 3 A schematic diagram of physical objects in a dynamic simulation computing grid model provided by an embodiment of the present invention;

[0049] Figure 4 A simplified schematic diagram of a mesh plate in a dynamic simulation calculation grid model provided by an embodiment of the present invention;

[0050] Figure 5 Velocity vector diagrams of the front and top cross-sections of the Stocker dynamic airflow simulation results provided by an embodiment of the present invention;

[0051] Figure 6 A velocity vector diagram of the right-view cross-section of a Stocker dynamic airflow simulation result provided in an embodiment of the present invention;

[0052] Figure 7 A pressure cloud diagram of the right-view cross section of the Stocker dynamic airflow simulation result provided in an embodiment of the present invention;

[0053] Figure 8 Simulation results of the DPM discrete phase model provided for the embodiment of the present invention: the influence of the airflow behind the Stocker on the dust particles;

[0054] Fig. 9 This is a diagram of the architecture of a dynamic airflow simulation device for a Stocker device within an AMHS system provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0055] The following is a description of the implementation of the present invention by specific embodiments. People familiar with the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0056] Example 1

[0057] See also Figure 1 and Figure 2 The embodiment of the present invention provides a method for simulating dynamic airflow of a Stocker device in an AMHS system, comprising the following steps:

[0058] S1. constructing a Stocker fluid space geometric model, and performing meshing on the Stocker fluid space geometric model to obtain a fluid space meshing result;

[0059] S2, constructing a Stocker motion scene geometric model, and meshing the Stocker motion scene geometric model to obtain a motion scene meshing result;

[0060] S3, mesh coupling the fluid space mesh division result and the motion scene mesh division result through dynamic mesh technology to obtain a dynamic simulation calculation mesh model of the Stocker device, wherein the dynamic simulation calculation mesh model includes physical objects in the Stocker fluid space geometric model and physical objects in the Stocker motion scene geometric model;

[0061] S4, simplifying the specified physical objects in the dynamic simulation calculation grid model to obtain a simplified dynamic simulation calculation grid model;

[0062] S5. Perform fluid simulation calculation on the specified specific working condition of the Stocker device through the simplified dynamic simulation calculation grid model to obtain the fluid simulation result of the Stocker device, wherein the fluid simulation result includes the internal air flow velocity and pressure cloud map of the Stocker device;

[0063] S6. Based on the fluid simulation results, the DPM discrete phase model is used to simulate and analyze the influence of the rear airflow on the dust particles during the movement of the Stocker device.

[0064] In this embodiment, in steps S1 and S2, the Stocker fluid space geometric model and the Stocker motion scene geometric model are meshed, both using the Poly-Hexcore volume mesh method, which can effectively reduce the total number of mesh units and reduce the amount of calculation.

[0065] See also Figure 3 In step S3 of this embodiment, the physical objects in the Stocker fluid space geometric model include lanes, storage locations, ports, mesh plates, sinking spaces, the Stocker trolley body and the equipment-end fan filter unit (EFU); the physical objects in the Stocker motion scene geometric model include the Stocker trolley body structure and the square fluid area around the trolley; the air supply conditions and layout rate of the equipment-end fan filter unit in the dynamic simulation calculation grid model are simplified by boundary conditions, and the mesh plates in the dynamic simulation calculation grid model are simplified by Porous Jump boundaries; the storage locations in the dynamic simulation calculation grid model are simplified by block entities; the mesh plates in the dynamic simulation calculation grid model are replaced by square faces, and parameters are specified for each square face to simulate mesh plates with different opening rates and irregularly arranged mesh plates.

[0066] The lane is the movement space of the stocker inside the equipment. The stocker moves back and forth in the lane according to the instructions given by the host computer. The storage location is the material cache location of the stocker equipment. The block entity is simplified and replaced. The port is the operation space for the stocker equipment to connect with other equipment in the AMHS system. In the simplified model, a wall is set between the port and the lane space, and the opening on the interface between the port and the lane is set as the internal surface of the fluid, which can simulate the fluid interaction between the lane area and the port area.

[0067] See also Figure 4, where the actual mesh plate area is composed of multiple square plates with dense openings, installed under the stocker and storage location to ensure that the airflow flows vertically downward to form a relatively stable unidirectional flow. In the simplified model, the mesh plate is replaced by a square surface. By specifying different parameters for each square surface, mesh plates with different opening rates and irregularly arranged mesh plates can be simulated. Common mesh plate opening rates are 10%, 17%, 25%, 40%, etc.

[0068] Among them, the equipment fan filter unit (EFU) is responsible for delivering clean air to the inside of the equipment. In Stocker equipment, EFU mostly adopts standard size and is installed on the top of the tunnel according to a certain layout rate. Common equipment fan filter unit layout rates are 50%, 80%, 100%, etc. Therefore, in the simplified model, the equipment fan filter unit is replaced by a square surface. By specifying different velocity inlet parameters for each square surface, different equipment fan filter unit layout rates and the actual working conditions of installing the equipment fan filter unit in different arrangements can be simulated.

[0069] The length of the lanes in the dynamic simulation calculation grid model is simplified, and the calculation formula for the shortest length of the lanes in the dynamic simulation calculation grid model is:

[0070] The shortest length of the lane = the shortest distance required for the trolley body to accelerate while reciprocating in the lane + (the maximum speed of the trolley body × 1 second) + the shortest distance required for the trolley body to decelerate.

[0071] The sinking space is the return air area under the mesh plate, and the air flows out from both sides of the space. Through targeted model simplification, the workload can be reduced by about 80% while ensuring the accuracy of the simulation results.

[0072] In this embodiment, the structure of the Stocker trolley body in the dynamic simulation calculation grid model is simplified, the surface detail features of the trolley body are removed, and the shape and additional structures reaching the preset size are retained;

[0073] The square fluid region around the trolley in the dynamic simulation calculation grid model is simplified, and the square fluid region around the trolley includes the trolley body structure but does not exceed the fluid space of the Stocker device.

[0074] Specifically, the geometric model of the Stocker motion scene is simplified using 3D software. For the car body structure, the surface detail features should be removed, and only the shape and large-sized additional structures should be retained. For the square fluid area around the car, the car body structure should be included but not exceed the Stocker device fluid space, which is convenient for calculation using the dynamic mesh coupling model, and can avoid overly complex mesh reconstruction and the probability of negative volume generation. Through the simplification of this step, it is usually possible to reduce the amount of calculation by about 60% while ensuring the accuracy of the simulation.

[0075] In this embodiment, in step S4, the boundary conditions of the mesh plate in the dynamic simulation calculation grid model are simplified by the Porous Jump boundary. Before setting the Porous Jump boundary, the relationship between the pressure loss ΔP and the flow velocity v of the mesh plate with a set opening rate is obtained by experiments and fluid simulation methods, and the quadratic term coefficients n2 and n1 are obtained by quadratic polynomial fitting, and the simplified parameters are obtained: the surface permeability α and the pressure jump coefficient C 2 .

[0076] Among them, the relationship between the pressure loss and flow velocity of porous media is:

[0077] ;

[0078] ΔP is v A quadratic polynomial function of ρ is the fluid density, Δm is the thickness of the porous medium, μ is the fluid viscosity, the coefficient of the quadratic term is n1, and the coefficient of the linear term is n2, then:

[0079] ;

[0080] Then, the surface permeability α and the pressure jump coefficient are obtained: C 2 .

[0081] The experimental and fluid simulation method process is as follows:

[0082] 1) Create a single mesh plate entity model, taking a 17% open area mesh plate as an example; 2) Create a flow area model that only contains a single mesh plate; 3) Take the velocity as the input variable and the inlet and outlet pressure loss as the output, perform a parametric simulation, and obtain a set of flow velocity v and inlet and outlet pressure loss ΔP; 4) Use this set of data to fit a specific form of quadratic polynomial, substitute the polynomial coefficients into the above formula to calculate, and obtain the required parameters of surface permeability α and pressure jump coefficient C 2Repeat the above steps 1)-4) to calculate the surface permeability α and pressure jump coefficient corresponding to the mesh plates with different opening ratios. C 2 . According to the design conditions, the corresponding opening ratio is specified for each square surface.

[0083] The fluid simulation software will directly solve ΔP according to the specified Porous Jump parameter, and then substitute it into the NS equation for iterative solution. Therefore, there is no need to draw dense perforated plates, which greatly reduces the pressure of grid division and can significantly improve the calculation efficiency. By simplifying this step, the amount of calculation can be reduced by about 80% while ensuring the accuracy of the simulation.

[0084] In this embodiment, the fluid simulation calculation is performed on the specified specific working conditions of the Stocker equipment based on the NS equation, the turbulence model is selected as the k-ω SST model, the no-slip wall boundary condition, and the SIMPLE algorithm is used to solve. Fluent software is used in this scheme to complete the simulation calculation, but it should be noted that the present invention only provides a simulation method and should not be limited to a certain simulation software or numerical simulation algorithm. The simulation method using the same software to solve the same problem should be included in the protection scope of the present invention. The computer hardware used should not be less than the following configuration:

[0085] Operating system: MicrosoftR Windows 10 64-bit; CPU: at least a 4-core processor; Memory: 16-128GB RAM; Storage: two 1TB PCle hard drives in RAIDO configuration; Graphics: NVIDIA graphics card with 4GB+ video memory.

[0086] In this embodiment, the DPM discrete phase model is added based on the fluid simulation results to simulate and analyze the influence of the rear airflow on the dust particles during the Stocker movement. It is assumed that the dust particles are spheres with a diameter of 0.01 μm. A certain number of dust particles are generated (accumulated) per second above the mesh plate in the Stocker fluid space. The dust particles are affected by gravity, drag and resistance in the flow field. Through this method, intuitive and visual results can be obtained, which provides a very intuitive reference for result analysis.

[0087] See also Figure 5 The velocity cloud diagram of the Stocker dynamic airflow simulation result of the embodiment of the present invention is shown in FIG. Figure 5 The airflow direction and velocity at each position of the fluid space in the main view and top view sections can be obtained when the Stocker moves to the current position, and then it can be analyzed whether vortex and other phenomena that are not conducive to maintaining the cleanliness of the space will occur as the airflow pattern in the Stocker equipment moves. Figure 6The velocity vector diagram of the Stocker dynamic airflow simulation result is shown in Figure 2. Figure 6 When the Stocker moves to the current position, the airflow direction and velocity at each position in the fluid space in a certain section can be obtained, and then the changes in the airflow form in the space as the Stocker device moves can be analyzed; Figure 7 The pressure cloud distribution of a certain section is shown in the right side of the Stocker dynamic airflow simulation result. Figure 7 When the Stocker moves to the current position, the pressure distribution in different areas such as the fluid space and the port can be obtained, and then it can be judged whether the airflow direction can always flow from the internal space to the outside, thereby ensuring the cleanliness of the space. Figure 8 The DPM discrete phase model simulation results of the embodiment of the present invention are as follows: Figure 8 It can be intuitively observed that when the stocker is in motion, the effect of the airflow behind it on the dust particles can be effectively evaluated by analyzing the maximum height of the dust particles, the number of dust particles at the passline height level and other parameters. It should be noted that in this embodiment, only the effect of the airflow behind the stocker on the dust particles is used as an example. This method can analyze the effect of the airflow in any area of ​​the flow field on the dust particles, thereby achieving a targeted, intuitive and effective evaluation of the cleanliness.

[0088] In a possible embodiment, it further includes:

[0089] The fluid simulation results are analyzed to obtain a structural improvement plan. The analysis objects of the fluid simulation results include: the air supply situation and layout rate of the fan filter unit at the equipment end; the pressure distribution in the tunnel and port space; the wind speed flow direction at the intersection of the port and the tunnel; the number of dust particles at the passline height level; and the velocity vector distribution diagram.

[0090] The obtained structural improvement plan includes: increasing the arrangement rate of the fan filter unit at the equipment end or increasing the opening rate of the mesh plate; reducing the opening rate of the mesh plate in the local area of ​​the tunnel or reducing the size of the port opening; improving the external structure of the Stocker trolley to weaken the interference to the flow field during movement; adjusting the storage space distribution to avoid the formation of vortex areas; reducing the opening rate of the mesh plate in the local area to increase the pressure difference between the inside and outside of the equipment.

[0091] Specifically, the airflow pattern and the wind speed at the Passline position in the full time process are analyzed to ensure that the airflow pattern is a stable unidirectional flow, and the Passline wind speed is higher than the recommended wind speed of the clean level required by the process. If the wind speed is lower than the recommended wind speed of the clean level required by the process, it is necessary to consider increasing the EFU layout rate or increasing the mesh plate opening rate; analyze the pressure distribution of the tunnel and port space, which should meet the requirements of tunnel pressure>port pressure>external pressure, otherwise, it is necessary to consider reducing the mesh plate opening rate in the local area of ​​the tunnel or reducing the port opening size; analyze the wind speed flow direction of each port and tunnel intersection section in the full time process, and ensure that when the Stocker passes, the gas flow direction can always be maintained from the tunnel to the port, without backflow. Otherwise, it is necessary to consider reducing the mesh plate opening rate in the local area of ​​the tunnel or reducing the port opening size.

[0092] Specifically, analyze the number of dust particles at the Passline height level in the entire time process. Ensure that the dust height of the airflow behind the Stocker does not exceed the Passline height level. Otherwise, improvement measures such as increasing the EFU layout rate, increasing the mesh plate opening rate in the local area, increasing the sinking space height or increasing the Passline height should be considered. Analyze the velocity vector distribution diagram in the entire time process, find out the non-unidirectional flow area, or the structure that has a large disturbance to the unidirectional flow gas in the space, and make targeted improvements, such as improving the Stocker's external structure to weaken its interference with the flow field during movement, adjusting the storage space distribution to avoid the formation of swirl areas, reducing the mesh plate opening rate in the local area to increase the pressure difference between the inside and outside of the equipment, etc.

[0093] In summary, the present invention constructs a Stocker fluid space geometric model, meshes the Stocker fluid space geometric model, and obtains a fluid space meshing result; constructs a Stocker motion scene geometric model, meshes the Stocker motion scene geometric model, and obtains a motion scene meshing result; meshes the fluid space meshing result and the motion scene meshing result are coupled by a dynamic meshing technology to obtain a dynamic simulation calculation grid model of a Stocker device, wherein the dynamic simulation calculation grid model includes physical objects in the Stocker fluid space geometric model and physical objects in the Stocker motion scene geometric model; simplifies the specified physical objects in the dynamic simulation calculation grid model to obtain a simplified dynamic simulation calculation grid model; performs fluid simulation calculation on a specified specific working condition of the Stocker device through the simplified dynamic simulation calculation grid model to obtain a fluid simulation result of the Stocker device, wherein the fluid simulation result includes an internal airflow velocity and a pressure cloud map of the Stocker device; and according to the fluid simulation result, a DPM discrete phase model is used to simulate and analyze the influence of the rear airflow on the dust particles during the movement of the Stocker device. The present invention can realize dynamic airflow simulation analysis. In the early stage of program planning, it can evaluate and analyze the internal gas flow field law of the Stocker equipment during operation, ensure that the equipment can meet the cleanliness requirements of the process, and ensure the smooth commissioning of the project; ensure the stability of the production environment, so that the final quality of the product and the continuity of production are guaranteed, and achieve high efficiency and high reliability of industrial production.

[0094] It should be noted that the method of the embodiment of the present disclosure can be performed by a single device, such as a computer or a server. The method of the present embodiment can also be applied in a distributed scenario and completed by multiple devices cooperating with each other. In the case of such a distributed scenario, one of the multiple devices can only perform one or more steps in the method of the embodiment of the present disclosure, and the multiple devices will interact with each other to complete the described method.

[0095] It should be noted that the above describes some embodiments of the present disclosure. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be performed in an order different from that in the above embodiments and still achieve the desired results. In addition, the processes depicted in the accompanying drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0096] Example 2

[0097] See also Fig. 9 Embodiment 2 of the present invention further provides a dynamic airflow simulation device for a Stocker device inside an AMHS system, comprising:

[0098] The fluid space grid division module 100 is used to construct a Stocker fluid space geometric model, perform grid division on the Stocker fluid space geometric model, and obtain a fluid space grid division result;

[0099] A motion scene meshing module 200 is used to construct a Stocker motion scene geometric model, and to mesh the Stocker motion scene geometric model to obtain a motion scene meshing result;

[0100] A meshing result coupling module 300 is used to mesh-couple the fluid space meshing result and the motion scene meshing result by using a dynamic meshing technology to obtain a dynamic simulation calculation mesh model of a Stocker device, wherein the dynamic simulation calculation mesh model includes physical objects in the Stocker fluid space geometric model and physical objects in the Stocker motion scene geometric model;

[0101] A grid model simplification module 400 is used to simplify the specified physical objects in the dynamic simulation calculation grid model to obtain the simplified dynamic simulation calculation grid model;

[0102] The fluid simulation analysis module 500 is used to perform fluid simulation calculation on the specified specific working condition of the Stocker device through the simplified dynamic simulation calculation grid model to obtain the fluid simulation result of the Stocker device, and the fluid simulation result includes the internal air flow velocity and pressure cloud map of the Stocker device;

[0103] The moving airflow dust impact analysis module 600 is used to simulate and analyze the impact of the rear airflow on the dust particles during the movement of the Stocker device using the DPM discrete phase model according to the fluid simulation results.

[0104] In this embodiment, in the meshing result coupling module 300:

[0105] The physical objects in the Stocker fluid space geometric model include lanes, storage locations, ports, mesh plates, sinking spaces, and fan filter units at the equipment end; the physical objects in the Stocker motion scene geometric model include the Stocker trolley body structure and the square fluid area around the trolley;

[0106] In the grid model simplification module 400, the air supply condition and layout rate of the fan filter unit at the device end in the dynamic simulation calculation grid model are simplified by boundary conditions, and the boundary conditions of the mesh plate in the dynamic simulation calculation grid model are simplified by the Porous Jump boundary;

[0107] In the grid model simplification module 400, the storage space in the dynamic simulation calculation grid model is simplified and replaced by a block entity; the mesh plate in the dynamic simulation calculation grid model is replaced by a square surface, and parameters are specified for each square surface to simulate mesh plates with different opening ratios and irregularly arranged mesh plates;

[0108] In the grid model simplification module 400, the length of the lanes in the dynamic simulation calculation grid model is simplified. The formula for calculating the shortest length of the lanes in the dynamic simulation calculation grid model is:

[0109] The shortest length of the lane = the shortest distance required for the trolley body to accelerate when doing reciprocating motion in the lane + (the maximum speed of the trolley body × 1 second) + the shortest distance required for the trolley body to decelerate;

[0110] In the mesh model simplification module 400, the Stocker trolley body structure in the dynamic simulation calculation mesh model is simplified, the surface detail features of the trolley body are removed, and the shape and additional structures reaching the preset size are retained;

[0111] In the grid model simplification module 400, the square fluid area around the car in the dynamic simulation calculation grid model is simplified, and the square fluid area around the car includes the car body structure but does not exceed the fluid space of the Stocker device;

[0112] In the fluid simulation analysis module 500, before setting the Porous Jump boundary, the relationship between the pressure loss ΔP of the mesh plate with a set opening rate and the flow velocity v is obtained through experiments and fluid simulation methods, and the quadratic term coefficients n2 and n1 are obtained through quadratic polynomial fitting, and simplified parameters are obtained: surface permeability α and pressure jump coefficient C2.

[0113] In this embodiment, it also includes:

[0114] The structural improvement plan analysis module 700 is used to analyze the fluid simulation results to obtain a structural improvement plan. The analysis objects of the fluid simulation results include: the air supply situation and layout rate of the fan filter unit at the equipment end; the pressure distribution in the tunnel and port space; the wind speed flow direction at the intersection of the port and the tunnel; the number of dust particles at the passline height level; and the velocity vector distribution diagram.

[0115] The obtained structural improvement plan includes: increasing the arrangement rate of the fan filter unit at the equipment end or increasing the opening rate of the mesh plate; reducing the opening rate of the mesh plate in the local area of ​​the tunnel or reducing the size of the port opening; improving the external structure of the Stocker trolley to weaken the interference to the flow field during movement; adjusting the storage space distribution to avoid the formation of vortex areas; reducing the opening rate of the mesh plate in the local area to increase the pressure difference between the inside and outside of the equipment.

[0116] It should be noted that the information interaction, execution process and other contents between the modules of the above-mentioned device are based on the same concept as the method embodiment in Example 1 of the present application, and the technical effects they bring are the same as those of the method embodiment of the present application. For specific contents, please refer to the description in the method embodiment shown in the previous part of the present application, and will not be repeated here.

[0117] Example 3

[0118] Embodiment 3 of the present invention provides a non-transitory computer-readable storage medium, in which a program code of a dynamic airflow simulation method of a Stocker device inside an AMHS system is stored, and the program code includes instructions for executing the dynamic airflow simulation method of a Stocker device inside an AMHS system of Embodiment 1 or any possible implementation thereof.

[0119] Computer-readable storage media can be any available medium that can be accessed by a computer or a data storage device such as a server or data center that includes one or more available media. The available medium can be a magnetic medium (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a semiconductor medium (e.g., a solid-state drive (SSD)).

[0120] Example 4

[0121] Embodiment 4 of the present invention provides an electronic device, including: a memory and a processor;

[0122] The processor and the memory communicate with each other via a bus; the memory stores program instructions that can be executed by the processor, and the processor calls the program instructions to execute the dynamic airflow simulation method of the Stocker device inside the AMHS system of Example 1 or any possible implementation thereof.

[0123] Specifically, the processor can be implemented by hardware or by software. When implemented by hardware, the processor can be a logic circuit, an integrated circuit, etc.; when implemented by software, the processor can be a general-purpose processor implemented by reading software codes stored in a memory. The memory can be integrated in the processor or can be located outside the processor and exist independently.

[0124] In the above embodiments, it can be implemented in whole or in part by software, hardware, firmware or any combination thereof. When implemented using software, it can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the process or function described in the embodiment of the present invention is generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable devices. The computer instructions can be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium, for example, the computer instructions can be transmitted from a website site, computer, server or data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) mode to another website site, computer, server or data center.

[0125] Obviously, those skilled in the art should understand that the above modules or steps of the present invention can be implemented by a general computing device, they can be concentrated on a single computing device, or distributed on a network composed of multiple computing devices, and optionally, they can be implemented by a program code executable by a computing device, so that they can be stored in a storage device and executed by the computing device, and in some cases, the steps shown or described can be executed in a different order than here, or they can be made into individual integrated circuit modules, or multiple modules or steps therein can be made into a single integrated circuit module for implementation. Thus, the present invention is not limited to any specific combination of hardware and software.

[0126] Although the present invention has been described in detail above by general description and specific embodiments, it is obvious to those skilled in the art that some modifications or improvements can be made to the present invention. Therefore, these modifications or improvements made without departing from the spirit of the present invention all belong to the scope of protection claimed by the present invention.

Claims

1. A method for simulating dynamic airflow of a Stocker device inside an AMHS system, characterized in that: The following steps are involved: Constructing a Stocker fluid space geometric model, and performing mesh division on the Stocker fluid space geometric model to obtain a fluid space mesh division result; Constructing a Stocker motion scene geometric model, and performing mesh division on the Stocker motion scene geometric model to obtain a motion scene mesh division result; The fluid space grid division result and the motion scene grid division result are grid-coupled by a dynamic grid technology to obtain a dynamic simulation calculation grid model of the Stocker device, wherein the dynamic simulation calculation grid model includes physical objects in the Stocker fluid space geometric model and physical objects in the Stocker motion scene geometric model; Simplifying the specified physical objects in the dynamic simulation calculation grid model to obtain the simplified dynamic simulation calculation grid model; Through the simplified dynamic simulation calculation grid model, a fluid simulation calculation is performed on the specified specific working condition of the Stocker device to obtain the fluid simulation result of the Stocker device, and the fluid simulation result includes the internal air flow velocity and pressure cloud map of the Stocker device; According to the fluid simulation results, the DPM discrete phase model is used to simulate and analyze the influence of the rear airflow on the dust particles during the movement of the Stocker equipment; The physical objects in the Stocker fluid space geometric model include lanes, storage locations, ports, mesh plates, sinking spaces, and fan filter units at the equipment end; the physical objects in the Stocker motion scene geometric model include the Stocker trolley body structure and the square fluid area around the trolley; Simplifying the boundary conditions of the air supply condition and arrangement rate of the fan filter unit at the equipment end in the dynamic simulation calculation grid model, and simplifying the boundary conditions of the mesh plate in the dynamic simulation calculation grid model through the Porous Jump boundary; The storage locations in the dynamic simulation calculation grid model are simplified and replaced by block entities; The mesh plates in the dynamic simulation calculation grid model are replaced by square surfaces, and parameters are specified for each square surface to simulate mesh plates with different opening ratios and irregularly arranged mesh plates; The length of the lanes in the dynamic simulation calculation grid model is simplified, and the calculation formula for the shortest length of the lanes in the dynamic simulation calculation grid model is: The shortest length of the lane = the shortest distance required for the trolley body to accelerate when doing reciprocating motion in the lane + (the maximum speed of the trolley body × 1 second) + the shortest distance required for the trolley body to decelerate; Simplify the structure of the Stocker trolley in the dynamic simulation calculation grid model, remove the surface details of the trolley, and retain the shape and additional structures that reach the preset size; The square fluid region around the trolley in the dynamic simulation calculation grid model is simplified, and the square fluid region around the trolley includes the trolley body structure but does not exceed the fluid space of the Stocker device.

2. The method for simulating dynamic airflow of a Stocker device inside an AMHS system according to claim 1, characterized in that: In the process of simplifying the boundary conditions of the mesh plate in the dynamic simulation calculation grid model by the Porous Jump boundary, before setting the Porous Jump boundary, the relationship between the pressure loss Δp and the flow velocity v of the mesh plate with a set opening rate is obtained by experiments and fluid simulation methods, and the coefficients n2 and n1 are obtained by quadratic polynomial fitting, and simplified parameters are obtained: surface permeability α and pressure jump coefficient C2; The relationship between the pressure loss and flow velocity of porous media is as follows: Δp is a quadratic polynomial function of v, ρ is the fluid density, Δm is the thickness of the porous medium, μ is the fluid viscosity, the quadratic term coefficient is n1, and the linear term coefficient is n2.

3. The method for simulating dynamic airflow of a Stocker device inside an AMHS system according to claim 1, characterized in that: Also includes: The structural improvement plan is obtained by analyzing the fluid simulation results. The analysis objects of the fluid simulation results include: the air supply situation and layout rate of the fan filter unit at the equipment end; the pressure distribution of the tunnel and port space; the wind speed flow direction of the intersection section between the port and the tunnel; the number of dust particles at the passline height level; and the velocity vector distribution diagram; The obtained structural improvement plan includes: increasing the arrangement rate of the fan filter unit at the equipment end or increasing the opening rate of the mesh plate; reducing the opening rate of the mesh plate in the local area of ​​the tunnel or reducing the size of the port opening; improving the external structure of the Stocker trolley to weaken the interference to the flow field during movement; adjusting the storage space distribution to avoid the formation of vortex areas; reducing the opening rate of the mesh plate in the local area to increase the pressure difference between the inside and outside of the equipment.

4. A dynamic airflow simulation device for a stocker device inside an AMHS system, characterized in that: include: A fluid space meshing module is used to construct a Stocker fluid space geometric model, mesh the Stocker fluid space geometric model, and obtain a fluid space meshing result; A motion scene meshing module is used to construct a Stocker motion scene geometric model, mesh the Stocker motion scene geometric model, and obtain a motion scene meshing result; A meshing result coupling module is used to mesh-couple the fluid space meshing result and the motion scene meshing result through a dynamic meshing technology to obtain a dynamic simulation calculation mesh model of the Stocker device, wherein the dynamic simulation calculation mesh model includes physical objects in the Stocker fluid space geometric model and physical objects in the Stocker motion scene geometric model; A grid model simplification module, used to simplify the specified physical objects in the dynamic simulation calculation grid model to obtain the simplified dynamic simulation calculation grid model; A fluid simulation analysis module, used to perform fluid simulation calculation on a specified specific working condition of the Stocker device through the simplified dynamic simulation calculation grid model, and obtain a fluid simulation result of the Stocker device, wherein the fluid simulation result includes an internal air flow velocity and a pressure cloud map of the Stocker device; A moving airflow dust impact analysis module is used to simulate and analyze the impact of the rear airflow on dust particles during the movement of the Stocker device using a DPM discrete phase model based on the fluid simulation results; In the meshing result coupling module: The physical objects in the Stocker fluid space geometric model include lanes, storage locations, ports, mesh plates, sinking spaces, and fan filter units at the equipment end; the physical objects in the Stocker motion scene geometric model include the Stocker trolley body structure and the square fluid area around the trolley; In the grid model simplification module, the air supply condition and layout rate of the fan filter unit at the device end in the dynamic simulation calculation grid model are simplified by boundary conditions, and the boundary conditions of the mesh plate in the dynamic simulation calculation grid model are simplified by the Porous Jump boundary; In the grid model simplification module, the storage space in the dynamic simulation calculation grid model is simplified and replaced by a block entity; the mesh plate in the dynamic simulation calculation grid model is replaced by a square surface, and parameters are specified for each square surface to simulate mesh plates with different opening rates and irregularly arranged mesh plates; In the grid model simplification module, the length of the lanes in the dynamic simulation calculation grid model is simplified. The formula for calculating the shortest length of the lanes in the dynamic simulation calculation grid model is: The shortest length of the lane = the shortest distance required for the trolley body to accelerate when doing reciprocating motion in the lane + (the maximum speed of the trolley body × 1 second) + the shortest distance required for the trolley body to decelerate; In the mesh model simplification module, the Stocker trolley body structure in the dynamic simulation calculation mesh model is simplified, the surface detail features of the trolley body are removed, and the shape and additional structures reaching the preset size are retained; In the grid model simplification module, the square fluid area around the car in the dynamic simulation calculation grid model is simplified, and the square fluid area around the car includes the car body structure but does not exceed the fluid space of the Stocker device.

5. The dynamic airflow simulation device for the stocker equipment inside the AMHS system according to claim 4, characterized in that: In the fluid simulation analysis module, before setting the Porous Jump boundary, the relationship between the pressure loss Δp and the flow velocity v of the mesh plate with a set opening rate is obtained through experiments and fluid simulation methods, and the coefficients n2 and n1 are obtained through quadratic polynomial fitting, and simplified parameters are obtained: the surface permeability α and the pressure jump coefficient C2; The relationship between the pressure loss and flow velocity of porous media is as follows: Δp is a quadratic polynomial function of v, ρ is the fluid density, Δm is the thickness of the porous medium, μ is the fluid viscosity, the quadratic term coefficient is n1, and the linear term coefficient is n2.

6. The dynamic airflow simulation device for the stocker equipment inside the AMHS system according to claim 5, characterized in that: Also includes: The structural improvement plan analysis module is used to analyze the fluid simulation results to obtain a structural improvement plan. The analysis objects of the fluid simulation results include: the air supply situation and layout rate of the fan filter unit at the equipment end; the pressure distribution of the tunnel and port space; the wind speed flow direction of the intersection section between the port and the tunnel; the number of dust particles at the passline height level; and the velocity vector distribution diagram; The obtained structural improvement plan includes: increasing the arrangement rate of the fan filter unit at the equipment end or increasing the opening rate of the mesh plate; reducing the opening rate of the mesh plate in the local area of ​​the tunnel or reducing the size of the port opening; improving the external structure of the Stocker trolley to weaken the interference to the flow field during movement; adjusting the storage space distribution to avoid the formation of vortex areas; reducing the opening rate of the mesh plate in the local area to increase the pressure difference between the inside and outside of the equipment.

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