Inert gas recovery device

Abstract

The embodiment of the invention provides an inert gas recovery device. The inert gas recovery device comprises a collection unit, a removal unit, a compression unit, at least one purification unit and a rectification unit which are sequentially communicated in the gas conveying direction, one end of the collecting pipeline is communicated with the inlet of the collecting unit, and the other end of the collecting pipeline is communicated with the pressure relief opening of the purifying unit; and the at least one collecting pipeline is used for guiding gas flowing out of the pressure relief opening to the collecting unit. The device has the advantages that when the purification unit is in a pressure relief state, high-pressure gas flowing out of the pressure relief opening of the purification unit is not directly discharged into the atmosphere any more, but is guided to the collection unit through the collection pipeline, and argon is recycled again. Therefore, resources brought by the fact that high-pressure gas is directly discharged into the atmosphere are avoided, the argon recovery rate is increased, and the argon recovery economical efficiency is improved. And when a plurality of purification units and collection pipelines are arranged, the argon recovery effect can be further improved.

Description

Technical Field

[0001] The present disclosure relates to the field of gas recovery, and in particular to an inert gas recovery device. Background Art

[0002] Argon is an inert gas that does not react chemically with any substance. Therefore, it is widely used as a protective gas, carrier gas, diluent gas, etc. in many industries of the national economy, such as electronics, chemical industry, physical and chemical analysis, light source, welding, single crystal silicon preparation, etc., especially in metal smelting, argon as an inert protective gas can effectively prevent the metal from being oxidized at high temperature. During the evacuation process, the vacuum pump continuously pumps argon from the furnace to the outside. In the prior art, the extracted argon is collected, mechanically impurities are removed, compressed, decarbonized and deoxygenated, and distilled to form high-purity argon. However, the decarbonization and deoxygenation adsorption towers in the existing purification process directly discharge the high-pressure gas containing argon in the tower into the atmosphere when the pressure is released, resulting in the loss of argon gas in the adsorption tower and pipeline. In the increasingly fierce competitive environment, the argon gas extraction rate in the argon recovery project is seriously affected. Summary of the invention

[0003] In view of the above-mentioned shortcomings of the prior art, the purpose of the present disclosure is to provide an inert gas recovery device to solve the problems in the related art.

[0004] The first aspect of the present disclosure provides an inert gas recovery device, comprising: A collecting unit, a degassing unit, a compression unit, at least one purification unit and a distillation unit connected in sequence along the gas conveying direction; at least one collecting pipeline, one end of which is connected to the inlet of the collecting unit, and the other end of which is connected to the pressure relief port of the at least one purification unit; Wherein, the at least one collecting pipeline guides the gas flowing out of the pressure relief port to the collecting unit; The collecting pipeline is connected with an exhaust pipe; the inert gas recovery device also includes a control unit, which includes a controller, a first valve body, a second valve body, an analyzer, a pressure measuring instrument and a flow measuring instrument; the first valve body is arranged in the exhaust pipe, and the second valve body is arranged in the collecting pipeline and is located after the exhaust pipe; the analyzer, the pressure measuring instrument and the flow measuring instrument are arranged in sequence in the collecting pipeline and are located before the exhaust pipe; when the control unit obtains a detection result that the carbon dioxide concentration in the purification unit reaches a predetermined value based on the analyzer, the pressure measuring instrument and the flow measuring instrument, the first valve body is controlled to be turned on and the second valve body to be closed.

[0005] In an embodiment of the first aspect, a vacuum pump is provided on the collection pipeline and is started when the pressure relief port is connected.

[0006] In an embodiment of the first aspect, the purification unit is implemented as two, namely a first purification unit and a second purification unit connected in sequence; the first purification unit includes a first pressure relief port, and the second purification unit includes a second pressure relief port; the collecting pipeline is implemented as two, namely a first collecting pipeline and a second collecting pipeline; the first collecting pipeline is used to connect the first pressure relief port and the inlet of the collecting unit; the second collecting pipeline is used to connect the second pressure relief port and the inlet of the collecting unit.

[0007] In an embodiment of the first aspect, the purification unit is implemented in plurality, each of which is used to purify different impurity gases; the collecting pipeline is implemented in plurality; each purification unit includes a pressure relief port; the pressure relief port of each purification unit is connected to the inlet of the collecting unit through a collecting pipeline.

[0008] In an embodiment of the first aspect, a control unit is also included, which includes a controller, a first valve body and a first flow meter; the first valve body and the first flow meter are respectively communicatively connected to the controller; the first valve body is arranged at a first filling port in the second purification unit for hydrogen injection; the first flow meter is arranged between the first purification unit and the second purification unit for detecting the amount of oxygen flowing into the second purification unit; the controller adjusts the opening of the first valve body based on the detection result of the first flow meter to make the hydrogen entering the second purification unit slightly excessive.

[0009] In an embodiment of the first aspect, a control unit is also included, which includes a controller, a first valve body and a first flow meter; the first valve body and the first flow meter are respectively communicatively connected to the controller; the first valve body is arranged at a first filling port for hydrogen injection in the second purification unit; the first flow meter is arranged between the second purification unit and the distillation unit for detecting the amount of hydrogen flowing into the distillation unit; the controller adjusts the opening of the first valve body based on the detection result of the first flow meter to make the hydrogen entering the second purification unit slightly excessive.

[0010] In an embodiment of the first aspect, a control unit is also included, which includes a controller, a first valve body, a first flowmeter and a second flowmeter; the first valve body, the first flowmeter and the second flowmeter are respectively communicatively connected to the controller; the first valve body is arranged at a first filling port in the second purification unit for hydrogen injection; the first flowmeter is arranged between the first purification unit and the second purification unit for detecting the amount of oxygen flowing into the second purification unit; the second flowmeter is arranged between the second purification unit and the distillation unit for detecting the amount of hydrogen flowing into the distillation unit; the controller coordinates and adjusts the opening of the first valve body based on the detection results of the first flowmeter and the second flowmeter to make the hydrogen entering the second purification unit slightly excessive.

[0011] In an embodiment of the first aspect, the first purification unit includes a first purification component, the first purification component includes a first adsorption tower and a second adsorption tower, and a first pressure relief valve and a second pressure relief valve connected in series between an inlet of the first adsorption tower and an inlet of the second adsorption tower, and the first pressure relief port is connected between the first pressure relief valve and the second pressure relief valve.

[0012] In an embodiment of the first aspect, the second purification unit includes a second purification component, the second purification component includes a third adsorption tower and a fourth adsorption tower, and a third pressure relief valve and a fourth pressure relief valve connected in series between an inlet of the third adsorption tower and an inlet of the fourth adsorption tower, and the second pressure relief port is connected between the third pressure relief valve and the fourth pressure relief valve.

[0013] As described above, an inert gas recovery device is provided in an embodiment of the present disclosure, comprising a collection unit, a degassing unit, a compression unit, at least one purification unit and a distillation unit connected in sequence along the gas delivery direction; at least one collection pipeline, one end of which is connected to the inlet of the collection unit and the other end is connected to the pressure relief port of the at least one purification unit; wherein the at least one collection pipeline guides the gas flowing out of the pressure relief port to the collection unit. An exhaust pipe is connected to the collection pipeline; the inert gas recovery device also includes a control unit, the control unit includes a controller, a first valve body, a second valve body, an analyzer, a pressure measuring instrument and a flow measuring instrument; the first valve body is arranged in the exhaust pipe, and the second valve body is arranged in the collection pipeline and is located after the exhaust pipe; the analyzer, the pressure measuring instrument and the flow measuring instrument are arranged in sequence in the collection pipeline and are located before the exhaust pipe; when the control unit obtains a detection result that the carbon dioxide concentration in the purification unit reaches a predetermined value based on the analyzer, the pressure measuring instrument and the flow measuring instrument, the first valve body is controlled to be turned on and the second valve body to be closed. The advantage of the above arrangement is that when the purification unit is in a pressure relief state, the high-pressure gas flowing out of the pressure relief port is no longer discharged directly into the atmosphere, but is guided to the collection unit through the collection pipeline and argon is recovered again. This avoids the resources caused by the direct discharge of high-pressure gas into the atmosphere, improves the recovery rate of argon, and improves the economic efficiency of argon recovery. When multiple purification units and collection pipelines are provided, the effect of argon recovery can be further improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 The figure shows a flow chart of argon recovery in the prior art; Figure 2 , which is a schematic diagram of the recovery process of the inert gas recovery device in an embodiment of the present disclosure; Figure 3 FIG. 1 is a schematic diagram of an overall structure in which two purification units are implemented in an embodiment of the present disclosure; Figure 4 , which is a schematic diagram of a recycling process of another embodiment of a control unit in an embodiment of the present disclosure; Figure 5 , which is a schematic diagram of a recycling process of another embodiment of a control unit in the disclosed embodiment; Figure 6 FIG. 1 is a schematic diagram of a recycling process of another embodiment of a control unit in an embodiment of the present disclosure; Figure 7 , which is a schematic diagram of the overall structure of the first purification component in the embodiment of the present disclosure; Figure 8 Shown in FIG. 1 is a schematic diagram of the overall structure of the second purification component in an embodiment of the present disclosure.

[0015] Description of reference numerals: Collection unit; 20. Quality removal unit; 30. Pressurization unit; Purification unit; 40A, first purification unit; 401A, first pressure relief port; 41A, first purification component; 411A, first adsorption tower; 412A, second adsorption tower; 413A, first pressure relief valve; 414A, second pressure relief valve; 40B, second purification unit; 401B, second pressure relief port; 402B, first filling port; 41B, second purification component; 411B, third adsorption tower; 412B, fourth adsorption tower; 413B, third pressure relief valve; 414B, fourth pressure relief valve; Distillation unit; Collection pipeline; 61. Vacuum pump; 60A, first collecting pipeline; 61A, first vacuum pump; 62, exhaust pipe; 60B, second collecting pipeline; 61B, second vacuum pump; 91. First valve body; 92. First flow meter; 93. Second flow meter; 94. Second valve body. DETAILED DESCRIPTION

[0016] The following is an explanation of the embodiments of the present disclosure by specific examples, and those skilled in the art can easily understand other advantages and effects of the present disclosure from the information disclosed by the present disclosure. The present disclosure can also be implemented or applied through other different specific embodiments, and the details in the present disclosure can also be modified or changed in various ways according to different viewpoints and application modules without departing from the spirit of the present disclosure. It should be noted that the embodiments in the present disclosure and the features in the embodiments can be combined with each other without conflict.

[0017] The following is a detailed description of the embodiments of the present disclosure with reference to the accompanying drawings so that those skilled in the art can easily implement the present disclosure. The present disclosure can be embodied in many different forms and is not limited to the embodiments described herein.

[0018] In the representations of the present disclosure, the reference terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" and the like mean that the specific features, structures, materials or characteristics represented in conjunction with the embodiment or example are included in at least one embodiment or example of the present disclosure. Moreover, the specific features, structures, materials or characteristics represented may be combined in any one or a group of embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples represented in the present disclosure and the features of different embodiments or examples, unless they are mutually contradictory.

[0019] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the representation of the present disclosure, "a group" means two or more, unless otherwise clearly and specifically defined.

[0020] In order to clearly describe the present disclosure, components not related to the description are omitted, and the same reference numerals are given to the same or similar components throughout the specification.

[0021] Throughout the specification, when a device is said to be "connected" to another device, this includes not only the case of "direct connection" but also the case of "indirect connection" by placing other elements therebetween. In addition, when a device is said to "include" a certain component, unless otherwise stated, it does not exclude other components, but means that other components may be included.

[0022] Although the terms first, second, etc. are used to represent various elements in this article in some examples, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, the first interface and the second interface, etc. are represented. Moreover, as used in this article, the singular forms "one", "one" and "the" are intended to also include plural forms, unless there is an opposite indication in the context. It should be further understood that the terms "comprising" and "including" indicate that there are the described features, steps, operations, elements, modules, projects, kinds, and / or groups, but do not exclude the existence, occurrence or addition of one or a group of other features, steps, operations, elements, modules, projects, kinds, and / or groups. The terms "or" and "and / or" used herein are interpreted as inclusive, or mean any one or any combination. Therefore, "A, B or C" or "A, B and / or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B and C". Only when the combination of elements, functions, steps or operations is inherently mutually exclusive in some way, will there be an exception to this definition.

[0023] The technical terms used herein are only used to refer to specific embodiments and are not intended to limit the present disclosure. The singular form used herein also includes the plural form unless the sentence clearly indicates the contrary meaning. The meaning of "including" used in the specification is to specify specific characteristics, regions, integers, steps, operations, elements and / or components, and does not exclude the existence or addition of other characteristics, regions, integers, steps, operations, elements and / or components.

[0024] Although not defined differently, all terms, including technical and scientific terms used herein, have the same meaning as those generally understood by those skilled in the art to which the present disclosure belongs. Terms defined in commonly used dictionaries are additionally interpreted as having meanings consistent with relevant technical literature and the message of the present disclosure, and shall not be overly interpreted as ideal or very formal meanings unless defined.

[0025] Argon is an inert gas that does not react chemically with any substance. Therefore, it is widely used as a protective gas, carrier gas, diluent gas, etc. in many industries of the national economy, such as electronics, chemical industry, physical and chemical analysis, light source, welding, single crystal silicon preparation, etc., especially in metal smelting, argon as an inert protective gas can effectively prevent the oxidation of metals at high temperatures. During the evacuation process, the vacuum pump continuously pumps argon from the furnace to the outside. In the prior art, the extracted argon is collected, mechanically impurities are removed, compressed, decarbonized and deoxygenated, and distilled to form high-purity argon. However, the decarbonization and deoxygenation adsorption towers in the existing purification process directly discharge a part of the high-pressure gas containing argon into the atmosphere when the pressure is released, resulting in the loss of high-pressure gas in the adsorption tower and pipeline. In the increasingly fierce competitive environment, the argon recovery rate in the argon recovery project is seriously affected.

[0026] Based on the above problems, the embodiment of the present disclosure provides an inert gas recovery device. When the purification unit is in a pressure relief state, the high-pressure gas flowing out of the pressure relief port is no longer discharged directly into the atmosphere, but is guided to the collection unit through a collection pipeline, and the argon recovery process is re-performed. This avoids the resources caused by the direct discharge of high-pressure gas into the atmosphere, thereby improving the recovery rate of argon and the economic efficiency of argon recovery.

[0027] Figure 1 The figure shows a flow chart of argon recovery in the prior art. Figure 2 The schematic diagram of the recovery process of the inert gas recovery device in the embodiment of the present disclosure is shown in FIG. Figure 2In the example, the inert gas recovery device includes a collection unit 10, a degassing unit 20, a pressurizing unit 30, a purification unit 40, a distillation unit 50 and a collection pipeline 60 which are sequentially connected along the gas delivery direction. One end of the collection pipeline 60 is connected to the inlet of the collection unit 10, and the other end is connected to the pressure relief port of the purification unit 40. The collection pipeline 60 guides the high-pressure gas flowing out of the pressure relief port to the collection unit 10.

[0028] The advantage of the above arrangement is that when the purification unit 40 is in a pressure relief state, the high-pressure gas flowing out of the pressure relief port is no longer discharged directly into the atmosphere, but is guided to the collection unit 10 through the collection pipeline 60, and the argon recovery process is performed again. This avoids the resources caused by the direct discharge of high-pressure gas into the atmosphere, thereby improving the recovery rate of argon gas and the economic efficiency of argon gas recovery.

[0029] It is understood by those skilled in the art that, since part of the gas containing argon will be released from the inside of the purification unit 40 to the atmosphere during operation, a collecting pipeline 60 is provided between the pressure relief port of the purification unit 40 and the collecting unit 10. Therefore, when part of the gas containing argon will be released from the inside of other units such as the demass removal unit 20, the booster unit 30 or the distillation unit 50 to the atmosphere during operation, the same collecting pipeline 60 may be provided between the other units and the collecting unit 10 to avoid reducing the recovery rate of argon due to directly discharging the gas containing argon to the atmosphere, but the invention is not limited thereto.

[0030] exist Figure 2 In the example, a vacuum pump 61 is provided on the collection pipeline 60, and is started when the pressure relief port is in a conducting state. It can be understood by those skilled in the art that when the vacuum pump 61 is started, it can not only suck the gas flowing out of the pressure relief port of the purification unit 40 due to pressure relief and part of the gas in the pipeline to the collection unit 10, thereby further improving the degree of recovery of argon gas by the inert gas recovery device, but also speed up the efficiency of the gas flowing out of the pressure relief port being recovered again.

[0031] Figure 3 The figure shows a schematic diagram of the overall structure of the purification unit in the embodiment of the present disclosure, in which two purification units are implemented. Figure 3In the example, the purification unit is implemented as two, namely a first purification unit 40A and a second purification unit 40B which are connected in sequence; the first purification unit 40A includes a first pressure relief port, and the second purification unit 40B includes a second pressure relief port; the collecting pipeline is implemented as two, namely a first collecting pipeline 60A and a second collecting pipeline 60B; the first collecting pipeline 60A is used to connect the first pressure relief port and the inlet of the collecting unit 10; the second collecting pipeline 60B is used to connect the second pressure relief port and the inlet of the collecting unit.

[0032] In another embodiment, the other ends of the first collecting pipeline and the second collecting pipeline can also be connected in parallel and then connected to the collecting unit. The inert gas recovery device also includes a controller; the first collecting pipeline is provided with a first pressure measuring instrument and a first regulating valve in sequence along the conveying direction, and the second collecting pipeline is provided with a second pressure measuring instrument and a second regulating valve in sequence along the conveying direction; the first pressure measuring instrument, the first regulating valve, the second pressure measuring instrument and the second regulating valve are respectively communicated and connected to the controller, and the controller makes the first regulating valve or the second regulating valve on the pipeline with high pressure in a conducting state and the other in a closed state based on the pressure measurement results of the first pressure measuring instrument and the second pressure measuring instrument. The advantage of the above arrangement is that it can prevent the situation where part of the gas in the pipeline with high pressure in the pipeline enters another pipeline, thereby reducing the failure rate.

[0033] In another embodiment, the purification unit is implemented as a plurality of units, each for purifying different impurity gases; the plurality of purification units are connected in sequence. The collection pipeline is implemented as a plurality of units; each purification unit includes a pressure relief port; the pressure relief port of each purification unit is connected to the inlet of the collection unit through a collection pipeline. It can be understood by those skilled in the art that the structures of the plurality of purification units do not have to be the same, as long as each purification unit includes a pressure relief port (which may also be an exhaust port in another embodiment) that can be connected to the collection unit, and the invention is not limited thereto.

[0034] exist Figure 3In the example, the first collecting pipeline 60A is provided with a first vacuum pump 61A, and is started when the first pressure relief port is in a conducting state. The second collecting pipeline 60B is provided with a second vacuum pump 61B, and is started when the second pressure relief port is in a conducting state. It can be understood by those skilled in the art that when the first vacuum pump 61A is started, it can not only suck the gas flowing out of the first pressure relief port of the first purification unit 40A due to pressure relief and part of the gas in the pipeline to the collecting unit 10, thereby further improving the degree of recovery of argon gas by the inert gas recovery device, but also speed up the efficiency of the gas flowing out of the first pressure relief port being recovered again. Similarly, it can be known that the second vacuum pump 61B has the same function as the first vacuum pump 61A, so it will not be repeated here.

[0035] In another embodiment, the first collecting pipeline and the second collecting pipeline may share a vacuum pump, that is, the other ends of the first collecting pipeline and the second collecting pipeline are connected in parallel and then connected to the inlet of the vacuum pump, and the outlet of the vacuum pump is connected to the collecting unit.

[0036] exist Figure 3 In the example, the inert gas recovery device also includes a control unit, which includes a controller (not shown in the figure), a first valve body 91 and a first flow meter 92; the first valve body 91 and the first flow meter 92 are respectively communicatively connected to the controller; the first valve body 91 is arranged at a first filling port 402B for hydrogen injection in the second purification unit 40B; the first flow meter 92 is arranged between the first purification unit 40A and the second purification unit 40B for detecting the amount of oxygen flowing into the second purification unit 40B; the controller adjusts the opening of the first valve body 91 based on the detection result of the first flow meter 92 to make the hydrogen entering the second purification unit 40B slightly excessive.

[0037] Those skilled in the art can understand that, by detecting the detection result of the amount of oxygen flowing from the first purification unit 40A into the second purification unit 40B per unit time through the first flow meter 92, the controller can adjust the first valve body 91 based on the detection result, and then adjust the amount of hydrogen entering the second purification unit 40B and reacting with oxygen, so that the amount of hydrogen entering the second purification unit 40B slightly exceeds the amount of oxygen according to the reaction ratio, so as to ensure that the oxygen reacts completely, while the hydrogen itself just reacts completely or has a little surplus, so as to reduce the waste of hydrogen and reduce the cost of argon recovery.

[0038] Figure 4 FIG. 1 is a schematic diagram of a recycling process of another embodiment of the control unit in the disclosed embodiment. Figure 4In the example, the first collecting pipeline 60A is connected to an exhaust pipe 62; the inert gas recovery device also includes a control unit (not shown in the figure), the control unit includes a controller, a first valve body 91, a second valve body 94, an analyzer, a pressure measuring instrument and a flow measuring instrument; the first valve body 91 is arranged in the exhaust pipe 62, the second valve body 94 is arranged in the first collecting pipeline 60A and is located after the exhaust pipe 62; the analyzer, the pressure measuring instrument and the flow measuring instrument are successively arranged in the first collecting pipeline 60A and are located before the exhaust pipe 62; when the control unit obtains a detection result that the carbon dioxide concentration in the first purification unit 40A reaches a predetermined value based on the analyzer, the pressure measuring instrument and the flow measuring instrument, the controller controls the first valve body 91 to be turned on and the second valve body 94 to be closed.

[0039] Those skilled in the art can understand that, in the initial state, the first valve body 91 is closed and the second valve body 94 is connected, so that the gas flowing out of the first purification unit 40A during pressure relief flows back to the collection unit 10 for argon recovery again. When the carbon dioxide concentration in the first purification unit 40A reaches a predetermined value, the controller controls the first valve body 91 to be connected and the second valve body 94 to be closed, so as to prevent part of the carbon dioxide in the gas flowing out of the first purification unit 40A during pressure relief from flowing back to the collection unit 10 and the first purification unit 40A again, thereby preventing the first purification unit 40A from reducing or losing its purification effect due to excessively high carbon dioxide concentration.

[0040] Exemplarily, the collecting unit 10 is implemented as a gas storage tank. The boosting unit 30 is implemented as an air compressor. Further exemplarily, a vacuum pump is provided at the inlet of the gas storage tank. It can be understood by those skilled in the art that the argon gas after playing a protective role is sucked into the gas storage tank, and then the mechanical impurities are removed by the de-massification unit 20, and the boosting unit 30 is pressurized and flows into the first purification unit 40A for carbon removal, and then enters the second purification unit 40B for deoxygenation, and finally enters the distillation unit 50 for distillation to obtain argon gas with higher purity.

[0041] Figure 5 FIG. 1 is a schematic diagram of a recycling process of another embodiment of a control unit in the present disclosure. Figure 5In the example, the inert gas recovery device also includes a control unit, which includes a controller (not shown in the figure), a first valve body 91 and a first flow meter 92; the first valve body 91 and the first flow meter 92 are respectively communicatively connected to the controller; the first valve body 91 is arranged at a first filling port 402B for hydrogen injection in the second purification unit 40B; the first flow meter 92 is arranged between the second purification unit 40B and the distillation unit 50 for detecting the amount of hydrogen flowing into the distillation unit 50; the controller adjusts the opening of the first valve body 91 based on the detection result of the hydrogen content of the first flow meter 92, so as to make the hydrogen entering the second purification unit 40B slightly excessive.

[0042] Those skilled in the art can understand that, by detecting the detection result of the amount of hydrogen flowing out of the second purification unit 40B per unit time (i.e., the amount of hydrogen that has not been completely reacted) by the first flow meter 92, the controller can adjust the first valve body 91 based on the detection result, and then adjust the amount of hydrogen that enters the second purification unit 40B and reacts with oxygen, so that the amount of hydrogen entering the second purification unit 40B slightly exceeds the amount of oxygen according to the reaction ratio, so as to ensure that the oxygen is completely reacted, while the hydrogen itself is just reacted or slightly remains, so as to reduce the waste of hydrogen and reduce the cost of argon recovery.

[0043] Figure 6 FIG. 1 is a schematic diagram of a recycling process of another embodiment of a control unit in the present disclosure. Figure 6 In the example, the inert gas recovery device also includes a control unit, which includes a controller, a first valve body 91, a first flowmeter 92 and a second flowmeter 93; the first valve body 91, the first flowmeter 92 and the second flowmeter 93 are respectively communicatively connected to the controller; the first valve body 91 is arranged at the first filling port 402B for hydrogen injection in the second purification unit 40B; the first flowmeter 92 is arranged between the first purification unit 40A and the second purification unit 40B, for detecting the amount of oxygen flowing into the second purification unit 40B; the second flowmeter 93 is arranged between the second purification unit 40B and the distillation unit 50, for detecting the amount of hydrogen flowing into the distillation unit 50; the controller coordinates and adjusts the opening of the first valve body 91 based on the detection results of the first flowmeter 92 and the second flowmeter 93, so as to make the hydrogen entering the second purification unit 40B slightly excessive.

[0044] It can be understood by those skilled in the art that the first flow meter 92 detects the detection result of the amount of oxygen flowing from the first purification unit 40A into the second purification unit 40B per unit time, and the second flow meter 93 detects the detection result of the amount of hydrogen flowing out of the second purification unit 40B per unit time (i.e., the amount of hydrogen that has not been completely reacted). That is, the controller adjusts the opening of the first valve body 91 based on the detection result of the first flow meter 92 to adjust the amount of hydrogen entering; and then, the controller fine-tunes the opening of the first valve body 91 based on the detection result of the second flow meter 93 to make the amount of hydrogen entering the second purification unit 40B at an optimal value, so as to further reduce the waste of hydrogen.

[0045] Figure 7 The schematic diagram of the overall structure of the first purification component in the embodiment of the present disclosure is shown in FIG. Figure 7 In the example, the first purification unit includes a first purification component 41A, the first purification component 41A includes a first adsorption tower 411A and a second adsorption tower 412A, and a first pressure relief valve 413A and a second pressure relief valve 414A connected in series between the inlet of the first adsorption tower 411A and the inlet of the second adsorption tower 412A, and the first pressure relief port 401A is connected between the first pressure relief valve 413A and the second pressure relief valve 414A. It can be understood by those skilled in the art that the first adsorption tower 411A and the second adsorption tower 412A are alternately in an adsorption state and a regeneration state. Taking the first adsorption tower 411A in the regeneration state as an example, the first pressure relief valve 413A is turned on and the second pressure relief valve 414A is closed. The gas in the first adsorption tower 411A flows through the first pressure relief valve 413A and the first pressure relief port 401A into the first collection pipeline, and finally enters the inside of the collection unit for argon recovery again; at this time, the first vacuum pump sucks the gas in the pipeline where the first pressure relief valve 413A is located to the collection unit to improve the utilization rate of the gas. When the second adsorption tower 412A is in the regeneration state, the opening and closing states of the first pressure relief valve 413A and the second pressure relief valve 414A are opposite, and the gas in the second adsorption tower 412A flows through the second pressure relief valve 414A and the first pressure relief port 401A into the first collecting pipeline.

[0046] Figure 8 The schematic diagram of the overall structure of the second purification component in the embodiment of the present disclosure is shown in FIG. Figure 8In the example, the second purification unit includes a second purification component 41B, the second purification component 41B includes a third adsorption tower 411B and a fourth adsorption tower 412B, and a third pressure relief valve 413B and a fourth pressure relief valve 414B connected in series between the inlet of the third adsorption tower 411B and the inlet of the fourth adsorption tower 412B, and the second pressure relief port 401B is connected between the third pressure relief valve 413B and the fourth pressure relief valve 414B. It can be understood by those skilled in the art that the third adsorption tower 411B and the fourth adsorption tower 412B are alternately in an adsorption state and a regeneration state. Taking the third adsorption tower 411B in the regeneration state as an example, the third pressure relief valve 413B is turned on and the fourth pressure relief valve 414B is closed. The gas in the third adsorption tower 411B flows through the third pressure relief valve 413B and the second pressure relief port 401B into the second collection pipeline, and finally enters the collection unit for argon recovery again; at this time, the second vacuum pump draws the gas in the pipeline where the third pressure relief valve 413B is located to the collection unit to improve the utilization rate of the gas. When the fourth adsorption tower 412B is in the regeneration state, the opening and closing states of the third pressure relief valve 413B and the fourth pressure relief valve 414B are opposite, and the gas in the fourth adsorption tower 412B flows through the fourth pressure relief valve 414B and the second pressure relief port 401B into the second collection pipeline.

[0047] Those skilled in the art can understand that the regeneration gas used in the adsorption towers in the first purification unit and the second purification unit when in the regeneration state is contaminated nitrogen gas. In order to avoid the contaminated nitrogen gas contaminating the raw gas during operation, argon gas will be used to replace the contaminated nitrogen gas in the container. Therefore, the present invention can also recover the replacement gas to the collection unit through the first collecting pipeline and the second collecting pipeline, further improving the argon extraction rate.

[0048] Those skilled in the art will appreciate that this embodiment is only described by taking argon as an example, and is also applicable to the recovery of other inert gases.

[0049] The following calculation method is used to illustrate the improved recovery rate of argon gas recovery in the embodiments disclosed in this application.

[0050] Calculation method of extraction rate: Total extraction rate = amount of argon gas delivered to the owner ÷ (flow rate of raw gas inlet main pipe × argon content) × 100%; Output calculation method: raw gas volume (A) × argon content in raw materials (B) × equipment extraction rate (C); Take the argon recovery project as an example: the raw gas is 3000 Nm³ / h, and the argon content is 95%. Purifier system: the carbon removal purifier and water removal purifier have an adsorption cycle of 4 hours, in which the volume of the adsorption cylinder in the carbon removal purifier is 6m³ and the pressure is 1.6mpa. The volume of the adsorption cylinder in the water removal purifier is 3m³ and the pressure is 1.55mpa.

[0051] Rough calculation: When other conditions such as temperature are the same, PV=P1×V1, where P and V are the pressure and volume under non-standard conditions, and P1 and V1 are the pressure and volume under standard conditions (standard square). In summary, the amount of argon released by the carbon removal purifier during pressure relief is P1=PV / V1=1.6mpa×6m³ / 0.101325mpa (atmospheric pressure 101.325kpa)≈94.745Nm³.

[0052] When the water removal purifier is depressurized, the argon release volume is P1=PV / V1=1.55mpa×3m³ / 0.101325mpa (atmospheric pressure 101.325kpa)≈45.892 Nm³.

[0053] Therefore, the total amount of recovery per hour of the purification system is (94.745 Nm³+45.892 Nm³) / 4h (4 hours is one adsorption cycle) = 140.637 Nm³ / h / 4h≈35.6 Nm³ / h.

[0054] In summary, the recovery rate can be increased by 35.6 Nm³ / h×95% / 3000 Nm³ / h×95%≈1.12%.

[0055] It can be seen that for an argon recovery project, the extraction rate can be increased by 1.12%, which is very significant. Because the market price of liquid argon is relatively high, while increasing the extraction rate, it also indirectly improves the economic efficiency.

[0056] In summary, an inert gas recovery device is provided in an embodiment of the present disclosure, comprising a collection unit, a degassing unit, a compression unit, at least one purification unit and a distillation unit connected in sequence along the gas delivery direction; at least one collection pipeline, one end of which is connected to the inlet of the collection unit and the other end is connected to the pressure relief port of the at least one purification unit; wherein the at least one collection pipeline guides the gas flowing out of the pressure relief port to the collection unit. An exhaust pipe is connected to the collection pipeline; the inert gas recovery device also includes a control unit, the control unit includes a controller, a first valve body, a second valve body, an analyzer, a pressure measuring instrument and a flow measuring instrument; the first valve body is arranged in the exhaust pipe, and the second valve body is arranged in the collection pipeline and is located after the exhaust pipe; the analyzer, the pressure measuring instrument and the flow measuring instrument are arranged in sequence in the collection pipeline and are located before the exhaust pipe; when the control unit obtains a detection result that the carbon dioxide concentration in the purification unit reaches a predetermined value based on the analyzer, the pressure measuring instrument and the flow measuring instrument, the first valve body is controlled to be turned on and the second valve body to be closed. The advantage of the above arrangement is that when the purification unit is in a pressure relief state, the high-pressure gas flowing out of the pressure relief port is no longer discharged directly into the atmosphere, but is guided to the collection unit through the collection pipeline and argon is recovered again. This avoids the resources caused by the direct discharge of high-pressure gas into the atmosphere, improves the recovery rate of argon, and improves the economic efficiency of argon recovery. When multiple purification units and collection pipelines are provided, the effect of argon recovery can be further improved.

[0057] The above embodiments are merely illustrative of the principles and effects of the present disclosure, and are not intended to limit the present disclosure. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present disclosure. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the relevant technical field without departing from the spirit and technical ideas disclosed in the present disclosure shall still be covered by the protection scope of the present disclosure.

Claims

1. An inert gas recovery device, characterized in that: include: A collecting unit, a degassing unit, a compression unit, at least one purification unit and a distillation unit connected in sequence along the gas conveying direction; at least one collecting pipeline, one end of which is connected to the inlet of the collecting unit, and the other end of which is connected to the pressure relief port of the at least one purification unit; Wherein, the at least one collecting pipeline guides the gas flowing out of the pressure relief port to the collecting unit; The collecting pipeline is connected with an exhaust pipe; the inert gas recovery device also includes a control unit, which includes a controller, a first valve body, a second valve body, an analyzer, a pressure measuring instrument and a flow measuring instrument; the first valve body is arranged in the exhaust pipe, and the second valve body is arranged in the collecting pipeline and is located after the exhaust pipe; the analyzer, the pressure measuring instrument and the flow measuring instrument are arranged in sequence in the collecting pipeline and are located before the exhaust pipe; when the control unit obtains a detection result that the carbon dioxide concentration in the purification unit reaches a predetermined value based on the analyzer, the pressure measuring instrument and the flow measuring instrument, the first valve body is controlled to be turned on and the second valve body to be closed.

2. The inert gas recovery device according to claim 1, characterized in that: The at least one collecting pipeline is provided with a vacuum pump, and is started when the pressure relief port is connected.

3. The inert gas recovery device according to claim 1, characterized in that: The purification unit is implemented as two, namely a first purification unit and a second purification unit which are connected in sequence; the first purification unit includes a first pressure relief port, and the second purification unit includes a second pressure relief port; the collecting pipeline is implemented as two, namely a first collecting pipeline and a second collecting pipeline; the first collecting pipeline is used to connect the first pressure relief port and the inlet of the collecting unit; the second collecting pipeline is used to connect the second pressure relief port and the inlet of the collecting unit.

4. The inert gas recovery device according to claim 1, characterized in that: The purification unit is implemented in multiple numbers, each used to purify different impurity gases; the collecting pipeline is implemented in multiple numbers; each purification unit includes a pressure relief port; the pressure relief port of each purification unit is connected to the inlet of the collecting unit through a collecting pipeline.

5. The inert gas recovery device according to claim 3, characterized in that: It also includes a control unit, which includes a controller, a first valve body and a first flow meter; the first valve body and the first flow meter are respectively communicatively connected to the controller; the first valve body is arranged at a first filling port in the second purification unit for hydrogen injection; the first flow meter is arranged between the first purification unit and the second purification unit for detecting the amount of oxygen flowing into the second purification unit; the controller adjusts the opening of the first valve body based on the detection result of the first flow meter to make the hydrogen entering the second purification unit slightly excessive.

6. The inert gas recovery device according to claim 3, characterized in that: It also includes a control unit, which includes a controller, a first valve body and a first flow meter; the first valve body and the first flow meter are respectively communicatively connected to the controller; the first valve body is arranged at a first filling port for hydrogen injection in the second purification unit; the first flow meter is arranged between the second purification unit and the distillation unit to detect the amount of hydrogen flowing into the distillation unit; the controller adjusts the opening of the first valve body based on the detection result of the first flow meter to make the hydrogen entering the second purification unit slightly excessive.

7. The inert gas recovery device according to claim 3, characterized in that: It also includes a control unit, which includes a controller, a first valve body, a first flowmeter and a second flowmeter; the first valve body, the first flowmeter and the second flowmeter are respectively communicatively connected to the controller; the first valve body is arranged at a first filling port in the second purification unit for hydrogen injection; the first flowmeter is arranged between the first purification unit and the second purification unit for detecting the amount of oxygen flowing into the second purification unit; the second flowmeter is arranged between the second purification unit and the distillation unit for detecting the amount of hydrogen flowing into the distillation unit; the controller coordinates and adjusts the opening of the first valve body based on the detection results of the first flowmeter and the second flowmeter to make the hydrogen entering the second purification unit slightly excessive.

8. The inert gas recovery device according to claim 3, characterized in that: The first purification unit includes a first purification component, which includes a first adsorption tower and a second adsorption tower, and a first pressure relief valve and a second pressure relief valve connected in series between the first adsorption tower inlet and the second adsorption tower inlet, and the first pressure relief port is connected between the first pressure relief valve and the second pressure relief valve.

9. The inert gas recovery device according to claim 3, characterized in that: The second purification unit includes a second purification component, which includes a third adsorption tower and a fourth adsorption tower, and a third pressure relief valve and a fourth pressure relief valve connected in series between the inlet of the third adsorption tower and the inlet of the fourth adsorption tower, and the second pressure relief port is connected between the third pressure relief valve and the fourth pressure relief valve.

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