A thin film material phase change temperature measuring device with stable sample loading and unloading

Abstract

The invention discloses a thin film material phase change temperature measuring device with stable sample loading and unloading, belonging to the field of semiconductor thin film thermal property measurement. The device comprises a quick-closing door, a vacuum chamber, a cartridge valve, a sampling chamber, and a magnetic sampling rod. The quick-closing door is arranged on one side of the vacuum chamber, the sampling chamber is arranged on a side of the vacuum chamber away from the quick-closing door, the cartridge valve is installed on a side of the sampling chamber close to the vacuum chamber, and the magnetic sampling rod is installed on a side of the sampling chamber away from the cartridge valve. An electric-controlled displacement platform is provided at the bottom of the vacuum chamber, a receiving rack is provided inside the vacuum chamber, and an evaporation source is provided on the outside of the electric-controlled displacement platform, and the evaporation source is located directly below the receiving rack. The invention solves the problem of sample instability during the sampling process and ensures a stable optical path through the mutual cooperation of the magnetic sampling rod, the receiving rack, and the evaporation source in the device. The stability of the sample stage and the airtightness of the chamber are also ensured. Furthermore, the sample and the thermocouple can be in stable pressure contact.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor thin film thermal performance testing, in particular to a thin film material phase change temperature measuring device with stable sample loading and unloading. Background Art

[0002] Stable sample loading of phase-change thin films is a prerequisite and crucial guarantee for accurate phase-change temperature measurements in thin-film phase-change temperature measurement instruments. Furthermore, sample loading must be user-friendly. Currently, there are two main methods for loading phase-change thin-film material into phase-change temperature measurement instruments. One method involves placing the sample directly into a tray without securing it. The instrument's thermocouples maintain no pressure contact with the sample. The tray is horizontally connected to a push-pull rod, which is fixed to a horizontal guide rail. The sample, along with the tray, is transported horizontally via the rods and the guide rails to the sample chamber. The other method involves manually placing the sample directly onto the instrument's sample stage through the observation window in the sample chamber. The thermocouples maintain pressure contact with the sample, and the sample is securely mounted to the stage. With the first method, the sample is unsecured, making it susceptible to movement during sample loading and testing, which can cause optical path deviation and temperature measurement errors. With the second method, frequent opening of the observation window compromises the instrument's airtightness. Manual sample loading is inconvenient, and long-term installation can cause thermocouple deformation, leading to temperature measurement errors.

[0003] In view of the shortcomings of the existing technical solutions, this application proposes a thin film material phase change temperature measurement device with stable sample loading and unloading. Summary of the Invention

[0004] The purpose of the present invention is to provide a thin film material phase change temperature measurement device with stable sample loading and unloading. The sample stage is grasped by a magnetic rod and sent to a receiving rack of a suspended sample stage. The sample stage is fixed by the receiving rack of the sample stage. Then, the electric-controlled displacement platform is started to raise the evaporation source. The evaporation source surrounds the receiving device and heats it. This design solves the problem of sample instability during the sampling process, while also ensuring the stability of the sample stage and the airtightness of the chamber.

[0005] To achieve the above-mentioned objectives, the present invention provides a thin film material phase change temperature measuring device with stable sample loading and unloading, comprising a quick-closing door, a vacuum chamber, a cartridge valve, an injection chamber, and a magnetic injection rod, wherein the quick-closing door is arranged on one side of the vacuum chamber, the injection chamber is arranged on a side of the vacuum chamber away from the quick-closing door, the cartridge valve is installed on a side of the injection chamber close to the vacuum chamber, the magnetic injection rod is installed on a side of the injection chamber away from the cartridge valve, an electric-controlled displacement platform is provided at the bottom of the vacuum chamber, a receiving rack is provided inside the vacuum chamber, an evaporation source is provided on the outside of the electric-controlled displacement platform, the evaporation source is located directly below the receiving rack, and a sample stage is provided at one end of the magnetic injection rod close to the injection chamber.

[0006] Preferably, the vacuum chamber includes a chamber shell and a sealed observation window, the sealed observation windows are symmetrically arranged on both sides of the vacuum chamber, and the line connecting the two sealed observation windows is perpendicular to the line connecting the quick-closing door and the sampling chamber.

[0007] Preferably, the magnetic injection rod includes an adjustment frame, a magnetic rod and a locking handle. The adjustment frame is fixed to one side of the magnetic rod and connected to the injection chamber. The magnetic rod is the main part of the magnetic injection rod. The head of the magnetic rod close to one end of the adjustment frame is provided with a locking mechanism. The opening and closing state of the locking mechanism can be controlled by rotating the locking handle.

[0008] Preferably, the magnetic injection rod is connected to the sample stage via a locking mechanism.

[0009] Preferably, the receiving frame includes a support rod, an elastic pressing plate, a receiving platform and a fixed plate, the fixed plate is fixed to the inner surface of the upper side of the vacuum chamber, the support rod is fixed to the lower side of the supporting plate, the receiving platform is connected to the support rod, and the elastic pressing plate is arranged on both sides of the receiving platform close to the support rod.

[0010] Preferably, the sample stage includes an upper plate, a sample support plate and a nut. A light hole is provided at the center of the upper plate. The sample support plate is provided below the upper plate. The upper plate and the sample support plate are connected via the nut.

[0011] Preferably, the evaporation source is a heating furnace.

[0012] Therefore, the thin film material phase change temperature measuring device with stable sample loading and unloading using the above structure of the present invention has the following advantages:

[0013] 1. It solves the problem of inconvenient manual loading and unloading of samples by opening and closing the door. The sample delivery rod can stably and accurately deliver the sample into the sample chamber; at the same time, it ensures the airtightness of the instrument;

[0014] 2. Fixing the sample to be tested on the sample table solves the problem of unstable sample placement or inconvenient fixation from below the sample, ensuring accurate fixation of the test sample while facilitating easy operation.

[0015] 3. Accurately load and unload samples and sample stages under visual conditions. At the same time, regardless of changes in sample thickness, the position of the sample surface is fixed, improving the stability and repeatability of the sampling process and ensuring the accuracy of the test results. The application proposal also makes loading and unloading samples simple and convenient;

[0016] 4. The layout of the adjustment rack ensures the fault tolerance of the injection process and reduces the system error accuracy of technical and process problems;

[0017] 5. The receiving rack double-positions and fixes the sample stage through the channel of the main body and the elastic pressing piece to ensure the stability of the sample and the accuracy of the position;

[0018] 6. The suspended arrangement of the receiving rack ensures the layout space of the evaporation source under the entire instrument, and is also conducive to the experimenter to observe the sampling process inside the instrument through the observation window.

[0019] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a front view of a thin film material phase change temperature measuring device with stable sample loading and unloading according to the present invention;

[0021] Figure 2 This is a rear view of a thin film material phase change temperature measuring device with stable sample loading and unloading according to the present invention;

[0022] Figure 3 This is a structural diagram of a receiving frame of a thin film material phase change temperature measurement device with stable sample loading and unloading according to the present invention;

[0023] Figure 4 A sample stage pattern for a thin film material phase change temperature measurement device with stable sample loading and unloading according to the present invention;

[0024] Figure 5 This is an assembly diagram of the sample stage and receiving rack of a thin film material phase change temperature measurement device with stable sample loading and unloading according to the present invention.

[0025] Reference numerals

[0026] 1. Quick-close door; 2. Vacuum chamber; 201. Chamber housing; 202. Sealed observation window; 3. Cartridge valve; 4. Injection chamber; 5. Magnetic injection rod; 501. Adjustment stand; 502. Magnetic rod; 503. Locking handle; 6. Electric displacement platform; 7. Receiving rack; 701. Support rod; 702. Elastic pressure piece; 703. Receiving platform; 704. Fixed plate; 8. Sample stage; 801. Upper plate; 802. Sample support plate; 803. Nut; 9. Evaporation source. DETAILED DESCRIPTION

[0027] Example

[0028] In the description of the present invention, it should be noted that the terms "upper", "lower", "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the inventive product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limiting the present invention.

[0029] In the description of the present invention, it should also be noted that, unless otherwise expressly specified or limited, the terms "disposed," "installed," and "connected" should be understood broadly. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0030] The following embodiments of the present invention are described in detail with reference to the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments may be combined with each other.

[0031] like Figure 1-5As shown, a thin film material phase change temperature measurement device with stable sample loading and unloading of the present invention includes a quick-closing door 1, a vacuum chamber 2, a cartridge valve 3, a sampling chamber 4, and a magnetic sampling rod 5. The quick-closing door 1 is arranged on one side of the vacuum chamber 2, the sampling chamber 4 is arranged on the side of the vacuum chamber 2 away from the quick-closing door 1, the cartridge valve 3 is installed on the side of the sampling chamber 4 close to the vacuum chamber 2, and the magnetic sampling rod 5 is installed on the side of the sampling chamber 4 away from the cartridge valve 3. An electric-controlled displacement platform 6 is arranged at the bottom of the vacuum chamber 2, and a receiving rack 7 is arranged inside the vacuum chamber 2. An evaporation source 9 is provided on the outside of the electric-controlled displacement platform 6, and the evaporation source 9 is located directly below the receiving rack 7. A sample stage 8 is provided on the end of the magnetic sampling rod 5 close to the sampling chamber 4. The vacuum chamber 2 includes a chamber housing 201 and sealed observation windows 202. The sealed observation windows 202 are symmetrically arranged on both sides of the vacuum chamber 2, and the line connecting the two sealed observation windows 202 is perpendicular to the line connecting the quick-closing door 1 and the sampling chamber 4. The magnetic injection rod 5 includes an adjustment frame 501, a magnetic rod 502 and a locking handle 503. The adjustment frame 501 is fixed to one side of the magnetic rod 502 and is connected to the injection chamber 4. The head of the magnetic rod 502 near one end of the adjustment frame 501 is provided with a locking mechanism, and the opening and closing state of the locking mechanism can be controlled by rotating the locking handle 503. The magnetic injection rod 5 is connected to the sample stage 8 through a locking mechanism. The receiving frame 7 includes a support rod 701, an elastic pressing piece 702, a receiving platform 703 and a fixed plate 704. The fixed plate 704 is fixed to the inner surface of the upper side of the vacuum chamber 2. The support rod 701 is fixed to the lower side of the support plate. The receiving platform 703 is connected to the support rod 701. The elastic pressing piece 702 is arranged on both sides of the receiving platform 703 near the support rod 701. The sample stage 8 includes an upper plate 801 , a sample support plate 802 and a nut 803 . A light hole is provided at the center of the upper plate 801 . The sample support plate 802 is provided below the upper plate 801 . The upper plate 801 and the sample support plate 802 are connected by a nut 803 .

[0032] The device works as Figure 1-5 As shown, at the beginning of the experiment, the sample stage 8 carrying the sample to be tested is first installed on the magnetic sampling rod 5 in the sampling chamber 4, and the locking mechanism is controlled to fall and open by rotating the locking handle 503 to lock the magnetic sampling rod 5 and the sample stage 8, and the sampling chamber 4 is closed and the sampling chamber 4 is evacuated. After the vacuuming is completed, the cartridge valve 3 is opened to connect the heated vacuum chamber 2 and the sample-setting sampling chamber 4, and the sample stage 8 carrying the sample to be tested is sent into the vacuum chamber 2 by the magnetic sampling rod 5, and the magnetic rod 502 is controlled to fix the sample stage 8 on the receiving platform 703, and the locking handle 503 is rotated to control the locking mechanism to retract and close, and then the magnetic rod 502 is controlled to retract, and the cartridge valve 3 is closed. The evaporation source 9 rises under the control of the electric-controlled displacement platform 6, and rises to the receiving rack 7 at the center of the evaporation source 9, stops, and starts heating.

[0033] Therefore, the present invention adopts the above-mentioned structure to form a thin film material phase change temperature measuring device with stable sample loading and unloading. The sample stage is grabbed by a magnetic rod and sent into the receiving device of the suspended sample stage. The sample stage is fixed by the receiving device of the sample stage, and then the electric lifting device is started to raise the heating system. The evaporation source (heating furnace) surrounds the receiving device for heating. This design solves the problem of the sample not being fixed during the sampling process, and also ensures the stability of the sample stage and the airtightness of the chamber.

[0034] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit the same. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that they can still modify or replace the technical solutions of the present invention with equivalents, and these modifications or equivalent replacements cannot cause the modified technical solutions to deviate from the spirit and scope of the technical solutions of the present invention.

Claims

1. A thin film material phase transition temperature measurement device with stable sample loading and unloading, characterized by: The invention comprises a quick-closing door, a vacuum chamber, a cartridge valve, an injection chamber, and a magnetic injection rod, wherein the quick-closing door is arranged on one side of the vacuum chamber, the injection chamber is arranged on a side of the vacuum chamber away from the quick-closing door, the cartridge valve is installed on a side of the injection chamber close to the vacuum chamber, the magnetic injection rod is installed on a side of the injection chamber away from the cartridge valve, an electric-controlled displacement platform is arranged at the bottom of the vacuum chamber, a receiving rack is arranged inside the vacuum chamber, an evaporation source is arranged on the outside of the electric-controlled displacement platform, the evaporation source is located directly below the receiving rack, and a sample stage is arranged on one end of the magnetic injection rod close to the injection chamber, and the magnetic injection rod is connected to the sample stage through a locking mechanism; The receiving frame includes a support rod, an elastic pressing piece, a receiving platform and a fixed plate, wherein the fixed plate is fixed to the inner surface of the upper side of the vacuum chamber, the support rod is fixed to the lower side of the fixed plate, the receiving platform is connected to the support rod, and the elastic pressing piece is arranged on both sides of the receiving platform close to the support rod; The sample stage includes an upper plate, a sample support plate and a nut. A light hole is provided at the center of the upper plate. The sample support plate is provided below the upper plate. The upper plate and the sample support plate are connected via the nut.

2. The thin film material phase transition temperature measuring device with stable sample loading and unloading according to claim 1, characterized in that: The vacuum chamber comprises a chamber shell and sealed observation windows, the sealed observation windows are symmetrically arranged on both sides of the vacuum chamber, and the line connecting the two sealed observation windows is perpendicular to the line connecting the quick-closing door and the injection chamber.

3. The thin film material phase transition temperature measuring device with stable sample loading and unloading according to claim 1, characterized in that: The magnetic injection rod includes an adjustment frame, a magnetic rod and a locking handle. The adjustment frame is fixed to one side of the magnetic rod and connected to the injection chamber. The head of the magnetic rod close to one end of the adjustment frame is provided with a locking mechanism, and the opening and closing state of the locking mechanism is controlled by rotating the locking handle.

4. The thin film material phase transition temperature measuring device with stable sample loading and unloading according to claim 1, characterized in that: The evaporation source is a heating furnace.

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