Photomask protective film dismounting device and dismounting method

Abstract

The invention relates to a photomask protective film dismounting device which comprises an object placing table, and a limiting piece, a dismounting assembly and a first temperature sensor are fixed to the object placing table. The upper surface of the storage table is coated with a teflon coating; a cooling device is installed in the storage table and used for maintaining the temperature of the upper surface of the storage table at 5-10 DEG C. The invention further relates to a photomask protection film dismounting method, the temperature of the upper surface of the object placing table is maintained at 5-10 DEG C, so that the adhesive between the photomask plate and the photomask protection film is hardened, and the photomask protection film can be analyzed subsequently. By utilizing the photomask protective film dismounting device and dismounting method designed by the invention, the problems that an adhesive is easy to splash and pollute the surface of a photomask when a heating method is used for dismounting, fogging spots are possibly caused during cleaning, and the cleanliness and the precision of the photomask are influenced can be solved; and damage is easily caused by direct tool dismounting, so that the cost is increased, and the service life of the photomask is shortened.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to a photomask protective film disassembly device and a disassembly method. Background Art

[0002] The protective film of the photomask is a key component to protect the photomask from contamination and damage. However, when removing the protective film, the traditional methods usually have the following problems: Heating method removal: using a heating plate to heat the protective film to soften or liquefy the adhesive to achieve removal, however, this method is prone to adhesive splashing, contaminating the surface of the photomask, and may cause fog spots during cleaning, affecting the cleanliness and precision of the photomask; Direct tool removal: directly using tools to remove the protective film, but due to the delicate and fragile structure of the photomask, direct force removal is very likely to cause damage, resulting in increased costs and shortened photomask life.

[0003] Therefore, the prior art has defects and needs to be improved and developed. Summary of the invention

[0004] The embodiments of the present invention provide a photomask protective film removal device and a removal method, which are used to solve the problems in the prior art that the removal method using heating method is likely to cause adhesive splashing, contaminating the surface of the photomask, and may cause fog spots during cleaning, affecting the cleanliness and precision of the photomask; direct tool removal is very likely to cause damage, resulting in increased costs and shortened photomask life.

[0005] According to a first aspect of an embodiment of the present invention, there is provided a photomask protective film removal device, comprising a storage table, a limiting member is fixed on the upper surface of the storage table, and the limiting member is used to fix the photomask on the upper surface of the storage table; a Teflon coating is coated on the upper surface of the storage table; a removal component is also fixed on the upper surface of the storage table, and when the photomask is fixed on the storage table, the removal component is used to separate the photomask protective film adhered to the upper surface of the photomask; a first temperature sensor is also fixed on the upper surface of the storage table; a cooling device is installed in the storage table, and the cooling device comprises a water pipe, and when water is passed through the water pipe, the temperature of the upper surface of the storage table is maintained at 5°C to 10°C; the water inlet of the water pipe is located on one side of the storage table, and the water outlet of the water pipe is located on the other side opposite to the water inlet; the end of the water pipe close to the water inlet is air-tightly connected to a first flow electric control valve, and the end of the water pipe close to the water outlet is air-tightly connected to a second flow electric control valve.

[0006] Furthermore, the limiting member includes a fixed end fixed on the upper surface of the storage platform, and the limiting member also includes a rotating end rotatably connected to the fixed end, and a baffle is fixed on the rotating end. When the photomask is placed on the storage platform, the rotating end is used to rotate the baffle to cover the upper surface of the photomask.

[0007] Further, the disassembly assembly includes four columns fixed on the upper surface of the storage table, and the four columns are defined as a first column, a second column, a third column and a fourth column in a counterclockwise direction;

[0008] A first sliding rod is connected between the first column and the second column, a first fixing rod is slidably connected to an end of the first sliding rod close to the first column, a first rotating member is fixed to an end of the first fixing rod away from the first sliding rod, a second fixing rod is slidably connected to an end of the first sliding rod close to the second column, and a second rotating member is fixed to an end of the second fixing rod away from the first sliding rod;

[0009] A second sliding rod is connected between the third column and the fourth column, a third fixed rod is slidably connected to one end of the second sliding rod close to the third column, a third rotating member is fixed to one end of the third fixed rod away from the second sliding rod, a fourth fixed rod is slidably connected to one end of the second sliding rod close to the fourth column, and a fourth rotating member is fixed to one end of the fourth fixed rod away from the second sliding rod;

[0010] A first prying member is rotatably connected between the first rotating member and the fourth rotating member, and the first prying member includes a rotating rod, a handle and a ejector pin, one end of the rotating rod is rotatably connected to the first rotating member, and the other end of the rotating rod is rotatably connected to the second rotating member; there are two ejector pins and both are fixed on the rotating rod, the needle heads of the ejector pins face the photomask protective film, and the arrangement positions of the ejector pins correspond one to one with the outer frame insertion holes of the photomask protective film; the handle is fixed on the rotating rod and faces away from the needle heads of the ejector pins, and when the needle heads of the ejector pins are inserted into the outer frame insertion holes of the photomask protective film, the handle is used to separate the photomask protective film from the photomask plate after being pressed; a second prying member is rotatably connected between the second rotating member and the third rotating member, and the first prying member and the second prying member have the same structure.

[0011] Furthermore, two limit blocks are fixed on the first sliding rod, one of which is between the first column and the first fixed rod, and the other of which is between the second column and the second fixed rod; two limit blocks are also fixed on the second sliding rod, one of which is between the third column and the third fixed rod, and the other of which is between the fourth column and the fourth fixed rod.

[0012] Furthermore, the first column, the second column, the third column and the fourth column are columns with external threads, and two bolts are threadedly connected to the first column, the second column, the third column and the fourth column respectively, one end of the first sliding rod is slidably connected to the first column and between the two bolts, and the other end of the first sliding rod is slidably connected to the second column and between the two bolts; one end of the second sliding rod is slidably connected to the third column and between the two bolts, and the other end of the second sliding rod is slidably connected to the fourth column and between the two bolts.

[0013] Furthermore, the water pipe is evenly laid in the storage table, and at least three temperature sensors are fixed on the water pipe between the first flow electric control valve and the second flow electric control valve, which are defined as the second temperature sensor, the third temperature sensor and the fourth temperature sensor in order of water inlet. The second temperature sensor is close to the first flow electric control valve, the third temperature sensor is located at the midpoint of the length of the water pipe, and the fourth temperature sensor is close to the second flow electric control valve.

[0014] Furthermore, the coating area of ​​the Teflon coating is at least equal to the lower surface area of ​​the photomask, and the thickness of the Teflon coating is between 10 μm and 15 μm.

[0015] Furthermore, an insulation layer is pasted on the inner surfaces of the storage table except the upper inner surface of the storage table, and the insulation layer is at least one of a rock wool insulation layer, a glass wool insulation layer, and a polyurethane foam insulation layer.

[0016] According to a second aspect of an embodiment of the present invention, there is provided a disassembly method for the photomask protective film disassembly device, comprising:

[0017] Step 1: placing a photomask with a photomask protective film on a storage table, and fixing the photomask on the storage table with a limiting member;

[0018] Step 2: Rotate the bolts on the first column, the second column, the third column and the fourth column to adjust the height of the first slide bar and the second slide bar so that the needle head of the ejector pin on the rotating rod can be inserted into the outer frame insertion hole of the photomask protective film;

[0019] Step 3: Introduce water into the water pipe, maintain the opening of the first flow electronically controlled valve and the second flow electronically controlled valve, and maintain the temperature value detected by the first temperature sensor between 5°C and 10°C:

[0020] Step 4: When the temperature value detected by the first temperature sensor is between 5°C and 10°C and maintained for at least 1 minute, hold the two handles with both hands respectively, and slide the rotating rod close to the photomask protective film until the ejector pin pushes against the outer frame insertion hole of the photomask protective film;

[0021] Step 5: Press the two handles to allow the ejector pins to pry the outer frame insertion holes of the photomask protection film, thereby driving the photomask protection film to separate from the upper surface of the photomask.

[0022] Furthermore, the method of maintaining the temperature value detected by the first temperature sensor between 5° C. and 10° C. includes:

[0023] If the temperature value detected by the first temperature sensor is not within the range of 5°C to 10°C, extract the temperature values ​​of the second temperature sensor, the third temperature sensor and the fourth temperature sensor;

[0024] If the temperature values ​​detected by the second temperature sensor and the fourth temperature sensor are both greater than 10°C, the opening of the first flow electronically controlled valve is reduced and the opening of the second flow electronically controlled valve is increased; when the temperature value detected by the third temperature sensor is between 5°C and 10°C and is maintained for at least 1 minute, the opening of the second flow electronically controlled valve is adjusted to be the same as the opening of the first flow electronically controlled valve;

[0025] If the temperature values ​​detected by the second temperature sensor and the fourth temperature sensor are both less than 5°C, the opening of the first flow electronically controlled valve is increased and the opening of the second flow electronically controlled valve is reduced; when the temperature value detected by the third temperature sensor is between 5°C and 10°C and is maintained for at least 1 minute, the opening of the first flow electronically controlled valve is adjusted to be the same as the opening of the second flow electronically controlled valve;

[0026] If the temperature value detected by the second temperature sensor is greater than 10°C and the temperature value detected by the fourth temperature sensor is less than 5°C, the openings of the first flow electronically controlled valve and the second flow electronically controlled valve are adjusted according to the temperature value detected by the third temperature sensor; if the temperature value detected by the third temperature sensor is greater than 10°C, the opening of the first flow electronically controlled valve is reduced and the opening of the second flow electronically controlled valve is increased. When the temperature value detected by the third temperature sensor is between 5°C and 10°C and maintained for at least 1 minute, the opening of the second flow electronically controlled valve is adjusted to be the same as the opening of the first flow electronically controlled valve: If the temperature value detected by the third temperature sensor is less than 10°C, the opening of the first flow electronically controlled valve is increased and the opening of the second flow electronically controlled valve is reduced. When the temperature value detected by the third temperature sensor is between 5°C and 10°C and maintained for at least 1 minute, the opening of the first flow electronically controlled valve is adjusted to be the same as the opening of the second flow electronically controlled valve.

[0027] Beneficial effects:

[0028] From the above technical solutions, it can be seen that the present invention provides a photomask protective film removal device and method, which uses a cooling device to cure the adhesive at low temperature, thereby effectively reducing the adhesion, and combined with a precise mechanical removal component design, the photomask protective film can be easily and safely peeled off in a low temperature environment, which not only avoids the pollution problem during heating and removal, but also greatly reduces the risk of damage to the photomask. This design provides the excellent effects of precise temperature control, convenient removal, and protection of the photomask.

[0029] It should be appreciated that all combinations of the foregoing concepts, as well as additional concepts described in greater detail below, may be considered to be part of the inventive subject matter of the present disclosure, provided such concepts are not mutually inconsistent.

[0030] The foregoing and other aspects, embodiments and features of the present invention can be more fully understood from the following description in conjunction with the accompanying drawings. Other additional aspects of the present invention, such as the features and / or beneficial effects of the exemplary embodiments, will be apparent from the following description or learned from the practice of the specific embodiments according to the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The accompanying drawings are not drawn to scale according to actual reference objects. In the accompanying drawings, each identical or nearly identical component shown in various figures may be represented by the same reference numeral. For the sake of clarity, not every component is labeled in each figure. Now, embodiments of various aspects of the present invention will be described by way of example and with reference to the accompanying drawings, in which:

[0032] Figure 1This is a front view of a photomask protective film removal device in an embodiment of the present application.

[0033] Figure 2 This is a top view of a photomask protective film removal device in an embodiment of the present application.

[0034] Figure 3 This is a left view of a photomask protective film removal device in an embodiment of the present application.

[0035] Figure 4 This is a right side view of a photomask protective film removal device in an embodiment of the present application.

[0036] Figure 5 This is a diagram of the internal structure of a storage platform of a photomask protective film removal device in an embodiment of the present application.

[0037] Figure 6 This is a screenshot of residual adhesive being heated using a hot plate.

[0038] Figure 7 This is a screenshot of using the embodiment of the present application without any adhesive residue.

[0039] Figure 8 A screenshot showing the use of a hot plate to heat the adhesive.

[0040] Fig. 9 This is a screenshot of the method of using the embodiment of the present application without producing glue spraying.

[0041] Description of Figure Numbers:

[0042] The storage table 1; the water inlet 101; the water outlet 102; the water pipe 103; the first flow electric control valve 104; the second flow electric control valve 105; the second temperature sensor 106; the third temperature sensor 107; the fourth temperature sensor 108; the photomask 2; the limiter 3; the first column 401; the second column 402; the third column 403; the fourth column 404; the first slide bar 501; the second slide bar 502; the first fixed rod 601; the second fixed rod 602; the third fixed rod 603; the fourth fixed rod 604; the first rotating member 701; the second rotating member 702; the third rotating member 703; the fourth rotating member 704; the limiter 8; the rotating rod 9; the handle 10; the ejector pin 11; the photomask protective film 12. DETAILED DESCRIPTION

[0043] In order to make the purpose, technical solution and advantages of the embodiment of the present invention clearer, the technical solution of the embodiment of the present invention will be clearly and completely described below in conjunction with the drawings of the embodiment of the present invention. Obviously, the described embodiment is a part of the embodiment of the present invention, not all of the embodiments. Based on the described embodiment of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be the common meaning understood by people with general skills in the field to which the present invention belongs.

[0044] The words "first", "second" and similar terms used in the patent specification and claims of the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, unless the context clearly indicates otherwise, the singular form "a" or "an" shall not be construed as "a" or "an";

[0045] The words “a”, “an”, “the” and the like do not denote a limitation of quantity, but rather denote the presence of at least one.

[0046] The words "include" or "comprises" and the like mean that the elements or objects appearing before "includes" or "comprises" include the features, wholes, steps, operations, elements and / or components listed after "includes" or "comprises", and do not exclude the existence or addition of one or more other features, wholes, steps, operations, elements, components and / or their collections. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0047] In the prior art, the use of heating to remove the mask easily causes adhesive splashing, contaminating the surface of the photomask and causing fog spots during cleaning, affecting the cleanliness and precision of the photomask. Direct tool removal can easily cause damage, resulting in increased costs and shortened photomask life.

[0048] In view of this, a first aspect of an embodiment of the present invention provides a photomask protective film removal device, referring to Figure 1 to Figure 4 , comprising a platform 1, a limiting member 3 is fixed on the upper surface of the platform 1, and the limiting member 3 is used to fix the photomask 2 on the upper surface of the platform 1; the upper surface of the platform 1 is coated with a Teflon coating; a disassembly component is also fixed on the upper surface of the platform 1, and when the photomask 2 is fixed on the platform 1, the disassembly component is used to separate the photomask protective film 12 bonded to the upper surface of the photomask 2; a first temperature sensor is also fixed on the upper surface of the platform 1; a cooling device is installed in the platform 1, refer to Figure 5The cooling device includes a water pipe 103, which is used to maintain the temperature of the upper surface of the storage table 1 at 5°C to 10°C when water flows through the water pipe 103; the water inlet 101 of the water pipe 103 is located on one side of the storage table 1, and the water outlet 102 of the water pipe 103 is located on the other side opposite to the water inlet 101; one end of the water pipe 103 close to the water inlet 101 is air-tightly connected to a first flow electric control valve 104, and one end of the water pipe 103 close to the water outlet 102 is air-tightly connected to a second flow electric control valve 105.

[0049] The photomask 2 is fixed by the stopper 3, ensuring stability and safety during the disassembly process. At the same time, the Teflon coating on the upper surface of the storage table 1 can maintain smoothness and increase the cooling conductivity, harden the adhesive, and thus reduce the bonding force between the adhesive and the photomask 2 and the photomask protective film 12; on the other hand, it reduces the difficulty of cleaning and extends the service life of the storage table 1. Through the installed cooling device, the temperature of the storage table 1 can be maintained in the low temperature range of 5°C to 10°C, and the adhesive is solidified in the low temperature range to facilitate the subsequent smooth separation of the photomask protective film 12 and the photomask 2. The overall design improves the cleanliness and safety of the disassembly process, ensures that the photomask 2 is not contaminated, and avoids the disadvantages of direct heating and tool removal.

[0050] In some embodiments, reference Figure 1 to Figure 4 The limiting member 3 includes a fixed end fixed on the upper surface of the placement table 1, and the limiting member 3 also includes a rotating end rotatably connected to the fixed end, and a blocking piece is fixed on the rotating end. When the photomask 2 is placed on the placement table 1, the rotating end is used to rotate the blocking piece to block the upper surface of the photomask 2.

[0051] The stopper 3 can rotate flexibly, and the photomask 2 will not be blocked during placement and removal. When the photomask 2 is cooled, the photomask 2 is fixed with a baffle. The fixing and limit design reduces unnecessary movement during the removal process, stabilizes the photomask 2, and prevents sliding or misalignment. This design of the stopper 3 ensures that the photomask 2 is accurately positioned, which helps to improve the safety and efficiency of removal.

[0052] In some embodiments, reference Figure 1 to Figure 4 The disassembly assembly includes four columns fixed on the upper surface of the storage table 1, and the four columns are defined as a first column 401, a second column 402, a third column 403 and a fourth column 404 in a counterclockwise direction.

[0053] A first sliding rod 501 is connected between the first column 401 and the second column 402, and an end of the first sliding rod 501 close to the first column 401 is slidably connected to a first fixed rod 601, and an end of the first fixed rod 601 away from the first sliding rod 501 is fixed with a first rotating member 701, and an end of the first sliding rod 501 close to the second column 402 is slidably connected to a second fixed rod 602, and an end of the second fixed rod 602 away from the first sliding rod 501 is fixed with a second rotating member 702.

[0054] A second sliding rod 502 is connected between the third column 403 and the fourth column 404, and a third fixed rod 603 is slidably connected to one end of the second sliding rod 502 close to the third column 403, and a third rotating member 703 is fixed to one end of the third fixed rod 603 away from the second sliding rod 502, and a fourth fixed rod 604 is slidably connected to one end of the second sliding rod 502 close to the fourth column 404, and a fourth rotating member 704 is fixed to one end of the fourth fixed rod 604 away from the second sliding rod 502.

[0055] The first rotating member 701, the second rotating member 702, the third rotating member 703 and the fourth rotating member 704 are the same rotating members, and rotating bearings or the like may be selected. The rotating members may also be made into concave semicircular bodies, and the two ends of the rotating rod 9 are made into shapes that fit the grooves of the semicircular bodies, in order to allow the rotating shaft to rotate freely.

[0056] A first prying member is rotatably connected between the first rotating member 701 and the fourth rotating member 704. The first prying member includes a rotating rod 9, a handle 10 and an ejector pin 11. One end of the rotating rod 9 is rotatably connected to the first rotating member 701, and the other end of the rotating rod 9 is rotatably connected to the second rotating member 702. There are two ejector pins 11 and both are fixed on the rotating rod 9. The needle heads of the ejector pins 11 face the photomask protective film 12, and the arrangement positions of the ejector pins 11 correspond one to one with the outer frame insertion holes of the photomask protective film 12. The handle 10 is fixed on the rotating rod 9 and faces away from the needle heads of the ejector pins 11. When the needle heads of the ejector pins 11 are inserted into the outer frame insertion holes of the photomask protective film 12, the handle 10 is used to separate the photomask protective film 12 from the photomask plate 2 after being pressed. A second prying member is rotatably connected between the second rotating member 702 and the third rotating member 703. The first prying member and the second prying member have the same structure.

[0057] The disassembly assembly consists of 4 columns, and the slide bars and fixed bars arranged between the columns provide flexibility and adjustability. The appearance of the photomask protective film 12 itself has a socket. When the height of the slide bar is adjusted to allow the needle head of the ejector pin 11 to be accurately inserted into the outer frame socket of the photomask protective film 12, the alignment is completed. At the same time, the design of the first prying piece and the second prying piece enables the ejector pin 11 to be pried at an appropriate angle. By using the principle of leverage, when the adhesive is cooled in the low temperature range, the photomask protective film 12 can be easily separated, avoiding damage to the photomask 2 that may be caused by direct pulling, and improving the controllability and safety of the overall disassembly.

[0058] In some embodiments, reference Figure 1 , two limit blocks 8 are fixed on the first slide bar 501, and the limit blocks 8 can be made of the same material as the first slide bar to play a blocking role. One of the limit blocks 8 is between the first column 401 and the first fixed rod 601, and the other limit block 8 is between the second column 402 and the second fixed rod 602; two limit blocks 8 are also fixed on the second slide bar 502, one of the limit blocks 8 is between the third column 403 and the third fixed rod 603, and the other limit block 8 is between the fourth column 404 and the fourth fixed rod 604.

[0059] The limit block 8 provided on the slide bar effectively prevents the fixed bar from exceeding the predetermined range during the sliding process. The reasonable arrangement of the limit block 8 can accurately control the sliding distance, avoid the displacement of the prying piece due to excessive sliding distance, and ensure that the ejector pin 11 can accurately act on the insertion position of the photomask protective film 12. Through this design, the accuracy of the operation and the prying effect of the protective film are further improved.

[0060] In some embodiments, the first column 401, the second column 402, the third column 403 and the fourth column 404 are columns with external threads, and two bolts are threadedly connected to the first column 401, the second column 402, the third column 403 and the fourth column 404 respectively, one end of the first sliding rod 501 is slidably connected to the first column 401 and is between the two bolts, and the other end of the first sliding rod 501 is slidably connected to the second column 402 and is between the two bolts; one end of the second sliding rod 502 is slidably connected to the third column 403 and is between the two bolts, and the other end of the second sliding rod 502 is slidably connected to the fourth column 404 and is between the two bolts.

[0061] The column is designed as an external thread structure, and two bolts are arranged on the column to stabilize the slide rod at a specific height. This structure can achieve precise height control and keep the slide rod from sliding due to external force during the disassembly process, thereby ensuring the stability of the disassembly action. The design allows the slide rod height to be freely adjusted so that the needle head of the ejector pin 11 can be accurately inserted into the outer frame socket of the photomask protective film 12 to achieve precise alignment. In addition, the bidirectional positioning of the bolt can further limit the freedom of the slide rod, reduce the operational error caused by the displacement of the slide rod during disassembly, and thus increase the safety of the disassembly operation and the degree of protection of the photomask 2.

[0062] In some embodiments, reference Figure 5 The water pipe 103 is evenly laid in the storage table 1. At least three temperature sensors are fixed on the water pipe 103 between the first flow electric control valve 104 and the second flow electric control valve 105. They are defined as the second temperature sensor 106, the third temperature sensor 107 and the fourth temperature sensor 108 in order of water inlet. The second temperature sensor 106 is close to the first flow electric control valve 104, the third temperature sensor 107 is located at the midpoint of the length of the water pipe 103, and the fourth temperature sensor 108 is close to the second flow electric control valve 105.

[0063] Water pipes 103 are evenly laid inside the storage table 1, and multiple temperature sensors are set to effectively realize the precise control of the temperature of the storage table 1. By adjusting the water flow through the first flow electric control valve 104 and the second flow electric control valve 105, it is possible to ensure that the upper surface temperature of the storage table 1 is maintained at 5°C to 10°C, providing a low temperature environment for the adhesive, which helps to quickly cool and solidify the adhesive. The provision of multiple temperature sensors further improves the accuracy of temperature control, ensures the uniform distribution of the cooling effect, and avoids problems such as the difficulty of adhesive detachment due to uneven temperature. In some embodiments, the water pipe 103 can also be designed to be laid in a threaded shape, so that the cooling effect is more uniform.

[0064] In some embodiments, the coating area of ​​the Teflon coating is at least equal to the lower surface area of ​​the photomask 2 , and the thickness of the Teflon coating is between 10 μm and 15 μm.

[0065] The Teflon coating has good hydrophobicity and anti-corrosion properties. The surface of the storage table 1 will not be corroded by the coolant and the disassembly tools, which further improves the service life of the storage table 1. The Teflon coating is used to control its thickness between 10μm and 15μm, which effectively improves the conduction of cooling. The thickness of the Teflon coating should not be too thick, which will reduce the cooling effect, so the thickness is set between 10μm and 15μm.

[0066] In some embodiments, an insulation layer is pasted on the inner surfaces of the storage table 1 except the upper inner surface of the storage table 1, and the insulation layer is at least one of a rock wool insulation layer, a glass wool insulation layer, and a polyurethane foam insulation layer.

[0067] The insulation layer design effectively improves the temperature control effect of the cooling device, ensuring that the temperature inside the storage platform 1 can be continuously maintained in the low temperature range of 5°C to 10°C. The rock wool insulation layer, glass wool insulation layer or polyurethane foam insulation layer reduces heat loss during the cooling process, reduces energy consumption, and makes the overall temperature control of the storage platform 1 more accurate and efficient, which helps to improve the stability and cleanliness of the disassembly effect.

[0068] According to a second aspect of an embodiment of the present invention, a disassembly method for a photomask protective film disassembly device is provided, comprising:

[0069] Step 1: Place the photomask 2 with the photomask protective film 12 on the storage platform 1 , and fix the photomask 2 on the storage platform 1 with the limiting member 3 .

[0070] Step 2: Turn the bolts on the first column 401 , the second column 402 , the third column 403 and the fourth column 404 to adjust the heights of the first slide bar 501 and the second slide bar 502 so that the needle head of the ejector pin 11 on the rotating rod 9 can be inserted into the outer frame insertion hole of the photomask protective film 12 .

[0071] Step 3: Introduce water into the water pipe 103, maintain the opening of the first flow electric control valve 104 and the second flow electric control valve 105, and maintain the temperature value detected by the first temperature sensor between 5°C and 10°C.

[0072] The temperature of the water flowing into the water pipe 103 is between 5°C and 10°C.

[0073] Step 4: When the temperature value detected by the first temperature sensor is between 5°C and 10°C and maintained for at least 1 minute, hold the two handles 10 with both hands respectively, and slide the rotating rod 9 close to the photomask protective film 12 until the ejector pin 11 pushes against the outer frame insertion hole of the photomask protective film 12.

[0074] The temperature sensor can be received by a signal receiver designed outside the device, and after being processed by the control system, the opening of the first flow electronically controlled valve 104 and the second flow electronically controlled valve 105 is controlled to achieve water flow control. The control between the temperature sensor and the flow electronically controlled valve is combined using existing technical methods, such as using PID, i.e., "proportional-integral-differential" control algorithm.

[0075] Step 5: Press the two handles 10 to allow the ejector pins 11 to pry the outer frame insertion holes of the photomask protective film 12 , thereby driving the photomask protective film 12 to separate from the upper surface of the photomask plate 2 .

[0076] In some embodiments, the method of maintaining the temperature value detected by the first temperature sensor between 5° C. and 10° C. includes:

[0077] If the temperature value detected by the first temperature sensor is not within the range of 5°C to 10°C, extract the temperature values ​​of the second temperature sensor 106, the third temperature sensor 107 and the fourth temperature sensor 108;

[0078] If the temperature values ​​detected by the second temperature sensor 106 and the fourth temperature sensor 108 are both greater than 10°C, the opening of the first flow electronically controlled valve 104 is reduced and the opening of the second flow electronically controlled valve 105 is increased. When the temperature value detected by the third temperature sensor 107 is between 5°C and 10°C and is maintained for at least 1 minute, the opening of the second flow electronically controlled valve 105 is adjusted to be the same as the opening of the first flow electronically controlled valve 104.

[0079] If the temperature values ​​detected by the second temperature sensor 106 and the fourth temperature sensor 108 are both less than 5°C, the opening of the first flow electronically controlled valve 104 is increased and the opening of the second flow electronically controlled valve 105 is reduced. When the temperature value detected by the third temperature sensor 107 is between 5°C and 10°C and is maintained for at least 1 minute, the opening of the first flow electronically controlled valve 104 is adjusted to be the same as the opening of the second flow electronically controlled valve 105.

[0080] If the temperature value detected by the second temperature sensor 106 is greater than 10°C and the temperature value detected by the fourth temperature sensor 108 is less than 5°C, the openings of the first flow electronically controlled valve 104 and the second flow electronically controlled valve 105 are adjusted according to the temperature value detected by the third temperature sensor 107; if the temperature value detected by the third temperature sensor 107 is greater than 10°C, the opening of the first flow electronically controlled valve 104 is reduced and the opening of the second flow electronically controlled valve 105 is increased. When the temperature value detected by the third temperature sensor 107 is between 5°C and 5°C, the temperature of the first flow electronically controlled valve 104 and the second flow electronically controlled valve 105 are adjusted. ℃~10℃ and maintained for at least 1 minute, the opening of the second flow electric controlled valve 105 is adjusted to be the same as the opening of the first flow electric controlled valve 104; if the temperature value detected by the third temperature sensor 107 is less than 10℃, the opening of the first flow electric controlled valve 104 is increased and the opening of the second flow electric controlled valve 105 is reduced. When the temperature value detected by the third temperature sensor 107 is between 5℃~10℃ and maintained for at least 1 minute, the opening of the first flow electric controlled valve 104 is adjusted to be the same as the opening of the second flow electric controlled valve 105.

[0081] During the implementation of a method for removing a photomask protective film, a thermostat and a timer may be added for convenience and precise control. The thermostat is used to control the temperature in the water pipe 103 to maintain at 5°C to 10°C, and the timer is used to detect the time the water temperature is maintained.

[0082] After the removal of the photomask protective film 12 is completed using a removal method using a photomask protective film removal device, it is finally cleaned without sulfuric acid.

[0083] This method is compared with heating by a heating plate and direct removal by a removal tool. The heating temperature of the heating plate is between 50°C and 150°C. The coverage area of ​​the adhesive remaining on the photomask 2 or the area of ​​the damaged photomask 2 during the removal process is set as A, and the total area of ​​the photomask 2 is set as B. The value of A / B is used as the experimental result data. A total of three experiments are conducted. In each experiment, 20 samples are randomly selected for each method, and the A / B value is averaged and calculated in percentage. The smaller the A / B value, the better the removal effect, the better the obtained photomask 2, and the more convenient the subsequent processing. The table of the comparative experiment is shown below:

[0084] Table 1 Comparison of photomask protective film removal effects

[0085]

[0086] It can be seen from the above table that the method of the embodiment of the present invention has the best removal effect.

[0087] Reference Figure 6-7 , Figure 6 The figure shows the situation on the photomask after the heating method of the heating plate is used in the prior art. Figure 6 In the middle, the dotted line shows that there is adhesive residue on the photomask; Figure 7 In the embodiment of the present invention, no adhesive residue will remain on the photomask obtained by the method of the embodiment of the present invention. Figure 8-Figure 9 ,exist Figure 8 There are yellow dots in the green frame at the lower left corner, which are the adhesive splashed on the photomask after the heating method of the heating plate is adopted in the prior art; Fig. 9 The photomask obtained by the method of the embodiment of the present invention will not be sprayed with adhesive.

[0088] In summary, the present invention provides a photomask protective film removal device and method, which uses a cooling device to cure the adhesive at low temperature, thereby effectively reducing the adhesion, and combined with a precise mechanical removal component design, the photomask protective film 12 can be easily and safely peeled off in a low temperature environment, which not only avoids the pollution problem during heating and removal, but also greatly reduces the risk of damage to the photomask 2. This design provides the excellent effects of precise temperature control, convenient removal, and protection of the photomask 2.

[0089] Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. A person with ordinary knowledge in the technical field to which the present invention belongs may make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the definition of the claims.

Claims

1. A photomask protective film removal device, characterized in that: The utility model comprises a storage table, the upper surface of which is fixed with a limiting member, the limiting member is used to fix the photomask on the upper surface of the storage table; the upper surface of the storage table is coated with a Teflon coating; the upper surface of the storage table is also fixed with a disassembly component, when the photomask is fixed on the storage table, the disassembly component is used to separate the photomask protective film adhered to the upper surface of the photomask; the upper surface of the storage table is also fixed with a first temperature sensor; a cooling device is installed in the storage table, the cooling device comprises a water pipe, when the water pipe is passed through the water pipe, it is used to maintain the temperature of the upper surface of the storage table at 5°C to 10°C; the water inlet of the water pipe is located on one side of the storage table, and the water outlet of the water pipe is located on the other side opposite to the water inlet; the end of the water pipe close to the water inlet is air-tightly connected to the first flow electric control valve, and the end of the water pipe close to the water outlet is air-tightly connected to the second flow electric control valve.

2. The photomask protective film removal device according to claim 1, characterized in that: The limiting member includes a fixed end fixed to the upper surface of the storage platform, and the limiting member also includes a rotating end rotatably connected to the fixed end, a blocking piece is fixed on the rotating end, and when the photomask is placed on the storage platform, the rotating end is used to rotate the blocking piece to cover the upper surface of the photomask.

3. The photomask protective film removal device according to claim 2, characterized in that: The disassembly assembly includes four columns fixed on the upper surface of the storage table, and the four columns are defined as a first column, a second column, a third column and a fourth column in a counterclockwise direction; A first sliding rod is connected between the first column and the second column, a first fixing rod is slidably connected to an end of the first sliding rod close to the first column, a first rotating member is fixed to an end of the first fixing rod away from the first sliding rod, a second fixing rod is slidably connected to an end of the first sliding rod close to the second column, and a second rotating member is fixed to an end of the second fixing rod away from the first sliding rod; A second sliding rod is connected between the third column and the fourth column, a third fixed rod is slidably connected to one end of the second sliding rod close to the third column, a third rotating member is fixed to one end of the third fixed rod away from the second sliding rod, a fourth fixed rod is slidably connected to one end of the second sliding rod close to the fourth column, and a fourth rotating member is fixed to one end of the fourth fixed rod away from the second sliding rod; A first prying member is rotatably connected between the first rotating member and the fourth rotating member, and the first prying member includes a rotating rod, a handle and a ejector pin, one end of the rotating rod is rotatably connected to the first rotating member, and the other end of the rotating rod is rotatably connected to the second rotating member; there are two ejector pins and both are fixed on the rotating rod, the needle heads of the ejector pins face the photomask protective film, and the arrangement positions of the ejector pins correspond one to one with the outer frame insertion holes of the photomask protective film; the handle is fixed on the rotating rod and faces away from the needle heads of the ejector pins, and when the needle heads of the ejector pins are inserted into the outer frame insertion holes of the photomask protective film, the handle is used to separate the photomask protective film from the photomask plate after being pressed; a second prying member is rotatably connected between the second rotating member and the third rotating member, and the first prying member and the second prying member have the same structure.

4. The photomask protective film removal device according to claim 3, characterized in that: Two limit blocks are fixed on the first sliding rod, one of which is between the first column and the first fixed rod, and the other is between the second column and the second fixed rod; two limit blocks are also fixed on the second sliding rod, one of which is between the third column and the third fixed rod, and the other is between the fourth column and the fourth fixed rod.

5. The photomask protective film removal device according to claim 4, characterized in that: The first column, the second column, the third column and the fourth column are columns with external threads, and two bolts are threadedly connected to the first column, the second column, the third column and the fourth column respectively, one end of the first slide rod is slidably connected to the first column and between the two bolts, and the other end of the first slide rod is slidably connected to the second column and between the two bolts; one end of the second slide rod is slidably connected to the third column and between the two bolts, and the other end of the second slide rod is slidably connected to the fourth column and between the two bolts.

6. The photomask protective film removal device according to claim 5, characterized in that: The water pipe is evenly laid in the storage table, and at least three temperature sensors are fixed on the water pipe between the first flow electric control valve and the second flow electric control valve, which are defined as the second temperature sensor, the third temperature sensor and the fourth temperature sensor in order of water inlet. The second temperature sensor is close to the first flow electric control valve, the third temperature sensor is located at the midpoint of the length of the water pipe, and the fourth temperature sensor is close to the second flow electric control valve.

7. The photomask protective film removal device according to claim 1, characterized in that: The coating area of ​​the Teflon coating is at least equal to the lower surface area of ​​the photomask, and the thickness of the Teflon coating is between 10 μm and 15 μm.

8. The photomask protective film removal device according to claim 1, characterized in that: A thermal insulation layer is pasted on the inner surfaces of the storage table except the upper inner surface of the storage table. The thermal insulation layer is at least one of a rock wool thermal insulation layer, a glass wool thermal insulation layer, and a polyurethane foam thermal insulation layer.

9. A disassembly method for a photomask protective film disassembly device according to claim 6, characterized in that: include: Step 1: Place the photomask with the photomask protective film on a storage table, and fix the photomask on the storage table with a stopper: Step 2: Rotate the bolts on the first column, the second column, the third column and the fourth column to adjust the height of the first slide bar and the second slide bar so that the needle head of the ejector pin on the rotating rod can be inserted into the outer frame insertion hole of the photomask protective film; Step 3: introducing water into the water pipe, maintaining the opening of the first flow electronically controlled valve and the second flow electronically controlled valve, and maintaining the temperature value detected by the first temperature sensor between 5° C. and 10° C.; Step 4: When the temperature value detected by the first temperature sensor is between 5°C and 10°C and maintained for at least 1 minute, hold the two handles with both hands respectively, and slide the rotating rod close to the photomask protective film until the ejector pin pushes against the outer frame socket of the photomask protective film: Step 5: Press the two handles to allow the ejector pins to pry the outer frame insertion holes of the photomask protection film, thereby driving the photomask protection film to separate from the upper surface of the photomask.

10. The method for removing a photomask protective film according to claim 9, characterized in that: The method for maintaining the temperature value detected by the first temperature sensor between 5°C and 10°C comprises: If the temperature value detected by the first temperature sensor is not within the range of 5°C to 10°C, extract the temperature values ​​of the second temperature sensor, the third temperature sensor and the fourth temperature sensor; If the temperature values ​​detected by the second temperature sensor and the fourth temperature sensor are both greater than 10°C, the opening of the first flow electronically controlled valve is reduced and the opening of the second flow electronically controlled valve is increased; when the temperature value detected by the third temperature sensor is between 5°C and 10°C and is maintained for at least 1 minute, the opening of the second flow electronically controlled valve is adjusted to be the same as the opening of the first flow electronically controlled valve; If the temperature values ​​detected by the second temperature sensor and the fourth temperature sensor are both less than 5°C, the opening of the first flow electronically controlled valve is increased and the opening of the second flow electronically controlled valve is reduced; when the temperature value detected by the third temperature sensor is between 5°C and 10°C and is maintained for at least 1 minute, the opening of the first flow electronically controlled valve is adjusted to be the same as the opening of the second flow electronically controlled valve; If the temperature value detected by the second temperature sensor is greater than 10°C and the temperature value detected by the fourth temperature sensor is less than 5°C, the openings of the first flow electronically controlled valve and the second flow electronically controlled valve are adjusted according to the temperature value detected by the third temperature sensor; if the temperature value detected by the third temperature sensor is greater than 10°C, the opening of the first flow electronically controlled valve is reduced and the opening of the second flow electronically controlled valve is increased. When the temperature value detected by the third temperature sensor is between 5°C and 10°C and is maintained for at least 1 minute, the opening of the second flow electronically controlled valve is adjusted to be the same as the opening of the first flow electronically controlled valve; if the temperature value detected by the third temperature sensor is less than 10°C, the opening of the first flow electronically controlled valve is increased and the opening of the second flow electronically controlled valve is reduced. When the temperature value detected by the third temperature sensor is between 5°C and 10°C and is maintained for at least 1 minute, the opening of the first flow electronically controlled valve is adjusted to be the same as the opening of the second flow electronically controlled valve.

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