Electrostatic chuck power supply capable of realizing rapid inversion of output polarity and arbitrary waveform output

Abstract

The invention relates to an electrostatic chuck power supply capable of realizing rapid inversion of output polarity and arbitrary waveform output, and the power supply comprises a DC high-voltage module which is used for providing an output bus voltage; the HVCT power supply module is used for providing midpoint reference voltage required by the driving voltage of the electrostatic chuck; the main power supply output module is used for outputting voltage of any value required by the electrostatic chuck and realizing rapid inversion of output polarity; and the control module is used for receiving a control demand from the control panel or the remote control port and generating a control signal for controlling other modules according to the control demand. The electrostatic chuck power supply realized by the invention can output an electrostatic chuck driving voltage waveform with any waveform, and quickly inverts the output polarity in a short time, so that the requirement of a semiconductor advanced manufacturing process on the electrostatic chuck driving power supply is met.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor production equipment, in particular to an electrostatic chuck, in particular to an electrostatic chuck power supply capable of realizing rapid output polarity reversal and arbitrary waveform output. Background Art

[0002] In the field of semiconductor manufacturing, electrostatic chucks are widely used as a tool for supporting and handling wafers, compared with traditional mechanical grasping or vacuum adsorption handling equipment, due to their simple structure, reliable adsorption capacity, minimal workpiece damage and high precision. As a power supply device for the high voltage of the electrostatic chuck, the electrostatic chuck power supply is an indispensable part of the electrostatic chuck system. When the electrostatic chuck releases the wafer, due to the influence of residual charge or self-bias, simply cutting off the high voltage power supply of the electrostatic chuck cannot effectively release the wafer, but a reverse static voltage needs to be provided to complete the release. Therefore, the electrostatic chuck power supply is required to provide a bipolar DC voltage output for the electrostatic chuck. With the upgrading of semiconductor production technology, the electrostatic chuck needs to complete the adsorption and release of the wafer at a faster speed, and even requires a variety of voltage waveforms to complete complex tasks. Existing bipolar electrostatic chuck power supplies mostly use relays to switch the output polarity of the power supply, but due to the slow action of the relay armature, the switching speed of the output polarity of the electrostatic chuck power supply is greatly limited, and it cannot be achieved for complex voltage waveforms. Summary of the invention

[0003] In view of the shortcomings of the prior art, the present invention provides an electrostatic chuck power supply that can achieve rapid reversal of output polarity and arbitrary waveform output. It can output a high-voltage waveform of arbitrary waveform to drive the electrostatic chuck and quickly reverse the output polarity in a short time, thereby meeting the requirements of advanced semiconductor processes for electrostatic chuck driving voltage.

[0004] An electrostatic chuck power supply capable of realizing rapid output polarity reversal and arbitrary waveform output, comprising:

[0005] A DC high voltage module is connected to the main power output module and is used to provide a DC bus voltage to the main power output module;

[0006] An HVCT power supply module is connected to the main power output module and the control module, and is used to provide the main power output module with a midpoint reference voltage HVCT required for the electrostatic chuck driving voltage according to a control signal CTSET of the control module;

[0007] A main power output module, connected to the HVCT power module and the control module, is used to convert the input DC bus voltage into arbitrary value voltage outputs HVA and HVB relative to the midpoint reference voltage HVCT input to the HVCT power module according to the control signal output by the control module, and realize the rapid reversal of the output polarity according to the drive control signal DRV of the control module;

[0008] The control module is connected to the HVCT power module and the main power output module, and is used to receive control requirements from the control panel or the remote control port, and generate a control signal CTSET for controlling the midpoint reference voltage output by the HVCT power module and a drive control signal DRV for controlling the output of the main power output module according to the control requirements, and at the same time receive and process the voltage and current feedback data FB of the main power output module.

[0009] Preferably, the main power output module is composed of two groups of polarity switching switch tube units with the same structure, a voltage output switch tube unit, an output filter and a sampling circuit;

[0010] The polarity switching switch tube unit is composed of a basic unit and an optional multi-level extension unit, wherein the basic unit is connected to the DC bus voltage and the midpoint reference voltage HVCT, and is used to switch the polarity of the DC bus voltage relative to the midpoint reference voltage; the multi-level extension unit is composed of a plurality of groups of half-bridge circuits connected in series, wherein every two half-bridges except the starting half-bridge and the ending half-bridge share a group of isolated DC bus voltages, and the midpoint of one of the two half-bridge circuits is connected to the midpoint of one of the two half-bridges of the other group that share another group of isolated DC bus voltages; the DC bus voltage connected to the starting half-bridge circuit of the series half-bridge circuit group in the multi-level extension unit is the same as that of the basic unit, and the DC bus voltage connected to the ending half-bridge circuit is the same as that of the voltage output switch tube unit; if the multi-level extension unit is not required, the DC bus voltage connected to the basic unit is the same as that of the voltage output switch tube unit;

[0011] The voltage output switch tube unit is connected to the DC bus voltage and the output filter circuit, and is used to convert the DC bus voltage into a voltage square wave signal with a corresponding duty cycle;

[0012] The output filtering and sampling circuit is connected to the voltage output switch tube unit and the control module, and is used to filter the voltage square wave signal of the corresponding duty cycle into high-voltage outputs HVA and HVB relative to the midpoint reference voltage; and to sample the voltage and current output by the electrostatic chuck power supply, and transmit them back to the control module, so that the control module can dynamically adjust the drive control signals of the control polarity switching switch tube unit and the voltage output switch tube unit.

[0013] Preferably, the polarity switching switch tube unit turns on or off the switch tubes of the basic unit and the optional multi-level expansion unit according to the driving control signal of the control module, switches the polarity of each group of DC bus voltages relative to the midpoint reference voltage, thereby changing the polarity of the final output of the electrostatic chuck power supply.

[0014] Preferably, the voltage output switch tube unit is composed of a group of half-bridge circuits connecting the two poles of the DC bus voltage, the midpoint of the half-bridge circuit is connected to the filter circuit, and the upper and lower bridge arm switch tubes of the half-bridge circuit are opened or closed according to the driving control signal of the control module, and the DC bus voltage is converted into a high-voltage square wave signal with a corresponding duty cycle, which is output to the output filtering and sampling circuit.

[0015] Preferably, the output filter circuit is composed of a multi-stage low-pass filter circuit, which filters the high-voltage square wave signal with any duty cycle step by step into a DC voltage signal with low ripple voltage as the driving high-voltage output HVA or HVB of the electrostatic chuck power supply.

[0016] Preferably, the DC high voltage module is a DC voltage source having multiple groups of isolated outputs, and each group of DC voltage sources is correspondingly connected to a polarity switching switch tube unit and a voltage output switch tube unit.

[0017] Preferably, the HVCT power supply module is a group of bipolar voltage sources, which receives the midpoint reference voltage requirement through the external interface of the control module, generates the midpoint reference voltage under the control of the control module, and transmits it to the main power output module.

[0018] Preferably, the function of the HVCT power supply module is to change the midpoint reference voltage of the high voltage outputs HVA and HVB. This function can be achieved by the above-mentioned HVCT power supply module, or by the relative bias voltage output of two groups of voltage output switch tube units driven and controlled by the control module.

[0019] Preferably, the control module is composed of an MCU unit, a control panel unit, a remote control port unit, an ADC sampling unit and a control output unit;

[0020] The MCU unit is connected to other units, comprehensively processes information of each unit, and generates control signals for controlling the main power output module and the HVCT voltage source module;

[0021] The control panel unit is composed of buttons, a display screen and supporting circuits, and is used to receive inputs for processing local control requirements and to display the operating status of the electrostatic chuck power supply;

[0022] The remote control port unit is composed of an analog control port, a digital control port and supporting circuits, and is used to receive inputs for processing remote control requirements and remote outputs of monitoring data;

[0023] The ADC sampling unit is composed of an ADC and its supporting circuits, and is used to perform ADC sampling pre-processing and ADC sampling on the voltage and current signals fed back by the main power output module and the analog control signals received by the remote control port unit;

[0024] The control output unit is used to convert the control signal generated by the MCU unit into a driving control signal required by the main power output module and a control signal required by the HVCT power module;

[0025] The components of the control module, namely, the MCU unit, the control panel unit, the remote control port unit, the ADC sampling unit and the control output unit are preferred items. In actual applications, the existing components can be increased or decreased as needed.

[0026] Preferably, the control signals input into the analog control port include two electrostatic chuck power supply output voltage control signals, two electrostatic chuck power supply output current control signals, one HVCT voltage control signal, two polarity control signals, two enable control signals, two output voltage monitoring signals, two output current monitoring signals, one HVCT voltage monitoring signal, two polarity monitoring signals, and two enable monitoring signals.

[0027] Preferably, the digital control port can control the setting of all functions of the electrostatic chuck power supply and the reading of all monitoring signals, including the setting and monitoring of two-way output voltage, the setting and monitoring of two-way output current, the setting and monitoring of HVCT voltage, the polarity switching control and monitoring of two-way output, the enable control and monitoring of two-way output, and the setting of electrostatic chuck power supply operating parameters.

[0028] The present invention has the following beneficial effects and advantages:

[0029] 1. The present invention can achieve the reversal of output polarity in a short time, meeting the requirements of rapid adsorption and release of the electrostatic chuck;

[0030] 2. The present invention can achieve arbitrary waveform voltage output with ultra-short response time, meeting the power supply requirements of the electrostatic chuck in complex application scenarios.

[0031] 2. The present invention realizes ultra-high voltage fast-response arbitrary waveform voltage output through multi-level expansion, meeting the needs of advanced semiconductor processes for high-voltage switching and flexible changes of electrostatic chucks. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a system structure diagram of the present invention;

[0033] Figure 2 The main power output module of the present invention is shown in FIG. Figure 1 , including optional multi-level expansion unit;

[0034] Figure 3 The main power output module of the present invention is shown in FIG. Figure 2 , without optional multi-level extension unit;

[0035] Figure 4 This is a schematic diagram of a control module of the present invention;

[0036] Figure 5 This is a control flow chart of the control module of the present invention. DETAILED DESCRIPTION

[0037] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the invention, so the present invention is not limited by the specific implementation disclosed below.

[0038] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the invention herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0039] The system structure of the present invention is as follows Figure 1 As shown, an electrostatic chuck power supply capable of realizing rapid output polarity reversal and arbitrary waveform output comprises:

[0040] The DC high voltage module 100 is connected to the main power output module 200 and is used to provide a DC bus voltage to the main power output module 200. The DC bus voltage is a DC voltage source with multiple groups of isolated outputs.

[0041] The HVCT voltage source module 400 is connected to the main power output module 200 and is used to provide the main power output module 200 with a midpoint reference voltage required for the electrostatic chuck driving voltage;

[0042] The main power output module 200 is connected to the HVCT power module 400 and the control module 300, and is used to convert the input DC bus voltage into a corresponding high voltage output relative to the midpoint reference voltage input by the HVCT power module 400 according to the control signal output by the control module 300, and realize the rapid reversal of the output polarity according to the control signal of the control module 300;

[0043] The control module 300 is connected to the HVCT power module 400 and the main power output module 200, and is used to receive control requirements from a control panel or a remote control port, and generate a control signal for controlling the midpoint reference voltage output by the HVCT power module 400 and a drive control signal for controlling the output of the main power output module according to the control requirements.

[0044] The main power output module 200 is composed of two groups of polarity switching switch tube units 203 with the same structure, a voltage output switch tube unit 201, and an output filter and sampling circuit 204; Figure 2 This is a structural diagram of a single group.

[0045] The polarity switching switch tube unit 203 is composed of a polarity switching basic unit 202 and an optional multi-level expansion unit 205. Figure 2 As shown, the polarity switching basic unit 202 is connected to a group of isolated DC bus voltages and a midpoint reference voltage HVCT, and is used to switch the polarity of the isolated DC bus voltage relative to the midpoint reference voltage; the multi-level extension unit 205 is composed of a plurality of groups of half-bridge circuits connected in series, and every two half-bridges except the starting half-bridge and the ending half-bridge share a group of isolated DC bus voltages, and the midpoint of one of the two half-bridge circuits is connected to the midpoint of one of the two half-bridges of the other group that share another group of isolated DC bus voltages; the isolated DC bus voltage connected to the starting half-bridge circuit of the series half-bridge circuit group in the multi-level extension unit 205 is the same as that of the basic unit 202, and the isolated DC bus voltage connected to the ending half-bridge circuit is the same as that of the voltage output switch tube unit 201. If the multi-level extension unit 205 is not needed, the isolated DC bus voltage connected to the polarity switching basic unit 202 is the same as that of the voltage output switch tube unit 201, as shown in FIG. Figure 3 The polarity switching switch tube unit 203 turns on or off the switch tubes of the basic unit 202 and the optional multi-level expansion unit 205 according to the driving control signal of the control module 300, switches the polarity of each group of isolated DC bus voltages relative to the midpoint reference voltage, thereby changing the polarity of the final output of the electrostatic chuck power supply.

[0046] The polarity switching switch tube unit 203 is composed of a polarity switching basic unit 202 and an optional multi-level expansion unit 205. In specific applications, the polarity switching switch tube unit 203 can be composed of the polarity switching basic unit 202, or the polarity switching switch tube unit 203 can be composed of the polarity switching basic unit 202 and the multi-level expansion unit 205 according to the actual required output voltage level.

[0047] The voltage output switch tube unit 201 is connected to the DC bus voltage and the output filtering and sampling circuit 204, and is used to convert the DC bus voltage into a high-voltage square wave signal with an arbitrary duty cycle; the voltage output switch tube unit 201 is composed of a group of half-bridge circuits connecting the two poles of the DC bus voltage, and the midpoint of the half-bridge circuit is connected to the filtering circuit. The upper and lower bridge arm switches of the half-bridge circuit are opened or closed according to the driving control signal of the control module 300, and the DC bus voltage is converted into a high-voltage square wave signal with an arbitrary duty cycle, which is output to the output filtering and sampling circuit 204.

[0048] The output filtering and sampling circuit 204 is connected to the voltage output switch tube unit 201 and the control module 300. The output filtering circuit is composed of a multi-stage low-pass filtering circuit, which filters the high-voltage square wave signal of any duty cycle step by step into the corresponding high-voltage outputs HVA and HVB relative to the midpoint reference voltage as the driving voltage output of the electrostatic chuck power supply, and samples the voltage and current output by the electrostatic chuck power supply and transmits them back to the control module 300, so that the control module 300 can dynamically adjust the driving control signals of the control polarity switching switch tube unit 203 and the voltage output switch tube unit 201.

[0049] The DC high voltage module 100 is a DC voltage source VA1-VAn, VB1-VBn with multiple groups of isolated outputs, each group of DC voltage sources is correspondingly connected to the polarity switching switch tube unit 202 and the voltage output switch tube unit 201, serving as the DC bus voltage of the half-bridge circuit in each unit.

[0050] The HVCT voltage source module 400 is a set of bipolar voltage sources, which receives the midpoint reference voltage requirement through the external interface of the control module 300 or in a built-in manner, and generates the midpoint reference voltage under the control of the control module 300 and transmits it to the main power output module 200.

[0051] The function of the HVCT power supply module 400 is to change the midpoint reference voltage of the high voltage outputs HVA and HVB. This function can be achieved by the above-mentioned HVCT power supply module, or by the relative bias voltage output of two groups of voltage output switch tube units driven and controlled by the control module.

[0052] The control module 300 is composed of an MCU unit 301, a control panel unit 304, a remote control port unit 305, an ADC sampling unit 303 and a control output unit 302. The above-mentioned components are preferred options, and the existing components can be increased or decreased as needed in actual applications.

[0053] like Figure 4 As shown:

[0054] The MCU unit 301 is connected to other units, comprehensively processes information of each unit, and generates a control signal DRV for controlling the main power output module 200 and the HVCT voltage source module 400;

[0055] The control panel unit 304 is composed of buttons, a display screen and supporting circuits, and is used to receive inputs for processing local control requirements and display the operating status of the electrostatic chuck power supply;

[0056] The remote control port unit 305 is composed of an analog control port, a digital control port and supporting circuits, and is used to receive inputs for processing remote control requirements and remote outputs of monitoring data; the control signals input to the control port include two-way electrostatic chuck power supply output voltage control signals, two-way electrostatic chuck power supply output current control signals, one HVCT voltage control signal, two-way polarity control signals, two-way enable control signals, two-way output voltage monitoring signals, two-way output current monitoring signals, one HVCT voltage monitoring signal, two-way polarity monitoring signals, and two-way enable monitoring signals; the digital control port can control the settings of all functions of the electrostatic chuck power supply and the reading of all monitoring signals, including the setting and monitoring of two-way output voltage, the setting and monitoring of two-way output current, the setting and monitoring of HVCT voltage, the polarity switching control and monitoring of two-way output, the enable control and monitoring of two-way output, and the setting of electrostatic chuck power supply operating parameters.

[0057] The ADC sampling unit 303 is composed of an ADC and its supporting circuits, and is used to perform ADC sampling pre-processing and ADC sampling on the voltage signal and current signal fed back by the main power output module 200 and the analog control signal received by the remote control port network;

[0058] The control output unit 302 is used to convert the control signal generated by the MCU unit 301 into a driving control signal required by the main power output module and a control signal required by the HVCT power module, and output it to the main power output module 200 and the HVCT power module 400.

[0059] Typical data processing is shown below: Figure 5As shown, the control module 300 receives data from the remote data interface, remote analog interface, panel control interface and internal preset control storage data, and generates input data and outputs it to the error data processing unit after data processing through the input control signal processing unit; the HVA voltage feedback, HVA current feedback, HVB voltage feedback, HVB current feedback, and HVCT detection feedback signals are input to the feedback data signal processing unit, and after data processing, feedback data is generated and output to the error data processing unit; the error data processing unit performs PID processing and correction processing on the input data and feedback data, and generates error data and outputs it to the PWM and switch signal generating unit, and the PWM and switch signal generating unit generates a switch signal for controlling each switch tube in the polarity switching switch tube unit and a PWM signal of the voltage output switch tube unit according to the input error data and output state. Then, high-voltage outputs HVA and HVB corresponding to the expected input relative to the midpoint reference voltage are generated at the output end.

[0060] Through the above description, the present invention discloses an electrostatic chuck power supply that can realize rapid reversal of output polarity and arbitrary waveform output. It can output a high-voltage waveform of arbitrary waveform to drive the electrostatic chuck and quickly reverse the output polarity in a short time, meeting the requirements of advanced semiconductor processes for electrostatic chuck driving voltage.

[0061] It should be noted that the embodiments mentioned above illustrate rather than limit the present invention, and those skilled in the art will be able to design alternative embodiments without departing from the scope of the claims. Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art may make various changes and modifications without departing from the spirit and scope of the present invention, so the scope of protection of the present invention shall be subject to the scope defined by the claims.

Claims

1. An electrostatic chuck power supply capable of realizing rapid output polarity reversal and arbitrary waveform output, characterized in that: include: A DC high voltage module is connected to the main power output module and is used to provide a DC bus voltage to the main power output module; An HVCT power supply module is connected to the main power output module and the control module, and is used to provide the main power output module with a midpoint reference voltage HVCT required for the electrostatic chuck driving voltage according to a control signal CTSET of the control module; A main power output module, connected to the HVCT power module and the control module, is used to convert the input DC bus voltage into arbitrary value voltage outputs HVA and HVB relative to the midpoint reference voltage HVCT input to the HVCT power module according to the control signal output by the control module, and realize the rapid reversal of the output polarity according to the drive control signal DRV of the control module; The control module is connected to the HVCT power module and the main power output module, and is used to receive control requirements from the control panel or the remote control port, and generate a control signal CTSET for controlling the midpoint reference voltage output by the HVCT power module and a drive control signal DRV for controlling the output of the main power output module according to the control requirements, and at the same time receive and process the voltage and current feedback data FB of the main power output module.

2. The electrostatic chuck power supply capable of realizing rapid output polarity reversal and arbitrary waveform output according to claim 1, characterized in that: The main power output module is composed of two groups of polarity switching switch tube units with the same structure, a voltage output switch tube unit, an output filter and a sampling circuit; The polarity switching switch tube unit is composed of a basic unit and an optional multi-level extension unit, wherein the basic unit is connected to the DC bus voltage and the midpoint reference voltage HVCT, and is used to switch the polarity of the DC bus voltage relative to the midpoint reference voltage; the multi-level extension unit is composed of a plurality of groups of half-bridge circuits connected in series, wherein every two half-bridges except the starting half-bridge and the ending half-bridge share a group of isolated DC bus voltages, and the midpoint of one of the two half-bridge circuits is connected to the midpoint of one of the two half-bridges of the other group that share another group of isolated DC bus voltages; the DC bus voltage connected to the starting half-bridge circuit of the series half-bridge circuit group in the multi-level extension unit is the same as that of the basic unit, and the DC bus voltage connected to the ending half-bridge circuit is the same as that of the voltage output switch tube unit; if the multi-level extension unit is not required, the DC bus voltage connected to the basic unit is the same as that of the voltage output switch tube unit; The voltage output switch tube unit is connected to the DC bus voltage and the output filter circuit, and is used to convert the DC bus voltage into a voltage square wave signal with a corresponding duty cycle; The output filtering and sampling circuit is connected to the voltage output switch tube unit and the control module, and is used to filter the voltage square wave signal of the corresponding duty cycle into high-voltage outputs HVA and HVB relative to the midpoint reference voltage; and to sample the voltage and current output by the electrostatic chuck power supply, and transmit them back to the control module, so that the control module can dynamically adjust the drive control signals of the control polarity switching switch tube unit and the voltage output switch tube unit.

3. The electrostatic chuck power supply capable of realizing rapid output polarity reversal and arbitrary waveform output according to claim 2, characterized in that: The polarity switching switch tube unit opens or closes the switch tubes of the basic unit and the optional multi-level expansion unit according to the driving control signal of the control module, switches the polarity of each group of DC bus voltages relative to the midpoint reference voltage, thereby changing the polarity of the final output of the electrostatic chuck power supply.

4. The electrostatic chuck power supply capable of realizing rapid output polarity reversal and arbitrary waveform output according to claim 2, characterized in that: The voltage output switch tube unit is composed of a group of half-bridge circuits connecting the two poles of the DC bus voltage. The midpoint of the half-bridge circuit is connected to the filter circuit. The upper and lower bridge arm switch tubes of the half-bridge circuit are opened or closed according to the driving control signal of the control module, and the DC bus voltage is converted into a high-voltage square wave signal with a corresponding duty cycle, which is output to the output filtering and sampling circuit.

5. The electrostatic chuck power supply capable of realizing rapid output polarity reversal and arbitrary waveform output according to claim 2, characterized in that: The output filter circuit is composed of multiple low-pass filter circuits, which filter high-voltage square wave signals with any duty cycle step by step into DC voltage signals with low ripple voltage as the driving high-voltage output HVA or HVB of the electrostatic chuck power supply.

6. The electrostatic chuck power supply capable of realizing rapid output polarity reversal and arbitrary waveform output according to claim 1, characterized in that: The DC high voltage module is a DC voltage source with multiple groups of isolated outputs, and each group of DC voltage sources is correspondingly connected to a polarity switching switch tube unit and a voltage output switch tube unit.

7. The electrostatic chuck power supply capable of realizing rapid output polarity reversal and arbitrary waveform output according to claim 1, characterized in that: The HVCT power supply module is a group of bipolar voltage sources, which receives the midpoint reference voltage requirement through the external interface of the control module, generates the midpoint reference voltage under the control of the control module, and transmits it to the main power output module; the function of the HVCT power supply module is to change the midpoint reference voltage of the high-voltage outputs HVA and HVB. This function can be achieved by the above-mentioned HVCT power supply module, and can also be achieved by the relative bias voltage output of the two groups of voltage output switch tube units driven and controlled by the control module.

8. The electrostatic chuck power supply capable of realizing rapid output polarity reversal and arbitrary waveform output according to claim 1, characterized in that: The control module is composed of an MCU unit, a control panel unit, a remote control port unit, an ADC sampling unit and a control output unit; The MCU unit is connected to other units, comprehensively processes information of each unit, and generates control signals for controlling the main power output module and the HVCT voltage source module; The control panel unit is composed of buttons, a display screen and supporting circuits, and is used to receive inputs for processing local control requirements and to display the operating status of the electrostatic chuck power supply; The remote control port unit is composed of an analog control port, a digital control port and supporting circuits, and is used to receive inputs for processing remote control requirements and remote outputs of monitoring data; The ADC sampling unit is composed of an ADC and its supporting circuits, and is used to perform ADC sampling pre-processing and ADC sampling on the voltage and current signals fed back by the main power output module and the analog control signals received by the remote control port unit; The control output unit is used to convert the control signal generated by the MCU unit into a driving control signal required by the main power output module and a control signal required by the HVCT power module; The components of the control module, namely, the MCU unit, the control panel unit, the remote control port unit, the ADC sampling unit and the control output unit are preferred items. In actual applications, the existing components can be increased or decreased as needed.

9. The electrostatic chuck power supply capable of realizing rapid output polarity reversal and arbitrary waveform output according to claim 8, characterized in that: The control signals input to the analog control port include two electrostatic chuck power supply output voltage control signals, two electrostatic chuck power supply output current control signals, one HVCT voltage control signal, two polarity control signals, two enable control signals, two output voltage monitoring signals, two output current monitoring signals, one HVCT voltage monitoring signal, two polarity monitoring signals, and two enable monitoring signals.

10. The electrostatic chuck power supply capable of realizing rapid output polarity reversal and arbitrary waveform output according to claim 8, characterized in that: The digital control port can control the setting of all functions of the electrostatic chuck power supply and the reading of all monitoring signals, including the setting and monitoring of two-way output voltage, the setting and monitoring of two-way output current, the setting and monitoring of HVCT voltage, the polarity switching control and monitoring of two-way output, the enable control and monitoring of two-way output, and the setting of electrostatic chuck power supply operating parameters.

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