Sample transmission mechanism and wafer detection device

Abstract

The invention relates to a sample transmission mechanism and a wafer detection device. The sample transmission mechanism is applied to the wafer detection device and comprises a transmission shell, a sample tray and a limiting assembly, and the transmission shell is provided with a setting cavity; the sample tray is used for bearing a to-be-detected sample, the sample tray is arranged in the arrangement cavity, and the sample tray is detachably connected with the transmission shell; the limiting assembly is movably arranged in the arrangement cavity in a penetrating mode, the limiting assembly comprises a transmission rod and a clamping piece, the transmission rod is arranged in the transmission shell in a penetrating mode and movably connected with the transmission shell, the clamping piece is rotatably connected with the transmission rod, and the clamping piece has a first state and a second state relative to the transmission rod; when the clamping piece is in a first state relative to the transmission rod, the clamping piece is clamped with the sample tray; and when the clamping piece is in the second state relative to the transmission rod, the clamping piece is separated from the sample tray. The sample conveying mechanism is convenient for workers to arrange the to-be-detected sample on the chuck, the labor is saved, and the efficiency of arranging the to-be-detected sample on the chuck is higher.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor testing equipment, and in particular to a sample transmission mechanism and a wafer testing device. Background Art

[0002] In the field of wafer inspection technology, when a sample to be inspected needs to be inspected in a vacuum environment, the sample to be inspected needs to be placed on a vacuum probe station. In the past, the upper cover of the vacuum probe station was usually opened, the sample to be inspected was placed on the chuck, and then the cover was closed.

[0003] However, when the size of the sample to be tested is large, the chamber of the vacuum probe station is large, making the upper cover of the vacuum probe station too heavy and difficult to carry. If the opening is directly opened on the side of the vacuum probe station, the distance from the opening to the chuck is too large, and the sample to be tested cannot be placed accurately on the chuck by hand. Therefore, how to conveniently place the sample to be tested on the chuck is an urgent problem to be solved. Summary of the invention

[0004] In view of this, the present application provides a sample transmission mechanism and a wafer inspection device, wherein the sample transmission mechanism facilitates the staff to set the sample to be inspected on the chuck and is more labor-saving, which is beneficial to improving the efficiency of transmitting the sample to be inspected and setting the sample to be inspected on the chuck.

[0005] The present application provides a sample transmission mechanism, which is applied to a wafer detection device, the sample transmission mechanism comprising: a transmission shell, a sample tray and a limiting assembly, the transmission shell having a setting cavity; the sample tray is used to carry a sample to be detected, the sample tray is arranged in the setting cavity, and the sample tray is detachably connected to the transmission shell; the limiting assembly is movably arranged in the setting cavity of the transmission shell, the limiting assembly comprises a transmission rod and a clamping member, the transmission rod is arranged in the transmission shell and is movably connected to the transmission shell, the clamping member is rotatably connected to the transmission rod, and the clamping member has a first state and a second state relative to the transmission rod; when the clamping member is in the first state relative to the transmission rod, the clamping member clamps the sample tray; when the clamping member is in the second state relative to the transmission rod, the clamping member is separated from the sample tray.

[0006] Furthermore, the sample tray has a limiting hole; when the clamp is in a first state relative to the transmission rod, the clamp is partially embedded in the limiting hole to clamp the sample tray; when the clamp is in a second state relative to the transmission rod, the clamp is separated from the sample tray.

[0007] Furthermore, the limiting assembly also includes a rotating shaft and a torsion spring component, the rotating shaft is connected to the transmission rod, the clamping component is sleeved on the transmission rod, the torsion spring component includes a first torsion arm, a second torsion arm and a sleeve connection portion, the first torsion arm and the second torsion arm are respectively connected to opposite ends of the sleeve connection portion, the sleeve connection portion is sleeved on the rotating shaft, the first torsion arm abuts the clamping component, and the second torsion arm abuts the transmission shell.

[0008] Furthermore, the sample transmission mechanism also includes a limit member, which is located in the setting cavity and connected to the transmission shell, and the transmission rod can be movably passed through the limit member, and the transmission rod has a first position and a second position relative to the limit member. When the transmission rod is in the first position relative to the limit member, the clamping member is in a first state; when the transmission rod is in the second position relative to the limit member, the clamping member is in a second state.

[0009] Further, the sample tray includes a tray body, a first guide portion and a second guide portion, the tray body has the limiting hole, the first guide portion and the second guide portion are arranged on the surface of the tray body facing the clamping member, the first guide portion and the second guide portion both extend along a first direction, and the first guide portion and the second guide portion are arranged at intervals along a second direction, the first guide portion and the second guide portion cooperate to guide the tray body to be set on the wafer detection device, wherein the first direction is the direction in which the transmission rod moves relative to the sample tray, and the first direction intersects with the second direction.

[0010] Furthermore, the sample tray also includes a mounting portion, which is disposed on a surface of the tray body facing the clamping member and is closer to the limiting assembly than the first guide portion and the second guide portion, and is arc-shaped.

[0011] Furthermore, the mounting portion has a penetration hole, and the sample transmission mechanism also includes a locking component, which includes an elastic member and a penetration member, and the penetration member is sequentially penetrated through the elastic member and the penetration hole, and the penetration member is used to connect the tray body to the wafer detection device; the sample transmission mechanism also includes a locking tool, which is penetrated through the transmission shell and can be moved relative to the transmission shell in a first direction, and the locking tool can also be rotatably connected to the transmission shell, and the locking tool can be detachably embedded in the penetration member, and is used to drive the penetration member to rotate, so that the penetration member is penetrated through the wafer detection device, thereby locking the sample tray to the wafer detection device.

[0012] Furthermore, the transmission shell includes a first sub-section, a second sub-section, a third sub-section and a fourth sub-section that are bent and connected to each other, the first sub-section, the second sub-section, the third sub-section and the fourth sub-section enclose the setting cavity, the first sub-section is arranged opposite to the sample to be detected, the third sub-section has a notch, and the sample tray is arranged corresponding to the notch.

[0013] The present application also provides a wafer detection device, which includes: a shell, a chuck and a sample transmission mechanism provided in the present application, the shell encloses a chamber, and the side of the shell has an opening, and the opening is connected to the chamber; the chuck is located in the chamber; the sample transmission mechanism provided in the present application is used to transfer the sample tray and the sample to be detected from the opening to a place close to the chuck, and set the sample tray and the sample to be detected on one side of the chuck.

[0014] Furthermore, the wafer inspection device further includes: a closing door, which can be detachably provided on the shell to close the opening.

[0015] In the present application, when the transmission rod moves relative to the transmission shell, the clamping member rotates relative to the transmission rod, so that the clamping member has a first state and a second state relative to the transmission rod, and can switch between the first state and the second state. When the sample tray and the sample to be detected are set in the setting cavity, by pushing the transmission rod to move relative to the transmission shell, so that the clamping member rotates relative to the transmission rod and is in the first state, the clamping member clamps the sample tray, that is, the relative position of the sample tray and the transmission shell is limited, so that when the staff is carrying the transmission shell and driving the transmission shell from the opening into the chamber, it can avoid the sample tray and the transmission shell from moving significantly and causing the sample tray to leave the setting cavity, avoid the sample to be detected from being hit during the transportation process, and improve the structural stability of the sample tray set in the setting cavity. Further, when the sample tray and the sample to be detected are transferred to the vicinity of the chuck, by pushing the transmission rod to move relative to the transmission shell, so that the clamping member rotates relative to the transmission rod and is in the second state, the clamping member is separated from the sample tray, that is, the sample tray and the transmission shell are in a separated state, and when the staff drives the transmission shell to escape from the chamber from the opening, the sample tray and the sample to be detected are still arranged on one side of the chuck, and the transmission shell escapes to avoid affecting the subsequent detection of the sample to be detected, thereby realizing the installation of the sample to be detected in the wafer detection device. In the present application, the sample transmission mechanism facilitates the staff to set the sample to be detected on the chuck, and is more labor-saving, which is conducive to improving the efficiency of transmitting the sample to be detected and setting the sample to be detected on the chuck. Specifically, when the size of the sample to be detected is large and the chamber of the wafer detection device is large, the distance from the opening to the chuck is far, and the sample transmission mechanism can also realize the transmission of the sample tray and the sample to be detected to a position close to the chuck, and the sample transmission mechanism has good performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the implementation will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 This is a schematic structural diagram of a wafer inspection device according to an embodiment of the present application;

[0018] Figure 2 This is a schematic diagram of the explosion structure of a wafer inspection device according to an embodiment of the present application;

[0019] Figure 3This is a schematic diagram of the exploded structure of a sample transmission mechanism according to an embodiment of the present application;

[0020] Figure 4 This is a schematic diagram of a top view of the structure of an embodiment of the present application;

[0021] Figure 5 for Figure 4 Schematic diagram of the cross-sectional structure in the AA direction;

[0022] Figure 6 for Figure 4 Schematic diagram of the cross-sectional structure in the middle BB direction;

[0023] Figure 7 A schematic diagram of a top view of a sample transmission mechanism according to an embodiment of the present application;

[0024] Figure 8 for Figure 7 Schematic diagram of the cross-sectional structure in the CC direction;

[0025] Fig. 9 This is a schematic structural diagram of a sample tray according to an embodiment of the present application;

[0026] Fig.10 This is a schematic diagram of the structure of a transmission shell according to an embodiment of the present application;

[0027] Fig.11 It is a schematic side view of the structure of a transmission shell according to an embodiment of the present application;

[0028] Fig.12 for Fig.11 Schematic diagram of the cross-sectional structure in the middle DD direction;

[0029] Fig.13 for Figure 8 The enlarged structural diagram of the dashed box in E;

[0030] Fig.14 This is a schematic diagram of the structure of a limit assembly according to an embodiment of the present application;

[0031] Fig.15 This is a schematic structural diagram of a torsion spring member according to an embodiment of the present application;

[0032] Fig.16 This is a schematic structural diagram of a transmission shell according to another embodiment of the present application;

[0033] Fig.17 for Figure 7 Schematic diagram of the cross-sectional structure in the FF direction;

[0034] Fig.18 for Figure 7 Schematic diagram of the cross-sectional structure in the middle GG direction;

[0035] Fig.19 for Fig.18 A schematic diagram of the enlarged structure of the dotted line frame in the middle H;

[0036] Fig. 20 This is a schematic structural diagram of a chuck according to an embodiment of the present application.

[0037] Description of reference numerals:

[0038] 100-sample transmission mechanism, 110-transmission shell, 111-setting cavity, 112-first sub-section, 113-second sub-section, 1131-first step member, 114-third sub-section, 1141-notch, 115-fourth sub-section, 1151-second step member, 120-sample tray, 121-limiting hole, 122-tray body, 1221-sample slot, 123-first guide portion, 124-second guide portion, 125-installation portion, 1251-through hole, 126-pressing strip, 130-limiting assembly, 131-transmission rod, 132-clamping member, 133-rotating shaft, 134-torsion spring member, 1341-first torsion arm, 1342-second torsion arm, 1343 - socket part, 140-limiting part, 150-locking component, 151-elastic part, 152-piercing part, 160-locking tool, 170-assembly component, 171-first assembly sub-component, 1711-first assembly part, 172-second assembly sub-component, 1721-second assembly part, 180-block assembly, 181-first block, 182-second block, 190-sleeve, 200-wafer detection device, 210-housing, 211-chamber, 212-opening, 220-chuck, 221-mounting hole, 230-enclosed door, 240-seal, 250-guide component, 251-first guide part, 252-second guide part, 300-sample to be detected. DETAILED DESCRIPTION

[0039] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0040] The terms "first", "second", etc. in the specification and claims of this application and the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally includes steps or units that are not listed, or optionally includes other steps or units inherent to these processes, methods, products or devices.

[0041] Reference to "embodiment" or "implementation" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiment or implementation may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0042] In the field of wafer inspection technology, when a sample to be inspected needs to be inspected in a vacuum environment, the sample to be inspected needs to be placed on a vacuum probe station. In the past, the upper cover of the vacuum probe station was usually opened, the sample to be inspected was placed on the chuck, and then the cover was closed.

[0043] However, when the size of the sample to be tested is large, the chamber of the vacuum probe station is large, making the upper cover of the vacuum probe station too heavy and difficult to carry. If the opening is directly opened on the side of the vacuum probe station, the distance from the opening to the chuck is too large, and the sample to be tested cannot be placed accurately on the chuck by hand. Therefore, how to conveniently place the sample to be tested on the chuck is an urgent problem to be solved.

[0044] See also Figures 1 to 3 The present application also provides a wafer inspection device 200, which includes: a shell 210, a chuck 220 and a sample transfer mechanism 100 provided in the present application, wherein the shell 210 encloses a chamber 211, and a side of the shell 210 has an opening 212, and the opening 212 is connected to the chamber 211; the chuck 220 is located in the chamber 211; the sample transfer mechanism 100 provided in the present application is used to transfer the sample tray 120 and the sample 300 to be inspected from the opening 212 to a position close to the chuck 220, and to set the sample tray 120 and the sample 300 to be inspected on one side of the chuck 220.

[0045] It can be understood that the opening 212 is in communication with the outside and the chamber 211 .

[0046] In this embodiment, the wafer inspection device 200 includes the sample transmission mechanism 100 provided in the present application. When the clamping member 132 is in the first state relative to the transmission rod 131, the clamping member 132 is clamped to the sample tray 120, that is, the relative position of the sample tray 120 and the transmission shell 110 is fixed to prevent the sample tray 120 from falling off from the transmission shell 110 during the transportation of the transmission shell 110. When the staff drives the transmission shell 110 to penetrate the chamber 211 from the opening 212, the sample tray 120 and the sample to be detected 300 are transmitted to the vicinity of the chuck 220, so as to realize that the sample tray 120 and the sample to be detected 300 are arranged on one side of the chuck 220; further, the state of the clamping member 132 is changed so that the clamping member 132 is in the second state relative to the transmission rod 131, and the clamping member 132 and the sample tray 120 are separated. In other words, the sample tray 120 and the transmission shell 110 are in a separated state. When the staff drives the transmission shell 110 to escape from the chamber 211 from the opening 212, the sample tray 120 and the sample to be detected 300 are still arranged on one side of the chuck 220, and the transmission shell 110 escapes to avoid affecting the subsequent detection of the sample to be detected 300. Compared with the solution of setting an opening cover above the housing 210, the sample transfer mechanism 100 provided in this embodiment is convenient for the staff to place the sample 300 to be tested on the chuck 220, and is more labor-saving, which is conducive to improving the efficiency of placing the sample 300 to be tested on the chuck 220. Furthermore, even if the distance from the opening 212 to the chuck 220 is far, the sample transfer mechanism 100 can transfer the sample tray 120 and the sample 300 to be tested to a position close to the chuck 220, and the sample transfer mechanism 100 and the wafer inspection device 200 have better performance.

[0047] Optionally, in some embodiments, the wafer inspection device 200 is a vacuum probe station.

[0048] Optionally, the sample to be tested 300 is a wafer, and the wafer testing device 200 is used to perform radio frequency testing and reliability testing on the wafer.

[0049] Optionally, the size of the sample 300 to be tested may be, but is not limited to, 6 inches, 8 inches, or 12 inches.

[0050] Optionally, the material of the sample to be tested 300 may be, but is not limited to, silicon (Si), gallium nitride (GaN), silicon carbide (SiC), etc.

[0051] In some embodiments, the wafer inspection device 200 further includes a closing door 230 , which can be detachably disposed on the housing 210 to close the opening 212 .

[0052] In this embodiment, it can be understood that the closed door 230 is separately disposed on the housing 210. When the sample transmission mechanism 100 is used to transmit the sample tray 120 and the sample to be detected 300 from the opening 212 to near the chuck 220, the closed door 230 is separated from the housing 210 to facilitate the transmission shell 110 to penetrate the chamber 211. When the sample tray 120 and the sample to be detected 300 are disposed on one side of the chuck 220 and the transmission shell 110 is removed from the chamber 211 through the opening 212, the closed door 230 closes the opening 212 to achieve the closure of the chamber 211, so that the chamber 211 forms a negative pressure, so as to detect the performance of the sample to be detected 300 under the negative pressure state.

[0053] It can be understood that in some embodiments, the chamber 211 is in a vacuum state so as to detect the performance of the sample 300 to be detected in a vacuum state.

[0054] Optionally, the wafer inspection device 200 further includes a sealing member 240 , and the sealing member 240 is disposed on a surface of the closing door 230 facing the opening 212 , so that when the closing door 230 closes the opening 212 , the chamber 211 has a better sealing performance.

[0055] See also Figures 2 to 6 Optionally, the wafer inspection device 200 further includes two groups of guide assemblies 250, which are spaced apart from each other in the housing 210 and are detachably connected to the transmission shell 110 of the sample transmission mechanism 100 to guide the sample transmission mechanism 100 to enter the chamber 211 from the opening 212 and to transfer the sample tray 120 and the sample to be inspected 300 to one side of the chuck 220.

[0056] In this embodiment, when the sample transmission mechanism 100 enters the chamber 211 through the opening 212 , two sets of the guide components 250 are located on opposite sides of the transmission shell 110 to provide guidance for the sample transmission mechanism 100 to enter the chamber 211 .

[0057] Optionally, the arrangement direction of the two groups of guide components 250 is perpendicular to the moving direction of the transmission rod 131 relative to the transmission shell 110, and each group of the guide components 250 includes a first guide member 251 and a plurality of second guide members 252, wherein the first guide member 251 is arranged on the inner side wall of the opening 212, and the plurality of second guide members 252 are arranged on the chamber 211 and connected to the top wall of the inner side of the shell 210, and the plurality of second guide members 252 are arranged in sequence along the moving direction of the transmission rod 131 relative to the transmission shell 110. Arrangement, the opposite sides of the transmission shell 110 are respectively movably arranged on the first guide member 251 and the plurality of second guide members 252 of the two groups of the guide assemblies 250, and the first guide member 251 and the second guide member 252 cooperate to guide the moving direction of the transmission shell 110 relative to the shell body 210, thereby improving the efficiency and accuracy of installing the sample 300 to be detected on one side of the chuck 220 by using the sample transmission mechanism 100, and improving the performance of the sample transmission mechanism 100.

[0058] It can be understood that the first direction (such as Figure 4 The X direction is the direction in which the transmission rod 131 moves relative to the transmission shell 110, the first direction is also the direction in which the transmission shell 110 moves relative to the housing 210, and the first direction is also the direction in which the multiple first guide members 251 are arranged in sequence.

[0059] It can be understood that the second direction (such as Figure 4 In other words, when the sample transmission mechanism 100 is connected to the shell 210, one group of the guide components 250, the transmission shell 110 and another group of the guide components 250 are arranged in sequence along the second direction.

[0060] It can be understood that, in the terminology of the present application, "plurality" means greater than or equal to two, and can be but not limited to two, three, four, five or six, etc.

[0061] See also Figure 1 , Figure 3 , Figure 7 and Figure 8The present application provides a sample transmission mechanism 100, which is applied to a wafer detection device 200. The sample transmission mechanism 100 includes: a transmission shell 110, a sample tray 120 and a limiting assembly 130. The transmission shell 110 has a setting cavity 111; the sample tray 120 is used to carry a sample 300 to be detected, and the sample tray 120 is set in the setting cavity 111. The sample tray 120 and the transmission shell 110 are detachably connected; the limiting assembly 130 can be movably passed through the setting cavity 111 of the transmission shell 110, and the limiting assembly 130 includes A transmission rod 131 and a clamping member 132, wherein the transmission rod 131 passes through the transmission shell 110 and is movably connected to the transmission shell 110, and the clamping member 132 is rotatably connected to the transmission rod 131, and the clamping member 132 has a first state and a second state relative to the transmission rod 131; when the clamping member 132 is in the first state relative to the transmission rod 131, the clamping member 132 clamps the sample tray 120; when the clamping member 132 is in the second state relative to the transmission rod 131, the clamping member 132 is separated from the sample tray 120.

[0062] Understandably, in Figure 8 In the embodiment, the clamping member 132 is in a first state relative to the transmission rod 131 .

[0063] It can be understood that the sample tray 120 and the transmission shell 110 are detachably connected, that is, when the clamping member 132 is in a first state relative to the transmission rod 131, the sample tray 120 and the transmission shell 110 are in a connected state; when the clamping member 132 is in a second state relative to the transmission rod 131, the sample tray 120 and the transmission shell 110 are in a separable state.

[0064] It can be understood that the limiting component 130 can be movably disposed in the transmission shell 110 , and the limiting component 130 can be moved relative to the transmission shell 110 .

[0065] In this embodiment, when the transmission rod 131 moves relative to the transmission shell 110, the clamping member 132 rotates relative to the transmission rod 131, so that the clamping member 132 has a first state and a second state relative to the transmission rod 131, and can switch between the first state and the second state. When the sample tray 120 and the sample to be detected 300 are set in the setting cavity 111, the transmission rod 131 is pushed to move relative to the transmission shell 110 so that the clamping member 132 rotates relative to the transmission rod 131 and is in the first state, and the clamping member 132 clamps the sample tray 120, that is, the relative position of the sample tray 120 and the transmission shell 110 is limited, so that when the staff carries the transmission shell 110 and drives the transmission shell 110 from the opening 212 to enter the chamber 211, it can avoid the sample tray 120 and the transmission shell 110 from moving significantly so that the sample tray 120 is separated from the setting cavity 111, and the sample to be detected 300 is prevented from being hit during the transportation process, thereby improving the structural stability of the sample tray 120 set in the setting cavity 111. Furthermore, when the sample tray 120 and the sample to be detected 300 are transferred to a position close to the chuck 220, the transmission rod 131 is pushed to move relative to the transmission shell 110 so that the clamping member 132 rotates relative to the transmission rod 131 and is in the second state, and the clamping member 132 is separated from the sample tray 120, that is, the sample tray 120 and the transmission shell 110 are in a separated state. When the staff drives the transmission shell 110 to escape from the chamber 211 through the opening 212, the sample tray 120 and the sample to be detected 300 are still arranged on one side of the chuck 220, and the transmission shell 110 escapes to avoid affecting the subsequent detection of the sample to be detected 300, thereby realizing the installation of the sample to be detected 300 in the wafer detection device 200. In this embodiment, the sample transfer mechanism 100 facilitates the staff to place the sample to be tested 300 on the chuck 220, and is more labor-saving, which is conducive to improving the efficiency of transferring the sample to be tested 300 and placing the sample to be tested 300 on the chuck 220. Specifically, when the size of the sample to be tested 300 is large and the chamber 211 of the wafer inspection device 200 is large, the distance from the opening 212 to the chuck 220 is far, and the sample transfer mechanism 100 can also realize the transfer of the sample tray 120 and the sample to be tested 300 to a position close to the chuck 220, and the sample transfer mechanism 100 has good performance.

[0066] See also Fig. 9Optionally, the sample tray 120 includes a tray body 122 and a pressure strip 126, the tray body 122 has a sample slot 1221, the sample to be detected 300 is arranged in the sample slot 1221, the pressure strip 126 is arranged around the periphery of the sample to be detected 300 and can be detachably connected to the tray body 122, and the pressure strip 126 is used to limit the relative position of the sample to be detected 300 and the tray body 122.

[0067] In this embodiment, the pressure strip 126 is detachably connected to the tray body 122. In other words, the pressure strip 126 and the tray body 122 are detachably connected. In the process of setting the sample 300 to be detected on the tray body 122, the sample 300 to be detected is first set in the sample slot 1221, and then the pressure strip 126 is set around the periphery of the sample 300 to be detected. At the same time, the pressure strip 126 is set around the periphery of the sample slot 1221, and the surface of the pressure strip 126 facing the tray body 122 partially contacts the sample 300 to be detected, and partially contacts the tray body 122, so as to limit the relative position of the sample 300 to be detected and the tray body 122, thereby improving the structural stability of the sample 300 to be detected set on the sample tray 120, avoiding the sample transmission mechanism 100 from damaging the sample 300 to be detected during the transmission of the sample 300 to be detected, thereby improving the performance of the sample transmission mechanism 100.

[0068] See also Fig.10 In some embodiments, the transmission shell 110 includes a first sub-portion 112, a second sub-portion 113, a third sub-portion 114 and a fourth sub-portion 115 that are bent and connected to each other. The first sub-portion 112, the second sub-portion 113, the third sub-portion 114 and the fourth sub-portion 115 enclose the setting cavity 111. The first sub-portion 112 is arranged opposite to the sample 300 to be detected, the third sub-portion 114 has a notch 1141, and the sample tray 120 is arranged corresponding to the notch 1141.

[0069] It can be understood that, along the thickness direction of the transmission shell 110 , the first sub-portion 112 , the sample to be detected 300 , the sample tray 120 , and the third sub-portion 114 are arranged in sequence.

[0070] It can be understood that the notch 1141 is connected to the setting cavity 111 .

[0071] In this embodiment, the first sub-portion 112, the second sub-portion 113, the third sub-portion 114 and the fourth sub-portion 115 are bent and connected in sequence to enclose the setting cavity 111 to accommodate the sample tray 120 and the sample to be detected 300. When the sample transmission mechanism 100 is applied to the wafer detection device 200 and the sample tray 120 is transported from the opening 212 to the vicinity of the chuck 220, the notch 1141 of the third sub-portion 114 can avoid the position of the chuck 220 to avoid the third sub-portion 114 from interfering with the position of the chuck 220, thereby realizing the transmission of the sample tray 120 and the sample to be detected 300 to one side of the chuck 220, so as to improve the performance of the sample transmission mechanism 100.

[0072] See also Fig.11 and Fig.12 In some embodiments, the sample transmission mechanism 100 further includes an assembly component 170, the assembly component 170 includes a first assembly subcomponent 171, the first assembly subcomponent 171 includes a plurality of first assembly parts 1711, the plurality of first assembly parts 1711 are arranged in the setting cavity 111 at intervals along the direction in which the transmission rod 131 moves relative to the sample tray 120, the transmission rod 131 passes through the plurality of first assembly parts 1711 in sequence, and can move relative to the plurality of first assembly parts 1711.

[0073] Specifically, the plurality of first assembly parts 1711 are disposed on the third sub-portion 114 .

[0074] In this embodiment, the multiple first assembly parts 1711 are used to install the transmission rod 131 on the transmission shell 110, and the multiple first assembly parts 1711 can guide the moving direction of the transmission rod 131 to drive the clamping member 132 to move and realize the switching of the clamping member 132 relative to the transmission rod 131 between the first state and the second state.

[0075] See also Fig.13 In some embodiments, the sample tray 120 has a limiting hole 121; when the clamping member 132 is in a first state relative to the transmission rod 131, the clamping member 132 is partially embedded in the limiting hole 121 to clamp the sample tray 120; when the clamping member 132 is in a second state relative to the transmission rod 131, the clamping member 132 is separated from the sample tray 120.

[0076] It can be understood that the surface of the sample tray 120 facing the clamping member 132 has the limiting hole 121 .

[0077] It can be understood that the limiting component 130 is movably disposed on a side of the third sub-portion 114 facing the first sub-portion 112 .

[0078] In this embodiment, when the sample tray 120 and the sample to be detected 300 are set in the setting cavity 111, the transmission rod 131 is pushed to move relative to the transmission shell 110, so that the clamping member 132 rotates relative to the transmission rod 131 and is in a first state, and the clamping member 132 is set corresponding to the limiting hole 121 and is clamped to the limiting hole 121 of the sample tray 120 to limit the sample tray 120 in the transmission shell 110, so that in the process of transporting the transmission shell 110, the sample tray 120 and the transmission shell 110 can be prevented from moving significantly so that the sample tray 120 is separated from the setting cavity 111, and the sample to be detected 300 is prevented from being hit during the transportation process, thereby improving the structural stability of the sample tray 120 set in the setting cavity 111. Furthermore, when the sample tray 120 and the sample to be tested 300 are transferred to a position close to the chuck 220, the transmission rod 131 is pushed to move relative to the transmission shell 110 so that the clamping member 132 rotates relative to the transmission rod 131 and is in the second state, and the clamping member 132 is separated from the sample tray 120, that is, the clamping member 132 is staggered with the limiting hole 121 to achieve the separation of the transmission shell 110 and the sample tray 120.

[0079] See also Figures 13 to 15 In some embodiments, the limiting assembly 130 also includes a rotating shaft 133 and a torsion spring member 134, the rotating shaft 133 is connected to the transmission rod 131, the clamping member 132 is sleeved on the transmission rod 131, the torsion spring member 134 includes a first torsion arm 1341, a second torsion arm 1342 and a sleeve portion 1343, the first torsion arm 1341 and the second torsion arm 1342 are respectively connected to the opposite ends of the sleeve portion 1343, the sleeve portion 1343 is sleeved on the rotating shaft 133, the first torsion arm 1341 abuts the clamping member 132, and the second torsion arm 1342 abuts the transmission shell 110.

[0080] It can be understood that the second torsion arm 1342 abuts against the third sub-portion 114 .

[0081] It can be understood that the rotating shaft 133 passes through the outer circumference of the sleeve portion 1343 and the clamping member 132 .

[0082] In this embodiment, the clamping member 132 is connected to the transmission rod 131 via the rotating shaft 133. When the transmission rod 131 moves relative to the transmission shell 110, the clamping member 132 is driven to move relative to the transmission shell 110, thereby switching the clamping member 132 relative to the transmission rod 131 between the first state and the second state. Specifically, the limiting assembly 130 also includes a torsion spring member 134, the sleeve portion 1343 is sleeved on the rotating shaft 133, the first torsion arm 1341 abuts the clamping member 132, and the second torsion arm 1342 abuts the transmission shell 110. When the clamping member 132 is in a first state relative to the transmission rod 131, the first torsion arm 1341 abuts the clamping member 132, and the second torsion arm 1342 abuts the transmission shell 110, so that there is a certain angle between the clamping member 132 and the transmission shell 110 and the clamping member 132 is partially embedded in the limiting hole 121 to maintain the stability of the clamping member 132 in the first state. When the clamping member 132 is in the second state relative to the transmission rod 131, the torsion spring member 134 is compressed to reduce the angle between the first torsion arm 1341 and the second torsion arm 1342, that is, to reduce the angle between the clamping member 132 and the transmission shell 110, and the clamping member 132 is disengaged from the limiting hole 121, so that the sample tray 120 and the transmission shell 110 can be separated. When the clamping member 132 switches between the first state and the second state relative to the transmission rod 131, the transmission rod 131 drives the clamping member 132 to move relative to the transmission shell 110, so that the torsion spring member 134 is compressed or elastically restored, so that the clamping member 132 rotates relative to the transmission rod 131, and finally the relative position of the clamping member 132 and the limiting hole 121 is changed. The sample transmission mechanism 100 is simple and easy to operate for fixing the sample tray 120, and the sample transmission mechanism 100 has good performance.

[0083] In some embodiments, the sample transmission mechanism 100 also includes a limit member 140, which is located in the setting cavity 111 and connected to the transmission shell 110. The transmission rod 131 can be movably passed through the limit member 140. The transmission rod 131 has a first position and a second position relative to the limit member 140. When the transmission rod 131 is in the first position relative to the limit member 140, the clamping member 132 is in a first state; when the transmission rod 131 is in the second position relative to the limit member 140, the clamping member 132 is in a second state.

[0084] It can be understood that the limiting member 140 is disposed on the third sub-portion 114 and is spaced apart from the limiting component 130 .

[0085] It can be understood that the first position and the second position are arranged along the direction in which the transmission rod 131 moves relative to the sample tray 120 , and the first position is farther away from the limiting member 140 than the second position.

[0086] In this embodiment, the stopper 140 is located in the setting cavity 111 and connected to the transmission shell 110, and the transmission rod 131 is movably arranged through the stopper 140. In other words, when the transmission rod 131 moves relative to the transmission shell 110, the relative position of the transmission rod 131 and the stopper 140 changes, that is, the relative position of the clamping member 132 and the stopper 140 changes. When the transmission rod 131 is in the first position relative to the stopper 140, the clamping member 132 is in the first state, that is, the clamping member 132 clamps the sample tray 120, the clamping member 132 is separated from the stopper 140, and the first torsion arm 1341 and the second torsion arm 1342 have a first angle, and at this time, the sample tray 120 is firmly arranged in the transmission shell 110. When the transmission rod 131 is in the second position relative to the limiting member 140, the clamping member 132 is in the second state, the clamping member 132 is disengaged from the limiting hole 121 and abuts against the limiting member 140, at this time, the torsion spring member 134 is compressed, and a second angle is defined between the first torsion arm 1341 and the second torsion arm 1342, and the second angle is smaller than the first angle, so that the clamping member 132 is separated from the sample tray 120, facilitating the separation of the sample tray 120 from the transmission shell 110.

[0087] When the transmission rod 131 switches from the first position to the second position relative to the limit member 140, the transmission rod 131 moves relative to the transmission shell 110 toward the limit member 140, so that the clamping member 132 presses against the limit member 140 and compresses the torsion spring member 134, so that the angle between the first torsion arm 1341 and the second torsion arm 1342 becomes smaller, and the clamping member 132 is rotated relative to the transmission rod 131 and disengaged from the limit hole 121, so as to separate the clamping member 132 from the sample tray 120. Similarly, when the transmission rod 131 switches from the second position to the first position relative to the limit member 140, the transmission rod 131 moves relative to the transmission shell 110 in a direction away from the limit member 140, the clamping member 132 disengages from the limit member 140 and causes the torsion spring member 134 to elastically recover, the angle between the first torsion arm 1341 and the second torsion arm 1342 increases, and the clamping member 132 is partially embedded in the limit hole 121 to clamp the sample tray 120, thereby improving the structural stability of the sample tray 120 set on the transmission shell 110.

[0088] It can be understood that the limiting member 140 has a guide groove, which extends along the direction in which the transmission rod 131 moves relative to the sample tray 120. When the transmission rod 131 is in a first position relative to the limiting member 140, the transmission rod 131 is disengaged from the guide groove; when the transmission rod 131 is in a second position relative to the limiting member 140, one end of the transmission rod 131 provided with the clamping member 132 is at least partially located in the guide groove, and the limiting member 140 abuts against the clamping member 132 and causes the clamping member 132 to rotate relative to the transmission rod 131, so that the clamping member 132 is disengaged from the limiting hole 121.

[0089] Optionally, the sample transmission mechanism 100 also includes a block assembly 180, and the block assembly 180 includes a first block 181 and a second block 182, the first block 181 and the second block 182 are spaced apart in the setting cavity 111, and the arrangement direction of the first block 181 and the second block 182 is perpendicular to the moving direction of the transmission rod 131 relative to the transmission shell 110.

[0090] When the sample tray 120 is disposed in the disposing cavity 111 , the first stopper 181 and the second stopper 182 cooperate with each other to prevent the sample tray 120 from moving toward the direction close to the transmission rod 131 .

[0091] In this embodiment, the block assembly 180 is used to block the sample tray 120 from moving in a direction close to the transmission rod 131, and the limiting assembly 130 is used to block the sample tray 120 from moving in a direction away from the transmission rod 131 and escaping from the setting cavity 111. The block assembly 180 cooperates with the limiting assembly 130 to improve the structural stability of the sample tray 120 set in the setting cavity 111.

[0092] See also Fig.16 In some embodiments, the sample tray 120 includes a tray body 122, a first guide portion 123 and a second guide portion 124, the tray body 122 has the limiting hole 121, the first guide portion 123 and the second guide portion 124 are arranged on the surface of the tray body 122 facing the clamping member 132, the first guide portion 123 and the second guide portion 124 both extend along a first direction, and the first guide portion 123 and the second guide portion 124 are arranged at intervals along a second direction, the first guide portion 123 and the second guide portion 124 cooperate to guide the tray body 122 to be set in the wafer detection device 200, wherein the first direction is the direction in which the transmission rod 131 moves relative to the sample tray 120, and the first direction intersects with the second direction.

[0093] Optionally, in some embodiments, the first direction is perpendicular to the second direction.

[0094] It can be understood that the first guide portion 123 and the second guide portion 124 are disposed on a surface of the tray body 122 facing the third sub-portion 114 .

[0095] In this embodiment, the first guide portion 123 and the second guide portion 124 extend along a first direction, and the first direction is the direction in which the transmission rod 131 moves relative to the sample tray 120. When the sample transmission mechanism 100 is used to transmit the sample tray 120 to be close to the chuck 220, the first direction is parallel to the arrangement direction of the sample transmission mechanism 100 and the chuck 220. When the staff drives the transmission shell 110 to approach the chuck 220 of the wafer inspection device 200 along the first direction, the first guide portion 123 and the second guide portion 124 are spaced apart at opposite sides of the chuck 220 in the second direction. The first guide portion 123 and the second guide portion 124 both extend along the first direction to guide the transmission shell 110 to move along the first direction toward the direction close to the chuck 220, so as to improve the accuracy and efficiency of arranging the sample tray 120 on one side of the chuck 220.

[0096] It can be understood that, along the second direction, the distance between the first guide portion 123 and the second guide portion 124 is greater than or equal to the outer diameter of the chuck 220. Preferably, along the second direction, the distance between the first guide portion 123 and the second guide portion 124 is equal to the outer diameter of the chuck 220, so as to improve the accuracy of the first guide portion 123 and the second guide portion 124 in guiding the moving direction of the transmission shell 110.

[0097] See also Fig.12 and Fig.17 Optionally, the surface of the second sub-portion 113 facing the fourth sub-portion 115 has a first step part 1131, the surface of the fourth sub-portion 115 facing the second sub-portion 113 has a second step part 1151, and the opposite ends of the surface of the tray body 122 facing the clamping member 132 are respectively arranged on the first step part 1131 and the second step part 1151, the first guide portion 123 abuts against the side wall of the first step part 1131, and the second guide portion 124 abuts against the side wall of the second step part 1151.

[0098] It can be understood that, along the second direction, the first step member 1131, the first guide member, the second guide member and the second step member 1151 are arranged in sequence.

[0099] In this embodiment, the first step member 1131 and the second step member 1151 are respectively disposed on the third sub-portion 114 and the fourth sub-portion 115. When the sample tray 120 is disposed in the setting cavity 111, the first step member 1131 and the second step member 1151 provide support for the tray body 122, and the first guide abuts against the side wall of the first step member 1131, and the second guide portion 124 abuts against the side wall of the second step member 1151, so as to enhance the structural stability of the sample tray 120 disposed in the transmission shell 110.

[0100] See also Fig.16 In some embodiments, the sample tray 120 further includes a mounting portion 125, which is disposed on a surface of the tray body 122 facing the clamping member 132 and is closer to the limiting assembly 130 than the first guide portion 123 and the second guide portion 124, and the mounting portion 125 is arc-shaped.

[0101] It can be understood that the first guide portion 123 , the second guide portion 124 , the mounting portion 125 , and the limiting hole 121 are arranged at intervals on the surface of the tray body 122 facing the clamping member 132 .

[0102] In this embodiment, the mounting portion 125 is closer to the limiting assembly 130 than the first guide portion 123 and the second guide portion 124, and the mounting portion 125 is arc-shaped. Therefore, when the sample tray 120 is connected to the transmission shell 110 and the staff drives the transmission shell 110 to be transported to the vicinity of the chuck 220, the mounting portion 125 abuts against the outer periphery of the chuck 220. The mounting portion 125 can limit the relative position of the tray body 122 and the chuck 220 to prevent the tray body 122 from continuing to move and deviating from the center position of the chuck 220 under the drive of the transmission shell 110, thereby improving the accuracy of the sample transmission mechanism 100 for setting the sample 300 to be detected on one side of the chuck 220.

[0103] Preferably, the arc radius of the mounting portion 125 is equal to the radius of the chuck 220 . When the transport shell 110 is transported to the chuck 220 , the mounting portion 125 is arranged to fit the outer circumference of the chuck 220 to limit the relative positions of the tray body 122 and the chuck 220 .

[0104] See also Fig.16 , Figures 18 to 20In some embodiments, the mounting portion 125 has a penetration hole 1251, and the sample transmission mechanism 100 further includes a locking assembly 150, wherein the locking assembly 150 includes an elastic member 151 and a penetration member 152, wherein the penetration member 152 is sequentially penetrated through the elastic member 151 and the penetration hole 1251, and the penetration member 152 is used to connect the tray body 122 to the wafer detection device 200; the sample transmission mechanism 100 further includes a locking tool 160, wherein the locking tool 160 is penetrated through the transmission shell 110 and can be moved relative to the transmission shell 110 in a first direction, and the locking tool 160 can also be rotatably connected to the transmission shell 110, and the locking tool 160 can be detachably embedded in the penetration member 152, and is used to drive the penetration member 152 to rotate, so that the penetration member 152 is penetrated through the wafer detection device 200, thereby locking the sample tray 120 to the wafer detection device 200.

[0105] It can be understood that the sample tray 120 is locked to the chuck 220 of the wafer inspection device 200 .

[0106] Optionally, a mounting hole 221 is formed on a side of the chuck 220 , and when the sample tray 120 is locked to the chuck 220 , the penetration member 152 is sequentially penetrated through the penetration hole 1251 and the mounting hole 221 .

[0107] It can be understood that the elastic member 151 is located between the locking tool 160 and the mounting portion 125 .

[0108] It can be understood that the locking tool 160 can be detachably embedded in the piercing member 152. The locking tool 160 can be partially embedded in one end of the piercing member 152 and drive the piercing member 152 to rotate. The locking tool 160 can also be detached from the piercing member 152 so that when the transmission shell 110 is separated from the sample tray 120, the locking tool 160 is separated from the piercing member 152.

[0109] In this embodiment, when the sample tray 120 is connected to the transmission shell 110 and the staff transports the transmission shell 110 to the mounting portion 125 to resist the chuck 220, the locking tool 160 is partially embedded in one end of the penetration member 152. When the locking tool 160 rotates relative to the transmission shell 110 and moves along the first direction toward the mounting portion 125, the locking tool 160 compresses the elastic member 151 and drives the penetration member 152 to move in the direction toward the chuck 220. At the same time, the locking tool 160 drives the penetration member 152 to rotate so that the penetration member 152 is penetrated through the penetration hole 1251 and the mounting hole 221, thereby locking the sample tray 120 to the chuck 220 of the wafer detection device 200. It can be understood that before the penetration member 152 is locked to the chuck 220 of the wafer detection device 200, the elastic member 151 is located between the mounting portion 125 and the end of the penetration member 152 away from the mounting portion 125, and the opposite ends of the elastic member 151 can abut the mounting portion 125 and the end of the penetration member 152 away from the mounting portion 125, so as to prevent the penetration member 152 from protruding from the end of the mounting portion 125 away from the locking tool 160 and interfering with other devices in the wafer detection device 200, thereby improving the performance of the sample transmission mechanism 100. In addition, when it is necessary to unlock the sample tray 120 and the wafer detection device 200, the locking tool 160 rotates relative to the transmission shell 110 and moves along the first direction toward the direction away from the mounting portion 125, and the elastic member 151 undergoes elastic recovery, which is conducive to reducing the resistance of the locking tool 160 to drive the penetration member 152 to rotate, thereby improving the performance of the staff.

[0110] In the process of the sample transport mechanism 100 transporting the sample 300 to be tested to the chuck 220 of the wafer testing device 200, the sample 300 to be tested is first fixedly set on the sample tray 120, and then the sample tray 120 is set in the setting cavity 111 and the clamping member 132 is in a first state relative to the transmission rod 131, so that the sample tray 120 is firmly connected to the transport shell 110; further, when the staff transports the transport shell 110 to transfer the sample tray 120 close to the chuck 220, the first guide portion 123, the second guide portion 124 and the mounting portion 125 abut against the outer periphery of the chuck 220, and the locking assembly 1 50 cooperates with the locking tool 160 to penetrate the penetration member 152 through the mounting portion 125 and the chuck 220, thereby fixing the sample tray 120 on one side of the chuck 220; further, by adjusting the relative position of the transmission rod 131 and the transmission shell 110, so that the clamping member 132 rotates relative to the transmission rod 131 and disengages from the limiting hole 121, the clamping member 132 is in the second state relative to the transmission rod 131, the transmission shell 110 and the sample tray 120 are separable, and when the staff withdraws the transmission shell 110 from the opening 212, the sample tray 120 can be firmly set on one side of the chuck 220. Similarly, in the process of withdrawing the sample 300 to be tested from the chamber 211 of the wafer detection device 200, the locking assembly 150 and the locking tool 160 cooperate to unlock the sample tray 120 and the chuck 220, and the limit assembly 130 is used to adjust the clamping member 132 to be in the first state relative to the transmission rod 131, and move the transmission shell 110 to withdraw the sample tray 120 and the sample 300 to be tested from the chamber 211, and further, by adjusting the clamping member 132 to be in the second state relative to the transmission rod 131, the sample tray 120 and the transmission shell 110 are separated. The sample transmission mechanism 100 provided in this embodiment can quickly and conveniently transfer the sample 300 to be tested to the chuck 220 and lock it to the wafer detection device 200, and the whole process is labor-saving and easy to operate, and the sample transmission mechanism 100 has good performance.

[0111] It can be understood that the end of the penetration member 152 facing away from the locking tool 160 is threadedly connected to the penetration hole 1251 and is threadedly connected to the mounting hole 221 .

[0112] Optionally, in some embodiments, the locking tool 160 is an Allen wrench.

[0113] Optionally, the elastic member 151 is a spring member.

[0114] Optionally, in some embodiments, when the penetration member 152 is only penetrated through the mounting portion 125, the elastic member 151 is in an original length state; when the penetration member 152 is sequentially penetrated through the mounting portion 125 and the chuck 220 of the wafer inspection device 200, the elastic member 151 is in a compressed state.

[0115] Optionally, in other embodiments, when the penetrating member 152 is only penetrated through the mounting portion 125, the elastic member 151 is in a compressed state and has a first compressed length; when the penetrating member 152 is sequentially penetrated through the mounting portion 125 and the chuck 220 of the wafer detection device 200, the elastic member 151 is in a compressed state and has a second compressed length, and the second compressed length is greater than the first compressed length.

[0116] Optionally, the wafer inspection device 200 further includes a sleeve 190, which is fixedly disposed on the transmission shell 110 and extends along the first direction, and is sleeved on the outer circumference of the locking tool 160, and the locking tool 160 can move relative to the sleeve 190 along the first direction and can be rotatably connected to the sleeve 190. In this embodiment, the sleeve 190 provides support for the locking tool 160 and guides the movement of the locking tool 160 along the first direction, so as to improve the efficiency and accuracy of the locking tool 160 driving the penetration member 152 to rotate and penetrate the penetration member 152 into the wafer inspection device 200.

[0117] In some embodiments, the assembly component 170 also includes a second assembly subassembly 172, which includes a plurality of second assembly parts 1721, and the plurality of second assembly parts 1721 are arranged in the setting cavity 111 at intervals along the direction in which the transmission rod 131 moves relative to the sample tray 120, so as to fix the sleeve 190 to the transmission shell 110.

[0118] Specifically, the plurality of second assembly parts 1721 are disposed on the third sub-portion 114 .

[0119] In this embodiment, the plurality of second assemblies 1721 are used to fix the sleeve 190 to the transmission shell 110 , and when the locking tool 160 rotates relative to the sleeve 190 and moves along the first direction, the stability of the locking tool 160 disposed on the sample transmission mechanism 100 can be improved.

[0120] Optionally, the number of the limiting components 130 is one group or multiple groups. When the number of the limiting components 130 is multiple groups, the multiple groups of limiting components 130 are arranged at intervals along the second direction.

[0121] It can be understood that the number of the transmission holes is equal to the number of the limiting components 130 , and the number of the limiting members 140 is equal to the number of the limiting components 130 .

[0122] Preferably, the number of the limiting components 130 is two groups, and the number of the locking components 150 is one group, and the two groups of the limiting components 130 are arranged on opposite sides of the locking components 150 along the second direction. In other words, along the second direction, one group of the limiting components 130, the locking components 150 and the other group of the limiting components 130 are arranged in sequence.

[0123] Mentioning "embodiment" and "implementation method" in this application means that the specific features, structures or characteristics described in conjunction with the embodiment may be included in at least one embodiment of the present application. The appearance of the phrases in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in this application can be combined with other embodiments. In addition, it should also be understood that the features, structures or characteristics described in the various embodiments of the present application can be arbitrarily combined to form another embodiment that does not deviate from the spirit and scope of the technical solution of the present application, provided that there is no contradiction between them.

[0124] Finally, it should be noted that the above implementation modes are only used to illustrate the technical solution of the present application and are not intended to limit it. Although the present application has been described in detail with reference to the above preferred implementation modes, a person of ordinary skill in the art should understand that the technical solution of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present application.

Claims

1. A sample transmission mechanism, applied to a wafer inspection device, characterized in that: The sample transmission mechanism comprises: A transmission shell having a setting cavity; A sample tray, the sample tray is used to carry the sample to be detected, the sample tray is arranged in the setting cavity, and the sample tray is detachably connected to the transmission shell; and A limit assembly, wherein the limit assembly can be movably penetrated in the setting cavity of the transmission shell, and the limit assembly includes a transmission rod and a clamping member, wherein the transmission rod is penetrated in the transmission shell and is movably connected to the transmission shell, and the clamping member can be rotatably connected to the transmission rod, and the clamping member has a first state and a second state relative to the transmission rod; when the clamping member is in the first state relative to the transmission rod, the clamping member clamps the sample tray; when the clamping member is in the second state relative to the transmission rod, the clamping member is separated from the sample tray.

2. The sample transmission mechanism according to claim 1, characterized in that: The sample tray has a limiting hole; when the clamp is in a first state relative to the transmission rod, the clamp is partially embedded in the limiting hole to clamp the sample tray; when the clamp is in a second state relative to the transmission rod, the clamp is separated from the sample tray.

3. The sample transmission mechanism according to claim 2, characterized in that: The limiting assembly also includes a rotating shaft and a torsion spring component, the rotating shaft is connected to the transmission rod, the clamping component is sleeved on the transmission rod, the torsion spring component includes a first torsion arm, a second torsion arm and a sleeve connection portion, the first torsion arm and the second torsion arm are respectively connected to opposite ends of the sleeve connection portion, the sleeve connection portion is sleeved on the rotating shaft, the first torsion arm abuts the clamping component, and the second torsion arm abuts the transmission shell.

4. The sample transmission mechanism according to claim 2, characterized in that: The sample transmission mechanism also includes a limit member, which is located in the setting cavity and connected to the transmission shell. The transmission rod can be movably passed through the limit member, and the transmission rod has a first position and a second position relative to the limit member. When the transmission rod is in the first position relative to the limit member, the clamping member is in a first state; when the transmission rod is in the second position relative to the limit member, the clamping member is in a second state.

5. The sample transmission mechanism according to claim 3, characterized in that: The sample tray includes a tray body, a first guide portion and a second guide portion, the tray body has the limiting hole, the first guide portion and the second guide portion are arranged on the surface of the tray body facing the clamping member, the first guide portion and the second guide portion both extend along a first direction, and the first guide portion and the second guide portion are arranged at intervals along a second direction, the first guide portion and the second guide portion cooperate to guide the tray body to be set on the wafer detection device, wherein the first direction is the direction in which the transmission rod moves relative to the sample tray, and the first direction intersects with the second direction.

6. The sample transmission mechanism according to claim 5, characterized in that: The sample tray further includes a mounting portion, which is disposed on a surface of the tray body facing the clamping member and is closer to the limiting assembly than the first guide portion and the second guide portion, and is arc-shaped.

7. The sample transmission mechanism according to claim 6, characterized in that: The mounting portion has a penetration hole, the sample transmission mechanism further includes a locking assembly, the locking assembly includes an elastic member and a penetration member, the penetration member is sequentially penetrated through the elastic member and the penetration hole, and the penetration member is used to connect the tray body to the wafer detection device; The sample transmission mechanism also includes a locking tool, which is passed through the transmission shell and can move relative to the transmission shell in a first direction. The locking tool can also be rotatably connected to the transmission shell. The locking tool can be detachably embedded in the penetration member to drive the penetration member to rotate so that the penetration member is passed through the wafer detection device, thereby locking the sample tray to the wafer detection device.

8. The sample transmission mechanism according to any one of claims 1 to 6, characterized in that: The transmission shell includes a first sub-section, a second sub-section, a third sub-section and a fourth sub-section which are bent and connected to each other. The first sub-section, the second sub-section, the third sub-section and the fourth sub-section enclose the setting cavity. The first sub-section is arranged opposite to the sample to be detected, the third sub-section has a notch, and the sample tray is arranged corresponding to the notch.

9. A wafer inspection device, characterized in that: The wafer detection device comprises: A shell, the shell encloses a chamber, and a side of the shell has an opening, the opening is connected to the chamber; a chuck positioned within the chamber; and The sample transfer mechanism according to any one of claims 1 to 8 is used to transfer the sample tray and the sample to be tested from the opening to a position close to the chuck, and to place the sample tray and the sample to be tested on one side of the chuck.

10. The wafer inspection device according to claim 9, characterized in that: The wafer detection device also includes: A closing door is detachably disposed on the shell body to close the opening.

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