Wireless passive pressure sensor

By installing the throttling strain capacitor assembly and sensor inductor on the inner wall of the pipeline and coupling it with excitation inductor, wireless reading of the resonant frequency is achieved to detect the pressure difference, which solves the weak anti-interference ability and inconvenient installation of the pressure difference detection device in the prior art. The problem is that wireless and passive pressure monitoring is realized, which is suitable for continuous and reliable monitoring of industrial environments.

CN119147144APending Publication Date: 2024-12-17CHINA SOUTHERN POWER GRID COMPANY
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Patent Information

Application Number
CN202411409367.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-10-10
Publication Date
2024-12-17

AI Technical Summary

Technical Problem

The existing pressure difference detection device requires wired reading, which has problems such as weak anti-interference ability and inconvenient installation, especially in industrial environments, which are difficult to achieve wireless and passive pressure monitoring.

Method used

A wireless passive pressure sensor is designed to enable wireless reading of the resonant frequency to detect the pressure difference by installing the throttling strain capacitor assembly and sensor inductor on the inner wall of the pipe and coupling it with excitation inductor, eliminating the need for built-in power supply. Simplifies the installation process and enhances anti-interference capabilities.

Benefits of technology

It realizes wireless monitoring of internal pressure or pressure difference of pipeline without the need for built-in power, simplifies the installation process and improves the anti-interference ability of the system. It is especially suitable for industrial environments such as power plants and is difficult to contact. Continuously reliable monitoring of location.

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Abstract

The invention relates to a wireless passive pressure sensor. The wireless passive pressure sensor comprises a throttling strain capacitor assembly, a sensor inductor and an excitation inductor. The throttling strain capacitor assembly is fixedly installed on the inner wall of the pipeline and used for reducing the cross-sectional area of fluid passing through the pipeline and detecting the pressure difference between the two sides of the throttling strain capacitor assembly. The sensor inductor is wound on the inner wall of the pipeline and is electrically connected with the throttling strain capacitor assembly; the excitation inductor is wound around the outer wall of the pipeline and is inductively coupled with the sensor. By the adoption of the sensor, wireless monitoring of the pressure or the pressure difference in the pipeline can be achieved under the condition that a built-in power source is not needed.
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Description

Technical Field

[0001] The present application relates to the technical field of pressure detection, and in particular to a wireless passive pressure sensor. Background Art

[0002] The detection of differential pressure plays an important role in production and life. The accuracy, stability, environmental adaptability and intelligence level of differential pressure sensors have a wide impact on the development of various industries.

[0003] At present, the commonly used pressure difference detection methods include: capacitive, resistive and resonant, among which capacitive is the most widely used detection method.

[0004] The existing differential pressure detection device needs to use a wired readout method to connect the differential pressure detection device to an external readout device by wire, which has problems such as weak anti-interference ability and inconvenient installation. Therefore, a wireless and passive measurement method is needed. Summary of the invention

[0005] Based on this, it is necessary to provide a wireless passive pressure sensor to address the above technical problems.

[0006] In a first aspect, the present application provides a wireless passive pressure sensor, comprising:

[0007] The throttling strain capacitor assembly is fixedly installed on the inner wall of the pipeline, used to reduce the cross-sectional area of ​​the fluid passing through the pipeline and detect the pressure difference on both sides of the throttling strain capacitor assembly;

[0008] The sensor inductor is wound around the inner wall of the pipe and is electrically connected to the throttling strain capacitor assembly;

[0009] The excitation inductor is wound around the outer wall of the pipe and inductively coupled to the sensor.

[0010] In one embodiment, the wireless passive pressure sensor further comprises:

[0011] The pipeline, the throttling strain capacitor assembly, the sensor inductor and the excitation inductor are installed on the pipeline.

[0012] In one embodiment, the throttling strain capacitor assembly includes:

[0013] The throttle plate is fixedly mounted on the inner wall of the pipeline, and has a throttle hole on the throttle plate, which is used to reduce the cross-sectional area of ​​the fluid passing through the pipeline;

[0014] The strain sensitive capacitor is fixedly mounted on the throttle plate and electrically connected to the sensor inductor to detect the pressure difference on both sides of the throttle plate.

[0015] In one embodiment, the strain sensitive capacitor comprises:

[0016] A sealing shell, wherein the sides of the sealing shell facing both sides of the throttle plate are respectively provided with first through holes;

[0017] A fixed base is installed on the inner wall of the sealed housing, and the fixed base has a second through hole;

[0018] A substrate layer is installed on a fixed base, the substrate layer has a sensitive plate, the sensitive plate has a first electrode, and the first electrode is electrically connected to the sensor inductor;

[0019] An oxide layer is disposed on a side of the substrate layer away from the fixed base;

[0020] The device layer is arranged on a side of the oxide layer away from the substrate layer, and has a vent hole and a second electrode, and the second electrode is electrically connected to the sensor inductor;

[0021] There is a gap between the device layer and the substrate layer, and the gap is formed in the oxide layer.

[0022] In one embodiment, the shapes of the throttle plate and the sensor inductor are the same as the inner wall of the pipe, and the shape of the excitation inductor is the same as the outer wall of the pipe.

[0023] In a second aspect, the present application further provides a pressure difference detection method, which is applied to the wireless passive pressure sensor in the above embodiment, and the method comprises:

[0024] Obtaining the resonant frequency of the wireless passive pressure sensor;

[0025] Based on the change in resonant frequency, the pressure difference is determined.

[0026] In a third aspect, the present application also provides a pressure difference detection device, the device comprising:

[0027] A resonance frequency acquisition module, used to acquire the resonance frequency of the wireless passive pressure sensor;

[0028] The pressure difference determination module is used to determine the pressure difference according to the change of the resonant frequency.

[0029] In a fourth aspect, the present application further provides a computer device, including a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of the method in the above embodiment when executing the computer program.

[0030] In a fifth aspect, the present application also provides a computer-readable storage medium on which a computer program is stored, and when the computer program is executed by a processor, the steps of the method in the above embodiment are implemented.

[0031] In a sixth aspect, the present application also provides a computer program product, including a computer program, which implements the steps of the method in the above embodiment when the computer program is executed by a processor.

[0032] The above wireless passive pressure sensor has at least the following beneficial effects:

[0033] It can realize wireless monitoring of internal pressure or pressure difference in pipelines without the need for an internal power supply, which simplifies the installation process and enhances the system's anti-interference ability. It is particularly suitable for continuous and reliable pressure monitoring in industrial environments such as power plants where maintenance requirements are high and access is difficult. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the conventional technology, the drawings required for use in the embodiments or the conventional technology descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0035] FIG1 is a schematic diagram of the structure of a wireless passive pressure sensor in one embodiment;

[0036] FIG2 is a schematic diagram of a cross-sectional structure of a strain sensitive capacitor in one embodiment;

[0037] FIG3 is a schematic flow chart of a pressure difference detection method in one embodiment;

[0038] FIG. 4 is a structural block diagram of a pressure difference detection device in one embodiment. DETAILED DESCRIPTION

[0039] In order to facilitate understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Embodiments of the present application are provided in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0040] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0041] It can be understood that the terms "first", "second", etc. used in the present application can be used in this article to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish the first element from another element.

[0042] Spatially relative terms such as "under," "beneath," "below," "under," "above," "above," and the like may be used herein to describe the relationship of an element or feature shown in the figures to other elements or features. It should be understood that, in addition to the orientations shown in the figures, spatially relative terms also include different orientations of the device in use and operation. For example, if the device in the accompanying drawings is flipped, an element or feature described as "under other elements" or "under it" or "under it" will be oriented as being "above" the other elements or features. Thus, the exemplary terms "under" and "under" may include both upper and lower orientations. In addition, the device may also include additional orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptors used herein are interpreted accordingly.

[0043] It should be noted that when an element is considered to be "connected" to another element, it can be directly connected to the other element, or connected to the other element through an intermediate element. In addition, the "connection" in the following embodiments should be understood as "electrical connection", "communication connection", etc. if there is transmission of electrical signals or data between the connected objects.

[0044] When used herein, the singular forms "a", "an", and "said / the" may also include plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "include / comprise" or "have" etc. specify the presence of stated features, wholes, steps, operations, components, parts or combinations thereof, but do not exclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts or combinations thereof.

[0045] In an exemplary embodiment, as shown in FIG1 , the present application provides a wireless passive pressure sensor, including a throttling strain capacitor assembly 2, a sensor inductor 4 and an excitation inductor 6. The throttling strain capacitor assembly 2 is fixedly mounted on the inner wall of the pipeline 8, and is used to reduce the cross-sectional area of ​​the fluid passing through the pipeline 8, and detect the pressure difference on both sides of the throttling strain capacitor assembly 2; the sensor inductor 4 is wound around the inner wall of the pipeline 8, and is electrically connected to the throttling strain capacitor assembly 2; the excitation inductor 6 is wound around the outer wall of the pipeline 8, and is coupled to the sensor inductor 4.

[0046] Among them, the throttling strain capacitor assembly 2 is a device, which is installed on the inner wall of the pipeline 8. Its function is to form a narrow part by changing the channel area when the fluid passes through the pipeline 8, and then it can measure the pressure difference on both sides of the narrow part, thereby reflecting the pressure change in the pipeline 8. The sensor inductor 4 is a coil arranged around the inner wall of the pipeline 8. It is connected to the throttling strain capacitor assembly 2 and can convert the pressure change into the change of the electrical signal. The excitation inductor 6 is another coil, which is arranged outside the pipeline 8 and mutually inductive with the sensor inductor 4. When the external device can obtain the electrical signal change information from the sensor inductor 4 through the excitation inductor 6, the wireless monitoring of the internal pressure of the pipeline 8 is realized. The above-mentioned components are all installed in a pipeline 8 structure, and the pipeline 8 can refer to the pipeline 8 of the power plant. The pipeline 8 not only provides a channel for the flow of fluid, but also serves as a basic structure for integrating the above-mentioned electronic components to ensure that they can work normally in the fluid environment.

[0047] For example, as shown in FIG1 , during the assembly of the pipeline 8, the throttling strain capacitor assembly 2, the sensor inductor 4 and the excitation inductor 6 can be directly installed in the pipeline 8. When the fluid passes through the fluid pipeline 8 with the throttling strain capacitor assembly 2 installed, the throttling strain capacitor assembly 2 will suddenly reduce the cross section of the pipeline 8 through which the fluid passes, and a pressure difference will be formed on both sides of the throttling strain capacitor assembly 2 (i.e., the fluid on the inflow side and the outflow side of the throttling strain capacitor assembly 2). The pressure difference will cause the capacitance value of the throttling strain capacitor assembly 2 to change. The throttling strain capacitor assembly 2 and the sensor inductor 4 form an LC resonant circuit. When the capacitance value changes, the resonant frequency of the entire circuit also changes accordingly. At this time, the resonant frequency change in the LC resonant circuit can be wirelessly read by the excitation inductor 6 installed on the outer wall of the pipeline 8, and the differential pressure on both sides of the throttling hole S1 in the pipeline 8 can be calculated accordingly. In this way, without any power supply, the detection of the differential pressure inside the pipeline 8 can be achieved only by wireless reading of the external excitation inductor 6.

[0048] The above-mentioned wireless passive pressure sensor can realize wireless monitoring of the internal pressure or pressure difference of the pipeline without the need for a built-in power supply, which simplifies the installation process and enhances the anti-interference ability of the system. It is particularly suitable for continuous and reliable pressure monitoring in industrial environments such as power plants where maintenance requirements are high and difficult to access.

[0049] In addition, for the convenience of installation, in an exemplary embodiment, as shown in FIG1 , the wireless passive pressure sensor further includes a pipeline 8 . The throttling strain capacitor assembly 2 , the sensor inductor 4 and the excitation inductor 6 are installed in the pipeline 8 .

[0050] The pipeline 8 may be a pipeline 8 with a structure such as an elbow or a tee.

[0051] For example, for application scenarios such as power plants, in order to facilitate transportation and installation, in the present embodiment, a pipeline 8 is provided, in which the throttling strain capacitor assembly 2, the sensor inductor 4 and the excitation inductor 6 can be pre-installed in the pipeline 8 having structures such as elbows and tees. During the assembly of the pipeline 8, it is only necessary to connect the elbows or tees equipped with the throttling strain capacitor assembly 2, the sensor inductor 4 and the excitation inductor 6 to the main body of the pipeline 8 to achieve wireless monitoring of the internal pressure or pressure difference of the pipeline 8.

[0052] In this embodiment, the wireless passive pressure sensor provided greatly simplifies the installation process in application scenarios such as power plants by pre-integrating the throttling strain capacitor assembly, sensor inductance and excitation inductance into pipeline components such as elbows or tees. This not only improves the installation efficiency, but also ensures the rapid deployment and seamless integration of the sensor, thereby realizing convenient and reliable wireless monitoring of the internal pressure or pressure difference of the pipeline.

[0053] In an exemplary embodiment, as shown in FIG1 , the throttling strain capacitor assembly 2 includes a throttling plate 22 and a strain sensitive capacitor 24. The throttling plate 22 is fixedly mounted on the inner wall of the pipeline 8, and has a throttling hole S1 on the throttling plate 22, which is used to reduce the cross-sectional area of ​​the fluid passing through the pipeline 8; the strain sensitive capacitor 24 is fixedly mounted on the throttling plate 22, and is electrically connected to the sensor inductor 4, and is used to detect the pressure difference on both sides of the throttling plate 22.

[0054] For example, when the fluid passes through the throttle hole S1, a pressure difference is generated on both sides of the throttle plate 22, causing the capacitance value of the strain sensitive capacitor 24 to change accordingly. The change is captured by the sensor inductor 4 and transmitted to the external excitation inductor 6 through the near-field coupling of the electromagnetic field. The external device calculates the pressure difference on both sides of the throttle hole S1 in the fluid pipeline 8 by reading the resonant frequency change of the LC resonant circuit composed of the sensor inductor 4 and the strain sensitive capacitor 24. The whole process does not require external power supply, and wireless passive pressure detection is realized.

[0055] In this embodiment, by integrating the throttle plate and the strain-sensitive capacitor inside the pipeline and utilizing the near-field coupling between the sensor inductor and the external excitation inductor, non-contact, wireless monitoring of the fluid pressure difference in the pipeline is achieved, which not only eliminates the need for a wired power supply and simplifies the installation and maintenance process, but also improves the reliability of the system, especially in difficult-to-access or harsh working environments, such as the high-temperature and high-pressure pipeline system of a power plant.

[0056] In an exemplary embodiment, as shown in FIG. 2 , the strain sensitive capacitor 24 includes: a sealed housing 241 , a fixed base 242 , a substrate layer 243 , an oxide layer 244 and a device layer 245 . The side surfaces of the sealed shell 241 facing both sides of the throttle plate 22 are respectively provided with first through holes A1; the fixed base 242 is installed on the inner wall of the sealed shell 241, and the fixed base 242 has a second through hole A2; the substrate layer 243 is installed on the fixed base 242, and the substrate layer 243 has a sensitive electrode B, and the sensitive electrode B has a first electrode D1, and the first electrode D1 is electrically connected to the sensor inductor 4; the oxide layer 244 is arranged on the side of the substrate layer 243 away from the fixed base 242; the device layer 245 is arranged on the side of the oxide layer 244 away from the substrate layer 243, and the device layer 245 has a vent hole S2 and a second electrode D2, and the second electrode D2 is electrically connected to the sensor inductor 4; wherein, there is a gap between the device layer 245 and the substrate layer 243, and is formed in the oxide layer 244.

[0057] Exemplarily, the strain sensitive capacitor 24 includes a sealed housing 241, a fixed substrate 242, a substrate layer 243, an oxide layer 244 and a device layer 245. The sealed housing 241 is fixed on the throttle plate 22, and is provided with a first through hole A1 on the side thereof facing both sides of the throttle hole S1; the fixed substrate 242 is mounted on the inner wall of the sealed housing 241, and has a second through hole A2; the substrate layer 243 is mounted on the fixed substrate 242, and is provided with a sensitive electrode plate B, wherein the sensitive electrode plate B can be obtained by thinning a portion of the substrate layer 243, and its shape can be square or circular, and the sensitive electrode plate B also has a first electrode D1 connected to the sensor inductor 4; the oxide layer 244 is located on the side of the substrate layer 243 away from the fixed substrate 242; the device layer 245 is located on the side of the oxide layer 244 away from the substrate layer 243, and the device layer 245 has a vent hole S2 and a second electrode D2 connected to the sensor inductor 4. There is a gap between the device layer 245 and the substrate layer 243, and a certain structure is formed at the oxide layer 244. When the fluid passes through the throttle hole S1 and generates a pressure difference on both sides, the sensitive plate B will be deformed by the stress, changing the capacitance value between the device layer 245 and the device layer 245, thereby changing the resonant frequency of the LC resonant circuit. The frequency change can be wirelessly read through the excitation inductor 6, and finally the pressure difference on both sides of the throttle hole S1 is calculated.

[0058] In this embodiment, the designed multi-layer structure, including a sealed housing, a fixed substrate, a substrate layer, an oxide layer and a device layer, is used to achieve accurate detection of the pressure difference in the fluid pipeline. Not only can the pressure difference be effectively converted into a change in the LC resonant frequency that can be read wirelessly, but the design of the sensitive plate (such as obtained by thinning a portion of the substrate layer) ensures the high sensitivity and good linearity of the sensor, so that the sensor can still accurately measure the pressure difference on both sides of the throttle hole in the fluid pipeline without the need for an external power supply, thereby providing reliable data support under complex working conditions.

[0059] In an exemplary embodiment, the shapes of the throttle plate 22 and the sensor inductor 4 are the same as the inner wall of the pipe 8 , and the shape of the excitation inductor 6 is the same as the outer wall of the pipe 8 .

[0060] In this embodiment, by matching the shapes of the throttle plate and the sensor inductor with the inner wall of the pipe, and by aligning the shape of the excitation inductor with the outer wall of the pipe, a high degree of integration and seamless connection between the sensor assembly and the pipe structure is achieved, which not only optimizes the fluid dynamics performance and reduces the disturbance of the fluid flow, but also ensures the stability and measurement accuracy of the sensor under various operating conditions, while simplifying the installation process and facilitating large-scale deployment in industrial environments.

[0061] In an exemplary embodiment, as shown in FIG3 , the present application further provides a pressure difference detection method, which is applied to the wireless passive pressure sensor in the above embodiment, and the method includes:

[0062] S302, obtaining the resonant frequency of the wireless passive pressure sensor;

[0063] S304, determining the pressure difference according to the change of the resonant frequency.

[0064] In this embodiment, the resonant frequency of the wireless passive pressure sensor under different pressure difference conditions is obtained, and then the specific pressure difference on both sides of the throttle hole in the fluid pipeline is determined based on the measured resonant frequency change. In this process, the pressure difference generated when the fluid passes through the throttle hole will cause the capacitance of the strain sensitive capacitor to change, thereby affecting the resonant frequency of the LC resonant circuit; by wirelessly reading these frequency changes through an external excitation inductor, the actual pressure difference value on both sides of the throttle hole can be calculated.

[0065] It should be understood that, although the various steps in the flowchart of Fig. 3 are displayed in sequence according to the indication of the arrows, these steps are not necessarily executed in sequence according to the order indicated by the arrows. Unless there is a clear explanation in this article, the execution of these steps is not strictly limited in order, and these steps can be executed in other orders. Moreover, at least a part of the steps in Fig. 3 may include multiple steps or multiple stages, and these steps or stages are not necessarily executed at the same time, but can be executed at different times, and the execution order of these steps or stages is not necessarily to be carried out in sequence, but can be executed in turn or alternately with other steps or at least a part of the steps or stages in other steps.

[0066] In one embodiment, as shown in FIG4 , a pressure difference detection device is provided, including: a resonance frequency acquisition module 402 and a pressure difference determination module 404, wherein:

[0067] The resonance frequency acquisition module 402 is used to acquire the resonance frequency of the wireless passive pressure sensor.

[0068] The pressure difference determination module 404 is used to determine the pressure difference according to the change of the resonant frequency.

[0069] For the specific limitations of the pressure differential detection control device, please refer to the limitations of the pressure differential detection method above, which will not be repeated here. Each module in the above-mentioned pressure differential detection device can be implemented in whole or in part by software, hardware and a combination thereof. The above-mentioned modules can be embedded in or independent of the processor in the computer device in the form of hardware, or can be stored in the memory in the computer device in the form of software, so that the processor can call and execute the operations corresponding to the above modules. It should be noted that the division of modules in the embodiment of the present application is schematic and is only a logical function division. There may be other division methods in actual implementation.

[0070] In one embodiment, a computer device is provided, including a memory and a processor, wherein a computer program is stored in the memory, and the processor implements the steps in the above-mentioned method embodiments when executing the computer program.

[0071] In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the steps in the above-mentioned method embodiments are implemented.

[0072] Those of ordinary skill in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media used in the embodiments provided in this application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), tape, floppy disk, flash memory or optical memory, etc. Volatile memory can include random access memory (RAM) or external cache memory. As an illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM).

[0073] In the description of this specification, the description with reference to the terms "some embodiments", "other embodiments", "ideal embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example.

[0074] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0075] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. A wireless passive pressure sensor, characterized in that: include: A throttling strain capacitor assembly is fixedly mounted on the inner wall of the pipeline, and is used to reduce the cross-sectional area of ​​the fluid passing through the pipeline and detect the pressure difference on both sides of the throttling strain capacitor assembly; A sensor inductor, wound around the inner wall of the pipe and electrically connected to the throttling strain capacitor assembly; The excitation inductor is wound around the outer wall of the pipe and is inductively coupled with the sensor.

2. The wireless passive pressure sensor according to claim 1, characterized in that: Also includes: The pipeline is provided with the throttling strain capacitor assembly, the sensor inductor and the excitation inductor installed on the pipeline.

3. The wireless passive pressure sensor according to claim 1, characterized in that: The throttling strain capacitor assembly comprises: A throttle plate, fixedly mounted on the inner wall of the pipeline, the throttle plate having a throttle hole for reducing the cross-sectional area of ​​the fluid passing through the pipeline; A strain sensitive capacitor is fixedly mounted on the throttle plate and electrically connected to the sensor inductor for detecting the pressure difference between the two sides of the throttle plate.

4. The wireless passive pressure sensor according to claim 3, characterized in that: The strain sensitive capacitor comprises: A sealing shell, wherein the sides of the sealing shell facing both sides of the throttle plate are respectively provided with first through holes; A fixed base, mounted on the inner wall of the sealed housing, wherein the fixed base has a second through hole; A substrate layer, mounted on the fixed base, the substrate layer having a sensitive plate, the sensitive plate having a first electrode, the first electrode being electrically connected to the sensor inductor; An oxide layer, disposed on a side of the substrate layer away from the fixed base; A device layer, arranged on a side of the oxide layer away from the substrate layer, the device layer having a vent hole and a second electrode, the second electrode being electrically connected to the sensor inductor; There is a gap between the device layer and the substrate layer, and the gap is formed in the oxide layer.

5. The wireless passive pressure sensor according to any one of claims 3 to 4, characterized in that: The shapes of the throttle plate and the sensor inductor are the same as the shape of the inner wall of the pipeline, and the shape of the excitation inductor is the same as the shape of the outer wall of the pipeline.

6. A pressure difference detection method, characterized in that: Applied to the wireless passive pressure sensor according to any one of claims 1 to 5, the method comprises: Acquiring the resonant frequency of the wireless passive pressure sensor; Based on the change in the resonant frequency, a pressure difference is determined.

7. A pressure difference detection device, characterized in that: The device comprises: A resonance frequency acquisition module, used to acquire the resonance frequency of the wireless passive pressure sensor; The pressure difference determination module is used to determine the pressure difference according to the change of the resonant frequency.

8. A computer device comprising a memory and a processor, wherein the memory stores a computer program, wherein: When the processor executes the computer program, the steps of the method according to claim 6 are implemented.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the method according to claim 6 are implemented.

10. A computer program product, comprising a computer program, characterized in that When the computer program is executed by a processor, the steps of the method according to claim 6 are implemented.