Comprehensive dynamic balance detecting and adjusting device for rotor of turbo molecular pump

Abstract

The invention discloses a comprehensive dynamic balance detection and adjustment device for a turbo molecular pump rotor, and belongs to the technical field of dynamic balance of turbo molecular pump rotors. The supporting mechanism is arranged in the testing platform, the front end of the to-be-tested turbine rotor is in transmission connection with the supporting mechanism through a connecting block, and a traction cylinder at the rear end of the to-be-tested turbine rotor is in transmission connection with the supporting mechanism; the detection mechanism is arranged in the test platform and is used for detecting the dynamic balance of the turbine rotor to be tested in the rotating process; the driving mechanism is arranged at the bottom of the testing platform and is used for driving the turbine rotor to be tested to rotate; and the weight reduction mechanism is arranged at the top of the test platform and is used for reducing the weight of the traction cylinder. By additionally arranging the connecting blocks at the ends of the rotors, dynamic balance of the rotating shaft and the turbine rotor is achieved together, the method that in a transmission dynamic balance scheme, the rotating shaft and the turbine rotor need to be separated for dynamic balance is replaced, a de-weight mechanism and a dynamic balance device are integrated together, and the purpose of de-weight without getting off a machine is achieved.

Description

Technical Field

[0001] The invention belongs to the technical field of dynamic balance of a turbomolecular pump rotor, and in particular relates to a turbomolecular pump rotor comprehensive dynamic balance detection and adjustment device. Background Art

[0002] The molecular pump is a vacuum obtaining device. Its working principle is that the linear speed of the blades reaches the thermal motion speed of the molecules through high-speed rotation, and the gas obtains a directional speed through momentum exchange with the blades to discharge the cavity; the magnetic levitation turbomolecular pump is used in various industries because of its advantages such as oil-free, wear-free, low noise and can be installed at any angle. Its speed is generally high during operation. The vibration caused by the unbalanced amount of the rotor will directly have a serious impact on the molecular pump. Therefore, it is necessary to balance the rotor in advance, and the dynamic balancing accuracy needs to reach G0.4 or above. To balance the rotor, it is necessary to perform offline dynamic balancing on the dynamic balancing machine, and then assemble the rotor to the molecular pump and use a high-precision dynamic balancing instrument to perform online dynamic balancing.

[0003] During offline dynamic balancing, the speed of the dynamic balancing machine is often within 3000 rpm, and the dynamic balancing amount is controlled within a certain range. The rotor is divided into a shaft and an impeller. Offline dynamic balancing requires dynamic balancing of the shaft and the impeller separately. When the impeller is dynamically balanced, it needs to be connected to the standard shaft for dynamic balancing. If it does not reach the required dynamic balancing level, it needs to be removed and processed to remove weight until the required dynamic balancing level is met.

[0004] The existing technical solution requires dynamic balancing of the rotor shaft and impeller separately. During dynamic balancing, the shaft and impeller must be repeatedly removed from the dynamic balancing machine for machining to remove weight. This technical solution is inefficient and complicated to operate. Even if the dynamic balancing is done separately, errors will still occur when the two are assembled, which is not conducive to the mass production of molecular pumps. Summary of the invention

[0005] The purpose of the present invention is to provide a turbomolecular pump rotor comprehensive dynamic balance detection and adjustment device to solve the problems existing in the above-mentioned prior art.

[0006] To achieve the above object, the present invention provides the following solution: The present invention provides a turbomolecular pump rotor comprehensive dynamic balance detection and adjustment device, comprising:

[0007] Test platform;

[0008] A support mechanism is arranged in the test platform, the front end of the turbine rotor to be tested is connected to the support mechanism through a connecting block, and the traction cylinder at the rear end of the turbine rotor to be tested is connected to the support mechanism through a connecting block;

[0009] A detection mechanism, arranged in the test platform, for detecting the dynamic balance of the turbine rotor to be tested during its rotation;

[0010] A driving mechanism, disposed at the bottom of the test platform, for driving the turbine rotor to be tested to rotate;

[0011] A weight-removing mechanism is arranged on the top of the test platform and is used to reduce the weight of the traction cylinder.

[0012] Preferably, the supporting mechanism includes an outer frame symmetrically fixed to the bottom surface of the test platform, the top of the spring leaf is fixed to the outer frame, the bottom of the spring leaf is fixed to the inner frame, a pressure plate is provided in the inner frame, a first support member is provided at one end of the pressure plate close to the connecting block, the first support member is transmission-connected to the connecting block, a second support member is provided at one end of the pressure plate close to the traction cylinder, the second support member is transmission-connected to the traction cylinder, an adjusting screw is threadedly connected to the bottom of the inner frame, and the adjusting screw abuts against the first support member and the second support member respectively.

[0013] Preferably, the first supporting member includes a first adjusting plate fixedly connected between the inner frame and the pressure plate, a first groove is provided on the top of the first adjusting plate, the first groove is located below the connecting block, first driven pulleys are symmetrically installed on both sides of the first groove, the first driven pulley is adapted to the connecting block, and the first adjusting plate abuts against the top surface of the adjusting screw.

[0014] Preferably, the second support member includes a second adjustment plate fixed between the inner frame and the pressure plate, the top surface of the second adjustment plate is provided with a second groove, the second groove is located below the traction cylinder, and second driven pulleys are symmetrically installed on both sides of the second groove, and the second driven pulley is adapted to the traction cylinder.

[0015] Preferably, fixing mechanisms are respectively provided on both sides of the supporting mechanism, and the fixing mechanisms include a first supporting rod fixedly connected to the inner bottom surface of the testing platform, a grooved connecting plate is provided on the top surface of the first supporting rod, a clamping nut is slidably connected in the grooved connecting plate, the clamping nut is threadedly connected to the top surface of the first supporting rod, and the grooved connecting plate is rotatably connected to a rotating wheel at one end away from the first supporting rod, one of the rotating wheels abuts against the connecting block, and the other rotating wheel abuts against the shaft end nut close to the traction cylinder.

[0016] Preferably, the detection mechanism includes a laser detection unit fixedly connected to the test platform and a vibration detection unit symmetrically arranged on both sides of the support mechanism, the laser detection unit includes a second support rod fixedly connected to the test platform, the second support rod is located on the side close to the traction cylinder, the top surface of the second support rod is connected to the third support rod through a first universal ball joint, the top surface of the third support rod is connected to a clamping member through a second universal ball joint, and a laser speed sensor is installed in the clamping member.

[0017] Preferably, the vibration detection unit comprises a bracket arranged outside the outer frame, a thin metal rod is fixedly connected to the bracket, a vibration sensor is provided on the thin metal rod, and the vibration sensor is fixedly connected to the top surface of the test platform.

[0018] Preferably, the deweighting mechanism comprises a mobile platform installed on the top of the test platform, a tool holder is installed on the mobile platform, a tool is installed in the tool holder, and the tool is located above the traction cylinder.

[0019] Preferably, the driving mechanism includes a driving box fixedly connected to the bottom surface of the test platform, a driving motor is installed on one side of the driving box, the output shaft of the driving motor extends into the driving box and a first gear shaft is installed through a coupling, the first gear shaft is rotatably connected to the driving box, a first gear and a second gear are respectively fixed to the first gear shaft, a second gear shaft is also rotatably connected in the driving box, a third gear and a fourth gear are respectively fixed to the second gear shaft, the first gear is adapted to the third gear, the second gear is adapted to the fourth gear, a pulley is fixed to the second gear shaft, and the pulley is transmission-connected to the traction drum through a belt.

[0020] The present invention discloses the following technical effects: a turbine rotor and a connecting block that need to be dynamically balanced are connected by bolts, and then installed on a supporting mechanism, a driving mechanism is connected to a traction cylinder, and then the position of a detection mechanism is adjusted, the driving mechanism is started, and dynamic balancing is first performed at a gear position with a transmission ratio of 1:1. After the unbalanced amount is obtained, a deweighting device is started to deweight the traction cylinder, and then the dynamic balancing amount at a high speed with a transmission ratio of 1:4 is measured, and the deweighting detection steps are repeated until the dynamic balance meets the requirements.

[0021] By adding a connecting block at the end of the rotor, the shaft and the turbine rotor are dynamically balanced together, replacing the method in the transmission dynamic balancing solution that requires the shaft and the turbine rotor to be dynamically balanced separately. The deweighting mechanism and the dynamic balancing device are integrated together, achieving the purpose of deweighting without removing the machine, replacing the previous method of removing the rotor from the machine for deweighting after obtaining the unbalance amount and then verifying the dynamic balance. The present invention is conducive to improving the efficiency of mass production and reducing costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The drawings constituting a part of the present application are used to provide a further understanding of the present application. The illustrative embodiments and descriptions of the present application are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0023] Figure 1 It is a structural schematic diagram of the comprehensive dynamic balance detection and adjustment device for the turbomolecular pump rotor of the present invention;

[0024] Figure 2 for Figure 1 A partial enlarged view of middle A;

[0025] Figure 3 It is a front view of the comprehensive dynamic balance detection and adjustment device for the turbomolecular pump rotor of the present invention;

[0026] Figure 4 It is a right side view of the comprehensive dynamic balance detection and adjustment device for the turbomolecular pump rotor of the present invention.

[0027] In the figure: 1, test platform; 2, connecting block; 3, traction cylinder; 4, outer frame; 5, spring; 6, inner frame; 7, pressure plate; 8, adjusting screw; 9, first adjusting plate; 10, first groove; 11, first driven pulley; 12, second adjusting plate; 13, second groove; 14, second driven pulley; 15, first support rod; 16, grooved connecting plate; 17, pressing nut; 18, rotating wheel; 19, second support rod; 20, first universal ball Joint; 21. Third support rod; 22. Clamp; 23. Laser speed sensor; 24. Bracket; 25. Metal thin rod; 26. Vibration sensor; 27. Moving platform; 28. Tool holder; 29. ​​Tool; 30. Drive box; 31. Drive motor; 32. Coupling; 33. First gear shaft; 34. First gear; 35. Second gear; 36. Second gear shaft; 37. Third gear; 38. Fourth gear; 39. Pulley. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0030] Reference Figure 1-Figure 4As shown, this embodiment provides a turbomolecular pump rotor comprehensive dynamic balance detection and adjustment device, including

[0031] Test platform 1;

[0032] The support mechanism is arranged in the test platform 1, the front end of the turbine rotor to be tested is connected to the support mechanism through the connecting block 2, and the traction cylinder 3 at the rear end of the turbine rotor to be tested is connected to the support mechanism through the connecting block 2;

[0033] A detection mechanism, arranged in the test platform 1, is used to detect the dynamic balance of the turbine rotor to be tested during its rotation;

[0034] A driving mechanism, disposed at the bottom of the test platform 1, for driving the turbine rotor to be tested to rotate;

[0035] The deweighting mechanism is arranged on the top of the test platform 1 and is used to reduce the weight of the traction cylinder 3 .

[0036] Connect the turbine rotor and connecting block 2 that need to be dynamically balanced with bolts, and then install them on the supporting mechanism. Connect the driving mechanism to the traction cylinder 3, then adjust the position and reverse movement of the detection mechanism, start the driving mechanism, first perform dynamic balancing at a gear position with a transmission ratio of 1:1, and after obtaining the unbalanced amount, start the deweighting device to deweight the traction cylinder 3, and then measure the dynamic balance amount at a high speed with a transmission ratio of 1:4, and repeat the deweighting detection steps until the dynamic balance meets the requirements.

[0037] By adding the connecting block 2 at the end of the rotor, the shaft and the turbine rotor are dynamically balanced together, replacing the method in the transmission dynamic balancing scheme that requires the shaft and the turbine rotor to be dynamically balanced separately, integrating the deweighting mechanism with the dynamic balancing device, achieving the purpose of deweighting without removing the machine, replacing the previous method of removing the rotor from the machine for deweighting after obtaining the unbalance amount and then verifying the dynamic balance. The present invention is conducive to improving the efficiency of mass production and reducing costs.

[0038] A further optimized solution is provided, in which the supporting mechanism comprises an outer frame 4 symmetrically fixed to the bottom surface of the test platform 1, the top of the spring 5 being fixedly connected to the outer frame 4, the bottom of the spring 5 being fixedly connected to the inner frame 6, a pressure plate 7 being provided in the inner frame 6, a first support member being provided in the pressure plate 7 at one end close to the connecting block 2, the first support member being transmission-connected to the connecting block 2, a second support member being provided in the pressure plate 7 at one end close to the traction cylinder 3, the second support member being transmission-connected to the traction cylinder 3, an adjusting screw 8 being threadedly connected to the bottom of the inner frame 6, the adjusting screw 8 being respectively in contact with the first support member and the second support member.

[0039] A further optimized solution is that the first support member includes a first adjusting plate 9 fixed between the inner frame 6 and the pressure plate 7, a first groove 10 is provided on the top of the first adjusting plate 9, the first groove 10 is located below the connecting block 2, and first driven pulleys 11 are symmetrically installed on both sides of the first groove 10, the first driven pulley 11 is adapted to the connecting block 2, and the first adjusting plate 9 abuts against the top surface of the adjusting screw 8.

[0040] A further optimized solution is that the second support member includes a second adjustment plate 12 fixedly connected between the inner frame 6 and the pressure plate 7, the top surface of the second adjustment plate 12 is provided with a second groove 13, the second groove 13 is located below the traction cylinder 3, and second driven pulleys 14 are symmetrically installed on both sides of the second groove 13, and the second driven pulley 14 is adapted to the traction cylinder 3.

[0041] The height of the first adjustment plate 9 and the second adjustment plate 12 are adjusted by adjusting the screw 8 so that the turbine rotor remains horizontal during rotation. The two first driven pulleys 11 are respectively located on both sides of the connecting block 2, and the two second driven pulleys 14 are respectively located on both sides of the traction cylinder 3.

[0042] A further optimized solution is provided with a fixing mechanism on both sides of the supporting mechanism, the fixing mechanism includes a first support rod 15 fixedly connected to the inner bottom surface of the test platform 1, a grooved connecting plate 16 is provided on the top surface of the first support rod 15, a clamping nut 17 is slidably connected in the grooved connecting plate 16, the clamping nut 17 is threadedly connected to the top surface of the first support rod 15, and the end of the grooved connecting plate 16 away from the first support rod 15 is rotatably connected to a rotating wheel 18, one of the rotating wheels 18 abuts against the connecting block 2, and the other rotating wheel 18 abuts against the shaft end nut close to the traction cylinder 3.

[0043] A further optimized solution is that the detection mechanism includes a laser detection part fixedly connected to the test platform 1 and a vibration detection part symmetrically arranged on both sides of the support mechanism, the laser detection part includes a second support rod 19 fixedly connected to the test platform 1, the second support rod 19 is located on the side close to the traction cylinder 3, the top surface of the second support rod 19 is connected to the third support rod 21 through a first universal ball joint 20, the top surface of the third support rod 21 is connected to the clamp 22 through a second universal ball joint, and a laser speed sensor 23 is installed in the clamp 22.

[0044] According to a further optimized solution, the vibration detection unit includes a bracket 26 arranged on the outside of the outer frame 4, a thin metal rod 25 is fixedly connected to the bracket 26, a vibration sensor 24 is provided on the thin metal rod 25, and the vibration sensor 24 is fixedly connected to the top surface of the test platform 1.

[0045] When rotating, the reed 5 in the fixing mechanism generates vibration due to dynamic imbalance, and the vibration is transmitted to the vibration sensor 24 through a thin metal rod 25, so that the vibration signal is processed to measure the imbalance amount and the weight removal position.

[0046] According to a further optimization scheme, the deweighting mechanism includes a mobile platform 27 installed on the top of the test platform 1 , a tool holder 28 is installed on the mobile platform 27 , a tool 29 is installed in the tool holder 28 , and the tool 29 is located above the traction cylinder 3 .

[0047] The tool 29 is mainly used to remove weight from the outer wall of the turbine rotor traction cylinder 3 after calculating the weight removal position and weight. The work of the tool 29 is achieved by a machine tool.

[0048] A further optimized solution is provided, wherein the driving mechanism comprises a driving box 30 fixedly connected to the bottom surface of the test platform 1, a driving motor 31 being installed on one side of the driving box 30, an output shaft of the driving motor 31 extending into the driving box 30 and a first gear shaft 33 being installed through a coupling 32, the first gear shaft 33 being rotatably connected to the driving box 30, a first gear 34 and a second gear 35 being respectively fixedly connected to the first gear shaft 33, a second gear shaft 36 being rotatably connected to the driving box 30, a third gear 37 and a fourth gear 38 being respectively fixedly connected to the second gear shaft 36, the first gear 34 being matched with the third gear 37, the second gear 35 being matched with the fourth gear 38, a pulley 39 being fixedly connected to the second gear shaft 36, and the pulley 39 being transmission-connected to the traction drum 3 through a belt.

[0049] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0050] The embodiments described above are only descriptions of the preferred modes of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should all fall within the protection scope determined by the claims of the present invention.

Claims

1. A turbomolecular pump rotor comprehensive dynamic balance detection and adjustment device, characterized in that: include Test platform (1); A support mechanism is arranged in the test platform (1), the front end of the turbine rotor to be tested is transmission-connected to the support mechanism via a connection block (2), and the traction cylinder (3) at the rear end of the turbine rotor to be tested is transmission-connected to the support mechanism; A detection mechanism, arranged in the test platform (1), for detecting the dynamic balance of the turbine rotor to be tested during its rotation; A driving mechanism, arranged at the bottom of the test platform (1), for driving the turbine rotor to be tested to rotate; A weight-removing mechanism is arranged on the top of the test platform (1) and is used to reduce the weight of the traction cylinder (3).

2. The turbomolecular pump rotor comprehensive dynamic balance detection and adjustment device according to claim 1, characterized in that: The support mechanism comprises an outer frame (4) symmetrically fixed to the bottom surface of the test platform (1), the top of a spring leaf (5) is fixedly connected to the outer frame (4), the bottom of the spring leaf (5) is fixedly connected to an inner frame (6), a pressure plate (7) is provided in the inner frame (6), a first support member is provided at one end of the pressure plate (7) close to the connecting block (2), the first support member is in driving connection with the connecting block (2), a second support member is provided at one end of the pressure plate (7) close to the traction cylinder (3), the second support member is in driving connection with the traction cylinder (3), an adjusting screw (8) is threadedly connected to the bottom of the inner frame (6), and the adjusting screw (8) is respectively in contact with the first support member and the second support member.

3. The turbomolecular pump rotor comprehensive dynamic balance detection and adjustment device according to claim 2 is characterized in that: The first support member comprises a first adjustment plate (9) fixed between the inner frame (6) and the pressure plate (7); a first groove (10) is provided on the top of the first adjustment plate (9); the first groove (10) is located below the connecting block (2); first driven pulleys (11) are symmetrically installed on both sides of the first groove (10); the first driven pulley (11) is adapted to the connecting block (2); and the first adjustment plate (9) abuts against the top surface of the adjusting screw (8).

4. The turbomolecular pump rotor comprehensive dynamic balance detection and adjustment device according to claim 2, characterized in that: The second support member comprises a second adjustment plate (12) fixedly connected between the inner frame (6) and the pressure plate (7); a second groove (13) is provided on the top surface of the second adjustment plate (12); the second groove (13) is located below the traction cylinder (3); second driven pulleys (14) are symmetrically mounted on both sides of the second groove (13); the second driven pulley (14) is adapted to the traction cylinder (3).

5. The turbomolecular pump rotor comprehensive dynamic balance detection and adjustment device according to claim 1, characterized in that: Fixing mechanisms are respectively provided on both sides of the support mechanism, and the fixing mechanisms include a first support rod (15) fixedly connected to the inner bottom surface of the test platform (1), a grooved connecting plate (16) is provided on the top surface of the first support rod (15), a clamping nut (17) is slidably connected inside the grooved connecting plate (16), and the clamping nut (17) is threadedly connected to the top surface of the first support rod (15), and a rotating wheel (18) is rotatably connected to one end of the grooved connecting plate (16) away from the first support rod (15), one of the rotating wheels (18) is in contact with the connecting block (2), and the other rotating wheel (18) is in contact with the shaft end nut close to the traction cylinder (3).

6. The turbomolecular pump rotor comprehensive dynamic balance detection and adjustment device according to claim 2, characterized in that: The detection mechanism comprises a laser detection unit fixedly connected to the test platform (1) and a vibration detection unit symmetrically arranged on both sides of the support mechanism, the laser detection unit comprises a second support rod (19) fixedly connected to the test platform (1), the second support rod (19) is located on a side close to the traction cylinder (3), the top surface of the second support rod (19) is connected to a third support rod (21) via a first universal ball joint (20), the top surface of the third support rod (21) is connected to a clamping member (22) via a second universal ball joint, and a laser speed sensor (23) is installed in the clamping member (22).

7. The turbomolecular pump rotor comprehensive dynamic balance detection and adjustment device according to claim 6, characterized in that: The vibration detection unit comprises a bracket (26) arranged outside the outer frame (4), a thin metal rod (25) is fixedly connected to the bracket (26), a vibration sensor (24) is provided on the thin metal rod (25), and the vibration sensor (24) is fixedly connected to the top surface of the test platform (1).

8. The turbomolecular pump rotor comprehensive dynamic balance detection and adjustment device according to claim 1, characterized in that: The deweighting mechanism comprises a mobile platform (27) installed on the top of the test platform (1), a knife seat (28) is installed on the mobile platform (27), a knife (29) is installed in the knife seat (28), and the knife (29) is located above the traction cylinder (3).

9. The turbomolecular pump rotor comprehensive dynamic balance detection and adjustment device according to claim 1, characterized in that: The driving mechanism comprises a driving box (30) fixedly connected to the bottom surface of the test platform (1), a driving motor (31) being installed on one side of the driving box (30), an output shaft of the driving motor (31) extending into the driving box (30) and being installed with a first gear shaft (33) through a coupling (32), the first gear shaft (33) being rotatably connected to the driving box (30), a first gear (34) and a second gear (35) being respectively fixedly connected to the first gear shaft (33), a second gear shaft (36) being rotatably connected to the driving box (30), a third gear (37) and a fourth gear (38) being respectively fixedly connected to the second gear shaft (36), the first gear (34) being matched with the third gear (37), the second gear (35) being matched with the fourth gear (38), a belt pulley (39) being fixedly connected to the second gear shaft (36), and the belt pulley (39) being transmission-connected to the traction cylinder (3) through a belt.

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