Spraying structure and coating equipment

Abstract

The invention belongs to the technical field of vacuum coating, and discloses a spraying structure and coating device.The spraying structure comprises a spraying body and a control valve, the spraying body is provided with a plurality of air inlet channels extending in the second direction at intervals in the first direction, and each air inlet channel communicates with a plurality of spraying channels arranged at intervals in the second direction; the spraying channels communicated with one of the two adjacent air inlet channels and the spraying channels communicated with the other of the two adjacent air inlet channels are arranged in a one-to-one staggered mode in the second direction, and spraying openings are formed in the spraying channels; control valves are communicated between the spraying channels and the air inlet channels and used for adjusting the opening degree between the corresponding air inlet channels and the spraying channels. According to the spraying structure provided by the invention, the opening degree between the corresponding gas inlet channel and the spraying channel is adjusted through the control valve, so that the flow of process gas sprayed out of each spraying opening can be kept consistent, the uniformity of the thickness of a plate surface film of a to-be-coated part is effectively ensured, and the coating quality is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating, and in particular to a spray structure and coating equipment. Background Art

[0002] Atomic layer deposition (ALD) is a method of depositing a substance layer by layer on a substrate surface in the form of a single atomic film. In this process, two or more chemical vapor precursors react chemically on the substrate surface in sequence to produce a solid film.

[0003] In the related art, the air inlet channel of the ALD vacuum coating equipment is relatively long. When coating large panels to be coated, such as 1400×1350mm panels to be coated, the flow rates of the process gases sprayed out from the spray outlets connected to the air inlet channel vary greatly, which may cause uneven film thickness on the panel surface of the panel to be coated and affect the coating quality. Summary of the invention

[0004] An object of the present invention is to provide a spray structure that effectively ensures that the flow rate of process gas sprayed from each spray port remains consistent.

[0005] To achieve this object, the present invention adopts the following technical solutions:

[0006] A spray structure is provided, comprising:

[0007] A spray body, wherein a plurality of air inlet channels extending along a second direction are arranged at intervals along a first direction, each of the air inlet channels is connected to a plurality of spray channels arranged at intervals along the second direction, the spray channels connected to one of two adjacent air inlet channels and the spray channels connected to the other are arranged one by one in an alternating manner along the second direction, and spray ports are arranged on the spray channels; wherein the first direction and the second direction intersect;

[0008] A control valve is provided between the spray channel and the air intake channel, and is used to adjust the opening between the corresponding air intake channel and the spray channel.

[0009] Optionally, the spray channel includes at least one branch channel extending along the first direction, the branch channel is provided with a plurality of the spray ports at intervals along the first direction, and the branch channel connected to one of two adjacent air inlet channels and the branch channel connected to the other are alternately arranged one by one along the second direction.

[0010] Optionally, a central area of ​​the branch channel along the first direction is connected to the corresponding control valve.

[0011] Optionally, along the first direction, the first end of the branch channel of the spray channel connected to the outermost air intake channel is connected to the corresponding control valve, and the second end extends toward the area between the two outermost air intake channels.

[0012] Optionally, the spray channel further includes a main channel communicating with the branch channel, the main channel extends along the second direction, and the main channel is communicated with the control valve.

[0013] Optionally, along the second direction, a carrier gas channel is provided between adjacent branch channels, the carrier gas channel has an air jet, and a reflux channel is provided between adjacent air jets and the spray port.

[0014] Optionally, the spray body includes an air intake plate and a spray plate arranged along a third direction, the air intake plate is provided with the air intake channel, and the spray plate is provided with the spray channel; wherein the third direction intersects with the plane where the first direction and the second direction are located.

[0015] Optionally, the spray body further includes a heating plate, and the heating plate is arranged on a side of the air inlet plate away from the spray plate along the third direction.

[0016] Optionally, a cover plate is further included, a cavity is formed between the cover plate and the spray body, and an air extraction hole communicating with the cavity is provided on the cover plate.

[0017] Optionally, the spray body is provided with N channel groups, each channel group includes at least one air inlet channel, and all the air inlet channels of the same channel group pass through the same process gas, and along the first direction, an air inlet channel is provided between two adjacent air inlet channels in the same channel group; wherein N≥2.

[0018] Another object of the present invention is to provide a coating device, comprising:

[0019] The device body is provided with a reaction chamber;

[0020] The spray structure described in any one of the above items is arranged in the equipment body, and the spray port on the spray body of the spray structure is connected to the reaction chamber.

[0021] Another object of the present invention is to provide a spraying method, which is applied to any one of the above-mentioned spraying structures, and is characterized by comprising the following steps:

[0022] A process gas is introduced into the air inlet end of the air inlet channel, and a control valve is controlled to adjust the opening between the air inlet channel and the spray channel; wherein, among the spray channels connected to the same air inlet channel, the opening of the control valve connected to at least one of the spray channels closest to the air inlet end of the air inlet channel is smaller than the opening of the control valves connected to the remaining spray channels.

[0023] Beneficial effects:

[0024] The spray structure provided by the present invention respectively introduces different process gases into two adjacent air inlet channels along the first direction, and sprays out through the spray ports on the corresponding spray channels and acts on the parts to be coated to complete the coating. Among them, the setting of multiple air inlet channels can reduce the length of the air inlet channels and effectively reduce the flow rate differences of the process gases sprayed from each spray port; the opening between the corresponding air inlet channels and the spray channels is adjusted by the control valve so that the flow rate of the process gas flowing into each spray channel can be kept consistent, and then the flow rate of the process gas sprayed from each spray port can be kept consistent, thereby effectively ensuring the uniform film thickness of the plate surface of the parts to be coated and improving the coating quality.

[0025] The coating equipment provided by the present invention effectively ensures uniform film thickness on the plate surface of the piece to be coated by setting a spray structure, thereby improving the coating quality.

[0026] In the spraying method provided by the present invention, in the spray channels connected to the same air inlet channel, the opening degree of the control valve connected to at least one spray channel closest to the air inlet end of the air inlet channel is smaller than the opening degree of the control valve connected to the remaining spray channels, so that the flow rate of the process gas sprayed from the spray port remains consistent, effectively ensuring the uniform film thickness on the plate surface of the part to be coated, and improving the coating quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a structural schematic diagram of an implementation mode of the spray body provided by the present invention;

[0028] Figure 2 It is a structural schematic diagram of an implementation mode of the spray channel provided by the present invention;

[0029] Figure 3 It is a structural schematic diagram of another embodiment of the spray channel provided by the present invention;

[0030] Figure 4 It is a structural schematic diagram of another embodiment of the spray channel provided by the present invention;

[0031] Figure 5 It is a schematic diagram of the arrangement relationship of the spray channels for introducing the same process gas provided by the present invention;

[0032] Figure 6It is a schematic structural diagram of an implementation scheme of an air intake channel and a spray channel provided by the present invention;

[0033] Figure 7 It is a partial structural schematic diagram of another embodiment of the spray body provided by the present invention;

[0034] Figure 8 It is a structural schematic diagram of another embodiment of the spray body provided by the present invention;

[0035] Fig. 9 is a cross-sectional view of the spray structure provided by the present invention;

[0036] Fig.10 It is a schematic flow chart of the spraying method provided by the present invention.

[0037] In the figure:

[0038] 10. Parts to be coated;

[0039] 100, spray body; 101, air inlet plate; 102, spray plate; 103, heating plate; 110, air inlet channel; 120, spray channel; 1201, spray port; 121, branch channel; 122, main channel; 130, carrier gas channel; 1301, jet port; 140, reflux channel;

[0040] 200. Control valve;

[0041] 300, cover plate; 310, cavity; 320, exhaust hole. DETAILED DESCRIPTION

[0042] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0043] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0044] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0045] In the description of this embodiment, the terms "upper", "lower", "right", etc., directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0046] Reference Figures 1 to 9 As shown, this embodiment provides a spray structure, which includes a spray body 100 and a control valve 200 .

[0047] Specifically, the spray body 100 is provided with a plurality of air inlet channels 110 extending along the second direction at intervals along the first direction, each air inlet channel 110 is connected to a plurality of spray channels 120 arranged at intervals along the second direction, and the spray channel 120 connected to one of two adjacent air inlet channels 110 and the spray channel 120 connected to the other are arranged alternately along the second direction, and a spray port 1201 is provided on the spray channel 120; a control valve 200 is connected between the spray channel 120 and the air inlet channel 110, and the control valve 200 is used to adjust the opening between the corresponding air inlet channel 110 and the spray channel 120.

[0048] It is understandable that the air intake channel 110 is provided with a plurality of air intake interfaces, and the air intake interfaces are arranged in a one-to-one correspondence with the control valves 200 , and the air intake interfaces are connected with the spray channel 120 through the control valves 200 .

[0049] It can be understood that adjusting the opening between the air inlet channel 110 and the spray channel 120 is to adjust the opening of the control valve 200 , so as to adjust the flow rate of the process gas flowing into the spray channel 120 through the air inlet channel 110 .

[0050] The first direction and the second direction intersect. Optionally, the first direction and the second direction are perpendicular to each other. The a direction in the figure is the first direction, the b direction is the second direction, the first direction may be the width direction of the spray body 100, and the second direction is the length direction of the spray body 100.

[0051] In this embodiment, two adjacent inlet channels 110 along the first direction respectively introduce different process gases, and are sprayed out through the spray ports 1201 on the corresponding spray channels 120 and act on the workpiece 10 to be coated, so as to complete the coating. It can be understood that during the coating process, the workpiece 10 to be coated can be moved along the second direction to pass under the spray structure, or the workpiece 10 to be coated can be reciprocated along the second direction to ensure that the film thickness on the board surface of the workpiece 10 to be coated is uniform.

[0052] Among them, the provision of multiple air inlet channels 110 can reduce the length of the air inlet channels 110 and effectively reduce the flow rate difference of the process gas sprayed from each spray port 1201; the opening between the corresponding air inlet channel 110 and the spray channel 120 is adjusted by the control valve 200 so that the flow rate of the process gas flowing into each spray channel 120 can be kept consistent, and then the flow rate of the process gas sprayed from each spray port 1201 can be kept consistent, thereby effectively ensuring the uniform film thickness of the board surface of the coating component 10 and improving the coating quality.

[0053] Illustratively, by setting the control valve 200, the spray structure can be applied to the coating of large-sized parts to be coated, such as parts 10 to be coated with a size greater than or equal to 1000mm×900mm, more preferably, parts 10 to be coated with a size greater than or equal to 1400mm×1350mm, and effectively ensure that the film thickness of the plate surface of the part 10 to be coated is uniform.

[0054] Exemplarily, when the air inlet channel 110 takes in air from both ends, when the opening of the control valve 200 connected to the same air inlet channel 110 is the same, the flow rate of the process gas ejected through the spray port 1201 from the spray channel 120 located in the central area along the second direction is smaller than the flow rate of the process gas ejected through the spray port 1201 from the spray channels 120 in the two end areas. It is worth mentioning that in order to keep the flow rate of the process gas ejected from each spray port 1201 consistent, effectively ensure the uniform film thickness of the plate surface of the part to be coated 10, and improve the coating quality, among the spray channels 120 connected to the same air inlet channel 110, the opening of the control valve 200 connected to at least one spray channel 120 closest to the air inlet end of the air inlet channel 110 is smaller than the opening of the control valve 200 connected to the remaining spray channels 120. Among them, the air inlet end of the air inlet channel 110 can be at least one of the two ends of the air inlet channel 110 along the second direction.

[0055] In a feasible coating operation, among the spray channels 120 connected to the same air inlet channel 110, at least one spray channel 120 closest to the air inlet end of the air inlet channel 110 is opened to limit the flow through the connected control valve 200, and the control valves 200 connected to the remaining spray channels 120 are adjusted to the maximum opening, so as to facilitate the control and adjustment of the control valve 200. For example, taking the case where both ends of the air inlet channel 110 are fed with process gas, the opening of the control valve 200 connected to the two spray channels 120 closest to the air inlet end of the air inlet channel 110 is 1 / 8, 1 / 4, 3 / 8 or 1 / 2, and the opening of the control valve 200 connected to the remaining spray channels 120 is 5 / 8, 3 / 4, 7 / 8, 1.

[0056] In a feasible coating operation, in the spray channels 120 connected to the same air inlet channel 110, all the spray channels 120 adjust the opening to limit the flow through the connected control valves 200, thereby improving the applicability of the spray structure. For example, taking the case where both ends of the air inlet channel 110 are fed with process gas, the ratio of the opening of the control valve 200 connected to the two spray channels 120 closest to the air inlet end of the air inlet channel 110 to the opening of the control valve 200 connected to the remaining spray channels 120 can be between 1:2 and 1:5. For example, the opening of the control valve 200 connected to the two spray channels 120 closest to the air inlet end of the air inlet channel 110 is 1 / 8, and the opening of the control valve 200 connected to the remaining spray channels 120 is 3 / 8. The control can be adjusted according to the gas flow rate of each area during actual use, and no specific limitation is made here.

[0057] In this embodiment, refer to Figures 1 to 4 As shown, the spray channel 120 includes at least one branch channel 121 extending along the first direction, and the branch channel 121 is provided with a plurality of spray ports 1201 at intervals along the first direction, that is, the flow rate of the process gas sprayed from the plurality of spray ports 1201 is adjusted by a control valve 200, while ensuring that the flow rate of the process gas sprayed from the spray ports 1201 on the same spray channel 120 remains consistent, and the structure is simplified. It can be understood that the branch channel 121 is provided with a plurality of spray ports 1201 at intervals along the first direction, and the sprayed process gas can form an air curtain to ensure the uniformity of the process gas sprayed onto the part to be coated 10. Among them, two to ten spray ports 1201 can be provided on the branch channel 121.

[0058] In a feasible implementation, the branch channels 121 connected to one of two adjacent air inlet channels 110 are arranged alternately along the second direction with the branch channels 121 connected to the other one, effectively ensuring uniform film thickness on the plate surface of the piece 10 to be coated.

[0059] Exemplarily, the spray channel 120 includes two to twenty branch channels 121 , for example, four, six, eight, ten, twelve, sixteen, etc.

[0060] Exemplarily, the air inlet passage 110 may be connected to two to twenty spray passages 120 , such as three, four, five, six, eight, ten, twelve, sixteen, etc.

[0061] It is worth mentioning that the spray structure provided in this embodiment can be applied to the coating process of two or more process gases. It can be understood that the spray body 100 is provided with N channel groups, and the channel group includes at least one air inlet channel 110, and all the air inlet channels 110 of the same channel group pass the same process gas. Along the first direction, there are (N-1) air inlet channels 110 between two adjacent air inlet channels 110 in the same channel group, that is, the adjacent N air inlet channels 110 belong to different channel groups, which effectively improves the applicability of the spray structure. Among them, N≥2. When the spray structure is applied to the coating process of N process gases, the process gases passed into the N channel groups are all different.

[0062] Exemplarily, when the spray structure is applied to a coating process using two process gases, process gas A and process gas B, the air inlet channel 110 can be divided into two channel groups, one of the air inlet channels 110 of the two channel groups is fed with process gas A, and the other is fed with process gas B, and the branch channels 121 for feeding process gas A and the branch channels 121 for feeding process gas B are alternately arranged in sequence along the second direction.

[0063] Exemplarily, when the spray structure is applied to a coating process using three process gases, process gas A, process gas B and process gas C, the air inlet channel 110 can be divided into three channel groups, the air inlet channel 110 of one of the three channel groups is fed with process gas A, another is fed with process gas B, and the remaining one is fed with process gas C, and the branch channels 121 for feeding process gas A, the branch channels 121 for feeding process gas B, and the branch channels 121 for feeding process gas C are arranged alternately in sequence along the second direction.

[0064] In a feasible implementation, the branch channels 121 connected to the air inlet channels 110 of the same channel group are arranged neatly, that is, arranged in multiple rows along the second direction, and the process gas sprayed from the branch channels 121 of each row through the spray port 1201 can form an integral air curtain to further ensure the uniformity of the process gas sprayed onto the workpiece 10 to be coated, thereby improving the coating quality. For example, according to the shape of the workpiece 10 to be coated, the number of branch channels 121 in each row can be different, for example, according to Figure 5 Layout arrangement shown.

[0065] In this embodiment, refer to Figures 1 to 4 , Figure 6 and Figure 7As shown, the spray channel 120 also includes a main channel 122 connected to the branch channel 121. The main channel 122 extends along the second direction, and the main channel 122 is connected to the control valve 200 to facilitate the connection between the branch channel 121 and the control valve 200, and effectively ensure the uniformity of the process gas flowing from the main channel 122 to the branch channel 121.

[0066] In a possible implementation, Figures 2 to 4 As shown, the central area of ​​the branch channel 121 along the first direction is connected to the corresponding control valve 200 to ensure that the flow rate of the process gas sprayed from the spray port 1201 on the same branch channel 121 can be consistent and the structure is compact. Specifically, the central area of ​​the branch channel 121 along the first direction is connected to the main channel 122.

[0067] In a possible implementation, Figure 6 As shown, the branch channel 121 extends along the first direction, and the branch channel 121 has two ends in the first direction, namely, the first end and the second end. Along the first direction, the first end of the branch channel 121 of the spray channel 120 connected to the outermost air inlet channel 110 is connected to the corresponding control valve 200, and the second end extends toward the area between the two outermost air inlet channels 110, so as to be arranged alternately with the spray channels 120 connected to the adjacent air inlet channels 110, to ensure that the width of the air curtain sprayed by the branch channels 121 in each column through the spray port 1201 is the same, effectively preventing the waste of process gas, and the structure is compact. Specifically, the first end of the branch channel 121 of the spray channel 120 connected to the outermost air inlet channel 110 is connected to the corresponding main channel 122.

[0068] Alternatively, if Figure 1 and Figure 7 As shown, along the first direction, the first end of the branch channel 121 of the spray channel 120 connected to the outermost air inlet channel 110 is connected to the corresponding main channel 122; the branch channels 121 of the spray channels 120 connected to the remaining air inlet channels 110 are connected to the corresponding main channel 122 along the central area of ​​the first direction.

[0069] Exemplarily, two to ten spray holes may be provided on the branch channel 121 of the spray channel 120 connected to the outermost air intake channel 110, and four to twenty spray holes may be provided on the branch channels 121 of the spray channels 120 connected to the remaining air intake channels 110.

[0070] In this embodiment, refer to Figure 7 and Figure 8As shown, along the second direction, a carrier gas channel 130 is provided between adjacent branch channels 121, and the carrier gas channel 130 has a jet port 1301, and a reflux channel 140 is provided between adjacent jet ports 1301 and the spray port 1201. The carrier gas channel 130 is used to transport an inert gas. In this embodiment, the inert gas ejected through the jet port 1301 can separate the process gas ejected from the two branch channels 121, effectively preventing different process gases from directly mixing before acting on the part to be coated 10 to produce a large amount of CVD reactants and affecting the coating quality, and can extend the maintenance and cleaning cycle and improve the utilization rate. In addition, the inert gas can reflux through the reflux channels 140 on both sides of the jet port 1301 to prevent the diffusion of the inert gas from affecting the coating effect of the process gas.

[0071] Exemplarily, an inert gas may be sprayed onto the object 10 to be coated to form a good isolation effect.

[0072] Exemplarily, the carrier gas channel 130 includes a plurality of jet ports 1301 spaced apart along the first direction, for example, two to twenty jet ports 1301, to form a good isolation effect. In this embodiment, the inert gas ejected from all jet ports 1301 between two adjacent rows of branch channels 121 can form a gas curtain to form a good isolation effect.

[0073] In this embodiment, refer to Figure 8 and Fig. 9 As shown, the spray body 100 includes an air intake plate 101 and a spray plate 102 arranged along a third direction, an air intake channel 110 is provided on the air intake plate 101, and a spray channel 120 is provided on the spray plate 102. In this embodiment, the design of the air intake plate 101 and the spray plate 102 facilitates the molding of the air intake channel 110 and the spray channel 120, and facilitates the assembly of the control valve 200.

[0074] The third direction intersects with the plane where the first direction and the second direction are located. Optionally, the first direction, the second direction and the third direction are perpendicular to each other. The c direction in the figure is the third direction, and the third direction is the thickness direction of the spray body 100.

[0075] Specifically, the carrier gas channel 130 may be disposed on the gas inlet plate 101 , and the gas injection port 1301 may be disposed on the shower plate 102 .

[0076] Exemplarily, the control valve 200 may be disposed between the air intake plate 101 and the spray plate 102 , or may be disposed within the air intake plate 101 .

[0077] In a feasible implementation, the spray body 100 further includes a heating plate 103, which is disposed on a side of the air inlet plate 101 away from the spray plate 102 along the third direction. The heating plate 103 is used to heat the air inlet plate 101 and the spray plate 102, so that the inert gas ejected from the jet port 1301 can heat the part to be coated 10, so that the temperature of the part to be coated 10 meets the temperature requirement of the coating environment, which is conducive to the generation and combination of chemical reactions on the plate surface of the part to be coated 10.

[0078] It is worth mentioning that, along the second direction, both sides of the outermost branch channel 121 are provided with carrier gas channels 130, and the inert gas has a better isolation effect on the coating object 10. Specifically, along the second direction, both sides of the outermost carrier gas channel 130 are provided with reflux channels 140, which further prevents the diffusion of the inert gas from affecting the coating effect of the process gas.

[0079] In a feasible embodiment, the spray structure further includes a cover plate 300, a cavity 310 is formed between the cover plate 300 and the spray body 100, and an exhaust hole 320 connected to the cavity 310 is provided on the cover plate 300. Among them, all the reflux channels 140 are connected to the cavity 310, and the gas in the cavity 310 is extracted through the exhaust holes 320, so that the inert gas and the residual process gas acting on the part to be coated 10 can be quickly discharged through the reflux channel 140, thereby ensuring the coating quality of the process gas. Among them, the exhaust holes 320 can be connected to a vacuum pump (not shown), and the gas in the cavity 310 is extracted by the vacuum pump.

[0080] The present embodiment also provides a coating device, which includes a device body (not shown) and the above-mentioned spray structure, wherein the device body is provided with a reaction chamber; the spray structure is arranged in the device body, and a spray port 1201 on the spray body 100 of the spray structure is connected to the reaction chamber, and the spray port 1201 can spray process gas toward the workpiece 10 to be coated in the reaction chamber. Through the setting of the spray structure, the uniform film thickness on the plate surface of the workpiece 10 to be coated can be effectively ensured, thereby improving the coating quality.

[0081] Specifically, a moving device (not shown) may be provided in the main body of the equipment, and a carrier (not shown) may be provided on the moving device, the carrier is used to place the part to be coated 10, and the moving device is used to drive the carrier to move. The carrier is located on the side of the spray plate 102 away from the air inlet plate 101 along the third direction. The moving device may drive the carrier to move along the second direction. In this embodiment, when the coating equipment is coating, the moving device may drive the carrier to pass through the bottom of the spray structure in a linear motion or reciprocating motion along the second direction, so that the process gas sprayed from the spray structure acts evenly on the part to be coated 10 on the carrier to complete the coating. The moving device includes but is not limited to a conveyor belt or a slide module, and its specific structure is a prior art, and this application will not go into details.

[0082] This embodiment also provides a spraying method, which is applied to the above-mentioned spraying structure. Fig.10 As shown, the spraying method comprises the following steps:

[0083] The process gas is introduced into the air inlet end of the air inlet channel 110, and the control valve 200 is controlled to adjust the opening between the air inlet channel 110 and the spray channel 120; wherein, among the spray channels 120 connected to the same air inlet channel 110, the opening of the control valve 200 connected to at least one spray channel 120 closest to the air inlet end of the air inlet channel 110 is smaller than the opening of the control valves 200 connected to the remaining spray channels 120.

[0084] In this embodiment, among the spray channels 120 connected to the same air inlet channel 110, the opening of the control valve 200 connected to at least one spray channel 120 closest to the air inlet end of the air inlet channel 110 is smaller than the opening of the control valve 200 connected to the remaining spray channels 120, so that the flow rate of the process gas sprayed from the spray port 1201 remains consistent, effectively ensuring the uniform film thickness on the plate surface of the part to be coated 10 and improving the coating quality.

[0085] In a feasible embodiment, when air is taken in from both ends, along the second direction, the opening of the control valve 200 connected to the spray channel 120 connected from both ends to the same air inlet channel 110 in the middle is increased successively or in stages to make the flow rate of the process gas sprayed from each spray port 1201 remain consistent.

[0086] In a feasible embodiment, in the case of air intake at both ends, among the spray channels 120 connected to the same air intake channel 110, at least two adjacent spray channels 120 are set as a group, and along the second direction, the openings of different groups of spray channels 120 increase successively from the two ends to the middle, and the openings of the spray channels 120 in the same group are equal, so that the flow rate of the process gas sprayed out of each spray port 1201 remains consistent.

[0087] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A spray structure, characterized in that: include: A spray body (100) is provided with a plurality of air inlet channels (110) extending along a second direction at intervals along a first direction, each of the air inlet channels (110) is connected to a plurality of spray channels (120) arranged at intervals along the second direction, the spray channels (120) connected to one of two adjacent air inlet channels (110) are arranged alternately along the second direction with the spray channels (120) connected to the other of the two adjacent air inlet channels (110), and spray ports (1201) are provided on the spray channels (120); wherein the first direction and the second direction intersect; A control valve (200) is provided between the spray channel (120) and the air intake channel (110), and the control valve (200) is used to adjust the opening between the corresponding air intake channel (110) and the spray channel (120).

2. The spray structure according to claim 1, characterized in that: The spray channel (120) comprises at least one branch channel (121) extending along a first direction, the branch channel (121) being provided with a plurality of spray ports (1201) spaced apart along the first direction, and the branch channel (121) connected to one of two adjacent air inlet channels (110) and the branch channel (121) connected to the other of the two adjacent air inlet channels (110) being arranged alternately one by one along a second direction.

3. The spray structure according to claim 2, characterized in that: The central area of ​​the branch channel (121) along the first direction is communicated with the corresponding control valve (200).

4. The spray structure according to claim 2, characterized in that: Along the first direction, the first end of the branch channel (121) of the spray channel (120) connected to the outermost air intake channel (110) is connected to the corresponding control valve (200), and the second end extends toward the area between the two outermost air intake channels (110).

5. The spray structure according to claim 2, characterized in that: The spray channel (120) further comprises a main channel (122) in communication with the branch channel (121), the main channel (122) extending along the second direction, and the main channel (122) in communication with the control valve (200).

6. The spray structure according to claim 2, characterized in that: Along the second direction, a carrier gas channel (130) is provided between adjacent branch channels (121), the carrier gas channel (130) has an air jet (1301), and a reflux channel (140) is provided between adjacent air jets (1301) and the spray port (1201).

7. The spray structure according to claim 1, characterized in that: The spray body (100) comprises an air intake plate (101) and a spray plate (102) arranged along a third direction, the air intake plate (101) is provided with the air intake channel (110), and the spray plate (102) is provided with the spray channel (120); wherein the third direction intersects with the plane where the first direction and the second direction are located.

8. The spray structure according to claim 7, characterized in that: The spray body (100) further comprises a heating plate (103), wherein the heating plate (103) is arranged on a side of the air inlet plate (101) away from the spray plate (102) along a third direction.

9. The spray structure according to claim 1, characterized in that: It also comprises a cover plate (300), a cavity (310) is formed between the cover plate (300) and the spray body (100), and an air extraction hole (320) communicating with the cavity (310) is provided on the cover plate (300).

10. The spray structure according to any one of claims 1 to 9, characterized in that: The spray body (100) is provided with N channel groups, each of which includes at least one air inlet channel (110), and all the air inlet channels (110) in the same channel group are fed with the same process gas, and along a first direction, (N-1) air inlet channels (110) are provided between two adjacent air inlet channels (110) in the same channel group; wherein N≥2.

11. A coating device, characterized in that: include: The device body is provided with a reaction chamber; The spray structure according to any one of claims 1 to 10 is arranged in the equipment body, and the spray port (1201) on the spray body (100) of the spray structure is connected to the reaction chamber.

12. A spraying method, applied to the spraying structure according to any one of claims 1 to 10, characterized in that: The following steps are involved: Process gas is introduced into the air inlet end of the air inlet channel (110), and the control valve (200) is controlled to adjust the opening between the air inlet channel (110) and the spray channel (120); wherein, among the spray channels (120) connected to the same air inlet channel (110), the opening of the control valve (200) connected to at least one of the spray channels (120) closest to the air inlet end of the air inlet channel (110) is smaller than the opening of the control valves (200) connected to the remaining spray channels (120).

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