Transport vehicle

Abstract

A transport vehicle is provided with a holding device for holding a container provided with a pair of supported parts and a pressed part. The holding device is provided with a pair of support parts that respectively support the pair of supported parts, and a pressing part that presses the pressed parts. The supporting part has an inclined supporting surface, and the pressing part has an inclined pressing surface.

Description

Technical Field

[0001] The invention relates to a transport vehicle. Background Art

[0002] For example, in semiconductor manufacturing plants, etc., a transport vehicle for transporting containers containing wafers or intermediate masks is used. An example of such a transport vehicle is disclosed in Japanese Patent Gazette No. 2016-163001 (Patent Document 1). The transport vehicle (transport device 100) of Patent Document 1 is a ceiling transport vehicle that travels along a track provided on the ceiling, and is provided with a holding device (clamping device 10) for suspending and holding a container (storage container 50). The holding device is constructed as follows: in a state where a spherical pressed portion (insertion hole 51a) provided on the container is pressed from above by a pressing portion (central cone 13), a pair of supported portions (flange portion 51) provided on the container is supported by a pair of supporting portions (gripping portion 20).

[0003] However, as a container for a conveying object conveyed by a conveying vehicle, an open-type container called an open box without a cover to seal the opening is sometimes used. Moreover, such an open-type container is sometimes conveyed with the opening for access facing obliquely upward in order to prevent the contained contents from flying out. The pair of support parts provided by the holding device of the conveying vehicle of Patent Document 1 are horizontal support surfaces facing vertically upward, and it is not considered to convey the container at an angle. In addition, in the holding device of the conveying vehicle of Patent Document 1, it is difficult to stably hold and convey the container simply by tilting the support surfaces of the pair of support parts. Summary of the invention

[0004] Therefore, it is desired to realize a transport vehicle that can stably hold and transport a container in a state where the opening of the container is directed obliquely upward.

[0005] The transport vehicle involved in the present disclosure is a transport vehicle for transporting a container having a pair of supported portions and a pressed portion. A holding device for holding the container is provided, The aforementioned holding device comprises: a pair of supporting parts, each supporting the pair of supported parts; a holding driving unit that changes the configuration of the pair of support units into a holding configuration for holding the container and a holding release configuration for releasing the container; and A pressing part that presses the pressed part, The supporting portion has an inclined supporting surface, and the inclined supporting surface is used to support the supported surface of the supported portion. The pressing portion has an inclined pressing surface, and the inclined pressing surface is used to press the pressed surface of the pressed portion. The inclined pressing surface is provided in parallel with the pressed surface in a state where the supported surface is supported by the inclined supporting surface.

[0006] According to this configuration, by making the pair of supporting parts in a holding state, the supported surface of the supported part can be supported by a pair of inclined supporting surfaces, and the container can be supported in a state where the opening for accessing the contained object faces obliquely upward. At this time, the pressed surface can be pressed from a direction orthogonal to the pressed surface by the inclined pressing surface parallel to the pressed surface in a state where the supported surface is supported by the inclined supporting surface of the supporting part. Thus, the container can be held from both the upper and lower sides by the mutually parallel inclined supporting surfaces and the inclined pressing surface. Therefore, the container can be stably held and transported in a state where the opening of the container faces obliquely upward.

[0007] Further features and advantages of the technology according to the present disclosure will become more apparent from the following description of illustrative and non-limiting embodiments described with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 It is a perspective view of the transport vehicle according to the embodiment. Figure 2 This is the front view of the transport vehicle. Figure 3 Is the main view of the container. Figure 4 is a side view of the container. Figure 5 is a top view of the holding device. Figure 6 It is a front view of the holding device. Figure 7 It is a figure which shows the shape change of a support part and a shielding member. Figure 8 is a top view of the holding device. Fig. 9 is a side view of the holding device. Fig.10 It is a front view of the holding device. Fig.11 It is a front view (partial cross section) showing the structure of the pressing support mechanism and the detection device. Fig.12 It is a side view (partial cross section) showing the structure of the pressing support mechanism and the detection device. DETAILED DESCRIPTION

[0009] The embodiment of the transport vehicle will be described with reference to the accompanying drawings. For example, in order to transport a container 7 in a semiconductor manufacturing plant, etc., a transport vehicle 1 of this embodiment is used. Figure 1 and Figure 2As shown, the transport vehicle 1 includes a travel portion 2 that travels along a moving path and a transfer mechanism 3 connected to the travel portion 2. In the present embodiment, the moving path of the transport vehicle 1 is physically formed by a track 92 suspended and supported from a ceiling 91. That is, the transport vehicle 1 of the present embodiment is a ceiling transport vehicle that moves along the track 92 formed along the ceiling 91.

[0010] The travel unit 2 travels along a pair of rails 92. The travel unit 2 includes a vehicle body 21, a travel drive unit 22, wheels 23, and guide wheels 24. The vehicle body 21 supports the travel drive unit 22, the wheels 23, and the guide wheels 24. The travel drive unit 22 includes an electric motor such as a servo motor, and drives at least one wheel 23. The wheel 23 rolls on the upper surface of the rail 92. The wheel 23 driven and connected by the travel drive unit 22 functions as a driving wheel. The guide wheel 24 rolls on the inner side of the rail 92. The travel unit 2 travels on the rail 92 along the rail 92 in a state where the guide wheel 24 is contacted and guided by the inner side of the rail 92.

[0011] In the following description, the direction along the extension direction of the rail 92, which is the direction in which the traveling unit 2 travels, is referred to as the front-rear direction X of the transport vehicle 1. In addition, the direction along the parallel direction of the pair of rails 92, which is a direction orthogonal to the front-rear direction X, is referred to as the width direction Y of the transport vehicle 1. In addition, the direction orthogonal to both the front-rear direction X and the width direction Y is referred to as the up-down direction Z. In addition, these directions are directions based on the transport vehicle 1, and when viewed from a fixed point in the equipment, the front-rear direction X and the width direction Y can be different according to the position of the transport vehicle 1 along the moving path.

[0012] The transfer mechanism 3 is arranged below the rail 92 and connected to the travel unit 2. The transfer mechanism 3 includes a holding device 30, a lifting device 50, and a cover 60. The holding device 30 is a device for holding the container 7. The lifting device 50 is a device for lifting the holding device 30. The lifting device 50 enables the holding device 30 to move upward and downward. Figure 2 The cover 60 is raised and lowered between the raised position shown by the imaginary line and the lowered position shown by the solid line. The cover 60 accommodates the lifting device 50 and the holding device 30 in the raised position. Regarding the internal space of the cover 60, both sides of the front-back direction X are shielded, and at least one side (in this example, both sides) of the width direction Y is open.

[0013] The transport vehicle 1, for example, moves the travel portion 2 to the position of the target processing device 94 while the holding device 30 holds the container 7. Figure 2 As shown, the lifting device 50 lowers the holding device 30 to the lowered position, thereby transporting the container 7 to the target processing device 94. Figure 2, an example is shown in which the container 7 is supplied to the target processing device 94 by placing the container 7 on a placing table 95 disposed adjacent to the processing device 94. In addition, the transport vehicle 1 can transport the container 7 out of the processing device 94 after the processing is completed by performing the reverse operation to the above.

[0014] like Figure 3 and Figure 4 As shown, the container 7 as the transport object transported by the transport vehicle 1 of the present embodiment comprises a bottom plate 71, a side wall 72 and an inclined top plate 73. They are formed integrally. The bottom plate 71 is a support plate provided at the lower end of the container 7, and in the present embodiment, is formed in a circular shape. The side wall 72 extends upward from the outer edge of the bottom plate 71, and in the present embodiment, is formed in a cylindrical shape having an opening 75. The inclined top plate 73 is provided at the upper end of the side wall 72, and in the present embodiment, is formed in the same circular shape as the bottom plate 71. In the present embodiment, the inclined top plate 73 is not arranged parallel to the bottom plate 71, in other words, it is inclined relative to the bottom plate 71. The degree of inclination of the inclined top plate 73 relative to the bottom plate 71 can be extremely small, and the inclination angle can be, for example, 1° to 10°.

[0015] In the present embodiment, a recess 73E is formed on the outer edge side of the inclined top plate 73, which is more recessed inward than the side wall 72. The recess 73E is formed at two different positions in the circumferential direction of the inclined top plate 73 (specifically, at two completely opposite positions sandwiching the center of the container 7). The recess 73E of the container 7 on the outer edge side of the inclined top plate 73 is supported from below by the support portion 32 of the holding device 30 of the transport vehicle 1. More specifically, the container 7 is supported from below by a pair of support portions 32 of the holding device 30 of the transport vehicle 1 in a pair of recesses 73E formed on the outer edge side of the inclined top plate 73. In the present embodiment, the recess 73E formed on the inclined top plate 73 is equivalent to a "supported portion". The downward surface of the interior of the recess 73E of the inclined top plate 73 becomes the supported surface 73f actually supported by the support portion 32. In the present embodiment, the recess 73E is formed in a manner that the supported surface 73f inside it is not parallel to the upper surface 73a.

[0016] The container 7 is held by the holding device 30 while the upper surface 73a of the inclined top plate 73 is pressed by the pressing portion 35 provided in the holding device 30. In the present embodiment, the inclined top plate 73 corresponds to the "pressed portion" and the upper surface 73a of the inclined top plate 73 corresponds to the "pressed surface".

[0017] As described above, the container 7 of the present embodiment has an opening 75 on the side wall 72. In the present embodiment, as the opening 75, there are a front opening 75a formed on the front side and a rear opening 75b formed on the back side. The front opening 75a is formed with a wide width, at least wider than the maximum width of the contained object 8. The rear opening 75b is formed with a narrower width than the front opening 75a, and is formed with a narrower width than the maximum width of the contained object 8. In the present embodiment, three rear openings 75b are formed side by side at predetermined intervals.

[0018] The object 8 contained in the container 7 is accessed from the front opening 75a. That is, the front opening 75a formed in the opening 75 of the side wall 72 serves as an opening for accessing the object 8. In addition, as the object 8, for example, a semiconductor wafer or a reticle is exemplified. The container 7 is configured so that a plurality of objects 8 can be accommodated side by side in the upper and lower parts. In addition, the container 7 of this embodiment does not have a cover for closing the opening 75, and an open box, for example, can be used.

[0019] Return to the description of the transport vehicle 1, such as Figures 5 to 10 As shown, the holding device 30 constituting the transfer mechanism 3 includes a holding body 31, a support portion 32, a holding drive portion 33, a pressing portion 35, and a pressing support mechanism 36. In addition, the holding device 30 includes a first guide portion 41, a second guide portion 42, a detection device 44, and a shielding member 46. In addition, Figures 5 to 7 This is a diagram that focuses mainly on the support portion 32 and the shielding member 46, and other parts are appropriately omitted for ease of observation. Figures 8 to 10 This is a diagram that focuses mainly on the pressing portion 35 , the first guide portion 41 , and the second guide portion 42 , and the display of other components is appropriately omitted in consideration of ease of viewing.

[0020] The holding body 31 is a part that serves as a base of the holding device 30. The holding body 31 supports the support portion 32 and the shielding member 46 slidably in the front-rear direction X. In addition, the holding body 31 fixedly supports the holding drive portion 33 and the detection device 44 on its upper surface side. In addition, the holding body 31 slidably supports the pressing portion 35 in the up-down direction Z. In addition, the holding body 31 fixedly supports the pressing support mechanism 36, the first guide portion 41, and the second guide portion 42 on its lower surface side.

[0021] The support portion 32 supports the recessed portion 73E of the inclined top plate 73 of the container 7. In the present embodiment, a pair of support portions 32 are provided in such a manner that a pair of recessed portions 73E located at different positions in the circumferential direction of the inclined top plate 73 can be supported simultaneously. The pair of support portions 32 are arranged side by side at a predetermined interval and in the front-rear direction X. Moreover, the pair of support portions 32 are respectively configured to slide freely in the front-rear direction X, and are driven by the holding drive portion 33 to move toward each other in the front-rear direction X, or to move away from each other in the front-rear direction X.

[0022] In the present embodiment, the front-to-back direction X, which is the direction in which the pair of support portions 32 are arranged side by side when viewed in the up-down direction, corresponds to the "first direction". In addition, the width direction Y, which is the direction orthogonal to the front-to-back direction X, which is the first direction, corresponds to the "second direction" when viewed in the up-down direction. In addition, in the following description, one side of the width direction Y, which is the second direction (for example, Figure 2 The left side in the width direction (in the figure) is referred to as the "first side Y1 in the width direction", and the other side in the width direction Y which is the opposite side thereof is referred to as the "second side Y2 in the width direction". In the present embodiment, the first side Y1 in the width direction is equivalent to the "first side in the second direction", and the second side Y2 in the width direction is equivalent to the "second side in the second direction".

[0023] In the present embodiment, the support portion 32 has an inclined support surface 32a facing obliquely upward. The inclined support surface 32a is formed as a flat surface, and is arranged so that the end portion on the first side Y1 in the width direction is located above the end portion on the second side Y2 in the width direction. The support portion 32 can support the supported surface 73f formed inside the recess 73E of the inclined top plate 73 of the container 7 from the bottom side using the inclined support surface 32a.

[0024] The holding drive unit 33 moves the pair of support parts 32 along the front-to-back direction X. The holding drive unit 33 is composed of, for example, a holding electric motor and a mechanism (such as a ball screw mechanism) that converts the rotation of the holding electric motor into a propulsion force in the front-to-back direction X. The holding drive unit 33 causes the pair of support parts 32 to move toward each other in the front-to-back direction X or to move away from each other in the front-to-back direction X. In addition, in the case where the holding drive unit 33 includes a ball screw mechanism, by forming the direction of the spiral of the screw shaft in opposite directions on one side and the other side of the front-to-back direction X, the above-mentioned approach movement and separation movement can be performed only by a single holding electric motor.

[0025] The holding drive unit 33 can achieve a holding state in which the concave portion 73E of the inclined top plate 73 is supported and the container 7 is held by moving the pair of support portions 32 closer to each other in the front-rear direction X. In addition, the holding drive unit 33 can achieve a holding release state in which the container 7 is released by separating the pair of support portions 32 from the concave portion 73E of the inclined top plate 73 and the container 7 is released by moving the pair of support portions 32 apart in the front-rear direction X. In this way, the holding drive unit 33 can change the state of the pair of support portions 32 into a holding state and a holding release state.

[0026] The pressing portion 35 presses the inclined top plate 73 of the container 7. The pressing portion 35 is arranged between a pair of support portions 32 in the front-rear direction X. In the present embodiment, the pressing portion 35 has an inclined pressing surface 35a facing obliquely downward. The inclined pressing surface 35a is formed as a flat surface, and is arranged in such a manner that the end portion on the first side Y1 in the width direction is located on the upper side compared to the end portion on the second side Y2 in the width direction. In the present embodiment, the inclined pressing surface 35a is arranged non-parallel to the inclined support surface 32a of the support portion 32 which is also inclined in such a manner that the end portion on the first side Y1 in the width direction is located on the upper side compared to the end portion on the second side Y2 in the width direction.

[0027] The pressing portion 35 presses the upper surface 73a of the inclined top plate 73 of the container 7 from the upper side using the inclined pressing surface 35a. As described above, the recessed portion 73E of the inclined top plate 73 of the container 7 is formed in such a manner that the supported surface 73f inside the recessed portion 73E is not parallel to the upper surface 73a. In the present embodiment, the inclined pressing surface 35a of the pressing portion 35 is arranged in such a manner that the inclined angle of the inclined pressing surface 35a relative to the inclined supporting surface 32a of the supporting portion 32 is equal to the inclined angle of the upper surface 73a of the inclined top plate 73 relative to the supported surface 73f of the recessed portion 73E of the container 7. Thus, the inclined pressing surface 35a of the pressing portion 35 is arranged in such a manner that it is parallel to the upper surface 73a of the inclined top plate 73 in a state where the supported surface 73f of the recessed portion 73E is supported by the inclined supporting surface 32a of the supporting portion 32. Therefore, the inclined pressing surface 35a presses the upper surface 73a of the inclined top plate 73 from above in surface contact with the supported surface 73f inside the recess 73E of the inclined top plate 73 while the inclined supporting surface 32a supports the supported surface 73f.

[0028] The pressing support mechanism 36 (see Fig.11 and Fig.12 ) supports the pressing portion 35 to be movably supported along the movable direction V relative to the holding body portion 31. In the present embodiment, the up-down direction Z is the movable direction V, and the pressing support mechanism 36 supports the pressing portion 35 to be movably supported along the up-down direction Z relative to the holding body portion 31. The pressing support mechanism 36 includes: a shaft portion 36A extending upward from the pressing portion 35 along the up-down direction Z; and an elastic member 36B disposed between the holding body portion 31 and the pressing portion 35.

[0029] The shaft portion 36A is inserted through a through hole formed in the holding body portion 31 along the up-down direction Z in a slidable state. The shaft portion 36A plays a role in guiding the movement of the pressing portion 35 along the up-down direction Z (movable direction V). As the elastic component 36B, for example, a coil spring or a leaf spring can be used. In the present embodiment, a coil spring is used as the elastic component 36B. The elastic component 36B applies force to the pressing portion 35 toward the lower side by an elastic restoring force in a compressed state. In this way, the pressing support mechanism 36 supports the pressing portion 35 in a manner that applies force to the pressing portion 35 toward the lower side. Here, in particular, the pressing support mechanism 36 is in a state where the inclined support surface 32a abuts against the upper surface 73a of the recessed portion 73E of the inclined top plate 73 supported by a pair of support portions 32, and the elastic component 36B is compressed, and the pressing portion 35 is applied force toward the lower side.

[0030] like Figures 8 to 10 As shown in FIG. 1 , the first guide portion 41 is fixed near the end portion of the first side Y1 in the width direction of the holding body portion 31. Figures 8 to 10 In the figure, the support portion 32 is omitted for ease of observation, but if it can be seen from Fig.10 As can be easily understood, the first guide portion 41 is arranged closer to the first side Y1 in the width direction than the support portion 32 of the recessed portion 73E of the inclined top plate 73 supporting the container 7. In addition, in the present embodiment, a plurality of (in this example, two) first guide portions 41 are arranged separately along the arc-shaped surface when viewed in the up-down direction. The plurality of first guide portions 41 are arranged at positions symmetrical with respect to the central portion of the front-back direction X of the holding device 30. The first guide portion 41 is arranged in a manner that it can abut against the inclined top plate 73 of the container 7 from the first side Y1 in the width direction, and the container 7 is positioned in the width direction Y by cooperating with the second guide portion 42.

[0031] The first guide portion 41 has a first guide surface 41a on the side surface on the second side Y2 in the width direction that is opposite to the inclined top plate 73 of the container 7. The first guide surface 41a is formed in a tapered shape that is inclined toward the second side Y2 in the width direction as it goes upward. The first guide portion 41 has such a first guide surface 41a, so that when the holding device 30 is lowered and the holding device 30 is offset to the second side Y2 in the width direction relative to the container 7, the position of the holding device 30 in the width direction Y can be corrected to the first side Y1 in the width direction.

[0032] The second guide portion 42 is fixed near the end portion of the bracket, which is fixed to the end portion of the holding body portion 31 on the second side Y2 in the width direction and extends to the second side Y2 in the width direction. The second guide portion 42 is arranged closer to the second side Y2 in the width direction than the support portion 32 of the recessed portion 73E of the inclined top plate 73 that supports the container 7. In the present embodiment, only one second guide portion 42 is provided, which is arranged at the center portion of the holding device 30 in the front-rear direction X. The second guide portion 42 is arranged in a manner that it can abut against the inclined top plate 73 of the container 7 from the second side Y2 in the width direction, and the container 7 is positioned in the width direction Y by cooperating with the first guide portion 41.

[0033] The second guide portion 42 has a second guide surface 42a on the side surface on the first side Y1 in the width direction that is opposite to the inclined top plate 73 of the container 7. The second guide surface 42a is formed in a tapered shape that is inclined toward the first side Y1 in the width direction as it goes upward. The second guide portion 42 has such a second guide surface 42a, so that when the holding device 30 is lowered and the holding device 30 is offset to the first side Y1 in the width direction relative to the container 7, the position of the holding device 30 in the width direction Y can be corrected to the second side Y2 in the width direction.

[0034] In this way, when the holding device 30 is lowered and approaches the container 7 from the upper side, any one of the first guide surface 41a of the first guide portion 41 and the second guide surface 42a of the second guide portion 42 contacts the container 7 to correct the position in the width direction Y. In addition, when there is no deviation in the position of the holding device 30 in the width direction Y of the container 7, there is a case where neither the first guide surface 41a nor the second guide surface 42a contacts the container 7.

[0035] The first guide portion 41 and the second guide portion 42 are arranged at different positions in the up-down direction Z. In this embodiment, Fig.10 As shown, the first guide portion 41 disposed on the first side Y1 in the width direction is disposed on the upper side of the second guide portion 42 disposed on the second side Y2 in the width direction in the up-down direction Z. Such a configuration is suitable for the holding device 30 to support the container 7 in a state where the front opening 75a for accessing the contained object 8 faces obliquely upward.

[0036] The detection device 44 detects whether the holding device 30 is within the holding proper range based on the position of the pressing portion 35 in the movable direction V (in the present embodiment, the vertical direction Z). Here, the holding proper range refers to the range of the position of the holding device 30 in the vertical direction Z that can support the recessed portion 73E of the inclined top plate 73 by the pair of support portions 32 changing from the holding release state to the holding state. In the present embodiment, the pair of support portions 32 slide along the front-back direction X to change from the holding release state to the holding state, so the holding proper range is the range of the position of the holding device 30 in the vertical direction Z that the entire support portion 32 is contained in the recessed portion 73E of the inclined top plate 73.

[0037] like Fig.11 and Fig.12 As shown, in this embodiment, the detection device 44 has two position sensors, namely, a first position sensor 44A and a second position sensor 44B, which are arranged at different positions in the up-down direction Z. The first position sensor 44A is provided above the pressing support mechanism 36 at a position slightly separated upward from the holding body 31. The second position sensor 44B is provided above the pressing support mechanism 36 at a position further separated upward from the first position sensor 44A.

[0038] The first position sensor 44A and the second position sensor 44B of the present embodiment are constituted by optical sensors having a light-emitting portion and a light-receiving portion, respectively. In the present embodiment, the detected body 45 is integrally connected to the shaft portion 36A in a manner extending upward from the shaft portion 36A constituting the pressing support mechanism 36. The detected body 45 is arranged between the light-emitting portion and the light-receiving portion in the front-rear direction X of each of the first position sensor 44A and the second position sensor 44B. The detected body 45 moves in the up-down direction Z in conjunction with the movement of the pressing portion 35 in the up-down direction Z.

[0039] In the present embodiment, when the holding device 30 is not holding the container 7, the pressing portion 35 is urged by the pressing support mechanism 36 to the lower end side within the movable range, and in this state, the detected object 45 is not detected by the first position sensor 44A and the second position sensor 44B. When the holding device 30 is holding the container 7, the pressing portion 35 is urged downward by the pressing support mechanism 36 and moves toward the upper side within the movable range, and in this state, the detected object 45 is detected by the first position sensor 44A. Therefore, whether the holding device 30 is holding the container 7 (i.e., in the storage state) can be detected based on whether the detected object 45 is detected by the first position sensor 44A.

[0040] In addition, in the present embodiment, when the holding device 30 is lowered to approach the container 7 from the upper side, even when the holding device 30 is excessively lowered relative to the container 7 and deviates from the above-mentioned holding appropriate range, the second position sensor 44B detects the object 45. Thus, whether the holding device 30 is located within the holding appropriate range can be detected based on whether the object 45 is detected by the second position sensor 44B.

[0041] Furthermore, when it is determined that the holding device 30 is not located within the proper holding range, the lifting device 50 can be driven to adjust the position of the holding device 30 in the up-down direction Z.

[0042] In the state where the holding device 30 holds the container 7, the shielding member 46 partially covers the front opening 75a of the container 7. In the present embodiment, a pair of shielding members 46 are provided in a manner that partially covers the areas on both sides of the front-rear direction X in the front opening 75a of the container 7. The pair of shielding members 46 are configured in a manner that changes in form into a closed form and an open form. Here, the closed form is a form in which the pair of shielding members 46 at least partially oppose the front opening 75a in a state in which the recessed portion 73E of the inclined top plate 73 is supported by a pair of support portions 32. The open form is a form in which the pair of shielding members 46 are not opposed to the front opening 75a in a state in which the recessed portion 73E of the inclined top plate 73 is supported by a pair of support portions 32.

[0043] In the present embodiment, the shielding member 46 is integrally connected to the support bracket to which the support portion 32 is fixed. One of the pair of shielding members 46 is connected to one of the pair of support portions 32 via the first support bracket, and they can be moved in a linked manner along the front-rear direction X. In addition, the other of the pair of shielding members 46 is connected to the other of the pair of support portions 32 via the second support bracket, and they can be moved in a linked manner along the front-rear direction X. Moreover, the pair of shielding members 46 is configured in the following manner: linked to the change in the form of the pair of support portions 32, the pair of support portions 32 become a closed form as the pair of support portions 32 become a holding form, and the pair of support portions 32 become an open form as the pair of support portions 32 become a holding release form. The pair of shielding members 46 prevent the contained object 8 from escaping from the container 7 in the closed form.

[0044] The lifting device 50 lifts and lowers the holding device 30. Figure 2As shown, the lifting device 50 includes a lifting body 51, a lifting drive 52, and a wire 53. The lifting body 51 is a part that becomes the base of the lifting device 50. The lifting body 51 fixedly supports the lifting drive 52 on its upper surface side. The lifting drive 52 is composed of, for example, an electric motor for lifting and a winding part that rotates integrally with the electric motor for lifting. Regarding the wire 53, one end is connected to the winding part that constitutes the lifting drive 52, and the other end is connected to the holding device 30. The lifting device 50 winds or unwinds the wire by driving the lifting drive 52, so that the holding device 30 is lifted and lowered between the rising position and the falling position.

[0045] [Other implementation methods] (1) In the above-mentioned embodiment, the following configuration is described as an example: when the holding device 30 is lowered and approaches the container 7 from the upper side, only one of the first guide surface 41a of the first guide portion 41 and the second guide surface 42a of the second guide portion 42 contacts the container 7, except when there is no displacement. However, the present invention is not limited to such a configuration, and both the first guide surface 41a of the first guide portion 41 and the second guide surface 42a of the second guide portion 42 contact the container 7 to position the container 7 in the width direction Y.

[0046] (2) In the above embodiment, the holding device 30 is described as an example in which the holding device 30 includes the first guide portion 41 and the second guide portion 42. However, the holding device 30 is not limited to such a configuration, and the holding device 30 may not include the first guide portion 41 and the second guide portion 42.

[0047] (3) In the above-mentioned embodiment, the pressing support mechanism 36 supports the pressing portion 35 to be movably supported along the vertical direction Z relative to the holding body 31 (in other words, the vertical direction Z is the movable direction V) as an example. However, the present invention is not limited to such a configuration, and a direction slightly inclined relative to the vertical direction Z may be the movable direction V. For example, the pressing support mechanism 36 may support the pressing portion 35 to be movably supported relative to the holding body 31 along the movable direction V inclined at an angle of 10° or less relative to the vertical direction Z.

[0048] (4) In the above-mentioned embodiment, the following configuration is described as an example: the holding device 30 includes the pressing support mechanism 36 that supports the pressing portion 35 movably relative to the holding body 31 in the movable direction V. However, the present invention is not limited to such a configuration, and the holding device 30 may not include the pressing support mechanism 36.

[0049] (5) In the above-mentioned embodiment, the detection device 44 is described by taking the configuration including the first position sensor 44A and the second position sensor 44B as an example. However, the configuration is not limited to this, and the detection device 44 may be composed of only one of the first position sensor 44A and the second position sensor 44B. Alternatively, the holding device 30 may not include the detection device 44.

[0050] (6) In the above-mentioned embodiment, the following configuration is used as an example for explanation: the pair of shielding members 46 and the pair of supporting parts 32 change their configurations in conjunction with each other, and the door is in the closed configuration as the pair of supporting parts 32 change to the holding configuration, and the door is in the open configuration as the pair of supporting parts 32 change to the holding release configuration. However, the configuration is not limited to this, and the pair of shielding members 46 and the pair of supporting parts 32 may be driven separately and change their configurations independently of each other.

[0051] (7) In the above embodiment, the holding device 30 is described as an example in which the shielding member 46 partially covers the front opening 75a of the container 7. However, the holding device 30 is not limited to such a configuration, and the shielding member 46 may not be provided.

[0052] (8) In the above-mentioned embodiment, the configuration in which a pair of support portions 32 are arranged side by side along the front-to-back direction X is described as an example. However, the configuration is not limited to this, and the pair of support portions 32 may be arranged side by side along the width direction Y. In this case, the width direction Y is equivalent to the "first direction" and the front-to-back direction X is equivalent to the "second direction". The first guide portion 41 and the second guide portion 42 are separately arranged on both sides of the front-to-back direction X relative to the pair of support portions 32. Alternatively, the pair of support portions 32 may be arranged side by side along a direction intersecting both the front-to-back direction X and the width direction Y. The "first direction" and the "second direction" or the setting positions of the first guide portion 41 and the second guide portion 42 are determined according to the direction in which the pair of support portions 32 are arranged side by side.

[0053] (9) In the above-mentioned embodiment, the following configuration is described as an example: the holding drive unit 33 includes a holding electric motor and a mechanism for converting the rotation of the holding electric motor into a propulsion force in the front-rear direction X. However, the present invention is not limited to such a configuration, and the holding drive unit 33 may also include a mechanism that directly generates the propulsion force in the front-rear direction X, such as a fluid pressure cylinder mechanism.

[0054] (10) In the above-mentioned embodiment, the following configuration is described as an example: the holding device 30 supports the recessed portion 73E formed on the inclined top plate 73 of the container 7 by means of a pair of supporting portions 32. However, the configuration is not limited to this. For example, the inclined top plate 73 of the container 7 may be formed to protrude outward from the side wall 72 in a flange shape, and the holding device 30 may support the flange-shaped protrusion of the inclined top plate 73 by means of a pair of supporting portions 32. In this case, two different locations in the circumferential direction of the flange-shaped protrusion of the inclined top plate 73 correspond to the "supported portion". In addition, a handle-shaped protrusion may be provided on the side wall 72 of the container 7 at a position different from the inclined top plate 73 in the vertical direction, and the holding device 30 may support the handle-shaped protrusion by means of a pair of supporting portions 32. In this case, the handle-shaped protrusion corresponds to the "supported portion". The handle-shaped protrusion may be formed integrally with the side wall 72, or may be formed by a member different from the side wall 72 and fixed to the side wall 72.

[0055] (11) In the above-mentioned embodiment, the following configuration is described as an example: the supported surface 73f inside the recessed portion 73E of the container 7 and the upper surface 73a of the inclined top plate 73 are not formed in parallel. However, the configuration is not limited to this, and the supported surface 73f and the upper surface 73a may be formed in parallel. In this case, on the side of the retaining device 30, the inclined pressing surface 35a of the pressing portion 35 and the inclined supporting surface 32a of the supporting portion 32 are formed in parallel. In short, the inclined pressing surface 35a of the pressing portion 35 is parallel to the upper surface 73a of the inclined top plate 73 in a state where the supported surface 73f of the recessed portion 73E is supported by the inclined supporting surface 32a of the supporting portion 32.

[0056] (12) In the above-mentioned embodiment, an open box without a cover for closing the opening 75 is used as an example of the configuration of the container 7. However, the present invention is not limited to such a configuration, and a container 7 (such as a FOUP or a reticle box) having a cover for closing the opening 75 may be used.

[0057] (13) The configurations disclosed in the above-mentioned embodiments (including the above-mentioned embodiments and other embodiments; the same applies below) can also be combined and applied with the configurations disclosed in other embodiments as long as no contradiction occurs. Regarding other configurations, the embodiments disclosed in this specification are also illustrative in all aspects and can be appropriately changed within the scope of the present disclosure.

[0058] [Summary of implementation methods] To summarize the above, the transport vehicle according to the present disclosure preferably includes the following configurations.

[0059] A transport vehicle is a transport vehicle for transporting a container having a pair of supported portions and a pressed portion. A holding device for holding the container is provided, The aforementioned holding device comprises: a pair of supporting parts, each supporting the pair of supported parts; a holding driving unit that changes the configuration of the pair of support units into a holding configuration for holding the container and a holding release configuration for releasing the container; and A pressing part that presses the pressed part, The supporting portion has an inclined supporting surface, and the inclined supporting surface is used to support the supported surface of the supported portion. The pressing portion has an inclined pressing surface, and the inclined pressing surface is used to press the pressed surface of the pressed portion. The inclined pressing surface is provided in parallel with the pressed surface in a state where the supported surface is supported by the inclined supporting surface.

[0060] According to this configuration, by making the pair of supporting parts in a holding state, the supported surface of the supported part can be supported by a pair of inclined supporting surfaces, and the container can be supported in a state where the opening for accessing the contained object faces obliquely upward. At this time, the pressed surface can be pressed from a direction orthogonal to the pressed surface by the inclined pressing surface parallel to the pressed surface in a state where the supported surface is supported by the inclined supporting surface of the supporting part. Thus, the container can be held from both the upper and lower sides by the mutually parallel inclined supporting surfaces and the inclined pressing surface. Therefore, the container can be stably held and transported in a state where the opening of the container faces obliquely upward.

[0061] As a solution, it is preferred that Also provided is a lifting device for lifting the aforementioned holding device, When viewed in the up-down direction, the direction in which the pair of support portions are arranged side by side is the first direction, the direction orthogonal to the first direction is the second direction, one side of the second direction is the first side of the second direction, and the other side of the second direction is the second side of the second direction. The aforementioned holding device also has: a first guide portion having a first guide surface facing the container and arranged on a first side in the second direction relative to the pair of support portions; and a second guide portion having a second guide surface facing the container and arranged on a second side in the second direction relative to the pair of support portions; When the holding device is lowered by the lifting device and brought close to the container from above, the first guide portion and the second guide portion are arranged so that at least one of the first guide surface and the second guide surface contacts the container.

[0062] According to this configuration, when the holding device is lowered by the lifting device and brought closer to the container from the upper side, if the holding device is offset in the second direction relative to the container, the position of the holding device can be corrected by only the guide surface (either the first guide surface or the second guide surface) of the guide portion on the side opposite to the offset side contacting the container. Therefore, the container can be properly held by the holding device.

[0063] As a solution, it is preferred that The first guide surface is inclined toward the second side in the second direction as it goes upward. The second guide surface is inclined toward the first side in the second direction as it goes upward.

[0064] According to this structure, when the holding device is lowered by the lifting device and the holding device is brought closer to the container from the upper side, even if the holding device is offset in the second direction relative to the container, the holding device can be corrected to a reasonable position. Therefore, the container can be stably held in an appropriate position by the holding device.

[0065] As a solution, it is preferred that The first guide portion and the second guide portion are arranged at different positions in the up-down direction.

[0066] According to this configuration, even when the container is supported in a state where the opening for accessing the contained object faces obliquely upward, the position of the holding device can be corrected as described above and the container can be appropriately held by the holding device.

[0067] As a solution, it is preferred that When viewed in the up-down direction, the pressing portion is disposed between the pair of supporting portions.

[0068] According to this configuration, the container can be held more stably by pressing the pressing portion from above and supporting the container from below on both sides sandwiching the pressing portion.

[0069] As a solution, it is preferred that The aforementioned holding device also has: a holding body portion that supports the pair of the aforementioned supporting portions and the aforementioned holding driving portion; and A pressing support mechanism supports the pressing portion so as to be movable in the up-down direction relative to the holding body portion. The pressing support mechanism supports the pressing portion so as to bias the pressing portion downward in a state where the inclined support surface abuts against the pressed surface in a state where the pair of supported portions are supported by the pair of supporting portions.

[0070] According to this configuration, even if the vertical position of the container relative to the holding device slightly changes during transportation, the pressing portion can properly maintain the state where the container is pressed from above by the pressing portion by the downward force applied by the pressing portion. Therefore, the container can be held more stably.

[0071] As a solution, it is preferred that The range of the position of the holding device in the vertical direction in which the pair of supported parts can be supported by the pair of supporting parts changing from the holding release state to the holding state is the reasonable holding range. The holding device further includes a detection device for detecting whether the holding device is within the appropriate holding range based on the position of the pressing portion.

[0072] According to this configuration, it is possible to detect whether the vertical position of the holding device is within the reasonable holding range based on the position of the pressing portion that is freely movable in the vertical direction. Therefore, for example, if the vertical position of the holding device deviates from the reasonable holding range, an opportunity to correct it can be obtained. As a result, the holding operation of the holding device on the container can be properly performed.

[0073] As a solution, it is preferred that The container has an opening on the side for storing and taking out the contents. The holding device further includes a shielding member, the shielding member being changeable in form to a closed state in which the opening is at least partially opposed to the opening in a state in which the pair of supported portions are supported by the pair of supporting portions, and an open state in which the opening is not opposed to the opening. The shielding member is configured to be linked to the change in shape of the pair of support parts, to be in the door closing shape as the pair of support parts are in the holding shape, and to be in the door opening shape as the pair of support parts are in the holding released shape.

[0074] According to this structure, by making the shielding member in the closed state, the shielding member can at least partially cover the opening, and the contained objects can be restricted from flying out of the container. In addition, by making the shape change of the closed state and the open state of the shielding member linked with the shape change of the holding state and the holding release state of the pair of support parts, it is possible to restrict the contained objects from flying out of the container in the state where the container is held by the holding device with a relatively simple structure.

[0075] The transport vehicle according to the present disclosure only needs to achieve at least one of the above-mentioned effects. Explanation of symbols

[0076] 1Conveyor vehicle 7 Container 8Contained objects 30 Holding device 31 Main body 32 Support part 32a Inclined support surface 33 Holding drive unit 35 Pressing part 35a Inclined pressing surface 36 Press support mechanism 41 First Guidance Department 41a First guide surface 42 Second guide section 42a Second guide surface 44 Detection device 46 shielding parts 50 Lifting device 73 inclined top plate (pressed portion) 73a Upper surface (pressed surface) 73E recessed portion (supported portion) 73f supported surface 75 openings 75a Front opening X front-to-back direction (1st direction) Y width direction (second direction) Y1 1st side in width direction (1st side in 2nd direction) Y2 width direction second side (second direction second side) Z up and down direction V movable direction.

Claims

1. A transport vehicle for transporting a container having a pair of supported portions and a pressed portion, The transport vehicle has the following features: A holding device for holding the container is provided, The holding device comprises: a pair of supporting parts, which respectively support the pair of supported parts; a holding driving portion that changes the configuration of the pair of support portions into a holding configuration for holding the container and a holding release configuration for releasing the container; and A pressing portion that presses the pressed portion, The supporting portion has an inclined supporting surface, and the inclined supporting surface is used to support the supported surface of the supported portion. The pressing portion has an inclined pressing surface, and the inclined pressing surface is used to press the pressed surface of the pressed portion. The inclined pressing surface is provided in parallel with the pressed surface in a state where the supported surface is supported by the inclined supporting surface.

2. The transport vehicle according to claim 1, wherein: A lifting device is also provided to lift the holding device. When viewed in the up-down direction, the direction in which the pair of support portions are arranged side by side is the first direction, the direction orthogonal to the first direction is the second direction, one side of the second direction is the first side of the second direction, and the other side of the second direction is the second side of the second direction. The holding device also has: a first guide portion having a first guide surface facing the container and arranged on a first side in the second direction with respect to the pair of support portions; and a second guide portion having a second guide surface facing the container and arranged on a second side in the second direction relative to the pair of support portions; When the holding device is lowered by the lifting device to approach the container from above, the first guide portion and the second guide portion are arranged so that at least one of the first guide surface and the second guide surface contacts the container.

3. The transport vehicle according to claim 2, wherein: The first guide surface is inclined toward the second side in the second direction as it goes upward. The second guide surface is inclined toward the first side in the second direction as it goes upward.

4. The transport vehicle according to claim 2, wherein: The first guide portion and the second guide portion are arranged at different positions in the up-down direction.

5. The transport vehicle according to any one of claims 1 to 4, wherein: When viewed in the up-down direction, the pressing portion is arranged between the pair of supporting portions.

6. The transport vehicle according to any one of claims 1 to 4, wherein: The holding device also has: a holding body portion that supports the pair of the supporting portions and the holding driving portion; and A pressing support mechanism supports the pressing portion so as to be movable in the up-down direction relative to the holding body portion. The pressing support mechanism supports the pressing portion so as to bias the pressing portion downward in a state where the inclined support surface abuts against the pressed surface in a state where the pair of supported portions are supported by the pair of supporting portions.

7. The transport vehicle according to claim 6, wherein: The range of the position of the holding device in the vertical direction in which the pair of supported parts can be supported by the pair of supporting parts changing from the holding release state to the holding state is defined as the holding reasonable range. The holding device further includes a detection device for detecting whether the holding device is within the proper holding range based on the position of the pressing portion.

8. The transport vehicle according to any one of claims 1 to 4, wherein: The container has an opening on the side for storing and accessing the contents. The holding device further includes a shielding member, the shielding member can be changed into a closed state in which the opening is at least partially opposed to the opening in a state where the pair of supported portions are supported by the pair of supporting portions, and an open state in which the opening is not opposed to the opening. The shielding member is configured to be linked to the change in the form of the pair of support parts, to be in the door-closing form as the pair of support parts are in the holding form, and to be in the door-opening form as the pair of support parts are in the holding release form.

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