Temperature pressure sensor

Abstract

The invention discloses a temperature and pressure sensor, and the sensor comprises a housing which is provided with an installation cavity, and a temperature detection channel and a pressure introduction channel which are communicated with the installation cavity; a pressure measuring element; a substrate, the surface of the substrate is provided with a processing circuit, the processing circuit is electrically connected to the pressure measuring element through a first wire, and the substrate is provided with an abdicating hole allowing the first wire to pass through; a temperature sensitive element of which two ends respectively lead out a conductive terminal, the conductive terminal comprises a first section and a second section, the second section is electrically connected with the processing circuit, and the substrate is provided with a positioning structure for positioning the conductive terminal; by arranging the positioning structure on the substrate, positioning of the conductive terminal is realized, electrical connection with a processing circuit is facilitated, and the production and processing speed of the temperature and pressure sensor can be improved.

Description

Technical Field

[0001] The invention belongs to the technical field of pressure detection, and in particular relates to a temperature pressure sensor. Background Art

[0002] Pressure sensors are sensors used to measure the pressure of the environment or medium. Currently, they are mostly implemented through MEMS (micro-electromechanical systems), that is, the pressure is measured through the piezoresistive effect of semiconductor silicon. Among them, the middle part of the silicon core is set to be a diaphragm. The pressure applied to the silicon diaphragm on both sides causes the resistance value of the doped resistor on the silicon diaphragm to change. The current or voltage signal output by the measurement circuit composed of several resistors can be further processed by the conditioning circuit and then output the measurement result to the outside. When a vacuum cavity is set on one side of the diaphragm in the silicon chip, the measured pressure is the pressure applied on the other side relative to the vacuum pressure, that is, the absolute pressure; when atmospheric pressure is introduced on one side of the diaphragm, the measured pressure is the pressure relative to the atmosphere, that is, the gauge pressure; when other pressures are introduced on both sides of the diaphragm, the measured pressure is the difference between the pressures on both sides, that is, the differential pressure. In some other sensors, temperature sensitive elements can also be integrated to measure the pressure and temperature of the medium at the same time.

[0003] When the temperature sensitive element is electrically connected to the substrate, the conductive terminals of the temperature sensitive element are not fixed, so the speed is slow during production and processing. In addition, under vibration conditions, the conductive terminals and the substrate are easily loosened and fall off, resulting in the inability to detect temperature. There are also cases where wires are used to electrically connect the temperature sensitive element to the substrate, but the wires are soft and not easy to position, and the production and processing speed is also slow.

[0004] The Chinese utility model patent with publication number CN220490110U discloses a temperature and pressure sensor, which includes: a shell having a pressure introduction hole; a pressure measuring element, including a metal substrate provided with a downward pressure receiving hole and a metal diaphragm blocked at the upper end of the pressure receiving hole; the metal diaphragm is integrally connected to the metal substrate, and a pressure measuring circuit is arranged on a surface of the metal diaphragm away from the pressure receiving hole; the metal substrate divides the inner cavity of the shell into an upper cavity and a lower cavity; a substrate fixedly arranged on the upper side of the metal substrate, which is electrically connected to the pressure measuring circuit through a first wire, and is provided with a clearance hole for allowing the first wire to pass through; a plurality of pins fixedly arranged on the shell, whose lower ends extend into the upper cavity and are electrically connected to the substrate through a first elastic conductor; and a temperature sensitive element arranged in the pressure introduction hole and having a conductive rod led out at each end, the upper end of the conductive rod passes through the metal substrate and is electrically connected to the substrate through a second conductive wire of the conductive sheet, and sintered glass is sealed between the conductive rod and the metal substrate.

[0005] This temperature and pressure sensor uses a wire to electrically connect the temperature sensitive element to the substrate. The wire is soft and not easy to position, and the production and processing speed is slow. Summary of the invention

[0006] The object of the present invention is to provide a temperature and pressure sensor to solve at least one of the above technical problems.

[0007] To achieve the above object, the technical solution adopted by the present invention is:

[0008] A temperature and pressure sensor, comprising:

[0009] The housing has a mounting cavity and a temperature detection channel and a pressure introduction channel communicating with the mounting cavity;

[0010] A pressure measuring element is disposed in the installation cavity and is sealed to an inner end of the pressure introduction channel to measure the pressure of the fluid medium in the pressure introduction channel;

[0011] A substrate fixedly arranged on the upper side of the pressure measuring element, a processing circuit is arranged on the surface of the substrate, the processing circuit is electrically connected to the pressure measuring element through a first wire, and a clearance hole is arranged on the substrate to allow the first wire to pass through;

[0012] A temperature sensitive element is arranged in the temperature detection channel and has a conductive terminal at both ends, the conductive terminal is sealed with the temperature detection channel by a sealant, the conductive terminal includes a first section close to the temperature sensitive element, the first section is bent after passing through the clearance hole to form a second section horizontally arranged above the substrate, the second section is electrically connected to the processing circuit, and a positioning structure for positioning the conductive terminal is provided on the substrate.

[0013] The present invention electrically connects the temperature sensitive element with the processing circuit on the substrate by arranging a conductive terminal, and realizes the positioning of the conductive terminal by opening a positioning structure on the substrate. The conductive terminal has a certain rigidity, and after being positioned, it is convenient to be electrically connected with the processing circuit, which can improve the installation speed of the temperature sensitive element, and further improve the production and processing speed of the temperature and pressure sensor. After the conductive terminal is positioned, the stability of the electrical connection between the conductive terminal and the processing circuit of the temperature and pressure sensor under vibration conditions can also be improved.

[0014] As a preferred solution of the present invention, the positioning structure includes a first positioning notch, which is vertically opened on the inner wall of the clearance hole. The first section is clamped in the first positioning notch. By rotating the first section, the second section can be aligned with the electrical connection with the processing circuit, thereby facilitating electrical connection with the processing circuit.

[0015] As a preferred solution of the present invention, the first positioning notch is V-shaped, and its width gradually decreases toward the side away from the clearance hole, so as to facilitate the first section to be inserted into the first positioning notch.

[0016] As another preferred solution of the present invention, the positioning structure includes a clamping ring embedded in the yield hole, the top surface of the clamping ring is provided with a top block, the top of the top block is provided with a second positioning notch extending laterally, the second section is clamped in the second positioning notch, and the second section is directly aligned with the electrical connection with the processing circuit to facilitate connection with the processing circuit.

[0017] As a preferred solution of the present invention, the shell also includes a terminal button, a cylindrical shell and a pressure joint which are fixed in sequence from top to bottom and surround the installation cavity, the terminal button is provided with a plurality of connecting terminals, one end of the connecting terminal extends into the installation cavity and is electrically connected to the processing circuit through a conductive coil spring, a retaining seat for retaining the conductive coil spring is provided in the cylindrical shell, the temperature detection channel and the pressure introduction channel are separately arranged on the pressure joint, and the substrate is fixed to the top surface of the pressure joint.

[0018] As a preferred solution of the present invention, the upper portion of the cylinder shell presses the retaining seat downward onto the pressure connector.

[0019] Specifically, the upper end of the cylinder shell is molded and fixed to the terminal button, the upper end of the retaining seat is provided with a step surface facing upward, an elastic pressing piece is provided on the step surface, and the upper part of the cylinder shell is pressed downward on the elastic pressing piece.

[0020] As a preferred solution of the present invention, the lower part of the cylinder shell forms a circle of pressing parts supported on the upper end of the pressure joint, and the base plate is located inside the pressing part.

[0021] As a preferred solution of the present invention, the substrate is bonded to the upper end surface of the pressure connector.

[0022] As a preferred solution of the present invention, the bottom end of the cylinder shell is sealed and connected to the top end of the pressure joint.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] The present invention electrically connects the temperature sensitive element with the processing circuit on the substrate by arranging a conductive terminal, and realizes the positioning of the conductive terminal by opening a positioning structure on the substrate. The conductive terminal has a certain rigidity, and after being positioned, it is convenient to be electrically connected with the processing circuit, which can improve the installation speed of the temperature sensitive element, and further improve the production and processing speed of the temperature and pressure sensor. After the conductive terminal is positioned, the stability of the electrical connection between the conductive terminal and the processing circuit of the temperature and pressure sensor under vibration conditions can also be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic diagram of the structure of a pressure sensor in this embodiment;

[0026] Figure 2 This is a schematic structural diagram of a pressure sensor in this embodiment from another perspective;

[0027] Figure 3 for Figure 2 A partial enlarged view of the middle part;

[0028] Figure 4 is a diagram showing the position relationship between the first positioning notch and the substrate in this embodiment;

[0029] Figure 5 This is a schematic diagram of the structure of another preferred solution of a pressure sensor in this embodiment;

[0030] Figure 6 for Figure 5 A partial enlarged view of point B in the middle;

[0031] Figure 7 is a diagram showing the position relationship between the clamping ring and the base plate in this embodiment;

[0032] Figure 8 for Figure 7 A partial enlarged view of point C in the middle;

[0033] In the figure: 1. shell; 101. installation cavity; 102. temperature detection channel; 103. pressure introduction channel; 104. terminal; 105. cylinder shell; 106. pressure joint; 2. pressure measuring element; 3. substrate; 4. clearance hole; 5. conductive terminal; 501. first section; 502. second section; 6. temperature sensitive element; 7. sealant; 8. first positioning notch; 9. retaining ring; 10. top block; 11. second positioning notch; 12. connecting terminal; 13. conductive coil spring; 14. retaining seat; 15. step surface; 16. elastic clamping member; 17. clamping part. DETAILED DESCRIPTION

[0034] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] like Figure 1-3 As shown, this embodiment provides a temperature and pressure sensor, including: a housing 1, a pressure measuring element 2, a substrate 3 with a processing circuit on the surface thereof, and a temperature sensitive element 6.

[0036] The shell 1 has an installation cavity 101 and a temperature detection channel 102 and a pressure introduction channel 103 connected to the installation cavity 101; the shell 1 also includes a terminal button 104, a cylindrical shell 105 and a pressure joint 106 which are fixed in sequence from top to bottom and surround the installation cavity 101. The terminal button 104 is provided with a plurality of connecting terminals 12, one end of the connecting terminal 12 extends into the installation cavity 101 and is electrically connected to the processing circuit on the substrate 3 through a conductive coil spring 13. A retaining seat 14 for retaining the conductive coil spring 13 is provided in the cylindrical shell 105. The temperature detection channel 102 and the pressure introduction channel 103 are separately arranged on the pressure joint 106, and the substrate 3 is fixed to the top surface of the pressure joint 106.

[0037] A pressure measuring element 2 is disposed in the installation cavity 101 and is sealed to an inner end of the pressure introduction channel 103 to measure the pressure of the fluid medium in the pressure introduction channel 103;

[0038] A substrate 3 is fixedly arranged on the upper side of the pressure measuring element 2, a processing circuit is arranged on the surface of the substrate 3, the processing circuit is electrically connected to the pressure measuring element 2 through a first wire, and a clearance hole 4 is arranged on the substrate 3 to allow the first wire to pass through;

[0039] The temperature sensitive element 6 is arranged in the temperature detection channel 102 and has a conductive terminal 5 led out from both ends. The conductive terminal 5 is sealed with the temperature detection channel 102 by a sealant 7. The conductive terminal 5 includes a first section 501 close to the temperature sensitive element 6. The first section 501 is bent after passing through the clearance hole 4 to form a second section 502 horizontally arranged above the substrate 3. The second section 502 is electrically connected to the processing circuit. A positioning structure for positioning the conductive terminal 5 is provided on the substrate 3.

[0040] The present invention electrically connects the temperature sensitive element 6 with the processing circuit on the substrate 3 by setting a conductive terminal 5, and realizes the positioning of the conductive terminal 5 by opening a positioning structure on the substrate 3. The conductive terminal 5 has a certain rigidity. After being positioned, it is convenient to be electrically connected with the processing circuit, which can increase the installation speed of the temperature sensitive element 6, and further increase the production and processing speed of the temperature and pressure sensor. After the conductive terminal 5 is positioned, the stability of the electrical connection between the conductive terminal 5 and the processing circuit of the temperature and pressure sensor can also be improved under vibration conditions.

[0041] As a preferred solution of this embodiment, Figure 4 As shown, the positioning structure includes a first positioning notch 8, which is vertically opened on the inner wall of the clearance hole 4. The first section 501 is clamped in the first positioning notch 8. By rotating the first section 501, the second section 502 can be aligned with the electrical connection with the processing circuit, which is convenient for electrical connection with the processing circuit.

[0042] As a preferred solution of this embodiment, the first positioning notch 8 is V-shaped, and its width gradually decreases toward the side away from the clearance hole 4, so that the first section 501 can be easily inserted into the first positioning notch 8.

[0043] As another preferred solution of this embodiment, Figure 5-8 As shown, the positioning structure includes a clamping ring 9 embedded in the clearance hole 4, a top block 10 is provided on the top surface of the clamping ring 9, and a second positioning slot 11 extending laterally is provided on the top of the top block 10. The second section 502 is clamped in the second positioning slot 11, and the second section 502 is directly aligned with the electrical connection with the processing circuit, so as to facilitate the connection with the processing circuit.

[0044] As a preferred solution of this embodiment, the upper part of the cylinder shell 105 presses the retaining seat 14 onto the pressure connector 106 downward.

[0045] Specifically, the upper end of the cylinder shell 105 is molded and fixed to the terminal button 104, and the upper end of the retaining seat 14 is provided with a step surface 15 facing upward, and an elastic pressing piece 16 is provided on the step surface 15, and the upper part of the cylinder shell 105 is pressed downward on the elastic pressing piece 16.

[0046] As a preferred solution of this embodiment, a circle of pressing portion 17 supported on the upper end of the pressure connector 106 is formed at the lower part of the cylinder shell 105 , and the substrate 3 is located inside the pressing portion 17 .

[0047] As a preferred solution of this embodiment, the substrate 3 is bonded to the upper end surface of the pressure connector 106 .

[0048] As a preferred solution of this embodiment, the bottom end of the cylinder shell 105 is sealed and connected to the top end of the pressure joint 106 .

[0049] It should be noted that although the present invention is disclosed as above by specific embodiments, the above embodiments are not intended to limit the present invention. Ordinary technicians in this field can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be based on the scope defined in the claims.

Claims

1. A temperature and pressure sensor, characterized in that: include: The housing has a mounting cavity and a temperature detection channel and a pressure introduction channel communicating with the mounting cavity; A pressure measuring element is disposed in the installation cavity and is sealed to an inner end of the pressure introduction channel to measure the pressure of the fluid medium in the pressure introduction channel; A substrate fixedly arranged on the upper side of the pressure measuring element, a processing circuit is arranged on the surface of the substrate, the processing circuit is electrically connected to the pressure measuring element through a first wire, and a clearance hole is arranged on the substrate to allow the first wire to pass through; A temperature sensitive element is arranged in the temperature detection channel and has a conductive terminal at both ends, the conductive terminal is sealed with the temperature detection channel by a sealant, the conductive terminal includes a first section close to the temperature sensitive element, the first section is bent after passing through the clearance hole to form a second section horizontally arranged above the substrate, the second section is electrically connected to the processing circuit, and a positioning structure for positioning the conductive terminal is provided on the substrate.

2. A temperature and pressure sensor as claimed in claim 1, characterized in that: The positioning structure comprises a first positioning notch, the first positioning notch is vertically arranged on the inner wall of the clearance hole, and the first section is clamped in the first positioning notch.

3. A temperature and pressure sensor as claimed in claim 2, characterized in that: The first positioning notch is V-shaped, and its width gradually decreases toward the side away from the clearance hole.

4. A temperature and pressure sensor as claimed in claim 1, characterized in that: The positioning structure comprises a clamping ring embedded in the clearance hole, a top block is arranged on the top surface of the clamping ring, a second positioning notch extending laterally is arranged on the top end of the top block, and the second section is clamped in the second positioning notch.

5. A temperature and pressure sensor as claimed in claim 1, characterized in that: The shell also includes a terminal button, a cylinder shell and a pressure joint which are fixed in sequence from top to bottom and surround the installation cavity. The terminal button is provided with a plurality of connecting terminals. One end of the connecting terminal extends into the installation cavity and is electrically connected to the processing circuit through a conductive coil spring. A retaining seat for retaining the conductive coil spring is provided in the cylinder shell. The temperature detection channel and the pressure introduction channel are separately arranged on the pressure joint, and the substrate is fixed to the top surface of the pressure joint.

6. A temperature and pressure sensor as claimed in claim 5, characterized in that: The upper part of the cylinder shell presses the retaining seat downward onto the pressure joint.

7. A temperature and pressure sensor as claimed in claim 6, characterized in that: The upper end of the cylinder shell is molded and fixed to the terminal button, the upper end of the retaining seat is provided with a step surface facing upward, an elastic pressing piece is provided on the step surface, and the upper part of the cylinder shell is pressed downward on the elastic pressing piece.

8. A temperature and pressure sensor as claimed in claim 7, characterized in that: The lower part of the cylinder shell forms a circle of a pressing part supported on the upper end of the pressure joint, and the base plate is located inside the pressing part.

9. A temperature and pressure sensor as claimed in claim 5, characterized in that: The substrate is bonded to the upper end surface of the pressure connector.

10. A temperature and pressure sensor as claimed in claim 5, characterized in that: The bottom end of the cylinder shell is sealed and connected to the top end of the pressure joint.

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