Silicon material vacuum drying equipment

Abstract

The invention discloses a silicon material vacuum drying device, which relates to the technical field of silicon crystal production, and comprises a drying rack and a placing frame, and also comprises a positioning device, wherein a hollow guide rail is fixedly installed on the inner wall of the drying rack, a telescopic cylinder is fixedly installed on the top of the drying rack, a drying device is fixedly installed on the output end of the telescopic cylinder, a vacuum cover is arranged at the bottom of the drying device, an L-shaped plate is fixedly installed on the front side of the vacuum cover, a conveying device is arranged on the inner wall of the hollow guide rail, a material frame is arranged on the top of the conveying device, the vacuum cover cannot continue to move downward, so that the position of the material frame is detected to be offset, and the position offset of the material frame is detected in time, so that the accuracy of the position of the material frame during the vacuum drying process can be ensured, thereby preventing the deformation of the material frame caused by the offset, and further ensuring the stability of the drying effect.

Description

Technical Field

[0001] The invention relates to the technical field of silicon crystal production, in particular to a silicon material vacuum drying device. Background Art

[0002] Silicon material vacuum drying equipment usually consists of heating equipment, dehumidification equipment, feeding equipment and protection equipment.

[0003] The patent with patent announcement number CN221781183U relates to a drying device after cleaning of granular silicon material, and relates to the technical field of silicon crystal production equipment, including a preheating component and a heating component, the discharge end of the preheating component is connected to the feed end of the heating component; the preheating component includes a preheating box, the preheating box is supported on the ground by a first supporting component, at least one preheating conveying pipe is inserted in the preheating box, and the horizontal height of the feed end of the preheating conveying pipe is greater than the horizontal height of the discharge end thereof, a plurality of first electric heating pipes for heating the preheating conveying pipes are installed in the preheating box, a first U-shaped bracket is arranged between two adjacent first electric heating pipes, and the preheating conveying pipe is inserted in the first U-shaped bracket, and a plurality of first U-shaped brackets surround the preheating conveying pipe, which can further heat the granular silicon material inside the preheating conveying pipe and improve the overall drying efficiency.

[0004] In the above patent, multiple first U-shaped brackets are surrounded by the preheating conveying pipe, which can further heat the granular silicon material inside the preheating conveying pipe and improve the overall drying efficiency. However, it is difficult to locate and detect the position of the material frame. The inability to accurately locate the material frame will cause the position of the material frame to shift during the drying process, thereby causing the drying process to be interrupted due to improper positioning of the material frame. Summary of the invention

[0005] In view of the deficiencies in the prior art, the present invention provides a silicon material vacuum drying device, which solves the problems raised in the above background technology.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: a silicon material vacuum drying equipment, including a drying rack and a placement frame, and also including a positioning device, wherein a hollow guide rail is fixedly installed on the inner wall of the drying rack, a telescopic cylinder is fixedly installed on the top of the drying rack, a drying device is fixedly installed on the output end of the telescopic cylinder, a vacuum cover is arranged at the bottom of the drying device, an L-shaped plate is fixedly installed on the front side of the vacuum cover, a conveying device is arranged on the inner wall of the hollow guide rail, and a material frame is arranged on the top of the conveying device, wherein the positioning device includes a vacuum pump, a connecting plate, a connecting groove, a detection groove, a detection hole, a detection frame, a detection rod, a connecting ... The movable hole and the linkage plate, the L-shaped plate cannot continue to move downward, so that the vacuum cover shell cannot move downward to seal the material frame, and the vacuum cover shell cannot continue to move downward, thereby detecting that the position of the material frame is offset, the vacuum pump is fixedly installed on the inner wall of the placement frame, the connecting plate is fixedly installed on the inner wall of the vacuum cover shell, the connecting groove is opened on the left side of the material frame, the detection groove is opened on the front side of the material frame, the detection hole is opened on the front side of the hollow guide rail, the detection frame is fixedly installed on the front side of the hollow guide rail, the detection rod slides through the inner and outer walls of the detection frame, the linkage hole is opened on the surface of the detection frame, and the linkage plate is fixedly installed on the side of the detection rod close to the linkage hole.

[0007] According to the above technical solution, a No. 1 spring is arranged between the detection frame and the detection rod, and the No. 1 spring can drive the detection rod to reset. The linkage plate contacts the inner wall of the linkage hole, and a rubber strip is arranged on the inner wall of the connecting groove. The rubber strip can improve the sealing between the material frame and the vacuum cover.

[0008] According to the above technical solution, the material frame is in contact with the hollow guide rail, the end of the detection rod away from the material frame is set as a slope, and the bottom of the L-shaped plate is set as a slope. There are two groups of connecting grooves, detection grooves and detection holes, and in the other group, the connecting groove is opened on the right side of the material box, the detection groove is opened on the rear side of the material frame, and the detection hole is opened on the rear side of the hollow guide rail.

[0009] According to the above technical scheme, a protective device for limiting the movement of the material frame is provided on the surface of the hollow guide rail, and a detection device is provided on the left side of the placement frame. The protective device includes a support rod, a support plate, a support spring, a support hole, a square hole, a U-shaped frame and a protrusion. The support plate moves toward the direction close to the material frame to contact the material frame and limit the material frame. The support rod is fixedly installed on the side of the hollow guide rail close to the linkage plate, and the support plate is slidably installed on the circumferential surface of the support rod. The support spring is arranged between the support rod and the support plate. The support hole is opened on the side of the hollow guide rail close to the linkage plate, and the square hole is opened on the side of the support plate away from the linkage plate. The U-shaped frame is fixedly installed on the side of the hollow guide rail close to the linkage plate.

[0010] According to the above technical solution, the protrusion is fixedly installed on the surface of the support plate, the support plate contacts the inner wall of the linkage plate, and the protrusion contacts the inner wall of the U-shaped frame. The vibration of the protrusion drives the support plate to resonate together.

[0011] According to the above technical scheme, the detection device includes a load-bearing frame, a load-bearing plate, a load-bearing rod, a limit frame, a limit plate, a limit rod, a button and a limit groove. The limit plate moves in the direction close to the button to drive the limit rod to move. The limit rod moves out of contact with the limit groove and releases the limit on the button. The load-bearing frame is fixedly installed on the side of the U-shaped frame away from the material frame, the load-bearing plate is slidably installed on the inner wall of the load-bearing frame, the load-bearing rod is fixedly installed on the side of the load-bearing plate close to the material frame, the limit frame is fixedly installed on the left side of the placement frame, the limit plate is slidably installed on the inner wall of the limit frame, the limit rod is fixedly installed on the side of the limit plate close to the vacuum pump, the button is fixedly installed on the bottom of the inner wall of the placement frame, the limit groove is opened at the top of the limit rod, and the circumferential surface of the button is opened with a protective groove.

[0012] According to the above technical solution, a hose is arranged between the limit frame and the load-bearing frame, the limit frame is connected with the inside of the load-bearing frame through the hose, liquid is arranged inside the load-bearing frame, and liquid is arranged inside the limit frame.

[0013] According to the above technical solution, a No. 2 spring is arranged between the load-bearing frame and the load-bearing plate, and the No. 2 spring can drive the load-bearing plate to reset, the limit rod contacts the inner wall of the protective groove, and the button is electrically connected to the vacuum pump.

[0014] The present invention provides a silicon material vacuum drying device, which has the following beneficial effects:

[0015] (1) The silicon material vacuum drying equipment can detect the position deviation of the material frame when the vacuum cover cannot move downward any further. By timely detecting the position deviation of the material frame, the accuracy of the position of the material frame during the vacuum drying process can be ensured, thereby preventing the deformation of the material frame due to the deviation, and further ensuring the stability of the drying effect. When the vacuum cover contacts the material frame, the connecting plate contacts the connecting groove, and the connecting plate contacts the connecting groove, thereby improving the accuracy of the connection between the vacuum cover and the material frame. Accurate connection can ensure a good sealing effect, prevent air leakage during the vacuum process, and thus improve the vacuum efficiency.

[0016] (2) The silicon material vacuum drying equipment moves the support plate toward the material frame to contact the material frame and limit the material frame. The limiting function of the support plate can effectively prevent the material frame from being displaced during the drying process, ensuring that it is always in a predetermined position, thereby improving the stability of the drying effect. The bump moves and resets to hit the U-shaped frame to generate vibration. The vibration of the bump drives the support plate to resonate together. The resonance can shake off foreign matter on the surface of the support plate, thereby reducing the gap between the support plate and the material frame, further improving the stability of the limit.

[0017] (3) The silicon material vacuum drying equipment moves toward the button through the limit plate squeezed by the liquid entering the limit frame. The limit plate moves toward the button to drive the limit rod to move. The limit rod moves out of contact with the limit groove and releases the limit on the button. The vacuum pump can be started only after the vacuum cover and the material frame are stably docked. This can effectively avoid air leakage during the vacuum process, further ensure the stability of the vacuum environment and the drying effect. In addition, effective sealing reduces the workload of the vacuum pump and improves the energy efficiency ratio. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0019] Figure 2 This is a schematic diagram of the position structure of the vacuum housing and the connecting plate of the present invention;

[0020] Figure 3 This is a schematic diagram of the position structure of the hollow guide rail and the conveying equipment of the present invention;

[0021] Figure 4 For the present invention Figure 3 A schematic diagram of the structure enlargement of part A;

[0022] Figure 5 For the present invention Figure 3 A schematic diagram of the structure of part B in the middle is enlarged;

[0023] Figure 6 This is a schematic diagram of the position structure of the hollow guide rail and the material frame of the present invention;

[0024] Figure 7 For the present invention Figure 6 The enlarged schematic diagram of the structure of part C in the middle;

[0025] Figure 8 It is a schematic diagram of the position structure of the detection frame and the detection rod of the present invention.

[0026] In the figure: 1. drying rack; 2. hollow guide rail; 21. conveying equipment; 3. telescopic cylinder; 4. drying device; 5. vacuum cover; 6. L-shaped plate; 7. material frame; 8. placement frame; 9. vacuum pump; 10. connecting plate; 11. connecting groove; 12. detection groove; 13. detection hole; 14. detection frame; 15. detection rod; 16. linkage hole; 17. linkage plate; 181. support rod; 182. support plate; 183. support spring; 184. support hole; 185. square hole; 186. U-shaped frame; 187. bump; 191. load-bearing frame; 192. load-bearing plate; 193. load-bearing rod; 194. limit frame; 195. limit plate; 196. limit rod; 197. button; 198. limit groove. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] See also Figure 1-Figure 8 One embodiment of the present invention is: a silicon material vacuum drying device, comprising a drying rack 1 and a placement frame 8, and also comprising a positioning device, wherein a hollow guide rail 2 is fixedly installed on the inner wall of the drying rack 1, a telescopic cylinder 3 is fixedly installed on the top of the drying rack 1, a drying device 4 is fixedly installed on the output end of the telescopic cylinder 3, a vacuum cover 5 is arranged at the bottom of the drying device 4, an L-shaped plate 6 is fixedly installed on the front side of the vacuum cover 5, a conveying device 21 is arranged on the inner wall of the hollow guide rail 2, and a material frame 7 is arranged on the top of the conveying device 21, wherein the positioning device comprises a vacuum pump 9, a connecting plate 10, a connecting groove 11, a detection groove 12, a detection hole 13, a detection frame 14, a detection rod 15, a linkage hole 16 and a linkage plate 17 , the vacuum pump 9 is fixedly mounted on the inner wall of the placement frame 8, the connecting plate 10 is fixedly mounted on the inner wall of the vacuum housing 5, the connecting groove 11 is opened on the left side of the material frame 7, the detection groove 12 is opened on the front side of the material frame 7, the detection hole 13 is opened on the front side of the hollow guide rail 2, the detection frame 14 is fixedly mounted on the front side of the hollow guide rail 2, the detection rod 15 slides through the inner and outer walls of the detection frame 14, the linkage hole 16 is opened on the surface of the detection frame 14, and the linkage plate 17 is fixedly mounted on the side of the detection rod 15 close to the linkage hole 16. By timely detecting the position deviation of the material frame 7, the accuracy of the position of the material frame 7 during the vacuum drying process can be ensured, thereby preventing the deformation of the material frame 7 caused by the deviation, and further ensuring the stability of the drying effect.

[0029] A No. 1 spring is arranged between the detection frame 14 and the detection rod 15, and the No. 1 spring can drive the detection rod 15 to reset. The linkage plate 17 contacts the inner wall of the linkage hole 16, and a rubber strip is arranged on the inner wall of the connecting groove 11. The rubber strip can improve the sealing between the material frame 7 and the vacuum housing 5. Through accurate docking, a good sealing effect can be ensured to prevent air leakage during the vacuuming process, thereby improving the vacuuming efficiency.

[0030] The material frame 7 is in contact with the hollow guide rail 2, the end of the detection rod 15 away from the material frame 7 is set as a slope, the bottom of the L-shaped plate 6 is set as a slope, and the vacuum pump 9 is connected to the vacuum housing 5 through an external pipeline. There are two groups of connecting grooves 11, detection grooves 12 and detection holes 13, and in the other group, the connecting groove 11 is opened on the right side of the material frame 7, the detection groove 12 is opened on the rear side of the material frame 7, and the detection hole 13 is opened on the rear side of the hollow guide rail 2.

[0031] When this embodiment is working: the material frame 7 is transported to the bottom of the telescopic cylinder 3 by the conveying equipment 21. After the material frame 7 is transported to the bottom of the telescopic cylinder 3, the telescopic cylinder 3 operates to drive the drying device 4 to move downward. The drying device 4 moves downward to drive the vacuum cover 5 to move downward. The vacuum cover 5 moves downward to drive the L-shaped plate 6 to move downward. The L-shaped plate 6 moves downward to contact the inclined surface of the detection rod 15 and squeeze the detection rod 15. The detection rod 15 is squeezed by the L-shaped plate 6 and moves in the direction close to the material frame 7. The detection rod 15 moves in the direction close to the material frame 7 to squeeze the No. 1 spring. The No. 1 spring is squeezed by the detection rod 15 and deformed. If the position of the material frame 7 is accurate, the detection rod 15 moves in the direction close to the material frame 7 to contact the inner wall of the detection groove 12 and assist in fixing the material frame 7. If the position of the material frame 7 is offset and not aligned with the vacuum casing 5, the detection rod 15 moves in the direction close to the material frame 7 and contacts the surface of the material frame 7 and is blocked by the material frame 7. The detection rod 15 is blocked by the material frame 7, so that the L-shaped plate 6 cannot continue to move downward. The L-shaped plate 6 cannot continue to move downward, so that the vacuum casing 5 cannot move downward to seal the material frame 7. The vacuum casing 5 cannot continue to move downward, thereby detecting that the position of the material frame 7 is offset. When the vacuum casing 5 contacts the material frame 7, the connecting plate 10 is driven to contact the connecting groove 11. The connecting plate 10 contacts the connecting groove 11, thereby improving the accuracy of the docking between the vacuum casing 5 and the material frame 7. After the docking between the vacuum casing 5 and the material frame 7 is stable, the drying device 4 and the vacuum pump 9 are started to operate separately to perform the drying operation.

[0032] See also Figure 1-Figure 8On the basis of the above embodiment, in another embodiment of the present invention, a protective device for limiting the movement of the material frame 7 is provided on the surface of the hollow guide rail 2, and a detection device is provided on the left side of the placement frame 8. The protective device includes a support rod 181, a support plate 182, a support spring 183, a support hole 184, a square hole 185, a U-shaped frame 186 and a protrusion 187. The support rod 181 is fixedly installed on the side of the hollow guide rail 2 close to the linkage plate 17, and the support plate 182 is slidably installed on the circumferential surface of the support rod 181. The support spring 183 is arranged between the support rod 181 and the support plate 182. The support hole 184 is opened on the side of the hollow guide rail 2 close to the linkage plate 17, and the square hole 185 is opened on the side of the support plate 182 away from the linkage plate 17. The U-shaped frame 186 is fixedly installed on the side of the hollow guide rail 2 close to the linkage plate 17. Through the limiting function of the support plate 182, the displacement of the material frame 7 during the drying process can be effectively prevented to ensure that it is always in a predetermined position, thereby improving the stability of the drying effect.

[0033] The protrusion 187 is fixedly installed on the surface of the support plate 182, the support plate 182 contacts the inner wall of the linkage plate 17, and the protrusion 187 contacts the inner wall of the U-shaped frame 186. The vibration of the protrusion 187 drives the support plate 182 to resonate together. The resonance can shake off foreign objects on the surface of the support plate 182, thereby reducing the gap between the support plate 182 and the material frame 7, and further improving the stability of the limit.

[0034] The detection device includes a load-bearing frame 191, a load-bearing plate 192, a load-bearing rod 193, a limit frame 194, a limit plate 195, a limit rod 196, a button 197 and a limit slot 198. The load-bearing frame 191 is fixedly mounted on the side of the U-shaped frame 186 away from the material frame 7, the load-bearing plate 192 is slidably mounted on the inner wall of the load-bearing frame 191, the load-bearing rod 193 is fixedly mounted on the side of the load-bearing plate 192 close to the material frame 7, the limit frame 194 is fixedly mounted on the left side of the placement frame 8, and the limit plate 195 is slidably mounted on the inner wall of the load-bearing frame 191. It is movably installed on the inner wall of the limit frame 194, the limit rod 196 is fixedly installed on the side of the limit plate 195 close to the vacuum pump 9, the button 197 is fixedly installed on the bottom of the inner wall of the placement frame 8, the limit groove 198 is opened on the top of the limit rod 196, and the circumferential surface of the button 197 is provided with a protective groove. By ensuring that the vacuum pump 9 can be started only after the vacuum housing 5 and the material frame 7 are stably docked, air leakage during the vacuuming process can be effectively avoided, and the stability of the vacuum environment and the drying effect can be further ensured.

[0035] A hose is provided between the limiting frame 194 and the load-bearing frame 191 , and the limiting frame 194 is connected to the inside of the load-bearing frame 191 through the hose. Liquid is provided inside the load-bearing frame 191 , and liquid is provided inside the limiting frame 194 .

[0036] A No. 2 spring is arranged between the load-bearing frame 191 and the load-bearing plate 192. One end of the No. 2 spring is arranged on the inner wall of the load-bearing frame 191, and the other end is arranged on the surface of the load-bearing plate 192. The No. 2 spring can drive the load-bearing plate 192 to reset, the limit rod 196 contacts the inner wall of the protective groove, and the button 197 is electrically connected to the vacuum pump 9.

[0037] When the present embodiment is working, the detection rod 15 is squeezed by the L-shaped plate 6 and moves toward the direction close to the material frame 7. The detection rod 15 moves toward the direction close to the material frame 7, driving the linkage plate 17 to move. The linkage plate 17 moves and contacts with the support plate 182 and squeezes the support plate 182. The support plate 182 is squeezed by the linkage plate 17 and moves toward the direction close to the material frame 7. The support plate 182 moves toward the direction close to the material frame 7 to pull the support spring 183. The support spring 183 is pulled by the support plate 182 to deform and store force. At the same time, the support plate 182 moves toward the direction close to the material frame 7, contacts with the material frame 7 and limits the material frame 7. After breaking away from the contact with the L-shaped plate 6, the detection rod 15 moves in the direction away from the material frame 7 under the elastic force of spring No. 1. The detection rod 15 moves in the direction away from the material frame 7, driving the linkage plate 17 to move and reset. The linkage plate 17 moves and resets to break away from the contact with the support plate 182. After the support plate 182 breaks away from the contact with the linkage plate 17, the support plate 182 moves and resets in the direction away from the material frame 7 under the elastic force of the support spring 183. The support plate 182 moves and resets in the direction away from the material frame 7, driving the protrusion 187 to move and reset. The protrusion 187 moves and resets and hits the U-shaped frame 186 to generate vibration. The vibration of the protrusion 187 drives the support plate 182 to resonate together.

[0038] The support plate 182 moves toward the direction close to the material frame 7 so that the square hole 185 moves toward the direction close to the material frame 7. The square hole 185 moves toward the direction close to the material frame 7 to drive the load-bearing rod 193 to move. The load-bearing rod 193 moves toward the direction close to the material frame 7 to drive the load-bearing plate 192 to move. The movement of the load-bearing plate 192 squeezes the liquid inside the load-bearing frame 191. The liquid inside the load-bearing frame 191 is squeezed by the load-bearing plate 192 and enters the inside of the limit frame 194 through the hose, and enters the limit frame 1 The liquid inside the limit plate 194 squeezes the limit plate 195, and the limit plate 195 is squeezed by the liquid entering the limit frame 194 and moves toward the direction close to the button 197. The limit plate 195 moves toward the direction close to the button 197 and drives the limit rod 196 to move. The limit rod 196 moves out of contact with the limit groove 198 and releases the limit on the button 197. After the limit of the button 197 is released, the button 197 is pressed. The button 197 is pressed to drive the vacuum pump 9 to perform a vacuum operation.

[0039] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A silicon material vacuum drying device, comprising a drying rack (1) and a placement frame (8), characterized in that: Also includes a positioning device; The inner wall of the drying rack (1) is fixedly mounted with a hollow guide rail (2); the top of the drying rack (1) is fixedly mounted with a telescopic cylinder (3); the output end of the telescopic cylinder (3) is fixedly mounted with a drying device (4); the bottom of the drying device (4) is provided with a vacuum casing (5); the front side of the vacuum casing (5) is fixedly mounted with an L-shaped plate (6); the inner wall of the hollow guide rail (2) is provided with a conveying device (21); and the top of the conveying device (21) is provided with a material frame (7); The positioning device comprises a vacuum pump (9), a connecting plate (10), a connecting groove (11), a detection groove (12), a detection hole (13), a detection frame (14), a detection rod (15), a linkage hole (16) and a linkage plate (17); the vacuum pump (9) is fixedly mounted on the inner wall of the placement frame (8); the connecting plate (10) is fixedly mounted on the inner wall of the vacuum housing (5); the connecting groove (11) is arranged on the left side of the material frame (7); the detection groove (12) is arranged on the front side of the material frame (7); the detection hole (13) is arranged on the front side of the hollow guide rail (2); the detection frame (14) is fixedly mounted on the front side of the hollow guide rail (2); the detection rod (15) slides through the inner and outer walls of the detection frame (14); the linkage hole (16) is arranged on the surface of the detection frame (14); and the linkage plate (17) is fixedly mounted on the side of the detection rod (15) close to the linkage hole (16); Wherein, a protective device for limiting the movement of the material frame (7) is arranged on the surface of the hollow guide rail (2), and a detection device is arranged on the left side of the placement frame (8); The protective device comprises a support rod (181), a support plate (182), a support spring (183), a support hole (184), a square hole (185), a U-shaped frame (186) and a protrusion (187); the support rod (181) is fixedly mounted on a side of the hollow guide rail (2) close to the linkage plate (17); the support plate (182) is slidably mounted on the circumferential surface of the support rod (181); the support spring (183) is arranged between the support rod (181) and the support plate (182); the support hole (184) is provided on a side of the hollow guide rail (2) close to the linkage plate (17); the square hole (185) is provided on a side of the support plate (182) away from the linkage plate (17); and the U-shaped frame (186) is fixedly mounted on a side of the hollow guide rail (2) close to the linkage plate (17).

2. The silicon material vacuum drying equipment according to claim 1, characterized in that: A No. 1 spring is arranged between the detection frame (14) and the detection rod (15), the linkage plate (17) contacts the inner wall of the linkage hole (16), and a rubber strip is arranged on the inner wall of the connection groove (11).

3. The silicon material vacuum drying equipment according to claim 2, characterized in that: The material frame (7) is in contact with the hollow guide rail (2), one end of the detection rod (15) away from the material frame (7) is arranged as an inclined surface, and the bottom of the L-shaped plate (6) is arranged as an inclined surface.

4. The silicon material vacuum drying equipment according to claim 1, characterized in that: The protrusion (187) is fixedly mounted on the surface of the support plate (182); the support plate (182) contacts the inner wall of the linkage plate (17); and the protrusion (187) contacts the inner wall of the U-shaped frame (186).

5. The silicon material vacuum drying equipment according to claim 4, characterized in that: The detection device comprises a load-bearing frame (191), a load-bearing plate (192), a load-bearing rod (193), a limit frame (194), a limit plate (195), a limit rod (196), a button (197) and a limit groove (198); the load-bearing frame (191) is fixedly mounted on a side of the U-shaped frame (186) away from the material frame (7); the load-bearing plate (192) is slidably mounted on the inner wall of the load-bearing frame (191); and the load-bearing rod (193) is fixedly mounted on a side of the load-bearing plate (192) close to the material frame (7). The limiting frame (194) is fixedly mounted on a side close to the material frame (7) on the left side of the placement frame (8); the limiting plate (195) is slidably mounted on the inner wall of the limiting frame (194); the limiting rod (196) is fixedly mounted on a side of the limiting plate (195) close to the vacuum pump (9); the button (197) is fixedly mounted on the bottom of the inner wall of the placement frame (8); the limiting groove (198) is provided on the top of the limiting rod (196); and the circumferential surface of the button (197) is provided with a protective groove.

6. The silicon material vacuum drying equipment according to claim 5, characterized in that: A hose is provided between the limiting frame (194) and the load-bearing frame (191); liquid is provided inside the load-bearing frame (191); and liquid is provided inside the limiting frame (194).

7. The silicon material vacuum drying equipment according to claim 6, characterized in that: A No. 2 spring is provided between the load-bearing frame (191) and the load-bearing plate (192), the limit rod (196) is in contact with the inner wall of the protection groove, and the button (197) is electrically connected to the vacuum pump (9).

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