Substrate clamping device and wet processing equipment

Abstract

The invention discloses a substrate clamping device and wet processing equipment. The substrate clamping device comprises a clamp and a driving part, the clamp is arranged above the driving part and is connected with the driving part; the driving part is used for driving the clamp to rotate; a flushing channel is arranged in the clamp; the flushing channel is provided with at least one inlet and a plurality of outlets; the inlet is formed in the upper surface of the clamp; the multiple outlets are all formed in the side face of the clamp, and the spraying directions of at least part of the outlets are different. By means of the configuration, the cleaning medium can be sprayed in different directions through the multiple outlets, so that the cup-shaped component is better cleaned, and the product quality is guaranteed.

Description

Technical Field

[0001] The present application belongs to the field of wet processing of substrates in the semiconductor industry, and specifically relates to a substrate clamping device and wet processing equipment. Background Art

[0002] Currently, wet processing equipment in the semiconductor industry involves cleaning of liquid protective structures. Figure 1 As shown, in common wet processing equipment, a carrier 2 and a cup-shaped component 3 are provided; wherein the carrier 2 includes a clamp 4 and a driving component 5 for driving the clamp 4 to rotate; when processing a substrate, the clamp 4 can clamp and fix the substrate by a bayonet; the cup-shaped component 3 is arranged on the periphery of the carrier 2, and can be single or multiple; the cup-shaped component 3 is a liquid protection structure. In order to ensure the cleanliness of the process chamber environment, the wet processing equipment needs to be cleaned after being used for a period of time, which mainly involves the cleaning of the cup-shaped component 3. During cleaning, the cleaning arm 1 moves to the top of the carrier 2 and sprays liquid onto the surface of the carrier 2. During this process, the driving component 5 drives the carrier 2 to rotate. Finally, as shown Figure 1 As indicated by the spline 7 in the figure, the liquid will be thrown to the cup-shaped part 3 for cleaning during the rotation of the carrier 2. However, the throwing angle of the carrier 2 is limited after all, so that some positions of the cup-shaped part 3 cannot be cleaned. When the cup-shaped part 3 is not cleaned thoroughly, it will affect the process chamber environment and further affect the product quality. Therefore, it is very important to design a substrate clamping device and wet processing equipment that can better clean the cup-shaped part.

[0003] It should be noted that the information disclosed in the background technology section of this application is only intended to deepen the understanding of the general background technology of this application, and should not be regarded as an admission or any form of implication that the information constitutes prior art already known to those skilled in the art. Summary of the invention

[0004] The purpose of the present application is to overcome the above-mentioned defects of the prior art and to provide a substrate clamping device and a wet processing equipment to better clean the cup-shaped component.

[0005] To achieve the above-mentioned purpose, the present application provides a substrate clamping device, which includes: a clamp and a driving component; the clamp is arranged above the driving component and connected to the driving component; the driving component is used to drive the clamp to rotate; a flushing channel is arranged inside the clamp; the flushing channel has at least one inlet and several outlets; the inlet is opened on the upper surface of the clamp; several of the outlets are opened on the side of the clamp, and the spraying directions of at least some of the outlets are different.

[0006] Optionally, the plurality of outlets have three spraying directions, which are respectively upwardly inclined, downwardly inclined and horizontal.

[0007] Optionally, the flushing channel is provided with the outlets at symmetrical positions along one or more diameter directions of the clamp, and the spraying directions of the outlets at the symmetrical positions are the same.

[0008] Optionally, the flushing channel is an axisymmetric structure.

[0009] Optionally, the flushing channel includes a longitudinal channel and a transverse channel; the longitudinal channel is extended along the axial direction of the clamp; the top of the longitudinal channel is opened on the upper surface of the clamp to form the inlet; the axial center line of the longitudinal channel coincides with the axial center line of the clamp; the bottom end of the longitudinal channel is connected to the transverse channel; the transverse channel intersects the longitudinal channel vertically; and both ends of the transverse channel are opened on the side of the clamp to form the outlet.

[0010] Optionally, there are multiple transverse channels, and the multiple transverse channels cross and converge at the bottom end of the longitudinal channel; both ends of each transverse channel are opened on the side of the clamp, forming an outlet respectively; the two outlets at both ends of each transverse channel are symmetrically arranged in the diameter direction of the clamp, and the injection direction is the same.

[0011] Optionally, the aperture of the inlet is greater than or equal to the aperture of the nozzle on the cleaning arm.

[0012] Based on the same inventive concept, the present application also provides a wet processing equipment, which includes a cleaning arm, a cup-shaped component and any one of the substrate clamping devices described; the cup-shaped component is arranged on the periphery of the substrate clamping device and is arranged around the substrate clamping device; the cleaning arm is used to be arranged above the substrate clamping device, and the nozzle of the cleaning arm is used to align with the inlet.

[0013] Optionally, the output flow rate of the cleaning arm is 1 liter / min to 2 liters / min, and / or the rotation speed of the clamp is 300 rpm to 2000 rpm.

[0014] Optionally, there are a plurality of cup-shaped components, which are concentrically arranged from inside to outside, wherein at least one of the substrate clamping device and the cup-shaped component can be lifted and lowered in a vertical direction to clean the plurality of cup-shaped components in sequence.

[0015] The substrate clamping device and wet processing equipment provided by the present application have at least the following advantages:

[0016] 1. The fixture of the present application is provided with a flushing channel inside, the inlet of the flushing channel is opened on the upper surface of the fixture, and the outlets of the flushing channel are all opened on the side of the fixture, and at least some of the outlets have different spray directions. When the cup-shaped part needs to be cleaned, the fixture can introduce the cleaning medium through the inlet of the upper surface, and then throw the liquid to the cup-shaped part through the opening on the side for cleaning. In this process, the outlets with different spray directions can throw the liquid to different positions of the cup-shaped part. In this way, different positions of the cup-shaped part can be cleaned, the cleaning effect is good, and the cavity environment atmosphere is improved to ensure product quality.

[0017] 2. The outlet of the flushing channel of the present application preferably has three spray directions, namely, upward tilt, downward tilt and horizontal direction. The three spray directions can clean the cup-shaped component in all directions, and the cleaning effect is better;

[0018] 3. The flushing channel of the present application is preferably an axisymmetric structure, which is beneficial to the dynamic and static balance of the entire substrate clamping device, improves the stability of the substrate clamping device, reduces noise and vibration, improves processing efficiency, and ensures product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Those skilled in the art will appreciate that the drawings are provided for a better understanding of the present application and do not constitute any limitation on the scope of the present application.

[0020] Figure 1 It is a structural schematic diagram of a wet processing device of the prior art;

[0021] Figure 2 This is a schematic structural diagram of a wet processing device according to an embodiment of the present application;

[0022] Figure 3 Schematic diagram of the top view of the clamp according to one embodiment of the present application.

[0023] [Appendix Figure 2-3 The markings are as follows]:

[0024] 11-substrate clamping device; 12-cup-shaped component; 13-cleaning arm; 131-nozzle; 14-clamp; 141-upper surface; 142-side; 15-driving component; 16-cleaning medium; 17-flushing channel; 1710-longitudinal channel; 1720-transverse channel; 171-inlet; 172-outlet. DETAILED DESCRIPTION

[0025] The following describes the implementation of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification. The present application can also be implemented or applied through other different specific implementations, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that the illustrations provided in the present embodiment only illustrate the basic concept of the present application in a schematic manner, so the diagram only shows the components related to the present application rather than drawing according to the number, shape and size of the components during actual implementation. The type, quantity and proportion of each component during actual implementation can be a random change, and its component layout type may also be more complicated.

[0026] In addition, each embodiment of the following description has one or more technical features, but this does not mean that the user of the present invention must implement all the technical features in any embodiment at the same time, or can only implement part or all of the technical features in different embodiments separately. In other words, under the premise that implementation is possible, those skilled in the art can selectively implement part or all of the technical features in any embodiment according to the disclosure of the present application and according to the design specifications or implementation requirements, or selectively implement a combination of part or all of the technical features in multiple embodiments, thereby increasing the flexibility of the implementation of the present application.

[0027] As used in this specification, the singular forms "one", "an", and "the" include plural objects, the plural form "a plurality" includes two or more objects, and unless the content clearly indicates otherwise, "several" is used to indicate an indefinite quantity. As used in this specification, the term "or" is usually used to include the meaning of "and / or", unless the content clearly indicates otherwise, and the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection, a direct connection, or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. Relational terms such as the terms "first", "second", etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate or imply relative importance or implicitly indicate the number of technical features indicated. It should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0028] The core idea of ​​the present application is to provide a substrate clamping device and a wet processing device, aiming to solve the problem in the prior art that the cup-shaped part cannot be thoroughly cleaned due to the limited throwing angle of the clamp.

[0029] Please refer to Figure 2 and Figure 3 , an embodiment of the present application provides a wet processing equipment, which includes: a substrate clamping device 11, a cup-shaped component 12 and a cleaning arm 13. The substrate clamping device 11 includes a clamp 14 and a driving component 15. The clamp 14 is arranged above the driving component 15 and is connected to the driving component 15. The driving component 15 is used to drive the clamp 14 to rotate. The driving component 15 may include a motor and a bearing, the output shaft of the motor is connected to the clamp 14, and the output shaft of the motor is supported by the bearing. The driving component 15 may also include a housing, and components such as the motor, the output shaft and the bearing are all arranged in the housing for protection.

[0030] The clamp 14 has two main functions: on the one hand, when the substrate is on the substrate clamping device 12 and undergoes a process, the clamp 14 clamps and fixes the substrate to maintain the stability of the substrate position; on the other hand, when the substrate is not processed, the clamp 14 is used to clean the cup-shaped part 12. During cleaning, the clamp 14 is driven to rotate and throws the cleaning medium 16 to the cup-shaped part 12. The type of substrate involved in this application is not limited, and optionally, the substrate is a silicon wafer.

[0031] The clamp 14 is generally fixed by means of a bayonet. Specifically, a plurality of bayonet pins are installed on the clamp 14 along its circumferential direction, and the bayonet pins are evenly distributed along the circumferential direction of the edge of the clamp 14. When processing the substrate, the plurality of bayonet pins support the substrate through the support surface at the top, and the support surface of the bayonet pins only contacts the edge of the substrate to avoid wear or contamination on the front or back of the substrate. After each substrate is processed, the clamp 14 is driven by the motor to perform a zero return action, so that the clamp 14 returns to the initial position, thereby ensuring that the position of the bayonet pin remains unchanged.

[0032] The shape of the fixture 14 is mostly matched to the shape of the substrate. For example, if the substrate is circular, the fixture 14 is configured as a circular disc structure.

[0033] The cup-shaped member 12 is disposed on the periphery of the substrate clamping device 11 and is disposed around the substrate clamping device 11. The cup-shaped member 12 is mainly used to protect chemicals, prevent chemicals from splashing outside the process unit, and can also be used to collect waste liquid and play a role in gas-liquid separation.

[0034] The cup-shaped member 12 is basically a ring-shaped structure with a variable diameter, that is, the top is a frustum and the bottom is a cylinder, and the substrate clamping device 11 is located inside the cup-shaped member 12. When the substrate is located on the substrate clamping device 12 and a process is performed, the cup-shaped member 12 can prevent the liquid sprayed on the substrate from splashing outside the cup-shaped member 12 and affecting the internal environment of the cavity.

[0035] The cup-shaped member 12 may be one or more. Currently, two or three cup-shaped members 12 are commonly used. When there are multiple cup-shaped members 12, the multiple cup-shaped members 12 are concentrically arranged from the inside to the outside. It should also be known that no matter how many cup-shaped members 12 there are, they need to be concentric with the installation position of the substrate clamping device 11, that is, the axial center line of the cup-shaped member 12 coincides with the axial center line of the substrate clamping device 11.

[0036] The cup-shaped member 12 can be fixed or lifted. The height of the cup-shaped member 12 is generally higher than the height of the substrate clamping device 11, that is, the top of the cup-shaped member 12 extends above the substrate clamping device 11, which is convenient for protection and cleaning.

[0037] Similarly, the substrate clamping device 11 can be fixed or can be raised and lowered. In particular, when there are multiple cup-shaped components 12, in order to clean all the cup-shaped components 12, at least one of the substrate clamping device 11 and the cup-shaped component 12 can be raised and lowered. Preferably, the multiple cup-shaped components 12 are cleaned in sequence by raising and lowering the substrate clamping device 11, for example, from top to bottom or from bottom to top.

[0038] In addition, the cleaning arm 13 is used to deliver a cleaning medium 16. Specifically, the cleaning arm 13 is disposed above the fixture 14, and the nozzle 131 of the cleaning arm 13 faces the upper surface 141 of the fixture 14. Here, the cleaning medium 16 is any suitable liquid, such as deionized water (DIW) and other cleaning materials commonly used in various semiconductor industries.

[0039] In order to solve the problems existing in the prior art, the flushing channel 17 is provided inside the clamp 14 of the present application. The flushing channel 17 has at least one inlet 171 and a plurality of outlets 172. The inlet 171 is provided on the upper surface 141 of the clamp 14, and the plurality of outlets 172 are provided on the side 142 of the clamp 14. The plurality of outlets 172 are independently provided, and the spraying directions of at least some of the outlets 172 are different. The spraying directions can be referred to in Figure 2 Arrow sign.

[0040] It can be seen that when the cup-shaped part 12 needs to be cleaned, the present application can output the cleaning medium 16 toward the upper surface 141 of the clamp 14 through the cleaning arm 13, so that the cleaning medium 16 directly flows into the flushing channel 17 through the inlet 171, and then, under the action of centrifugal force, the cleaning medium 16 flowing into the flushing channel 17 is thrown to the cup-shaped part 12 outside the clamp 14 through each outlet 172 for cleaning. At this time, since the spraying direction of at least part of the outlets 172 is different, the cleaning medium 16 can be thrown to different positions of the cup-shaped part 12 as indicated by the arrow. In this way, different positions of the cup-shaped part 12 can be cleaned, the cleaning effect is good, and the cavity environment atmosphere is improved, and the product quality is guaranteed.

[0041] In addition, the shapes and sizes of the inlet 171 and the outlet 172 are not limited. Preferably, the inlet 171 and the outlet 172 are both circular. Further, the outlet 172 can be designed with a variable cross-section or a constant cross-section. For example, the diameter of the outlet 172 can be gradually increased from the inside to the outside or gradually decreased from the inside to the outside, or remain unchanged from the inside to the outside.

[0042] Preferably, the plurality of outlets 172 have three spray directions, the first spray direction is tilted upward, the second spray direction is tilted downward, and the third spray direction is horizontal, that is, the specific spray directions include middle, upward and downward, forming the flushing of the upper, middle and lower directions. These three spray directions are sufficient to clean the cup-shaped component 12 in all directions, so that the cleaning effect is better. However, it should be known that the present application does not limit the specific angle of tilting upward and the specific angle of tilting downward.

[0043] It should also be understood that when spraying in the horizontal direction, the axial center line of the outlet 172 is 90° with the axial center line of the fixture 14, that is, the spray angle is 0°; and when spraying upward or downward, the axial center line of the outlet 172 is at an angle with the axial center line of the fixture 14, which is less than 90°, such as 30°, 45°, 60°, etc., and the outlet 172 is an oblique opening. In short, the specific spray angle can be adjusted and changed according to actual needs.

[0044] Those skilled in the art should also know that when cleaning the cup-shaped component 12, the rotation speed of the clamp 14 and the output flow rate of the cleaning arm 13 can be set according to actual needs.

[0045] Optionally, the rotation speed of the clamp 14 is 300 rpm to 2000 rpm, such as 300 rpm, 500 rpm, 800 rpm, 1000 rpm, 1200 rpm, 1500 rpm, 1800 rpm, 2000 rpm, etc.

[0046] Optionally, the output flow rate of the cleaning arm 13 is 1 liter / min to 2 liters / min, such as 1 liter / min, 1.5 liters / min or 2 liters / min.

[0047] The above rotation speed and output flow rate can ensure the cleaning intensity and improve the cleaning efficiency.

[0048] like Figure 2 As shown, in this embodiment, the bottom end of the cleaning arm 13 is the nozzle 131. During cleaning, the nozzle 131 should be kept at a certain height to avoid direct contact between the nozzle 131 and the upper surface 141 of the fixture 14. The nozzle 131 can be arranged close to the upper surface 141, but not in contact with the upper surface 141. Of course, the nozzle 131 can also be arranged at a certain height and aligned with the inlet 171. The cleaning arm 13 can move horizontally or up and down. In some cases, the cleaning arm 13 can also rotate.

[0049] Preferably, the nozzle 131 sprays centrally toward the inlet 171 of the flushing channel 17 , that is, the nozzle 131 has a central hole so that the cleaning medium 16 can flow centrally into the flushing channel 16 . Preferably, the aperture of the inlet 171 is greater than or equal to the aperture of the nozzle 131 .

[0050] The present application has no particular limitation on the specific position and number of the outlets 172 , as long as the outlets 172 can clean different positions of the cup-shaped component 12 .

[0051] Specifically, the plurality of outlets 172 may be randomly distributed, evenly distributed, concentratedly distributed, dispersedly distributed, etc. on the side surface 142 of the fixture 14, and may also be distributed in the same circumferential direction or in different circumferential directions of the fixture 14, and may be aligned or staggered up and down, etc.

[0052] Preferably, the flushing channel 17 is provided with outlets 172 at symmetrical positions along one or more diameter directions of the fixture 14, and the outlets 172 at the symmetrical positions have the same spray direction. Here, the same spray direction may mean that the spray orientation is substantially the same, for example, both are upward, downward or horizontal, but when the spray directions are the same, the spray angles may be the same or different.

[0053] Further, the flushing channel 17 can be a symmetrical structure or an asymmetrical structure. More preferably, the flushing channel 17 is an axisymmetric structure, which is more conducive to the dynamic and static balance of the entire substrate clamping device 11 and reduces the difficulty of processing and design. In practice, the flushing channel 17 can be formed into an axisymmetric structure by various measures. The following is an exemplary description.

[0054] In some embodiments, the flushing channel 17 includes a plurality of independently arranged extension channels, and the plurality of extension channels are arranged at intervals along the circumferential direction of the fixture 14, and at least one inlet 171 is formed at one end of each extension channel, and at least one outlet 172 is formed at the other end. Preferably, only one inlet 171 is formed at one end of each extension channel, and only one outlet 172 is formed at the other end. In this embodiment, each extension channel can be extended from the upper surface 141 of the fixture 14 to the side 142 of the fixture 14, and the extension path is not limited. For example, a simpler way is that each extension channel is set to an L-shaped structure or other similar structures, as long as a symmetrical distribution can be formed.

[0055] In this embodiment, if Figure 2 and Figure 3 As shown, there is only one flushing channel 17, which specifically includes a longitudinal channel 1710 and a transverse channel 1720; the longitudinal channel 1710 is extended along the axial direction of the clamp 14; the top of the longitudinal channel 1710 is opened on the upper surface 141 of the clamp 14 to form an inlet 171; the axial center line of the longitudinal channel 1710 coincides with the axial center line of the clamp 14; the bottom end of the longitudinal channel 1710 is connected to the transverse channel 1720; the transverse channel 1720 intersects the longitudinal channel 1710 vertically; both ends of the transverse channel 1720 are opened on the side 142 of the clamp 14 to form an outlet 172, where each end of the transverse channel 1720 can form one or more outlets 172.

[0056] There may be one transverse channel 1720 , and two ends of one transverse channel 1720 may form a plurality of outlets 172 , respectively, and the spraying directions of these outlets 172 are different.

[0057] There can also be multiple transverse channels 1720, which cross and converge at the bottom of the longitudinal channel 1710; both ends of each transverse channel 1720 are opened on the side 142 of the clamp 14, forming an outlet 172 respectively; the two outlets 172 at both ends of each transverse channel 1720 are symmetrically arranged in the diameter direction of the clamp 14 and have the same spray direction. In this way, each transverse channel 1720 can provide a pair of outlets 172 with the same spray direction, the two outlets 172 are symmetrically arranged in the diameter direction of the clamp 14, and the outlets 172 on different transverse channels 1720 have different spray directions. This structure has little impact on the original structure of the clamp 15, is conducive to reducing costs, reducing processing difficulty, and at the same time achieving good dynamic and static balance.

[0058] Optionally, there are two or three transverse channels 1720, which can basically meet actual requirements. For example, two transverse channels 1720 are arranged in a cross-shaped manner.

[0059] Or, in Figure 3 In the embodiment, three transverse channels 1720 are arranged in a "M"-shaped cross-type arrangement, and the three transverse channels 1720 provide a total of 6 outlets 172, and the 6 outlets 172 form flushing in the upper, middle, and lower directions. Specifically, the two outlets 172 of one transverse channel 1720 clean the middle position of the cup-shaped member 12, the two outlets 172 of another transverse channel 1720 clean the lower position of the cup-shaped member 12, and the two outlets 172 of the remaining transverse channel 1720 clean the upper position of the cup-shaped member 12. Of course, the actual method is not limited to this.

[0060] Preferably, the transverse channel 1720 is located in the middle or upper middle position of the clamp 14, which is helpful in overcoming problems such as sealing and friction.

[0061] Furthermore, the flushing channel 17 may be a linear structure, a curved structure, a folded line structure, or a combination thereof. In this embodiment, the transverse channel 1720 and the longitudinal channel 1710 are both linear structures, which are convenient for processing and manufacturing.

[0062] The processing method of the flushing channel 17 is not limited. In some cases, the flushing channel 17 is formed by directly opening a hole inside the solid clamp 14 , and in other cases, the flushing channel 17 is formed by directly laying a pipe inside the hollow clamp 14 .

[0063] In summary, the present application provides a substrate clamping device 11, which is provided with a flushing channel 17 inside a fixture 14, an inlet 171 of the flushing channel 17 is opened on the upper surface 141 of the fixture 14, and an outlet 172 of the flushing channel 17 is opened on the side 142 of the fixture 14, and at least part of the outlets 172 have different spraying directions. When the cup-shaped part 12 needs to be cleaned, the fixture 14 can introduce a cleaning medium 16 through the inlet 171 of the upper surface 141, and then throw the liquid to the cup-shaped part 12 through the opening 172 of the side 142 for cleaning. In this process, the outlets 172 with different spraying directions can throw the liquid to different positions of the cup-shaped part 12. In this way, different positions of the cup-shaped part 12 can be cleaned, and the cleaning effect is good, thereby improving the environment atmosphere of the cavity and ensuring product quality. Moreover, the cleaning angle of this cleaning method is controllable, which can not only improve the cleaning efficiency, but also ensure the cleaning quality.

[0064] In particular, the outlet 172 of the flushing channel 17 of the present application preferably has three spraying directions, namely, upwardly inclined, downwardly inclined and horizontally. The three spraying directions can achieve the effect of all-round cleaning of the cup-shaped component 12, and the cleaning effect is better.

[0065] In addition, considering that there are usually shafts, bearings, motors and other components below the clamp 14, if a flushing pipe is connected from the middle below, it is difficult to overcome problems such as sealing and friction between the pipe and rotating parts. Therefore, the present application overcomes this problem by setting a flushing channel 17 inside the clamp 14, thereby ensuring the sealing and reliability of the entire substrate clamping device 11.

[0066] Here, since the wet processing equipment provided in the present application and the substrate clamping device provided in the present application belong to the same inventive concept, the wet processing equipment provided in the present application at least has all the beneficial effects of the substrate clamping device provided in the present application. For details, please refer to the above description of the beneficial effects of the substrate clamping device provided in the present application. Therefore, the beneficial effects of the wet processing equipment provided in the present application will not be described one by one here.

[0067] The specific embodiments of the present application are described above. It should be understood that the present application is not limited to the above specific implementations, and those skilled in the art can make various changes or modifications within the scope of the present application, which does not affect the substantive content of the present application. In the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other arbitrarily.

Claims

1. A substrate clamping device, characterized in that: include: A clamp and a driving component; the clamp is arranged above the driving component and connected to the driving component; the driving component is used to drive the clamp to rotate; a flushing channel is arranged inside the clamp; the flushing channel has at least one inlet and several outlets; the inlet is opened on the upper surface of the clamp; several of the outlets are opened on the side of the clamp, and the spray directions of at least some of the outlets are different.

2. The substrate clamping device according to claim 1, wherein: The plurality of outlets have three spraying directions, which are upwardly inclined, downwardly inclined and horizontal.

3. The substrate clamping device according to claim 2, wherein: The flushing channel is provided with the outlets at symmetrical positions along one or more diameter directions of the clamp, and the outlets at the symmetrical positions have the same spraying direction.

4. The substrate clamping device according to claim 1, wherein: The flushing channel is an axisymmetric structure.

5. The substrate clamping device according to claim 4, wherein: The flushing channel includes a longitudinal channel and a transverse channel; the longitudinal channel is extended along the axial direction of the clamp; the top of the longitudinal channel is opened on the upper surface of the clamp to form the inlet; the axial center line of the longitudinal channel coincides with the axial center line of the clamp; the bottom end of the longitudinal channel is connected to the transverse channel; the transverse channel intersects the longitudinal channel vertically; and the two ends of the transverse channel are opened on the side of the clamp to form the outlet.

6. The substrate clamping device according to claim 5, wherein: There are multiple transverse channels, and the multiple transverse channels cross and converge at the bottom end of the longitudinal channel; the two ends of each transverse channel are opened on the side of the clamp, forming an outlet respectively; the two outlets at the two ends of each transverse channel are symmetrically arranged in the diameter direction of the clamp, and the injection direction is the same.

7. The substrate clamping device according to claim 1, wherein: The aperture of the inlet is greater than or equal to the aperture of the nozzle on the cleaning arm.

8. A wet processing equipment, characterized in that It comprises a cleaning arm, a cup-shaped component and a substrate clamping device according to any one of claims 1 to 7; the cup-shaped component is arranged on the periphery of the substrate clamping device and is arranged around the substrate clamping device; the cleaning arm is used to be arranged above the substrate clamping device, and the nozzle of the cleaning arm is used to align with the inlet.

9. The wet processing equipment according to claim 8, characterized in that The output flow rate of the cleaning arm is 1 liter / min to 2 liters / min, and / or the rotation speed of the clamp is 300 rpm to 2000 rpm.

10. The wet processing equipment according to claim 8, characterized in that There are a plurality of cup-shaped components, which are concentrically arranged from the inside to the outside, wherein at least one of the substrate clamping device and the cup-shaped components can be lifted and lowered in a vertical direction to sequentially clean the plurality of cup-shaped components.

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