A MEMS relay, a control circuit, and a power device

Abstract

The present application discloses a MEMS relay, a control circuit and a power device, including a substrate; a spiral coil and a magnetic strip, the axial direction of the spiral coil is parallel to the substrate, and the spiral coil spirally winds around the outer side of the magnetic strip in the length direction of the magnetic strip; a first magnetic structure, the first magnetic structure is arranged on the substrate and corresponds to one end of the magnetic strip, there is a gap between the first magnetic structure and the end of the magnetic strip, and the first magnetic structure and the magnetic strip are used to control a controlled circuit. In the present application, the magnetic strip is not fixed to the substrate at one end through an anchor and rotates around the anchor at the other end, but is integrally suspended inside the spiral coil and moves slightly along the axial direction of the magnetic strip, without an anchor point, thus avoiding the problem of anchor point loosening after long-term use.

Description

Technical Field

[0001] The present application relates to the field of electronic technologies, and in particular, to a MEMS relay, a control circuit, and a power device. Background Art

[0002] A relay is a controllable switch that can control the conduction or disconnection of a controlled circuit. The switch of a relay is generally a mechanical contact switch. With the progress of technology, the volume of relays has become smaller and smaller. For example, the currently common MEMS (MicroElectrical Mechanical System) relay is formed by integrating a relay on a wafer using MEMS technology. However, in current MEMS relays, one end of the cantilever beam used for conduction and disconnection is mostly fixed to the wafer through an anchor, and the other end can rotate with the anchor as a fulcrum to complete the conduction and disconnection actions. In this way, with the anchor as the rotation fulcrum of the cantilever beam, after long-term use, the fixed end of the anchor is prone to looseness. Summary of the Invention

[0003] The present application provides a MEMS relay, a control circuit, and a power device, aiming to solve the problem that the anchor is prone to looseness after long-term use in the rotation mode with the anchor as the fulcrum of the cantilever beam mentioned in the background art.

[0004] In an embodiment of the present application, a MEMS relay is provided, including:

[0005] A substrate;

[0006] A spiral coil and a magnetic strip, both ends of the spiral coil are used to connect a control power supply, the control power supply is used to control the direction of the current in the spiral coil, the spiral coil is arranged on the substrate, the axial direction of the spiral coil is parallel to the surface of the substrate carrying the spiral coil, and the spiral coil spirally winds around the outside of the magnetic strip in the length direction of the magnetic strip;

[0007] A first magnetic structure, the first magnetic structure is arranged on the substrate and corresponds to one end of the magnetic strip, there is a gap between the first magnetic structure and the end of the magnetic strip, and the first magnetic structure and the magnetic strip are used to control a controlled circuit.

[0008] In an embodiment of the present application, the MEMS relay further includes a second magnetic structure, the second magnetic structure is arranged on the substrate and corresponds to the other end of the magnetic strip, there is a gap between the second magnetic structure and the end of the magnetic strip, the second magnetic structure and the magnetic strip are used to control the controlled circuit, and the control signal of the second magnetic structure and the magnetic strip for the controlled circuit is different from the control signal of the first magnetic structure and the magnetic strip for the controlled circuit.

[0009] In an embodiment of the present application, the spiral path of the spiral coil is fabricated by the through-silicon via technology.

[0010] In an embodiment of the present application, the spiral coil is a three-dimensional spiral structure;

[0011] The spiral coil is a multi-layer structure, and a plurality of square holes and strip-shaped holes are formed in each layer;

[0012] The square holes in each layer are stacked to form the spiral path of the spiral coil, and the strip-shaped holes in each layer are stacked to form a space for the magnetic strip to pass through.

[0013] In an embodiment of the present application, the multi-layer structure includes a first layer, a second layer, a third layer, a fourth layer, a fifth layer, a sixth layer, a seventh layer, an eighth layer, and a ninth layer. Among them, the first layer and the ninth layer, the second layer and the eighth layer, the third layer and the seventh layer, and the fourth layer and the sixth layer are symmetric structures with respect to the fifth layer, respectively, and each layer is parallel to the axis of the spiral coil;

[0014] The first layer includes a first strip-shaped hole and a plurality of first square holes disposed on both sides of the first strip-shaped hole;

[0015] The second layer includes a second strip-shaped hole and a plurality of second square holes disposed on both sides of the second strip-shaped hole;

[0016] The third layer includes a third strip-shaped hole and a plurality of third square holes arranged alternately on both sides of the third strip-shaped hole;

[0017] The fourth layer includes a plurality of fourth square holes and fifth square holes. The fourth square holes and the fifth square holes correspond to each other one by one, and the fourth square holes and the fifth square holes are arranged alternately on both sides of the central axis of the fourth layer. The adjacent fourth square holes and fifth square holes are connected by a fourth strip-shaped hole; the cross-sections of the fourth square holes, the fifth square holes, and the fourth strip-shaped hole in the fourth layer form a broken line shape, and each turning point is a fourth square hole or a fifth square hole;

[0018] The fifth layer includes a plurality of sixth square holes, and the adjacent sixth square holes are connected by a fifth strip-shaped hole; the cross-sections of the sixth square holes and the fifth strip-shaped hole in the fifth layer form a wavy shape, and the peaks or valleys of the waves are sixth square holes;

[0019] The length directions of the strip-shaped holes in the first layer, the second layer, and the third layer are all parallel to the axis of the spiral coil; the opening sizes of the square holes in the first layer, the second layer, the fourth layer, the third layer, and the fifth layer increase in sequence; the distances between the square holes in the first layer, the second layer, the third layer, the fourth layer, and the fifth layer and the central axis of the layer where they are located decrease in sequence.

[0020] In the embodiment of the present application, soft glue is filled between the periphery of the magnetic stripe and the spiral coil.

[0021] In the embodiment of the present application, both the first magnetic structure and the second magnetic structure include:

[0022] A first rectangular ring-shaped support structure, on one side of the first rectangular ring-shaped support structure away from the magnetic stripe, at least one static contact is provided, and on one side close to the magnetic stripe, a moving contact is provided, and the moving contact is opposite to the end of the magnetic stripe.

[0023] In the embodiment of the present application, both the first magnetic structure and the second magnetic structure further include:

[0024] A second rectangular ring-shaped support structure, the second rectangular ring-shaped support structure is connected to one side of the first rectangular ring-shaped support structure close to the magnetic stripe through at least one intermediate contact, and the moving contact is arranged on one side of the second rectangular ring-shaped support structure close to the magnetic stripe.

[0025] In the embodiment of the present application, both the static contacts and the intermediate contacts include three, and the three static contacts and the three intermediate contacts are arranged in one-to-one correspondence.

[0026] In the embodiment of the present application, both the static contacts and the intermediate contacts include three. The intermediate contact in the middle corresponds to the static contact in the middle, and the intermediate contacts on both sides are respectively outside the two static contacts on both sides.

[0027] In the embodiment of the present application, the first magnetic structure and the second magnetic structure are symmetrical structures, the magnetic magnitudes of the first magnetic structure and the second magnetic structure are the same, the magnetic polarities of the ends close to the magnetic stripe are the same, and the distances from the magnetic stripe are the same.

[0028] The present application also proposes a control circuit, which is applied to the MEMS relay described in any one of the above. The control circuit includes: a step-down module, a magnetic induction module, an amplification module, an operational amplification module, a storage module, a lifting module, a filtering module, and a control signal output module;

[0029] The input end of the step-down module is used to connect to the working power supply, and the voltage output end of the step-down module is used to connect to the power input end of the magnetic induction module;

[0030] The magnetic induction module is used to sense the magnetic change of the first magnetic structure and / or the second magnetic structure to generate a first differential signal and / or a second differential signal; the differential signal output end of the magnetic induction module is connected to the signal input end of the amplification module;

[0031] The amplification module is used to amplify the received differential signal;

[0032] The signal output end of the amplification module is connected to the signal input end of the operational amplifier module, and the operational amplifier module is configured to perform arithmetic comparison on the received signal and select and output a signal that meets the first preset condition;

[0033] The signal output end of the operational amplifier module is connected to the signal input end of the storage module, and the storage module is configured to identify the received signal and output a signal that meets the second preset condition;

[0034] The signal output end of the storage module is connected to the input end of the voltage boosting module, and the voltage boosting module is configured to boost the voltage of the received signal;

[0035] The output end of the voltage boosting module is connected to the input end of the filtering module, and the filtering module is configured to perform phase transformation and filtering on the received signal;

[0036] The output end of the filtering module is connected to the input end of the control signal output module, and the output end of the control signal output module is configured to output a control signal.

[0037] In an embodiment of the present application, the step-down module includes a step-down transformer, a first resistor, a second resistor, a third resistor, a first capacitor, and a second capacitor;

[0038] One end of the first resistor is connected to the voltage input pin of the step-down transformer, and the other end of the first resistor is configured to be connected to a high-voltage working power supply;

[0039] The ground pin of the step-down transformer is grounded in series with the first capacitor and the second resistor, and the end of the first capacitor far from the step-down transformer is also configured to be connected to a low-voltage working power supply;

[0040] The third resistor is connected in series between the first resistor and the enable control pin of the step-down transformer;

[0041] The end of the first resistor close to the step-down transformer, the end of the second resistor close to the step-down transformer, the end of the first capacitor far from the step-down transformer, and the end of the third resistor far from the step-down transformer are connected to each other;

[0042] The voltage output pin of the step-down transformer is grounded through the second capacitor;

[0043] The voltage output pin of the step-down transformer is connected to the magnetic induction module.

[0044] In an embodiment of the present application, the magnetic induction module includes a first Hall sensor and / or a second Hall sensor;

[0045] The voltage output pin of the step-down voltage regulator is connected to the positive voltage signal input pin of the first Hall sensor and / or the second Hall sensor;

[0046] The first Hall sensor and / or the second Hall sensor are used to sense the change in the magnetic force magnitude of the first magnetic structure and / or the second magnetic structure, and generate a first differential signal and / or a second differential signal;

[0047] The negative voltage signal input pin of the first Hall sensor and / or the second Hall sensor is grounded;

[0048] The positive differential signal output pin and the negative differential signal output pin of the first Hall sensor and / or the second Hall sensor are both connected to the amplification module.

[0049] In the embodiment of the present application, the amplification module includes an amplifier, a fourth resistor, a fifth resistor, a sixth resistor, and a seventh resistor;

[0050] The positive differential signal output pin of the first Hall sensor and / or the second Hall sensor is connected to the positive voltage signal input pin of the amplifier through the fourth resistor;

[0051] The negative differential signal output pin of the first Hall sensor and / or the second Hall sensor is connected to the negative voltage signal input pin of the amplifier through the sixth resistor;

[0052] Both ends of the seventh resistor are respectively connected to the negative voltage signal input pin and the signal output pin of the amplifier;

[0053] Both ends of the fifth resistor are respectively connected to the ground pin of the amplifier and one end of the fourth resistor close to the amplifier;

[0054] The signal output pin of the amplifier is connected to the operational amplification module.

[0055] In the embodiment of the present application, the operational amplification module includes an operational amplifier and a third capacitor;

[0056] The positive voltage signal input pin of the operational amplifier is connected to the signal output pin of the amplifier, and the negative voltage signal input pin of the operational amplifier is grounded through the third capacitor;

[0057] The signal output pin of the operational amplifier is connected to the storage module.

[0058] In the embodiment of the present application, the storage module includes a register and an eighth resistor;

[0059] The serial data input pin of the register is connected to the signal output pin of the operational amplifier. One end of the eighth resistor is serially connected to the enable control pin of the register, and the other end is connected to the voltage signal output terminal of the step-down voltage regulator. The serial data output pin of the register is connected to the boosting module.

[0060] In the embodiment of the present application, the boosting module includes a first MOS transistor and a second MOS transistor;

[0061] The gates of the first MOS transistor and the second MOS transistor are both connected to the serial data output pin of the register;

[0062] The drain of the first MOS transistor is used to connect to a suitable working power supply. The source of the first MOS transistor is connected to the drain of the second MOS transistor, and the source of the second MOS transistor is grounded;

[0063] After the source of the first MOS transistor and the drain of the second MOS transistor are connected, they are connected to the control signal output module.

[0064] In the embodiment of the present application, the control signal output module includes: a third MOS transistor, a fourth capacitor, a fifth capacitor, a ninth resistor, a tenth resistor, an eleventh resistor, a twelfth resistor, a first diode, and a fourth MOS transistor;

[0065] After the source of the first MOS transistor and the drain of the second MOS transistor are connected, they are connected in series with the ninth resistor, the eleventh resistor, and the emitter of the third MOS transistor;

[0066] After the source of the first MOS transistor and the drain of the second MOS transistor are connected, they are connected in series with the tenth resistor and the base of the third MOS transistor;

[0067] The collector of the third MOS transistor is grounded;

[0068] One end of the tenth resistor connected to the base of the third MOS transistor is connected to one end of the twelfth resistor. The other end of the twelfth resistor is grounded. One end of the tenth resistor connected to the base of the third MOS transistor is connected to one end of the fourth capacitor. The other end of the fourth capacitor is grounded, and the fourth capacitor and the twelfth resistor are in parallel;

[0069] The emitter of the third MOS transistor is connected to the base of the fourth MOS transistor through the first diode;

[0070] One end of the first diode close to the fourth MOS transistor is grounded through the fifth capacitor;

[0071] The emitter of the fourth Mos transistor is used to connect to the working power supply, and the collector of the fourth Mos transistor is the control signal output terminal of the control signal output module.

[0072] This application also proposes a power device, which includes a circuit board and at least one MEMS relay described in any of the above embodiments. The at least one MEMS relay is disposed on the circuit board, and the at least one MEMS relay is connected through a control circuit described in any of the above embodiments. The at least one MEMS relay is used to control a controlled circuit.

[0073] In the embodiment of this application, the magnetic strip floats inside the spiral coil. When there is a current in the spiral coil, the magnetism of the magnetic strip is enhanced, and then it is attracted to the first magnetic structure to control the controlled circuit. Among them, the magnetic strip in the embodiment of this application is not fixed to the substrate at one end through an anchor and rotates around the anchor at the other end, but floats entirely inside the spiral coil and moves slightly along the axial direction of the magnetic strip, without an anchor point, thus avoiding the problem of the anchor point loosening after long-term use. BRIEF DESCRIPTION OF THE DRAWINGS

[0074] In order to more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of this application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on the structures shown in these drawings.

[0075] Figure 1 Schematic diagram of the usage scenario of the MEMS relay in an embodiment of this application;

[0076] Figure 2 Schematic diagram of the structure of the MEMS relay in an embodiment of this application;

[0077] Figure 3 Schematic diagram of the topological structure of the spiral coil of the MEMS relay in an embodiment of this application;

[0078] Figure 4 Circuit diagram of the spiral coil of the MEMS relay in an embodiment of this application;

[0079] Figure 5 Schematic diagram of the usage scenario of the MEMS relay in another embodiment of this application;

[0080] Figure 6 Schematic diagram of the structure of the magnetic structure of the MEMS relay in an embodiment of this application;

[0081] Figure 7Schematic diagram of the magnetic structure of the MEMS relay in another embodiment of the present application;

[0082] Figure 8 Schematic diagram of the magnetic structure of the MEMS relay in yet another embodiment of the present application;

[0083] Figure 9 Module diagram of the control circuit in an embodiment of the present application;

[0084] Figure 10 Circuit diagram of the buck module, amplification module, and operational amplifier module in the control circuit in an embodiment of the present application;

[0085] Figure 11 Circuit diagram of the register module, boost module, filter module, and control signal output module in the control circuit in an embodiment of the present application. Description of the drawings:

[0087] 100 - MEMS relay, 110 - spiral coil, 111 - first layer, 1111 - first strip hole, 1112 - first square hole, 112 - second layer, 1121 - second strip hole, 1122 - second square hole, 113 - third layer, 1131 - third strip hole, 1132 - third square hole, 114 - fourth layer, 1141 - fourth square hole, 1142 - fifth square hole, 1143 - fourth strip hole, 115 - fifth layer, 1151 - sixth square hole, 1152 - fifth strip hole, 120 - magnetic strip, 130 - substrate, 140 - first magnetic structure, 150 - second magnetic structure, 160 - first rectangular ring support structure, 161 - second rectangular ring support structure, 170 - static contact, 180 - intermediate contact, 190 - moving contact, 200 - controlled circuit, 300 - working power supply, 400 - buck module, 410 - magnetic induction module, 420 - amplification module, 430 - operational amplifier module, 440 - register module, 450 - boost module, 460 - filter module, 470 - control signal output module.

[0088] The realization, functional features, and advantages of the purpose of the present application will be further described in conjunction with the embodiments with reference to the accompanying drawings. Detailed implementation manners

[0089] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0090] It should be noted that if there are directional indications (such as up, down, left, right, front, back...) involved in the embodiments of this application, then such directional indications are only used to explain the relative positional relationship, movement conditions, etc. between components in a certain specific posture (as shown in the attached drawings). If this specific posture changes, then the directional indications will also change accordingly.

[0091] In addition, if there are descriptions such as "first", "second", etc. involved in the embodiments of this application, then such descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the fact that those of ordinary skill in the art can implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0092] As Figure 1 shown, Figure 1 is a schematic diagram of the application scenario of the MEMS relay 100 in the embodiments of this application. Among them, the MEMS relay 100 is connected to the working power supply 300 and the controlled circuit 200. The MEMS relay 100 can control the controlled circuit 200, such as controlling the on / off of the controlled circuit 200, and the controlled circuit 200 can be any load circuit.

[0093] As Figure 2 、 Figure 4 shown, as Figure 2 is a schematic structural diagram of the MEMS relay 100 in the embodiments of this application. In the embodiments of this application, a MEMS relay 100 is proposed, including:

[0094] A substrate 130;

[0095] A spiral coil 110 and a magnetic strip 120. Both ends of the spiral coil 110 are used to connect to the control power supply L, and the control power supply L is used to control the direction of the current in the spiral coil 110. The spiral coil 110 is arranged on the substrate 130, and the axial direction of the spiral coil 110 is parallel to the surface of the substrate 130 that bears the spiral coil 110. The spiral coil 110 is spirally wound around the outside of the magnetic strip 120 in the length direction of the magnetic strip 120.

[0096] A first magnetic structure 140 is provided on the substrate 130 and corresponds to one end of the magnetic strip 120. There is a gap between the first magnetic structure 140 and the end of the magnetic strip 120. The first magnetic structure 140 and the magnetic strip 120 are used to control the controlled circuit 200.

[0097] As Figure 2 、 Figure 3 shown, in the embodiment of the present application, the spiral coil 110 is a three-dimensional spiral structure;

[0098] The spiral coil 110 is a multi-layer structure, and a plurality of square holes and strip-shaped holes are formed in each layer;

[0099] The square holes in each layer are stacked to form the spiral path of the spiral coil 110, and the strip-shaped holes in each layer are stacked to form a space for the magnetic strip 120 to pass through.

[0100] Referring to Figure 2 , the spiral coil 110 is provided on the substrate 130. Among them, the spiral coil 110 is a three-dimensional spiral structure. In the embodiment of the present application, the rotation path of the spiral coil 110 is a multi-layer structure, and it can be manufactured by the TSV (Through-Silicon Via) process.

[0101] For example, in the embodiment of the present application, the multi-layer structure includes a first layer 111, a second layer 112, a third layer 113, a fourth layer 114, a fifth layer 115, a sixth layer, a seventh layer, an eighth layer, and a ninth layer. Among them, the first layer 111 and the ninth layer, the second layer 112 and the eighth layer, the third layer 113 and the seventh layer, and the fourth layer 114 and the sixth layer are symmetric structures with respect to the fifth layer 115, and each layer is parallel to the axis of the spiral coil 110;

[0102] The first layer 111 includes a first strip-shaped hole 1111 and a plurality of first square holes 1112 provided on both sides of the first strip-shaped hole 1111;

[0103] The second layer 112 includes a second strip-shaped hole 1121 and a plurality of second square holes 1122 provided on both sides of the second strip-shaped hole 1121;

[0104] The third layer 113 includes a third strip-shaped hole 1131 and a plurality of third square holes 1132 arranged alternately on both sides of the third strip-shaped hole 1131;

[0105] The fourth layer 114 includes a plurality of fourth square holes 1141 and fifth square holes 1142. The fourth square holes 1141 and the fifth square holes 1142 are in one-to-one correspondence, and the fourth square holes 1141 and the fifth square holes 1142 are staggered on both sides of the central axis of the fourth layer 114. The adjacent fourth square holes 1141 and fifth square holes 1142 are connected through fourth strip-shaped holes 1143. The cross-sections of the fourth square holes 1141, the fifth square holes 1142 and the fourth strip-shaped holes 1143 of the fourth layer 114 form a broken line shape, and each turning point is a fourth square hole 1141 or a fifth square hole 1142.

[0106] The fifth layer 115 includes a plurality of sixth square holes 1151. The adjacent sixth square holes 1151 are connected through fifth strip-shaped holes 1152. The cross-sections of the sixth square holes 1151 and the fifth strip-shaped holes 1152 of the fifth layer 115 form a wavy shape, and the wave crests or wave troughs of the waves are the sixth square holes 1151.

[0107] The length directions of the strip-shaped holes of the first layer 111, the second layer 112 and the third layer 113 are all parallel to the axial direction of the spiral coil 110. The opening sizes of the square holes of the first layer 111, the second layer 112, the fourth layer 114, the third layer 113 and the fifth layer 115 increase in sequence. The distances between the square holes of the first layer 111, the second layer 112, the third layer 113, the fourth layer 114 and the fifth layer 115 and the central axis of the layer where they are located decrease in sequence.

[0108] In the embodiment of the present application, as Figure 3 shown, the spiral path of the spiral coil 110 is made through 9 through-silicon vias. Since the sixth layer and the first layer 111 are symmetrical structures with respect to the fifth layer 115, the seventh layer and the second layer 112 are symmetrical structures with respect to the fifth layer 115, the eighth layer and the third layer 113 are symmetrical structures with respect to the fifth layer 115, and the fourth layer 114 and the sixth layer are symmetrical structures with respect to the fifth layer 115, therefore Figure 3 the sixth layer, the seventh layer, the eighth layer and the ninth layer are not shown, and the specific structures of the sixth layer, the seventh layer, the eighth layer and the ninth layer can respectively refer to the structures of the first layer 111, the second layer 112, the third layer 113 and the fourth layer 114.

[0109] Continuing to refer to Figure 3 , from the substrate vertically upward (direction two), it successively includes the first layer 111, the second layer 112, the third layer 113, the fourth layer 114, the fifth layer 115, the sixth layer, the seventh layer, the eighth layer and the ninth layer. Among them, each layer extends along the plane where direction one and direction two are located, and the axial direction of the spiral coil 110 is parallel to direction one. As Figure 2 、 Figure 3 shown, among them, Figure 3The topological structure of the spiral coil 110 in each layer is taken as an example of the first layer. The first square holes 1112 are provided on both sides, and the first strip-shaped hole 1111 is provided in the middle. The square holes in each layer are stacked to form the spiral path of the spiral coil 110, and the strip-shaped holes in each layer are stacked to form a space for the magnetic strip 120 to pass through. The direction of the magnetic strip 120 is parallel to the first direction.

[0110] Continue to refer to Figure 3 , in the embodiment of the present application, the three-dimensional shape of the spiral coil 110 can be a circular spiral coil 110, or it can also be a square spiral coil 110. Among them, b is the cross-sectional shape when the spiral coil 110 is a circular spiral coil 110, and c is the cross-sectional shape when the spiral coil 110 is a square spiral coil 110. It should be noted that b does not necessarily have to be a regular circle, and it can also be an ellipse, a quasi-circular shape, etc. In addition, the spiral coil 110 is not limited to a 9-layer through-silicon via structure, and can also be a more-layer through-silicon via structure.

[0111] Continue to refer to Figure 2 , Figure 3 , the magnetic strip 120 passes through the middle of the spiral coil 110. The magnetic strip 120 can be a soft magnetic strip 120 and has micro-magnetism. For example, in the embodiment of the present application, a magnetic strip with a magnetic flux of 20 Gs - 800 Gs can be selected. In addition, the cross-section of the magnetic strip 120 can be square or circular.

[0112] In addition, in the embodiment of the present application, in order to isolate the magnetic strip 120 and the spiral coil 110, soft glue can be filled between the magnetic strip 120 and the spiral coil 110, so that the magnetic strip 120 can be suspended in the spiral coil 110 by means of the soft glue without contacting the spiral coil 110, and it can also enable the magnetic strip 120 to move slightly when it is subjected to the same magnetic repulsive force or different magnetic attractive force in its axial direction.

[0113] As Figure 2 , Figure 6 shown, the first magnetic structure 140 is provided at one end of the magnetic strip 120. In Figure 2In the shown orientation, the first magnetic structure 140 is disposed at the end position of the magnetic strip 120 in the third direction. Moreover, in the third direction, there is a gap between the first magnetic structure 140 and the magnetic strip 120. The first magnetic structure 140 is provided with a moving contact 190, and its moving contact 190 faces the end face of the magnetic strip 120 in the third direction and has a spacing. When there is a current in the spiral coil 110, the magnetism of the magnetic strip 120 can be enhanced. When the magnetism of the magnetic strip 120 is enhanced, the magnetic strip 120 and the first magnetic structure 140 can attract each other, so that the moving contact 190 of the magnetic strip 120 and the first magnetic structure 140 attract and contact each other, thereby achieving the purpose of controlling the controlled circuit 200. For example, when the moving contact 190 of the magnetic strip 120 and the first magnetic structure 140 contact, the controlled circuit 200 is turned on. It should be noted that the control of the controlled circuit 200 after the moving contact 190 of the magnetic strip 120 and the first magnetic structure 140 contact is not limited to the on signal, and can also be other control signals. The embodiments of the present application do not limit what specific control the MEMS relay performs on the controlled circuit. In addition, when the moving contact 190 of the magnetic strip 120 and the first magnetic structure 140 is disconnected, it can also play a role in controlling the controlled circuit 200. For example, it serves the purpose of disconnecting the controlled circuit 200.

[0114] As Figure 2 、 Figure 4 shown, Figure 4 This is a circuit schematic diagram of the spiral coil 110 of the MEMS relay 100 in the embodiment of the present application. Among them, both ends of the spiral coil 110 are connected in series to the control power supply L, and the control power supply L can control the direction of the current in the spiral coil 110. For example, in Figure 4 orientation, the control power supply L is DC+ and DC-, that is, the direction of the current in the spiral coil 110 is from top to bottom. In other embodiments, the control power supply L can also control the positions of DC+ and DC- to be interchanged, then the direction of the current in the spiral coil is changed to from bottom to top. Figure 4 The spiral wire in Figure 2 is the Figure 4 spiral coil 110 in

[0115] As Figure 2 、 Figure 4 、 Figure 6 shown, assuming that the magnetism of the first magnetic structure 140 is the N pole, in Figure 2In the shown orientation, when there is no current in the spiral coil 110, the magnetic strip 120 maintains a state of slight magnetism, keeps a spaced state from the first magnetic structure 140, and the controlled circuit 200 remains in an open state; when the control power supply L controls the current direction in the spiral coil 110 from top to bottom, the spiral coil 110 generates a magnetic field, increasing the magnetism of the magnetic strip 120. The upper end of the magnetic strip 120 is the S pole and the lower end is the N pole. After the magnetism of the upper S pole of the magnetic strip 120 increases, it attracts the first magnetic structure 140, causing the upper end of the magnetic strip 120 to contact the moving contact 190 of the first magnetic structure 140, and the controlled circuit 200 is turned on.

[0116] In the embodiment of the present application, the magnetic strip 120 is suspended in the spiral coil 110. When there is current in the spiral coil 110, the magnetism of the magnetic strip 120 is enhanced, and then it attracts the first magnetic structure 140 to control the controlled circuit 200. Among them, the magnetic strip 120 in the embodiment of the present application is not fixed to the substrate 130 at one end through an anchor and rotates around the anchor at the other end, but is entirely suspended inside the spiral coil 110 and moves slightly along the axis of the magnetic strip 120, without an anchor point, thus avoiding the problem of the anchor point loosening after long-term use.

[0117] As Figure 2 、 Figure 3 、 Figure 4 shown, in the embodiment of the present application, the MEMS relay 100 further includes a second magnetic structure 150. The second magnetic structure 150 is arranged on the substrate 130 and corresponds to the other end of the magnetic strip 120. There is a gap between the second magnetic structure 150 and the end of the magnetic strip 120. The second magnetic structure 150 and the magnetic strip 120 are used to control the controlled circuit 200, and the control signals of the second magnetic structure 150 and the magnetic strip 120 for the controlled circuit 200 are different from the control signals of the first magnetic structure 140 and the magnetic strip 120 for the controlled circuit 200.

[0118] As Figure 2 shown, in Figure 2 the shown orientation, the first magnetic structure 140 and the second magnetic structure 150 are respectively located at both ends of the magnetic strip 120 in direction three. As Figure 5 shown, Figure 5 is a schematic diagram of the usage scenario of the MEMS relay 100 including both the first magnetic structure 140 and the second magnetic structure 150 in the embodiment of the present application. The MEMS relay 100 has different closed loops, and different control signals can be sent to the controlled circuit 200 through different closed loops. In addition, the controlled circuit 200 can be any load circuit.

[0119] In the embodiments of the present application, the first magnetic structure 140 and the second magnetic structure 150 are symmetrical structures with respect to each other. The magnetic magnitudes of the first magnetic structure 140 and the second magnetic structure 150 are the same, the magnetic polarities of the ends close to the magnetic strip are the same, and the distances from the magnetic strip 120 are the same.

[0120] Refer to Figure 2 , in the embodiments of the present application, take the magnetic poles of the ends of the first magnetic structure 140 and the second magnetic structure 150 close to the magnetic strip as N poles as an example. In Figure 2 the shown orientation, when there is no current in the spiral coil 110, the magnetic strip 120 maintains a state of slight magnetism and remains spaced from both the first magnetic structure 140 and the second magnetic structure 150; when the control power supply L controls the current direction in the spiral coil 110 from top to bottom, the spiral coil 110 generates a magnetic field, causing the magnetism of the magnetic strip 120 to increase. When the magnetism of the magnetic strip 120 increases, the upper end of the magnetic strip 120 is an S pole and the lower end is an N pole. The increased magnetism of the N pole at the upper end of the magnetic strip 120 attracts the first magnetic structure 140, and the S pole at the lower end of the magnetic strip 120 repels the second magnetic structure 150, so that the upper end of the magnetic strip 120 contacts the moving contact 190 of the first magnetic structure 140. At this time, a first control signal, such as conduction, disconnection, voltage boost, etc., can be sent to the controlled circuit 200.

[0121] When the control power supply L controls the current direction in the spiral coil 110 from bottom to top, the spiral coil 110 generates a magnetic field, causing the magnetism of the magnetic strip 120 to increase. When the magnetism of the magnetic strip 120 increases, the upper end of the magnetic strip 120 is an N pole and the lower end is an S pole. The increased magnetism of the N pole at the upper end of the magnetic strip 120 repels the first magnetic structure 140, and the S pole at the lower end of the magnetic strip 120 attracts the second magnetic structure 150, so that the lower end of the magnetic strip 120 contacts the moving contact 190 of the second magnetic structure 150. At this time, a second control signal, such as conduction, disconnection, voltage boost, etc., is sent to the controlled circuit 200. In the embodiments of the present application, by setting two magnetic structures, a control effect similar to that of a single-pole double-throw switch can be formed.

[0122] As Figure 6 shown, in the embodiments of the present application, both the first magnetic structure 140 and the second magnetic structure 150 include: a first rectangular ring-shaped support structure 160. On the side of the first rectangular ring-shaped support structure 160 away from the magnetic strip 120, at least one static contact 170 is provided, and on the side close to the magnetic strip 120, a moving contact 190 is provided. The moving contact 190 faces the end of the magnetic strip 120.

[0123] As Figure 6 shown, Figure 6Schematic diagram of the magnetic structure. Among them, the first rectangular ring-shaped support structure 160 is a ring-shaped structure with a hollow interior. In the embodiment of the present application, three static contacts 170 are provided at one end of the first rectangular ring-shaped support structure 160 away from the magnetic strip 120, and a moving contact 190 is provided at one end close to the magnetic strip 120. When the magnetism of the magnetic strip 120 increases and attracts or repels the magnetic structure, the first rectangular ring-shaped support structure 160 in the middle has a certain elasticity, so that the moving contact 190 approaches or moves away from the magnetic strip 120.

[0124] As Figure 7 shown, in the embodiment of the present application, the first magnetic structure 140 and the second magnetic structure 150 also both include: a second rectangular ring-shaped support structure 161, and the second rectangular ring-shaped support structure 161 is connected to one side of the first rectangular ring-shaped support structure 160 close to the magnetic strip 120 through at least one intermediate contact 180, and the moving contact 190 is provided on one side of the second rectangular ring-shaped support structure 161 close to the magnetic strip 120.

[0125] As Figure 7 shown, in the embodiment of the present application, the second rectangular ring-shaped support structure 161 and the second rectangular ring-shaped support structure 161 are the same in size and shape, and both have a hollow interior to form an elastic structure. The first rectangular ring-shaped support structure 160 and the second rectangular ring-shaped support structure 161 are connected by three intermediate contacts 180, and the moving contact 190 is provided on one side of the second rectangular ring-shaped support structure 161 close to the magnetic strip 120. When the magnetism of the magnetic strip 120 increases and attracts or repels the magnetic structure, the first rectangular ring-shaped support structure 160 and the second rectangular ring-shaped support structure 161 in the middle both have a certain elasticity, so that the moving contact 190 can approach or move away from the magnetic strip 120. Due to the setting of two rectangular ring-shaped support structures, the elasticity is greater, so it has a better support effect, and at the same time has a better buffering effect. Therefore, the reliability is higher, and the service life is also longer.

[0126] As Figure 7 shown, in the embodiment of the present application, the three intermediate contacts 180 in the middle correspond to the three static contacts 170 one by one. In other embodiments, as Figure 8 shown, the three intermediate contacts 180 may not correspond to the three static contacts 170 one by one. Specifically, for example, the intermediate contact 180 in the middle corresponds to the static contact 170 in the middle, and compared with the two static contacts 170 on both sides, the two intermediate contacts 180 on both sides are closer to the outside of the magnetic structure, so that there can be more support points in the horizontal direction of the magnetic structure, and thus a better support effect.

[0127] In the embodiment of the present application, the magnetic strip 120 is suspended inside the spiral coil 110. When there is a current in the spiral coil 110, the magnetism of the magnetic strip 120 is enhanced, and then it is attracted to the first magnetic structure 140 to control the controlled circuit 200. Among them, the magnetic strip 120 in the embodiment of the present application is not fixed to the substrate 130 at one end through an anchor and rotates around the anchor at the other end, but is entirely suspended inside the spiral coil 110 and moves slightly along the axis of the magnetic strip 120, without an anchor point, thus avoiding the problem of anchor point loosening after long-term use.

[0128] As Figure 2 、 Figure 9 、 Figure 11 shown, the present application also proposes a control circuit, which is applied to the MEMS relay described in any of the above embodiments. In the embodiment of the present application, the control circuit includes: a buck module 400, a magnetic induction module 410, an amplification module 420, an operational amplifier module 430, a storage module 440, a boosting module 450, a filtering module 460, and a control signal output module 470;

[0129] The input end of the buck module 400 is used to connect to the working power supply 300, and the voltage output end of the buck module 400 is used to connect to the power input end of the magnetic induction module 410;

[0130] The magnetic induction module 410 is used to sense the magnetic change of the first magnetic structure 140 and / or the second magnetic structure 150 to generate a first differential signal and / or a second differential signal; the differential signal output end of the magnetic induction module 410 is connected to the signal input end of the amplification module 420;

[0131] The amplification module 420 is used to amplify the received differential signal;

[0132] The signal output end of the amplification module 420 is connected to the signal input end of the operational amplifier module 430, and the operational amplifier module 430 is used to perform arithmetic comparison on the received signal and select a signal that meets the first preset condition for output.

[0133] The signal output end of the operational amplifier module 430 is connected to the signal input end of the storage module 440, and the storage module 440 is used to identify the received signal and output a signal that meets the second preset condition;

[0134] The signal output end of the storage module 440 is connected to the input end of the boosting module 450, and the boosting module 450 is used to boost the voltage of the received signal;

[0135] The output end of the lifting module 450 is connected to the input end of the filtering module 460, and the filtering module 460 is used for performing phase transformation and filtering on the received signal;

[0136] The output end of the filtering module 460 is connected to the input end of the control signal output module 470, and the output end of the control signal output module 470 is used for outputting a control signal.

[0137] Among them, the working power supply 300 can be a power supply for the controlled circuit 200 and / or the MEMS relay 100 to work, and the working power supply 300 is reduced to a suitable voltage after passing through the buck module 400. In addition, the working power supplies of the magnetic induction module 410, the amplification module 420, the operational amplification module 430, the storage module 440, the filtering module 460, and the control signal output module 470 can also be provided by the buck module 400, or provided by other power supply modules.

[0138] The magnetic induction module 410 is used to sense the change in magnetism of the first magnetic structure 140 and / or the second magnetic structure 150 in the MEMS relay. For example, when only one first magnetic structure 140 or only one second magnetic structure 150 is provided in the MEMS relay, then the magnetic induction module 410 is only used to sense the change in the magnetic force magnitude of the first magnetic structure 140 or the second magnetic structure 150; when both the first magnetic structure 140 and the second magnetic structure 150 are provided in the MEMS relay, then the magnetic induction module 410 is used to sense both the change in the magnetic force magnitude of the first magnetic structure 140 and the change in the magnetic force magnitude of the second magnetic structure 150.

[0139] In the embodiment of the present application, taking the example that the MEMS relay only has one first magnetic structure, the magnetic induction module 410 is used to sense the change in the magnetic force magnitude of the first magnetic structure 140. For example, when the control power supply L controls the current direction of the spiral coil 110 from top to bottom, the spiral coil 110 generates a magnetic field, causing the magnetism of the magnetic strip 120 to increase. The upper end of the magnetic strip 120 is the S pole and the lower end is the N pole. After the magnetism of the upper end S pole of the magnetic strip 120 increases, it attracts the first magnetic structure 140, causing the upper end of the magnetic strip 120 to contact the moving contact 190 of the first magnetic structure 140. After the magnetic strip 120 contacts the first magnetic structure 140, the magnetism of the first magnetic structure 140 increases. When the magnetic induction module 410 senses the increase in the magnetism of the first magnetic structure 140, the magnetic induction module 410 can issue a first differential signal. The first differential signal is processed through a series of modules such as the amplification module 420, the operational amplification module 430, the storage module 440, the lifting module 450, and the filtering module 460, and finally is output from the control signal output module 470 to the controlled circuit 200 to play a control role on the controlled circuit 200.

[0140] For another example, in the embodiment of the present application, a first magnetic structure 140 and a second magnetic structure 150 are simultaneously provided in the MEMS relay. When the control power supply L controls the current direction of the spiral coil 110 from top to bottom, the upper end of the magnetic strip 120 contacts the first magnetic structure 140, and the magnetism of the first magnetic structure 140 increases. When the magnetic induction module 410 senses the increase in the magnetism of the first magnetic structure 140, the magnetic induction module 410 can issue a first differential signal; when the control power supply L controls the current direction of the spiral coil 110 from bottom to top, the lower end of the magnetic strip 120 contacts the second magnetic structure 150, and the magnetism of the second magnetic structure 140 increases. When the magnetic induction module 410 senses the increase in the magnetism of the second magnetic structure 150, the magnetic induction module 410 can issue a second differential signal. Both the first differential signal and the second differential signal are processed by a series of modules such as an amplification module 420, an operational amplifier module 430, a storage module 440, a boosting module 450, and a filtering module 460, and finally output from the control signal output module 470 to the controlled circuit 200 to play a control role on the controlled circuit 200. Since the first differential signal and the second differential signal are different, they can play different control roles.

[0141] In addition, it should be noted that Figure 10 and Figure 11 are both part of the circuit diagram of the control circuit in the embodiment of the present application. When combined, they form the complete circuit diagram of the control circuit in the embodiment of the present application.

[0142] As Figure 10 shown, in the embodiment of the present application, the step-down module 400 includes a step-down transformer U1, a first resistor R1, a second resistor R2, a third resistor R3, a first capacitor C1, and a second capacitor C2;

[0143] One end of the first resistor R1 is connected to the voltage input pin VIN of the step-down transformer U1, and the other end of the first resistor R1 is used to connect to the high-voltage working power supply. Among them, in the embodiment of the present application, the high-voltage working power supply can be, for example, a 600V power supply.

[0144] The ground pin VSS of the step-down transformer U1 is grounded in series with the first capacitor C1 and the second resistor R2. One end of the first capacitor C1 far from the step-down transformer U1 is also used to connect to the low-voltage working power supply; among them, this low-voltage working power supply is used for the step-down transformer U1 to work, such as 10v - 60v.

[0145] The third resistor R3 is connected in series between the first resistor R1 and the enable control pin CE of the step-down transformer U1.

[0146] One end of the first resistor R1 close to the step-down voltage regulator U1, one end of the second resistor R2 close to the step-down voltage regulator U1, one end of the first capacitor C1 far from the step-down voltage regulator U1, and one end of the third resistor R3 far from the step-down voltage regulator U1 are connected to each other.

[0147] The voltage output pin VOUT of the step-down voltage regulator U1 is grounded through the second capacitor C2, and the output pin VOUT of the step-down voltage regulator U1 is connected to the magnetic induction module 410.

[0148] Continue to refer to Figure 2 、 Figure 10 In the embodiment of the present application, the magnetic induction module 410 includes a first Hall sensor U1 and / or a second Hall sensor U2;

[0149] The voltage output pin VOUT of the step-down voltage regulator U1 is connected to the positive voltage signal input pin IN+ of the first Hall sensor U3 and / or the second Hall sensor U5;

[0150] The first Hall sensor U3 and / or the second Hall sensor U5 are used to sense the change in the magnetic force of the first magnetic structure 140 and / or the second magnetic structure 150, and generate a first differential signal and / or a second differential signal;

[0151] The negative voltage signal input pin IN- of the first Hall sensor U3 and / or the second Hall sensor U5 is grounded;

[0152] The positive differential signal output pin OUT+ and the negative differential signal output pin OUT- of the first Hall sensor U3 and / or the second Hall sensor U5 are both connected to the amplification module 420.

[0153] Among them, the first Hall sensor U3 is used to sense the change in the magnetic force of the first magnetic structure 140, and the second Hall sensor U5 is used to sense the change in the magnetic force of the second magnetic structure 150.

[0154] In the embodiment of the present application, both the first Hall sensor U3 and the second Hall sensor U5 can adopt Hall sensors of model HW101A.

[0155] Continue to refer to Figure 10 In the embodiment of the present application, the amplification module 420 includes an amplifier U2, a fourth resistor R4, a fifth resistor R5, a sixth resistor R6, and a seventh resistor R7;

[0156] The positive differential signal output pin OUT+ of the first Hall sensor U3 and / or the second Hall sensor U5 is connected to the positive voltage signal input pin IN+ of the amplifier U2 through the fourth resistor R4;

[0157] The negative differential signal output pin OUT- of the first Hall sensor U3 and / or the second Hall sensor U5 is connected to the negative voltage signal input pin IN- of the amplifier U2 through the sixth resistor R6;

[0158] Both ends of the seventh resistor R7 are respectively connected to the negative voltage signal input pin IN- and the signal output pin OUT of the amplifier U2;

[0159] Both ends of the fifth resistor R5 are respectively connected to the ground pin GND of the amplifier U2 and one end of the fourth resistor R4 close to the amplifier U2;

[0160] The signal output pin OUT of the amplifier U2 is connected to the operational amplifier module 430.

[0161] In the embodiment of the present application, the amplifier can be an amplifier with the model number LMV321, and the amplifier U2 can amplify the received differential signal. Among them, the differential signal output by the first Hall sensor U3 and / or the second Hall sensor U5 is a linear half-wave Sin sine voltage signal or a Cos cosine voltage signal, and the voltage signal strength is weak. For example, it is generally between 0.01V and 0.7V. After the differential signal is input to the amplifier U2, the amplifier U2 amplifies it and outputs an amplified linear voltage signal (half-wave Sin sine voltage signal or Cos cosine voltage signal), thereby increasing the voltage strength of the output signal. For example, in the embodiment of the present application, the strength of the linear voltage signal output by the amplifier U2 can be stabilized between 0.10V and 0.7V. As Figure 10 、 Figure 11 As shown, in the embodiment of the present application, the operational amplifier module 430 includes an operational amplifier U4 and a third capacitor C3;

[0162] The positive voltage signal input pin IN+ of the operational amplifier U4 is connected to the signal output pin OUT of the amplifier U2, and the negative voltage signal input pin IN- of the operational amplifier U4 is grounded through the third capacitor C3;

[0163] The signal output pin OUT of the operational amplifier U4 is connected to the register module 440.

[0164] In the embodiment of the present application, the operational amplifier U4 can be an operational amplifier with the model number LM321, and the operational amplifier U4 can perform arithmetic comparison on the signal received from the amplifier U3 based on the first preset condition.

[0165] Among them, generally speaking, the effective range of the differential signal output by the first Hall sensor U3 and / or the second Hall sensor U5 is between 0.01V and 0.7V. For example, if the first Hall sensor U3 and / or the second Hall sensor U5 use Si materials and related processes, the effective range of their output signals is generally between 0.01V and 0.5V; if the first Hall sensor U3 and / or the second Hall sensor U5 use GaSa, InP, GaN materials and related processes, the effective range of their output signals is generally between 0.1V and 0.7V. In addition, the signals output by the first Hall sensor U3 and / or the second Hall sensor U5 are linear Sin sine or Cos cosine signals. After being amplified by the amplifier U2, the signals output by the amplifier U2 are still linear Sin sine or Cos cosine signals, and the signal intensity output by the amplifier U2 will be stabilized between 0.1V and 0.7V.

[0166] When the operational amplifier U4 receives the signal output by the amplifier U2, it can be selected according to the first preset condition. For example, in the embodiment of the present application, the first preset condition can be in accordance with the transistor process standard: signals below 0.3V and above 0.7V are bad signals, and signals between 0.3V and 0.7V are effective signals. Then, in the embodiment of the present application, the constant-speed amplifier U4 can select and output signals with a voltage intensity between 0.3V and 0.7V according to the first preset condition.

[0167] In addition, it should be noted that in the embodiment of the present application, the first preset condition is to select signals between 0.3V and 0.7V as effective signals for output. This selection criterion is based on the GaSa process standard of the first Hall sensor U3 and / or the second Hall sensor U5. In other embodiments, the judgment criterion of the first preset condition can also be adjusted according to the actual materials and processes of the first Hall sensor U3 and / or the second Hall sensor U5, as well as the strength of the actual sampled signals, and is not limited to 0.3V - 0.7V.

[0168] Such as Figure 10 、 Figure 11 As shown, in the embodiment of the present application, the register module 440 includes a register U6 and an eighth resistor R8;

[0169] The serial data input pin SI of the register U6 is connected to the signal output pin OUT of the operational amplifier U4. One end of the eighth resistor R8 is connected in series with the enable control pin CE of the register U6, and the other end is connected to the voltage signal output terminal VOUT of the step-down voltage regulator U1. The serial data output pin SQH of the register U6 is connected to the boosting module 450. Wherein, in the embodiment of the present application, the register can adopt a register with the model number 74HC595, and the register U6 can identify the magnetic MEMS signal received from the operational amplifier U4 to determine whether it meets the second preset condition.

[0170] In the embodiment of the present application, the register U6 adopts a storage method of dynamically comparing with the previous valid signal, and outputs a digital signal of high and low levels. The judgment result is whether this path of signal continues to work or is resampled. For example, the output signal of the operational amplifier U4 is a digital signal of high and low levels. Each time the register U6 receives a digital signal of high and low levels, it compares it with the signal that was valid at the previous switch. If it is lower or higher than the most basic standard, it will be directly judged as a bad signal and enter the signal resampling of the next cycle. By adopting the storage method of dynamically comparing with the previous valid signal, the sampling results of the signal difference will be enhanced or weakened simultaneously, and the judgment standard of the register U6 will also change dynamically. Therefore, even if there are production process improvements or defects in this batch, it will not affect the signal judgment standard of this batch.

[0171] Specifically, in the embodiment of the present application, after the register U6 receives the magnetic MEMS signal sent by the operational amplifier U4, it judges whether it is an error signal. For example, it judges whether it is an overvoltage, overcurrent, over-temperature, short-circuit signal. If so, actions such as reset, loss, or resampling are performed based on the register U6. For example, the signal judged as an error can be transmitted to the step-down module 400, and wait again for the magnetic induction module 410 to sense the change in the magnetic force magnitude between the first magnetic structure 140 and the second magnetic structure 150. If it is judged that the received magnetic MEMS signal is a normal signal, it can be output to the boosting module 450. By setting the register U6 in the embodiment of the present application, based on the register U6, it can be judged whether the received signal is an error signal (such as overvoltage, overcurrent, over-temperature, short-circuit signal). If it is judged that the received signal is an error signal, the control signal is stopped from being sent to the controlled circuit, thereby playing a role in circuit protection.

[0172] As Figure 10 shown, in the embodiment of the present application, the boosting module 450 includes a first Mos tube U7 and a second Mos tube U8; the gate G1 of the first Mos tube U7 and the gate G2 of the second Mos tube U8 are both connected to the serial data output pin SQH of the register U6;

[0173] The drain D1 of the first MOS transistor U7 is used to connect to an adapted working power supply. The source S1 of the first MOS transistor U7 is connected to the drain D2 of the second MOS transistor U8, and the source S2 of the second MOS transistor U8 is grounded.

[0174] After the source S1 of the first MOS transistor U7 and the drain D2 of the second MOS transistor U8 are connected, they are connected to the control signal output module 470.

[0175] Among them, the first MOS transistor U7 and the second MOS transistor U8 can select different conduction circuits according to the level of the signal voltage output from the register U6. For example, when the signal received from the register U6 is a high voltage, the first MOS transistor U7 conducts, further boosting the received signal voltage to improve the driving ability. When the signal received from the register U6 is a low voltage, the second MOS transistor U8 conducts and grounds this signal to stop further transmission. Additionally, in the embodiments of the present application, the first MOS transistor U7 can be a field effect transistor of 2N7001, and the second MOS transistor U8 can be a field effect transistor of model 2N7002.

[0176] As Figure 11 shown, in the embodiments of the present application, the control signal output module 470 includes: a third MOS transistor U9, a fourth capacitor C4, a fifth capacitor C5, a ninth resistor R9, a tenth resistor R10, an eleventh resistor R11, a twelfth resistor R12, a first diode IN1, and a fourth MOS transistor U10;

[0177] After the source S1 of the first MOS transistor U7 and the drain D2 of the second MOS transistor U8 are connected, they are connected in series with the ninth resistor R9, the eleventh resistor R11, and the emitter E1 of the third MOS transistor U9;

[0178] After the source S1 of the first MOS transistor U7 and the drain D2 of the second MOS transistor U8 are connected, they are connected in series with the tenth resistor R10 and the base B1 of the third MOS transistor U9;

[0179] The collector C6 of the third MOS transistor U9 is grounded;

[0180] One end of the tenth resistor R10 connected to the base B1 of the third MOS transistor U9 is connected to one end of the twelfth resistor R12. The other end of the twelfth resistor R12 is grounded. One end of the tenth resistor R10 connected to the base B1 of the third MOS transistor U9 is connected to one end of the fourth capacitor C4. The other end of the fourth capacitor C4 is grounded, and the fourth capacitor C4 and the twelfth resistor R12 are in parallel;

[0181] The emitter E1 of the third Mos transistor U9 is connected to the base B2 of the four-Mos transistor U10 through the first diode IN1;

[0182] One end of the first diode IN1 close to the fourth Mos transistor U10 is grounded through the fifth capacitor C5;

[0183] The emitter E2 of the fourth Mos transistor U10 is used to connect to the working power supply, and the collector C7 of the fourth Mos transistor is the control signal output end of the control signal output module 470.

[0184] In the embodiment of the present application, the third Mos transistor U9 can perform phase conversion on the signal from the first Mos transistor U7, filter it after passing through the first diode IN1, and finally output it through the fourth Mos transistor U10, so as to achieve the driving effect of high voltage and large current.

[0185] The control circuit in the embodiment of the present application is applied to the MEMS relay described in any of the above embodiments, so it also has all the beneficial effects of the MEMS relay described in any of the above embodiments, which will not be elaborated here one by one.

[0186] The present application also proposes a power device, which includes a circuit board and at least one MEMS relay described in any of the above embodiments. The at least one MEMS relay is disposed on the circuit board, and the at least one MEMS relay is connected through the control circuit described in any of the above embodiments. The at least one MEMS relay is used to control a controlled circuit.

[0187] Among them, the MEMS switch relay plays a role in controlling the controlled circuit in the power device. The power device uses the MEMS switch relay in any of the above embodiments and the control circuit in any of the above embodiments, so it includes all the beneficial effects of the above MEMS relay and control circuit, which will not be elaborated here one by one.

[0188] The above are only optional embodiments of the present application, and do not limit the patent scope of the present application. Any equivalent structural transformation made under the inventive concept of the present application by using the content of the specification and drawings of the present application, or directly / indirectly applied in other related technical fields, is included in the patent protection scope of the present application.

[0189] Through the above description, the embodiments of the present application at least provide the following technical solutions, but not limited thereto:

[0190] 1. A MEMS relay, comprising:

[0191] A substrate;

[0192] A spiral coil and a magnetic strip, both ends of the spiral coil are used for connecting a control power supply, the control power supply is used for controlling the direction of the current in the spiral coil, the spiral coil is arranged on the substrate, the axial direction of the spiral coil is parallel to the surface of the substrate bearing the spiral coil, and the spiral coil spirally winds around the outer side of the magnetic strip in the length direction of the magnetic strip;

[0193] A first magnetic structure, the first magnetic structure is arranged on the substrate and is correspondingly arranged with one end of the magnetic strip, there is a gap between the first magnetic structure and the end of the magnetic strip, and the first magnetic structure and the magnetic strip are used for controlling a controlled circuit.

[0194] 2. The MEMS relay according to technical solution 1, the MEMS relay further includes a second magnetic structure, the second magnetic structure is arranged on the substrate and is correspondingly arranged with the other end of the magnetic strip, there is a gap between the second magnetic structure and the end of the magnetic strip, the second magnetic structure and the magnetic strip are used for controlling the controlled circuit, and the control signal of the controlled circuit by the second magnetic structure and the magnetic strip is different from the control signal of the controlled circuit by the first magnetic structure and the magnetic strip.

[0195] 3. The MEMS relay according to technical solution 1 or 2, the spiral path of the spiral coil is made by the through-silicon via technology.

[0196] 4. The MEMS relay according to any one of technical solutions 1-3, the spiral coil is a three-dimensional spiral structure;

[0197] The spiral coil is a multi-layer structure, and a plurality of square holes and strip-shaped holes are formed in each layer;

[0198] The square holes in each layer are stacked to form the spiral path of the spiral coil, and the strip-shaped holes in each layer are stacked to form a space for the magnetic strip to pass through.

[0199] 5. The MEMS relay according to any one of technical solutions 1-4, the multi-layer structure includes a first layer, a second layer, a third layer, a fourth layer, a fifth layer, a sixth layer, a seventh layer, an eighth layer and a ninth layer, wherein, the first layer and the ninth layer, the second layer and the eighth layer, the third layer and the seventh layer, the fourth layer and the sixth layer are symmetric structures with respect to the fifth layer respectively, and each layer is parallel to the axial direction of the spiral coil;

[0200] The first layer includes a first strip-shaped hole and a plurality of first square holes arranged on both sides of the first strip-shaped hole;

[0201] The second layer includes a second strip-shaped hole and a plurality of second square holes arranged on both sides of the second strip-shaped hole;

[0202] The third layer includes a third strip-shaped hole and a plurality of third square holes arranged in an alternating pattern on both sides of the third strip-shaped hole;

[0203] The fourth layer includes a plurality of fourth square holes and fifth square holes, the fourth square holes and the fifth square holes correspond to each other one by one, and the fourth square holes and the fifth square holes are arranged in an alternating pattern on both sides of the central axis of the fourth layer, and adjacent fourth square holes and fifth square holes are connected through a fourth strip-shaped hole; the cross-sections of the fourth square holes, the fifth square holes and the fourth strip-shaped hole in the fourth layer form a broken line shape, and each turning point is a fourth square hole or a fifth square hole;

[0204] The fifth layer includes a plurality of sixth square holes, and adjacent sixth square holes are connected through a fifth strip-shaped hole; the cross-sections of the sixth square holes and the fifth strip-shaped hole in the fifth layer form a wavy shape, and the wave crests or wave troughs of the waves are sixth square holes;

[0205] The length directions of the strip-shaped holes in the first layer, the second layer and the third layer are all parallel to the axial direction of the spiral coil; the opening sizes of the square holes in the first layer, the second layer, the fourth layer, the third layer and the fifth layer increase in sequence; the distances between the square holes in the first layer, the second layer, the third layer, the fourth layer and the fifth layer and the central axis of the layer where they are located decrease in sequence.

[0206] 6. The MEMS relay according to any one of technical solutions 1-5, wherein soft glue is filled between the periphery of the magnetic strip and the spiral coil.

[0207] 7. The MEMS relay according to any one of technical solutions 1-6, wherein both the first magnetic structure and the second magnetic structure include:

[0208] A first rectangular ring-shaped support structure, at least one static contact is provided on the side of the first rectangular ring-shaped support structure away from the magnetic strip, and a moving contact is provided on the side close to the magnetic strip, and the moving contact faces the end of the magnetic strip.

[0209] 8. The MEMS relay according to any one of technical solutions 1-7, wherein both the first magnetic structure and the second magnetic structure further include:

[0210] A second rectangular ring-shaped support structure, the second rectangular ring-shaped support structure is connected to the side of the first rectangular ring-shaped support structure close to the magnetic strip through at least one intermediate contact, and the moving contact is arranged on the side of the second rectangular ring-shaped support structure close to the magnetic strip.

[0211] 9. The MEMS relay according to any one of technical solutions 1-8, wherein both the static contact and the intermediate contact include three, and the three static contacts and the three intermediate contacts are arranged in a one-to-one correspondence.

[0212] 10. The MEMS relay according to any one of Technical Solutions 1-9, wherein both the stationary contact and the intermediate contact include three. The intermediate contact in the middle and the stationary contact in the middle are correspondingly arranged, and the intermediate contacts on both sides are respectively outside the two stationary contacts on both sides.

[0213] 11. The MEMS relay according to any one of Technical Solutions 1-10, wherein the first magnetic structure and the second magnetic structure are symmetrical structures to each other. The magnetic magnitudes of the first magnetic structure and the second magnetic structure are the same, the magnetic polarities of the ends close to the magnetic strip are the same, and the distances from the magnetic strip are the same.

[0214] 12. A control circuit applied to the MEMS relay according to any one of Technical Solutions 1-11, comprising: a step-down module, a magnetic induction module, an amplification module, an operational amplifier module, a storage module, a boosting module, a filtering module, and a control signal output module;

[0215] The input end of the step-down module is used to connect to the working power supply, and the voltage output end of the step-down module is used to connect to the power input end of the magnetic induction module;

[0216] The magnetic induction module is used to sense the magnetic change of the first magnetic structure and / or the second magnetic structure to generate a first differential signal and / or a second differential signal; the differential signal output end of the magnetic induction module is connected to the signal input end of the amplification module;

[0217] The amplification module is used to amplify the received differential signal;

[0218] The signal output end of the amplification module is connected to the signal input end of the operational amplifier module. The operational amplifier module is used to perform arithmetic comparison on the received signal and select a signal that meets the first preset condition for output;

[0219] The signal output end of the operational amplifier module is connected to the signal input end of the storage module. The storage module is used to identify the received signal and output a signal that meets the second preset condition; the signal output end of the storage module is connected to the input end of the boosting module. The boosting module is used to boost the voltage of the received signal;

[0220] The output end of the boosting module is connected to the input end of the filtering module. The filtering module is used to perform phase transformation and filtering on the received signal;

[0221] The output end of the filtering module is connected to the input end of the control signal output module. The output end of the control signal output module is used to output a control signal.

[0222] 13. The control circuit as described in Technical Solution 12, wherein the buck module includes a buck converter, a first resistor, a second resistor, a third resistor, a first capacitor, and a second capacitor;

[0223] One end of the first resistor is connected to the voltage input pin of the buck converter, and the other end of the first resistor is used to connect to the high-voltage working power supply;

[0224] The ground pin of the buck converter is grounded after being connected in series with the first capacitor and the second resistor, and the end of the first capacitor away from the buck converter is also used to connect to the low-voltage working power supply;

[0225] The third resistor is connected in series between the first resistor and the enable control pin of the buck converter;

[0226] The end of the first resistor close to the buck converter, the end of the second resistor close to the buck converter, the end of the first capacitor away from the buck converter, and the end of the third resistor away from the buck converter are connected to each other;

[0227] The voltage output pin of the buck converter is grounded through the second capacitor;

[0228] The voltage output pin of the buck converter is connected to the magnetic induction module.

[0229] 14. The control circuit as described in Technical Solution 12 or 13, wherein the magnetic induction module includes a first Hall sensor and / or a second Hall sensor;

[0230] The voltage output pin of the buck converter is connected to the positive voltage signal input pin of the first Hall sensor and / or the second Hall sensor;

[0231] The first Hall sensor and / or the second Hall sensor is used to sense the change in the magnetic force magnitude of the first magnetic structure and / or the second magnetic structure, and generate a first differential signal and / or a second differential signal;

[0232] The negative voltage signal input pin of the first Hall sensor and / or the second Hall sensor is grounded;

[0233] The positive differential signal output pin and the negative differential signal output pin of the first Hall sensor and / or the second Hall sensor are both connected to the amplification module.

[0234] 15. The control circuit as described in any one of Technical Solutions 12-14, wherein the amplification module includes an amplifier, a fourth resistor, a fifth resistor, a sixth resistor, and a seventh resistor;

[0235] The positive differential signal output pin of the first Hall sensor and / or the second Hall sensor is connected to the positive voltage signal input pin of the amplifier through the fourth resistor;

[0236] The negative differential signal output pin of the first Hall sensor and / or the second Hall sensor is connected to the negative voltage signal input pin of the amplifier through the sixth resistor;

[0237] Both ends of the seventh resistor are respectively connected to the negative voltage signal input pin and the signal output pin of the amplifier;

[0238] Both ends of the fifth resistor are respectively connected to the ground pin of the amplifier and one end of the fourth resistor close to the amplifier;

[0239] The signal output pin of the amplifier is connected to the operational amplifier module.

[0240] 16. The control circuit according to any one of technical solutions 12-15, wherein the operational amplifier module includes an operational amplifier and a third capacitor;

[0241] The positive voltage signal input pin of the operational amplifier is connected to the signal output pin of the amplifier, and the negative voltage signal input pin of the operational amplifier is grounded through the third capacitor;

[0242] The signal output pin of the operational amplifier is connected to the register module.

[0243] 17. The control circuit according to any one of technical solutions 12-16, wherein the register module includes a register and an eighth resistor;

[0244] The serial data input pin of the register is connected to the signal output pin of the operational amplifier. One end of the eighth resistor is connected in series to the enable control pin of the register, and the other end is connected to the voltage signal output end of the step-down voltage regulator. The serial data output pin of the register is connected to the boosting module.

[0245] 18. The control circuit according to any one of technical solutions 12-17, wherein the boosting module includes a first MOS transistor and a second MOS transistor;

[0246] The gates of the first MOS transistor and the second MOS transistor are both connected to the serial data output pin of the register;

[0247] The drain of the first MOS transistor is used to connect to an adapted working power supply. The source of the first MOS transistor is connected to the drain of the second MOS transistor, and the source of the second MOS transistor is grounded;

[0248] After the source of the first MOS transistor and the drain of the second MOS transistor are connected, they are connected to the control signal output module.

[0249] 19. The control circuit according to any one of technical solutions 12-18, wherein the control signal output module includes: a third MOS transistor, a fourth capacitor, a fifth capacitor, a ninth resistor, a tenth resistor, an eleventh resistor, a twelfth resistor, a first diode, and a fourth MOS transistor;

[0250] The source of the first MOS transistor and the drain of the second MOS transistor are connected and then connected in series with the ninth resistor, the eleventh resistor, and the emitter of the third MOS transistor;

[0251] The source of the first MOS transistor and the drain of the second MOS transistor are connected and then connected in series with the tenth resistor and the base of the third MOS transistor;

[0252] The collector of the third MOS transistor is grounded;

[0253] One end of the tenth resistor connected to the base of the third MOS transistor is connected to one end of the twelfth resistor, the other end of the twelfth resistor is grounded, one end of the tenth resistor connected to the base of the third MOS transistor is connected to one end of the fourth capacitor, the other end of the fourth capacitor is grounded, and the fourth capacitor and the twelfth resistor are in parallel;

[0254] The emitter of the third MOS transistor is connected to the base of the fourth MOS transistor through the first diode;

[0255] One end of the first diode close to the fourth MOS transistor is grounded through the fifth capacitor;

[0256] The emitter of the fourth MOS transistor is used to connect to a working power supply, and the collector of the fourth MOS transistor is the control signal output end of the control signal output module.

[0257] 20. A power device, the power device includes a circuit board and at least one MEMS relay according to technical solutions 1-11, the at least one MEMS relay is disposed on the circuit board, the at least one MEMS relay is connected through a control circuit according to any one of technical solutions 12-19, and the at least one MEMS relay is used to control a controlled circuit.

Claims

1. A MEMS relay, characterized in that: include: substrate; A spiral coil and a magnetic strip, wherein two ends of the spiral coil are used to connect to a control power supply, and the control power supply is used to control the direction of the current in the spiral coil. The spiral coil is arranged on the substrate, and the axial direction of the spiral coil is parallel to the surface of the substrate carrying the spiral coil. The spiral coil is spirally wound around the outer side of the magnetic strip in the length direction of the magnetic strip; a first magnetic structure, the first magnetic structure being disposed on the substrate and corresponding to one end of the magnetic strip, the first magnetic structure and the end of the magnetic strip having a gap, and the first magnetic structure and the magnetic strip being used to control a controlled circuit; The spiral path of the spiral coil is made by through silicon via technology; The spiral coil is a three-dimensional spiral structure; The spiral coil is a multi-layer structure, and a plurality of square holes and strip holes are formed in each layer; The square holes in each layer are stacked to form a spiral path of the spiral coil, and the strip holes in each layer are stacked to form a space for the magnetic strip to pass through.

2. The MEMS relay according to claim 1, characterized in that: The MEMS relay further includes a second magnetic structure, which is disposed on the substrate and corresponds to the other end of the magnetic strip, wherein a gap exists between the second magnetic structure and the end of the magnetic strip, and the second magnetic structure and the magnetic strip are used to control the controlled circuit, and a control signal of the second magnetic structure and the magnetic strip on the controlled circuit is different from a control signal of the first magnetic structure and the magnetic strip on the controlled circuit.

3. The MEMS relay according to claim 1, characterized in that: The multilayer structure comprises a first layer, a second layer, a third layer, a fourth layer, a fifth layer, a sixth layer, a seventh layer, an eighth layer and a ninth layer, wherein the first layer and the ninth layer, the second layer and the eighth layer, the third layer and the seventh layer, the fourth layer and the sixth layer are symmetrical structures with respect to the fifth layer, and each layer is parallel to the axial direction of the spiral coil; The first layer includes a first strip-shaped hole and a plurality of first square holes arranged on both sides of the first strip-shaped hole; The second layer includes a second strip-shaped hole and a plurality of second square holes arranged on both sides of the second strip-shaped hole; The third layer includes a third strip hole and a plurality of third holes arranged in a staggered manner and arranged on both sides of the third strip hole; The fourth layer includes a plurality of fourth square holes and fifth square holes, the fourth square holes and the fifth square holes correspond to each other one by one, and the fourth square holes and the fifth square holes are arranged alternately on both sides of the central axis of the fourth layer, and the adjacent fourth square holes and fifth square holes are connected through fourth strip holes; the cross-sections of the fourth square holes, the fifth square holes and the fourth strip holes of the fourth layer form a broken line, and each turning point is a fourth square hole or a fifth square hole; The fifth layer comprises a plurality of sixth square holes, and adjacent sixth square holes are connected through fifth strip holes; the cross-sections of the sixth square holes and the fifth strip holes of the fifth layer form a wave shape, and the crests or troughs of the waves are the sixth square holes; The length directions of the strip holes in the first, second and third layers are parallel to the axial direction of the spiral coil; the opening sizes of the square holes in the first, second, fourth, third and fifth layers increase successively; the distances between the square holes in the first, second, third, fourth and fifth layers and the central axis of the layer decrease successively.

4. The MEMS relay according to claim 1 or 2, characterized in that: Soft glue is filled around the magnetic strip and between the spiral coil.

5. The MEMS relay according to claim 2, characterized in that: The first magnetic structure and the second magnetic structure both include: A first rectangular annular support structure is provided with at least one static contact on a side of the first rectangular annular support structure away from the magnetic strip, and a moving contact on a side close to the magnetic strip, wherein the moving contact is opposite to the end of the magnetic strip.

6. The MEMS relay according to claim 5, characterized in that: The first magnetic structure and the second magnetic structure each further include: A second rectangular annular support structure, wherein the second rectangular annular support structure is connected to a side of the first rectangular annular support structure close to the magnetic strip through at least one intermediate contact, and the moving contact is arranged on a side of the second rectangular annular support structure close to the magnetic strip.

7. The MEMS relay according to claim 6, characterized in that: The static contacts and the intermediate contacts each include three, and the three static contacts and the three intermediate contacts are arranged in one-to-one correspondence.

8. The MEMS relay according to claim 6, characterized in that: The static contacts and the intermediate contacts each include three, the intermediate contact located in the middle and the static contact located in the middle are arranged correspondingly, and the intermediate contacts located on both sides are respectively outside the two static contacts located on both sides.

9. The MEMS relay according to claim 2, characterized in that: The first magnetic structure and the second magnetic structure are symmetrical structures. The first magnetic structure and the second magnetic structure have the same magnetic magnitude, the same magnetic polarity at one end close to the magnetic stripe, and the same distance from the magnetic stripe.

10. A control circuit, applied to the MEMS relay according to any one of claims 2, 5, 6, and 9, characterized in that: include: Buck module, magnetic induction module, amplification module, operational amplifier module, storage module, pull-up module, filtering module and control signal output module; The input end of the step-down module is used to connect to the working power supply, and the voltage output end of the step-down module is used to connect to the power input end of the magnetic induction module; The magnetic induction module is used to sense the magnetic change of the first magnetic structure and / or the second magnetic structure to generate a first differential signal and / or a second differential signal; the differential signal output end of the magnetic induction module is connected to the signal input end of the amplification module; The amplification module is used to amplify the received differential signal; The signal output end of the amplification module is connected to the signal input end of the operational amplification module, and the operational amplification module is used to perform operational comparison on the received signal and select a signal that meets the first preset condition for output; The signal output end of the operational amplifier module is connected to the signal input end of the register module, and the register module is used to identify the received signal and output a signal that meets the second preset condition; the signal output end of the register module is connected to the input end of the pull-up module, and the pull-up module is used to pull up the voltage of the received signal; The output end of the pull-up module is connected to the input end of the filter module, and the filter module is used to perform phase conversion and filtering on the received signal; The output end of the filter module is connected to the input end of the control signal output module, and the output end of the control signal output module is used to output a control signal.

11. The control circuit according to claim 10, characterized in that: The step-down module includes a step-down device, a first resistor, a second resistor, a third resistor, a first capacitor and a second capacitor; One end of the first resistor is connected to the voltage input pin of the voltage reducer, and the other end of the first resistor is used to connect to a high-voltage working power supply; The ground pin of the voltage reducer is connected in series with the first capacitor and the second resistor and then grounded, and an end of the first capacitor away from the voltage reducer is also used to connect a low-voltage working power supply; The third resistor is connected in series between the first resistor and the enable control pin of the buck; An end of the first resistor close to the voltage dropper, an end of the second resistor close to the voltage dropper, an end of the first capacitor away from the voltage dropper, and an end of the third resistor away from the voltage dropper are connected to each other; The voltage output pin of the voltage reducer is grounded through the second capacitor; The voltage output pin of the voltage reducer is connected to the magnetic induction module.

12. The control circuit according to claim 11, characterized in that: The magnetic induction module includes a first Hall sensor and / or a second Hall sensor; The voltage output pin of the voltage reducer is connected to the positive pressure signal input pin of the first Hall sensor and / or the second Hall sensor; The first Hall sensor and / or the second Hall sensor are used to sense the change in the magnitude of the magnetic force of the first magnetic structure and / or the second magnetic structure, and generate a first differential signal and / or a second differential signal; A negative pressure signal input pin of the first Hall sensor and / or the second Hall sensor is grounded; The positive differential signal output pin and the negative differential signal output pin of the first Hall sensor and / or the second Hall sensor are both connected to the amplification module.

13. The control circuit according to claim 12, characterized in that: The amplification module includes an amplifier, a fourth resistor, a fifth resistor, a sixth resistor and a seventh resistor; The positive differential signal output pin of the first Hall sensor and / or the second Hall sensor is connected to the positive voltage signal input pin of the amplifier through the fourth resistor; The negative differential signal output pin of the first Hall sensor and / or the second Hall sensor is connected to the negative voltage signal input pin of the amplifier through the sixth resistor; Two ends of the seventh resistor are respectively connected to the negative voltage signal input pin and the signal output pin of the amplifier; Two ends of the fifth resistor are respectively connected to the ground pin of the amplifier and one end of the fourth resistor close to the amplifier; The signal output pin of the amplifier is connected to the operational amplifier module.

14. The control circuit according to claim 13, characterized in that: The operational amplifier module includes an operational amplifier and a third capacitor; The positive voltage signal input pin of the operational amplifier is connected to the signal output pin of the amplifier, and the negative voltage signal input pin of the operational amplifier is grounded through the third capacitor; The signal output pin of the operational amplifier is connected to the register module.

15. The control circuit according to claim 14, characterized in that: The register module includes a register and an eighth resistor; The serial data input pin of the register is connected to the signal output pin of the operational amplifier, one end of the eighth resistor is connected in series with the enable control pin of the register, and the other end is connected to the voltage signal output end of the buck, and the serial data output pin of the register is connected to the pull-up module.

16. The control circuit according to claim 15, characterized in that: The pull-up module includes a first MOS tube and a second MOS tube; The gate of the first MOS tube and the gate of the second MOS tube are both connected to the serial data output pin of the register; The drain of the first MOS tube is used to connect to an adapted working power supply, the source of the first MOS tube is connected to the drain of the second MOS tube, and the source of the second MOS tube is grounded; The source of the first MOS tube and the drain of the second MOS tube are connected and then connected to the control signal output module.

17. The control circuit according to claim 16, characterized in that: The control signal output module includes: a third MOS tube, a fourth capacitor, a fifth capacitor, a ninth resistor, a tenth resistor, an eleventh resistor, a twelfth resistor, a first diode, and a fourth MOS tube; The source of the first MOS tube and the drain of the second MOS tube are connected in series with the ninth resistor, the eleventh resistor, and the emitter of the third MOS tube; The source of the first MOS tube and the drain of the second MOS tube are connected in series with the tenth resistor and the base of the third MOS tube; The collector of the third MOS tube is grounded; One end of the tenth resistor connected to the base of the third MOS tube is connected to one end of the twelfth resistor, and the other end of the twelfth resistor is grounded; one end of the tenth resistor connected to the base of the third MOS tube is connected to one end of the fourth capacitor, and the other end of the fourth capacitor is grounded, and the fourth capacitor and the twelfth resistor are connected in parallel; The emitter of the third MOS tube is connected to the base of the fourth MOS tube through the first diode; One end of the first diode close to the fourth MOS tube is grounded through the fifth capacitor; the emitter of the fourth MOS tube is used to connect the working power supply, and the collector of the fourth MOS tube is the control signal output end of the control signal output module.

18. A power device, characterized in that: The power device comprises a circuit board and at least one MEMS relay as described in any one of claims 1-9, wherein the at least one MEMS relay is arranged on the circuit board, the at least one MEMS relay is connected via the control circuit as described in any one of claims 10-17, and the at least one MEMS relay is used to control a controlled circuit.

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