Detection apparatus, detection method, and storage medium

Abstract

The invention discloses a detection device, a detection method and a storage medium, and relates to the technical field of automatic detection, the detection device comprises a base, a rack, a driving mechanism, a first measurement module, a second measurement module, a first calibration module and a second calibration module; the first measuring module is installed on the first side of the rack, and the second measuring module is installed on the second side of the rack. The first calibration module is connected to the base and located on the first side of the rack. The second calibration module is connected to the base and located on the second side of the rack. The first measurement module moves along with the rack to form a first measurement interval; the second measurement module moves along with the rack to form a second measurement interval; the first calibration module and the second calibration module are both located in an overlapped interval of the first measurement interval and the second measurement interval in the first preset direction, and a preset distance is formed between the first calibration module and the second calibration module in the first preset direction. The detection efficiency and the detection accuracy of the detection device can be ensured or improved.

Description

Technical Field

[0001] The present invention relates to the field of automated detection technology, and in particular to a detection device, a detection method and a storage medium. Background Art

[0002] Taking lithium battery electrodes as an example, many products currently measure thickness, surface density, surface conditions and other test items during the production process, and corresponding testing devices are required to test the corresponding test items.

[0003] The reliability of the detection device is easily affected by environmental factors (such as temperature, humidity, vibration), and also by the duration of use. In order to ensure the reliability of the detection device, it needs to be calibrated regularly. The existing technical solution is to regularly move the measurement module to the calibration area on both sides of the detection area to calibrate the measurement module.

[0004] However, as the production process requirements for lithium battery pole pieces become increasingly stringent, the reliability requirements for detection devices are also becoming higher and higher. For existing technical solutions, if you want to improve the reliability of the detection device, you can only increase the calibration frequency. However, the increase in calibration frequency will take up a certain amount of extra time, resulting in a decrease in the efficiency of the detection device. Summary of the invention

[0005] The main technical problem solved by the present invention is that the calibration method of the existing detection device affects the detection efficiency.

[0006] According to the first aspect, an embodiment provides a detection device, including: a base, a frame, a driving mechanism, a first measuring module, a second measuring module, a first calibration module and a second calibration module;

[0007] The rack is movably mounted on the base;

[0008] The driving mechanism is configured to drive the frame to reciprocate along a first preset direction, the first measuring module is mounted on a first side of the frame, and the second measuring module is mounted on a second side of the frame;

[0009] A first calibration module is connected to the base and is located on a first side of the frame;

[0010] A second calibration module is connected to the base and is located on a second side of the frame;

[0011] The first measuring module moves along with the frame to form a first measuring interval;

[0012] The second measuring module moves along with the frame to form a second measuring interval;

[0013] The moving stroke of the frame in the first preset direction is D, and the distance between the first measurement module and the second measurement module in the first preset direction is L, where L < D; both the first calibration module and the second calibration module are located in the overlapping interval of the first measurement interval and the second measurement interval in the first preset direction, and the first calibration module and the second calibration module have a preset spacing in the first preset direction.

[0014] According to a second aspect, in an embodiment, a detection method is provided, which is applied to the detection device described in the first aspect. The detection method includes:

[0015] Controlling the driving mechanism to drive the frame to reciprocate in the first preset direction;

[0016] During the movement of the frame, controlling the first measurement module to measure the workpiece to be measured located in the preset first measurement interval and the first calibration module (the first standard block), and obtaining the corresponding first measurement data and first calibration data; controlling the second measurement module to measure the workpiece to be measured located in the preset second measurement interval and the second calibration module (the second standard block), and obtaining the second measurement data and second calibration data;

[0017] Judging whether the first measurement accuracy of the first measurement module meets the preset accuracy requirement according to the first calibration data;

[0018] Wherein, if the first measurement accuracy does not meet the preset accuracy requirement, calibrating the first measurement data according to the preset standard data of the first calibration data and the first standard block of the first calibration module;

[0019] Judging whether the second measurement accuracy of the second measurement module meets the preset accuracy requirement according to the second calibration data;

[0020] Wherein, if the second measurement accuracy does not meet the preset accuracy requirement, calibrating the second measurement data according to the preset standard data of the second calibration data and the second standard block of the second calibration module.

[0021] According to a third aspect, in an embodiment, a computer-readable storage medium is provided. A program is stored on the medium, and the program can be executed by a processor to implement the method described in the second aspect.

[0022] According to the detection device, detection method and storage medium of the above-mentioned embodiment, by arranging a calibration module on the rack, the measuring module can measure the calibration module during the process of measuring the workpiece to be measured. By comparing the calibration data obtained by measuring the calibration module with the preset standard data, it can be detected whether the measurement accuracy of the measuring module meets the requirements, and calibration can be achieved while measuring; by arranging two groups of measurement modules and calibration modules at the same time, the measurement data can be complemented to avoid the existence of measurement blind spots caused by the obstruction of the calibration module; through the above-mentioned detection device, measurement and calibration can be achieved, which can ensure or improve the detection efficiency and detection accuracy of the detection device. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A schematic diagram of the structure of a detection device provided in an embodiment (I);

[0024] Figure 2 A schematic diagram of the structure of a detection device provided in an embodiment (II);

[0025] Figure 3 A schematic diagram of the structure of a detection device provided in an embodiment (III);

[0026] Figure 4 A schematic diagram of the structure of a detection device provided in an embodiment (IV);

[0027] Figure 5 A schematic diagram of a measurement process of a detection device provided in one embodiment of the present application (I);

[0028] Figure 6 A schematic diagram of a measurement process of a detection device provided in one embodiment of the present application (II);

[0029] Figure 7 A schematic diagram of a measurement process of a detection device provided in one embodiment of the present application (III);

[0030] Figure 8 A schematic diagram of a structure in which a first measuring module and a second measuring module perform reciprocating motion according to an embodiment of the present application (I);

[0031] Fig. 9 A schematic diagram of a structure in which a first measuring module and a second measuring module perform reciprocating motion according to an embodiment of the present application (II);

[0032] Fig.10 A schematic diagram of a detection method provided in accordance with an embodiment of the present application.

[0033] Figure numerals: 10 - base; 20 - frame; 30 - driving mechanism; 40 - first measuring module; 50 - second measuring module; 61 - first calibration module; 62 - second calibration module. DETAILED DESCRIPTION

[0034] The present invention is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are for making the present application better understood. However, those skilled in the art can easily recognize that some features can be omitted in different situations, or can be replaced by other elements, materials, methods. In some cases, some operations related to the present application are not shown or described in the specification, this is to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations according to the description in the specification and the general technical knowledge in the art.

[0035] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0036] The serial numbers of the components in this document, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0037] In existing industrial production, during the manufacturing process, one or more test items need to be measured for the product. Taking lithium battery pole pieces as an example, it involves measuring test items such as thickness, surface density or surface conditions. For example, flat glass or wafers also involve the detection of test items such as thickness and surface conditions.

[0038] Corresponding to different detection items, generally a matching measurement module is required for measurement. For example, thickness detection can be achieved by laser measurement, ultrasonic measurement, etc.; for example, the measurement of surface density requires the use of corresponding measurement equipment. In order to ensure the accuracy of the detection, the measurement module needs to be calibrated regularly. The general calibration method is to calibrate in a calibration area specially used for calibration, and calibrate using standard parts / standard blocks. Specifically, the measurement module measures the standard parts, outputs the corresponding calibration data, and compares the calibration data with the preset standard data to determine whether the measurement module is reliable. If necessary, the measurement data needs to be calibrated. Or use standard equipment for calibration, for example, provide a standard signal (such as an optical signal or an ultrasonic signal) to the measurement module, and the measurement module receives the standard signal and outputs the corresponding measurement calibration data, so as to compare it with the standard data corresponding to the standard signal. Or other available calibration methods are used.

[0039] Ideally, the measurement module is calibrated for each measurement. However, this calibration method of increasing the calibration frequency has the problem of affecting the detection efficiency, resulting in a decrease in the efficiency of the detection device.

[0040] For example, taking thickness measurement as an example, the standard thickness of the standard part is 1.00mm, and the calibrated thickness data obtained by measuring the standard part is 0.99mm, the difference is 0.01mm, and the deviation is 1%. If the measurement deviation is less than 2%, it is considered that the measurement module is still accurate and no calibration is required at this time; if the deviation is more than 2%, the measurement module needs to be calibrated. The specific calibration method is generally to adjust the calculation formula for converting the electrical signal output by the measurement module into a digital signal, or to compensate according to the difference, which can be determined according to the actual calibration method of the measurement module.

[0041] Of course, the embodiments of the present application do not limit the test piece to a lithium battery electrode, and the inspection item is not necessarily a thickness measurement. For example, the other types of test pieces and inspection items mentioned above, which have the problem of low inspection efficiency caused by the above-mentioned calibration, can all be applied to the inspection device and inspection method provided in the embodiments of the present application.

[0042] like Figures 1 to 4 As shown, an embodiment of the present application provides a detection device, which may include: a base 10, a frame 20, a driving mechanism 30, a first measuring module 40, a second measuring module 50, a first calibration module and a second calibration module.

[0043] The frame 20 is movably mounted on the base 10 .

[0044] The driving mechanism 30 is configured to drive the frame 20 to reciprocate in a first preset direction. The first measurement module 40 is installed on the first side of the frame 20, and the second measurement module 50 is installed on the second side of the frame 20. For example, the driving mechanism 30 may include driving parts and transmission parts such as motors, guide rails or lead screws.

[0045] In some embodiments, such as Figure 3 associated with Figure 4 shown, the first preset direction may be Figure 3 the left - right direction in the figure, where the movement from left to right is defined as the forward movement, and the movement from right to left is the return movement. The first side of the frame 20 is Figure 3 the upper side of the frame 20 in the figure, and the second side of the frame 20 is Figure 3 the lower side of the frame 20 in the figure.

[0046] The first calibration module is connected to the base 10 and is located on the first side of the frame 20.

[0047] The second calibration module is connected to the base 10 and is located on the second side of the frame 20.

[0048] The first measurement module 40 moves with the frame 20 to form a first measurement interval.

[0049] The second measurement module 50 moves with the frame 20 to form a second measurement interval.

[0050] The movement stroke of the frame 20 in the first preset direction is D, and the distance between the first measurement module 40 and the second measurement module 50 in the first preset direction is L, where L < D. Both the first calibration module 61 and the second calibration module 62 are located in the interval where the first measurement interval and the second measurement interval overlap in the first preset direction, and the first calibration module 61 and the second calibration module 62 have a preset spacing in the first preset direction.

[0051] In some embodiments, the first measurement module 40 is configured to measure a preset detection item; the second measurement module 50 is configured to measure a preset detection item. The first calibration module 61 may include a first standard block, and the first standard block has a to - be - measured feature of the same type as the to - be - measured part, and this to - be - measured feature has preset standard data. The second calibration module 62 may include a second standard block, and the second standard block has a to - be - measured feature of the same type as the to - be - measured part, and this to - be - measured feature has preset standard data. Among them, the to - be - measured feature is set corresponding to the detection item, and the to - be - measured feature may be a corresponding thickness feature, surface density feature or defect feature, etc.

[0052] For example, when the preset detection item is thickness measurement, the first standard block and the second standard block correspondingly have a preset standard thickness, and the first measurement module 40 and the second measurement module 50 are used to measure the thickness.

[0053] For another example, the preset detection item is surface density measurement, the first standard block and the second standard block have preset standard surface densities respectively, and the first measurement module 40 and the second measurement module 50 are used to measure the surface density.

[0054] In some other embodiments, the first calibration module 61 and the second calibration module 62 may be in the form of directly sending standard data / standard signals to the first measurement module 40 and the second measurement module 50. For example, in defect detection, the calibration module may be in the form of a display module to display images of a defect-free or defective piece to be tested. In this case, the measurement module corresponds to an image detector, which performs defect analysis by acquiring the image provided by the display module and comparing it with the preset standard data.

[0055] For example, the measurement module can use laser or ray measurement, and the corresponding calibration module can also be the same module. By directly sending rays or lasers with standard data (such as rays or lasers with standard frequency or intensity) to the measurement module, the measurement module receives and outputs the corresponding calibration data.

[0056] It can be seen that the embodiments of the present application do not limit the specific measurement and detection items of the measurement modules (the first measurement module 40 and the second measurement module 50), nor do they limit the implementation methods of the calibration modules (the first calibration module 61 and the second calibration module 62). The calibration modules can be measured by the measurement modules in a variety of implementation methods. The measurement modules can form corresponding calibration data by measuring objects in the calibration modules (such as measuring standard blocks) or obtaining standard signals (image signals, light signals or ultrasonic signals) provided by the calibration modules.

[0057] It should be noted that in the embodiment of the present application, when describing the relationship between the measurement module and the calibration module, unless otherwise specified, the description is of the relationship between the first measurement module 40 and the first calibration module 61, and the relationship between the second measurement module 50 and the second calibration module 62. When describing the measurement module alone, the description is of the first measurement module 40 and / or the second measurement module 50. When describing the calibration module alone, the description is of the first calibration module 61 and / or the second calibration module 62.

[0058] like Figures 5 to 7 As shown, when the piece under test is being tested by the testing device, the piece under test can be Figure 5 For example, the rack 20 moves once in the forward direction or once in the return direction, and the first measuring module 40 and the second measuring module 50 follow the movement and perform measurement as one detection. After one detection is completed, the piece to be tested moves upward by a certain distance, which can be the distance between the first measuring module 40 and the second measuring module 50 in a direction perpendicular to the first preset direction, that is, Figure 5Obviously, in actual testing, it is not possible to measure every point of the object to be tested. When the object to be tested moves continuously, the points of the object to be tested measured by the measuring module may be distributed in a curve or a broken line. However, the coordinates of the measurement data output by the measuring module are still related to the horizontal coordinate in the left and right directions. For example, the measurement data includes (measurement value, horizontal coordinate).

[0059] like Figure 5 As shown, in one detection, the first calibration module 61 will block the first measurement module 40, forming a first blind area. The blind area of ​​the Nth detection is recorded as the first blind area N; similarly, the blind area caused by the second calibration module 62 is recorded as the second blind area N.

[0060] like Figure 5 and Figure 6 As shown, after the piece to be tested is measured by the first measuring module 40 and the second measuring module 50 respectively, the piece to be tested moves upward; Figure 6 As shown, the first measurement interval of the first measurement module 40 in the N+1th detection can partially overlap with the second measurement interval of the second measurement module 50 in the Nth detection in space to form a continuous measurement interval, and a complete measurement of the test piece can be completed from left to right.

[0061] Among them, the second calibration module 62 forms a second blind area N in the Nth detection, and will be measured by the first measurement module 40 in the N+1th detection, thereby ensuring that there is no measurement blind area; similarly, the first calibration module 61 forms a first blind area N+1 in the N+1th detection, and has been measured by the second measurement module 50 in the Nth detection.

[0062] like Figure 7 As shown, except for the measurement blind area between the first and last detection (such as Figure 7 The first blind area 1 and the second blind area N+1 in the figure are used as the blind area 1, and the other areas of the DUT are measured by the first measurement module 40 and the second measurement module 50. The first two blind areas can be set in the areas that do not need to be detected in the DUT, so as to ensure that there is no measurement blind area in the areas that need to be measured in the DUT.

[0063] Among them, Figures 5 to 7 In the figure, the black filled blind area represents that it is not measured, and the unfilled blind area represents that it is measured.

[0064] In summary, in the detection device provided by the embodiment of the present application, the first calibration module 61 and the second calibration module 62 are both located in the interval where the first measurement interval and the second measurement interval overlap in the first preset direction. The first measurement module 40 and the second measurement module 50 can be calibrated according to the calibration data of the first calibration module 61 and the second calibration module 62 in each reciprocation, which not only improves the calibration frequency and enhances the reliability of the equipment, but also eliminates the need to move the measurement module to the calibration area for calibration separately, thereby improving the efficiency of the measurement equipment; in addition, the first calibration module 61 and the second calibration module 62 have a certain spacing in the first preset direction, such as Figure 2 The first measuring module 40 is arranged at intervals along the left-right direction, so that the first measuring module 40 can measure the data of the piece to be tested that the second measuring module 50 has not measured at the second calibration module 62, and the second measuring module 50 can measure the data of the piece to be tested that the first measuring module 40 has not measured at the first calibration module 61, thereby avoiding the measurement blind spot of the piece to be tested due to the obstruction of the first calibration module 61 and the second calibration module 62.

[0065] like Figure 8 As shown, in some embodiments, when the first measurement module 40 and the second measurement module 50 move forward along the first preset direction, they perform acceleration and deceleration, uniform speed, and acceleration and deceleration motion in sequence. The first measurement interval corresponds to the first acceleration and deceleration interval M1, the first uniform speed motion interval O1, and the second acceleration and deceleration interval N1; the second measurement interval corresponds to the third acceleration and deceleration interval M2, the second uniform speed motion interval O2, and the fourth acceleration and deceleration interval N2; the first calibration module 61 is at least located in at least one of the first uniform speed motion interval O1 and the third uniform speed motion interval R1. Among them, M1=M2, O1=O2, N1=N2.

[0066] like Fig. 9 As shown, when the first measurement module 40 and the second measurement module 50 return along the first preset direction, they perform acceleration and deceleration, uniform speed, and acceleration and deceleration motion in sequence. The first measurement interval corresponds to the fifth acceleration and deceleration interval P1, the third uniform speed motion interval R1, and the sixth acceleration and deceleration interval Q1; the second measurement interval corresponds to the seventh acceleration and deceleration interval P2, the fourth uniform speed motion interval R2, and the eighth acceleration and deceleration interval Q2; the second calibration module 62 is at least located in at least one of the second uniform speed motion interval O2 and the fourth uniform speed motion interval R2. Wherein, P1 = P2, R1 = R2, Q1 = Q2.

[0067] Among them, Figure 8 and Fig. 9 In the figure, the solid line represents before exercise, and the dotted line represents after exercise.

[0068] In the detection device provided in the embodiment of the present application, the first calibration module 61 is at least located in at least one of the first uniform motion interval O1 and the third uniform motion interval R1, and the second calibration module 62 is at least located in at least one of the second uniform motion interval O2 and the fourth uniform motion interval R2. This not only avoids the standard block from generating a measurement blind spot for the test piece, but also makes the data of the uniform motion measurement more stable, and can also obtain a better calibration effect. In this embodiment, the first calibration module 61 and the second calibration module 62 are located in the uniform motion interval, which not only avoids generating a measurement blind spot for the test piece, but also allows the first measurement module 40 and the second measurement module 50 to obtain more reliable measurement data during the uniform motion, making the first calibration data and the second calibration data more reliable.

[0069] like Figure 8 As shown, in some embodiments, the second acceleration / deceleration interval N1 and the second uniform motion interval O2 at least partially overlap in the first preset direction, wherein (M1+N1) / 2<DL.

[0070] In the embodiment of the present application, the second acceleration / deceleration interval N1 can be at least partially included in the second uniform motion interval O2, thereby further reducing the usage of measurement data corresponding to the second acceleration / deceleration interval N1 as a whole, thereby further improving the reliability of the data acquisition process.

[0071] like Fig. 9 As shown, in some embodiments, the eighth acceleration / deceleration interval Q2 at least partially overlaps with the third uniform motion interval R1 in the first preset direction, wherein (P1+Q1) / 2<DL.

[0072] In the embodiment of the present application, the eighth acceleration / deceleration interval Q2 can be at least partially included in the third uniform motion interval R1, thereby further reducing the usage of measurement data corresponding to the eighth acceleration / deceleration interval Q2 as a whole, thereby further improving the reliability of the data acquisition process.

[0073] like Figure 8 and Fig. 9 As shown, in some embodiments, the second acceleration / deceleration interval N1 is completely covered by the second uniform motion interval O2 in the first preset direction, wherein (M1+N1)<DL. Also, the eighth acceleration / deceleration interval Q2 is completely covered by the third uniform motion interval R1 in the first preset direction, wherein (P1+Q1)<DL.

[0074] In the embodiment of the present application, the second acceleration / deceleration interval N1 can be entirely included in the second uniform motion interval O2, and the eighth acceleration / deceleration interval Q2 can be entirely included in the third uniform motion interval R1, thereby further subtracting the usage of the second acceleration / deceleration interval N1 and the eighth acceleration / deceleration interval Q2 and the corresponding measurement data as a whole, thereby further improving the reliability of the data acquisition process.

[0075] In some embodiments, the first acceleration / deceleration interval M1 and the second acceleration / deceleration interval N1 have the same length in the first preset direction. The fifth acceleration / deceleration interval P1 and the eighth acceleration / deceleration interval Q2 have the same length in the first preset direction.

[0076] In some embodiments, the first acceleration / deceleration interval M1 and the eighth acceleration / deceleration interval Q2 have the same length in the first preset direction; the second acceleration / deceleration interval N1 and the fifth acceleration / deceleration interval P1 have the same length in the first preset direction.

[0077] In the above two embodiments, by setting the acceleration and deceleration intervals to be the same, the complexity of controlling the driving mechanism 30 can be reduced, and the movement of the frame 20 can be more regular, the movement of the frame 20 can be more controllable, and the measurement data can be more reliable.

[0078] like Figure 8 and Fig. 9 As shown, in some embodiments, the first uniform motion interval O1 and the third uniform motion interval R1 have an overlapping interval in the first preset direction, and the first calibration module 61 is disposed in the overlapping interval. The second uniform motion interval O2 and the fourth uniform motion interval R2 have an overlapping interval in the first preset direction, and the second calibration module 62 is disposed in the overlapping interval.

[0079] By setting the first calibration module 61 and the second calibration module 62 in the overlapping interval of the two uniform motion intervals of the reciprocating motion, not only can the measurement blind spot of the object under test be avoided, but the first calibration module 61 and the second calibration module 62 are both measured in the uniform motion interval of the reciprocating motion, and more reliable measurement data (first calibration data and second calibration data) can be obtained. In addition, a better calibration effect can be obtained.

[0080] like Figure 3 and Figure 4 As shown, in some embodiments, the frame 20 has a slot that runs through the front and back; for example, the frame 20 may be a circumferentially closed structure, and the slot may be a hollow area of ​​the circumferentially closed structure. For another example, the frame 20 may be a flat O-shaped structure, and the slot may be a hollow area of ​​the O-shaped structure.

[0081] Among them, the first measurement module 40 may include a first laser measurement component and a second laser measurement component, the first laser measurement component is installed on the upper side of the slot, the second laser measurement component is installed on the lower side of the slot, and the first laser measurement component and the second laser measurement component are opposite to each other up and down; the second measurement module 50 may include a third laser measurement component and a fourth laser measurement component, the third laser measurement component is installed on the upper side of the slot, the fourth laser measurement component is installed on the lower side of the slot, and the third laser measurement component and the fourth laser measurement component are opposite to each other up and down.

[0082] For another example, the first measurement module 40 may include a first ray generating component and a first ray receiving component, wherein the ray generating component is mounted on the upper side of the slot and the first ray receiving component is mounted on the lower side of the slot or the first ray generating component is mounted on the lower side of the slot and the first ray receiving component is mounted on the upper side of the slot. The second measurement module 50 may include a second ray generating component and a second ray receiving component, wherein the ray generating component is mounted on the upper side of the slot and the second ray receiving component is mounted on the lower side of the slot or the second ray generating component is mounted on the lower side of the slot and the second ray receiving component is mounted on the upper side of the slot.

[0083] For another example, the first measurement module 40 may include a first ultrasonic sensor, and the second measurement module 50 may include a second ultrasonic sensor.

[0084] In summary, the detection device provided in the embodiment of the present application does not limit specific detection items. For example, when measuring thickness, ultrasound, laser and radiation can be used to achieve it. When measuring other detection items, corresponding available implementation methods can be used, and the embodiment of the present application does not limit it. The specific design of the rack 20 can also be adapted according to the detection items and the implementation methods of the measurement module.

[0085] The specific process of the detection method performed by the detection device is described below. The detection device may further include a processing module, which is used to execute the detection method, such as Fig.10 As shown, the detection method may include the following steps:

[0086] Step 10: The processing module controls the driving mechanism 30 to drive the frame 20 to reciprocate in a first preset direction.

[0087] Step 20. During the movement of the rack 20, the processing module controls the first measuring module 40 to measure the workpiece to be tested and the first calibration module 61 located in a preset first measuring interval to obtain corresponding first measurement data and first calibration data; the processing module controls the second measuring module 50 to measure the workpiece to be tested and the second calibration module 62 located in a preset second measuring interval to obtain second measurement data and second calibration data.

[0088] For example, the processing module controls the driving mechanism 30 to drive the frame 20 to move according to the division of the acceleration and deceleration intervals of the first measurement interval / the second measurement interval, so as to drive the first measurement module 40 and the second measurement module 50 to accelerate, decelerate and move at a constant speed.

[0089] For another example, the processing module controls the first measuring module 40 and the second measuring module 50 to perform measurements according to a preset frequency to measure the device under test or the calibration module.

[0090] Step 31: The processing module determines whether the first measurement accuracy of the first measurement module 40 meets a preset accuracy requirement according to the first calibration data.

[0091] For example, the difference △T between the first calibration data t01 and the preset standard data T01 of the first calibration module 61 is calculated, and it is determined whether the difference △T is within the preset difference range, so as to determine whether the first measurement accuracy meets the preset accuracy requirement. Alternatively, the difference percentage between the first calibration data t01 and the preset standard data T01 of the first calibration module 61 is calculated to determine, that is, (t01-T01) / T01 is calculated.

[0092] Step 41 : If the first measurement accuracy does not meet the preset accuracy requirement, the processing module calibrates the first measurement data according to the first calibration data and the preset standard data of the first calibration module 61 .

[0093] The specific calibration method for the first measurement data and the second measurement data can be set according to the actual situation. For example, taking the calibration of the first measurement data T1 as an example, the first measurement data T1 is calibrated according to the difference △T between the first calibration data t01 and the preset standard data T01 of the first calibration module 61. It can be a compensation calibration, such as T1=T1+(t01-T01). Of course, the first measurement data T1 can also be compensated and calibrated in proportion according to the size of the difference △T.

[0094] Step 32: The processing module determines whether the second measurement accuracy of the second measurement module 50 meets the preset accuracy requirement according to the second calibration data.

[0095] Step 42 : If the second measurement accuracy does not meet the preset accuracy requirement, the processing module calibrates the second measurement data according to the second calibration data and the preset standard data of the second calibration module 62 .

[0096] In step 32 and step 42 , the accuracy judgment and calibration of the first measurement data may refer to the method of step 31 and step 41 , or other available judgment and calibration methods may be used.

[0097] In some embodiments, the detection method further comprises:

[0098] In step 31 and step 41, if the first measurement accuracy meets the preset accuracy requirement, the processing module does not calibrate the first measurement data, and the current first measurement data is used as the final first measurement data; if the first measurement accuracy does not meet the preset accuracy requirement, the calibrated first measurement data is used as the final first measurement data.

[0099] In step 32 and step 42, if the second measurement accuracy meets the preset accuracy requirement, the processing module does not calibrate the second measurement data, and the current second measurement data is used as the final second measurement data; if the second measurement accuracy does not meet the preset accuracy requirement, the calibrated second measurement data is used as the final second measurement data.

[0100] Step 50: The processing module adds the data of the first measurement data corresponding to the position of the blind spot formed by the second calibration module 62 to the second measurement data, and adds the measurement data of the second measurement data corresponding to the position of the blind spot formed by the first calibration module 61 to the first measurement data.

[0101] That is, the data corresponding to the second blind area in the first measurement data is supplemented into the second measurement data; and the data corresponding to the first blind area in the second measurement data is supplemented into the first measurement data.

[0102] Step 60: The processing module integrates and removes duplicates from the supplemented first measurement data and the second measurement data to obtain measurement data corresponding to the device under test.

[0103] For example, for the measurement data of the overlapping interval between the first measurement interval and the second measurement interval, one of the first measurement data and the second measurement data may be deleted, or the first measurement data and the second measurement data of the overlapping interval may be averaged to achieve integration and deduplication.

[0104] In summary, by setting a calibration module on the rack 20, the measuring module can measure the calibration module (such as measuring the standard block) during the measurement of the workpiece to be measured. By comparing the calibration data obtained by measuring the calibration module with the preset standard data, it can be detected whether the measurement accuracy of the measuring module meets the requirements. The measuring module can be calibrated as needed, so that measurement and calibration can be achieved; two groups of measurement modules and calibration modules are set at the same time, which can complement each other in the measurement data and avoid the existence of measurement blind spots caused by the obstruction of the calibration module; through the above-mentioned detection device, measurement and calibration can be achieved, which can ensure or improve the detection efficiency and detection accuracy of the detection device.

[0105] The reliability of the measurement data can be improved by reasonably setting the division of the acceleration and deceleration interval and the uniform motion interval of the first measurement interval and the second measurement interval.

[0106] The method provided in this embodiment, the specific process of each step can be executed by the corresponding module in the detection device, that is, the specific process of each step can be used as the functional description of each module in the aforementioned detection device embodiment, and will not be repeated here.

[0107] Those skilled in the art will appreciate that all or part of the functions of the various methods in the above-mentioned embodiments can be implemented by hardware or by computer programs. When all or part of the functions in the above-mentioned embodiments are implemented by computer programs, the program can be stored in a computer-readable storage medium, and the storage medium can include: read-only memory, random access memory, disk, optical disk, hard disk, etc., and the program is executed by a computer to implement the above-mentioned functions. For example, the program is stored in the memory of the device, and when the program in the memory is executed by the processor, all or part of the above-mentioned functions can be implemented. In addition, when all or part of the functions in the above-mentioned embodiments are implemented by computer programs, the program can also be stored in a storage medium such as a server, another computer, disk, optical disk, flash disk or mobile hard disk, and can be downloaded or copied and saved in the memory of the local device, or the system of the local device is updated, and when the program in the memory is executed by the processor, all or part of the functions in the above-mentioned embodiments can be implemented.

[0108] This document is described with reference to various exemplary embodiments. However, those skilled in the art will recognize that changes and modifications may be made to the exemplary embodiments without departing from the scope of this document. For example, various operating steps and components for performing the operating steps may be implemented in different ways (e.g., one or more steps may be deleted, modified, or incorporated into other steps) depending on the specific application or considering any number of cost functions associated with the operation of the system.

[0109] Although the principles of this invention have been shown in various embodiments, many modifications of structures, arrangements, proportions, elements, materials and components particularly suitable for specific environments and operational requirements can be used without departing from the principles and scope of this invention. The above modifications and other changes or amendments will be included in the scope of this invention.

[0110] The foregoing specific description has been described with reference to various embodiments. However, those skilled in the art will recognize that various modifications and changes can be made without departing from the scope of the present disclosure. Therefore, the consideration of the present disclosure will be illustrative rather than restrictive, and all these modifications will be included in its scope. Similarly, the advantages, other advantages and solutions to the problems of various embodiments have been described above. However, the benefits, advantages, solutions to the problems and any elements that can produce these, or make them more clear, should not be interpreted as critical, necessary or necessary. The term "include" and any other variants used in this article are all non-exclusive inclusions, so that the process, method, article or device including the list of elements not only includes these elements, but also includes other elements that are not explicitly listed or do not belong to the process, method, system, article or device. In addition, the term "coupled" and any other variants used in this article refer to physical connections, electrical connections, magnetic connections, optical connections, communication connections, functional connections and / or any other connections.

[0111] Those skilled in the art will appreciate that many changes may be made to the details of the above-described embodiments without departing from the basic principles of the invention. Therefore, the scope of the present invention should be determined solely by the claims.

Claims

1. A detection device, characterized in that: Comprising: a base, a frame, a driving mechanism, a first measurement module, a second measurement module, a first calibration module, and a second calibration module; The frame is movably mounted on the base; The driving mechanism is configured to drive the frame to reciprocate in a first preset direction. The first measurement module is mounted on a first side of the frame, and the second measurement module is mounted on a second side of the frame; The first calibration module is connected to the base and is located on the first side of the frame; The second calibration module is connected to the base and is located on the second side of the frame; The first measurement module moves with the frame to form a first measurement interval; The second measurement module moves with the frame to form a second measurement interval; The movement stroke of the frame in the first preset direction is D, and the distance between the first measurement module and the second measurement module in the first preset direction is L, where L < D; both the first calibration module and the second calibration module are located in the interval where the first measurement interval and the second measurement interval overlap in the first preset direction, and the first calibration module and the second calibration module have a preset distance in the first preset direction.

2. The detection device according to claim 1, characterized in that When the first measurement module and the second measurement module move forward in the first preset direction, they perform acceleration, deceleration, uniform motion, and then acceleration and deceleration in sequence. The first measurement interval correspondingly has a first acceleration and deceleration interval M1, a first uniform motion interval O1, and a second acceleration and deceleration interval N1; the second measurement interval correspondingly has a third acceleration and deceleration interval M2, a second uniform motion interval O2, and a fourth acceleration and deceleration interval N2; When the first measurement module and the second measurement module move backward in the first preset direction, they perform acceleration, deceleration, uniform motion, and then acceleration and deceleration in sequence. The first measurement interval correspondingly has a fifth acceleration and deceleration interval P1, a third uniform motion interval R1, and a sixth acceleration and deceleration interval Q1; the second measurement interval correspondingly has a seventh acceleration and deceleration interval P2, a fourth uniform motion interval R2, and an eighth acceleration and deceleration interval Q2; Wherein, the first calibration module is at least located in at least one of the first uniform motion interval O1 and the third uniform motion interval R1; the second calibration module is at least located in at least one of the second uniform motion interval O2 and the fourth uniform motion interval R2.

3. The detection device according to claim 2, characterized in that: The second acceleration and deceleration interval N1 and the second uniform motion interval O2 at least partially overlap in the first preset direction, where (M1 + N1) / 2 < D - L; And / or, the eighth acceleration and deceleration interval Q2 and the third uniform motion interval R1 at least partially overlap in the first preset direction, where (P1 + Q1) / 2 < D - L.

4. The detection device according to claim 3, characterized in that: The second acceleration and deceleration interval N1 is completely covered by the second uniform motion interval O2 in the first preset direction, where (M1 + N1) < D - L; Moreover, the eighth acceleration and deceleration interval Q2 is completely covered by the third uniform motion interval R1 in the first preset direction, where (P1 + Q1) < D - L.

5. The detection device according to claim 4, characterized in that: The first acceleration / deceleration interval M1 and the second acceleration / deceleration interval N1 have the same length in the first preset direction; The fifth acceleration / deceleration interval P1 and the sixth acceleration / deceleration interval Q1 have the same length in the first preset direction.

6. The detection device according to claim 4, characterized in that: The first acceleration / deceleration interval M1 and the sixth acceleration / deceleration interval Q1 have the same length in the first preset direction; The second acceleration / deceleration interval N1 and the fifth acceleration / deceleration interval P1 have the same length in the first preset direction.

7. The detection device according to any one of claims 2 to 6, characterized in that: The first uniform motion interval O1 and the third uniform motion interval R1 have an overlapping interval in the first preset direction, and the first calibration module is arranged in the overlapping interval; The second uniform motion interval O2 and the fourth uniform motion interval R2 have an overlapping interval in the first preset direction, and the second calibration module is arranged in the overlapping interval.

8. The detection device according to any one of claims 2 to 6, characterized in that: The first calibration module includes a first standard block, the first standard block has a feature to be measured of the same type as the piece to be measured, and the feature to be measured has preset standard data; The second calibration module includes a second standard block, and the second standard block has a feature to be measured of the same type as the piece to be measured, and the feature to be measured has preset standard data.

9. A detection method, characterized in that: The detection device applied to any one of claims 1 to 8, wherein the detection method comprises: Controlling the driving mechanism to drive the frame to reciprocate in a first preset direction; During the movement of the rack, the first measuring module is controlled to measure the workpiece to be tested and the first calibration module located in a preset first measuring interval to obtain corresponding first measurement data and first calibration data; the second measuring module is controlled to measure the workpiece to be tested and the second calibration module located in a preset second measuring interval to obtain second measurement data and second calibration data; Determining whether a first measurement accuracy of the first measurement module meets a preset accuracy requirement according to the first calibration data; Wherein, if the first measurement accuracy does not meet the preset accuracy requirement, calibrating the first measurement data according to the first calibration data and preset standard data of the first calibration module; Determining whether a second measurement accuracy of the second measurement module meets a preset accuracy requirement according to the second calibration data; If the second measurement accuracy does not meet a preset accuracy requirement, the second measurement data is calibrated according to the second calibration data and preset standard data of the second calibration module.

10. The detection method according to claim 9, characterized in that: If the first measurement accuracy meets the preset accuracy requirement, the first measurement data is not calibrated and is used as the final first measurement data; if the first measurement accuracy does not meet the preset accuracy requirement, the calibrated first measurement data is used as the final first measurement data; If the second measurement accuracy meets the preset accuracy requirement, the second measurement data is not calibrated and is used as the final second measurement data; if the second measurement accuracy does not meet the preset accuracy requirement, the calibrated second measurement data is used as the final second measurement data; Supplement the data corresponding to the position of the second calibration module in the first measurement data to the second measurement data, and supplement the measurement data corresponding to the position of the first calibration module in the second measurement data to the first measurement data; The supplemented first measurement data and the second measurement data are integrated and deduplicated to obtain measurement data corresponding to the device under test.

11. A computer-readable storage medium, characterized in that: The medium stores a program, which can be executed by a processor to implement the method according to claim 9 or 10.

Images