Adjusting device and optical detection device

Abstract

The invention relates to light source adjustment, in particular to an adjusting device and an optical detection device. An adjusting device comprises: a base; the translation adjusting assembly comprises a translation base and a first optical element; the translation base is configured to move on the base in a translation mode, and the first optical element is arranged on the translation base; the first optical element has optical characteristic changes in the translation direction of the translation base and is used for cutting into an optical path of the adjusting device according to a translation mode, and the translation direction intersects with the optical path direction of the adjusting device. The number of the translation adjusting assemblies is at least two, and the first optical elements in the translation adjusting assemblies are arranged side by side in the light path direction so that different optical characteristics can be formed through combination when the first optical elements conduct relative translation. Different optical characteristics can be formed through combination, so that richer optical adjustment functions are achieved, the first optical element in the translation form can avoid occupying more space, and the structure is compact.

Description

Technical Field

[0001] The invention relates to light source adjustment, and in particular to an adjustment device and an optical detection device. Background Art

[0002] Existing optical detection devices usually include components such as light sources, light source adjustment components, optical path equipment and detection units. For wafers in the semiconductor industry, in order to meet the high-precision process requirements of wafers, it is often necessary to first adjust the orientation and optical characteristics of the detection light emitted by the light source by the light source adjustment component to change the incident angle and transmission performance of the detection light to the optical path equipment, and then the optical path equipment further processes the detection light, and finally sends it to the detection unit to detect the object to be detected.

[0003] However, the existing light source adjustment component can only achieve individual levels of attenuation and filtering for adjusting the optical characteristics of the detection light, and cannot perform more optical adjustment functions, resulting in limited application scenarios of the light source adjustment component. Summary of the invention

[0004] The main technical problem solved by the present invention is that the optical adjustment method of the existing light source adjustment device cannot meet the requirements of wider optical adjustment.

[0005] In a first aspect, the present invention provides a regulating device.

[0006] A regulating device, comprising:

[0007] Pedestal;

[0008] and a translation adjustment assembly, the translation adjustment assembly comprising a translation base and a first optical element; the translation base is configured to move on the base in a translation manner, and the first optical element is arranged on the translation base; the first optical element has an optical property change along the translation direction of the translation base, and is used to cut into the optical path of the adjustment device in a translation manner, and the translation direction intersects with the optical path direction of the adjustment device;

[0009] The translation adjustment assembly is provided with at least two groups, and the first optical elements in each group of the translation adjustment assembly are arranged side by side along the optical path direction, so as to form different optical characteristics when the first optical elements are relatively translated.

[0010] In a technical solution, the first optical elements in at least two groups of the translation adjustment components are configured as linear gradient filters, and the filtering capability ranges of the linear gradient filters are different, and there is a partial overlap in the filtering capability ranges.

[0011] In a technical solution, the linear gradient filter configured in at least one group of translation adjustment components is a short-pass filter, and the linear gradient filter configured in at least one group of translation adjustment components is a long-pass filter.

[0012] In a technical solution, the translation adjustment assembly is provided with two groups, the translation bases in the two groups of the translation adjustment assembly are arranged side by side, and the two first optical elements in the two groups of the translation adjustment assembly are arranged on the side where the two translation bases are close to each other.

[0013] In a technical solution, a rack structure is provided on the translation base, and the translation adjustment assembly further includes a gear and a gear drive motor, and the gear drive motor is connected to the gear to drive the translation base to translate.

[0014] In a technical solution, it also includes a slide rail and a slider, wherein the slide rail is fixed on the base, the slider is configured to move along the extension direction of the slide rail, and the translation base is fixed on the slider.

[0015] In one technical solution, the translation adjustment assembly also includes an element support plate, which is connected to the translation base and extends along the translation direction of the translation base. The surface of the element support plate is provided with a window for the light path to pass through, and the window is used to clamp or glue the first optical element.

[0016] In a technical solution, it also includes a rotation adjustment component, which includes a turntable body and a second optical element; the turntable body is rotatably mounted on the base, and the second optical element is arranged on the turntable body and distributed around the rotation axis of the turntable body; the second optical element has an optical property change around the rotation axis of the turntable body, and is used to cut into the light path in a rotation manner.

[0017] In a technical solution, the second optical element is configured as a plurality of attenuation plates or filters with different optical characteristics, and the attenuation plates or filters are evenly distributed around the rotation axis of the turntable body.

[0018] In a technical solution, two groups of the rotation adjustment components are provided with the attenuation plates, and the attenuation plates have attenuation characteristics that vary around the rotation axis of the turntable body. The two groups of the rotation adjustment components are provided with the attenuation plates for combining different light transmittances.

[0019] In a technical solution, the rotation adjustment components are provided in multiple groups and are distributed side by side along the optical path direction. In the axial direction of the turntable body, the first optical element in each translation adjustment component is located on the same side of all the turntable bodies and is adjacent to the turntable body.

[0020] In one technical solution, the rotation adjustment components are provided with two groups, and both groups of the rotation adjustment components include a turntable mounting shaft for fixing the turntable body, the two turntable mounting shafts are arranged with their end faces facing each other, and the turntable bodies in the two groups of the rotation adjustment components are respectively fixed at one end of the two turntable mounting shafts close to each other.

[0021] In one technical solution, the rotation adjustment assembly includes a turntable mounting shaft for fixing the turntable body, at least two groups of turntable mounting shafts of the rotation adjustment assemblies are arranged side by side and the turntable body is respectively fixed on the same axial side of the two turntable mounting shafts, and the turntable mounting shafts in one group of the rotation adjustment assemblies pass radially outside the turntable body in another group of the rotation adjustment assemblies.

[0022] In a technical solution, the rotation adjustment assembly includes a turntable drive motor, which is coaxially arranged and transmission-connected with the turntable mounting shaft and is used to drive the turntable body to rotate.

[0023] In a technical solution, the base includes a first seat body portion and a second seat body portion, the first seat body portion and the second seat body portion are arranged at an interval and are both used to carry the rotation adjustment assembly; the rotation adjustment assembly is configured into one or more groups, and the turntable body of each rotation adjustment assembly is arranged in the interval between the first seat body portion and the second seat body portion.

[0024] In a technical solution, an escape space is provided on one side of the first seat body portion and / or the second seat body portion close to the interval, and at least a portion of at least one of the translation bases is located in the escape space.

[0025] In a second aspect, the present invention provides an optical detection device.

[0026] An optical detection device, comprising:

[0027] A light source, the light source is used to generate detection light;

[0028] An adjusting device, the adjusting device being the adjusting device mentioned in the first aspect, and at least used for adjusting the optical characteristics of the detection light to change the transmission performance of the detection light to the optical path device;

[0029] An optical path device, the optical path device is used to process the detection light that has passed through the adjustment device;

[0030] and a detection unit, wherein the detection unit is used to receive the detection light to detect the object to be detected.

[0031] Beneficial effects of the present invention:

[0032] According to the above-mentioned adjustment device, since at least two groups of translation adjustment components including the first optical element are provided, and the translation adjustment component can realize the translation of the first optical element through the translation base, and the first optical element has an optical property change along the translation direction of the translation base, therefore, when two different translation adjustment components are relatively translated, the first optical elements in different translation adjustment components can also be relatively translated, so that different optical properties can be combined to form, thereby having richer optical adjustment functions, and the first optical element in the form of translation can avoid occupying more space and has a compact structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a structural schematic diagram of an embodiment of an adjusting device in the present invention;

[0034] Figure 2 for Figure 1 A structural schematic diagram of an adjusting device in another perspective;

[0035] Figure 3 for Figure 2 An exploded view of an adjustment device, wherein the rotation adjustment component and the translation adjustment component are separated from the base;

[0036] Figure 4 It is a schematic diagram of the local structure of the translation adjustment component;

[0037] Figure 5 It is a structural schematic diagram of another embodiment of an adjusting device in the present invention.

[0038] List of feature names corresponding to the reference numerals in the figure:

[0039] 10. base; 11. first seat body; 12. second seat body; 13. avoidance space;

[0040] 21. First rotation adjustment assembly; 211. First sub-rotation assembly; 212. Second sub-rotation assembly; 22. Second rotation adjustment assembly; 23. Turntable body; 24. Turntable mounting shaft; 25. Turntable drive motor; 26. Second motor bracket;

[0041] 31. First translation adjustment component; 32. Second translation adjustment component; 33. Translation base; 34. Linear gradient filter; 35. Gear; 36. Gear drive motor; 37. Slide rail; 38. Slider; 39. First motor bracket; 310. Component support plate;

[0042] 40. Displacement adjustment component;

[0043] 51. Output optical fiber; 52. Incident optical fiber. DETAILED DESCRIPTION

[0044] The present invention is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are for making the present application better understood. However, those skilled in the art can easily recognize that some features can be omitted in different situations, or can be replaced by other elements, materials, methods. In some cases, some operations related to the present application are not shown or described in the specification, this is to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations according to the description in the specification and the general technical knowledge in the art.

[0045] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0046] The serial numbers of the components in this document, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0047] In an embodiment of the present invention, the optical detection device is provided with at least two groups of translation adjustment components including first optical elements, and the first optical elements have optical property changes. When two different translation adjustment components are relatively translated, the first optical elements in different translation adjustment components can also be relatively translated, so that the two first optical elements with optical property changes can be combined to form different optical properties, so that the optical detection device has more abundant optical adjustment functions. At the same time, the first optical element in the form of translation can avoid occupying more space, has a compact structure, and can be better integrated with the rotation adjustment component to achieve abundant optical adjustment functions.

[0048] Please refer to Figures 1 to 3In one embodiment, an adjustment device is used to optically process the optical path between the output optical fiber 51 and the input optical fiber 52. It should be noted that, in some other embodiments, the adjustment device in the present invention can also be used to optically process other optical paths. In addition, in some other embodiments, the positions of the output optical fiber 51 and the input optical fiber 52 can also be adjusted. The adjustment device includes a base 10 and a translation adjustment component, and the translation adjustment component includes a translation base 33 and a first optical element; the translation base 33 is configured to move on the base 10 in a translation manner, that is, assembled on the base 10 in a translation manner, and the first optical element is arranged on the translation base 33; the first optical element has an optical property change along the translation direction of the translation base 33, and is used to cut into the optical path of the adjustment device in a translation manner; the translation adjustment component is provided with at least two groups, and the first optical elements in each group of the translation adjustment components are arranged side by side along the optical path direction, so that different optical properties are formed when the first optical elements are relatively translated, and the translation direction intersects with the optical path direction of the adjustment device. The translation direction and the optical path direction of the adjustment device are arranged in a cross form, so that the light beam can pass through the first optical elements on the two sets of translation adjustment components in sequence, thereby processing the light beam twice. Figure 1 In the illustrated embodiment, the translation direction is perpendicular to the optical path direction of the adjusting device. Those skilled in the art may understand that in some other embodiments, the translation direction and the optical path direction of the adjusting device may also cross in a non-perpendicular manner, for example, at an acute angle.

[0049] It should be noted that the change in optical characteristics of the first optical element refers to the gradual optical performance of the element itself, such as different filtering wavelengths or optical transmittances at different locations on the surface of the element, or the gradual change along the extension direction of the element. The different optical characteristics formed by the combination of the first optical elements refer to different optical performances, such as different filter bandpass ranges or different precisions of optical transmittances.

[0050] In order to clearly illustrate the specific implementation and technical solutions of the present invention, Figure 1 The coordinates are indicated in the figure, and the adjustment device has the following characteristics: Figure 1 The upper side, lower side, left side, right side, front side and rear side are shown. Of course, the above orientations do not limit the specific implementation methods and technical solutions of the present invention to be arranged in this way.

[0051] In one embodiment, please refer to Figure 3, the base 10 includes a first base body portion 11 and a second base body portion 12, and the first base body portion 11 and the second base body portion 12 are arranged at intervals. In a specific embodiment, the base 10 includes a bottom plate and two support seats, the bottom plate is used to realize the fixed installation of the adjustment device, the first base body portion 11 and the second base body portion 12 are respectively formed by two support seats, and are arranged on the bottom plate at intervals on the left and right as shown in the figure. An output optical fiber 51 and an incident optical fiber 52 are respectively fixed on the two support seats, and a light beam can be emitted from the output optical fiber 51 and received by the incident optical fiber 52. In order to realize the optical axis alignment of the two optical fiber heads of the output optical fiber 51 and the incident optical fiber 52, please refer to Figure 1 , Figure 3 The adjustment device is also provided with a displacement adjustment component 40, and the displacement adjustment component 40 is used to perform three-dimensional movement adjustment on the optical fiber head used for the incident optical fiber 52. Of course, in some other embodiments, the displacement adjustment component 40 can also be used to perform three-dimensional movement adjustment on the optical fiber head used for the output optical fiber 51. The displacement adjustment component 40 can adopt any structure that can achieve position adjustment of the optical fiber head. Since it has no direct relationship with the technical solution to be protected by the present invention, it will not be described in detail here. In other embodiments, the displacement adjustment component 40 can also be omitted, and the output optical fiber 51 and the incident optical fiber 52 can be directly fixed in a manner of optical axis alignment.

[0052] In a specific embodiment, please refer to Figure 3 and 4 There are two groups of translation adjustment components, and the two groups of translation adjustment components are arranged in the interval between the first seat body part 11 and the second seat body part 12. The two groups of translation adjustment components have the same structure, and both include a slide rail 37 and a slider 38. The slide rail 37 is fixed on the base 10, and the slider 38 is configured to move along the extension direction of the slide rail 37. The translation base 33 is fixed on the slider 38. Please refer to Figure 1 , the slide rail 37 extends in the front-to-back direction, and the slider 38 can move in the front-to-back direction. In this way, the translation base 33 can achieve translation on the base 10 through the slide rail 37 and the slider 38. In some other embodiments, according to actual usage requirements, the number of translation adjustment components can be more than two groups, for example, three groups or four groups are set. In addition, in some other embodiments, the translation base 33 can also be directly assembled to the base 10, for example, a dovetail slide rail or a linear slide rail is set on the base 10, and a guide structure corresponding to the dovetail slide rail or the linear slide rail is set on the translation base 33 to directly achieve translation movement. It should be noted that the guide structure is a structure that can constrain and guide the moving path of an object so that the object moves along a set direction, such as a dovetail groove adapted to a dovetail slide rail.

[0053] In order to achieve the driving of the translation base 33, in one embodiment, the translation base 33 is provided with a rack structure, and the translation adjustment assembly further includes a gear 35 and a gear drive motor 36, and the gear drive motor 36 is connected to the gear 35 to drive the translation of the translation base 33. In a specific embodiment, the translation base 33 is a rack with the above-mentioned rack structure on the top surface, and the rack is meshed with the gear 35, which can achieve a transmission accuracy of 0.1mm. A first motor bracket 39 is fixed at the rear of the first seat body part 11 and the second seat body part 12 of the base 10, and a gear drive motor 36 is fixed on the first motor bracket 39. When working, the gear 35 is directly driven to rotate by the gear drive motor 36 to achieve the translation of the translation base 33 and the first optical element thereon. Of course, in some other embodiments, the translation adjustment assembly can also adopt other driving methods, such as a linear motor, or an electric push rod.

[0054] In one embodiment, please refer to Figure 3 , Figure 4 The translation adjustment assembly further includes an element support plate 310, which is connected to the translation base 33 and extends along the translation direction of the translation base 33. The surface of the element support plate 310 is provided with a window for the light path to pass through, and the window is used for clamping or gluing the first optical element. As a specific implementation method, please refer to Figure 4 , the element support plate 310 is rectangular, the lower half of the element support plate 310 is fixed on the translation base 33, and the upper half of the element support plate 310 is provided with a rectangular opening as a window; the first optical element is sheet-shaped, the edge portion of which is fixed on the element support plate 310, and then indirectly provided on the translation base 33 through the element support plate 310 to move with the translation base 33. In some other embodiments, the first optical element can also be directly fixed to the translation base 33.

[0055] In one embodiment, the first optical element in at least two groups of the translation adjustment components is configured as a linear gradient filter 34, which has a filtering capacity that gradually changes along the linear extension direction of the filter, so that the linear gradient filter 34 has an optical characteristic change in the translation direction (such as a gradually changing filtering wavelength), and the filtering capacity ranges of the linear gradient filters 34 in different groups are different, and there is a partial overlap in the filtering capacity ranges. The linear gradient filter 34 (LVF) is an optical device whose spectral characteristics change linearly with position, has a nearly continuous spectral channel, and can obtain a higher spectral resolution through spectroscopy. In a specific embodiment, the linear gradient filter 34 configured in at least one group of the translation adjustment components is a short-pass filter (such as 0-400nm), and the linear gradient filter 34 configured in at least one group of the translation adjustment components is a long-pass filter (such as 300-600nm). In this way, by properly moving the two linear gradient filters 34, a suitable bandpass filter range can be selected within the constraint range of 300-400nm to achieve different levels of filter adjustment, which makes each linear gradient filter 34 form different optical characteristics (such as different bandpass filter ranges) when relatively translated. It should be noted that in some other embodiments, according to the optical processing requirements, the first optical element can also be in other forms, such as using an attenuation plate. In one embodiment, please refer to Figure 1 and Figure 2 , the translation bases 33 in the two groups of the translation adjustment assemblies are arranged side by side, and the two first optical elements in the two groups of the translation adjustment assemblies are arranged on the side where the two translation bases 33 are close to each other. Specifically, each element support plate 310 forms an offset structure relative to the corresponding translation base 33, and the element support plates 310 in the two groups of the translation adjustment assemblies are fixed on the side where the two translation bases 33 are close to each other, which can save space and have a compact structure. In order to save more space and better realize the integration of the translation adjustment assembly and the rotation adjustment assembly, in one embodiment, an avoidance space 13 is provided on the side of the first seat body part 11 and / or the second seat body part 12 close to the interval, and at least a portion of at least one of the translation bases 33 is located in the avoidance space 13. In a specific embodiment, please refer to Figure 1 and Figure 3 , viewed along the front-to-back direction, is located Figure 1The second seat body portion 12 on the right side is an L-shaped structure, forming an escape space 13 at the lower left side, and the corresponding set of slide rails 37, sliders 38 and rack rails of the translation adjustment assembly are all located in the escape space 13, which is conducive to reducing the overall size of the adjustment device in the left and right directions. It should be noted that in some other embodiments, the escape space 13 may be a non-essential structure. In addition, in some other embodiments, the translation adjustment assembly and / or the rotation adjustment assembly may also be set on the side of the first seat body portion 11 or the second seat body portion 12 that is away from the interval.

[0056] In one embodiment, please refer to Figure 3 The adjustment device also includes a rotation adjustment component, which includes a turntable body 23 and a second optical element; the turntable body 23 is rotatably mounted on the base 10, and the second optical element is arranged on the turntable body 23 and distributed around the rotation axis of the turntable body 23; the second optical element has an optical property change around the rotation axis of the turntable body 23, and is used to cut into the light path in a rotation manner.

[0057] In one embodiment, see Figure 1 , the first seat body part 11 and the second seat body part 12 included in the base 10 are arranged at intervals and are both used to carry the rotation adjustment assembly. The rotation adjustment assembly here can be configured as one or more groups, so the turntable body of each rotation adjustment assembly can be arranged in the interval between the first seat body part 11 and the second seat body part 12. Further, the first seat body part 11 and / or the second seat body part 12 is provided with an avoidance space 13 on one side close to the interval, and at least a part of at least one translation base is located in the avoidance space 13.

[0058] In one embodiment, the rotation adjustment components are provided in multiple groups and are arranged side by side along the optical path direction. In a specific embodiment, the rotation adjustment components are provided in two groups, and both groups of the rotation adjustment components include a turntable mounting shaft 24 for fixing the turntable body 23, and the two turntable mounting shafts 24 are arranged in a form of end faces facing each other, and the turntable bodies 23 in the two groups of the rotation adjustment components are respectively fixed at one end of the two turntable mounting shafts 24 close to each other. In a specific embodiment, both groups of the rotation adjustment components include a turntable drive motor 25, and the turntable drive motor 25 is coaxially arranged and transmission-connected with the turntable mounting shaft 24, and is used to drive the turntable body 23 to rotate. A second motor bracket 26 is fixed at the front of the first seat body portion 11 and the second seat body portion 12 of the base 10, and a turntable drive motor 25 is fixed to each second motor bracket 26. The rotating shaft of the turntable drive motor 25 extends in the left-right direction, and its end passes through the second motor bracket 26. The turntable body 23 is fixed to the end of the rotating shaft of the turntable drive motor 25 through the turntable mounting shaft 24 to achieve rotational assembly. It should be noted that, according to the optical processing requirements, the rotation adjustment component can also be set in only one group. In addition, in some other embodiments, the turntable body 23 can also be directly fixed to the rotating shaft of the turntable drive motor 25, relying on the rotating shaft of the turntable drive motor 25 as the turntable mounting shaft.

[0059] In one embodiment, the second optical element is configured as a plurality of attenuation plates or filters with different optical properties, and each attenuation plate or filter is evenly distributed around the rotation axis of the turntable body 23, so that the second optical element has optical property changes around the rotation axis (such as a gradually changing filtering wavelength or a gradually changing optical transmittance). Figure 1 , attenuation plates with different attenuation characteristics (such as attenuation plates with transmittances of 0.1, 0.2, ..., 1.0) are distributed in an annular manner on the left turntable body 23, while filters with different filtering performances (such as filters with wavelengths of about 200nm, 300nm, ..., 800nm) are distributed in an annular manner on the right turntable body 23. It should be noted that in order to form annular changes with different optical characteristics, according to the structural form of the second optical element, the second optical element can be in an integral sheet form or in a split distribution form. For example, for Figure 1 Center left ( Figure 2 , Figure 3 The rotation adjustment component (on the right side) has a second optical element in the form of a circular sheet with sector-shaped partitions distributed along the circumference, and different sector-shaped partitions have different optical properties; for example, Figure 1 Middle right ( Figure 2 , Figure 3The rotating adjustment component (on the left side in the middle) has openings distributed along the circumference on its turntable body 23, and filters with different optical properties are arranged in different openings to form annular changes with different optical properties.

[0060] In one embodiment, the rotation adjustment components are provided in multiple groups and are arranged side by side along the optical path direction. In the axial direction of the turntable body 23, the first optical element in each of the translation adjustment components is located on the same side of all the turntable bodies 23 and is adjacent to the turntable body 23. Taking the above-mentioned case where two groups of rotation adjustment components are provided as an example, the turntable bodies 23 in the two groups of rotation adjustment components are close to each other and are simultaneously located on the left side of the interval formed by the first seat body part 11 and the second seat body part 12, while the first optical elements in the two translation adjustment components are simultaneously located on the right side of the interval formed by the first seat body part 11 and the second seat body part 12, and are located on the right side of the two turntable bodies 23, and are adjacent to the turntable bodies 23. The first optical element and the turntable body 23 adopt the above-mentioned layout form, which can make full use of the space formed by the first seat body part 11 and the second seat body part 12, and has a compact structure, which is conducive to controlling the volume. In some other embodiments, the two turntable bodies 23 and the two component support plates 310 may also be arranged in other forms, such as arranging them alternately one by one, or setting the two turntable bodies 23 between the two component support plates 310, or setting the two component support plates 310 between the two turntable bodies 23.

[0061] In other embodiments, the turntable mounting shafts 24 of at least two groups of the rotation adjustment components are arranged side by side and the turntable body 23 is respectively fixed on the same axial side of the two turntable mounting shafts 24, and the turntable mounting shafts 24 in one group of the rotation adjustment components pass through the radial outer side of the turntable body 23 in another group of the rotation adjustment components. Figure 5 , Figure 1The rotation adjustment assembly on the right side of the middle is divided into two sub-rotation assemblies, namely the first sub-rotation assembly 211 and the second sub-rotation assembly 212. The turntable mounting shafts 24 of the first sub-rotation assembly 211 and the second sub-rotation assembly 212 are arranged side by side, and the end faces thereof are oriented in the same direction. The ends of the two turntable mounting shafts 24 are respectively fixed with a turntable body 23, and attenuation plates with different performances are respectively arranged in a ring shape on the turntable body 23. That is, the adjustment device includes two groups of the rotation adjustment assemblies equipped with the attenuation plates, and the attenuation plates have attenuation characteristics that vary around the rotation axis of the turntable body 23. The two groups of the rotation adjustment assemblies equipped with the attenuation plates are used to combine different light transmittances. The rotational switching of the two groups of attenuation plates can expand the attenuation capacity of the light beam. For example, after the first sub-rotation component 211 and the first sub-rotation component 211 are configured, a light transmittance configuration of n*n (n is the number of attenuation plates carried by a single sub-rotation component) can be achieved, for example, a transmittance of 0.1*0.1=0.01, or a transmittance of 0.2*0.6=0.12 can be achieved. In this way, each second optical element combination can form different optical properties (such as different optical transmittance accuracy).

[0062] During operation, according to the light source adjustment requirements, by adjusting the translation adjustment component and / or the rotation adjustment component in the adjustment device, the light emitted from the output optical fiber 51 can achieve filtering adjustment when passing through the translation adjustment component, and achieve different bandpass filtering adjustments, and can achieve filtering adjustment and attenuation adjustment when passing through the rotation adjustment component, thereby being able to meet a variety of filtering adjustment requirements as a whole. In addition, for the translation adjustment component, its first optical element uses a linear gradient filter 34, which can obtain a higher spectral resolution and a more continuous combination of optical properties, thereby being conducive to enriching the application scenarios of the optical detection device.

[0063] Embodiments of the optical detection device of the present invention:

[0064] An optical detection device includes: a light source, the light source is used to generate detection light; an adjustment device, the adjustment device is the adjustment device described in any of the above embodiments, the adjustment device is at least used to adjust the optical characteristics of the detection light to change the transmission performance of the detection light to the optical path device; the optical path device, the optical path device is used to process the detection light that has passed through the adjustment device; and a detection unit, the detection unit is used to receive the detection light to detect the object to be detected. The above light source, optical path device and detection unit can all adopt existing structures and will not be described in detail here.

[0065] The above specific examples are used to illustrate the present invention, which is only used to help understand the present invention and is not intended to limit the present invention. For those skilled in the art, according to the concept of the present invention, some simple deductions, modifications or substitutions can be made.

Claims

1. A regulating device, It is characterized in that include: Pedestal; and a translation adjustment assembly, the translation adjustment assembly comprising a translation base and a first optical element; The translation base is configured to move on the base in a translation manner, and the first optical element is arranged on the translation base; The first optical element has an optical property change along the translation direction of the translation base, and is used to cut into the optical path of the adjustment device in a translation manner, and the translation direction intersects with the optical path direction of the adjustment device; The translation adjustment assembly is provided with at least two groups, and the first optical elements in each group of the translation adjustment assembly are arranged side by side along the optical path direction, so as to form different optical characteristics when the first optical elements are relatively translated.

2. The adjusting device according to claim 1, It is characterized in that The first optical elements in at least two groups of the translation adjustment components are configured as linear gradient filters, and the filtering capability ranges of the linear gradient filters are different, and there is a partial overlap in the filtering capability ranges.

3. The adjusting device according to claim 2, It is characterized in that The linear gradient filter configured in at least one group of translation adjustment components is a short-pass filter, and the linear gradient filter configured in at least one group of translation adjustment components is a long-pass filter.

4. The regulating device according to claim 1, 2 or 3, It is characterized in that The translation adjustment assembly is provided with two groups, the translation bases in the two groups of the translation adjustment assembly are arranged side by side, and the two first optical elements in the two groups of the translation adjustment assembly are arranged on the side where the two translation bases are close to each other.

5. The regulating device according to claim 1, 2 or 3, It is characterized in that A rack structure is provided on the translation base, and the translation adjustment assembly also includes a gear and a gear drive motor. The gear drive motor is connected to the gear to drive the translation base to translate.

6. The adjustment device according to claim 5, It is characterized in that It also includes a slide rail and a slider, wherein the slide rail is fixed on the base, the slider is configured to move along the extension direction of the slide rail, and the translation base is fixed on the slider.

7. The regulating device according to claim 1, 2 or 3, It is characterized in that The translation adjustment assembly also includes an element support plate, which is connected to the translation base and extends along the translation direction of the translation base. A window for the light path to pass through is provided on the surface of the element support plate, and the window is used for clamping or gluing the first optical element.

8. The regulating device according to claim 1, 2 or 3, It is characterized in that It also includes a rotation adjustment component, which includes a turntable body and a second optical element; the turntable body is rotatably mounted on the base, and the second optical element is arranged on the turntable body and distributed around the rotation axis of the turntable body; the second optical element has an optical property change around the rotation axis of the turntable body, and is used to cut into the light path in a rotational manner.

9. The adjustment device according to claim 8, It is characterized in that The second optical element is configured as a plurality of attenuation plates or optical filters with different optical characteristics, and the attenuation plates or optical filters are evenly distributed around the rotation axis of the turntable body.

10. The adjustment device according to claim 9, It is characterized in that The invention comprises two groups of the rotation adjustment components equipped with the attenuation plates, wherein the attenuation plates have attenuation characteristics that vary around the rotation axis of the turntable body, and the two groups of the rotation adjustment components equipped with the attenuation plates are used to combine different light transmittances.

11. The adjustment device according to claim 8, It is characterized in that The rotation adjustment components are provided in multiple groups and are distributed side by side along the optical path direction. In the axial direction of the turntable body, the first optical element in each translation adjustment component is located on the same side of all the turntable bodies and is adjacent to the turntable body.

12. The adjustment device according to claim 8, It is characterized in that The rotation adjustment components are provided with two groups, and both groups of the rotation adjustment components include a turntable mounting shaft for fixing the turntable body, and the two turntable mounting shafts are arranged with their end faces facing each other, and the turntable bodies in the two groups of the rotation adjustment components are respectively fixed at one end of the two turntable mounting shafts close to each other.

13. The adjustment device according to claim 8, It is characterized in that The rotation adjustment assembly includes a turntable mounting shaft for fixing the turntable body, and at least two groups of turntable mounting shafts of the rotation adjustment assemblies are arranged side by side and the turntable body is respectively fixed on the same axial side of the two turntable mounting shafts, wherein the turntable mounting shafts in one group of the rotation adjustment assemblies pass through the radially outer side of the turntable body in another group of the rotation adjustment assemblies.

14. The adjustment device according to claim 8, It is characterized in that The rotation adjustment assembly includes a turntable drive motor, which is coaxially arranged and transmission-connected with the turntable mounting shaft and is used to drive the turntable body to rotate.

15. The adjustment device according to claim 8, It is characterized in that The base includes a first seat body part and a second seat body part, the first seat body part and the second seat body part are arranged at an interval and are both used to carry the rotation adjustment assembly; the rotation adjustment assembly is configured into one or more groups, and the turntable body of each rotation adjustment assembly is arranged in the interval between the first seat body part and the second seat body part.

16. The adjustment device according to claim 15, It is characterized in that A side of the first seat body part and / or the second seat body part close to the interval is provided with an escape space, and at least a part of at least one of the translation bases is located in the escape space.

17. Optical detection device, It is characterized in that include: A light source, the light source is used to generate detection light; An adjusting device, wherein the adjusting device is the adjusting device according to any one of claims 1 to 16, and the adjusting device is at least used to adjust the optical characteristics of the detection light to change the transmission performance of the detection light to the optical path device; An optical path device, the optical path device is used to process the detection light that has passed through the adjustment device; and a detection unit, wherein the detection unit is used to receive the detection light to detect the object to be detected.

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