A static expansion method vacuum standard device

Abstract

The present invention provides a static expansion method vacuum standard device, comprising: a primary standard chamber and a secondary standard chamber connected to each other; a plurality of sample chambers, each connected to the secondary standard chamber through a sealing valve, and a plurality of sample chambers having a movable valve at one end; a vacuum system for vacuuming the primary standard chamber, the secondary standard chamber and the sample chamber; a gas supply system for supplying gas to the primary standard chamber, the secondary standard chamber and the sample chamber; a plurality of containers corresponding to the sample chamber, each of which is provided with a plurality of accommodating areas for accommodating a plurality of samples to be tested; the containers are used to accommodate a plurality of samples to be tested and feed them into the corresponding sample chamber to test the standard. After the standard is completed, the sealing valve is closed, and after the gas supply system re-pressurizes the sample chamber, the movable valve is opened, and the container discharges the material. The batch testing standard of the samples to be tested can be realized by the static expansion method.

Description

Technical Field

[0001] The invention relates to the field of vacuum standard devices, in particular to a static expansion method vacuum standard device. Background Art

[0002] Vacuum technology is widely used in aerospace, high energy physics, semiconductors, microelectronics, automobile manufacturing, refrigeration, solar energy, navigation, shipbuilding and many other industries. Vacuum calibration technology, one of the vacuum technologies, is a key technology to ensure accurate vacuum measurement and product quality.

[0003] At present, the static expansion method is mainly used in vacuum calibration technology to standardize whether the pressure detection accuracy of the vacuum gauge meets the standard. Among them, the vacuum gauge is an instrument used to measure gas pressure and vacuum degree. The static expansion method is a widely used and accurate method to generate standard pressure in the low, medium and high vacuum ranges. In the high vacuum range, vacuum gauges such as magnetic levitation can be calibrated, and in the low vacuum range, vacuum gauges such as capacitance film can be calibrated.

[0004] However, the existing static expansion method vacuum standard device usually manually connects the vacuum gauges to be tested to the expansion chamber one by one for testing. This makes the standard efficiency of the vacuum standard device very low, and it is difficult to meet the needs of semiconductor, aviation and other fields for rapid testing of large quantities of vacuum gauges.

[0005] The purpose of the present invention is to design a static expansion method vacuum standard device in view of the problems existing in the above-mentioned prior art. Summary of the invention

[0006] The present invention provides a static expansion method vacuum standard device, which can effectively solve the above problems.

[0007] The present invention is achieved in that:

[0008] A static expansion method vacuum standard device, comprising:

[0009] Connected first-level standard rooms and second-level standard rooms;

[0010] A plurality of sample chambers are connected to the secondary standard chamber through sealing valves respectively, and one end of a plurality of the sample chambers is provided with a movable valve;

[0011] An exhaust system, used for evacuating the primary standard chamber, the secondary standard chamber and the sample chamber;

[0012] A gas supply system, used for supplying gas to the primary standard chamber, the secondary standard chamber and the sample chamber;

[0013] A plurality of accommodating parts corresponding to the sample chamber, each of the accommodating parts is provided with a plurality of accommodating areas for accommodating a plurality of samples to be tested; the accommodating parts are used to accommodate a plurality of samples to be tested and feed them into the corresponding sample chamber detection standard. After the standard is completed, the sealing valve is closed, and after the gas supply system re-pressurizes the sample chamber, the movable valve is opened and the accommodating parts discharge the materials.

[0014] Furthermore, several of the sample chambers extend laterally and are laterally recessed in the inner bottom to provide several limit grooves, the bottom of the accommodating member is movably provided with several rows of rolling members corresponding to the several limit grooves, the accommodating area is an accommodating groove recessed in the top of the accommodating member, the inner top of one end of the sample chamber is recessed to form a limit zone, and a limit portion corresponding to the limit zone is convexly provided on one end of the accommodating member; after the accommodating member slides into the sample chamber through the cooperation and limiting position between the several rows of rolling members and the several limit grooves, the limit portion is laterally limited between the movable valve and the limit zone.

[0015] Furthermore, it also includes a feeding mechanism corresponding to the plurality of movable valves, the movable valve is provided at one lateral end of the sample chamber, an air inlet hole connected to the air supply system is penetrated through the side wall at the other lateral end, the other end of the accommodating member is provided as an air blocking portion, the air blocking portion is rotatably connected to a vertically arranged baffle member through a plurality of torsion springs, a plurality of pressure blocks driven to be extended and retracted by a telescopic driving device are provided in the side wall at the other lateral end of the sample chamber for limited sliding movement, and the plurality of pressure blocks correspond to the baffle members; after the accommodating member is driven by the feeding mechanism to feed into the sample chamber, the baffle member The plurality of pressure blocks are extended and pressed downward to a lateral limit arranged between the top of the receiving component and the bottom of the plurality of pressure blocks; after the standard is completed, the gas supply system supplies gas to the sample chamber for re-pressurization, and after the movable valve is opened, the plurality of pressure blocks retract so that the baffle piece is driven by the torsion spring to reset to a vertical setting, and a gap is arranged between the air baffle part and the baffle piece and the inner wall of the sample chamber and the plurality of limit grooves, and the gas supply system continues to supply gas to the sample chamber through the air inlet hole to pressurize the baffle piece and the air baffle part to drive the receiving component to discharge the material to the output of the feeding mechanism.

[0016] Furthermore, the gas supplied by the gas supply system is dry nitrogen, the top of the other end of the accommodating member is concave to form a step portion located on the top of the air baffle portion, the lower end of the baffle member is rotatably connected to the end of the step portion through a plurality of torsion springs, the bottom of the pressure block is inclined near one end of the accommodating member to form a guide surface corresponding to the baffle member, the telescopic driving device includes an electromagnet and a spring connected between the electromagnet and the pressure block, the height of the air inlet hole and the pressure block is lower than the height of the accommodating member, and the height of the sample chamber is 20mm-25mm; after the accommodating member is fed into the sample chamber, the baffle member is pressed down by the pressure block and is laterally embedded in the step portion, and the other end of the accommodating member is spaced apart from the air inlet hole.

[0017] Furthermore, a plurality of drive grooves arranged at intervals in the transverse direction are recessed on the bottom of the container, and the feeding mechanism includes a plurality of conveyor belts driven to rotate by a driving assembly, and the plurality of conveyor belts are spaced apart from each other at a lateral end of a plurality of sample chambers, and a push block corresponding to the end of the container and a drive block corresponding to the drive groove are provided on the conveyor belt; when the conveyor belt drives the container to feed, the push block is used to push the container to feed into the sample chamber; when the baffle drives the container to discharge material to one end to dock with the corresponding conveyor belt, the air supply system stops supplying air to the sample chamber, and the drive block is used to be inserted into the corresponding drive groove as the conveyor belt rotates to push the container to continue discharging material.

[0018] Furthermore, the plurality of conveyor belts include a plurality of feed belts and a plurality of discharge belts distributed up and down, and the feed belts and the discharge belts are driven up and down by a lifting drive device together, the push block on the feed belt corresponds to the limiting portion, and the push block on the discharge belt corresponds to the air blocking portion, and the drive block is provided with a plurality of drive grooves at intervals along the lateral direction and at least two of them correspond to one drive groove together; when the feed belt and the discharge belt rise to the point where the discharge belt corresponds to the sample chamber, the feed belt is used to receive the second batch of the containers, and the discharge belt is used to receive the first batch of the containers in the sample chamber; when the feed belt and the discharge belt descend to the point where the feed belt corresponds to the sample chamber, the feed belt is used to feed the received second batch of the containers into the sample chamber, and the discharge belt is used to output the first batch of the containers.

[0019] Furthermore, it also includes a body, the number of the first-level standard chamber and the second-level standard chamber are both two, and the two second-level standard chambers are symmetrically distributed in the upper part of the body, the first-level standard chamber and the second-level standard chamber are connected one-to-one, and the left and right sides of the top of the body are respectively provided with a plurality of sample chambers arranged side by side on the top of the corresponding second-level standard chamber, the far ends of the two second-level standard chambers are respectively connected to the corresponding plurality of sample chambers, the two second-level standard chambers are respectively connected to vacuum sensing devices, the air supply system is respectively connected to the plurality of sample chambers on the left and right sides and the two second-level standard chambers through a plurality of re-pressure valves, and the feeding mechanism is provided with two sets of plurality of sample chambers symmetrically corresponding to the left and right sides.

[0020] Furthermore, the gas supply system is connected to a pressure stabilizing chamber through an air intake valve, the pressure stabilizing chamber is connected to the primary standard chamber through an air intake valve, the pressure stabilizing chamber is connected to a number of sampling sensors, the exhaust system includes a primary vacuum pump and a secondary vacuum pump connected through a vacuum valve, the primary vacuum pump and the secondary vacuum pump are connected to the secondary standard chamber through exhaust valves respectively, the pressure stabilizing chamber is connected to the primary vacuum pump through an exhaust valve, and the primary standard chamber is connected to the secondary standard chamber through an exhaust valve and an air intake valve in turn.

[0021] Furthermore, it also includes a baking system for heating the secondary standard chamber, the pressure stabilization chamber, and the sample chamber.

[0022] The beneficial effects of the present invention are:

[0023] 1. By adding sample chambers and containers, several containers can respectively contain several samples to be tested and then enter the sample chamber for batch standardization. After the standardization is completed, the sealing valve is closed, and the air supply system re-pressurizes the sample chamber, and then the movable valve is opened to discharge the container. In this way, batch testing of samples to be tested can be achieved through the static expansion method, and the sealing valve and the air supply system directly re-pressurize the sample chamber, so that the secondary standard chamber is prevented from breaking vacuum during the discharge of the samples to be tested in the sample chambers, the overall breaking vacuum volume of the overall standard device is reduced, and the efficiency of re-evacuating the sample chamber after the second batch of samples to be tested are fed is improved, thereby improving the overall efficiency of testing the standards of the samples to be tested.

[0024] 2. After the container slides into the sample chamber through the cooperation between several rows of rolling elements and several limiting grooves, the limiting part is horizontally limited between the movable valve and the limiting area. Thus, through the cooperation between several rows of rolling elements and several limiting grooves, the front and rear limiting setting of the container after sliding into the sample chamber is realized. At the same time, the limiting part is limited to the left and right through the movable valve and the limiting area, and the container fed into the sample chamber is limited in four directions, front, back, left and right, so as to improve the stability of the container in the sample chamber, and then improve the stability of the samples to be tested contained in several containing areas of the container, so as to avoid the excessive sliding of the container when the sample chamber is evacuated or inflated during the static expansion method detection, which may cause the sample to be tested to collide with the container or even fall off, thereby improving the stability and accuracy of the batch detection standard for the samples to be tested.

[0025] 3. After the container is driven by the feeding mechanism to feed into the sample chamber, the baffle piece is extended and pressed down by a plurality of pressure blocks to a lateral limit set between the top of the container and the bottom of the plurality of pressure blocks, so that the container is automatically fed into the sample chamber by the addition of the feeding mechanism. At the same time, by adding baffle pieces and pressure blocks, after the container enters the sample chamber, in addition to being limited to the left and right at one end of the limit part, the other end is also limited by the pressure of a plurality of pressure blocks, which further improves the stability of the container in the sample chamber and improves the detection accuracy of the sample to be tested. Moreover, after the standard is completed, the gas supply system re-pressurizes the sample chamber, and after the movable valve is opened, the plurality of pressure blocks return to the sample chamber. The air baffle member is retracted so that it is driven by the torsion spring to reset to the vertical setting. A gap is set between the air baffle member and the baffle member and the inner wall of the sample chamber and a plurality of limit grooves. The air supply system continues to supply air to the sample chamber through the air inlet hole to push the baffle member and the air baffle member to drive the container to discharge to the feeding mechanism for output. As a result, the air supply system not only has the function of re-pressurizing the sample chamber, but also has the function of cooperating with the baffle member and the air baffle member to drive the container to discharge to the outside of the sample chamber. Automatic discharge of the container can be achieved without designing other mechanisms. On the premise of realizing automatic feeding and discharging of the container to improve the standard efficiency of batch detection of samples to be tested, the driving cost can be reduced.

[0026] 4. After the container is fed into the sample chamber, the pressure block of the baffle is pressed down and laterally embedded in the step portion, so that the height of the baffle is reduced by the addition of the step portion, and the other end of the container is arranged at a distance from the air inlet hole, so as to ensure that the air supply system can supply air to the sample chamber through the air inlet hole under the premise of reducing the height of the air inlet hole, thereby reducing the required height of the sample chamber, so as to reduce the air supply system's re-pressurization of the sample chamber and the air supply volume of the air pressurized to push the baffle and the air baffle to drive the container to discharge the material, thereby further reducing the driving cost of the automatic discharge of the container.

[0027] 5. When the conveyor belt drives the container to feed, the push block is used to push the container to feed into the sample chamber; when the baffle piece drives the container to discharge to one end to dock with the corresponding conveyor belt, the air supply system stops supplying air to the sample chamber, and the drive block is used to insert into the corresponding drive groove as the conveyor belt rotates to push the container to continue discharging. As a result, when the container is discharged, the air supply system only needs to supply air and pressurize to push the baffle piece and the air blocking part to drive the container to move a short distance, so that one end of the container can dock with the corresponding conveyor belt. The subsequent discharge action is completed by the drive block and the drive groove, which greatly reduces the air supply volume required by the air supply system to drive the container to discharge, and further reduces the air supply cost of the air supply system when the container is discharged.

[0028] 6. When the feed belt and the discharge belt rise to the sample chamber corresponding to the discharge belt, the feed belt is used to receive the second batch of containers, and the discharge belt is used to receive the first batch of containers in the sample chamber; when the feed belt and the discharge belt descend to the sample chamber corresponding to the feed belt, the feed belt is used to feed the received second batch of containers into the sample chamber, and the discharge belt is used to output the first batch of containers. Thus, through the lifting and lowering setting of the feed belt and the discharge belt, the first batch of containers can be discharged to the discharge belt after the inspection standard and the second batch of containers can be loaded to the feed belt simultaneously, and the discharge belt can output the first batch of containers and the feed belt can feed the second batch of containers into the sample chamber simultaneously, which improves the consistency and smoothness of the container input and output actions, reduces the time difference between input and output, improves the utilization rate of the feed belt and the discharge belt, improves the input and output efficiency of batch containers, and thus improves the efficiency of batch inspection standards. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a schematic diagram of the front view structure of a static expansion method vacuum standard device.

[0030] Figure 2 for Figure 1 Schematic diagram of the three-dimensional structure after removing the feeding mechanism.

[0031] Figure 3 for Figure 2 Schematic diagram of the side section structure of the sample chamber on the left.

[0032] Figure 4 for Figure 2 Schematic diagram of the front cross-section structure of the sample chamber on the left.

[0033] Figure 5 for Figure 4 Schematic diagram of the local structure on the left.

[0034] Figure 6 for Figure 4 Schematic diagram of the local structure on the right.

[0035] Figure 7 for Figure 6 Schematic diagram of the structure when the middle container is unloading.

[0036] Figure 8 It is a schematic diagram of the front cross-section structure of the feed belt, the discharge belt and the accommodating member.

[0037] Fig. 9 for Figure 8 Schematic diagram of the local structure.

[0038] Fig.10 It is a schematic diagram of the three-dimensional structure of the container and the sample to be tested.

[0039] Fig.11 It is a schematic diagram of the three-dimensional structure of the accommodation component.

[0040] Fig.12 It is a bottom view of the structure of the accommodation component.

[0041] Fig.13 This is a schematic diagram of the module connections of a static expansion method vacuum standard device.

[0042] Reference numerals:

[0043] The first-level standard chamber 1; the second-level standard chamber 2; the vacuum sensor device 21; the sample chamber 3; the sealing valve 31; the movable valve 32; the limit groove 33; the limit area 34; the air inlet 35; the pressure block 36; the guide surface 361; the exhaust system 4; the first-level vacuum pump 41; the second-level vacuum pump 42; the vacuum valve 43; the exhaust valve 44; the air supply system 5; the pressure stabilizing chamber 51; the sampling sensor device 511; the air inlet valve 52; the evacuation valve 53; the exhaust valve 54; the pressure restoring valve 55; the accommodating part 6; the accommodating area 61; the rolling part 62; the limit part 63; the air blocking part 64; the baffle part 65; the step part 66; the driving groove 67; the feeding mechanism 7; the push block 71; the driving block 72; the feeding belt 73; the discharging belt 74; the lifting drive device 75; the machine body 8; the sample to be tested 9. DETAILED DESCRIPTION

[0044] Reference Figure 1-13 As shown, a static expansion method vacuum standard device comprises:

[0045] The first-level standard chamber 1 and the second-level standard chamber 2 are connected. Specifically, the first-level standard chamber 1 is a sampling chamber, which belongs to the low vacuum and small volume side during the static expansion method test. In order to make the test accuracy of the sampling sensor device 511 in the following stabilizing chamber 51 within its optimal range, the volume of the first-level standard chamber 1 is designed to be 12mL or 120mL; the second-level standard chamber 2 is an expansion chamber, which belongs to the high vacuum and large volume side during the static expansion method test, and its volume is designed to be 100L;

[0046] A plurality of sample chambers 3 are connected to the secondary standard chamber 2 through sealing valves 31, and a movable valve 32 is provided at one end of the plurality of sample chambers 3; specifically, in this embodiment, each sample chamber 3 can hold 10 samples 9 to be tested, and the volume of each sample chamber 3 is about 1.5L, the sealing valve 31 is a vacuum valve 43, and the movable valve 32 is an electric valve driven up and down by a motor;

[0047] An exhaust system 4, used for evacuating the primary standard chamber 1, the secondary standard chamber 2 and the sample chamber 3;

[0048] A gas supply system 5, used for supplying gas to the primary standard chamber 1, the secondary standard chamber 2 and the sample chamber 3;

[0049] A plurality of accommodating members 6 corresponding to the sample chamber 3, each of the accommodating members 6 being provided with a plurality of accommodating areas 61 for accommodating a plurality of samples 9 to be tested; the accommodating members 6 are used to accommodate a plurality of samples 9 to be tested and feed them into the corresponding sample chamber 3 detection standard. After the standard is completed, the sealing valve 31 is closed, and after the gas supply system 5 supplies gas to the sample chamber 3 for re-pressurization, the movable valve 32 is opened, and the accommodating member 6 discharges the material. Specifically, the sample 9 to be tested is a pressure sensor for measuring gas pressure and vacuum degree, and the shape of the accommodating area 61 can be adaptively changed with the shape of the sample 9 to be tested.

[0050] The above structure is set up, through the addition of the sample chamber 3 and the container 6, so that several containers 6 can respectively contain several samples 9 to be tested and then enter the sample chamber 3 for batch standardization. After the standardization is completed, the sealing valve 31 is closed, and after the gas supply system 5 supplies gas to the sample chamber 3 and re-pressurizes it, the movable valve 32 is opened, and the container 6 is discharged. Therefore, batch testing standards for the samples 9 to be tested can be achieved through the static expansion method, and the sealing valve 31 and the gas supply system 5 directly supply gas to the sample chamber 3 and re-pressurize it, so that the secondary standard chamber 2 is prevented from breaking vacuum during the discharge of the samples 9 to be tested in the sample chambers 3, and the overall breaking vacuum volume of the standard device is reduced, and the efficiency of re-evacuating the sample chamber 3 after the second batch of samples 9 to be tested is improved, thereby improving the overall efficiency of testing standards for the samples 9 to be tested.

[0051] In order to improve the stability of the accommodating member 6 after feeding, several of the sample chambers 3 are laterally extended and the inner bottom is laterally recessed to provide several limit grooves 33. The bottom of the accommodating member 6 is movably provided with several rows of rolling members 62 corresponding to the several limit grooves 33. Specifically, the rolling members 62 are ball bearings. The accommodating area 61 is an accommodating groove recessed at the top of the accommodating member 6. The inner top of one end of the sample chamber 3 is recessed to form a limit area 34. A limit portion 63 corresponding to the limit area 34 is convexly provided on one end of the accommodating member 6. After the accommodating member 6 slides into the sample chamber 3 through the cooperation and limiting between several rows of rolling members 62 and several limit grooves 33, the limit portion 63 is laterally limited between the movable valve 32 and the limit area 34. Thus, through the cooperation between the rows of rolling elements 62 and the limiting grooves 33, the front and rear limiting setting is realized after the accommodating element 6 slides into the sample chamber 3. At the same time, the limiting part 63 is limited to the left and right through the movable valve 32 and the limiting area 34, and the accommodating element 6 fed into the sample chamber 3 is limited in four directions, front, back, left and right, so as to improve the stability of the accommodating element 6 in the sample chamber 3, and then improve the stability of the sample 9 to be tested contained in the several containing areas 61 of the accommodating element 6, avoid the excessive sliding of the accommodating element 6 when the sample chamber 3 is evacuated or inflated during the static expansion method detection, and cause the sample 9 to collide with the accommodating element 6 or even fall off, thereby improving the stability and accuracy of the batch detection standard of the sample 9 to be tested.

[0052] In order to further improve the efficiency of batch testing of the samples 9 to be tested, the standard device also includes a feeding mechanism 7 corresponding to the plurality of movable valves 32, the movable valve 32 is provided at one lateral end of the sample chamber 3, and an air inlet 35 connected to the air supply system 5 is penetrated through the side wall at the other lateral end, and the other end of the accommodating member 6 is set as an air blocking portion 64, and the air blocking portion 64 is rotatably connected to a vertically arranged blocking piece 65 through a plurality of torsion springs, and the inner limit sliding of the side wall at the other lateral end of the sample chamber 3 is driven by the telescopic driving device. The plurality of pressure blocks 36 are movable and retractable, and the plurality of pressure blocks 36 correspond to the baffle pieces 65; after the accommodating member 6 is driven by the feeding mechanism 7 to feed into the sample chamber 3, the baffle pieces 65 are extended and pressed down by the plurality of pressure blocks 36 to a position between the top of the accommodating member 6 and the bottom of the plurality of pressure blocks 36, so that the accommodating member 6 is automatically fed into the sample chamber 3 by the addition of the feeding mechanism 7. At the same time, the baffle pieces 65 and the pressure blocks 36 are added, so that after the accommodating member 6 enters the sample chamber 3, except for the left and right restrictions at one end of the limiting portion 63, , the other end is also limited by a plurality of pressing blocks 36, which further improves the stability of the accommodating member 6 in the sample chamber 3 and improves the detection accuracy of the sample 9 to be tested. Moreover, after the standard is completed, the gas supply system 5 supplies gas to the sample chamber 3 for re-pressurization. After the movable valve 32 is opened, a plurality of the pressing blocks 36 retract so that the baffle member 65 is driven by the torsion spring to reset to the vertical setting. The air baffle portion 64 and the baffle member 65 are set with gaps between the inner wall of the sample chamber 3 and a plurality of the limiting grooves 33. The gas supply system 5 continues to pass through the inlet. The air hole 35 supplies air to the sample chamber 3, and pushes the baffle piece 65 and the air baffle part 64 to drive the container 6 to discharge the material to the feeding mechanism 7 for output, so that the air supply system 5 not only has the function of supplying air and re-pressurizing the sample chamber 3, but also has the function of cooperating with the baffle piece 65 and the air baffle part 64 to drive the container 6 to discharge the material outside the sample chamber 3. The automatic discharge of the container 6 can be realized without designing other mechanisms. On the premise of realizing automatic feeding and discharging of the container 6 to improve the standard efficiency of batch detection of the samples 9 to be tested, the driving cost can be reduced.

[0053] Since the gas supplied by the gas supply system 5 is dry nitrogen, in order to reduce the gas supply cost of the gas supply system 5 when the container 6 is unloading, the top of the other end of the container 6 is concave to form a step portion 66 located at the top of the air blocking portion 64, and the lower end of the baffle member 65 is rotatably connected to the end of the step portion 66 through a plurality of torsion springs. Specifically, the baffle member 65 is rotatably connected to the ear plates at both ends of the end of the step portion 66 through a rotating shaft, and the torsion spring whose two ends are respectively connected to the ear plates and the baffle member 65 is sleeved on the rotating shaft. The bottom of the pressure block 36 is inclined near one end of the container 6 to form a guide surface 361 corresponding to the baffle member 65. The telescopic driving device includes an electromagnet and a spring connected between the electromagnet and the pressure block 36. The height of the air inlet 35 and the pressure block 36 is lower than that of the container. The height of the component 6 is 20mm-25mm, specifically, the height of the sample chamber 3 is 22mm; after the accommodating component 6 is fed into the sample chamber 3, the baffle component 65 is pressed downward by the pressing block 36 and is laterally embedded in the step portion 66, so that the height of the baffle component 65 is reduced by the addition of the step portion 66, and the other end of the accommodating component 6 is spaced apart from the air inlet 35, so that on the premise of reducing the height of the air inlet 35, it is ensured that the air supply system 5 can supply air to the sample chamber 3 through the air inlet 35, thereby reducing the required height of the sample chamber 3, so as to reduce the air supply re-pressurization of the air supply system 5 to the sample chamber 3 and the air supply pressurization to push the baffle component 65 and the air baffle portion 64 to drive the accommodating component 6 to discharge the material, and further reduce the driving cost of the automatic discharge of the accommodating component 6.

[0054] In order to further reduce the gas supply cost of the gas supply system 5 when the container 6 is discharged, a plurality of drive grooves 67 arranged at intervals in the horizontal direction are recessed on the bottom of the container 6, and the feeding mechanism 7 includes a plurality of conveyor belts driven to rotate by the driving assembly, and the plurality of conveyor belts are spaced apart from each other at a lateral end of the plurality of sample chambers 3, and the conveyor belt is provided with a push block 71 corresponding to the end of the container 6 and a drive block 72 corresponding to the drive groove 67; when the conveyor belt drives the container 6 to feed, the push block 71 is used to push the container 6 to feed into the sample chamber 3; when the baffle member 6 drives the container 6 to discharge to one end and docks with the corresponding conveyor belt, the gas supply system 5 stops supplying gas to the sample chamber 3, and the drive block 72 is used to be inserted into the corresponding drive groove 67 as the conveyor belt rotates to push the container 6 to continue discharging. Therefore, when the container 6 is discharged, the air supply system 5 only needs to supply air pressurization to push the baffle 65 and the air baffle 64 to drive the container 6 to move a short distance, so that one end of the container 6 can dock with the corresponding conveyor belt. The subsequent discharge action is completed by the drive block 72 in cooperation with the drive groove 67, which greatly reduces the air supply volume required by the air supply system 5 to drive the container 6 to discharge the material, and further reduces the air supply cost of the air supply system 5 when the container 6 is discharged.

[0055] In order to improve the working efficiency of the feeding mechanism 7, the plurality of conveyor belts include a plurality of feed belts 73 and a plurality of discharge belts 74 distributed up and down, and the feed belts 73 and the discharge belts 74 are driven up and down by the lifting drive device 75. The push block 71 on the feed belt 73 corresponds to the limit portion 63, and the push block 71 on the discharge belt 74 corresponds to the air blocking portion 64. The drive block 72 is provided with a plurality of drive grooves 67 at intervals in the lateral direction, and at least two of them correspond to one drive groove 67, so that the feed belt 73 or the discharge belt 74 is pushed up and down by at least two drive blocks 72 corresponding to one drive groove 67. The accommodating parts 6 are laterally limited to improve the stability of the conveying of the conveyor belt; when the feed belt 73 and the discharge belt 74 rise to the point where the discharge belt 74 corresponds to the sample chamber 3, the feed belt 73 is used to receive the second batch of the accommodating parts 6, and the discharge belt 74 is used to receive the first batch of the accommodating parts 6 in the sample chamber 3; when the feed belt 73 and the discharge belt 74 descend to the point where the feed belt 73 corresponds to the sample chamber 3, the feed belt 73 is used to feed the received second batch of the accommodating parts 6 into the sample chamber 3, and the discharge belt 74 is used to output the first batch of the accommodating parts 6. Therefore, by means of the lifting and lowering arrangement of the feed belt 73 and the discharge belt 74, the first batch of containers 6 can be discharged to the discharge belt 74 after the inspection of the standards and the second batch of containers 6 can be loaded onto the feed belt 73 simultaneously. The discharge belt 74 can output the first batch of containers 6 and the feed belt 73 can feed the second batch of containers 6 into the sample chamber 3 simultaneously, thereby improving the continuity and smoothness of the feeding and unloading actions of the containers 6, reducing the time difference between the feeding and unloading, improving the utilization rate of the feed belt 73 and the discharge belt 74, improving the feeding and unloading efficiency of batch containers 6, and thereby improving the efficiency of batch inspection of the standards.

[0056] In order to improve the overall compactness of the standard device, the standard device also includes a body 8, the number of the first-level standard chamber 1 and the second-level standard chamber 2 are both two, and the two second-level standard chambers 2 are symmetrically distributed in the upper part of the body 8, the first-level standard chamber 1 and the second-level standard chamber 2 are connected one by one, and the left and right sides of the top of the body 8 are respectively provided with a plurality of sample chambers 3 arranged side by side on the top of the corresponding second-level standard chamber 2, and the far ends of the two second-level standard chambers 2 are respectively connected to the corresponding plurality of sample chambers 3, and the two second-level standard chambers 2 are respectively connected to a vacuum chamber 1. The sensing device 21, specifically, the vacuum sensing device 21 is a compound pressure sensor, used to detect the vacuum degree of the secondary standard chamber 2, the gas supply system 5 is connected to the plurality of sample chambers 3 and the two secondary standard chambers 2 on the left and right sides through a plurality of pressure-recombining valves 55, specifically, the pressure-recombining valves 55 are set as stop valves, the feeding mechanism 7 is provided with two sets of the plurality of sample chambers 3 on the left and right sides symmetrically corresponding to the left and right sides, specifically, the left and right sides are respectively provided with three sample chambers 3, so that the standard device can provide 30 samples 9 to be tested for testing at the same time, and the standard device has a 10 -2 -10 -1 Pa, 10 -1 -1Pa, 1-10Pa, 10-100Pa four vacuum ranges with a standard accuracy requirement of 10%. The test time of 10 samples in each sample chamber 3 is 30min, and the working pressure is 2×10 -2 Pa, the lower standard deviation is allowed to be 10%, that is, the absolute pressure rise within 30 minutes shall not exceed 2×10 -3 Pa.

[0057] In order to improve the stability of gas extraction in the primary standard chamber 1 and the secondary standard chamber 2, the gas supply system 5 is connected to a pressure stabilizing chamber 51 through an air inlet valve 52, and the pressure stabilizing chamber 51 is connected to the primary standard chamber 1 through the air inlet valve 52. The pressure stabilizing chamber 51 is connected to a plurality of sampling sensors 511. Specifically, the sampling sensors 511 are thin film gauges for detecting the volume and pressure of the gas removed from the primary standard chamber 1, and have the characteristics of high detection accuracy, thereby ensuring the accuracy of the static expansion method detection results. The gas extraction system 4 includes a primary vacuum pump 41 and a secondary vacuum pump 42 connected by a vacuum valve 43. The primary vacuum pump 41 and the secondary vacuum pump 42 are connected by a vacuum valve 43. The air pump 42 is connected to the secondary standard chamber 2 through the exhaust valve 44, the pressure stabilizing chamber 51 is connected to the primary vacuum pump 41 through the exhaust valve 53, and the primary standard chamber 1 is connected to the secondary standard chamber 2 through the exhaust valve 54 and the intake valve 52 in turn. Specifically, the primary vacuum pump 41 is a rough pump, the secondary vacuum pump 42 is a molecular pump, the intake valve 52, the exhaust valve 54, and the exhaust valve 53 are all stop valves, the vacuum valve 43 is a pneumatic baffle valve, the exhaust valve 44 between the primary vacuum pump 41 and the secondary standard chamber 2 is a stop valve, and the exhaust valve 44 between the secondary vacuum pump 42 and the secondary standard chamber 2 is a pneumatic gate valve.

[0058] In order to achieve the heating and exhaust effect, the standard device also includes a baking system for heating the secondary standard chamber 2, the pressure stabilizing chamber 51, and the sample chamber 3. Specifically, the baking system can bake the secondary standard chamber 2, the pressure stabilizing chamber 51, and the sample chamber 3 to 150°C. The baking system includes a baking jacket and a baking control system, wherein the baking jacket is sewn together by a nickel-chromium wire heater and a glass fiber insulation layer, and its shape and size are sewn according to the shape of the constant volume chamber. The heating wire is evenly distributed in the heating jacket according to the required power size, which can ensure uniform temperature distribution on the wall of the entire constant volume chamber, with a baking temperature range of 25°C to 200°C, the overshoot temperature during heating does not exceed 10°C, and the control accuracy after stabilization is ±5°C. The specific structure of the baking system is prior art, which is not the main invention of this application and will not be described here.

[0059] The valve type described in the present application is preferably an automatic control valve controlled by a control system. The static expansion vacuum method is a method for obtaining the gas pressure after expansion according to Boyle's law. The formula for obtaining the equilibrium pressure P after expansion is:

[0060] ;

[0061] Wherein, P0 is the pressure in the small volume (Pa), which is measured by a thin film gauge connected to the pressure stabilizing chamber 51. is the small volume capacity (L), specifically the capacity of the primary standard chamber 1, and V is the large volume capacity (L), specifically the capacity of the secondary standard chamber 2.

[0062] Working principle:

[0063] The feed belt 73 and the discharge belt 74 rise, so that the feed belt 73 receives the first batch of accommodating parts 6 outputted from the previous process flow, and then the feed belt 73 and the discharge belt 74 descend to the sample chamber 3 corresponding to the feed belt 73. After the feed belt 73 pushes the first batch of accommodating parts 6 into the sample chamber 3 through the push block 71 and the drive block 72, the movable valve 32 is closed, and the baffle piece 65 at the other end of the accommodating part 6 is pressed down by the extended plurality of pressing blocks 36 and is laterally embedded in the step portion 66;

[0064] After the exhaust system 4 evacuates the primary standard chamber 1, the secondary standard chamber 2, and the sample chamber 3, the gas supply system 5 supplies gas to the primary standard chamber 1, the secondary standard chamber 2, and the sample chamber 3 until the internal air pressure stabilizes and reaches the set pressure, and then begins to test the standard for 30 minutes;

[0065] After the standard is completed, the feed belt 73 and the discharge belt 74 rise to the sample chamber 3 corresponding to the discharge belt 74, and the air supply system 5 supplies air to the sample chamber 3 for re-pressurization. After the movable valve 32 is opened, the plurality of pressing blocks 36 retract so that the baffle member 65 is driven by the torsion spring to reset to the vertical setting, and the air baffle portion 64 and the baffle member 65 are provided with gaps with the inner wall of the sample chamber 3 and the plurality of the limiting grooves 33. The air supply system 5 continues to supply air to the sample chamber 3 through the air inlet hole 35, and pressurizes the baffle member 65 and the air baffle portion 64 to drive the accommodating member 6 to discharge to one end docking with the corresponding discharge belt 74. Then, the air supply system 5 stops supplying air to the sample chamber 3, and the drive block 72 rotates with the discharge belt 74 and is inserted into the corresponding drive groove 67 to push the first batch of accommodating members 6 to continue discharging. At the same time, the feed belt 73 synchronously receives the second batch of accommodating members 6 output by the previous level of work process.

[0066] After the first batch of containers 6 and the second batch of containers 6 enter the discharge belt 74 and the feed belt 73 respectively, the feed belt 73 and the discharge belt 74 descend to the sample chamber 3 corresponding to the feed belt 73, and the feed belt 73 continues to feed the second batch of containers 6 into the sample chamber 3, and the discharge belt 74 outputs the first batch of containers 6 to the next level process.

[0067] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A static expansion method vacuum standard device, characterized in that: include: A first-level standard room (1) and a second-level standard room (2) connected to each other; A plurality of sample chambers (3), each connected to the secondary standard chamber (2) via a sealing valve (31); An exhaust system (4) for evacuating the primary standard chamber (1), the secondary standard chamber (2) and the sample chamber (3); A gas supply system (5) for supplying gas to the primary standard chamber (1), the secondary standard chamber (2) and the sample chamber (3); A plurality of accommodating elements (6) corresponding to the sample chamber (3), each of the accommodating elements (6) being provided with a plurality of accommodating areas (61) for accommodating a plurality of samples to be tested (9); the accommodating elements (6) being used for accommodating a plurality of samples to be tested (9) and feeding them into the corresponding sample chamber (3) for testing standards; The plurality of sample chambers (3) extend transversely and are laterally recessed at the bottom thereof and are provided with a plurality of limit grooves (33); the bottom of the accommodating member (6) is movably provided with a plurality of rows of rolling members (62) corresponding to the plurality of limit grooves (33); a movable valve (32) is provided at one transverse end of the sample chamber (3); an air inlet (35) connected to the air supply system (5) is penetrated through the side wall at the other transverse end; the other end of the accommodating member (6) is provided as an air blocking portion (64); the air blocking portion (64) is rotatably connected to a vertically arranged baffle member (65) via a plurality of torsion springs; a plurality of pressure blocks (36) driven to be telescopically extended and retracted by a telescopic driving device are provided in a limited sliding manner in the side wall at the other transverse end of the sample chamber (3); the plurality of pressure blocks (36) correspond to the baffle members (65); A feeding mechanism (7) corresponding to the plurality of movable valves (32); after the accommodating member (6) is driven by the feeding mechanism (7) to feed into the sample chamber (3), the baffle member (65) is extended and pressed downward by the plurality of pressing blocks (36) to a lateral limit position between the top of the accommodating member (6) and the bottom of the plurality of pressing blocks (36); after the standard is completed, the gas supply system (5) supplies gas to the sample chamber (3) for re-pressurization, and after the movable valve (32) is opened, the plurality of The pressing block (36) retracts so that the baffle member (65) is driven by the torsion spring to return to a vertical position, and a gap is set between the air blocking portion (64) and the baffle member (65) and the inner wall of the sample chamber (3) and the plurality of limit grooves (33). The air supply system (5) continues to supply air to the sample chamber (3) through the air inlet hole (35), so as to pressurize and push the baffle member (65) and the air blocking portion (64) to drive the accommodating member (6) to discharge the material to the feeding mechanism (7) for output.

2. A static expansion method vacuum standard device as claimed in claim 1, characterized in that: The accommodating area (61) is a accommodating groove recessed in the top of the accommodating member (6); the inner top of one end of the sample chamber (3) is recessed to form a limiting area (34); a limiting portion (63) corresponding to the limiting area (34) is convexly provided on one end of the accommodating member (6); after the accommodating member (6) slides into the sample chamber (3) through the cooperation and limiting between a plurality of rows of rolling members (62) and a plurality of limiting grooves (33), the limiting portion (63) is laterally limited and disposed between the movable valve (32) and the limiting area (34).

3. A static expansion method vacuum standard device as claimed in claim 1, characterized in that: The gas supplied by the gas supply system (5) is dry nitrogen. The top of the other end of the accommodating member (6) is concave to form a step portion (66) located at the top of the gas blocking portion (64). The lower end of the blocking piece (65) is rotatably connected to the end of the step portion (66) via a plurality of torsion springs. The bottom of the pressing block (36) is inclined near one end of the accommodating member (6) to form a guide surface (361) corresponding to the blocking piece (65). The telescopic driving device comprises an electromagnet and a connecting rod. A spring is connected between the electromagnet and the pressure block (36); the heights of the air inlet (35) and the pressure block (36) are lower than the height of the accommodating member (6); the height of the sample chamber (3) is 20 mm to 25 mm; after the accommodating member (6) is fed into the sample chamber (3), the baffle member (65) is pressed downward by the pressure block (36) and is laterally embedded in the step portion (66); the other end of the accommodating member (6) is spaced apart from the air inlet (35).

4. A static expansion method vacuum standard device as claimed in claim 2, characterized in that: The bottom of the container (6) is recessed with a plurality of drive grooves (67) arranged at intervals in the transverse direction. The feeding mechanism (7) comprises a plurality of conveyor belts driven to rotate by a driving assembly. The plurality of conveyor belts are spaced apart from each other at a transverse end of the plurality of sample chambers (3). The conveyor belt is provided with a push block (71) corresponding to the end of the container (6) and a drive block (72) corresponding to the drive groove (67). When the conveyor belt drives the container (6) to feed, the push block (71) is used to push the container (6) to feed into the sample chamber (3). When the baffle member (65) drives the container (6) to discharge material until one end docks with the corresponding conveyor belt, the air supply system (5) stops supplying air to the sample chamber (3), and the drive block (72) is used to rotate with the conveyor belt and be inserted into the corresponding drive groove (67) to push the container (6) to continue discharging material.

5. A static expansion method vacuum standard device as claimed in claim 4, characterized in that: The plurality of conveyor belts include a plurality of feed belts (73) and a plurality of discharge belts (74) distributed vertically. The feed belts (73) and the discharge belts (74) are driven to rise and fall together by a lifting drive device (75). The push block (71) on the feed belt (73) corresponds to the limit portion (63), and the push block (71) on the discharge belt (74) corresponds to the air blocking portion (64). The drive block (72) is provided with a plurality of drive grooves (67) at intervals in the transverse direction, and at least two of the plurality of drive grooves (67) correspond to the same. The feed belts (73) and the discharge belts (74) rise to When the discharge belt (74) corresponds to the sample chamber (3), the feed belt (73) is used to receive the second batch of the containers (6), and the discharge belt (74) is used to receive the first batch of the containers (6) in the sample chamber (3); when the feed belt (73) and the discharge belt (74) descend to the point where the feed belt (73) corresponds to the sample chamber (3), the feed belt (73) is used to feed the received second batch of the containers (6) into the sample chamber (3), and the discharge belt (74) is used to output the first batch of the containers (6).

6. A static expansion method vacuum standard device as claimed in claim 5, characterized in that: The machine also comprises a machine body (8), wherein the number of the first-level standard chamber (1) and the number of the second-level standard chamber (2) are both two, and the two second-level standard chambers (2) are symmetrically distributed in the upper part of the machine body (8), the first-level standard chamber (1) and the second-level standard chamber (2) are connected in a one-to-one correspondence, and the left and right sides of the top of the machine body (8) are respectively provided with a plurality of sample chambers (3) arranged side by side in front and back on the top of the corresponding second-level standard chamber (2), the far ends of the two second-level standard chambers (2) are respectively connected to the corresponding plurality of sample chambers (3), the two second-level standard chambers (2) are respectively connected to a vacuum sensor device (21), the gas supply system (5) is respectively connected to the plurality of sample chambers (3) on the left and right sides and the two second-level standard chambers (2) through a plurality of re-pressure valves (55), and the feeding mechanism (7) is provided with two sets of the plurality of sample chambers (3) on the left and right sides and symmetrically corresponding to the left and right sides.

7. A static expansion method vacuum standard device as claimed in claim 1, characterized in that: The gas supply system (5) is connected to a pressure stabilizing chamber (51) via an air inlet valve (52); the pressure stabilizing chamber (51) is connected to the primary standard chamber (1) via an air inlet valve (52); the pressure stabilizing chamber (51) is connected to a plurality of sampling sensor devices (511); the gas extraction system (4) comprises a primary vacuum pump (41) and a secondary vacuum pump (42) connected via a vacuum valve (43); the primary vacuum pump (41) and the secondary vacuum pump (42) are connected to the secondary standard chamber (2) via gas extraction valves (44) respectively; the pressure stabilizing chamber (51) is connected to the primary vacuum pump (41) via an exhaust valve (53); and the primary standard chamber (1) is connected to the secondary standard chamber (2) via an exhaust valve (54) and an air inlet valve (52) in sequence.

8. A static expansion method vacuum standard device as claimed in claim 7, characterized in that: It also includes a baking system for heating the secondary standard chamber (2), the pressure stabilization chamber (51), and the sample chamber (3).

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