Photomask storage box

Abstract

The invention provides a photomask storage box. A conventional photomask storage box cannot store various photomasks and is poor in versatility. The photomask storage box is composed of a lower side box part and upper side box parts respectively closing the lower side box part, and is characterized in that the four corners of the upper surface of a bottom plate part of the lower side box part are respectively provided with a positioning carrying part which carries and positions the corner parts of the stored rectangular photomask and can freely move in the vertical direction; each positioning and placing part is respectively fixed at a desired position corresponding to the width of each placed photomask in the lower side box part, and the desired position corresponding to the width of the placed photomask is set to be even a photomask with any width. The center position of each placed photomask in the left-right direction is consistent with the desired position of the lower side box part.

Description

Technical Field

[0001] The present invention mainly relates to a box for storing a photomask. The photomask is used to produce screens such as liquid crystal televisions or organic EL televisions, and is an original plate (glass photomask) when the circuit pattern of an electronic device is transferred to a transfer object through the "photolithography" transfer technology. Background Art

[0002] (1.1. Description of previous storage boxes)

[0003] Figure 14 to Figure 22 A conventional photomask storage case 1 made of synthetic resin is shown.

[0004] The conventional storage box 1 is, for example, a box for storing a glass photomask 2. The storage box 1 is, for example, Fig.14 , Fig.15 , Fig.16 , Fig.21 , Fig. 22 As shown, the lower case portion 3 is made of synthetic resin and is in a rectangular box shape with an opening on the upper surface, and the upper case portion 4 is made of synthetic resin and blocks the opening of the lower case portion 3 in an openable and closable manner.

[0005] In addition, if Fig.14 , Fig.15 As shown, a moving mechanism 17 such as casters is provided on the side wall portion 1 a on the lower side of the storage box 1 .

[0006] Therefore, if the storage box 1 is erected, it can be moved by the moving mechanism 17 .

[0007] In addition, on each of the upper, lower, left and right side walls 3b of the lower box portion 3 and each of the upper, lower, left and right side walls 4b of the upper box portion 4, one connecting and fixing portion 3c and the other connecting and fixing portion 4c are provided at corresponding positions.

[0008] Then, by connecting the corresponding one connecting and fixing portion 3 c and the other connecting and fixing portion 4 c, the lower case portion 3 and the upper case portion 4 are fixed.

[0009] In addition, the storage box 1 is generally used in a tilted or lying position when storing a photomask, and is also used in a standing position when storing or moving a photomask.

[0010] The storage box 1 has a size of, for example, about 1000 mm in height, about 1200 mm in width, and about 250 mm in thickness.

[0011] Furthermore, for example, a rectangular glass photomask 2 having a height of 800 mm, a width of 945 mm, and a thickness of 8.0 mm or 10.0 mm is stored in the storage box 1 .

[0012] (1.2. Description of the upper case portion 3)

[0013] The lower box portion 3 is, for example, Figure 16 to Figure 18 As shown, it is composed of a rectangular plate-shaped bottom plate portion 3a and a rectangular plate-shaped side wall portion 3b, wherein the side wall portion 3b is configured to be respectively adhered to the upper side, lower side, left side and right side of the bottom plate portion 3a.

[0014] Furthermore, photomask positioning and placing portions 5 are fixed to four corners of the upper surface of the bottom plate portion 3 a of the lower case portion 3 .

[0015] Then, each corner portion of the photomask 2 accommodated in the lower case portion 3 is placed and positioned by the photomask positioning and placement portion 5 .

[0016] (1.2.1. Description of Photomask Positioning and Placing Section 5)

[0017] The photomask positioning and placing section 5 is, for example, Fig.17 as well as Fig.18 As shown, it is composed of a plate body 5a fixed to the upper surface of the above-mentioned bottom plate portion 3a, a standing portion 5b formed by standing on the upper surface of the plate body 5a, a groove portion 5c provided on the upper surface of the above-mentioned plate body 5a, and a buffer component 5d embedded in the above-mentioned groove portion 5c.

[0018] The upright portion 5 b has a corner positioning portion 6 such as an L-shaped notch portion with which the corner of the photomask 2 abuts.

[0019] The buffer member 5d is formed of, for example, a circular tubular synthetic resin member.

[0020] The buffer member 5d is fitted into the groove portion 5c in a state where the upper end thereof protrudes from the upper surface of the plate body 5a.

[0021] In order to facilitate placement of the photomask 2 on the positioning and placement portions 5 at the four corners, a slight gap is formed between the corner positioning portions 6 and the photomask 2 .

[0022] Therefore, the photomask 2 is clamped by the lower supporting placement portion 7 and the upper clamping portion 8 described later, and the movement in the vertical direction is restricted.

[0023] The photomask 2 is clamped by a left clamping portion 9 and a right clamping portion 10 described later, and the movement in the left-right direction is restricted.

[0024] In addition, a groove portion 5e may be provided in the L-shaped notch portion 6, and the buffer member 5d may be fitted into the groove portion 5e.

[0025] (1.2.2. Description of the lower support placement portion 7 and the upper clamping portion 8)

[0026] In addition, at the lower central portion (the central portion in the left-right direction of the lower portion) of the upper surface of the bottom plate portion 3a of the lower box portion 3, as shown in FIG. Fig.16 As shown, a lower support placement portion 7 is provided.

[0027] The lower support placement portion 7 is used to place the lower side of the photomask 2 and supports the lower side of the photomask 2 when the storage box 1 is erected.

[0028] In addition, an upper clamping portion 8 that is movable in the up-down direction is provided at an upper center portion (a center portion of the upper portion in the left-right direction) of the upper surface of the bottom plate portion 3a.

[0029] The photomask 2 is clamped in the up-down direction by the upper clamping portion 8 and the lower supporting placement portion 7 .

[0030] By this clamping, the vertical movement of the photomask 2 is restricted.

[0031] The supporting and placing portion 7, for example, is composed of a plate body 7a fixed on the upper surface of the bottom plate portion 3a, a standing portion 7b formed by standing on the lower part of the upper surface of the plate body 7a, a groove portion 7c provided on the upper surface of the plate body 7a, and a buffer component 7d embedded in the groove portion 7c.

[0032] The lower side of the photomask 2 is supported by the upright portion 7b.

[0033] The buffer member 7d is formed of, for example, a circular tubular synthetic resin member.

[0034] Moreover, the buffer member 7d is fitted into the groove portion 7c in a state where the upper end thereof protrudes from the upper surface of the plate body 7a.

[0035] Alternatively, a groove may be provided in the upright portion 7 b and a buffer member may be fitted into the groove.

[0036] In addition, the above-mentioned upper clamping portion 8, for example, is composed of a rectangular plate body 8a that is freely movably arranged in the up-down direction relative to the above-mentioned bottom plate portion 3a, a long hole 8b that is respectively arranged on the left and right sides of the rectangular plate body 8a and extends in the up-down direction, a fixing bolt 8c that is inserted into the long hole 8b and screwed into the threaded hole (not shown) of the above-mentioned bottom plate portion 3a, and a groove portion 8d that is arranged on the lower end face of the above-mentioned rectangular plate body 8a and extends in the left-right direction.

[0037] Furthermore, the upper side of the photomask 2 is fitted into the groove 8d.

[0038] Then, the fixing bolts 8 c are loosened to move the upper clamping portion 8 that has moved upward downward, so that the upper side of the photomask 2 is inserted into the groove 8 d of the clamping portion 8 .

[0039] Then, the photomask 2 is clamped by the clamping portion 8 and the lower supporting placing portion 7 .

[0040] Furthermore, the photomask 2 is fixed in the up-down direction by the fixing bolts 8 c.

[0041] Alternatively, a groove may be provided in the groove portion 8d, and a buffer member for a photomask may be provided in the groove portion.

[0042] (1.2.3. Description of the left-side clamping portion 9 and the right-side clamping portion 10)

[0043] In addition, at the left central portion (the central portion in the up-down direction of the left side) of the upper surface of the bottom plate portion 3a of the lower box portion 3, as shown in FIG. Fig.16 As shown, a left side clamping portion 9 is provided which is movable in the up-down direction.

[0044] Furthermore, a right side holding portion 10 is provided at a right side center portion (a center portion in the up-down direction of the right side) of the upper surface of the bottom plate portion 3 a of the lower case portion 3 so as to be movable in the up-down direction.

[0045] Furthermore, the photomask 2 is clamped and fixed in the left-right direction by the left clamping part 9 and the right clamping part 10 .

[0046] The above-mentioned left clamping portion 9, for example, is composed of a rectangular plate body 9a that is freely movably arranged in the up-down direction relative to the above-mentioned bottom plate portion 3a, a long hole 9b that is respectively arranged on the upper and lower sides of the rectangular plate body 9a and extends in the left-right direction, a fixing bolt 9c that is inserted into the long hole 9b and screwed into the threaded hole (not shown) of the above-mentioned bottom plate portion 3a, and a groove portion 9d that is arranged on the right side end face of the above-mentioned rectangular plate body 8a and extends in the up-down direction.

[0047] In addition, the above-mentioned right clamping portion 10, for example, is composed of a rectangular plate body 10a that is freely movably arranged in the up and down directions relative to the above-mentioned bottom plate portion 3a, long holes 10b that are respectively arranged on the upper and lower sides of the rectangular plate body 10a and extend along the left and right directions, a fixing bolt 10c that is inserted into the long hole 10b and screwed into the threaded hole (not shown) of the above-mentioned bottom plate portion 3a, and a groove portion 10d that is arranged on the left side end surface of the above-mentioned rectangular plate body 10a and extends along the up and down directions.

[0048] Then, the fixing bolts 9c and 10c of the left and right clamping parts 9 and 10 are loosened to move the left clamping part 9 moved to the left and the right clamping part 10 moved to the right toward each other.

[0049] Then, the left side and the right side of the photomask 2 are inserted into and clamped by the grooves 9 d and 10 d of the clamping parts 9 and 10 .

[0050] Furthermore, the clamping parts 9 and 10 are fixed by the fixing bolts 9 c and 10 c, thereby fixing the photomask 2 in the left-right direction.

[0051] Alternatively, grooves may be provided in the grooves 8d and 10d, respectively, and buffer members for the photomask may be fitted into the grooves.

[0052] In addition, if Fig.19 as well as Fig. 20 As shown, a step portion 11 is formed on the outer side of the upper end surface of each of the side wall portions 3 b of the lower box portion 3 , and the step portion 11 has a rising portion formed along the circumferential direction.

[0053] Furthermore, a groove portion 12 formed along the circumferential direction is provided inside the upper end surface, and a buffer member 13 is inserted into the groove portion 12 .

[0054] The buffer member 13 is formed of, for example, a circular tubular synthetic resin member.

[0055] The buffer member 13 is fitted into the groove portion 12 in a state where the upper end thereof protrudes from the upper end surface.

[0056] In addition, if Fig.21 As shown, a step portion 14 is formed inside the lower end surface of the upper box portion 4. The step portion 14 has a rising portion along the circumferential direction.

[0057] Furthermore, the step portion 14 is fitted into the inner side of the step portion 11 of the lower case portion 3 , and the lower case portion 3 is closed by the upper case portion 4 .

[0058] Furthermore, the flat lower end surface of each side wall portion of the upper case portion 4 is in close contact with the buffer member 13, thereby maintaining airtightness.

[0059] (1.3. Description of the upper case portion 4)

[0060] In addition, the upper box portion 4 is as follows Fig.21 As shown, it is composed of a rectangular plate-shaped top plate portion 4a and rectangular plate-shaped side wall portions 4b respectively attached to the upper side, lower side, left side and right side of the top plate portion 4a.

[0061] Rectangular plate-shaped pressing portions 15 are provided at four corners of the lower surface of the top plate portion 4 a of the upper case portion 4 .

[0062] The positions of the pressing portions 15 correspond to the positions of the positioning and placing portions 5 of the lower case portion 3 .

[0063] Then, the photomask 2 is sandwiched between the pressing portion 15 and the positioning and placing portion 5 .

[0064] Furthermore, the pressing portion 15 has grooves 15 a at positions corresponding to the respective buffer members 5 d of the lower case portion 3 .

[0065] Furthermore, the buffer member 15b is fitted into the groove portion 15a.

[0066] The buffer member 15b is formed of, for example, a circular tubular synthetic resin member.

[0067] In addition, the buffer member 15 b is fitted into the groove portion 15 a in a state where the upper end thereof protrudes from the surface of the pressing portion 15 .

[0068] Furthermore, when the photomask 2 is closed in the lower case portion 3 by the upper case portion 4 , the photomask 2 is sandwiched and fixed by the buffer member 5 d and the buffer member 15 b .

[0069] Furthermore, a rectangular plate-shaped pressing portion 16 is provided on the lower surface of the top plate portion 4 a of the upper case portion 4 .

[0070] The position of the pressing portion 16 corresponds to the position of the lower supporting placement portion 7 of the lower case portion 3 .

[0071] Then, the photomask 2 is sandwiched between the pressing portion 16 and the lower supporting placement portion 7 .

[0072] The pressing portion 16 has a groove 16 a at a position corresponding to the buffer member 7 d of the lower case portion 3 .

[0073] The buffer member 16b is fitted into the groove portion 16a.

[0074] The buffer member 16b is formed of, for example, a tubular synthetic resin member.

[0075] The buffer member 16 b is fitted into the groove portion 16 a in a state where the upper end thereof protrudes from the upper surface of the pressing portion 16 .

[0076] Furthermore, when the photomask 2 is closed in the lower case portion 3 by the upper case portion 4 , the photomask 2 is sandwiched and fixed by the buffer member 7 d and the buffer member 16 b .

[0077] (1.4. Description of the method of using the conventional storage box)

[0078] In the conventional storage box 1 , first, the connection between the one connecting and fixing portions 3 c and the other connecting and fixing portions 4 c is released, and then the upper case portion 4 is removed from the lower case portion 3 .

[0079] Then, if Fig. 22 As shown, the photomask 2 is placed on the supporting and placing portions 5 at the four corners of the lower cassette portion 3 .

[0080] Thereafter, the photomask 2 is clamped by the lower supporting placement portion 7 and the upper clamping portion 8 to restrict the movement in the vertical direction.

[0081] In addition, the left-hand clamping portion 9 and the right-hand clamping portion 10 clamp the device so as to restrict movement in the left-right direction.

[0082] Then, the lower case portion 3 is closed by the upper case portion 4 .

[0083] Thereafter, the one connecting and fixing portions 3c are connected to the other connecting and fixing portions 4c.

[0084] Thereby, the photomask 2 is sandwiched and fixed by the cushioning members.

[0085] Then, the storage box portion 2 is stood up with the lower side wall portion facing downward, and can be moved by the casters 17 .

[0086] As a conventional photomask storage box, for example, there is Patent Document 1.

[0087] Prior art literature

[0088] Patent Literature

[0089] Patent Document 1: Japanese Utility Model Registration No. 3171687 Summary of the invention

[0090] (1.5. Issues with conventional storage boxes)

[0091] However, since the upper case portion 3 and the lower case portion 4 are formed by bonding the side wall portions 3b and 4b to the bottom plate portion 3a and the top plate portion 4a, a lot of work is required in manufacturing.

[0092] Furthermore, generally, even if the lengths of the photomasks in the vertical direction are the same, there are three types of photomasks having different lengths in the width direction.

[0093] In addition, the thickness is also 8.0 mm to 10.0 mm.

[0094] Therefore, in the past, it was necessary to have storage boxes corresponding to various sizes, which had the disadvantage of lacking versatility.

[0095] Furthermore, in a storage box formed without using adhesives or the like as much as possible, since each buffer member is simply inserted into the groove, when the photomask stored in the storage box is removed, the buffer member may adhere to the photomask and come out of the groove.

[0096] In addition, due to manufacturing errors between the upper case portion 3 and the lower case portion 4, the step portion of the upper case portion and the step portion of the lower case portion may be difficult to fit together.

[0097] The present invention has been accomplished in order to eliminate the above-mentioned disadvantages.

[0098] That is, it is possible to cope with different photomask sizes.

[0099] In addition, the buffer member can be prevented from coming out of the groove portion.

[0100] In addition, the upper box portion and the lower box portion can be formed using the same mold, thereby improving economic efficiency.

[0101] The photomask storage box of the present invention is composed of a lower box portion and an upper box portion that blocks the lower box portion, and is characterized in that: positioning and loading portions that can move freely in the up and down directions and carry out positioning for loading the corners of the stored photomasks are respectively provided at the four corners of the upper surface of the bottom plate portion of the above-mentioned lower box portion, and each positioning and loading portion is respectively fixed to a desired position in the above-mentioned lower box portion corresponding to the width of each photomask carried, and the desired position corresponding to the width of the photomask carried is set so that even if the photomask is of any width, the center position of each photomask carried in the left and right direction will be consistent with the desired position of the above-mentioned lower box portion.

[0102] In addition, it is characterized in that the desired position of the lower case portion is the position of the center of the lower case portion in the left-right direction.

[0103] In addition, it is characterized in that a plurality of recesses are formed on the upper surface of the bottom plate portion of the above-mentioned lower side box portion, and a convex portion capable of being embedded in the above-mentioned respective recesses is provided on the lower surface of the above-mentioned positioning and loading portion, and by embedding the above-mentioned convex portion in any of the above-mentioned recesses, the above-mentioned respective positioning and loading portions are fixed to the above-mentioned lower side box portion.

[0104] In addition, it is characterized in that a plurality of recesses are formed on the lower surface of the above-mentioned positioning and loading portion, and a convex portion capable of being embedded in each of the above-mentioned recesses is provided on the upper surface of the bottom plate portion of the above-mentioned lower side box portion, and by embedding the above-mentioned convex portion in any of the above-mentioned recesses, each of the above-mentioned positioning and loading portions is fixed to the above-mentioned lower side box portion.

[0105] Furthermore, the invention is characterized in that a display portion serving as a position mark of the recessed portion is provided on the upper surface of the bottom plate portion.

[0106] Furthermore, the present invention is characterized in that there are three desired positions corresponding to the width of the placed photomask, and the positioning placement section is fixed at any one of the three positions according to the width of the stored photomask.

[0107] In addition, the present invention is characterized in that the widths of the stored photomasks are three types: 920 mm, 945 mm, and 960 mm.

[0108] In addition, it is characterized in that it also has: a buffer component for a photomask inserted into the groove portion, the groove portion is formed in the above-mentioned lower box portion or the upper box portion, and the buffer component is composed of a head portion larger than the upper surface opening portion of the above-mentioned groove portion, an insertion piece provided at the lower portion of the head portion, and one or more barb portions provided on the insertion piece and extending upward.

[0109] Furthermore, the head portion is characterized in that the head portion is a tube whose height is formed smaller than its lateral width.

[0110] The present invention is characterized in that a polyolefin resin layer having numerous irregularities is formed on the outer surface of the upper portion of the head portion of the cushioning member for the photomask, and the polyolefin resin layer contains a plasticizer in a smaller proportion than that contained in the member.

[0111] The present invention is characterized in that a polyolefin resin layer having numerous irregularities is formed on the lower surface of the barb portion of the lowermost stage of the buffer member for the photomask, and the polyolefin resin layer contains a plasticizer in a smaller proportion than that contained in the member.

[0112] In addition, it is characterized in that it is composed of a groove portion formed along the circumferential direction on the upper end surface of the side wall portion of the above-mentioned lower side box portion, a buffer component for a long box inserted into the groove portion, a groove portion formed along the circumferential direction on the lower end surface of the side wall portion of the above-mentioned upper side box portion, and a buffer component for a long box inserted into the groove portion. Regarding each of the above-mentioned buffer components, an outer surface of one side and an outer surface of the other side opposite thereto are either flat surfaces, and an outer surface of the other side is formed as a convex portion extending along the length direction. Each of the above-mentioned buffer components is constructed as follows: an outer surface of one side and an outer surface of the other side of the above-mentioned buffer component are inserted into the groove portion of the above-mentioned lower side box portion, an outer surface of one side and an outer surface of the other side are inserted into the groove portion of the above-mentioned upper side box portion, and when the above-mentioned upper side box portion is blocked in the above-mentioned lower side box portion, the flat surface of the above-mentioned buffer component abuts against the convex portion.

[0113] In addition, it is characterized in that the buffer component for clamping the photomask of the photomask storage box of the present invention is composed of a buffer component for the photomask inserted into a groove portion, and the groove portion is formed in the photomask storage box composed of a lower box portion and an upper box portion for storing the photomask, and the buffer component is composed of a head portion larger than the upper surface opening portion of the above-mentioned groove portion, an insertion piece provided at the lower portion of the head portion, and one or more barb portions provided on the insertion piece and extending upward.

[0114] Furthermore, the head portion is characterized in that the head portion is a tube whose height is formed smaller than its lateral width.

[0115] The present invention is characterized in that a polyolefin resin layer having numerous irregularities is formed on the outer surface of the upper portion of the head portion of the cushioning member for the photomask, and the polyolefin resin layer contains a plasticizer in a smaller proportion than that contained in the member.

[0116] The present invention is characterized in that a polyolefin resin layer having numerous irregularities is formed on the lower surface of the barb portion of the lowermost stage of the buffer member for the photomask, and the polyolefin resin layer contains a plasticizer in a smaller proportion than that contained in the member.

[0117] In addition, the photomask storage box of the present invention is composed of the above-mentioned lower box part, the upper box part that blocks the lower box part, a groove part formed along the circumferential direction on the upper end surface of the side wall part of the above-mentioned lower box part, a buffer part for the long box inserted into the groove part, a groove part formed along the circumferential direction on the lower end surface of the side wall part of the above-mentioned upper box part, and a buffer part for the long box inserted into the groove part, and is characterized in that:

[0118] Regarding each of the above-mentioned buffer components, an outer surface of one side and any one of the outer surfaces of the other side opposite thereto are flat surfaces, and the outer surface of the other side is formed as a convex portion extending along the length direction. Each of the above-mentioned buffer components is constructed as follows: an outer surface of one side and any one of the outer surfaces of the other side of the above-mentioned buffer component are inserted into the groove portion of the above-mentioned lower box portion, and an outer surface of one side and any one of the outer surfaces of the other side are inserted into the groove portion of the above-mentioned upper box portion, and when the above-mentioned upper box portion is sealed in the above-mentioned lower box portion, the flat surface of the above-mentioned buffer component abuts against the convex portion.

[0119] [Effects of the invention]

[0120] According to the present invention, any photomask of any type can be stored in the storage box, and the center of the stored photomask can be located at the center position of the storage box.

[0121] In addition, when the photomask 2 is taken out of the storage box, it is possible to prevent the cushioning member from being adhered to the photomask and coming off the groove.

[0122] Since the upper and lower box parts can be made identical, they can be formed using the same mold, thereby improving economic efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0123] Figure 1 It is a top view of the photomask storage box of the present invention.

[0124] Figure 2 It is a side view of the photomask storage box of the present invention.

[0125] Figure 3 It is a top view of the lower case portion of the photomask storage case of the present invention.

[0126] Figure 4 It is a bottom view of the upper case portion of the photomask storage case of the present invention.

[0127] Figure 5 It is a perspective view of the positioning and placing portion of the photomask storage case of the present invention.

[0128] Figure 6 It is a perspective view of the positioning and placing portion of the photomask storage case of the present invention.

[0129] Figure 7 It is a partially enlarged plan view of the lower case portion of the photomask storage case of the present invention in a state where the positioning and placing portion is removed.

[0130] Figure 8 3D view of the buffer member of the photomask storage box of the present invention

[0131] Fig. 9 It is a side view of the cushioning member of the photomask storage case of the present invention.

[0132] Fig.10 It is a partially enlarged top view of the lower case portion of the photomask storage case of the present invention.

[0133] Fig.11 It is a perspective view of the case cushioning member of the photomask storage case of the present invention.

[0134] Fig.12 It is a longitudinal cross-sectional view of the case cushioning member of the photomask storage case of the present invention.

[0135] Fig.13 It is a partially enlarged top view of the upper case portion of the photomask storage case of the present invention.

[0136] Fig.14 This is a top view of a conventional photomask storage box.

[0137] Fig.15 This is a side view of a conventional photomask storage box.

[0138] Fig.16 It is a top view of the lower case portion of a conventional photomask storage case.

[0139] Fig.17 This is a perspective view of a positioning and placing portion of a conventional photomask storage cassette.

[0140] Fig.18 This is a perspective view of a cushioning member of a conventional photomask storage case.

[0141] Fig.19 This is a partially enlarged perspective view of the lower case portion of a conventional photomask storage case.

[0142] Fig. 20 This is a partially enlarged perspective view of a case cushioning member of a conventional photomask storage case.

[0143] Fig.21 This is a bottom view of the upper case portion of a conventional photomask storage case.

[0144] Fig. 22 It is a top view of a conventional photomask storage cassette in a state where a photomask is placed.

[0145] Description of Reference Numerals

[0146] 1 Photomask storage box 1a Side wall

[0147] 2 Photomask 3 Lower box

[0148] 3a Bottom plate 3b Side wall

[0149] 3c One connecting and fixing part 3d Screw hole

[0150] 3e Groove 4 Upper box

[0151] 4a Top plate 4b Side wall

[0152] 4c The other connecting and fixing portion 4d Groove portion

[0153] 5 Positioning and placing part 5a Plate

[0154] 5b: upright portion 5c: groove portion

[0155] 5d: buffer member 5e: groove portion

[0156] 6 Corner positioning part 7 Lower support placement part

[0157] 7a Plate body 7b Vertical part

[0158] 7c groove 7d buffer member

[0159] 8 Upper clamping part 8a Rectangular plate

[0160] 8b Long hole 8c Fixing bolt

[0161] 8d groove 9 left side clamping part

[0162] 9a rectangular plate 9b long hole

[0163] 9c Fixing bolt 9d Groove

[0164] 10 Right side clamping part 10a Rectangular plate

[0165] 10b Long hole 10c Fixing bolt

[0166] 10d groove part 11 step part

[0167] 12 groove 13 buffer member

[0168] 14 Stepped part 15 Pressing part

[0169] 15a groove portion 15b buffer member

[0170] 16 Pressing portion 16a Groove portion

[0171] 16b Buffer component 17 Moving mechanism

[0172] 18 Positioning and placing part 18a Plate body

[0173] 18b: upright portion 18c: groove portion

[0174] 18d Buffer component 18e Long hole

[0175] 18f Fixing bolt 18g Groove

[0176] 19 Corner positioning part 20 Recessed part

[0177] 21 convex portion 22 buffer member

[0178] 22a Head 22b Insertion piece

[0179] 22c Barb 23 Buffer member

[0180] 23a convex part 24 display part

[0181] 25 small window 26 bottom plate

[0182] 27 Rising part 28 Connecting upper part DETAILED DESCRIPTION

[0183] Hereinafter, embodiments of the present invention will be described based on the drawings.

[0184] In addition, the same reference numerals are given to the same parts as those in the above-mentioned conventional example, and the description thereof is omitted.

[0185] [Example 1]

[0186] (2. Description of the present invention)

[0187] (2.1. Description of the integrated molding of the box)

[0188] In the storage box of the present invention, Figure 1 to Figure 4 As shown, for example, the upper case portion 3 and the lower case portion 4 are formed by integral molding using transparent ABS resin.

[0189] In addition, the storage box is made of, for example, a resin into which a few percent of an antistatic material is mixed.

[0190] This prevents electrostatic damage to the photomask and makes it easier to remove dust on the surface and back of the box.

[0191] In addition, since the molding is performed without any special post-process, it can be manufactured at low cost.

[0192] In addition, reference numeral 25 is a small window with a gas filter for adjusting the air pressure.

[0193] (2.2. Description of Positioning and Placing Unit 18)

[0194] In addition, in the present invention, the positioning placement portion 18 that is movable in the up-down direction is used instead of the positioning placement portion 5 that is fixed to the lower case portion 3 that is conventionally used.

[0195] The positioning placement portion 18 is formed of, for example, POM resin (polyacetal resin).

[0196] The positioning and placing section 18 is fixed at, for example, three positions, and can accommodate three types of photomasks 2 having widths of, for example, 920 mm, 945 mm, and 960 mm, respectively.

[0197] That is, the positioning and placing section 18 is, for example, Figure 5 to Figure 7 As shown, it includes: a plate body 18a, which is freely movably arranged on the bottom plate 3a of the above-mentioned upper box part 3 in the up-down direction; a vertical portion 18b, which is formed to be vertically arranged on the upper surface of the plate body 18a; a groove portion 18c, which is arranged on the upper surface of the above-mentioned plate body 18a; a buffer component 18d for a photomask, which is embedded in the above-mentioned groove portion 18c; a long hole 18e, which is respectively arranged on the upper and lower sides of the above-mentioned plate body 18a and extends along the left-right direction; a fixing bolt 18f, which is inserted into the long hole 18e and screwed with the threaded hole 3d of the above-mentioned bottom plate portion 3a; and a protrusion 21, which is arranged on the lower surface of the above-mentioned plate body 18a and is embedded in any one of the three recesses 20a, 20b, and 20c formed on the above-mentioned bottom plate portion 3a.

[0198] The upright portion 18 b includes a corner positioning portion 19 such as an L-shaped notch portion with which the corner of the photomask 2 abuts.

[0199] The buffer member 18d is formed of, for example, a tubular synthetic resin member.

[0200] In addition, the buffer member 18d is fitted into the groove portion 18c in a state where the upper end thereof protrudes from the upper surface of the plate body 18a.

[0201] Then, for example, according to the sizes of the three types of photomasks 2, the convex portion 21 of the positioning placement portion 18 is fitted into any one of the concave portions 20. Thus, the photomasks 2 of the corresponding sizes can be positioned.

[0202] Alternatively, a groove 18g may be provided in the corner positioning portion 19, and a buffer member 18d for a photomask may be fitted into the groove 18g.

[0203] Alternatively, three recessed portions may be formed on the lower surface of the plate body 18a, and a convex portion may be formed on the bottom plate.

[0204] In addition, the positions of the three recessed portions 20a, 20b, and 20c formed at the four corners of the bottom plate portion 3a are set so that when the photomask 2 is positioned by the upper and lower positioning and placing components 18 on the left side and the upper and lower positioning and placing components 18 on the right side, even if the photomask 2 is of any width, the photomask 2 is always stored in a manner such that the center line of the stored photomask 2 in the left-right direction is consistent with the desired position such as the center line of the storage box 1 in the left-right direction.

[0205] That is, when the convex portion 21 of the positioning placement portion 18 is fitted into the outermost concave portion 20a between the left and right sides, the photomask having a maximum width of 960 mm can be positioned.

[0206] Furthermore, when the convex portion 21 is fitted into the concave portion 20 b located in the middle between the left and right sides, the photomask having a width of 945 mm in the middle can be positioned.

[0207] Furthermore, when the convex portion 21 is fitted into the innermost concave portion 20 c between the left and right sides, the photomask having the smallest width of 920 mm can be positioned.

[0208] The recessed portion 20 and the raised portion 21 are formed so that the left-right center line of the mounted photomask coincides with, for example, the left-right center line of the storage box.

[0209] In addition, for example, three display portions 24a, 24b, and 24c may be provided on the bottom plate so that the positions of the above-mentioned recessed portions can be known.

[0210] (2.3. Description of buffer components)

[0211] In addition, in the present invention, the buffer member for the photomask which is a circular tube in shape and which is used in the past can be replaced by a Figure 8 as well as Fig. 9 As shown, the following photomask cushion member 22 is used. The photomask cushion member 22 is composed of a head 22a extending in the longitudinal direction, a plate-shaped insertion piece 22b provided at the lower part of the head 22a and extending in the longitudinal direction, and a barb portion 22c provided on both sides of the insertion piece 22b, wherein the barb portion 22c is composed of a plurality of pieces that are separated and provided in the vertical direction and extend upward.

[0212] In addition, the head portion 22a is formed larger than the groove portion 18c.

[0213] The head portion 22a is formed of, for example, a fan-shaped pipe whose height is smaller than its lateral width, and the upper surface of the pipe is formed in a gently convex shape.

[0214] For example, Fig. 9 As shown, it is composed of a horizontal plate-shaped bottom plate portion 26 formed to be larger than the upper end opening of the above-mentioned groove portion 18c, rising portions 27 that are inclined outward from both side ends of the bottom plate portion 26, and a connecting upper portion 28 that connects the two rising portions 27 and has an upper surface that is bent into a gentle convex shape.

[0215] That is, when the head portion 22a is formed in an arch shape whose height is greater than its lateral width, the arched head portion falls down due to the height when pressing the photomask, and the photomask cannot be pressed properly.

[0216] However, by forming the head portion 22a in a fan shape in which the height is smaller than the lateral width, the height can be reduced, and the head portion can be prevented from falling down, thereby being able to press the photomask.

[0217] In addition, the head portion 22a may be a tube having a rectangular cross-section whose height is smaller than its lateral width.

[0218] In addition, it is preferable that the insertion piece 22b be made of a material that is stronger than the head portion 22a or the barb portion 22c.

[0219] According to this, when the buffer member 22 is inserted into the groove, it is possible to prevent the insertion piece 22b from being bent and becoming difficult to insert.

[0220] In addition, a layer of another material having numerous irregularities on the surface may be provided on the outer surface of the head portion 22 a of the photomask cushion member 22 .

[0221] For example, the main body may be a TPO (olefin elastomer) substrate, and a polyolefin resin layer containing a plasticizer in a smaller proportion than that contained in the TPO substrate may be provided on the outer surface.

[0222] The main body and the outer surface layer may be integrally formed by extrusion.

[0223] The outer surface is, for example, an outer side surface connecting the upper portion 28 and the rising portion 27 .

[0224] In addition, for example, the ratio of the concave portion to the surface provided with the concave and convex portions is 10% to 50%. In addition, the diameter of the concave portion is, for example, several nm to several μm.

[0225] In order to ensure elasticity, the polyolefin-based resin layer having relatively low plasticity preferably has a thickness of, for example, 0.01 mm or less.

[0226] In addition, the polyolefin resin layer having the above-mentioned countless bumps and depressions is, for example, a material obtained by mixing a polyolefin resin having a low viscosity and high fluidity as a base material with a polyolefin resin composed of powder or particles having a higher viscosity and lower fluidity than the base material and extruding it, and then only the surface of the above-mentioned resin layer is heated to form the bumps and depressions by utilizing the melting difference.

[0227] Furthermore, the polyolefin resin layer having these numerous irregularities and containing a relatively low proportion of plasticizer has less oozing of the plasticizer such as oil, and can prevent the plasticizer such as oil from adhering to the photomask.

[0228] In addition, since the contact area with the photomask is small, it is possible to prevent the buffer member and the photomask from being adhered to each other when the photomask stored in the storage box is removed.

[0229] Furthermore, a polyolefin resin layer having the above-mentioned unevenness may be provided on the lower surface of the lowermost barb portion 22c, and the polyolefin resin layer may contain a plasticizer in a smaller proportion than that contained in the TPO substrate, thereby facilitating insertion into the groove portion.

[0230] Then, the buffer member 22 is inserted in a state where the head portion 22a protrudes from the surface where the groove portion 18c is formed.

[0231] The above-mentioned barb portion 22c makes it easy to insert the buffer member into the above-mentioned groove portion, and difficult to remove it from the groove portion.

[0232] In addition, when the photomask is removed, it is possible to prevent the buffer member from being adhered to the photomask and coming off the groove.

[0233] In addition, in the past, the circular tube was simply inserted into the groove, so the amount of protrusion from the groove could not be ensured, and therefore, it was not possible to cope with photomasks of different thicknesses. Thus, it was necessary to prepare a photomask storage box for each thickness.

[0234] However, in the present invention, since the head portion 22a protrudes from the surface of the groove portion, it is possible to ensure a sufficient amount of protrusion from the groove.

[0235] For example, it is possible to accommodate photomasks having different thicknesses ranging from 8.0 mm to 10 mm.

[0236] (2.4. Description of the upper and lower box parts)

[0237] In the present invention, the upper end surface of each side wall portion 3b of the lower case portion 3 is not provided with the step portion 11 but is flat, and a groove portion 3e extending in the circumferential direction is provided at the center of the upper end surface.

[0238] The lower end surface of each side wall portion 4b of the upper case portion 4 is not provided with the step portion 14 but is flat, and a groove portion 4d extending in the circumferential direction is provided at the center of the lower end surface.

[0239] In addition, a long strip of box-use buffer component 23 made of synthetic resin and composed of a tubular shape is inserted into each of the above-mentioned grooves 3e and 4d. The box-use buffer component 23 is, for example, a flat surface along the length direction, and a convex portion 23a extending along the length direction is formed on the lower surface opposite to the upper surface.

[0240] In addition, the cartridge buffer member 23 is inserted into the groove portion so as to be in a state of protruding from the surface.

[0241] In addition, for example, the above-mentioned buffer member 23 is inserted into the groove portion 3e of the lower case portion so that the convex portion side is inserted and the flat surface side protrudes toward the outer surface.

[0242] Moreover, it is inserted into the groove part 4d of the upper case part 4 so that the convex part side may protrude to the outer surface.

[0243] Furthermore, when the lower case portion 3 and the upper case portion 4 are closed, the flat surface portion of the buffer member 23 comes into contact with the convex portion of the buffer member 23 .

[0244] By configuring in this manner, even if there is a manufacturing error between the lower case portion 3 and the upper case portion 4, since there is no stepped portion as in the related art, the lower case portion 3 and the upper case portion 4 can be closed.

[0245] In addition, the sealed state can be maintained by the contact between the upper and lower buffer members.

[0246] In addition, the end surface shapes of the side walls of the upper and lower box parts can be made the same, so that the upper and lower box parts can be formed using the same mold, thereby improving economic efficiency.

[0247] (2.5. Description of the method of using the photomask storage box of the present invention)

[0248] In the present invention, for example, the display section 24 is used as a mark, and the left and right positioning placement sections 18 are fixed at desired positions of the lower case section 3 according to the size of the stored photomask. Then, the photomask is placed.

[0249] According to this, regardless of the type of photomask, all can be stored in the storage box.

[0250] In addition, the center of the stored photomask can be located at the center position of the storage box.

[0251] According to this, for example, when the storage box is bilaterally symmetrical, by making the desired position of the lower case part at the center position in the left-right direction of the lower case part, it can be easily taken out from the storage box.

[0252] In addition, since the center of gravity of the photomask can always be located at the center of the storage box in the left-right direction, safety can be improved during carrying.

Claims

1. A photomask storage box, the photomask storage box comprising a lower box portion and an upper box portion blocking the lower box portion, characterized in that: The four corners of the upper surface of the bottom plate of the lower case are provided with a positioning placement portion that can be moved freely in the vertical direction and places and positions the corners of the stored photomask. The positioning and placing sections are fixed to the desired positions corresponding to the widths of the placed photomasks in the lower case section. The desired position corresponding to the width of the mounted photomask is set so that the center position of each mounted photomask in the left-right direction coincides with the desired position of the lower cassette even if the photomask has any width.

2. The photomask storage box according to claim 1, wherein: The desired position of the lower case portion is the position of the center of the lower case portion in the left-right direction.

3. The photomask storage box according to claim 1 or 2, characterized in that: A plurality of recesses are formed on the upper surface of the bottom plate of the lower box portion. The lower surface of the positioning and placing portion is provided with a convex portion that can be embedded in each of the concave portions. By fitting the convex portion into any of the concave portions, the respective positioning and placing portions are fixed to the lower case portion.

4. The photomask storage box according to claim 1 or 2, characterized in that: A plurality of recesses are formed on the lower surface of the positioning and placing portion. The upper surface of the bottom plate of the lower box portion is provided with a convex portion that can be embedded in each of the concave portions. By fitting the convex portion into any of the concave portions, the respective positioning and placing portions are fixed to the lower case portion.

5. The photomask storage box according to claim 3, characterized in that: A display portion serving as a position mark of the recessed portion is provided on the upper surface of the bottom plate portion.

6. The photomask storage box according to any one of claims 1 to 5, characterized in that: There are three desired positions corresponding to the width of the photomask placed above. The positioning placement section is fixed at any one of the three positions according to the width of the stored photomask.

7. The photomask storage box according to claim 6, wherein: The widths of the stored photomasks are three types: 920 mm, 945 mm, and 960 mm.

8. The photomask storage box according to claim 7, characterized in that: A buffer member for a photomask inserted into a groove formed in the lower case portion or the upper case portion is also provided. The buffer member is composed of a head portion larger than the upper surface opening of the groove portion, an insertion piece provided at the lower portion of the head portion, and one or more barbs provided on the insertion piece and extending upward.

9. The photomask storage box according to claim 8, characterized in that: A polyolefin resin layer having numerous projections and depressions is formed on the outer surface of the upper portion of the head portion of the cushioning member for the photomask. The polyolefin resin layer contains a plasticizer in a smaller proportion than that contained in the member.

10. The photomask storage box according to claim 1, wherein: include: A groove portion formed along the circumferential direction on the upper end surface of the side wall portion of the lower box portion, a strip-shaped box-use buffer member inserted into the groove portion, a groove portion formed along the circumferential direction on the lower end surface of the side wall portion of the upper box portion, and a strip-shaped box-use buffer member inserted into the groove portion, In each of the above-mentioned buffer members, one of the outer surfaces thereof and the outer surface of the other opposite thereto is a flat surface, and the outer surface of the other is formed into a convex portion extending in the longitudinal direction. Each of the above-mentioned buffer components is constructed as follows: an outer surface of one side and any one of the outer surfaces of the other side of the above-mentioned buffer component is inserted into the groove portion of the above-mentioned lower box portion, and an outer surface of one side and any one of the outer surfaces of the other side is inserted into the groove portion of the above-mentioned upper box portion, and when the above-mentioned upper box portion is sealed in the above-mentioned lower box portion, the flat surface of the above-mentioned buffer component abuts against the convex portion.

Images