Anti-loose quick discharge valve for semiconductor wet process equipment

Abstract

The invention provides an anti-loose quick discharge valve for semiconductor wet process equipment, which comprises a connecting ring, an upper valve body, a rubber ring, a base support plate, a piston rod, a bottom piston seat, a lower valve body, a piston top disc and a valve cover, the elastic rubber ring and the connecting ring are sequentially placed at a groove of the upper valve body, and the upper valve body and the valve cover are connected together through threaded connection; the piston rod is pushed from the bottom of the lower valve body, the bottom of the lower valve body is sealed by a bottom piston seat, a piston top tray loaded with a rubber ring is placed in the upper valve body, and the piston rod loaded with the lower valve body is inserted from the lower part of the upper valve body and is in threaded connection with the piston top tray. The anti-loosening quick discharge valve has excellent stability and sealing performance and is long in service life, anti-rotation and anti-loosening devices are adopted at multiple connecting parts, it is guaranteed that the valve cover and the upper valve body are stably connected in the working process, the valve cover and the groove body are stably connected in the working process, the quick discharge valve cannot loosen, and the operation safety of equipment is improved.

Description

Technical Field

[0001] The invention relates to a loose-proof structure design technology for a quick exhaust valve of a tank-type wet cleaning equipment, belongs to the field of semiconductor wet cleaning equipment, and specifically relates to an anti-loosening quick exhaust valve for semiconductor wet cleaning equipment. Background Art

[0002] With the increase in IC integration, the cleanliness of the wafer surface is crucial to obtaining high performance and high yield of IC devices, and wafer cleaning is particularly important. At present, in the wafer cleaning process, the use of wet equipment fast drain tank for rapid drainage cleaning is a relatively common wafer cleaning method. The so-called rapid drainage cleaning method is to first completely immerse the wafer in the deionized water of the fast drain tank, and then quickly drain the deionized water in the cleaning tank. At the same time, use a nozzle to spray deionized water on the wafer to achieve the purpose of cleaning the wafer.

[0003] In semiconductor wet process equipment, quick exhaust valves are often in high-frequency vibration environments. Vibration can cause valve connection components (such as threads, sealing rings, etc.) to gradually loosen, thereby affecting their sealing performance and working stability. Since the semiconductor manufacturing process requires long-term uninterrupted work, long-term mechanical fatigue and wear will reduce the anti-loosening performance of the quick exhaust valve, thereby increasing the risk of equipment failure.

[0004] The efficient operation of semiconductor wet process equipment depends on the stable performance of each component. By studying and optimizing the anti-loosening design of quick exhaust valves, the reliability of equipment can be significantly improved, failures caused by valve loosening can be reduced, the continuity and efficiency of production can be guaranteed, and the uniformity and consistency of the chemical treatment process can be ensured, thereby improving the cleanliness and processing quality of products, and ultimately improving the yield rate of semiconductor products. It can also reduce the maintenance and replacement frequency, and reduce maintenance costs and spare parts costs. The research on anti-loosening design not only helps to solve current technical problems, but also promotes the development and innovation of related technologies, and provides technical references for wet process equipment and other high-precision equipment.

[0005] At present, in the actual working process, it is found that the quick exhaust valve used in semiconductor wet process equipment can basically complete the function of controlling liquid discharge. However, after working in the working environment for a period of time, it is found that the thread fit between the upper valve body and the valve cover is loose, the rubber ring cannot be tightened, the valve and the trough body are loose, a gap appears between the two, and the rubber ring is worn to a certain extent, which urgently needs to be improved. Summary of the invention

[0006] The purpose of the embodiment of the present invention is to provide a method for preventing a quick drain valve from loosening for a tank-type wet cleaning device, which is suitable for a quick drain tank quick drainage cleaning method and is used to improve the reliability of the device.

[0007] To achieve the above-mentioned purpose, the present invention proposes the following technical solutions: a fast exhaust valve for semiconductor wet process equipment, comprising a connecting ring, an upper valve body, a rubber ring, a base support plate, a piston rod, a bottom piston seat, a lower valve body, a piston top plate and a valve cover, wherein the connecting ring and the rubber ring are clamped between the valve cover and the upper valve body, the piston rod moves between the upper valve body and the lower valve body, the piston top plate and the bottom piston seat are respectively fixedly connected to the top and bottom of the piston rod, when the piston top plate is at the vertex, it contacts with the upper valve body to form a sealing state, when the piston top plate leaves the vertex, it separates from the upper valve body to form an open state, the bottom piston seat moves in the lower valve body, and the bottom piston seat is used to cut off the airflow;

[0008] The lower surface of the base support plate is connected to the floor, and the upper surface of the base support plate is in contact with the lower surface of the quick exhaust valve.

[0009] Furthermore, in the present invention, the upper valve body and the lower valve body are engaged with each other through threads.

[0010] Furthermore, in the present invention, the bottom piston seat and the lower valve body are connected by interference fit.

[0011] Furthermore, in the present invention, a threaded hole is provided on the side wall of the valve cover, so that the valve cover and the upper valve body can be threadedly matched in a transverse manner.

[0012] Furthermore, in the present invention, the lower valve body has two connecting holes, and the two connecting holes are connected to an inflation device, and the inflation device is used to control the lifting and lowering of the piston rod.

[0013] Furthermore, in the present invention, the number of the newly added rubber ring is one.

[0014] Beneficial effects: The technical solution of this application has the following technical effects:

[0015] The anti-loosening quick-drain valve of the present invention includes a connecting ring, an upper valve body, a rubber ring, a base support plate, a piston rod, a bottom piston seat, a lower valve body, a piston top plate and a valve cover; the lower surface of the valve cover precisely coincides with the upper surface of the connecting ring to ensure sealing and stability; the lower surface of the connecting ring is in close contact with the elastic rubber ring to provide the necessary flexibility and sealing performance. The elastic rubber ring and the connecting ring are placed in the groove of the upper valve body in sequence, and the connecting ring is used to compress and fix the rubber ring; the rubber ring is sleeved at the drain outlet of the tank body, close to the valve body, to ensure the coaxial configuration of the entire device. The upper valve body is connected to the valve cover by threaded connection, and then pushed into the drain outlet of the tank body to ensure the stability and sealing of the overall structure.

[0016] The piston rod consists of a rod handle and a piston disc. The piston rod is pushed in from the bottom of the lower valve body, and then the bottom is sealed with the bottom piston seat. The piston top disc loaded with a rubber ring is placed in the upper valve body to ensure that it fits tightly. The piston rod in the lower valve body is inserted from the bottom of the upper valve body and connected to the piston top disc through a thread. Finally, the lower valve body is connected to the upper valve body through a thread. This design method not only ensures the stability of the quick exhaust valve and anti-loosening structure for semiconductor wet process equipment, but also improves the sealing performance and service life of the device. Anti-rotation and anti-loosening devices are used at multiple connection locations to ensure that the valve cover and the upper valve body, the valve cover and the trough body are stably connected during operation, the quick exhaust valve will not loosen, and the safety of equipment operation is improved.

[0017] It should be appreciated that all combinations of the foregoing concepts, as well as additional concepts described in greater detail below, may be considered to be part of the inventive subject matter of the present disclosure, provided such concepts are not mutually inconsistent.

[0018] The foregoing and other aspects, embodiments and features of the present invention can be more fully understood from the following description in conjunction with the accompanying drawings. Other additional aspects of the present invention, such as the features and / or beneficial effects of the exemplary embodiments, will be apparent from the following description or learned from the practice of the specific embodiments according to the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The drawings are not intended to be drawn to scale. In the drawings, each identical or nearly identical component shown in various figures may be represented by the same reference numeral. For clarity, not every component is labeled in every figure. Embodiments of various aspects of the present invention will now be described by way of example and with reference to the accompanying drawings, in which:

[0020] Figure 1 This is a schematic diagram of the structure of the anti-loosening quick exhaust valve used in semiconductor wet process equipment (the effect of being installed on the tank);

[0021] Figure 2 It is a schematic diagram of the structural cross-section of an anti-loosening quick exhaust valve used in semiconductor wet process equipment.

[0022] Figure 3 It is a structural diagram of an anti-loosening quick exhaust valve used in semiconductor wet process equipment.

[0023] Figure 4 It is a schematic diagram of the opening and closing of the anti-loosening quick exhaust valve.

[0024] Figure 5 This is a schematic diagram of the threaded hole on the side wall.

[0025] In the figure, the meanings of the various reference numerals are as follows: 1. trough body; 2. connecting ring; 3. upper valve body; 4. rubber ring; 5. base support plate; 6. piston rod; 7. bottom piston seat; 8. lower valve body; 9. piston top plate; 10. valve cover. DETAILED DESCRIPTION

[0026] In order to better understand the technical content of the present invention, specific embodiments are cited and described as follows in conjunction with the accompanying drawings. Various aspects of the present invention are described in this disclosure with reference to the accompanying drawings, in which many illustrative embodiments are shown. The embodiments of the present disclosure are not necessarily defined to include all aspects of the present invention. It should be understood that the various concepts and embodiments introduced above, as well as those described in more detail below, can be implemented in any of many ways, because the concepts and embodiments disclosed in the present invention are not limited to any implementation. In addition, some aspects disclosed in the present invention can be used alone, or in any appropriate combination with other aspects disclosed in the present invention.

[0027] Example 1

[0028] like Figure 1-4 As shown, the anti-loosening structure design of the quick exhaust valve for semiconductor wet process equipment in this embodiment proposes a number of improvement measures. First, a transverse threaded hole is added to the side wall of the valve cover 10 to form a transverse threaded hole with the upper valve body 3 to prevent loosening caused by longitudinal vibration. Secondly, a support plate is added to the bottom of the quick exhaust valve to buffer the longitudinal vibration. Finally, more rubber rings 4 are added to the connection between the valve cover 10 and the upper valve body 3 to reduce the pressure of a single rubber ring 4 and prevent wear and liquid leakage. Through these improvements, the anti-loosening ability and service life of the valve are improved. After the quick exhaust valve is prepared, it can be used by pushing it into the drain outlet of the trough body 1.

[0029] Specifically, the anti-loosening quick-exhaust valve for semiconductor wet process equipment includes a connecting ring 2, an upper valve body 3, a rubber ring 4, a base support plate 5, a piston rod 6, a bottom piston seat 7, a lower valve body 8, a piston top plate 9 and a valve cover 10. The connecting ring 2 and the rubber ring 4 are clamped between the valve cover 10 and the upper valve body 3, the piston rod 6 moves between the upper valve body 3 and the lower valve body 8, the upper valve body 3 and the lower valve body 8 are threaded, the piston top plate 9 and the bottom piston seat 7 are respectively fixedly connected to the top and bottom of the piston rod 6, when the piston top plate 9 is at the apex, it contacts with the upper valve body 3 to form a sealed state, when the piston top plate 9 leaves the apex, it separates from the upper valve body 3 to form an open state, the bottom piston seat 7 moves in the lower valve body 8, the bottom piston seat 7 is used to cut off the airflow, and the bottom piston seat 7 and the lower valve body 8 are connected by interference fit to ensure air tightness.

[0030] The lower surface of the base support plate 5 is connected to the floor, and the upper surface of the base support plate 5 is in contact with the lower surface of the quick exhaust valve. The base support plate 5 is used to buffer the longitudinal vibration. By adding the external longitudinal constraint of the base support plate 5, the up and down reciprocating motion of the piston rod 6 is prevented from driving the longitudinal vibration of the entire quick exhaust valve.

[0031] There is a threaded hole on the side wall of the valve cover 10. Figure 5 As shown, the valve cover 10 and the upper valve body 3 can be threadedly matched in a transverse manner, which can effectively prevent the longitudinal displacement of the valve cover 10 and the upper valve body 3 caused by longitudinal vibration.

[0032] The lower valve body 8 has two connecting holes, which are connected to the inflation device, and the inflation device is used to control the lifting and lowering of the piston rod 6.

[0033] There are two rubber rings, which can relieve the connection pressure of a single rubber ring 4 and reduce the wear rate of the rubber ring 4 on the one hand, and prevent liquid leakage on the other hand.

[0034] When installing the above structure, prepare the connecting ring 2, the upper valve body 3, the rubber ring 4, the base support plate 5, the piston rod 6, the bottom piston seat 7, the lower valve body 8, the piston top plate 9 and the valve cover 10. The elastic rubber ring 4 and the connecting ring 2 are placed in the groove of the upper valve body 3 in turn to ensure that they are accurately aligned and in close contact. The upper valve body 3 is connected to the valve cover 10 by threaded connection, and then pushed into the drain port of the tank body 1 to ensure the stability and sealing of the overall structure. The piston rod 6 is pushed in from the bottom of the lower valve body 8, and then the bottom is sealed with the bottom piston seat 7. The piston top plate 9 loaded with the rubber ring is placed in the upper valve body 3 to ensure that it fits tightly. The piston rod 6 loaded with the lower valve body 8 is inserted from the bottom of the upper valve body 3 and is connected to the piston top plate 9 by threading. Finally, the lower valve body 8 is connected to the upper valve body 3 by threading, and the two connecting holes of the lower valve body 8 are connected to the inflation device, and it can be used.

[0035] When working, see Figure 4 , the double arrow direction in the figure indicates the inflation direction of the device. The two connecting holes of the lower valve body 8 are connected to the inflation device. By ventilating the upper and lower holes back and forth at a certain frequency, a pressure difference can be generated between the piston rod 6 and the lower one, thereby pushing the piston rod 6 to reciprocate up and down. To close the anti-loosening quick-discharge valve in the open state, the inflation device needs to be used to discharge gas from the lower inflation hole, and the piston rod 6 rises. When it reaches the highest point and contacts the upper valve body 3 to form a seal, the valve is closed at this time; to open the anti-loosening quick-discharge valve in the closed state, the inflation device needs to be used to discharge gas from the upper inflation hole, and the piston rod 6 descends. At this time, the valve is opened and the liquid is discharged from the valve.

[0036] The embodiment of the present invention adopts anti-rotation and anti-loosening devices at multiple connection positions to ensure that the valve cover 10 and the upper valve body 3, and the valve cover 10 and the trough body are stably connected during operation, the quick exhaust valve will not loosen, and the safety of equipment operation is improved.

[0037] The experiment verified whether the anti-loosening ability of the improved model was enhanced after adding threaded fit, base support plate 5 and rubber ring 4. The experimental method includes testing the optimized model under high-frequency vibration and normal working conditions respectively, and observing the loosening time and sealing performance. The experimental results show that under high-frequency vibration conditions, the loosening time of the improved model is extended to more than 20 days before leakage occurs. Under normal frequency conditions, the loosening time of the improved model is significantly extended to more than 190 days before leakage begins. These data show that the improved model is superior to the company's original model in terms of anti-loosening ability and sealing performance.

[0038] Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. A person with ordinary knowledge in the technical field to which the present invention belongs may make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the definition of the claims.

Claims

1. A quick exhaust valve for semiconductor wet process equipment, comprising a connecting ring, an upper valve body, a rubber ring, a base support plate, a piston rod, a bottom piston seat, a lower valve body, a piston top plate and a valve cover, wherein the connecting ring and the rubber ring are clamped between the valve cover and the upper valve body, the piston rod moves between the upper valve body and the lower valve body, the piston top plate and the bottom piston seat are respectively fixedly connected to the top and bottom of the piston rod, when the piston top plate is at the vertex, it contacts with the upper valve body to form a sealing state, when the piston top plate leaves the vertex, it separates from the upper valve body to form an open state, the bottom piston seat moves in the lower valve body, and the bottom piston seat is used to cut off the airflow; The lower surface of the base support plate is connected to the floor, and the upper surface of the base support plate is in contact with the lower surface of the quick exhaust valve.

2. The anti-loosening quick exhaust valve according to claim 1, characterized in that: The upper valve body and the lower valve body are matched with each other through threads.

3. The anti-loosening quick exhaust valve according to claim 1, characterized in that: The bottom piston seat and the lower valve body are connected by interference fit.

4. The anti-loosening quick exhaust valve according to claim 1, characterized in that: A threaded hole is provided on the side wall of the valve cover, so that the valve cover and the upper valve body can be transversely threadedly matched.

5. The anti-loosening quick exhaust valve according to claim 1, characterized in that: The lower valve body has two connecting holes, and the two connecting holes are connected to the inflation device, and the inflation device is used to control the lifting and lowering of the piston rod.

6. The anti-loosening quick exhaust valve according to claim 1, characterized in that: The number of new rubber rings is one.

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