Pressing plate device for pressing substrate during chip mounting

Through the combination of electromagnetic fixing seat and magnetic pressure-absorbing plate, the time-consuming and labor-consuming problem of traditional pressure-block replacement and tightening adjustment is solved, and the rapid adaptation and tightness control of substrates of different widths is achieved, thereby improving the efficiency and flexibility of chip mounting. .

CN119208241APending Publication Date: 2024-12-27HUNAN YUEMO ADVANCED SEMICON CO LTD
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Patent Information

Application Number
CN202411278274.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-09-12
Publication Date
2024-12-27

AI Technical Summary

Technical Problem

The traditional chip-mounted pressure plate is time-consuming and labor-intensive during replacement and tightening, which affects efficiency. Especially when the substrate width changes, the pressure plate needs to be replaced and the pressure adjustment bolts are tightened one by one, resulting in cumbersome operation.

Method used

The electromagnetic fixing seat and magnetic pressure suction plate are adopted to control magnetic force through built-in solenoids and regulators, which can realize rapid disassembly and adjustment of the pressure plate, reduce dependence on the pressure claws, and simplify the replacement and tightening process.

Benefits of technology

It realizes rapid adaptation and tightness control of substrates of different widths, simplifies the operation process, and improves the efficiency and flexibility of chip mounting.

✦ Generated by Eureka AI based on patent content.

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Abstract

The plate pressing device comprises an electromagnetic fixing seat and a pressing and fixing plate, the electromagnetic fixing seat is provided with a fixing plate and a magnetic attraction frame in rigid connection with the fixing plate, the frame edges of the left side and the right side of the magnetic attraction frame are magnetic attraction edge tables with built-in electromagnets, an in-frame cavity is formed between the two magnetic attraction edge tables, and the pressing and fixing plate is arranged in the in-frame cavity. The left side and the right side of the pressing and fixing plate are each provided with a magnetic suction pressing plate in rigid connection with the pressing and fixing plate, the magnetic suction pressing plates on the two sides enable the pressing and fixing plate to be detachably installed on the electromagnetic fixing base in the mode that the magnetic suction pressing plates are sucked and pressed on the magnetic suction edge tables on the two sides of the magnetic suction frame, and elastic layers capable of stretching and retracting up and down are arranged between the magnetic suction edge tables and the magnetic suction pressing plates. The magnetic force of the electromagnet can be adjusted through the adjuster, and the pressing and fixing plate can downwards press the base plate below through the cavity in the frame. Therefore, the pressing and fixing plates of different specifications can be easily replaced only by cutting off or connecting a power supply through the regulator, and the pressing and fixing plates can properly press the substrate downwards only by controlling the magnetic force of the electromagnet through the regulator.
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Description

Technical Field

[0001] The invention relates to a pressing plate device for pressing a substrate during chip mounting, belonging to the technical field of chip mounting. Background Art

[0002] Chip mounting is completed in the chip bonding machine. Specifically, the two sides of the substrate are placed on two slide rails in the chip bonding machine and can slide on the slide rails. The substrate is pressed down by a pressure plate, and then the chip is mounted on the substrate by a robot.

[0003] like Figure 1 , 2 As shown, the conventional pressing plate includes a fixing plate 11 at the rear side and a pressing plate 2 at the front side, the pressing plate 2 is lower than the fixing plate 11, and a vertically arranged connecting member such as a connecting column or a connecting plate is connected between the rear end of the fixing plate 11 and the front end of the pressing plate 2, so that the pressing plate 2 and the fixing plate 11 are rigidly connected as one. Bolt holes 111 are provided on the fixing plate 11 for fixing bolts to fix the fixing plate 11 on the mounting body 8 above the rear side slide rail. The middle of the pressing plate 2 is a rectangular space 223 that is connected up and down, and the left and right sides of the rectangular space 223 are mounting panels 21, and the mounting panel 21 is provided with bolt seams 221 that are connected up and down and run forward and backward. A pressing claw 4 is provided on the mounting panel 21, and the pressing claw 4 has a pressing arm 41, one end of the pressing arm 41 is an upper pressing end 411, and the other end is a lower pressing end 412. The upper pressing end 411 is pressed on the mounting panel 21, and the lower pressing end 412 turns and extends downward from the rectangular space 223 to the bottom of the pressing plate 2, so as to press the substrate 9 below. A bolt hole is provided in the middle of the pressing arm 41, and a pressure-adjusting bolt 24 is passed through the bolt hole and the bolt gap 221 to apply downward pressure to the pressing arm 41 (a nut is provided under the bolt gap 221), so that the lower pressing end 412 can press the substrate 9 tightly.

[0004] The front and rear widths of the above-mentioned traditional pressing plate are fixed, while the width of the base plate varies. When the width of the base plate changes, the fixing bolts must be removed and the pressing plate of the corresponding width must be replaced, which is very time-consuming and labor-intensive and reduces the processing efficiency.

[0005] More importantly, the traditional pressure plate has two rows of multiple pressure claws on the left and right. When pressing the substrate, the pressure-adjusting bolts need to be tightened one by one, which is more time-consuming and labor-intensive, and seriously affects the mounting efficiency. Summary of the invention

[0006] The technical problem to be solved by the present invention is: how to make the operations of replacing the pressing plate and tightening the pressing claws faster and easier.

[0007] In view of the above problems, the technical solution proposed by the present invention is: A pressing plate device for pressing a substrate during chip mounting comprises an electromagnetic fixing seat and a pressing plate, wherein the electromagnetic fixing seat comprises a fixing plate and a magnetic frame rigidly connected to the fixing plate, the frame edges on the left and right sides of the magnetic frame are both magnetic edge platforms with built-in electromagnets, and there is a cavity in the frame between the two magnetic edge platforms, and the left and right sides of the pressing plate respectively comprise magnetic pressure plates rigidly connected to the pressing plate, and the magnetic pressure plates on both sides are respectively sucked and pressed onto the magnetic edge platforms on both sides of the magnetic frame so that the pressing plate can be detachably mounted on the electromagnetic fixing seat, and an elastic layer that can be extended and retracted up and down is provided between the magnetic edge platform and the magnetic pressure plate, the magnetic force of the electromagnet can be adjusted by a regulator, and the pressing plate can press the substrate below downward through the cavity in the frame.

[0008] The magnetic side table is provided with a plurality of mounting holes from front to back, and an electromagnet consisting of an iron core and a coil wound around the iron core is installed in the mounting holes.

[0009] A covering plate which covers the electromagnet and is fixed to the magnetic side platform is arranged on the magnetic side platform, and the elastic layer is attached to the upper surface of the covering plate.

[0010] The coil is connected to an external DC power supply through a power line, and the regulator controls the magnetic force of the electromagnet by controlling the current or voltage of the DC power supply. An adjusting knob of the regulator is arranged on the fixing plate.

[0011] The middle of the pressing plate has a rectangular space that is connected from top to bottom, and the left and right sides have installation panels respectively. A number of pressing claws are provided on the installation panels respectively. The pressing claws have a pressing arm and a lower pressing end provided at one end of the pressing arm. The pressing arm is installed on the installation panel, and the lower pressing end turns and extends downward from the rectangular space to the bottom of the pressing plate, so as to press the substrate below.

[0012] The installation panel is provided with a bolt seam which is connected up and down and runs forward and backward. The pressure arm of the pressure claw is fixed on the installation panel by a fastening bolt passing through the bolt seam.

[0013] The left and right sides of the cavity in the magnetic frame are respectively provided with auxiliary pressure platforms connected to the magnetic side platforms on both sides, and a gap with variable spacing size is provided between the auxiliary pressure platform and the mounting panel; the mounting panel of the pressing plate is provided with an auxiliary pressure seam running forward and backward and communicating with each other up and down; the end of the pressing arm of the pressing claw away from the lower pressing end is provided with a support body that presses against the auxiliary pressure platform from the auxiliary pressure seam downward; the middle part of the pressing arm is provided with a horizontally arranged rotating shaft with two ends extending out of the two sides of the pressing arm; a support is provided on the mounting panel under the rotating shaft, and the two ends of the rotating shaft are mounted on the support, so that the pressing arm forms a lever structure that can rotate around the rotating shaft.

[0014] A counterweight is provided at one end of the pressure arm support body so that the gravity moment of the pressure arm support body end is greater than the gravity moment of the lower pressure end. When the electromagnetic force decreases or disappears, the elastic layer lifts the fixing plate upward, and the end of the pressure arm support body drops, so that the lower pressure end is lifted and spaced from the substrate.

[0015] An elastic pad is provided on the bottom surface of the lower pressing end of the pressing claw.

[0016] The height of the fixing plate is higher than the height of the magnetic frame, and the front end of the fixing plate and the rear end of the magnetic frame are connected to each other in one piece via a connecting piece. Beneficial Effects

[0017] 1. The pressing plates of different specifications can be replaced simply and quickly by simply adjusting the magnetic force of the electromagnet, so that the pressing plate device can be suitable for pressing substrates of different widths; 2. The degree of pressure of the clamping plate (through the clamping claws) on the substrate can be controlled simply by adjusting the magnetic force of the electromagnet; 3. The substrate can be moved simply by adjusting the magnetic force of the electromagnet to weaken or disappear; 4. The electromagnetic force can be easily controlled by using the adjustment knob. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional schematic diagram of a pressing plate and a pressing claw installed on the pressing plate to press a chip in the prior art; Figure 2 It is a three-dimensional schematic diagram of a pressing claw in the prior art; Figure 3 This is a three-dimensional schematic diagram of the pressing plate device described in Example 1 of the present application; Figure 4 It is a three-dimensional schematic diagram of the electromagnetic fixing seat in the pressing plate device described in the first embodiment of the present application; Figure 5 This is a three-dimensional schematic diagram of the elastic layer and the cover plate described in Example 1 of the present application; Figure 6 This is a three-dimensional schematic diagram of the pressing plate and the magnetic pressure plate described in Example 1 of the present application; Figure 7 This is a three-dimensional schematic diagram of the pressure claw described in Example 1 of the present application; Figure 8 This is a three-dimensional schematic diagram of the pressing plate device described in Example 2 of the present application; Fig. 9 It is a three-dimensional schematic diagram of a battery fixing seat in the pressing plate device described in the second embodiment of the present application; Fig.10 This is a three-dimensional schematic diagram of the pressure claw described in Example 2 of the present application; Fig.11It is a partial cross-sectional schematic diagram of the pressing plate device described in the second embodiment of the present application, showing that when the pressing plate is attracted by the attraction force F of the electromagnet to overcome the elastic resistance of the elastic layer and is pressed down, the auxiliary pressing platform applies an upward force F1 to the pressing claw support body, so that the pressing arm applies a downward pressure F2 to the substrate from the lower pressing end according to the lever principle; Fig.12 This is a partial cross-sectional schematic diagram of the pressure plate device described in the second embodiment of the application. The figure shows that the electromagnetic force of the electromagnet is artificially controlled to be reduced or eliminated, and the elastic layer applies an upward force f to the pressure plate to make the pressure plate rise upward. Under the action of the gravity exerted on the counterweight body, the end where the pressure claw support body is located falls in the direction indicated by the arrow f1, while the downward pressing end rises in the direction indicated by f2 until a gap is formed between the downward pressing end and the substrate, so that the substrate can move.

[0019] In the figure: 1. electromagnetic fixing seat; 11. fixing plate; 111. bolt hole; 12. magnetic frame; 121. magnetic side platform; 122. auxiliary pressure platform; 123. cavity in the frame; 13. elastic layer; 14. covering plate; 15. electromagnet; 151. iron core; 152. coil; 153. power cord; 2. pressing plate; 21. installation panel; 221. bolt seam; 222. auxiliary pressure seam; 223. rectangular space; 23. fastening bolt; 24. pressure regulating bolt; 3. magnetic pressure plate; 4. pressure claw; 41. pressure arm; 411. upper pressure end; 412. lower pressure end; 413. support body; 42. counterweight body; 43. elastic pad; 5. adjusting knob; 6. support; 61. rotating shaft; 7. interval; 8. installation body; 9. substrate. DETAILED DESCRIPTION

[0020] The present invention will be further described below in conjunction with embodiments and drawings: Embodiment 1

[0021] like Figure 3As shown in FIG. 7 , a pressing plate device for pressing a substrate during chip mounting comprises an electromagnetic fixing seat 1 and a pressing plate 2, wherein the electromagnetic fixing seat 1 comprises a fixing plate 11 and a magnetic frame 12 rigidly connected to the fixing plate 11, wherein the frame edges on the left and right sides of the magnetic frame 12 are both magnetic edge platforms 121 with built-in electromagnets 15, and an inner cavity 123 is provided between the two magnetic edge platforms 121, and the left and right sides of the pressing plate 2 are respectively provided with magnetic pressure plates 3 rigidly connected to the pressing plate 2, and the magnetic pressure plates 3 on both sides are respectively pressed on the magnetic edge platforms 121 on both sides of the magnetic frame 12 so that the pressing plate 2 can be detachably installed on the electromagnetic fixing seat 1, and an elastic layer 13 which can be extended and retracted up and down is provided between the magnetic edge platforms 121 and the magnetic pressure plate 3, and the magnetic force of the electromagnet 15 can be adjusted by a regulator, and the pressing plate 2 can press the substrate 9 below downward through the inner cavity 123. When the width of the substrate 9 is greater than or less than the front-to-back length of the pressing plate 2, the power supply circuit of the electromagnet 15 can be controlled by the regulator to reduce or lose the magnetic force of the electromagnet 15, and then the pressing plate 2 matching the substrate 9 can be replaced, and the electromagnetic force of the electromagnet 15 can be restored by the regulator, so that the pressing plate device can quickly and easily adapt to the change of the width of the substrate 9, without having to replace the pressing plate 2 by removing and installing the fixing bolts like the traditional pressing plate. More importantly, when replacing the new pressing plate 2, it is only necessary to control the magnetic force of the electromagnet 15 and the upward and downward expansion of the elastic layer 13 by the regulator, so that the pressing plate 2 can appropriately press the substrate 9 downward, without having to tighten the pressure-adjusting bolts 24 one by one to press the substrate 9 downward like the traditional pressing plate.

[0022] The magnetic pressure plate 3 is made of iron material.

[0023] The elastic layer 13 is made of high temperature resistant elastic polymer material.

[0024] The pressing plate 2 has a plurality of specifications with different lengths along the front-to-back direction to adapt to base plates 9 of different specifications.

[0025] like Figure 4 As shown, a plurality of mounting holes are provided from front to back on the magnetic side table 121, and the electromagnet 15 composed of an iron core 151 and a coil 152 wound outside the iron core 151 is installed in the mounting holes. A cover plate 14 is provided on the magnetic side table 121 to cover the electromagnet 15 and fix it together with the magnetic side table 121, and the elastic layer 13 is attached to the upper surface of the cover plate 14. The setting of the cover plate 14 can form a rigid bottom surface, so that the elastic layer 13 can be evenly compressed and will not directly press the electromagnet 15.

[0026] The coil 152 is connected to an external DC power supply through a power line 153. The regulator controls the magnetic force of the electromagnet 15 by controlling the current or voltage of the DC power supply. An adjusting knob 5 of the regulator is provided on the fixed plate 11. When in use, the pressing degree of the pressing plate 2 on the substrate can be easily adjusted by rotating the adjusting knob 5. At the same time, the electromagnetic force of the electromagnet 15 can also be quickly reduced or lost, which is convenient for the rapid replacement of the pressing plate 2.

[0027] The regulator with the regulating knob 5 is a prior art and is currently available on the market.

[0028] like Figure 6 As shown, the middle of the pressing plate 2 has a rectangular space 223 that is connected from top to bottom, and has mounting panels 21 on the left and right sides respectively. A number of pressing claws 4 are respectively provided on the mounting panels 21. The pressing claws 4 have a pressing arm 41 and a lower pressing end 412 provided at one end of the pressing arm 41. The pressing arm 41 is installed on the mounting panel 21, and the lower pressing end 412 turns and extends downward from the rectangular space 223 to the bottom of the pressing plate 2 to press the substrate 9 below. That is, the aforementioned pressing plate 2 can press the substrate 9 below downward through the cavity 123 in the frame, which is achieved by the pressing claws 4 provided on the pressing plate 2.

[0029] like Figure 6 As shown, the installation method of the pressure claw 4 provided in this embodiment is that a bolt slot 221 extending forward and backward and communicating with each other up and down is provided on the installation panel 21, and the pressure arm 41 of the pressure claw 4 is fixed to the installation panel 21 by a fastening bolt 23 passing through the bolt slot 221. The setting of the bolt slot 221 enables the setting position of the pressure claw 4 to be adjustable forward and backward.

[0030] like Figure 7 As shown, in order to prevent the pressing end 412 of the pressing claw 4 from damaging the substrate and to provide a wider range of pressing degree for the substrate 9 , an elastic pad 43 is provided on the bottom surface of the pressing end 412 of the pressing claw 4 .

[0031] like Figure 4 As shown, the height of the fixing plate 11 is higher than the height of the magnetic frame 12, and the front end of the fixing plate 11 and the rear end of the magnetic frame 12 are integrally connected via a connecting piece.

[0032] The pressing plate 2 and the magnetic pressure plate 3 are preferably integrally formed.

[0033] It should be noted here that the front-to-back length of the magnetic frame 12 is set based on the width of the substrate 9 with the smallest width. Embodiment 2

[0034] like Figure 8As shown in FIG. 12 , the difference from the first embodiment lies in that: auxiliary pressure platforms 122 connected to the magnetic side platforms 121 on both sides are respectively provided on the left and right sides of the cavity 123 in the magnetic frame 12, and there is a gap with a variable spacing between the auxiliary pressure platform 122 and the mounting panel 21; a pressure auxiliary seam 222 which runs forward and backward and is connected up and down is provided on the mounting panel 21 of the fixing plate 2; a pressure arm 41 of the pressure claw 4 is provided with a support body 413 which presses downward from the auxiliary pressure seam 222 to the auxiliary pressure platform 122 at one end away from the lower pressing end 412; a horizontally arranged rotating shaft 61 is provided at the middle part of the pressure arm 41, with two ends extending out of the two sides of the pressure arm 41; a support 6 is provided on the mounting panel 21 under the rotating shaft 61, and two ends of the rotating shaft 61 are mounted on the support 6, so that the pressure arm 41 forms a lever structure which can rotate around the rotating shaft 61. When in use, by rotating the adjusting knob 5, the electromagnetic force of the electromagnet 15 is gradually increased so that the pressing plate 2 obtains a gradually increasing downward pressure F. The pressing plate 2 obtains the downward pressure to overcome the elastic resistance of the elastic layer 13 and moves downward, so that the lower part of the support body 413 abuts against the auxiliary pressure platform 122 and obtains the upward reverse pressure F1 given by the auxiliary pressure platform 122, so that the pressing arm 41 becomes a lever to rotate around the rotating shaft 61, and its lower pressing end 412 rotates downward to contact the substrate 9 and form a downward pressure F2 on the substrate 9. When the substrate 9 cannot move in the horizontal direction, it indicates that the substrate 9 is pressed, and the rotation of the adjusting knob 5 can be stopped. The advantage of this embodiment is that the pressing end 412 of the pressing claw 4 can have a longer pressing time, and can easily control the pressing degree on the substrate when rotating the adjusting knob 5. At the same time, a part of the electromagnetic force applied by the electromagnet 15 is shared by the auxiliary pressure platform 122 through the support body 413, so as to avoid the pressing end 412 from exerting too much pressure on the substrate when the adjusting knob 5 is rotated too fast to generate a large electromagnetic force, thereby realizing flexible pressure on the substrate 9 to avoid damaging the substrate 9.

[0035] Furthermore, a counterweight 42 is provided at one end of the pressure arm 41 where the support 413 is provided, so that the gravity moment of the end of the pressure arm 41 where the support 413 is provided is greater than the gravity moment of the end of the lower pressure end 412 provided. When the electromagnetic force decreases or disappears, the elastic layer 13 applies an upward force f to the pressing plate 2 to lift the pressing plate 2 upward, and one end of the pressure arm 41 where the support 413 is provided descends, so that the lower pressure end 412 is lifted to form a gap 7 with the substrate 9. In this way, when it is necessary to move the substrate 9, it is only necessary to rotate the adjustment knob 5 to weaken or eliminate the electromagnetic force, so that the substrate 9 can be easily moved, while the conventional method requires that the mounting body 8 and the pressure plate device be lifted as a whole to move the substrate 9.

[0036] The above embodiments are only used to more clearly describe the present invention and cannot be regarded as limiting the protection scope of the present invention. Any modifications in equivalent forms should be regarded as falling within the protection scope of the present invention.

Claims

1. A pressing plate device for pressing a substrate during chip mounting, characterized in that: The invention comprises an electromagnetic fixing seat (1) and a pressing plate (2), wherein the electromagnetic fixing seat (1) comprises a fixing plate (11) and a magnetic suction frame (12) rigidly connected to the fixing plate (11), the frame edges on the left and right sides of the magnetic suction frame (12) are both magnetic suction side tables (121) with built-in electromagnets (15), and an inner cavity (123) is formed between the two magnetic suction side tables (121), and the left and right sides of the pressing plate (2) respectively comprise magnetic suction pressure plates (3) rigidly connected to the pressing plate (2). ), the magnetic suction pressure plates (3) on both sides are respectively sucked and pressed on the magnetic suction side tables (121) on both sides of the magnetic suction frame (12) so that the pressing plate (2) is detachably mounted on the electromagnetic fixing seat (1), and an elastic layer (13) that can be extended and retracted up and down is provided between the magnetic suction side tables (121) and the magnetic suction pressure plate (3). The magnetic force of the electromagnet (15) can be adjusted by a regulator, and the pressing plate (2) can press the substrate (9) below downward through the cavity (123) in the frame.

2. The pressing plate device for pressing the substrate during chip mounting according to claim 1, characterized in that: The magnetic side table (121) is provided with a plurality of mounting holes from front to back, and an electromagnet (15) consisting of an iron core (151) and a coil (152) wound around the iron core (151) is mounted in the mounting holes.

3. The pressing plate device for pressing the substrate during chip mounting according to claim 2, characterized in that: A covering plate (14) is provided on the magnetic side table (121) and covers the electromagnet (15) and is fixed to the magnetic side table (121). The elastic layer (13) is attached to the upper surface of the covering plate (14).

4. The pressing plate device for pressing the substrate during chip mounting according to claim 2, characterized in that: The coil (152) is connected to an external DC power supply via a power line (153); the regulator controls the magnitude of the magnetic force of the electromagnet (15) by controlling the magnitude of the current or voltage of the DC power supply; and an adjusting knob (5) of the regulator is provided on the fixed plate (11).

5. The plate pressing device for pressing a substrate during chip mounting according to claim 1, characterized in that: The middle of the pressing plate (2) has a rectangular space (223) communicating with each other from top to bottom, and has mounting panels (21) on the left and right sides respectively. A plurality of pressing claws (4) are respectively provided on the mounting panels (21). The pressing claws (4) have a pressing arm (41) and a lower pressing end (412) provided at one end of the pressing arm (41). The pressing arm (41) is mounted on the mounting panel (21), and the lower pressing end (412) turns and extends downward from the rectangular space (223) to the bottom of the pressing plate (2) for pressing the substrate (9) below.

6. The pressing plate device for pressing the substrate during chip mounting according to claim 5, characterized in that: The mounting panel (21) is provided with a bolt slit (221) extending forward and backward and communicating with each other from top to bottom. The pressing arm (41) of the pressing claw (4) is fixed to the mounting panel (21) by a fastening bolt (23) passing through the bolt slit (221).

7. The pressing plate device for pressing the substrate during chip mounting according to claim 5, characterized in that: The left and right sides of the cavity (123) in the magnetic frame (12) are respectively provided with auxiliary pressure platforms (122) connected to the magnetic side platforms (121) on both sides, and a gap of variable spacing size is provided between the auxiliary pressure platform (122) and the mounting panel (21); the mounting panel (21) of the pressure fixing plate (2) is provided with an auxiliary pressure seam (222) extending forward and backward and communicating with each other up and down; the end of the pressure arm (41) of the pressure claw (4) away from the lower pressure end (412) is provided with a support body (413) which presses downward from the auxiliary pressure seam (222) against the auxiliary pressure platform (122); the middle part of the pressure arm (41) is provided with a horizontally arranged rotating shaft (61) with two ends extending out of two sides of the pressure arm (41); a support (6) is provided on the mounting panel (21) below the rotating shaft (61); and the two ends of the rotating shaft (61) are mounted on the support (6), so that the pressure arm (41) forms a lever structure that can rotate around the rotating shaft (61).

8. The pressing plate device for pressing the substrate during chip mounting according to claim 7, characterized in that: A counterweight (42) is provided at one end of the pressure arm (41) where the support body (413) is provided, so that the gravity moment of the end of the pressure arm (41) where the support body (413) is provided is greater than the gravity moment of the end of the pressure arm (41) where the lower pressure end (412) is provided. When the electromagnetic force decreases or disappears and the elastic layer (13) lifts the pressing plate (2) upward, the end of the pressure arm (41) where the support body (413) is provided descends, so that the lower pressure end (412) is lifted to form a gap with the base plate (9).

9. The pressing plate device for pressing a substrate during chip mounting according to claim 6 or 7, characterized in that: An elastic pad (43) is provided on the bottom surface of the lower pressing end (412) of the pressing claw (4).

10. The plate pressing device for pressing a substrate during chip mounting according to claim 1, characterized in that: The height of the fixing plate (11) is higher than the height of the magnetic frame (12); the front end of the fixing plate (11) and the rear end of the magnetic frame (12) are integrally connected via a connecting piece.