A vacuum chamber top heating structure

Abstract

The present invention discloses a vacuum chamber top heating structure, comprising an upper vacuum frame and a lower vacuum frame, wherein the lower vacuum frame is arranged below the upper vacuum frame; a heating component for heating the vacuum chamber is arranged at the top of the upper vacuum frame, a mounting groove is arranged on the top side wall of the lower vacuum frame, a sealing strip is installed in the mounting groove, and a lifting mechanism is arranged at the bottom of the sealing strip; when the extension plate moves downward, the tooth plate is pushed to move, and the movement of the tooth plate drives the second fixed plate to move upward through the gear, thereby causing the top frame to push the sealing strip to move upward, during this process, the elastic column is in a normal state, and when the sealing strip is fitted with the sealing frame, the elastic column will be in a contracted state, causing the extension plate to move toward the tooth plate, while the tooth plate no longer moves, so that when the sealing strip is worn, the elastic column can be used to make the top frame move upward to push the sealing strip to adapt to the interval between the sealing frame and the top frame, thereby extending the service life of the sealing strip.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum equipment, in particular to a vacuum cavity top heating structure. Background Art

[0002] In the manufacturing process of circuit boards, semiconductors, panels and other products, a vacuum lamination process is required between the substrate and the film material, mainly to ensure that the film material can fit evenly and tightly on the surface of the substrate to achieve the required performance requirements.

[0003] Chinese Patent Publication No.: CN219893528U discloses a vacuum film pressing structure with a heating structure on the top of a vacuum chamber that can realize four-point film pressing, including an upper movable plate and a lower base plate, the upper movable plate is provided with an upper vacuum frame, the lower base plate is provided with a lower vacuum frame, the upper vacuum frame and the lower vacuum frame are combined into a vacuum chamber, an upper heating assembly is provided in the upper vacuum frame, a lower heating assembly is provided in the lower vacuum frame, the upper movable plate is provided with four pressurizing cylinders, the output shaft of each pressurizing cylinder passes through the upper movable plate and is connected to the upper heating assembly, a driving cylinder is provided under the lower base plate, and the output shaft of each driving cylinder is connected to the upper movable plate.

[0004] In the prior art, in order to ensure the sealing performance of the vacuum chamber and ensure that the vacuuming and heating processes of the vacuum chamber proceed normally, a sealing strip is usually fixed between the upper vacuum frame and the lower vacuum frame. During the repeated opening and closing of the vacuum chamber, the sealing strip may be worn, resulting in a problem of reduced thickness. As a result, when the upper and lower vacuum frames cooperate, the sealing performance of the vacuum chamber is reduced, thereby affecting the vacuuming work.

[0005] Therefore, it is necessary to provide a vacuum chamber top heating structure to solve the above technical problems. Summary of the invention

[0006] The object of the present invention is to provide a vacuum chamber top heating structure to solve the problems raised in the above background technology.

[0007] To achieve the above-mentioned object, the present invention provides the following technical solutions: a vacuum chamber top heating structure, comprising an upper vacuum frame and a lower vacuum frame, wherein the lower vacuum frame is arranged below the upper vacuum frame; a heating component for heating the vacuum chamber is arranged at the top of the upper vacuum frame, a mounting groove is arranged at the top side wall of the lower vacuum frame, a sealing strip is installed in the mounting groove, a sealing frame is fixedly arranged on the bottom side wall of the upper vacuum frame, a lifting mechanism is arranged at the bottom of the sealing strip, a transmission component is arranged on the side of the lifting mechanism away from the support plate, and the transmission component is slidably arranged in the side wall of the lower vacuum frame;

[0008] When the upper vacuum frame moves to fit the lower vacuum frame, the upper vacuum frame drives the transmission assembly to move downward, and the transmission assembly moves downward to drive the lifting mechanism to move upward.

[0009] As a further solution of the present invention: the lifting mechanism includes a top frame; the top frame is elastically arranged at the bottom of the installation groove, the top of the top frame is slidably fitted with the top of the sealing strip, and the side of the top frame away from the support plate is fixedly connected to the transmission assembly.

[0010] As a further solution of the present invention: the transmission assembly includes a driving plate; the driving plate is slidably arranged on a side of the top frame away from the support plate, and the driving plate is slidably connected to the side wall of the lower vacuum frame, a gear is transmission-arranged on the side of the driving plate close to the top frame, a second fixed plate is transmission-connected on the side of the gear away from the driving plate, a tooth groove that fits the gear is arranged on the second fixed plate, and the bottom of the second fixed plate is fixedly connected to one side of the bottom end of the top frame.

[0011] As a further solution of the present invention: the driving plate includes a tooth plate and an extension plate elastically connected to the top of the tooth plate; the tooth plate and the extension plate are both slidably fitted with the side wall of the lower vacuum frame, and the tooth plate is meshed with the gear transmission.

[0012] As a further solution of the present invention: a first fixed plate is fixedly provided on the side of the top frame away from the second fixed plate, a mounting frame is fixedly provided on the top of the first fixed plate and the second fixed plate, a clamping plate is fixedly provided on the opposite ends of the two groups of mounting frames, the clamping plate is slidably fitted with the side wall of the sealing strip, and the mounting frame and the first fixed plate are both sealingly and slidably connected with the side wall of the lower vacuum frame.

[0013] As a further solution of the present invention: a matching frame that slides in contact with the installation frame is fixedly provided at the bottom of the upper vacuum frame, protrusions are symmetrically provided at the top of the installation frame along the center, a groove that matches the protrusion is provided at one end of the matching frame opposite to the protrusion, and two groups of protrusions are provided with sealing airbags, which are fixedly arranged in the top side wall of the installation frame.

[0014] As a further solution of the present invention: a first cavity is provided in the top frame, a piston plate is sealingly and slidingly provided in the first cavity, a square plate is fixed to the piston plate, the bottom of the square plate slides through the top frame and is fixedly connected to the bottom of the mounting groove, a first air channel connected to the sealing airbag is provided in the mounting frame and the second fixed plate, a second air channel connected to the first cavity is provided in the bottom end side wall of the top frame, and the first air channel and the second air channel are connected.

[0015] As a further solution of the present invention: blocking plates are symmetrically arranged on both sides of the square plate, the blocking plates are slidably connected to the piston plate, and the blocking plates are slidably arranged in the first cavity.

[0016] As a further solution of the present invention: a second cavity is arranged on the square plate, a limiting plate is slidably connected to the sealing plate, a horizontal plate is fixedly arranged on the middle part of one side of the sealing plate close to the square plate, a spring is arranged between the horizontal plate and the piston plate, and an elastic part is arranged between the limiting plate and the horizontal plate.

[0017] As a further solution of the present invention: a limiting opening is provided on the side wall of the piston plate relative to the limiting plate, which is slidably matched with the top of the limiting plate, and a notch is provided on the bottom of the inner wall of the first cavity, which is slidably matched with the bottom end of the limiting plate.

[0018] Compared with the prior art, the beneficial effect of the present invention is that when the upper vacuum frame moves toward the lower vacuum frame and pushes the extension plate to move into the lower vacuum frame, the extension plate pushes the tooth plate to move through the elastic column, and the tooth plate movement drives the second fixed plate to move upward through the gear, thereby causing the top frame to push the sealing strip to move upward. During this process, the elastic column is in a normal state. When the sealing strip is fitted with the sealing frame, the elastic column will shrink, causing the extension plate to move toward the tooth plate, while the tooth plate no longer moves. This achieves that when the sealing strip is worn, the elastic column can move the top frame upward to push the sealing strip to adapt to the gap between the sealing frame and the top frame, thereby extending the service life of the sealing strip. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the front three-dimensional structure of the present invention.

[0020] Figure 2 It is a structural schematic diagram of the lower vacuum frame in the present invention.

[0021] Figure 3 For the present invention Figure 2 Schematic diagram of the structure at A in the middle.

[0022] Figure 4 It is a structural schematic diagram of the cross-section of the middle of the upper vacuum frame and the lower vacuum frame in the present invention.

[0023] Figure 5 For the present invention Figure 4 Schematic diagram of the structure at B in the figure.

[0024] Figure 6 It is a schematic diagram of the structure of the sealing strip, the mounting frame and the top frame in the present invention.

[0025] Figure 7 It is a schematic diagram of the structure of the first fixing plate and the second fixing plate in the present invention.

[0026] Figure 8 It is a structural schematic diagram of a cross-section of the middle part of the top frame in the present invention.

[0027] Fig. 9 For the present invention Figure 8Schematic diagram of the structure at C in the middle.

[0028] Fig.10 For the present invention Figure 8 Schematic diagram of the structure at D in the figure.

[0029] Fig.11 It is a schematic diagram of the structure of the transverse plate and the blocking plate in the present invention.

[0030] Fig.12 It is a schematic diagram of the structure of the mounting frame and the sealing airbag in the present invention.

[0031] In the figure: 1. upper base plate; 2. lower base plate; 3. upper vacuum frame; 4. lower vacuum frame; 5. sealing strip; 6. mounting frame; 7. drive plate; 8. mounting groove; 9. heating assembly; 10. support plate; 11. sealing frame; 12. matching frame; 13. first fixed plate; 14. tooth groove; 15. gear; 16. second fixed plate; 17. top frame; 18. first cavity; 19. piston plate; 20. square plate; 21. sealing plate; 22. second cavity; 23. limit plate; 24. limit opening; 25. horizontal plate; 26. sealing airbag. DETAILED DESCRIPTION

[0032] See also Figure 1-Figure 12 In an embodiment of the present invention, a vacuum chamber top heating structure includes an upper vacuum frame 3 and a lower vacuum frame 4, an upper bottom plate 1 is installed on the top of the upper vacuum frame 3, and the lower vacuum frame 4 is arranged below the upper vacuum frame 3 away from the upper bottom plate 1, that is, there is a gap between the two, when the upper vacuum frame 3 moves toward the lower vacuum frame 4 until the two are in contact, a vacuum chamber is formed between the two, and a lower bottom plate 2 is installed at one end of the lower vacuum frame 4 away from the upper vacuum frame 3, a heating component 9 for heating the vacuum chamber is arranged at the top of the upper vacuum frame 3, and a support plate 10 for placing a substrate is arranged at the bottom of the lower vacuum frame 4.

[0033] Preferably, a plurality of driving cylinders are installed at the four bottom corners of the lower base plate 2, and the output shafts of the driving cylinders slide through the lower base plate 2 and are fixedly connected to the upper base plate 1, and a vacuum pumping device is installed on the top of the upper base plate 1. When used in this way, the substrate and the film material are placed on the support plate 10 in the lower vacuum frame 4, and then the driving cylinder is started to drive the upper base plate 1 to move toward the lower base plate 2 until the upper vacuum frame 3 and the lower vacuum frame 4 are fitted together, and then the vacuum pumping device is started to vacuum the vacuum cavity formed between the upper vacuum frame 3 and the lower vacuum frame 4. When the vacuum cavity between the upper vacuum frame 3 and the lower vacuum frame 4 is completely vacuumed, the heating component 9 is started to heat the vacuum cavity, thereby facilitating the subsequent pressing operation of the film material and the substrate.

[0034] The heating assembly 9 includes a heating element for heating the vacuum cavity and a temperature sensor for monitoring the actual temperature of the heating area, and also includes a control system for controlling the heating power of the heating element to adjust the heating temperature; when in use, when the upper vacuum frame 3 and the lower vacuum frame 4 cooperate and complete the vacuuming, the heating element is started by the control system to heat the vacuum cavity, and then the temperature of the vacuum cavity is monitored by the temperature sensor, and the real-time temperature is fed back to the control system. When the temperature reaches the predetermined temperature, the control system controls the heating element to no longer increase the power for heating. The heating assembly 9 belongs to a common structure for heating the vacuum cavity in the prior art. Other related structures and specific working principles are not described in detail here.

[0035] See also Figure 2-Figure 5 Preferably, a mounting groove 8 is provided on the top side wall of the lower vacuum frame 4, and a sealing strip 5 is installed in the mounting groove 8. A sealing frame 11 is fixedly provided on the bottom side wall of the upper vacuum frame 3. When the upper vacuum frame 3 and the lower vacuum frame 4 are in contact with each other, the sealing frame 11 and the sealing strip 5 are in close contact with each other, thereby improving the sealing performance of the vacuum chamber and preventing external gas from entering the vacuum chamber, which causes the vacuum pumping work to be unable to be carried out effectively. A lifting mechanism is provided at the bottom of the sealing strip 5, and a transmission assembly is provided on the side of the lifting mechanism away from the support plate 10. The transmission assembly is slidably arranged in the side wall of the lower vacuum frame 4. When the upper vacuum frame 3 moves to fit the lower vacuum frame 4, the upper vacuum frame 3 drives the transmission assembly to move downward. The transmission assembly moves downward to drive the lifting mechanism to move upward. In this way, when the upper vacuum frame 3 moves toward the lower vacuum frame 4 and the two are fitted together, the sealing strip 5 moves toward the sealing frame 11 through the cooperation of the transmission assembly and the lifting mechanism. When the sealing strip 5 is fitted with the sealing frame 11, the lifting mechanism will also subject the sealing strip 5 to an upward thrust, so that the sealing strip 5, the sealing frame 11 and the lifting mechanism are tightly fitted. Through the action of the lifting mechanism, even if the sealing strip 5 is worn and the thickness is reduced during the long-term opening and closing process of the upper vacuum frame 3 and the lower vacuum frame 4, the sealing strip 5 will always be tightly fitted with the sealing frame 11 under the action of the lifting mechanism, thereby extending the service life of the sealing strip 5.

[0036] See also Figure 5-Figure 8Preferably, the lifting mechanism includes a top frame 17; the top frame 17 is elastically arranged at the bottom of the mounting groove 8 by a spring, the top of the top frame 17 is slidably fitted with the top of the sealing strip 5, and the side of the top frame 17 away from the support plate 10 is fixedly connected to the transmission component. In a natural state, the mounting groove 8 is at the bottom position in the mounting groove 8 under the action of the spring, so that the sealing strip 5 shrinks in the middle position of the mounting groove 8, thereby protecting the sealing strip 5. When the upper vacuum frame 3 and the lower vacuum frame 4 are fitted together, the upper vacuum frame 3 pushes the transmission component to drive the top frame 17 to move upward. Then, the sealing strip 5 is pushed to move toward the sealing frame 11. Since the sealing strip 5 itself can be deformed, after the sealing strip 5 cooperates with the sealing frame 11, the sealing strip 5 will be deformed under the action of the top frame 17, so that the sealing frame 11 and the sealing strip 5, the sealing strip 5 and the top frame 17 can fit closely to each other. When the thickness of the sealing strip 5 is reduced due to wear during use, the sealing strip 5 gradually stops deforming, thereby avoiding the situation where the sealing strip 5 cannot fit closely with the sealing frame 11 due to wear when it is in a fixed position, thereby reducing the sealing performance of the cavity.

[0037] Preferably, the opposite ends of the sealing frame 11 and the top frame 17 are both provided with arc-shaped structures, and the upper and lower ends of the sealing strip 5 are both arc-shaped groove structures corresponding to the sealing frame 11 and the top frame 17. In this way, when in use, the sealing frame 11 and the top frame 17 are tightly fitted with the arc-shaped groove structure on the sealing strip 5 through the top arc-shaped structure, thereby improving the sealing of the vacuum chamber.

[0038] See also Figure 3-Figure 5 , Figure 7 Preferably, the transmission assembly includes a driving plate 7; the driving plate 7 is slidably arranged on the side of the top frame 17 away from the support plate 10, and the driving plate 7 is slidably connected to the side wall of the lower vacuum frame 4, a gear 15 is transmission-arranged on the side of the driving plate 7 close to the top frame 17, and the gear 15 is transmission-connected to the second fixed plate 16 on the side away from the driving plate 7, and a tooth groove 14 is arranged on the second fixed plate 16 to fit with the gear 15, and the bottom of the second fixed plate 16 is fixedly connected to one side of the bottom end of the top frame 17, the gear 15 is rotatably arranged in the side wall of the lower vacuum frame 4, and the second fixed plate 16 is slidably arranged in the mounting groove 8 and slidably fits with the side wall of the lower vacuum frame 4.

[0039] When in use, when the upper vacuum frame 3 and the lower vacuum frame 4 are separated, the driving plate 7 protrudes from the top side wall of the lower vacuum frame 4; when the upper vacuum frame 3 moves toward the lower vacuum frame 4 to fit together, during this process, the upper vacuum frame 3 will push the driving plate 7 to move into the lower vacuum frame 4, and the movement of the driving plate 7 will cause the second fixed plate 16 to move upward through the cooperation of the gear 15 and the tooth groove 14, and the upward movement of the second fixed plate 16 drives the top frame 17 to move upward, thereby causing the sealing strip 5 to move upward and cooperate with the sealing frame 11.

[0040] Furthermore, in order to ensure that the sealing strip 5 can be tightly fitted with the sealing frame 11 and the top frame 17 after the thickness is reduced due to wear, preferably, the driving plate 7 includes a tooth plate and an extension plate elastically connected to the top of the tooth plate through an elastic column. The tooth plate and the extension plate are both slidably fitted with the side wall of the lower vacuum frame 4, and the tooth plate is in transmission meshing with the gear 15. It should be noted that the extension plate is not shown in the figure. In a natural state, the extension plate protrudes from the top side wall of the lower vacuum frame 4, and the elastic column between the extension plate and the tooth plate protrudes from the natural state, so that there is a gap between the extension plate and the tooth plate. When the upper vacuum frame 3 moves toward the lower vacuum frame 4, the extension plate is pushed. When the plate moves downward into the vacuum frame 4, the extension plate pushes the tooth plate to move through the elastic column, and the movement of the tooth plate drives the second fixed plate 16 to move upward through the gear 15, thereby causing the top frame 17 to push the sealing strip 5 to move upward. During this process, the elastic column is in a normal state. When the sealing strip 5 is fitted with the sealing frame 11, the elastic column will shrink, causing the extension plate to move toward the tooth plate, and the tooth plate will no longer move. When the sealing strip 5 is worn, the elastic column can move the top frame 17 upward to push the sealing strip 5 to adapt to the gap between the sealing frame 11 and the top frame 17, thereby extending the service life of the sealing strip 5.

[0041] See also Figure 5 , Figure 7 , Fig.12 Preferably, a first fixing plate 13 is fixedly provided on one side of the top frame 17 away from the second fixing plate 16. The first fixing plate 13 and the second fixing plate 16 have the same structural dimensions and are both arranged in an "L" structure. The two are symmetrically arranged. A mounting frame 6 is fixedly provided on the top of the first fixing plate 13 and the second fixing plate 16. A clamping plate is fixedly provided on the opposite ends of the two groups of mounting frames 6. The clamping plate is slidably fitted with the side wall of the sealing strip 5. The mounting frame 6 and the first fixing plate 13 are both sealingly and slidably connected with the side wall of the lower vacuum frame 4.

[0042] A semicircular bar is provided at one end opposite to the two groups of clamping plates, and a semicircular groove which is slidably matched with the semicircular bar is provided on the side wall of the sealing strip 5. In this way, when used, the sealing strip 5 can be installed between the two groups of clamping plates through the cooperation of the semicircular groove and the semicircular bar, and the sealing strip 5 is limited by the setting of the clamping plate, thereby avoiding the problem of the sealing strip 5 being offset in the installation groove 8. The bottom end of the clamping plate protrudes from the bottom of the installation frame 6, thereby increasing the contact area between the clamping plate and the sealing strip 5, so that the clamping plate can better support the sealing strip 5. When the top frame 17 pushes the sealing strip 5 to move upward and cooperate with the sealing frame 11, the clamping plate sealing strip 5 can also effectively prevent the deformation of the sealing strip 5, thereby increasing its service life and reducing wear.

[0043] When the sealing strip 5 needs to be replaced, the upper vacuum frame 3 and the lower vacuum frame 4 are separated, and then the driving plate 7 is pressed to move into the lower vacuum frame 4, so that the top frame 17 moves upward. At this time, since the upper vacuum frame 3 does not move downward, when the driving plate 7 moves to the point where its top is flush with the top of the lower vacuum frame 4, the driving plate 7 is continued to be pressed to move, so that the top frame 17 moves out of the mounting groove 8, and then the sealing strip 5 can be replaced. Compared with the traditional sealing strip 5 that is fixedly arranged in the mounting groove 8, there is a problem of inconvenience in replacement.

[0044] See also Figure 5 Preferably, a matching frame 12 that is slidably fitted with the mounting frame 6 is fixedly provided at the bottom of the upper vacuum frame 3, and a protrusion is symmetrically provided at the top of the mounting frame 6 along the center, and a groove that is adapted to the protrusion is provided at one end of the matching frame 12 opposite to the protrusion, and the two groups of protrusions are provided with sealing air bags 26, and the sealing air bags 26 are fixedly provided in the top side walls of the mounting frame 6. In this way, when in use, when the upper vacuum frame 3 and the lower vacuum frame 4 are fitted together, the matching frame 12 and the mounting frame 6 cooperate, and the sealing frame 11 and the sealing strip 5 cooperate to form a seal for the vacuum cavity, and when the matching frame 12 and the mounting frame 6 cooperate, the sealing air bag 26 will expand, thereby sealing the matching frame 12 and the mounting frame 6, thereby forming a double seal between the upper vacuum frame 3 and the lower vacuum frame 4 through the sealing air bag 26 between the matching frame 12 and the mounting frame 6, and the sealing strip 5 between the sealing frame 11 and the top frame 17, thereby improving the sealing performance of the vacuum cavity.

[0045] See also Figure 5 , Figure 7-Figure 12 Preferably, a first cavity 18 is provided in the top frame 17, a piston plate 19 is provided in a sealing and sliding manner in the first cavity 18, a square plate 20 is provided to fix the piston plate 19, the bottom of the square plate 20 slides through the top frame 17 and is fixedly connected to the bottom of the mounting groove 8, a first air channel communicating with the sealing airbag 26 is provided in the mounting frame 6 and the second fixed plate 16, a second air channel communicating with the first cavity 18 is provided in the side wall at the bottom end of the top frame 17, the first air channel and the second air channel are connected, so that when in use, in the initial state, the top frame 17 is retracted to a position near the bottom in the mounting groove 8, this When the piston plate 19 is at the top position in the first cavity 18, when the top frame 17 moves upward, since the square plate 20 is in a fixed position, when the top frame 17 moves upward, it is relatively equivalent to the piston plate 19 moving downward in the first cavity 18, so that the gas in the first cavity 18 enters the sealing airbag 26 through the airway, so that the sealing airbag 26 expands, so that when the matching frame 12 and the mounting frame 6 are fitted, the expanded sealing airbag 26 can fill the space between the matching frame 12 and the mounting frame 6, thereby improving the sealing between the matching frame 12 and the mounting frame 6.

[0046] Further, preferably, blocking plates 21 are symmetrically arranged on both sides of the square plate 20, and the blocking plates 21 are slidably connected to the piston plate 19. The blocking plates 21 are slidably arranged in the first cavity 18 and are sealed and slidably connected to the first cavity 18. A second cavity 22 is arranged on the square plate 20, and a limiting plate 23 is slidably connected in the blocking plate 21. A cross plate 25 is fixedly arranged in the middle of one side of the blocking plate 21 close to the square plate 20, a spring is arranged between the cross plate 25 and the piston plate 19, and an elastic member is arranged between the limiting plate 23 and the cross plate 25, and the elastic member can preferably be a spring or a spring column, and a limiting opening 24 that slidably cooperates with the top end of the limiting plate 23 is arranged on the side wall of the piston plate 19 relative to the limiting plate 23, and a notch that slidably cooperates with the bottom end of the limiting plate 23 is arranged at the bottom of the inner wall of the first cavity 18.

[0047] The blocking plate 21 is arranged in the first cavity 18 on a side close to the second airway, and the width of the blocking plate 21 is greater than the width of the second airway, so that when the blocking plate 21 moves from top to bottom, the second airway can be blocked, and the notch is arranged below the connection between the second airway and the first cavity 18. The blocking plate 21 is elastically connected to the piston plate 19 through a spring, and the limit plate 23 is connected to the cross plate 25 through an elastic member, so that in a natural state, the top of the blocking plate 21 is in contact with the top of the piston plate 19. The top of the limit plate 23 is slidably matched with the limit opening 24, and protruding wedge blocks are provided at both ends of the limit plate 23 on the side close to the piston plate 19. The wedge block at the top of the limit plate 23 is provided with an inclined surface facing the square plate 20, and the wedge block at the bottom end of the limit plate 23 is provided with an inclined surface facing the notch. The square plate 20 is close to the top of the piston plate 19 and is provided with a first opening of the second cavity 22, which is connected to the first cavity 18. The second cavity 22 is provided with a second opening in the middle and lower section.

[0048] When in use, when the top frame 17 moves upward, the piston plate 19 moves downward relative to the first cavity 18, causing the blocking plate 21 to move downward, thereby causing the lower end of the limit plate 23 to slide and cooperate with the notch, and then the limit plate 23 is retracted in the blocking plate 21 through the sliding cooperation of the wedge block at the bottom end of the limit plate 23 and the notch, thereby causing the wedge block at the top end of the limit plate 23 to separate from the limit opening 24, and the blocking plate 21 is in a relatively static state under the action of the spring, and the second air passage is blocked by the blocking plate 21, so that the gas in the sealing airbag 26 remains stable, and at this time, the second opening has just passed the position of the bottom of the first cavity 18 and is at the position corresponding to the side wall of the top frame 17, thereby avoiding the second opening and moving over the bottom of the top frame 17 after the blocking plate 21 fails to block the second air passage, resulting in the sealing airbag 26 being unable to expand; when the sealing strip 5 needs to be replaced, the driving plate 7 is pressed to allow the top frame 17 to continue to move upward The top of the piston plate 19 is moved upward to protrude out of the mounting groove 8. During this process, the second opening will move the bottom of the top frame 17, so that the first cavity 18 is connected to the mounting groove 8, which will not affect the upward movement of the top frame 17. The blocking plate 21 is in a relatively static state in the first cavity 18, and the wedge block at the top of the blocking plate 21 moves to the top of the piston plate 19. When the sealing strip 5 is replaced, the driving plate 7 moves and resets, the top frame 17 moves and resets, and the piston plate 19 moves and resets relatively. During this process, the blocking plate 21 is relatively static. When the limiting opening 24 moves to the wedge block position at the top of the limiting plate 23, the top of the blocking plate 21 is flush with the top of the piston plate 19, and the second opening is at the bottom of the first cavity 18 corresponding to the position of the side wall of the top frame 17. Then the piston plate 19 moves to drive the blocking plate 21 to move and reset, thereby causing the limiting plate 23 to move and reset, and then the gas in the sealing airbag 26 enters the first cavity 18, allowing the sealing airbag 26 to reset for the next use.

Claims

1. A vacuum chamber top heating structure, comprising an upper vacuum frame and a lower vacuum frame, wherein the lower vacuum frame is arranged below the upper vacuum frame; characterized in that: A heating assembly for heating the vacuum chamber is arranged at the top of the upper vacuum frame, a mounting groove is arranged on the top side wall of the lower vacuum frame, a sealing strip is installed in the mounting groove, a sealing frame is fixedly arranged on the bottom side wall of the upper vacuum frame, a lifting mechanism is arranged at the bottom of the sealing strip, a transmission assembly is arranged on the side of the lifting mechanism away from the support plate, and the transmission assembly is slidably arranged in the side wall of the lower vacuum frame; When the upper vacuum frame moves to fit the lower vacuum frame, the upper vacuum frame drives the transmission assembly to move downward, and the transmission assembly moves downward to drive the lifting mechanism to move upward, so that the sealing strip moves toward the sealing frame; when the sealing strip fits the sealing frame, the lifting mechanism also pushes the sealing strip upward, so that the sealing strip fits the sealing frame and the lifting mechanism; The lifting mechanism comprises a top frame; the top frame is elastically arranged at the bottom of the installation groove, the top of the top frame is slidably fitted with the top of the sealing strip, and the side of the top frame away from the support plate is fixedly connected to the transmission assembly; The transmission assembly includes a driving plate; the driving plate is slidably arranged on a side of the top frame away from the support plate, and the driving plate is slidably connected to the side wall of the lower vacuum frame, a gear is transmission-arranged on a side of the driving plate close to the top frame, a second fixed plate is transmission-connected on a side of the gear away from the driving plate, a tooth groove is arranged on the second fixed plate to fit with the gear, and the bottom of the second fixed plate is fixedly connected to one side of the bottom end of the top frame.

2. A vacuum chamber top heating structure according to claim 1, characterized in that: The driving plate comprises a tooth plate and an extension plate elastically connected to the top of the tooth plate; the tooth plate and the extension plate are both slidably fitted with the side wall of the lower vacuum frame, and the tooth plate is meshed with the gear transmission.

3. The vacuum chamber top heating structure according to claim 1, characterized in that: A first fixing plate is fixedly provided on a side of the top frame away from the second fixing plate, and mounting frames are fixedly provided on the tops of the first fixing plate and the second fixing plate, and clamping plates are fixedly provided on opposite ends of the two groups of mounting frames, and the clamping plates are slidingly fitted with the side walls of the sealing strip, and the mounting frame and the first fixing plate are sealingly and slidingly connected with the side walls of the lower vacuum frame.

4. A vacuum chamber top heating structure according to claim 3, characterized in that: A matching frame which is slidably fitted with the installation frame is fixedly provided at the bottom of the upper vacuum frame, protrusions are symmetrically provided at the top of the installation frame along the center, a groove which is adapted to the protrusion is provided at one end of the matching frame opposite to the protrusion, and two groups of protrusions are provided with sealing airbags which are fixedly provided in the top side wall of the installation frame.

5. The vacuum chamber top heating structure according to claim 3, characterized in that: A first cavity is provided in the top frame, a piston plate is sealingly and slidably provided in the first cavity, a square plate is fixed to the piston plate, the bottom of the square plate slides through the top frame and is fixedly connected to the bottom of the mounting groove, a first air channel connected to the sealing airbag is provided in the mounting frame and the second fixed plate, a second air channel connected to the first cavity is provided in the bottom end side wall of the top frame, and the first air channel and the second air channel are connected.

6. The vacuum chamber top heating structure according to claim 5, characterized in that: The square plate is symmetrically provided with blocking plates on both sides, the blocking plates are slidably connected to the piston plate, and the blocking plates are slidably provided in the first cavity.

7. A vacuum chamber top heating structure according to claim 6, characterized in that: A second cavity is provided on the square plate, a limiting plate is slidably connected inside the blocking plate, a transverse plate is fixedly provided on the middle part of one side of the blocking plate close to the square plate, a spring is provided between the transverse plate and the piston plate, and an elastic member is provided between the limiting plate and the transverse plate.

8. The vacuum chamber top heating structure according to claim 7, characterized in that: A limiting opening which is slidably matched with the top of the limiting plate is arranged on the side wall of the piston plate relative to the limiting plate, and a notch which is slidably matched with the bottom of the limiting plate is arranged at the bottom of the inner wall of the first cavity.

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