Method and device for measuring position degree of core particle

Abstract

The invention relates to the field of semiconductor device technological process measurement and detection, discloses a core particle position degree measurement method, device and equipment, a computer readable storage medium and a computer program product, and is used for solving the technical problems that the measurement of the core particle position degree depends on a reference point and the measurement result is inaccurate in the prior art. The method comprises the following steps: acquiring first position information of an initial actual core particle array, and acquiring second position information of a theoretical core particle array; carrying out rotation and translation transformation on the actual core particle array so as to carry out matching fitting on the actual core particle array and the theoretical core particle array; obtaining a fitting transformation matrix corresponding to the actual core particle array when the actual core particle array and the theoretical core particle array after rotation and translation transformation reach maximum coincidence; according to the first position information and the fitting transformation matrix, calculating third position information of the actual core particle array during maximum coincidence; and calculating the core particle position degree of the actual core particle array according to the second position information and the third position information.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor device process measurement and detection, and in particular to a method, device, equipment, computer storage medium and computer program product for measuring the position of a core particle. Background Art

[0002] In the manufacturing process of semiconductor devices, for example, in the semiconductor multi-chip integrated packaging scenario, chiplet packaging technology needs to be applied. Semiconductor chips are integrated with multiple small chips. Chips can be manufactured based on different wafer processes and high-density interconnection can be achieved, so low-cost, low-energy, and high-performance chips can be obtained. For example, in the new semiconductor display Micro-LED technology, Micro-LED display requires tens of thousands of micron-level chips to be neatly distributed on the display screen to achieve interconnection and control, and achieve high contrast, high brightness, long life, and low energy consumption. Display; and the production and manufacturing of radio frequency or high-performance computing chips, different functional chips are manufactured by different processes, and then multi-chip fan-out packaging (multi-chip Fan out) is used to achieve high-density interconnection. When multiple chips are arranged on the carrier to form a repeated matrix structure for display, the position accuracy of the chips needs to be guaranteed to achieve reliable electrical interconnection. Therefore, monitoring the position of the chips is a necessary method to ensure the reliability of the chip products.

[0003] In general, when measuring the position of a core particle, the position reference point within the imaging field of view (shot) is usually used as a reference, and the position of the core particle is calculated by pixel. This method relies on the existence of a position reference point, and also needs to ensure the position accuracy of the position reference point. However, in the core particle manufacturing process, such as on a temporary carrier or a plastic sealing plate, the reference points cannot be densely arranged, and it cannot be guaranteed that there are position reference points in each imaging field of view, or the position error of the position reference point itself will also cause the position of the core particle to deviate, resulting in the inability to accurately measure the position of the core particle. Therefore, there is an urgent need for a method for measuring the position of a core particle, which can realize the measurement of the position of the core particle without the need for an external reference point within the local field of view, and can obtain a relatively accurate measurement result. Summary of the invention

[0004] The main purpose of the present invention is to solve the technical problem in the prior art that the measurement of the core particle position depends on the reference point and the measurement result is inaccurate.

[0005] The first aspect of the present invention provides a method for measuring the position of a core particle, comprising:

[0006] Acquire the initial first position information of the actual core particle array, and acquire the second position information of the theoretical core particle array;

[0007] Performing rotation and translation transformation on the actual core particle array to match and fit with the theoretical core particle array;

[0008] Obtaining a fitting transformation matrix corresponding to the actual core particle array when the actual core particle array after rotation and translation transformation reaches maximum overlap with the theoretical core particle array;

[0009] Calculate the third position information of the actual core particle array when maximizing the overlap according to the first position information and the fitting transformation matrix;

[0010] The core particle position degrees of the actual core particle array are calculated according to the second position information and the third position information.

[0011] Optionally, in a first implementation of the first aspect of the present invention, after the actual core particle array is subjected to rotation and translation transformation, the method further includes:

[0012] Calculating the root mean square value of the distance between each core particle in the actual core particle array after the rotation and translation and the corresponding core particle in the theoretical core particle array;

[0013] When the root mean square value is the smallest, the actual core particle array after the rotation and translation transformation and the theoretical core particle array reach maximum overlap.

[0014] Optionally, in a second implementation of the first aspect of the present invention, the method for measuring the core particle position degree further includes:

[0015] Obtaining the position correspondence between each core particle in the actual core particle array and each core particle in the theoretical core particle array when the root mean square value is minimum;

[0016] The step of calculating the core particle position degree of the actual core particle array according to the second position information and the third position information comprises:

[0017] The position degree of each core particle is calculated according to the second position information, the third position information and the corresponding relationship between the positions of each core particle.

[0018] Optionally, in a third implementation of the first aspect of the present invention, the calculating the position of each core particle includes:

[0019] The horizontal deviation, vertical deviation and hypotenuse deviation between each corresponding core particle in the actual core particle array and the theoretical core particle array are calculated to obtain the position of the core particle.

[0020] Optionally, in a fourth implementation of the first aspect of the present invention, the step of obtaining the initial first position information of the actual core particle array includes:

[0021] Acquire a calibration plate image containing a plurality of feature points with known positions to obtain a matrix image of the feature points;

[0022] Acquire the pixel coordinates of each feature point according to the matrix image of the feature points;

[0023] According to the coordinates of the known feature points of the calibration plate and the coordinates of the image feature points, the world coordinates of the motion platform are calibrated to obtain a calibration algorithm;

[0024] The pixel coordinates of each core particle in the core particle matrix arranged on the substrate plane are obtained, and the pixel coordinates of each core particle are converted according to the calibration algorithm to obtain the initial first position information of the actual core particle array.

[0025] Optionally, in a fifth implementation of the first aspect of the present invention, after calculating the core particle position degrees of the actual core particle array according to the second position information and the third position information, the method further includes:

[0026] According to a preset defect judgment rule, the defect degree of the actual chip array is evaluated based on the chip position.

[0027] A second aspect of the present invention provides a device for measuring the position of a core particle, comprising:

[0028] A first position acquisition module, used to acquire the initial first position information of the actual core particle array and acquire the second position information of the theoretical core particle array;

[0029] A fitting module, used for performing rotation and translation transformation on the actual core particle array to match and fit with the theoretical core particle array;

[0030] A matrix calculation module, used for obtaining a fitting transformation matrix corresponding to the actual core particle array when the actual core particle array after rotation and translation transformation reaches maximum overlap with the theoretical core particle array;

[0031] A second position acquisition module, used for calculating third position information of the actual core particle array when maximizing overlap according to the first position information and the fitting transformation matrix;

[0032] The position calculation module is used to calculate the core particle position of the actual core particle array according to the second position information and the third position information.

[0033] The third aspect of the present invention provides a device for measuring the position of a core particle, comprising: a motion platform, an image acquisition unit, a memory and at least one processor, wherein the memory stores instructions; the at least one processor calls the instructions in the memory to enable the device for measuring the position of a core particle to perform the steps of the above-mentioned method for measuring the position of a core particle.

[0034] A fourth aspect of the present invention provides a computer-readable storage medium, wherein the computer-readable storage medium stores instructions, which, when executed on a computer, enable the computer to execute the steps of the above-mentioned method for measuring the core particle position.

[0035] A fifth aspect of the present invention provides a computer program product, comprising a computer program / instruction, characterized in that when the computer program / instruction is executed by a processor, the steps of the method for measuring the core particle position as described above are implemented.

[0036] In the technical solution provided by the present invention, the first position information of the initial actual core particle array is obtained, and the second position information of the theoretical core particle array is obtained; the actual core particle array is subjected to rotation and translation transformation to match and fit with the theoretical core particle array; the fitting transformation matrix corresponding to the actual core particle array is obtained when the actual core particle array and the theoretical core particle array after the rotation and translation transformation reach maximum overlap; the third position information of the actual core particle array when the overlap is maximized is calculated based on the first position information and the fitting transformation matrix; the core particle position degree of the actual core particle array is calculated based on the second position information and the third position information. This method can realize the measurement of the core particle position degree without the need for internal and external reference points in the local field of view, and can obtain relatively accurate measurement results. The device, equipment, computer-readable storage medium and computer program product provided by the present invention also solve the corresponding technical problems. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0038] Figure 1 It is a flow chart of an embodiment of a method for measuring the position of a core particle in an embodiment of the present invention;

[0039] Figure 2 A schematic diagram of the core particle positions of a theoretical core particle array and an actual core particle array in one embodiment of a method for measuring the core particle position degree in an embodiment of the present invention;

[0040] Figure 3 A schematic diagram of core particle positions when a theoretical core particle array and an actual core particle array are overlapped to the maximum extent in one embodiment of a method for measuring core particle positions in an embodiment of the present invention;

[0041] Figure 4 A schematic diagram of the deviation of the core particle position in one embodiment of the method for measuring the core particle position degree in an embodiment of the present invention;

[0042] Figure 5 A schematic diagram of an embodiment of a device for measuring the position of a core particle in an embodiment of the present invention;

[0043] Figure 6 Schematic diagram of an embodiment of a device for measuring the position of a core particle in an embodiment of the present invention. DETAILED DESCRIPTION

[0044] Exemplary embodiments of the present invention will now be described more fully with reference to the accompanying drawings. However, exemplary embodiments can be implemented in a variety of forms, and should not be construed as limiting the present invention to the embodiments set forth herein. On the contrary, providing these exemplary embodiments enables the present invention to be more comprehensive and complete, and is more convenient for fully conveying the inventive concept to those skilled in the art. The same reference numerals in the figures represent the same or similar elements, components or parts, and thus their repeated description will be omitted.

[0045] Under the premise of being consistent with the technical concept of the present invention, the features, structures, characteristics or other details described in a specific embodiment do not exclude that they can be combined in one or more other embodiments in a suitable manner.

[0046] In the description of specific embodiments, the features, structures, characteristics or other details described in the present invention are intended to enable those skilled in the art to fully understand the embodiments. However, it does not exclude that those skilled in the art can practice the technical solutions of the present invention without one or more of the specific features, structures, characteristics or other details.

[0047] The flowcharts shown in the accompanying drawings are only exemplary and do not necessarily include all the contents and operations / steps, nor must they be executed in the order described. For example, some operations / steps can be decomposed, and some operations / steps can be combined or partially combined, so the actual execution order may change according to actual conditions.

[0048] The block diagrams shown in the accompanying drawings are merely functional entities and do not necessarily correspond to physically independent entities. That is, these functional entities may be implemented in software form, or in one or more hardware modules or integrated circuits, or in different networks and / or processor devices and / or microcontroller devices.

[0049] The term "and / or" or "and / or" includes all combinations of any one or more of the associated listed items.

[0050] See also Figure 1-Figure 4 An embodiment of a method for measuring the core particle position in an embodiment of the present invention includes the following contents:

[0051] In this embodiment, for a chip array, the overall offset and rotation can be corrected by translation and rotation in the subsequent process flow, so the overall offset and rotation cannot be regarded as a defect. The real defect of concern is some locally deviated chips in the overall chip array. The local offset refers to the reference represented by the entire chip array, that is, the so-called chip array itself as a reference. Positionality refers to the deviation of a certain design element from the ideal position. In this embodiment, the positionality of the core particle refers to the deviation value of the position of each core particle in the actual core particle array from the ideal position. It can be measured by comparing the actual core particle array with the standard position when it was originally designed. Based on this, this embodiment proposes a method for measuring the positionality of the core particles by self-reference.

[0052] S101, obtaining the first position information of the initial actual core particle array, and obtaining the second position information of the theoretical core particle array;

[0053] It is understandable that the subject of the present invention may be a device for measuring the position of a core particle, or may be a device for measuring the position of a core particle, which is not specifically limited herein. The embodiment of the present invention is described by taking a device for measuring the position of a core particle as an example of the subject of the present invention.

[0054] In the first aspect of this step, in this embodiment, the first position information of the initial actual chip array is first obtained, and the first position information can be the position coordinates of each chip position of the initial actual chip array. The position coordinates can be the position coordinates in the world coordinate system determined based on the motion platform.

[0055] The position coordinates in the world coordinate system determined based on the motion platform include: collecting a calibration plate image containing multiple feature points with known positions to obtain a matrix image of the feature points; obtaining the pixel coordinates of each feature point based on the matrix image of the feature points; calibrating the world coordinates of the motion platform based on the coordinates of the known feature points of the calibration plate and the coordinates of the image feature points to obtain a calibration algorithm; obtaining the pixel coordinates of each core particle of the core particle matrix arranged on the substrate plane, and converting the pixel coordinates of each core particle according to the calibration algorithm to obtain the first position information of the initial actual core particle array.

[0056] In a specific embodiment, the core particle position measurement device used in the present embodiment to determine the position coordinates in the world coordinate system includes a motion platform that can provide high repeatability, and its repeatability in the entire effective stroke is 10 to 1000 nm, which can be a mechanical screw or air suspension or magnetic suspension; the motion platform includes a high-precision grating ruler, which can be used to record the position of the motion platform at each moment, and the resolution of the grating ruler is 2 to 200 nm. In a preferred embodiment, the repeatability of the motion platform in the entire effective stroke can be 20 to 200 nm.

[0057] A substrate plane that remains relatively still with the motion platform is placed on the motion platform. The substrate plane remains relatively still with the motion platform through static friction, vacuum adsorption, etc. The substrate plane can be made of glass, sapphire, steel plate, resin, etc. An image acquisition unit is arranged above the motion platform. The image acquisition unit is arranged in a direction perpendicular to the motion platform and the substrate plane. It can acquire images of a calibration plate arranged on the motion platform, wherein the calibration plate contains multiple feature points with known positions; the image acquisition unit can also acquire and acquire images of all core particles contained on the substrate plane on the motion platform or acquire multiple images of the core particles contained on the substrate plane and splice them to obtain images of all core particles contained on the substrate plane on the motion platform; the image acquisition unit can specifically be a wired scanning camera, a surface array camera, and other cameras.

[0058] A world coordinate system is constructed based on the calibration plate, and a motion coordinate system is constructed based on the motion axis of the motion platform. In this embodiment, based on the positional relationship between the calibration plate and the motion platform, the world coordinate system and the motion coordinate system are in a parallel projection mapping relationship. A fixture is also connected to the core particle position measurement device, and the fixture is used to connect the image acquisition unit. A tool coordinate system is constructed based on the end of the fixture. According to the positional relationship between the fixture and the motion axis, the coordinates in the motion coordinate system and the tool coordinate system can be converted to each other. An image coordinate system associated with the image acquisition unit is constructed. When the image acquisition unit is fixed to the fixture, the coordinates in the image coordinate system and the tool coordinate system can be converted to each other. In summary, there is a radial transformation matrix between each coordinate system. According to the relationship between the above coordinate systems, the world coordinate value of each core particle position can be obtained based on the coordinates in the image coordinate system.

[0059] In the second aspect of this step, in this embodiment, the second position information of the theoretical core particle array is also obtained. The second position information of the theoretical core particle array can be the position coordinates of each core particle in the theoretical core particle array during design, or can be the relative position information between each core particle in the theoretical core particle array, for example, the theoretical horizontal spacing and theoretical vertical spacing of each core particle in the theoretical core particle array; in a specific embodiment, the theoretical chip array can be defined as (pitch_h*j, pitch_v*i), where pitch_h is the theoretical horizontal spacing, pitch_v is the theoretical vertical spacing, i is the row number of the core particle, and j is the column number of the core particle. According to the spacing information between each core particle in the theoretical chip array, a core particle position point can be randomly selected in the theoretical chip array and assigned a point coordinate in the world coordinate, so as to obtain the position coordinates of each core particle point in the theoretical core particle array.

[0060] S102, performing rotation and translation transformation on the actual core particle array to match and fit with the theoretical core particle array;

[0061] See also Figure 2 The schematic diagram of the position of each core particle in the actual core particle array and the theoretical core particle array is shown in FIG. After obtaining the actual core particle array and the theoretical core particle array, since the actual core particle array is arranged and manufactured based on the theoretical core particle array, in an ideal case, except for the inevitable errors generated during manufacturing, the actual core particle array should be able to basically overlap with the theoretical core particle array. Therefore, there is a rigid body transformation matrix between the actual core particle array and the theoretical core particle array, which can maximize the overlap effect between the actual core particle array and the theoretical core particle array.

[0062] When performing specific matching and fitting, since there are errors in the arrangement of the actual core particle array, it is possible that the two cannot completely overlap all points through translation and rotation. In this embodiment, it is necessary to find the situation in which the overall point set of the actual core particle array overlaps with the theoretical core particle array to the greatest extent, so it is necessary to perform rotation and translation transformation on the actual core particle array for matching and fitting. For example, the matrix centroids of the actual core particle array and the theoretical core particle array can be calculated respectively, and the centroids are aligned, and the core particle points contained between the actual core particle array and the theoretical core particle array are paired by the nearest neighbor search method; based on the obtained paired point set, the rotation amount and translation amount are calculated by the least squares method (also known as the least square method) so that the distance between the two sets of point sets corresponding to the actual core particle array and the theoretical core particle array is minimized, and the root mean square error (RMSE) is calculated to measure the quality of the current match; based on the quality of the match, the pairing process is repeated iteratively until the error value converges to obtain the final optimal rotation amount and optimal translation amount.

[0063] In a specific implementation, a variety of fitting algorithms can be used when performing matching fitting. Figure 3 In a specific embodiment, the least square method can be used for fitting. After obtaining the first position coordinate and the second position coordinate, the actual core array is rotated and translated based on the least square method so that the actual core array and the theoretical chip array are overlapped to the maximum extent. Specifically, the root mean square (RMS) of the distance between each core after each rotation and translation is obtained until the root mean square value of the distance is the smallest; Figure 3 As shown in A and B, although the positions of the core particles may still have some deviations at this time, it is considered that the maximum overlap is achieved in the evaluation method of minimizing the root mean square value of the distance. In the process of calling the least squares method for fitting, a variety of optimization algorithms can be used to simplify the fitting process and quickly obtain the maximum overlap effect after matching fitting, which will not be repeated here.

[0064] S103, obtaining a fitting transformation matrix corresponding to the actual core particle array when the actual core particle array after rotation and translation transformation reaches maximum overlap with the theoretical core particle array;

[0065] Based on the above-mentioned specific operations of rotation and translation, a fitting transformation matrix is ​​obtained when the actual core particle array and the theoretical core particle array reach maximum overlap, that is, when the root mean square value of the distance is the smallest. When solving the fitting transformation matrix, a singular value decomposition (SVD) method can be used for solving.

[0066] S104, calculating third position information of the actual core particle array when maximizing overlap according to the first position information and the fitting transformation matrix;

[0067] The third position information of the actual core particle array is calculated according to the fitting transformation matrix when the RMS value of the distance is the smallest. In this embodiment, the third position information is the position coordinates of the core particles of the actual core particle array after the fitting transformation.

[0068] S105 , calculating the core particle position degree of the actual core particle array according to the second position information and the third position information.

[0069] Please continue reading Figure 3 as well as Figure 4 ,in, Figure 4 Hint Figure 3 The deviation values ​​obtained during position measurement using point A as an example include three types of deviation values: vertical deviation, horizontal deviation and hypotenuse deviation (or Euclidean deviation).

[0070] In addition, the core position test also includes the following: Figure 3The situation of missing core particles shown at B in the figure; when matching and fitting the actual core particle array and the theoretical core particle array in step S102, when the pairing relationship of the core particle points between the two arrays is obtained, when some points in the actual core particle array are missing core particles, some core particle points in the theoretical core particle array cannot be matched to the corresponding core particle points, and at this time, it is considered that the core particle position at this point is the maximum deviation value, and the maximum deviation value can be a preset value set according to the distance between the core particle points. The method in this embodiment can accurately measure and calculate the core particle position, and its accuracy can reach a core particle position tolerance of less than 20um, and the device position measurement repeatability is good.

[0071] In this embodiment, the defect degree of the actual chip array is evaluated based on the chip position according to preset defect judgment rules. Specifically, the defect degree of the actual chip array can be evaluated based on the measured chip position and missing status.

[0072] The method in the embodiment of the invention can be achieved without the need for internal or external reference points in the local field of view. Instead, the actual core particle matrix and the theoretical core particle matrix during design are matched and fitted to perform matching and alignment through a self-reference method, and the position information of each corresponding core particle when the overlap is maximized is obtained, thereby obtaining and calculating the core particle position accuracy, eliminating the steps of setting a reference reference point and calculating the deviation of the reference reference point one by one, simplifying the steps of calculating and measuring the core particle position accuracy, reducing the difficulty of calculating the core particle position accuracy when the core particle array as a whole rotates, and being able to obtain more accurate measurement results.

[0073] In a specific embodiment, the core particle position measurement method can be used in a product manufacturing process, such as a display element manufacturing process of a Micro-LED display screen. After the core particles are fixed on the substrate plane by core particle transfer or other means during manufacturing, the core particle position measurement method in this application can be used to determine whether the current core particle positions meet the requirements. If they meet the requirements, the current product is considered to be qualified, and the next product, such as a Micro-LED display screen, is manufactured based on the qualified display element. The core particle integrated components and products manufactured by this method can have a higher pass rate, and improve the detection efficiency in the production process and the yield rate of the product.

[0074] The above describes the method for measuring the position of the core particle in the embodiment of the present invention. The following describes the device for measuring the position of the core particle in the embodiment of the present invention. Figure 5 , an embodiment of the device for measuring the position of a core particle in the embodiment of the present invention comprises:

[0075] A first position acquisition module 501 is used to acquire the initial first position information of the actual core particle array and acquire the second position information of the theoretical core particle array;

[0076] A fitting module 502 is used to perform rotation and translation transformation on the actual core particle array to match and fit with the theoretical core particle array;

[0077] A matrix calculation module 503 is used to obtain a fitting transformation matrix corresponding to the actual core particle array when the actual core particle array after rotation and translation transformation reaches maximum overlap with the theoretical core particle array;

[0078] A second position acquisition module 504 is used to calculate the third position information of the actual core particle array when the overlap is maximized according to the first position information and the fitting transformation matrix;

[0079] The position calculation module 505 is used to calculate the core particle position of the actual core particle array according to the second position information and the third position information.

[0080] The embodiment of the present invention can achieve matching and alignment by matching and fitting the actual core particle matrix and the theoretical core particle matrix during design without the need for internal or external reference points in the local field of view, thereby acquiring and calculating the core particle position and obtaining relatively accurate measurement results.

[0081] In another embodiment of the present application, the fitting module 502 is specifically used for: performing a rotational translation transformation on the actual core particle array, and calculating the root mean square value of the distance between each core particle in the actual core particle array after the rotational translation and the corresponding core particle in the theoretical core particle array; when the root mean square value is the smallest, the actual core particle array after the rotational translation transformation and the theoretical core particle array achieve maximum overlap, thereby matching and fitting with the theoretical core particle array.

[0082] In another embodiment of the present application, the matrix calculation module 503 is further used for:

[0083] Obtaining the position correspondence between each core particle in the actual core particle array and each core particle in the theoretical core particle array when the root mean square value is minimum;

[0084] The position calculation module 505 is further specifically configured to calculate the position of each core particle according to the second position information, the third position information and the corresponding relationship between the positions of each core particle.

[0085] In another embodiment of the present application, the position calculation module 505 is further used to calculate the horizontal deviation, vertical deviation and hypotenuse deviation between each corresponding core in the actual core array and the theoretical core array to obtain the position of the core.

[0086] In another embodiment of the present application, the first position acquisition module 501 is specifically used to collect a calibration plate image containing multiple feature points with known positions to obtain a matrix image of the feature points; obtain the pixel coordinates of each feature point based on the matrix image of the feature points; calibrate the world coordinates of the motion platform based on the coordinates of the known feature points of the calibration plate and the coordinates of the image feature points to obtain a calibration algorithm; obtain the pixel coordinates of each core particle of the core particle matrix arranged on the substrate plane, and convert the pixel coordinates of each core particle according to the calibration algorithm to obtain the first position information of the initial actual core particle array.

[0087] In another embodiment of the present application, the device for measuring the chip position degree further includes a defect assessment module, and the defect assessment module is specifically used to: evaluate the defect degree of the actual chip array based on the chip position degree according to preset defect judgment rules.

[0088] The embodiments of the present invention can achieve matching and alignment without the need for internal or external reference points in the local field of view. Instead, the actual core particle matrix and the theoretical core particle matrix during design are matched and fitted by a self-reference method to obtain the position information of each corresponding core particle when the overlap is maximized, thereby acquiring and calculating the core particle position accuracy, eliminating the steps of setting a reference reference point and calculating the deviation of the reference reference point one by one, simplifying the steps of calculating and measuring the core particle position accuracy, reducing the difficulty of calculating the core particle position accuracy when the core particle array as a whole rotates, and being able to obtain more accurate measurement results.

[0089] See also Figure 6 Based on the same inventive concept, the embodiment of this specification also provides a core particle position measurement device, the core particle position measurement device includes: a motion platform 601, an image acquisition unit 602, a memory and at least one processor; the motion platform 601 adopts a mechanical screw or air floating or magnetic suspension, and its repeated positioning accuracy within the entire effective stroke is 10 to 1000nm; the motion platform 601 also has a grating ruler 603 that can record the position of the motion platform, and the resolution of the grating ruler 603 is 2 to 200nm.

[0090] During operation, the core particle matrix 604 is arranged on a substrate plane 605, and the substrate plane 605 remains relatively still with the motion platform 601 through static friction, vacuum adsorption, etc.; the substrate plane 605 is glass, sapphire, steel plate, or resin plate.

[0091] An image acquisition unit 602 is arranged above the motion platform. The image acquisition unit 602 is arranged in a direction perpendicular to the motion platform 601 and the substrate plane 605. It can acquire images of all core particles contained on the substrate plane 605 on the motion platform 601 or acquire multiple images of the core particles contained on the substrate plane 605 and stitch them together to obtain images of all core particles contained on the substrate plane 605 on the motion platform 601. The image acquisition unit 602 can specifically be a wired scanning camera, an area array camera or other cameras.

[0092] The device for measuring the core particle position can execute the steps of the method for measuring the core particle position as described in the above embodiments.

[0093] Based on the same inventive concept, the embodiment of this specification also provides a computer-readable medium, on which a computer program / instruction is stored, characterized in that the program / instruction is executed by the processor to implement the steps of the method for measuring the position of the core particle as described in the above embodiment. The computer program can be stored on one or more computer-readable media. The computer-readable medium can be a readable signal medium or a readable storage medium. The readable storage medium can be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, device or device, or any combination of the above. More specific examples of readable storage media (non-exhaustive list) include: an electrical connection with one or more wires, a portable disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above.

[0094] The computer readable storage medium may include a data signal propagated in a baseband or as part of a carrier wave, wherein a readable program code is carried. This propagated data signal may take a variety of forms, including but not limited to an electromagnetic signal, an optical signal, or any suitable combination of the above. The readable storage medium may also be any readable medium other than a readable storage medium, which may send, propagate, or transmit a program for use by an instruction execution system, an apparatus, or a device or used in combination with it. The program code contained on the readable storage medium may be transmitted with any appropriate medium, including but not limited to wireless, wired, optical cable, RF, etc., or any suitable combination of the above.

[0095] Program code for performing the operations of the present invention may be written in any combination of one or more programming languages, including object-oriented programming languages ​​such as Java, C++, etc., and conventional procedural programming languages ​​such as "C" or similar programming languages. The program code may be executed entirely on the user computing device, partially on the user device, as a separate software package, partially on the user computing device and partially on a remote computing device, or entirely on a remote computing device or server. In the case of a remote computing device, the remote computing device may be connected to the user computing device through any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computing device (e.g., through the Internet using an Internet service provider).

[0096] In summary, the present invention can be implemented in hardware, or in a software module running on one or more processors, or in a combination thereof. It should be understood by those skilled in the art that general data processing devices such as microprocessors or digital signal processors (DSPs) can be used in practice to implement some or all of the functions of some or all of the components in the embodiments of the present invention. The present invention can also be implemented as a device or apparatus program (e.g., a computer program and a computer program product) for executing part or all of the methods described herein. Such a program implementing the present invention can be stored on a computer-readable medium, or can have the form of one or more signals. Such a signal can be downloaded from an Internet website, or provided on a carrier signal, or provided in any other form.

[0097] In addition, the present invention also provides a computer program product, including a computer program / instruction, which, when executed by a processor, implements the steps of the method for measuring the core particle position as described in the above embodiments.

[0098] The specific embodiments described above further describe the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the present invention is not inherently related to any specific computer, virtual device or equipment, and various general devices can also implement the present invention. The above description is only a specific embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection scope of the present invention.

[0099] The various embodiments in this specification are described in a progressive manner, and the same or similar parts between the various embodiments can be referenced to each other, and each embodiment focuses on the differences from other embodiments.

[0100] The above is only an embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.

Claims

1. A method for measuring the position of a core particle, characterized in that: include: Acquire the initial first position information of the actual core particle array, and acquire the second position information of the theoretical core particle array; Performing rotation and translation transformation on the actual core particle array to match and fit with the theoretical core particle array; Obtaining a fitting transformation matrix corresponding to the actual core particle array when the actual core particle array after rotation and translation transformation reaches maximum overlap with the theoretical core particle array; Calculate the third position information of the actual core particle array when maximizing the overlap according to the first position information and the fitting transformation matrix; The core particle position degrees of the actual core particle array are calculated according to the second position information and the third position information.

2. The method for measuring the core particle position according to claim 1, characterized in that: After the actual core particle array is subjected to rotation and translation transformation, the method further includes: Calculating the root mean square value of the distance between each core particle in the actual core particle array after the rotation and translation and the corresponding core particle in the theoretical core particle array; When the root mean square value is the smallest, the actual core particle array after the rotation and translation transformation and the theoretical core particle array reach maximum overlap.

3. The method for measuring the core particle position according to claim 2, characterized in that: The method for measuring the core particle position degree also includes: Obtaining the position correspondence between each core particle in the actual core particle array and each core particle in the theoretical core particle array when the root mean square value is minimum; The step of calculating the core particle position degree of the actual core particle array according to the second position information and the third position information comprises: The position degree of each core particle is calculated according to the second position information, the third position information and the corresponding relationship between the positions of each core particle.

4. The method for measuring the core particle position according to claim 3, characterized in that: The calculation of the position of each core particle comprises: The horizontal deviation, vertical deviation and hypotenuse deviation between each corresponding core particle in the actual core particle array and the theoretical core particle array are calculated to obtain the position of the core particle.

5. The method for measuring the core particle position according to any one of claims 1 to 4, characterized in that: The obtaining of the initial first position information of the actual core particle array comprises: Acquire a calibration plate image containing multiple feature points with known positions to obtain a matrix image of the feature points; Acquire the pixel coordinates of each feature point according to the matrix image of the feature points; According to the coordinates of the known feature points of the calibration plate and the coordinates of the image feature points, the world coordinates of the motion platform are calibrated to obtain a calibration algorithm; The pixel coordinates of each core particle in the core particle matrix arranged on the substrate plane are obtained, and the pixel coordinates of each core particle are converted according to the calibration algorithm to obtain the initial first position information of the actual core particle array.

6. The method for measuring the core particle position according to any one of claims 1 to 4, characterized in that: After calculating the core particle position of the actual core particle array according to the second position information and the third position information, the method further includes: According to a preset defect judgment rule, the defect degree of the actual chip array is evaluated based on the chip position.

7. A device for measuring the position of a core particle, characterized in that: The device for measuring the core particle position comprises: A first position acquisition module, used to acquire the initial first position information of the actual core particle array and acquire the second position information of the theoretical core particle array; A fitting module, used for performing rotation and translation transformation on the actual core particle array to match and fit with the theoretical core particle array; A matrix calculation module, used for obtaining a fitting transformation matrix corresponding to the actual core particle array when the actual core particle array after rotation and translation transformation reaches maximum overlap with the theoretical core particle array; A second position acquisition module, used for calculating third position information of the actual core particle array when maximizing overlap according to the first position information and the fitting transformation matrix; The position calculation module is used to calculate the core particle position of the actual core particle array according to the second position information and the third position information.

8. A device for measuring the position of a core particle, characterized in that: The device for measuring the core particle position comprises: a motion platform, an image acquisition unit, a memory and at least one processor, wherein the memory stores instructions; The at least one processor calls the instructions in the memory to enable the device for measuring the position of the core grain to perform the steps of the method for measuring the position of the core grain according to any one of claims 1 to 6.

9. A computer-readable storage medium having a computer program / instruction stored thereon, characterized in that: When the program / instructions are executed by a processor, the steps of the method for measuring the position of a core particle as described in any one of claims 1 to 6 are implemented.

10. A computer program product comprising a computer program / instructions, characterized in that When the computer program / instructions are executed by a processor, the steps of the method for measuring the position of a core particle according to any one of claims 1 to 6 are implemented.

Images