Target control signal generation method, device and computer readable storage medium

Abstract

The present application provides a method, device and computer-readable storage medium for generating a target control signal, the method comprising: determining a reference straight line according to a smooth transition ratio, and determining a first coordinate of a first tangent point based on the reference straight line; the arc is set at the start and stop points of the original linear signal response curve, and the reference straight line is a straight line passing through the first tangent point; according to the first coordinate and the slope of the first line segment, determining the second coordinate of the second tangent point, as well as the center and radius of the reference circle where the arc is located; the first and second tangent points are respectively the tangent points of the arc and the first and second line segments of the original linear signal response curve, and the first line segment and the second line segment are adjacent line segments of the original linear signal response curve; generating an arc signal response curve according to the reference circle and the original linear signal response curve; generating a target control signal through the arc signal response curve. The present application can generate a continuous and smooth control signal by adopting an arc signal response curve, thereby optimizing the performance of the control signal.

Description

Technical Field

[0001] The present application relates to the field of signal generation, and in particular, to a method and device for generating a target control signal and a computer-readable storage medium. Background Art

[0002] MOCVD equipment, during the temperature rise process of the MOCVD equipment reaction chamber in process preparation, the temperature difference between the target temperature setting value and the feedback temperature under the normal temperature chamber state is large, generally around 600-1200°C. If the setting signal is directly input to the PID controller during the temperature rise stage, due to the large temperature difference, it will cause a large incremental power output and fluctuation, resulting in temperature overshoot, large control error and other problems.

[0003] The common method to solve this problem is to use a linear signal generator (LSG) to gradually approach the target temperature setting value with a fixed step increment, so that the error input signal of the PID in the heating stage is kept within a small range, that is, it is kept within an order of magnitude with the error signal in the constant temperature growth stage. However, this linear signal generator is essentially a multi-segment nonlinear function, and the derivative mutation phenomenon will occur at the start and stop points, resulting in large lag and overshoot of the response curve at these two points. Summary of the invention

[0004] In view of this, the purpose of the embodiments of the present application is to provide a method, device and computer-readable storage medium for generating a target control signal, so as to avoid large lag and overshoot of the response curve at the start and stop points and optimize the performance of the output control signal.

[0005] In a first aspect, an embodiment of the present application provides a method for generating a target control signal, comprising: determining a reference straight line according to a smooth transition ratio, and determining a first coordinate of a first tangent point based on the reference straight line; wherein the first tangent point is the tangent point of a circular arc and a first line segment of an original linear signal response curve, the circular arc is set at the start and stop points of the original linear signal response curve, and the reference straight line is a straight line passing through the first tangent point; determining a second coordinate of a second tangent point, and a center point and a radius of a reference circle where the circular arc is located, according to the first coordinate and the slope of the first line segment; wherein the second tangent point is the tangent point of the circular arc and a second line segment of the original linear signal response curve, the first line segment and the second line segment are adjacent line segments of the original linear signal response curve; determining the center point and the radius of the reference circle where the circular arc is located according to the first tangent point and the second tangent point; generating an arc signal response curve according to the reference circle and the original linear signal response curve; and generating a target control signal through the arc signal response curve.

[0006] In the above implementation process, by replacing part of the straight line segments between two adjacent line segments of the original linear signal response curve with an arc, the arc signal response curve can generate a continuous and smooth control signal between the two adjacent line segments, avoiding large lag and overshoot at the start and stop points of the response curve, thereby optimizing the performance of the control signal output by the arc signal response curve.

[0007] In one embodiment, generating an arc signal response curve based on the reference circle and the original linear signal response curve includes: replacing the line segment between the first tangent point and the second tangent point in the original linear signal response curve with the arc between the first tangent point and the second tangent point to form the arc signal response curve; wherein two adjacent line segments in the arc signal response curve transition through the arc.

[0008] In the above implementation process, the line segment between the first tangent point and the second tangent point in the original linear signal response curve is replaced by the arc between the first tangent point and the second tangent point, so that two adjacent line segments can be transitioned through the arc, and the non-differentiable points output in the linear signal response curve can be eliminated, so that the signal output by the arc signal response curve is continuously differentiable, thereby achieving a smooth response to the target signal.

[0009] In one embodiment, after generating the arc signal response curve according to the reference circle and the original linear signal response curve, the method further includes: determining the coordinate difference between the starting point of the arc signal response curve and the coordinate origin of the coordinate system where the arc signal response curve is located; according to the coordinate difference, translating the arc signal response curve; wherein the starting point of the translated arc signal response curve coincides with the origin of the coordinate system.

[0010] In the above implementation process, after determining the arc signal response curve, if the arc signal response curve has a coordinate point located before the coordinate origin, the arc signal response curve is translated so that all coordinate points in the arc signal response curve are located after the coordinate origin, so that the target control signal generated by the arc signal response curve can be distributed in the positive time domain, thereby improving the target control signal output capacity of the arc signal response curve.

[0011] In one embodiment, after translating the arc signal response curve according to the coordinate difference, the method also includes: determining the first signal generation period of the original linear signal response curve; determining the second signal generation period of the translated arc signal response curve; calculating the period ratio of the first signal generation period to the second signal generation period; and transforming the arc signal response curve according to the periodic function and the period ratio.

[0012] In the above implementation process, after the arc signal response curve is translated, the translated arc signal response curve is compressed so that the response time of the arc signal response curve is consistent with that of the original linear signal response curve, so that the arc signal response curve strictly meets the response time requirement of the signal generator, thereby improving the response capability and efficiency of the arc signal response curve.

[0013] In one embodiment, after the arc signal response curve is transformed according to the periodic function and the period ratio, the method further includes: determining a first slope of the transformed arc signal response curve; updating the smooth transition ratio according to the first slope and the slope of the original linear signal response curve; and updating the arc signal response curve according to the smooth transition ratio until the signal output by the arc signal response curve meets the set requirements.

[0014] In the above implementation process, the smooth transition ratio is updated according to the first slope of the arc signal response curve and the slope of the original linear signal response curve, and the arc signal response curve is further updated by the smooth transition ratio, so as to narrow the gap between the first slope and the slope of the original linear signal response curve, so that the distortion of the signal output by the arc signal response curve is within the allowable range, thereby improving the accuracy of the signal output by the arc signal response curve.

[0015] In one embodiment, the original linear signal response curve includes a first start-stop point and a second start-stop point, the circular arc includes a first circular arc and a second circular arc, and the reference straight line includes: a first reference straight line and a second reference straight line; the method further includes: determining the first reference straight line and the second reference straight line according to the smooth transition ratio, and determining the first coordinates of the first tangent point of the first circular arc based on the first reference straight line, and determining the third coordinates of the third tangent point of the second circular arc based on the second reference straight line; wherein the first tangent point is the tangent point of the first circular arc and the first line segment of the original linear signal response curve, the first circular arc is set at the first start-stop point, and the first reference straight line is a straight line passing through the first tangent point; the third tangent point is the tangent point of the second circular arc and the first line segment, the second circular arc is set at the second start-stop point, and the second reference straight line is a straight line passing through the third tangent point; based on According to the first coordinates and the slope of the first line segment, the second coordinates of the second tangent point are determined, and according to the third coordinates and the slope of the first line segment, the fourth coordinates of the fourth tangent point are determined; wherein the second tangent point is the tangent point of the first arc and the second line segment of the original linear signal response curve, and the fourth tangent point is the tangent point of the second arc and the third line segment of the original linear signal response curve; the two ends of the first line segment are connected to the second line segment and the third line segment respectively; according to the first tangent point and the second tangent point, the center and radius of the first reference circle where the first arc is located are determined, and according to the third tangent point and the fourth tangent point, the center and radius of the second reference circle where the second arc is located are determined; wherein the radii of the first reference circle and the second reference circle are the same; the arc signal response curve is generated according to the first reference circle, the second reference circle and the original linear signal response curve.

[0016] In the above implementation process, when the arc signal response curve includes multiple arcs, setting the radius of the multiple arcs to be the same can reduce the difficulty of calculating the arcs and improve the efficiency of generating the arc signal response curve.

[0017] In one embodiment, the original linear signal response curve includes a first start-stop point and a second start-stop point, the circular arc includes a first circular arc and a second circular arc, the reference straight line includes: a first reference straight line and a second reference straight line, and the smooth transition ratio includes a first smooth transition ratio and a second smooth transition ratio; the method further includes: determining the first reference straight line according to the first smooth transition ratio, and determining the second reference straight line according to the second smooth transition ratio; determining the first coordinates of the first tangent point of the first circular arc based on the first reference straight line, and determining the third coordinates of the third tangent point of the second circular arc based on the second reference straight line; wherein the first tangent point is the tangent point of the first circular arc and the first line segment of the original linear signal response curve, the first circular arc is set at the first start-stop point, and the first reference straight line is a straight line passing through the first tangent point; the third tangent point is the tangent point of the second circular arc and the first line segment, and the second circular arc is set at the second start-stop point At the position, the second reference straight line is a straight line passing through the third tangent point; the second coordinate of the second tangent point is determined according to the first coordinate and the slope of the first line segment, and the fourth coordinate of the fourth tangent point is determined according to the third coordinate and the slope of the first line segment; wherein the second tangent point is the tangent point of the first circular arc and the second line segment of the original linear signal response curve, and the fourth tangent point is the tangent point of the second circular arc and the third line segment of the original linear signal response curve; the two ends of the first line segment are connected to the second line segment and the third line segment respectively; the center and radius of the first reference circle where the first circular arc is located are determined according to the first tangent point and the second tangent point, and the center and radius of the second reference circle where the second circular arc is located are determined according to the third tangent point and the fourth tangent point; wherein the radii of the first reference circle and the second reference circle are different; the arc signal response curve is generated according to the first reference circle, the second reference circle and the original linear signal response curve.

[0018] In the above implementation process, when the arc signal response curve includes multiple arcs, setting different radii between the multiple arcs can increase the diversity of the generated arcs, thereby increasing the application scenarios of the arc signal response curve.

[0019] In one embodiment, applied to MOCVD equipment, the target control signal is a target temperature control signal; after generating the target control signal through the arc signal response curve, the method further includes: controlling the MOCVD equipment to generate a target temperature through the target temperature signal.

[0020] In the above implementation process, by transmitting the target temperature control signal generated by the arc signal response curve to the MOCVD device, the MOCVD device can output the corresponding target temperature, reduce the temperature difference during the heating process of the MOCVD device, and improve the accuracy of MOCVD device control.

[0021] In a second aspect, an embodiment of the present application further provides a target control signal generating device, comprising: a first determination module, used to determine a reference straight line according to a smooth transition ratio, and based on the reference straight line, determine a first coordinate of a first tangent point; wherein the first tangent point is a tangent point between a circular arc and a first line segment of an original linear signal response curve, the circular arc is set at the start and stop points of the original linear signal response curve, and the reference straight line is a straight line passing through the first tangent point; a second determination module, used to determine a second coordinate of a second tangent point, and a center point and a radius of a reference circle where the circular arc is located, according to the first coordinate and the slope of the first line segment; wherein the second tangent point is a tangent point between the circular arc and a second line segment of the original linear signal response curve, the first line segment and the second line segment are adjacent line segments of the original linear signal response curve; a first generation module, used to generate an arc signal response curve according to the reference circle and the original linear signal response curve; and a second generation module, used to generate a target control signal through the arc signal response curve.

[0022] In a third aspect, an embodiment of the present application further provides an electronic device, comprising: a processor and a memory, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the machine-readable instructions are executed by the processor to perform the steps of the method in the above-mentioned first aspect, or any possible implementation of the first aspect.

[0023] In a fourth aspect, an embodiment of the present application further provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the target control signal generating method in the above-mentioned first aspect, or any possible implementation manner of the first aspect are executed.

[0024] The technical solution in the embodiment of the present application replaces part of the straight line segments between two adjacent line segments of the original linear signal response curve with an arc, so that the arc signal response curve can generate a continuous and smooth control signal between two adjacent line segments, thereby avoiding large lag and overshoot at the start and stop points of the response curve, and thus optimizing the performance of the control signal output by the arc signal response curve.

[0025] In order to make the above-mentioned objects, features and advantages of the present application more obvious and understandable, embodiments are given below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 A block diagram of an electronic device provided in an embodiment of the present application;

[0028] Figure 2 A flow chart of a method for generating a target control signal provided in an embodiment of the present application;

[0029] Figure 3 An arc signal response curve including an arc provided in an embodiment of the present application;

[0030] Figure 4 An arc signal response curve including two arcs with the same radius provided in an embodiment of the present application;

[0031] Figure 5 Provided in the embodiments of this application Figure 4 Schematic diagram of the arc signal response curve after translation;

[0032] Figure 6 Provided in the embodiments of this application Figure 5 Schematic diagram of the arc signal response curve after compression;

[0033] Figure 7 An arc signal response curve including two arcs with different radii provided in an embodiment of the present application;

[0034] Figure 8 A schematic diagram of the functional modules of a target control signal generating device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0035] The technical solutions in the embodiments of the present application will be described below in conjunction with the accompanying drawings in the embodiments of the present application.

[0036] It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. At the same time, in the description of this application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0037] Linear signal generators play a vital role in the design of modern electronic systems and control systems. They are widely used in testing, measurement, communication, and automatic control systems to generate accurate analog signals. One of the core functions of these signal generators is to generate stable and continuously changing signals to simulate the change process of various physical quantities, such as voltage, current, or frequency. However, in actual application scenarios, linear signal generators often experience derivative mutations at the start and stop points, which has a significant impact on system performance.

[0038] Specifically, when the linear signal generator increases the output signal (start) from a static state or decreases from maximum output to zero (stop), if not handled properly, discontinuous derivatives will be generated near these two key points, that is, the slope of the signal changes suddenly. This discontinuity of the derivative will cause the control system to have large lags and overshoots when tracking the signal. Lag refers to the system output response lagging behind the change of the input signal, while overshoot refers to the process of the system output falling back to a stable state after exceeding the expected target value. Both will reduce the control accuracy and response speed of the system.

[0039] In view of this, the present application proposes a target control signal generating method, by replacing part of the straight line segments between two adjacent line segments of the original linear signal response curve with an arc, so that the arc signal response curve can generate a continuous and smooth control signal between the two adjacent line segments, avoiding large lag and overshoot at the start and stop points of the response curve, thereby optimizing the performance of the control signal output by the arc signal response curve.

[0040] To facilitate understanding of this embodiment, first, an electronic device that executes the target control signal generating method disclosed in the embodiment of the present application is introduced in detail.

[0041] like Figure 1 , which is a block diagram of an electronic device. The electronic device 100 may include a memory 111 and a processor 113. A person skilled in the art may understand that Figure 1 The structure shown is only for illustration and does not limit the structure of the electronic device 100. For example, the electronic device 100 may further include Figure 1 More or fewer components as shown, or with Figure 1 Different configurations shown.

[0042] The memory 111 and the processor 113 are directly or indirectly electrically connected to each other to achieve data transmission or interaction. For example, these elements can be electrically connected to each other via one or more communication buses or signal lines. The processor 113 is used to execute the executable module stored in the memory.

[0043] The memory 111 may be, but is not limited to, a random access memory (RAM), a read only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable read-only memory (EEPROM), etc. The memory 111 is used to store programs, and the processor 113 executes the program after receiving an execution instruction. The method executed by the electronic device 100 defined by the process disclosed in any embodiment of the present application can be applied to the processor 113, or implemented by the processor 113.

[0044] The processor 113 may be an integrated circuit chip with signal processing capability. The processor 113 may be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc.; it may also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components. The methods, steps and logic block diagrams disclosed in the embodiments of the present application may be implemented or executed. The general-purpose processor may be a microprocessor or the processor may also be any conventional processor, etc.

[0045] The electronic device 100 in this embodiment can be used to execute each step in each method provided in the embodiments of the present application. The implementation process of the target control signal generation method is described in detail below through several embodiments.

[0046] See also Figure 2 , is a flow chart of a method for generating a target control signal provided by an embodiment of the present application. Figure 2 The specific process shown is described in detail.

[0047] Step 201 : determining a reference straight line according to the smooth transition ratio, and determining the first coordinates of the first tangent point based on the reference straight line.

[0048] The first tangent point is the tangent point between the arc and the first line segment of the original linear signal response curve, the arc is set at the start and stop points of the original linear signal response curve, and the reference straight line is the straight line passing through the first tangent point.

[0049] The arc here is any arc that is tangent to the original linear signal response curve, and the radius and center of the circle where the arc is located can be calculated in subsequent calculations.

[0050] The above-mentioned original linear signal response curve is a multi-segment nonlinear function, and the original linear signal response curve is used to generate a PID control signal.

[0051] The original linear signal response curve may include multiple start and stop points, such as a first start and stop point and a second start and stop point. The start and stop points in the original linear signal response curve may be adjusted according to actual conditions.

[0052] Accordingly, the arc may include one or more. For example, a first arc and a second arc; the number of the arcs may be determined according to the number of start and stop points in the original linear signal response curve. One or more reference straight lines may also be provided. For example, a first reference straight line and a second reference straight line; the number of the reference straight lines may be determined according to the number of start and stop points in the original linear signal response curve.

[0053] In one embodiment, the smooth transition ratio can be set in advance. The smooth transition ratio is a specific parameter.

[0054] The coordinates of the reference straight line can be determined by the smooth transition ratio. For example, the expression of the reference straight line is: ; For another example, the expression of the reference line can also be: .in, is the ordinate of the reference line, is the smooth transition ratio, is the set value of the target control signal.

[0055] It can be understood that since the reference straight line is a straight line passing through the first tangent point, the ordinate of the first tangent point can be determined based on the ordinate of the reference straight line, and the slopes of each line segment of the original linear signal response curve are usually known, the abscissa of the first tangent point can be determined based on the angle between the first line segment and the coordinate axis and the ordinate of the first tangent point, and then the first coordinate of the first tangent point can be determined.

[0056] Step 202, determining the second coordinates of the second tangent point, and the center and radius of the reference circle where the arc is located, based on the first coordinates and the slope of the first line segment.

[0057] The second tangent point is the tangent point between the arc and the second line segment of the original linear signal response curve, and the first line segment and the second line segment are adjacent line segments of the original linear signal response curve.

[0058] It should be understood that since the original linear signal response curve is a multi-segment nonlinear function, the connection point of two adjacent segments in the original linear signal response curve is usually a non-differentiable point, and a signal mutation may occur at the non-differentiable point.

[0059] Optionally, after determining the first coordinates of the first tangent line, the second coordinates of the second tangent point can be calculated based on the positional relationship between the first tangent point and the second tangent point, and the first coordinates of the first tangent point and the slope of the first line segment, and then the center and radius of the reference circle in which the arc is located can be determined based on the first coordinates and the second coordinates.

[0060] After determining the first coordinate of the first tangent line, the radius of the reference circle where the arc is located can be calculated based on the first tangent point and the slope of the first line segment, and then the second coordinate of the second tangent point can be obtained based on the radius of the reference circle, and the center of the reference circle can be calculated based on the first coordinate and the second coordinate.

[0061] For example, Figure 3 As shown, if the first tangent point is point, then in determining After the first coordinate corresponding to the point, the first angle between the first line segment and the horizontal coordinate can be calculated. The radius of the reference circle calculated by the first coordinate is , and then calculate the second tangent point based on the radius of the reference circle and the first angle The second coordinate of the reference circle is obtained, and finally the center of the reference circle is determined according to the first coordinate and the second coordinate.

[0062] The above-mentioned method for determining the second coordinate, the center and the radius of the reference circle is only exemplary, and the method for determining the second coordinate, the center and the radius of the reference circle can be selected according to actual conditions.

[0063] Step 203: Generate an arc signal response curve according to the reference circle and the original linear signal response curve.

[0064] It can be understood that after calculating the center and radius of the reference circle, the arc expression that is tangent to the first line segment and the second line segment of the original linear signal response curve can be determined. The arc expression is used to replace the straight line between the first tangent point and the second tangent point in the original linear signal to generate an arc signal response curve.

[0065] The arc signal response curve includes straight line segments and arc segments.

[0066] Step 204: Generate a target control signal through the arc signal response curve.

[0067] It should be understood that after the arc signal response curve is determined, the target control signal of each stage can be output according to the arc response curve, and the target control signal can be transmitted to the corresponding device to control the corresponding device to generate the corresponding target signal.

[0068] For example, if the arc signal response curve is applied to a MOCVD device (Metal-Organic Chemical Vapour Deposition, Chinese name: Metal-Organic Chemical Vapour Deposition Device), the target control signal generated by the arc signal response curve can be transmitted to the reaction chamber of the MOCVD device to control the temperature of the reaction chamber output response in each time period to achieve temperature control of the reaction chamber.

[0069] In the above implementation process, by replacing part of the straight line segments between two adjacent line segments of the original linear signal response curve with an arc, the arc signal response curve can generate a continuous and smooth control signal between the two adjacent line segments, avoiding large lag and overshoot at the start and stop points of the response curve, thereby optimizing the performance of the control signal output by the arc signal response curve.

[0070] In a possible implementation, step 203 includes: replacing the line segment between the first tangent point and the second tangent point in the original linear signal response curve with the arc between the first tangent point and the second tangent point to form an arc signal response curve.

[0071] Among them, two adjacent line segments in the arc signal response curve are transitioned through an arc.

[0072] It should be understood that after the center and radius of the reference circle are determined, the expression of the arc between the first tangent point and the second tangent point can be determined according to the center and radius of the reference circle. After the expression of the arc is determined, the linear expression in the original linear signal response curve between the first tangent point and the second tangent point can be replaced by the arc expression to obtain the arc signal response curve.

[0073] For example, Figure 3 As shown, Figure 3 The arc signal response curve shown in can be shown as follows:

[0074] ;

[0075] in, is the slope of the first line segment, is the output value of the previous stage, Count the clock, is the horizontal coordinate of the first tangent point, The horizontal coordinate of the second tangent point, is the current time, ( , ) are the coordinates of the circle center, is the radius of the center, is the set value of the target control signal.

[0076] Alternatively, if Figure 3 and Figure 4 As shown, the arc signal response curve may include a ( Figure 3 ) or multiple arcs ( Figure 4 2 arcs are shown in FIG. 2 ). When the arc signal response curve includes multiple arcs, the arc expression of each arc can be calculated according to the above steps 201-203, and the corresponding linear expression is replaced by each arc to obtain the final arc signal response curve.

[0077] In the above implementation process, the line segment between the first tangent point and the second tangent point in the original linear signal response curve is replaced by the arc between the first tangent point and the second tangent point, so that two adjacent line segments can be transitioned through the arc, and the non-differentiable points output in the linear signal response curve can be eliminated, so that the signal output by the arc signal response curve is continuously differentiable, thereby achieving a smooth response to the target signal.

[0078] In a possible implementation, after step 203, the method further includes: determining a coordinate difference between a starting point of the arc signal response curve and a coordinate origin of a coordinate system where the arc signal response curve is located; and translating the arc signal response curve according to the coordinate difference.

[0079] The starting point of the translated arc signal response curve coincides with the origin of the coordinate system.

[0080] It can be understood that the arc signal response curve needs to output the corresponding target control signal after the coordinate origin. This time end will generate a negative time domain signal without actual coordinates. At this time, the arc signal response curve can be shifted as a whole, so that each stage of the arc signal response curve can output and absorb the target control signal.

[0081] In one embodiment, when translating the arc signal response curve, the arc signal response curve can be translated along the time axis so that the starting point of the arc signal response curve coincides with the origin of the coordinate system where the arc signal response curve is located. The target control signals generated in each time period are distributed in the positive time domain, so that the target control signals can be received by the corresponding controller.

[0082] After the coordinate difference is determined, each coordinate point on the arc signal response curve can be translated according to the coordinate difference, so that the entire arc signal response curve moves along the time axis.

[0083] In one embodiment, if Figure 5 As shown ( Figure 5 It is shown in Figure 4 After translating the arc signal response curve, the coordinates of several key points corresponding to the arc signal response curve can be determined by the following expressions:

[0084] ; ;

[0085] ; ;c4=( ;

[0086] in, is the output value of the previous stage, is the center radius of the first arc, is the coordinate origin, is the smooth transition ratio, is the set value of the target control signal, is the first angle, is the coordinate of the center of the first arc, is the coordinate of the center of the first arc, is the second coordinate of the second tangent point of the first arc, is the first coordinate of the first tangent point of the first arc, is the third coordinate of the first tangent point of the second arc, The fourth coordinate of the second tangent point of the second arc.

[0087] In the above implementation process, after determining the arc signal response curve, if the arc signal response curve has a coordinate point located before the coordinate origin, the arc signal response curve is translated so that all coordinate points in the arc signal response curve are located after the coordinate origin, so that the target control signal generated by the arc signal response curve can be distributed in the positive time domain, thereby improving the target control signal output capacity of the arc signal response curve.

[0088] In one possible implementation, after translating the arc signal response curve according to the coordinate difference, the method also includes: determining the first signal generation period of the original linear signal response curve; determining the second signal generation period of the translated arc signal response curve; calculating the period ratio of the first signal generation period to the second signal generation period; and transforming the arc signal response curve according to the periodic function and the period ratio.

[0089] It can be understood that after the arc signal response curve is translated, the response time of the translated arc signal response curve is greater than the response time of the original linear signal response curve. At this time, by compressing the translated arc signal response curve, the response time of the arc signal response curve can be kept consistent with that of the original linear signal response curve.

[0090] like Figure 6 As shown ( Figure 6 It is shown in Figure 5 Schematic diagram of a curve after the arc signal response curve in FIG. 1 is compressed), the first signal generation period can be determined by the following formula:

[0091] ;

[0092] Right now, ;

[0093] The second signal generation period can be determined by the following formula:

[0094] ;

[0095] Right now, ;

[0096] The cycle ratio can be determined by the following formula:

[0097] ;

[0098] Right now, , , ;

[0099] in, , is the first signal generation period, is the set value of the target control signal, is the first angle, is the second signal generation period, is the smooth transition ratio.

[0100] It should be understood that Figure 6 As shown, after determining the period ratio, the periodic function transformation principle can be applied to transform the translated arc signal response curve into DASG ( ) curve, realize the compression of the curve on the time domain axis, so that equal ,Right now .

[0101] In one embodiment, if the arc signal response curve includes two arcs, a first arc and a second arc, and the first arc is set at a first start and stop point, and the second arc is set at a second start and stop point; the first tangent point is the tangent point of the first arc and the first line segment of the original linear signal response curve, and the third tangent point is the tangent point of the second arc and the first line segment; the second tangent point is the tangent point of the first arc and the second line segment of the original linear signal response curve, and the fourth tangent point is the tangent point of the second arc and the third line segment of the original linear signal response curve.

[0102] The two ends of the first line segment are respectively connected to the second line segment and the third line segment, and the radius of the first reference circle and the second reference circle are the same.

[0103] Then, the expression of the compressed arc signal response curve can be:

[0104] ;

[0105] in, is the output value of the previous stage, is the ordinate of the center of the first reference circle, are the radii of the first reference circle and the second reference circle, is the current horizontal coordinate, is the abscissa of the center of the first reference circle, is the slope of the first line segment, is the set value of the target control signal, is the horizontal coordinate of the second tangent point, is the horizontal coordinate of the first tangent point, is the abscissa of the third tangent point, is the abscissa of the fourth tangent point, is the output value of the arc signal response curve, is the cycle ratio.

[0106] In the above implementation process, after the arc signal response curve is translated, the translated arc signal response curve is compressed so that the response time of the arc signal response curve is consistent with that of the original linear signal response curve, so that the arc signal response curve strictly meets the response time requirement of the signal generator, thereby improving the response capability and efficiency of the arc signal response curve.

[0107] In one possible implementation, after transforming the arc signal response curve according to the periodic function and the periodic ratio, the method further includes: determining the first slope of the transformed arc signal response curve; updating the smooth transition ratio according to the first slope and the slope of the original linear signal response curve; and updating the arc signal response curve according to the smooth transition ratio until the signal output by the arc signal response curve meets the set requirements.

[0108] It is understandable that when the arc signal response curve is compressed, the linear segment slope of the arc signal response curve may be higher than the slope of the original linear signal response curve. In order to reduce the difference between the linear segment slope of the arc signal response curve and the slope of the original linear signal response curve, the smooth transition ratio may be re-determined according to the first slope of the arc signal response curve and the slope of the original linear signal response curve, and the reference straight line may be re-determined based on the re-determined smooth transition ratio, and steps 201-203 may be repeated until the difference between the linear segment slope of the arc signal response curve and the slope of the original linear signal response curve is within a preset difference range.

[0109] Wherein, when the difference between the slope of the linear segment of the arc signal response curve and the slope of the original linear signal response curve is within a preset difference range, the distortion of the signal output by the arc signal response curve is within an allowable range.

[0110] In one embodiment, the smooth transition ratio may be determined by the following formula:

[0111] ;

[0112] in, is the first slope, is the slope of the original linear signal response curve, is the smooth transition ratio, is the first angle.

[0113] In the above implementation process, the smooth transition ratio is updated according to the first slope of the arc signal response curve and the slope of the original linear signal response curve, and the arc signal response curve is further updated by the smooth transition ratio, so as to narrow the gap between the first slope and the slope of the original linear signal response curve, so that the distortion of the signal output by the arc signal response curve is within the allowable range, thereby improving the accuracy of the signal output by the arc signal response curve.

[0114] In a possible implementation, the method also includes: determining a first reference straight line and a second reference straight line based on a smooth transition ratio, and determining a first coordinate of a first tangent point of the first arc based on the first reference straight line, and determining a third coordinate of a third tangent point of the second arc based on the second reference straight line; determining a second coordinate of the second tangent point, and a center point and a radius of a first reference circle where the first arc is located, based on the first coordinate and a slope of the first line segment; determining a fourth coordinate of a fourth tangent point, and a center point and a radius of a second reference circle where the second arc is located, based on the third coordinate and a slope of the first line segment; and generating an arc signal response curve based on the first reference circle, the second reference circle and the original linear signal response curve.

[0115] Among them, the first tangent point is the tangent point of the first arc and the first line segment of the original linear signal response curve, the first arc is set at the first start and stop points, and the first reference straight line is the straight line passing through the first tangent point; the third tangent point is the tangent point of the second arc and the first line segment, the second arc is set at the second start and stop points, and the second reference straight line is the straight line passing through the third tangent point.

[0116] The second tangent point is the tangent point of the first arc and the second line segment of the original linear signal response curve, and the fourth tangent point is the tangent point of the second arc and the third line segment of the original linear signal response curve; the two ends of the first line segment are connected to the second line segment and the third line segment respectively.

[0117] Here, the radius of the first reference circle and the radius of the second reference circle are the same.

[0118] In one embodiment, the expression of the first reference straight line may be: ;

[0119] The expression of the second reference straight line can be: ;

[0120] The first coordinate can be calculated by the slope of the first line segment and the first reference line, and the radius of the first reference circle can be calculated by the first coordinate and the slope of the first line segment. The second coordinate can be calculated by the radius of the first reference circle, and the center of the first reference circle can be calculated by the first coordinate and the second coordinate.

[0121] The third coordinate can be calculated from the slope of the first line segment and the second reference line, and the radius of the second reference circle can be calculated from the third coordinate and the slope of the first line segment. The fourth coordinate can be calculated from the radius of the second reference circle, and the center of the second reference circle can be calculated from the third coordinate and the fourth coordinate.

[0122] For example, Figure 4 As shown, the first reference straight line and the second reference straight line intersect the original linear signal response curve at the first tangent point and the third tangent point Two points. The first point The second tangent point The first reference circle Two tangent points with the original linear signal response curve, the third tangent point The fourth tangent point The second reference circle Two tangent points with the original linear signal response curve. The first reference circle With the second reference circle The radius of , the angle of the original linear signal response curve , is the signal slope.

[0123] From the trigonometric theorem and tangency relationship, we know that A unique solution can be determined, including: the radius of the circle , the first reference circle The center of the second reference circle The center of the circle, the first tangent point , second tangent point , the third tangent point The fourth tangent point The coordinates of . Segment for the first reference circle Substitute the linear formula for the arc formula for the center of the circle, Segment for the second reference circle Substitute the linear formula for the arc formula for the center of the circle.

[0124] In one embodiment, the expression of the arc signal response curve may be:

[0125] ;

[0126] in, is the output value of the previous stage, is the ordinate of the center of the first reference circle, are the radii of the first reference circle and the second reference circle, is the current horizontal coordinate, is the abscissa of the center of the first reference circle, is the slope of the first line segment, is the set value of the target control signal, is the horizontal coordinate of the second tangent point, is the horizontal coordinate of the first tangent point, is the abscissa of the third tangent point, is the abscissa of the fourth tangent point, is the output value of the arc signal response curve.

[0127] In the above implementation process, when the arc signal response curve includes multiple arcs, setting the radius of the multiple arcs to be the same can reduce the difficulty of calculating the arcs and improve the efficiency of generating the arc signal response curve.

[0128] In a possible implementation, the method also includes: determining a first reference straight line based on a first smooth transition ratio, and determining a second reference straight line based on a second smooth transition ratio; determining a first coordinate of a first tangent point of the first arc based on the first reference straight line, and determining a third coordinate of a third tangent point of the second arc based on the second reference straight line; determining a second coordinate of the second tangent point, and a center point and a radius of a first reference circle where the first arc is located, based on the first coordinate and a slope of the first line segment; determining a fourth coordinate of a fourth tangent point, and a center point and a radius of a second reference circle where the second arc is located, based on the third coordinate and a slope of the first line segment; and generating an arc signal response curve based on the first reference circle, the second reference circle and the original linear signal response curve.

[0129] Among them, the first tangent point is the tangent point of the first arc and the first line segment of the original linear signal response curve, the first arc is set at the first start and stop points, and the first reference straight line is the straight line passing through the first tangent point; the third tangent point is the tangent point of the second arc and the first line segment, the second arc is set at the second start and stop points, and the second reference straight line is the straight line passing through the third tangent point.

[0130] The second tangent point is the tangent point of the first arc and the second line segment of the original linear signal response curve, and the fourth tangent point is the tangent point of the second arc and the third line segment of the original linear signal response curve; the two ends of the first line segment are respectively connected to the second line segment and the third line segment; the radii of the first reference circle and the second reference circle are different.

[0131] Here, the radii of the first reference circle and the second reference circle are different.

[0132] In one embodiment, the expression of the first reference straight line may be: ;

[0133] The expression of the second reference straight line can be: ;

[0134] The first coordinate can be calculated by the slope of the first line segment and the first reference line, and the radius of the first reference circle can be calculated by the first coordinate and the slope of the first line segment. The second coordinate can be calculated by the radius of the first reference circle, and the center of the first reference circle can be calculated by the first coordinate and the second coordinate.

[0135] The third coordinate can be calculated from the slope of the first line segment and the second reference line, and the radius of the second reference circle can be calculated from the third coordinate and the slope of the first line segment. The fourth coordinate can be calculated from the radius of the second reference circle, and the center of the second reference circle can be calculated from the third coordinate and the fourth coordinate.

[0136] For example, Figure 7As shown, the first reference straight line and the second reference straight line intersect the original linear signal response curve at the first tangent point and the third tangent point Two points. The first point The second tangent point The first reference circle Two tangent points with the original linear signal response curve, the third tangent point The fourth tangent point The second reference circle Two tangent points with the original linear signal response curve. The first reference circle The radius is , two reference circles The radius of , the angle of the original linear signal response curve , is the signal slope.

[0137] From the trigonometric theorem and tangency relationship, we know that A unique solution can be determined, including: the radius of the circle , the first reference circle The center of the second reference circle The center of the circle, the first tangent point , second tangent point , the third tangent point The fourth tangent point The coordinates of . Segment for the first reference circle Substitute the linear formula for the arc formula for the center of the circle, Segment for the second reference circle Substitute the linear formula for the arc formula for the center of the circle.

[0138] In one embodiment, the expression of the arc signal response curve may be:

[0139] ;

[0140] in, is the output value of the previous stage, is the ordinate of the center of the first reference circle, is the radius of the first reference circle, is the radius of the second reference circle, is the current horizontal coordinate, is the abscissa of the center of the first reference circle, is the slope of the first line segment, is the set value of the target control signal, is the horizontal coordinate of the second tangent point, is the horizontal coordinate of the first tangent point, is the abscissa of the third tangent point, is the abscissa of the fourth tangent point, is the output value of the arc signal response curve.

[0141] In the above implementation process, when the arc signal response curve includes multiple arcs, setting different radii between the multiple arcs can increase the diversity of the generated arcs, thereby increasing the application scenarios of the arc signal response curve.

[0142] In a possible implementation, applied to MOCVD equipment, the target control signal is a target temperature control signal.

[0143] In one embodiment, after step 204, the method further includes: controlling the MOCVD equipment to generate a target temperature through a target temperature signal.

[0144] The MOCVD device here is a metal organic chemical vapor deposition device, which is used to grow high-quality, uniform and pure compound semiconductor films in the semiconductor industry. The MOCVD device will undergo a heating process during operation. In order to reduce the temperature difference during the heating process, a corresponding target temperature control signal can be generated through an arc signal response curve. The target temperature control signal slowly approaches the final use temperature of the MOCVD device, which can reduce the error of the input signal of the MOCVD device.

[0145] It should be understood that after the arc signal response curve generates a corresponding target temperature control signal, the target temperature control signal is transmitted to the MOCVD device, and the MOCVD device is controlled to output the target temperature through the target temperature control signal.

[0146] In the above implementation process, by transmitting the target temperature control signal generated by the arc signal response curve to the MOCVD device, the MOCVD device can output the corresponding target temperature, reduce the temperature difference during the heating process of the MOCVD device, and improve the accuracy of MOCVD device control.

[0147] Based on the same application concept, the embodiment of the present application also provides a target control signal generating device corresponding to the target control signal generating method. Since the principle of solving the problem by the device in the embodiment of the present application is similar to that of the aforementioned target control signal generating method embodiment, the implementation of the device in this embodiment can refer to the description in the embodiment of the above method, and the repeated parts will not be repeated.

[0148] See also Figure 8, is a functional module diagram of a target control signal generating device provided in an embodiment of the present application. Each module in the target control signal generating device in this embodiment is used to execute each step in the above method embodiment. The target control signal generating device includes a first determination module 301, a second determination module 302, a first generation module 303, and a second generation module 304; wherein,

[0149] The first determination module 301 is used to determine a reference straight line according to a smooth transition ratio, and determine a first coordinate of a first tangent point based on the reference straight line; wherein the first tangent point is a tangent point between an arc and a first line segment of an original linear signal response curve, the arc is arranged at the start and stop points of the original linear signal response curve, and the reference straight line is a straight line passing through the first tangent point.

[0150] The second determination module 302 is used to determine the second coordinates of the second tangent point, and the center and radius of the reference circle where the arc is located according to the first coordinates and the slope of the first line segment; wherein the second tangent point is the tangent point of the arc and the second line segment of the original linear signal response curve, and the first line segment and the second line segment are adjacent line segments of the original linear signal response curve.

[0151] The first generating module 303 is used to generate an arc signal response curve according to the reference circle and the original linear signal response curve.

[0152] The second generating module 304 is used to generate a target control signal according to the arc signal response curve.

[0153] In one possible implementation, the second determination module 302 is further used to: replace the line segment between the first tangent point and the second tangent point in the original linear signal response curve with an arc between the first tangent point and the second tangent point to form the arc signal response curve; wherein two adjacent line segments in the arc signal response curve transition through the arc.

[0154] In a possible implementation, the target control signal generating device also includes: a translation module, used to determine the coordinate difference between the starting point of the arc signal response curve and the coordinate origin of the coordinate system where the arc signal response curve is located; according to the coordinate difference, the arc signal response curve is translated; wherein the starting point of the translated arc signal response curve coincides with the origin of the coordinate system.

[0155] In a possible implementation, the target control signal generating device also includes: a transformation module, used to determine the first signal generation period of the original linear signal response curve; determine the second signal generation period of the translated arc signal response curve; calculate the period ratio of the first signal generation period to the second signal generation period; and transform the arc signal response curve according to the periodic function and the period ratio.

[0156] In a possible implementation, the target control signal generating device also includes: an updating module, used to determine the first signal generation period of the original linear signal response curve; determine the second signal generation period of the translated arc signal response curve; calculate the period ratio of the first signal generation period to the second signal generation period; and transform the arc signal response curve according to the periodic function and the period ratio.

[0157] In a possible implementation, the first determination module 301 is specifically used to: determine the first reference straight line and the second reference straight line according to the smooth transition ratio, and determine the first coordinates of the first tangent point of the first arc based on the first reference straight line, and determine the third coordinates of the third tangent point of the second arc based on the second reference straight line; wherein the first tangent point is the tangent point of the first arc and the first line segment of the original linear signal response curve, the first arc is set at the first start and stop points, and the first reference straight line is a straight line passing through the first tangent point; the third tangent point is the tangent point of the second arc and the first line segment, the second arc is set at the second start and stop points, and the second reference straight line is a straight line passing through the third tangent point.

[0158] In a possible implementation, the second determination module 302 is specifically used to: determine the second coordinates of the second tangent point, and the center and radius of the first reference circle where the first arc is located, based on the first coordinates and the slope of the first line segment; determine the fourth coordinates of the fourth tangent point, and the center and radius of the second reference circle where the second arc is located, based on the third coordinates and the slope of the first line segment; wherein the second tangent point is the tangent point of the first arc and the second line segment of the original linear signal response curve, and the fourth tangent point is the tangent point of the second arc and the third line segment of the original linear signal response curve; the two ends of the first line segment are respectively connected to the second line segment and the third line segment; and the radii of the first reference circle and the second reference circle are the same.

[0159] In a possible implementation manner, the first generating module 303 is specifically configured to generate the arc signal response curve according to the first reference circle, the second reference circle and the original linear signal response curve.

[0160] In a possible implementation manner, the first determination module 301 is specifically configured to: determine the first reference straight line according to the first smooth transition ratio, and determine the second reference straight line according to the second smooth transition ratio.

[0161] In a possible implementation, the second determination module 302 is specifically used to: determine the first coordinates of the first tangent point of the first arc based on the first reference straight line, and determine the third coordinates of the third tangent point of the second arc based on the second reference straight line; wherein the first tangent point is the tangent point of the first arc and the first line segment of the original linear signal response curve, the first arc is set at the first start and stop points, and the first reference straight line is a straight line passing through the first tangent point; the third tangent point is the tangent point of the second arc and the first line segment, the second arc is set at the second start and stop points, and the second reference straight line is a straight line passing through the third tangent point.

[0162] In a possible implementation manner, the second determination module 302 is specifically configured to: determine the second coordinates of the second tangent point, and the center and radius of the first reference circle where the first arc is located, based on the first coordinates and the slope of the first line segment; determine the fourth coordinates of the fourth tangent point, and the center and radius of the second reference circle where the second arc is located, based on the third coordinates and the slope of the first line segment; wherein the second tangent point is the tangent point between the first arc and the second line segment of the original linear signal response curve, and the fourth tangent point is the tangent point between the second arc and the third line segment of the original linear signal response curve; the two ends of the first line segment are connected to the second line segment and the third line segment respectively; and the radii of the first reference circle and the second reference circle are different.

[0163] In a possible implementation manner, the first generating module 303 is specifically configured to generate the arc signal response curve according to the first reference circle, the second reference circle and the original linear signal response curve.

[0164] In a possible implementation manner, the target control signal generating device further includes: a control module, configured to control the MOCVD device to generate a target temperature through the target temperature signal.

[0165] In addition, an embodiment of the present application further provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the target control signal generating method described in the above method embodiment are executed.

[0166] The computer program product of the target control signal generating method provided in the embodiment of the present application includes a computer-readable storage medium storing program code, and the instructions included in the program code can be used to execute the steps of the target control signal generating method described in the above method embodiment. For details, please refer to the above method embodiment, which will not be repeated here.

[0167] In several embodiments provided in the present application, it should be understood that the disclosed devices and methods can also be implemented in other ways. The device embodiments described above are merely schematic. For example, the flowcharts and block diagrams in the accompanying drawings show the possible architecture, functions and operations of the devices, methods and computer program products according to multiple embodiments of the present application. In this regard, each box in the flowchart or block diagram can represent a module, a program segment or a part of a code, and the module, a program segment or a part of a code contains one or more executable instructions for implementing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the box can also occur in a different order from the order marked in the accompanying drawings. For example, two consecutive boxes can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram and / or flowchart, and the combination of boxes in the block diagram and / or flowchart can be implemented with a dedicated hardware-based system that performs a specified function or action, or can be implemented with a combination of dedicated hardware and computer instructions.

[0168] In addition, the functional modules in the various embodiments of the present application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.

[0169] If the function is implemented in the form of a software function module and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present application can be essentially or partly embodied in the form of a software product that contributes to the prior art. The computer software product is stored in a storage medium, including several instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk, etc. Various media that can store program codes. It should be noted that in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprises" or any other variation thereof are intended to cover non-exclusive inclusion, so that a process, method, article or apparatus that includes a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or apparatus. In the absence of more restrictions, the elements defined by the sentence "includes..." do not exclude the presence of other identical elements in the process, method, article or apparatus that includes the elements.

[0170] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application. It should be noted that similar numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0171] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A method for generating a target control signal, characterized in that: include: Determine a reference straight line according to the smooth transition ratio, and determine the first coordinates of the first tangent point based on the reference straight line; wherein the first tangent point is the tangent point of the circular arc and the first line segment of the original linear signal response curve, the circular arc is set at the start and stop points of the original linear signal response curve, and the reference straight line is a straight line passing through the first tangent point; Determine the second coordinates of the second tangent point, and the center and radius of the reference circle where the arc is located, according to the first coordinates and the slope of the first line segment; wherein the second tangent point is the tangent point of the arc and the second line segment of the original linear signal response curve, and the first line segment and the second line segment are adjacent line segments of the original linear signal response curve; Generate an arc signal response curve according to the reference circle and the original linear signal response curve; Generate a target control signal through the arc signal response curve; The step of generating an arc signal response curve according to the reference circle and the original linear signal response curve comprises: Replacing the line segment between the first tangent point and the second tangent point in the original linear signal response curve with the circular arc between the first tangent point and the second tangent point to form the circular arc signal response curve; Wherein, two adjacent line segments in the arc signal response curve transition through the arc.

2. The method according to claim 1, characterized in that After generating the arc signal response curve according to the reference circle and the original linear signal response curve, the method further includes: Determine the coordinate difference between the starting point of the arc signal response curve and the coordinate origin of the coordinate system where the arc signal response curve is located; According to the coordinate difference, translating the arc signal response curve; The starting point of the translated arc signal response curve coincides with the origin of the coordinate system.

3. The method according to claim 2, characterized in that After translating the arc signal response curve according to the coordinate difference, the method further includes: Determining a first signal generation period of the original linear signal response curve; Determine a second signal generation period of the translated arc signal response curve; Calculating a period ratio of the first signal generation period to the second signal generation period; The arc signal response curve is transformed according to the periodic function and the period ratio.

4. The method according to claim 3, characterized in that After transforming the arc signal response curve according to the periodic function and the period ratio, the method further includes: Determining a first slope of the transformed arc signal response curve; updating the smooth transition ratio according to the first slope and the slope of the original linear signal response curve; The arc signal response curve is updated according to the subsequent smooth transition ratio until the signal output by the arc signal response curve meets the set requirement.

5. The method according to any one of claims 1 to 4, characterized in that: in, The original linear signal response curve includes a first start-stop point and a second start-stop point, the circular arc includes a first circular arc and a second circular arc, and the reference straight line includes: a first reference straight line and a second reference straight line; The method further comprises: Determine the first reference straight line and the second reference straight line according to the smooth transition ratio, determine the first coordinates of the first tangent point of the first arc based on the first reference straight line, and determine the third coordinates of the third tangent point of the second arc based on the second reference straight line; The first tangent point is the tangent point of the first arc and the first line segment of the original linear signal response curve, the first arc is set at the first start-stop point, and the first reference straight line is a straight line passing through the first tangent point; the third tangent point is the tangent point of the second arc and the first line segment, the second arc is set at the second start-stop point, and the second reference straight line is a straight line passing through the third tangent point; Determine, according to the first coordinates and the slope of the first line segment, the second coordinates of the second tangent point, and the center and radius of the first reference circle where the first circular arc is located; Determine, according to the third coordinates and the slope of the first line segment, the fourth coordinates of the fourth tangent point, and the center and radius of the second reference circle where the second circular arc is located; The second tangent point is the tangent point between the first arc and the second line segment of the original linear signal response curve, and the fourth tangent point is the tangent point between the second arc and the third line segment of the original linear signal response curve; the two ends of the first line segment are connected to the second line segment and the third line segment respectively; The first reference circle and the second reference circle have the same radius; The arc signal response curve is generated according to the first reference circle, the second reference circle and the original linear signal response curve.

6. The method according to any one of claims 1 to 4, characterized in that: in, The original linear signal response curve includes a first start-stop point and a second start-stop point, the circular arc includes a first circular arc and a second circular arc, the reference straight line includes: a first reference straight line and a second reference straight line, and the smooth transition ratio includes a first smooth transition ratio and a second smooth transition ratio; The method further comprises: Determining the first reference straight line according to the first smooth transition ratio, and determining the second reference straight line according to the second smooth transition ratio; Determine first coordinates of a first tangent point of the first arc based on the first reference straight line, and determine third coordinates of a third tangent point of the second arc based on the second reference straight line; The first tangent point is the tangent point of the first arc and the first line segment of the original linear signal response curve, the first arc is set at the first start-stop point, and the first reference straight line is a straight line passing through the first tangent point; the third tangent point is the tangent point of the second arc and the first line segment, the second arc is set at the second start-stop point, and the second reference straight line is a straight line passing through the third tangent point; Determine the second coordinates of the second tangent point according to the first coordinates and the slope of the first line segment, and determine the center and radius of a first reference circle where the first circular arc is located; Determine, according to the third coordinates and the slope of the first line segment, the fourth coordinates of the fourth tangent point, and determine the center point and radius of the second reference circle where the second circular arc is located; The second tangent point is the tangent point between the first arc and the second line segment of the original linear signal response curve, and the fourth tangent point is the tangent point between the second arc and the third line segment of the original linear signal response curve; the two ends of the first line segment are connected to the second line segment and the third line segment respectively; The first reference circle and the second reference circle have different radii; The arc signal response curve is generated according to the first reference circle, the second reference circle and the original linear signal response curve.

7. The method according to any one of claims 1 to 4, characterized in that: Applied to MOCVD equipment, the target control signal is a target temperature control signal; After generating the target control signal through the arc signal response curve, the method further includes: The MOCVD device is controlled by the target temperature signal to generate a target temperature.

8. A target control signal generating device, characterized in that: include: A first determination module is used to determine a reference straight line according to the smooth transition ratio, and determine a first coordinate of a first tangent point based on the reference straight line; wherein the first tangent point is a tangent point between a circular arc and a first line segment of an original linear signal response curve, the circular arc is set at the start and stop points of the original linear signal response curve, and the reference straight line is a straight line passing through the first tangent point; a second determination module, configured to determine, according to the first coordinates and the slope of the first line segment, a second coordinate of a second tangent point, and a center point and a radius of a reference circle where the arc is located; wherein the second tangent point is a tangent point between the arc and a second line segment of the original linear signal response curve, and the first line segment and the second line segment are adjacent line segments of the original linear signal response curve; A first generating module, used for generating an arc signal response curve according to the reference circle and the original linear signal response curve; A second generating module, used for generating a target control signal through the arc signal response curve; The second determination module is also used to replace the line segment between the first tangent point and the second tangent point in the original linear signal response curve with the arc between the first tangent point and the second tangent point to form the arc signal response curve; wherein two adjacent line segments in the arc signal response curve transition through the arc.

9. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the method according to any one of claims 1 to 7 are executed.

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