Method, device, equipment and medium for verifying electron beam scanning accuracy

Abstract

The invention provides a method, a device and equipment for verifying electron beam scanning accuracy and a medium. The method comprises the following steps: acquiring an electron beam scanning algorithm for enabling the electron beam scanning equipment to generate electron beams; simulating the electron beam scanning algorithm by using first simulation software, and outputting a first simulation result; performing joint simulation on the electron beam scanning algorithm by using the second simulation software and the first simulation software, and outputting a second simulation result; comparing the first simulation result with the second simulation result to obtain a comparison result; and verifying the parameter design accuracy of the electron beam scanning algorithm based on the comparison result. By adopting the scheme, the electron beam scanning design efficiency can be improved, and the accuracy of the design scheme can be ensured.

Description

Technical Field

[0001] The present application relates to the field of semiconductor detection technology, and in particular to a method, device, equipment and medium for verifying the accuracy of electron beam scanning. Background Art

[0002] During the production process of semiconductor-related products, defects can be detected on the products to find existing problems. When performing defect detection on semiconductors, an electron beam can be generated by an electron beam scanning device according to a designed electron beam scanning scheme, and the electron beam is used to scan the target to be detected, and a scanned image of the target is obtained, and defect detection is performed using the scanned image. Therefore, verifying the accuracy of the design of the electron beam scanning scheme plays an important role in defect detection.

[0003] Currently, the accuracy of the electron beam scanning design is usually verified by compiling on the board and debugging online. When a problem is found, the logic code is changed, compiled on the board again, and debugging is continued online. This is repeated until the design meets the design requirements. This solution has at least the following defects:

[0004] Online debugging requires manual debugging and testing, which is time-consuming and leads to low design efficiency. Summary of the invention

[0005] The present application provides a method, device, equipment and medium for verifying the accuracy of electron beam scanning, so as to at least solve the technical problem of low efficiency of electron beam scanning design in the prior art.

[0006] According to a first aspect of the present application, a method for verifying the accuracy of electron beam scanning is provided, the method comprising:

[0007] acquiring an electron beam scanning algorithm for enabling an electron beam scanning device to generate an electron beam;

[0008] Using first simulation software to simulate the electron beam scanning algorithm and output a first simulation result;

[0009] Using a second simulation software and the first simulation software to jointly simulate the electron beam scanning algorithm, and output a second simulation result;

[0010] Comparing the first simulation result with the second simulation result to obtain a comparison result;

[0011] The parameter design accuracy of the electron beam scanning algorithm is verified based on the comparison results.

[0012] In some implementations, the first simulation software is matlab simulation software, and the second simulation software is modelsim simulation software.

[0013] In some implementations, comparing the first simulation result and the second simulation result to obtain a comparison result includes:

[0014] Simulating a first scanning voltage waveform using the first simulation result;

[0015] simulating a second scanning voltage waveform using the second simulation result;

[0016] The first scanning voltage waveform and the second scanning voltage waveform are compared to obtain a comparison result.

[0017] In some embodiments, the first scanning voltage waveform includes: a first X electrode voltage waveform and a first Y electrode voltage waveform, and the second scanning voltage waveform includes: a second X electrode voltage waveform and a second Y electrode voltage waveform;

[0018] The comparing the first scanning voltage waveform and the second scanning voltage waveform includes:

[0019] comparing the consistency of the first X electrode voltage waveform and the second X electrode voltage waveform;

[0020] The consistency of the first Y electrode voltage waveform and the second Y electrode voltage waveform is compared.

[0021] In some embodiments, the method further comprises:

[0022] Generate an electron beam scanning trajectory image according to the first simulation result or the second simulation result;

[0023] The accuracy of the scanned pattern obtained by scanning with the electron beam scanning algorithm is verified based on the electron beam scanning trajectory image.

[0024] According to a second aspect of the present application, there is provided a device for verifying the accuracy of electron beam scanning, the device comprising:

[0025] An algorithm acquisition module, used to acquire an electron beam scanning algorithm for enabling an electron beam scanning device to generate an electron beam;

[0026] A first simulation module, used to simulate the electron beam scanning algorithm using a first simulation software and output a first simulation result;

[0027] A second simulation module, used for jointly simulating the electron beam scanning algorithm using a second simulation software and the first simulation software, and outputting a second simulation result;

[0028] A waveform comparison module, used for comparing the first simulation result with the second simulation result to obtain a comparison result;

[0029] The parameter verification module is used to verify the accuracy of parameter design of the electron beam scanning algorithm based on the comparison results.

[0030] In some embodiments, the device further includes a trajectory verification module for generating an electron beam scanning trajectory image according to the first simulation result or the second simulation result, and verifying the accuracy of a scanning pattern obtained by scanning using the electron beam scanning algorithm based on the electron beam scanning trajectory image.

[0031] According to a third aspect of the present application, a computer program product is provided, the computer program product comprising a computer program, wherein when the computer program is executed by a processor, the steps of the above-mentioned method for verifying the accuracy of electron beam scanning are implemented.

[0032] According to a fourth aspect of the present application, a computer device is provided, comprising: a processor and a memory storing a computer program; when the processor executes the computer program, the steps of the above-mentioned method for verifying the accuracy of electron beam scanning are implemented.

[0033] According to a fifth aspect of the present application, a computer-readable storage medium is provided, on which a computer program is stored, and when the computer program is executed by a processor, the steps of the above-mentioned method for verifying the accuracy of electron beam scanning are implemented.

[0034] In summary, the method, apparatus, computer program product, computer device and medium for verifying the accuracy of electron beam scanning provided by the present application have at least the following beneficial effects:

[0035] Two simulation software are used to perform simulation based on the electron beam scanning algorithm. The first simulation software simulates to generate a first simulation result. The second simulation software and the first simulation software jointly simulate the electron beam scanning algorithm to generate a second simulation result. The two simulation results are compared to verify the accuracy of the parameter design of the electron beam scanning algorithm. In this way, when designing an electron beam scanning scheme and compiling the electron beam scanning algorithm, the accuracy of the parameter design in the electron beam scanning algorithm can be verified through simulation comparison to ensure the accuracy of the design scheme. Moreover, compared with the traditional method that requires manual online debugging, the test time can be shortened, and the time required to complete the design can be reduced, thereby improving the design efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions in the specific implementation modes of the present application, the drawings required for use in the specific implementation modes will be briefly introduced below in conjunction with the accompanying drawings. It is obvious that the drawings described below are some implementation modes of the present application. For those skilled in the art, other drawings or solutions can be obtained based on these drawings without paying any creative work.

[0037] Figure 1 A flow chart of a method for verifying the accuracy of electron beam scanning provided for one embodiment of the present application;

[0038] Figure 2 A schematic diagram of the X electrode voltage and the Y electrode voltage corresponding to the matlab simulation results in one embodiment of the present application;

[0039] Figure 3 A schematic diagram of an electron beam scanning trajectory image corresponding to a matlab simulation result in one embodiment of the present application;

[0040] Figure 4 A structural block diagram of a device for verifying the accuracy of electron beam scanning provided by one embodiment of the present application;

[0041] Figure 5 A structural diagram of a computer device provided for an embodiment of the present application;

[0042] Figure 6 A structural diagram of a computer program product provided for an embodiment of the present application;

[0043] Figure 7 A structural diagram of a computer-readable storage medium provided for an embodiment of the present application. DETAILED DESCRIPTION

[0044] In order to make the above and other features and advantages of the present application more clear, the present application is further described below in conjunction with the accompanying drawings. It should be understood that the specific embodiments given herein are for the purpose of explaining to those skilled in the art and are only exemplary and not restrictive.

[0045] In the following description, many specific details are set forth to provide a thorough understanding of the present application. However, it is apparent to those skilled in the art that specific details need not be adopted to practice the present application. In other cases, well-known steps or operations are not described in detail to avoid blurring the present application.

[0046] The method for verifying the accuracy of electron beam scanning provided by the embodiment of the present application can be executed by the device for verifying the accuracy of electron beam scanning provided by the embodiment of the present application, and the device can be configured in a computer device.

[0047] refer to Figure 1 The present application provides a method for verifying the accuracy of electron beam scanning, which can be applied to computer equipment. The method includes the following steps S110 to S190.

[0048] S110: Acquire an electron beam scanning algorithm that enables an electron beam scanning device to generate an electron beam.

[0049] The electron beam scanning device is a device that generates an electron beam to scan the surface of the object to be detected, and can be, for example, a scanning electron microscope (SEM). The electron beam scanning algorithm is a program designed by a programmer to control the electron beam scanning, which is applied to the electronic system that controls the deflection of the electron beam and can be stored in a chip or a readable storage medium, such as the FPGA (programmable logic control module) of the electronic system. The FPGA runs the electron beam scanning algorithm to enable the DAC (digital-to-analog converter) of the electronic system to generate voltage data for controlling the deflection of the electron beam.

[0050] S130: simulating the electron beam scanning algorithm using the first simulation software, and outputting a first simulation result.

[0051] The first simulation software can select a simulation software as needed, and can be, for example, matlab simulation software. Specifically, the algorithm processing module for processing the electron beam scanning algorithm in the FPGA can be transplanted into the first simulation software, the first simulation software performs simulation based on the electron beam scanning algorithm, and the simulation result generated by the first simulation software is the first simulation result, which is used as the standard result of the electron beam scanning algorithm. Specifically, the first simulation result can be voltage data for controlling the deflection of the electron beam, or a voltage waveform corresponding to the voltage data.

[0052] S150: Use the second simulation software and the first simulation software to jointly simulate the electron beam scanning algorithm and output a second simulation result.

[0053] The second simulation software can select another simulation software other than the first simulation software as needed, and the second simulation software selects software that supports joint simulation, for example, the second simulation software can select modelsim simulation software. Specifically, the algorithm processing module that processes the electron beam scanning algorithm in the FPGA can be transplanted into the second simulation software, and the electric field environment is built through the software environment. The second simulation software and the first simulation software jointly simulate the electron beam scanning algorithm. For example, the second simulation software can read the results output by the first simulation software, such as the results in the form of a txt file, and jointly simulate the results with the electron beam scanning algorithm to obtain a second simulation result, which is used to simulate the actual output of the DAC in the electronic system.

[0054] S170: Compare the first simulation result and the second simulation result to obtain a comparison result.

[0055] Specifically, the first simulation result is used as the standard result, and the first simulation result and the second simulation result are compared. The first simulation result and the second simulation result both include voltage data and / or a voltage waveform corresponding to the voltage data, and the voltage data in the first simulation result and the voltage data in the second simulation result can be compared item by item to obtain a comparison result, and / or the voltage waveforms of the two simulation results can be compared.

[0056] S190: Verify the accuracy of parameter design of the electron beam scanning algorithm based on the comparison results.

[0057] Specifically, the comparison result generated in step S170 is an actual comparison result, and verification is performed based on the actual comparison result and the expected comparison result. For example, the expected comparison result is consistent, that is, in an ideal case where the parameter design is accurate, the first simulation result and the second simulation result are consistent. If the actual comparison result is that the first simulation result and the second simulation result are consistent, then the parameter design of the electron beam scanning algorithm is accurate. If they are inconsistent, then the parameter design of the electron beam scanning algorithm is inaccurate.

[0058] The above-mentioned method for verifying the accuracy of electron beam scanning uses two simulation software to perform simulation based on the electron beam scanning algorithm, and verifies the accuracy of the parameter design of the electron beam scanning algorithm by comparing the two simulation results; in this way, when designing the electron beam scanning scheme and compiling the electron beam scanning algorithm, the accuracy of the parameter design in the electron beam scanning algorithm can be verified through simulation comparison to ensure the accuracy of the design scheme, and compared with the traditional method that requires manual online debugging, it can shorten the testing time and reduce the time required to complete the design, thereby improving the design efficiency.

[0059] In one embodiment, the first simulation software is matlab simulation software, and the second simulation software is modelsim simulation software.

[0060] The matlab simulation software obtains the first simulation result based on the electron beam scanning algorithm, and the modelsim simulation software obtains the second simulation result based on the electron beam scanning algorithm and the first simulation software. Compared with the separate simulation, the matlab simulation software and the modelsim simulation software can simulate the output of the DAC more accurately through the joint simulation, and the simulation accuracy is high, so the verification based on the simulation result is accurate.

[0061] In one embodiment, step S170 includes: simulating a first scanning voltage waveform using a first simulation result; simulating a second scanning voltage waveform using a second simulation result; and comparing the first scanning voltage waveform and the second scanning voltage waveform to obtain a comparison result.

[0062] The first scanning voltage waveform is a voltage waveform corresponding to the voltage data of the first simulation result, and the second scanning voltage waveform is a voltage waveform corresponding to the voltage data of the second simulation result. The voltage waveform reflects the change of the voltage data used to control the deflection of the electron beam. By generating voltage waveforms for waveform comparison, the results are described and compared with the help of graphic language, and the result comparison is more intuitive.

[0063] In one embodiment, the first scanning voltage waveform includes: a first X electrode voltage waveform and a first Y electrode voltage waveform, and the second scanning voltage waveform includes: a second X electrode voltage waveform and a second Y electrode voltage waveform.

[0064] The voltage data for controlling the deflection of the electron beam includes the voltage data of the X electrode and the voltage data of the Y electrode. Specifically, the first X electrode voltage waveform is the voltage waveform corresponding to the voltage data of the X electrode in the first simulation result, and the first Y electrode voltage waveform is the voltage waveform corresponding to the voltage data of the Y electrode in the first simulation result. Similarly, the second X electrode voltage waveform is the voltage waveform corresponding to the voltage data of the X electrode in the second simulation result, and the second Y electrode voltage waveform is the voltage waveform corresponding to the voltage data of the Y electrode in the second simulation result. For example, the scanning voltage waveform corresponding to the simulation result obtained using the matlab simulation software is as follows: Figure 2 As shown, the red waveform and the black waveform are the voltage waveforms acting on the X electrode generated by the first matlab simulation (Fast s can (File1)) and the voltage waveform on the X electrode generated by the second matlab simulation (Fast s can(File2)), the blue and green waveforms are the voltage waveforms acting on the Y electrode generated by the first matlab simulation (Slow s can(File1)) and the voltage waveform on the Y electrode generated by the second matlab simulation (Slow s can(File2)).

[0065] Specifically, the step of comparing the first scanning voltage waveform with the second scanning voltage waveform includes: comparing the consistency of the first X electrode voltage waveform with the second X electrode voltage waveform; and comparing the consistency of the first Y electrode voltage waveform with the second Y electrode voltage waveform.

[0066] By comparing the first X electrode voltage waveform and the second X electrode voltage waveform to see if they are consistent, all voltage data of the X electrodes can be traversed. If they are consistent, it means that all voltage data of the first X electrode is consistent with all voltage data of the second X electrode. Similarly, by comparing the first Y electrode voltage waveform and the second Y electrode voltage waveform to see if they are consistent, all voltage data of the Y electrodes can be traversed.

[0067] Verifying the rationality of the electron beam scanning design does not only rely on surface phenomena, but also determines whether the design meets expectations through data verification. The existing method of requiring on-board compilation and online debugging for verification is slow in the electron beam scanning design process, and the accuracy of the data cannot be traversed by a scientific verification method. In this embodiment, by comparing the voltage data of the X electrode and the voltage data of the Y electrode of the two simulation software respectively, a comprehensive traversal of all data is achieved, the reliability of the comparison is improved, thereby improving the accuracy of the verification, and ensuring that the verified electron beam scanning algorithm is consistent with the design expectations. Specifically, during the simulation process, a comprehensive traversal of all data can be achieved by adding appropriate scripts.

[0068] In one of the embodiments, the above-mentioned method for verifying the accuracy of electron beam scanning also includes a trajectory verification step, including: generating an electron beam scanning trajectory image according to the first simulation result or the second simulation result; and verifying the accuracy of the scanning pattern obtained by scanning using the electron beam scanning algorithm based on the electron beam scanning trajectory image.

[0069] The position of the electron's motion trajectory in the electric field (the magnitude of the force) is proportional to the electric potential energy, and the electric potential energy is proportional to the voltage. Therefore, the corresponding electron trajectory can be simulated based on the changing voltage data on the X / Y electrodes, thereby generating an electron beam scanning trajectory image. Specifically, the voltage of the X electrode corresponds to the X position coordinate (X Position), the voltage of the Y electrode corresponds to the Y coordinate (Y Position), and the position coordinates are connected to obtain the electron trajectory (Electron Trajectory). For example Figure 3 In the image shown, green is the original image of the electron beam scanning trajectory corresponding to the simulation result obtained using matlab simulation software, and blue is the fourth-order processed image of the electron beam scanning trajectory, where the dots are the positions of the electrons under the action of the X / Y potential energy at each scanning point.

[0070] The electron beam scanning trajectory image shows a trajectory graph, which is a scanning graph generated by controlling the electron beam deflection based on the electron beam scanning algorithm. The electron beam scanning trajectory image is generated according to the simulation results to verify the accuracy of the scanning graph, so that the accuracy of the design scheme corresponding to the electron beam scanning algorithm can be more intuitively viewed.

[0071] Furthermore, taking the simulation results of the matlab simulation software as the standard results, the simulation results obtained by the matlab simulation software can be used to generate an actual electron beam scanning trajectory image to determine whether the graph of the electron beam scanning trajectory image is the expected graph. If so, the scanning graph design of the electron beam scanning algorithm is accurate, and the design scheme corresponding to the electron beam scanning algorithm is accurately designed.

[0072] The present application provides a device for verifying the accuracy of electron beam scanning, referring to Figure 4 The device includes an algorithm acquisition module 410, a first simulation module 430, a second simulation module 450, a waveform comparison module 470 and a parameter verification module 490.

[0073] The algorithm acquisition module 410 is used to acquire an electron beam scanning algorithm that enables the electron beam scanning device to generate an electron beam. The first simulation module 430 is used to simulate the electron beam scanning algorithm using the first simulation software and output a first simulation result. The second simulation module 450 is used to jointly simulate the electron beam scanning algorithm using the second simulation software and the first simulation software, and output a second simulation result. The waveform comparison module 470 is used to compare the first simulation result and the second simulation result to obtain a comparison result. The parameter verification module 490 is used to verify the parameter design accuracy of the electron beam scanning algorithm based on the comparison result.

[0074] The above-mentioned device for verifying the accuracy of electron beam scanning uses two simulation software to perform simulation based on the electron beam scanning algorithm, and verifies the accuracy of the parameter design of the electron beam scanning algorithm by comparing the two simulation results; in this way, when designing the electron beam scanning scheme and compiling the electron beam scanning algorithm, the accuracy of the parameter design in the electron beam scanning algorithm can be verified through simulation comparison to ensure the accuracy of the design scheme, and compared with the traditional method that requires manual online debugging, it can shorten the testing time and reduce the time required to complete the design, thereby improving the design efficiency.

[0075] In one embodiment, the first simulation software is matlab simulation software, and the second simulation software is modelsim simulation software.

[0076] In one embodiment, the waveform comparison module 470 is further used to simulate a first scanning voltage waveform using a first simulation result; simulate a second scanning voltage waveform using a second simulation result; and compare the first scanning voltage waveform and the second scanning voltage waveform to obtain a comparison result.

[0077] In one embodiment, the first scanning voltage waveform includes: a first X electrode voltage waveform and a first Y electrode voltage waveform, and the second scanning voltage waveform includes: a second X electrode voltage waveform and a second Y electrode voltage waveform. The waveform comparison module 470 compares the first scanning voltage waveform and the second scanning voltage waveform, including: comparing the consistency of the first X electrode voltage waveform and the second X electrode voltage waveform; comparing the consistency of the first Y electrode voltage waveform and the second Y electrode voltage waveform.

[0078] In one of the embodiments, the above-mentioned device for verifying the accuracy of electron beam scanning also includes a trajectory verification module, which is used to generate an electron beam scanning trajectory image according to the first simulation result or the second simulation result, and verify the accuracy of the scanning pattern obtained by scanning using the electron beam scanning algorithm based on the electron beam scanning trajectory image.

[0079] It should be understood that the specific features, operations and details described hereinabove with respect to the method of the present application may also be similarly applied to the device of the present application, or vice versa. In addition, each step of the method of the present application described above may be performed by the corresponding components or units of the device of the present application.

[0080] It should be understood that each module / unit of the device of the present application can be implemented in whole or in part by software, hardware, firmware or a combination thereof. Each module / unit can be embedded in the processor of the computer device in the form of hardware or firmware or independent of the processor, or can be stored in the memory of the computer device in the form of software for the processor to call to perform the operation of each module / unit. Each module / unit can be implemented as an independent component or module, or two or more modules / units can be implemented as a single component or module.

[0081] like Figure 5 As shown, the present application provides a computer device 500, which includes a processor 501 and a memory 502 storing a computer program. When the processor 501 executes the computer program, each step of the method for verifying the accuracy of electron beam scanning is implemented. The computer device 500 can be a server, a terminal, or any other computer device with necessary computing and / or processing capabilities.

[0082] In one embodiment, the computer device 500 may include a processor, a memory, a network interface, a communication interface, etc. connected through a system bus. The processor of the computer device 500 may be used to provide necessary computing, processing and / or control capabilities. The memory of the computer device 500 may include a non-volatile storage medium and an internal memory. The non-volatile storage medium may store an operating system, a computer program, etc. The internal memory may provide an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The network interface and the communication interface of the computer device 500 may be used to connect and communicate with external devices through a network. When the computer program is executed by the processor, the steps of the method of the present application are executed.

[0083] The present application provides a computer program product, such as Figure 6 As shown, the computer program product 600 includes a computer program, wherein when the computer program is executed by a processor, the steps of the above method for verifying the accuracy of electron beam scanning are implemented.

[0084] In addition, the present application provides a computer-readable storage medium, such as Figure 7 As shown, a computer program is stored on the computer-readable storage medium 700, and when the computer program is executed by a processor, the steps of the above-mentioned method for verifying the accuracy of electron beam scanning are implemented.

[0085] It will be appreciated by those skilled in the art that the method steps of the present application may be completed by instructing related hardware such as a computer device 500 or a processor through a computer program, and the computer program may be stored in a non-temporary computer-readable storage medium, which causes the steps of the present application to be executed when the computer program is executed. Depending on the circumstances, any reference to memory, storage, or other media herein may include non-volatile or volatile memory. Examples of non-volatile memory include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), flash memory, magnetic tape, floppy disk, magneto-optical data storage device, optical data storage device, hard disk, solid state disk, etc. Examples of volatile memory include random access memory (RAM), external cache memory, etc.

[0086] The various technical features described above can be combined arbitrarily. Although all possible combinations of these technical features are not described, any combination of these technical features should be considered to be covered by this specification as long as there is no contradiction in such combination.

[0087] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A method for verifying the accuracy of electron beam scanning, characterized in that: The method comprises: acquiring an electron beam scanning algorithm for enabling an electron beam scanning device to generate an electron beam; Using first simulation software to simulate the electron beam scanning algorithm and output a first simulation result; Using a second simulation software and the first simulation software to jointly simulate the electron beam scanning algorithm, and output a second simulation result; Comparing the first simulation result with the second simulation result to obtain a comparison result; The parameter design accuracy of the electron beam scanning algorithm is verified based on the comparison results.

2. The method according to claim 1, characterized in that The first simulation software is matlab simulation software, and the second simulation software is modelsim simulation software.

3. The method according to claim 1 or 2, characterized in that: The comparing the first simulation result and the second simulation result to obtain a comparison result includes: Simulating a first scanning voltage waveform using the first simulation result; simulating a second scanning voltage waveform using the second simulation result; The first scanning voltage waveform and the second scanning voltage waveform are compared to obtain a comparison result.

4. The method according to claim 3, characterized in that The first scanning voltage waveform includes: a first X electrode voltage waveform and a first Y electrode voltage waveform, and the second scanning voltage waveform includes: a second X electrode voltage waveform and a second Y electrode voltage waveform; The comparing the first scanning voltage waveform and the second scanning voltage waveform includes: comparing the consistency of the first X electrode voltage waveform and the second X electrode voltage waveform; The consistency of the first Y electrode voltage waveform and the second Y electrode voltage waveform is compared.

5. The method according to claim 1, characterized in that The method further comprises: Generate an electron beam scanning trajectory image according to the first simulation result or the second simulation result; The accuracy of the scanned pattern obtained by scanning with the electron beam scanning algorithm is verified based on the electron beam scanning trajectory image.

6. A device for verifying the accuracy of electron beam scanning, characterized in that: The device comprises: An algorithm acquisition module, used to acquire an electron beam scanning algorithm for enabling an electron beam scanning device to generate an electron beam; A first simulation module, used to simulate the electron beam scanning algorithm using a first simulation software and output a first simulation result; A second simulation module, used for jointly simulating the electron beam scanning algorithm using a second simulation software and the first simulation software, and outputting a second simulation result; A waveform comparison module, used for comparing the first simulation result with the second simulation result to obtain a comparison result; The parameter verification module is used to verify the accuracy of parameter design of the electron beam scanning algorithm based on the comparison results.

7. The device according to claim 6, characterized in that The device also includes a trajectory verification module, which is used to generate an electron beam scanning trajectory image according to the first simulation result or the second simulation result, and verify the accuracy of the scanning pattern obtained by scanning using the electron beam scanning algorithm based on the electron beam scanning trajectory image.

8. A computer program product, characterized in that The computer program product comprises a computer program, wherein when the computer program is executed by a processor, the steps of the method according to any one of claims 1 to 5 are implemented.

9. A computer device, characterized in that: include: a processor and a memory storing a computer program; When the processor executes the computer program, the steps of the method according to any one of claims 1 to 5 are implemented.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, which implements the steps of the method according to any one of claims 1 to 5 when executed by a processor.

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