Test method

Abstract

The embodiment of the invention discloses a test method, which comprises the following steps of: respectively connecting a probe card with an acoustic wave device and a network analyzer, the first test port of the network analyzer is coupled with the input port of the acoustic wave device through the first probe of the probe card; a second test port of the network analyzer is coupled with an output port of the acoustic wave device through a second probe of the probe card, and at least one third test port of the network analyzer is coupled with at least one matching port of the acoustic wave device through at least one third probe of the probe card; wherein the at least one matching port is used for representing a matching parameter of at least one parallel branch of the acoustic wave device; testing the sound wave device by using a network analyzer to generate a test result; and when the test result does not meet the preset condition, adjusting the matching parameter of the corresponding at least one parallel branch through the at least one third test port until the test result of the acoustic wave device meets the preset condition.

Description

Technical Field

[0001] The embodiments of the present disclosure relate to the field of semiconductor testing, and relate to but are not limited to a testing method. Background Art

[0002] With the development of mobile communication technology, acoustic wave devices such as filters, duplexers, and multiplexers are widely used in modern wireless communication systems due to their advantages such as strong anti-interference, small size, low cost, and low noise. They have become indispensable components in various mobile devices (for example, mobile phones, smart watches, etc.).

[0003] At present, in the wafer testing (Chip Probing, CP) of acoustic wave devices, the main testing method is to use the probes on the probe card to connect the input port and output port of the acoustic wave device to the network analyzer to characterize the transmission characteristics of the acoustic wave device. However, the existing probe cards have poor versatility and are difficult to adapt to different device designs and corresponding customer design requirements. Summary of the invention

[0004] According to a first aspect of an embodiment of the present disclosure, a testing method is provided, the testing method comprising:

[0005] Connecting the probe card to the acoustic wave device and the network analyzer respectively, so that the first test port of the network analyzer is coupled to the input port of the acoustic wave device through the first probe of the probe card, the second test port of the network analyzer is coupled to the output port of the acoustic wave device through the second probe of the probe card, and at least one third test port of the network analyzer is coupled to at least one matching port of the acoustic wave device through at least one third probe of the probe card; wherein the at least one matching port is used to characterize the matching parameters of at least one parallel branch of the acoustic wave device;

[0006] Using the network analyzer to test the acoustic wave device and generate test results;

[0007] When the test result does not meet the preset condition, the matching parameter of the corresponding at least one parallel branch is adjusted through the at least one third test port until the test result of the acoustic wave device meets the preset condition.

[0008] In some embodiments, a matching circuit is provided on the parallel branch; and adjusting the matching parameter of the corresponding at least one parallel branch through the at least one third test port includes:

[0009] According to the preset condition and the at least one third test port, the matching parameters of the matching circuit and / or the number of the matching circuits on the corresponding at least one parallel branch are adjusted.

[0010] In some embodiments, the step of testing the acoustic wave device using the network analyzer to generate a test result includes:

[0011] Performing an initial test on the acoustic wave device using the network analyzer to generate an initial waveform diagram;

[0012] When the test result does not meet the preset condition, adjusting the corresponding matching parameter of the at least one parallel branch through the at least one third test port includes:

[0013] Determine, according to the initial waveform graph, at least one target failure point in the initial waveform graph that does not meet the preset condition;

[0014] According to the at least one target failure point, input a target adjustment parameter; wherein the target adjustment parameter is used to adjust a target third test port corresponding to the target failure point among the at least one third test port;

[0015] According to the target adjustment parameter, the matching parameter of the parallel branch corresponding to the target third test port is adjusted.

[0016] In some embodiments, determining at least one target failure point in the initial waveform graph that does not meet the preset condition according to the initial waveform graph includes:

[0017] Determine a plurality of initial failure points in the initial waveform diagram that do not meet the preset conditions;

[0018] According to each of the initial failure points, corresponding initial adjustment parameters are input respectively to generate a plurality of initial adjustment waveform diagrams;

[0019] Each of the initial adjustment waveform diagrams is compared with the initial waveform diagram in sequence to determine at least one of the target failure points among the multiple initial failure points.

[0020] In some embodiments, when the test result does not meet the preset condition, adjusting the corresponding matching parameter of the at least one parallel branch through the at least one third test port includes:

[0021] When the test result indicates that the first transmission zero point of the acoustic wave device is located between the passband of the acoustic wave device and a preset high frequency region, reducing the matching parameter of the parallel branch corresponding to the first transmission zero point through the third test port;

[0022] or,

[0023] When the test result indicates that the second transmission zero point of the acoustic wave device is located between a preset low frequency region and a passband of the acoustic wave device, increasing a matching parameter of the parallel branch corresponding to the second transmission zero point through the third test port;

[0024] or,

[0025] When the test result indicates that the passband of the acoustic wave device is notched, the matching parameter of the parallel branch corresponding to the passband notch is increased through the third test port.

[0026] In some embodiments, the testing method further comprises:

[0027] When the test result does not meet the preset condition, adjusting the matching parameter of the corresponding input matching circuit through the first test port until the preset condition is met;

[0028] and / or,

[0029] When the test result does not meet the preset condition, the matching parameter of the corresponding output matching circuit is adjusted through the second test port until the preset condition is met.

[0030] In some embodiments, the testing method further comprises:

[0031] When the test result meets the preset condition, the current matching parameters of the at least one parallel circuit corresponding to the at least one third test port, the matching parameters of the input matching circuit and the matching parameters of the output matching circuit are stored; wherein the current matching parameters, the matching parameters of the input matching circuit and the matching parameters of the output matching circuit serve as a guide for directly using the acoustic wave device after wafer testing.

[0032] In some embodiments, the acoustic wave device includes a plurality of the matching ports; the probe card includes a plurality of the third probes, the total number of the plurality of the third probes is greater than the total number of the plurality of the matching ports, and one third probe is connected to one matching port; wherein the third probes among the plurality of the third probes that are not connected to the matching port are configured to be grounded or suspended.

[0033] In some embodiments, the constituent elements of the parallel branch include at least one of an inductor and a capacitor.

[0034] In some embodiments, when the parallel branch includes an inductor and a capacitor, the connection mode of the inductor and the capacitor in the parallel branch includes at least one of series connection and parallel connection.

[0035] According to a second aspect of an embodiment of the present disclosure, a probe card is provided, the probe card being applied to the test method as described in any embodiment of the first aspect of the embodiment of the present disclosure; the probe card comprising:

[0036] A first probe, the first probe being used to connect an input port of the acoustic wave device and a first test port of a network analyzer;

[0037] a second probe, the second probe being used to connect the output port of the acoustic wave device and the second test port of the network analyzer;

[0038] At least one third probe is used to connect at least one matching port of the acoustic wave device and at least one third test port of the network analyzer; wherein the at least one matching port is used to characterize the matching parameters of at least one parallel branch of the acoustic wave device.

[0039] In some embodiments, the first probe, the second probe, and the third probe are all radio frequency probes.

[0040] In some embodiments, the acoustic wave device includes a plurality of the matching ports; the probe card includes a plurality of the third probes, the total number of the plurality of the third probes is greater than the total number of the plurality of the matching ports, and one third probe is used to connect to one matching port; wherein the third probes among the plurality of the third probes that are not connected to the matching port are configured to be grounded or suspended.

[0041] In the test method provided by the embodiment of the present disclosure, the probe card is first connected to the acoustic wave device and the network analyzer respectively, and then the network analyzer is used to test the acoustic wave device to generate a test result. If the test result does not meet the preset condition, since the third test port is coupled to the matching port of the acoustic wave device through the third probe of the probe card, and the matching port is used to characterize the matching parameters of the parallel branch of the acoustic wave device, the tester can adjust the matching parameters of the corresponding parallel branch through the third test port of the network analyzer until the test result of the acoustic wave device meets the preset condition. In this way, on the first hand, the matching port of the acoustic wave device is connected to the network analyzer through the third probe of the probe card, so that the port characteristics of the matching port can be characterized and the matching parameters of the parallel branch corresponding to the matching port can be flexibly adjusted, thereby increasing the flexibility of the acoustic wave device design to meet the design requirements of different customers; on the second hand, a fixed inductance is not designed on the probe card, but the matching port of the acoustic wave device is connected to the network analyzer through the third probe of the probe card, and the probe card can be used for testing acoustic wave devices with different inductance designs, thereby improving the versatility of the probe card. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the multiple drawings represent the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments disclosed in the present application and should not be regarded as limiting the scope of the present application.

[0043] Figure 1 It is a schematic diagram of the topological structure of an acoustic wave device according to the first embodiment of the present disclosure.

[0044] Figure 2 It is a schematic diagram of a test acoustic wave device according to the first embodiment of the present disclosure.

[0045] Figure 3 It is a flowchart of a testing method according to an embodiment of the present disclosure.

[0046] Figure 4 is a schematic diagram of a test acoustic wave device according to the second embodiment of the present disclosure.

[0047] Figure 5 is a schematic diagram showing a test result according to the first embodiment of the present disclosure.

[0048] Figure 6 is a schematic diagram showing a test result according to the second embodiment of the present disclosure.

[0049] Figure 7 is a schematic diagram showing a test result according to the third embodiment of the present disclosure.

[0050] Figure 8 It is a schematic diagram of the topological structure of an acoustic wave device according to the second embodiment of the present disclosure.

[0051] Fig. 9 It is a schematic diagram of the topological structure of an acoustic wave device according to the third embodiment of the present disclosure.

[0052] Figures 10a to 10c It is a schematic diagram of a process of testing an acoustic wave device according to an embodiment of the present disclosure.

[0053] Figures 11a to 11c is a schematic diagram of a test waveform according to an embodiment of the present disclosure.

[0054] Fig.12 It is a schematic diagram showing that different acoustic wave devices are tested using a probe card according to an embodiment of the present disclosure. DETAILED DESCRIPTION

[0055] In order to facilitate the understanding of the present disclosure, the exemplary embodiments of the present disclosure will be described in more detail below with reference to the relevant drawings. Although the exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the specific embodiments set forth herein. On the contrary, these embodiments are provided in order to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0056] In the following description, a large number of specific details are given to provide a more thorough understanding of the present disclosure. However, it is obvious to those skilled in the art that the present disclosure can be implemented without one or more of these details. In some embodiments, in order to avoid confusion with the present disclosure, some technical features known in the art are not described; that is, all features of the actual embodiment may not be described here, and well-known functions and structures may not be described in detail.

[0057] Generally, terms can be understood at least in part from their use in context. For example, depending at least in part on the context, the term "one or more" as used herein can be used to describe any feature, structure or characteristic in a singular sense, or can be used to describe a combination of features, structures or characteristics in a plural sense. Similarly, terms such as "one" or "the" can also be understood to convey singular usage or to convey plural usage, depending at least in part on the context. In addition, the term "based on" can be understood to not necessarily be intended to convey an exclusive set of factors, and can alternatively allow for the presence of additional factors that are not necessarily explicitly described, which also depends at least in part on the context.

[0058] Unless otherwise defined, the purpose of the terms used herein is only to describe specific embodiments and is not intended to limit the present disclosure. When used herein, the singular forms "one", "an" and "said / the" are also intended to include plural forms, unless the context clearly indicates another way. It should also be understood that the terms "consisting of" and / or "comprising", when used in this specification, determine the presence of the features, integers, steps, operations, elements and / or parts, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, parts and / or groups. When used herein, the term "and / or" includes any and all combinations of the relevant listed items.

[0059] In order to thoroughly understand the present disclosure, detailed steps and detailed structures will be presented in the following description to illustrate the technical solution of the present disclosure. The preferred embodiments of the present disclosure are described in detail below, but in addition to these detailed descriptions, the present disclosure may also have other implementations.

[0060] Figure 1is a schematic diagram of a topological structure of an acoustic wave device according to the first embodiment of the present disclosure, Figure 2 is a schematic diagram of a test acoustic wave device according to the first embodiment of the present disclosure. Figure 1 and Figure 2 The acoustic wave device and the testing process thereof according to the first embodiment are exemplarily described.

[0061] Reference Figure 1 As shown, the acoustic wave device includes an input port IN, an output port OUT, a plurality of series resonators, a plurality of parallel resonators, and a plurality of matching circuits. For ease of understanding, Figure 1 3 series resonators S1, S2, S3, 3 parallel resonators P1, P2, P3, and 3 matching circuits L1, L2, L3 are shown in FIG. It can be understood that Figure 1 The three series resonators S1, S2, and S3 are located in the series branch of the acoustic wave device, and a parallel resonator (for example, a parallel resonator P1) and a matching circuit coupled thereto (for example, an inductor L1) are located in a parallel branch of the acoustic wave device, that is, Figure 1 The acoustic wave device shown in FIG. 1 is provided with three parallel branches. However, in an actual acoustic wave device, the number of series resonators in the series branches, the number of parallel branches, the number of parallel resonators in the parallel branches, and the number of matching circuits are not limited to Figure 1 As shown, the components of the matching circuit are not limited to Figure 1 The inductor shown.

[0062] Acoustic wave devices often require a grounded inductor in the parallel branch (for example, Figure 1 In the CP test, a fixed inductor is usually designed in the probe card, and only the input port and output port of the acoustic wave device are connected to the network analyzer through the probe on the probe card to characterize the transmission characteristics of the acoustic wave device. Here, the fixed inductor in the probe card is used to characterize the matching parameters on the parallel branch of the acoustic wave device.

[0063] Specifically, refer to Figure 2 As shown, Figure 1 The input port IN in the probe card is connected to the test port Port1 of the network analyzer through an RF probe RF on the probe card, and the output port OUT is connected to the test port Port2 of the network analyzer through another RF probe RF on the probe card. In addition, the probe card is provided with three fixed inductors L1, L2, and L3, which are used to characterize the Figure 1 The matching parameters of the three parallel branches of the acoustic wave device in . Here, Figure 2 Probe G in the circuit can be grounded or left floating.

[0064] The above-mentioned use of a probe card with fixed inductance to test acoustic wave devices mainly has the following two problems: 1) The inductance value of the inductor on the probe card is fixed, and it can only adapt to acoustic wave devices designed with corresponding inductance values, which limits the versatility of the probe card and leads to poor versatility of the probe card; 2) Only the matching parameters at the input port and output port of the topology diagram can be adjusted, and the inductance value of the acoustic wave device is determined by the layout design on the probe card and cannot be modified, resulting in the inability to adjust the matching parameters on the parallel branch between the input port and the output port, making it difficult to meet customer design requirements.

[0065] Based on one or more of the above technical problems, an embodiment of the present disclosure provides a test method, which can be used to test an acoustic wave device. Acoustic wave devices include acoustic wave filters, duplexers, and multiplexers, among which acoustic wave filters include surface acoustic wave (SAW) filters and bulk acoustic wave (BAW) filters. In the embodiment of the present disclosure, the acoustic wave device is a BAW filter as an example for exemplary description.

[0066] Figure 3 It is a flow chart of a test method according to an embodiment of the present disclosure. It should be noted that: Figure 3 The steps shown in the operation are not exclusive, and other steps may be performed before, after or between any steps in the operation shown; Figure 3 The steps shown in the figure can be adjusted in order according to actual needs. Figure 3 As shown, the test method includes the following steps:

[0067] S110: Connecting the probe card to the acoustic wave device and the network analyzer respectively, so that a first test port of the network analyzer is coupled to an input port of the acoustic wave device through a first probe of the probe card, a second test port of the network analyzer is coupled to an output port of the acoustic wave device through a second probe of the probe card, and at least one third test port of the network analyzer is coupled to at least one matching port of the acoustic wave device through at least one third probe of the probe card; wherein the at least one matching port is used to characterize a matching parameter of at least one parallel branch of the acoustic wave device;

[0068] S120: Testing the acoustic wave device using a network analyzer and generating test results;

[0069] S130: When the test result does not meet the preset condition, adjusting the matching parameter of the corresponding at least one parallel branch through at least one third test port until the test result of the acoustic wave device meets the preset condition.

[0070] In the test method provided by the embodiment of the present disclosure, the probe card is first connected to the acoustic wave device and the network analyzer respectively, and then the network analyzer is used to test the acoustic wave device to generate a test result. If the test result does not meet the preset condition, since the third test port is coupled to the matching port of the acoustic wave device through the third probe of the probe card, and the matching port is used to characterize the matching parameters of the parallel branch of the acoustic wave device, the tester can adjust the matching parameters of the corresponding parallel branch through the third test port of the network analyzer until the test result of the acoustic wave device meets the preset condition. In this way, on the first hand, the matching port of the acoustic wave device is connected to the network analyzer through the third probe of the probe card, so that the port characteristics of the matching port can be characterized and the matching parameters of the parallel branch corresponding to the matching port can be flexibly adjusted, thereby increasing the flexibility of the acoustic wave device design to meet the design requirements of different customers; on the second hand, a fixed inductance is not designed on the probe card, but the matching port of the acoustic wave device is connected to the network analyzer through the third probe of the probe card, and the probe card can be used for testing acoustic wave devices with different inductance designs, thereby improving the versatility of the probe card.

[0071] Figure 4 is a schematic diagram of a test acoustic wave device according to the second embodiment of the present disclosure. Figure 4 As shown, the probe card 210 includes a first probe 211, a second probe 212 and at least one third probe, and the first probe 211, the second probe 212 and the third probe include but are not limited to a radio frequency probe. The network analyzer 220 includes a first test port 221, a second test port 222 and at least one third test port. For ease of understanding, Figure 4 4 third probes 213a, 213b, 213c, 213d and 3 third test ports 223a, 223b, 223c are shown in FIG. In practical applications, the number of probes on the probe card 210 and the number of test ports in the network analyzer 220 are not limited to Figure 4 shown.

[0072] During testing, the probe card 210 can be connected to the acoustic wave device (not shown in the figure) and the network analyzer 220 respectively. Specifically, the first probe 211 is respectively connected to the input port of the acoustic wave device and the first test port 221, the second probe 212 is respectively connected to the output port of the acoustic wave device and the second test port 222, and the third probe is respectively connected to the matching port and the third test port of the acoustic wave device, so that the first test port 221 is coupled to the input port of the acoustic wave device through the first probe 211, the second test port 222 is coupled to the output port of the acoustic wave device through the second probe 212, and the third test port is coupled to the matching port of the acoustic wave device through the third probe. It should be emphasized that one third test port is coupled to one matching port through one third probe, and one matching port corresponds to one parallel branch of the acoustic wave device, that is, when the acoustic wave device is provided with multiple parallel branches, the matching port corresponding to each parallel branch can be connected to the network analyzer 220 through one third probe. For example, Figure 1 The three parallel branches in the probe card 210 correspond to three matching ports, and the three matching ports can be connected to the three third test ports of the network analyzer 220 through the three third probes of the probe card 210 respectively.

[0073] In some embodiments, the acoustic wave device includes a plurality of matching ports; the probe card includes a plurality of third probes, the total number of the plurality of third probes is greater than the total number of the plurality of matching ports, and one third probe is connected to one matching port; wherein the third probes of the plurality of third probes that are not connected to the matching ports are configured to be grounded or suspended. For example, Figure 1 The acoustic wave device shown corresponds to three matching ports, and the three matching ports can be connected to corresponding third test ports 223a, 223b, 223c through third probes 213a, 213b, 213c respectively. During testing, the third probe 213d can be grounded or suspended.

[0074] In some embodiments, matching circuits are provided on the parallel branches; the above step S130 includes: adjusting the matching parameters and / or the number of matching circuits on the corresponding at least one parallel branch according to preset conditions and at least one third test port.

[0075] In the embodiment of the present disclosure, when the test result does not meet the preset condition, the parallel branch that needs to be adjusted can be determined according to the preset condition, and then the matching parameters of the matching circuits on the corresponding parallel branch and / or the number of matching circuits are adjusted through the third test port, thereby adjusting the matching parameters of the corresponding parallel branch so that the test result of the acoustic wave device meets the preset condition. Here, the number of parallel branches that need to be adjusted can be one or more.

[0076] Exemplary, combined Figure 1 and Figure 4As shown, an inductor is provided on each parallel branch of the acoustic wave device, and the matching port corresponding to the inductor on each parallel branch is coupled to a third test port through a third probe. For example, the matching port corresponding to the inductor L1 is coupled to the third test port 223a through a third probe 213a, the matching port corresponding to the inductor L2 is coupled to the third test port 223b through a third probe 213b, and the matching port corresponding to the inductor L3 is coupled to the third test port 223c through a third probe 213c. Taking the parallel branch that needs to adjust the matching parameters as a parallel branch with a parallel resonator P1 as an example, the inductance value of the inductor L1 can be adjusted through the third test port 223a, for example, the inductance value of the inductor L1 is increased or reduced, until the test result of the acoustic wave device meets the preset conditions. Here, the adjusted inductance value can be input by the tester. Of course, in other examples, the tester can also adjust the number of inductors on the parallel branches.

[0077] It is understandable that in this example, the matching circuit may be an inductor, and the matching parameter may be an inductor value. However, in other examples, the matching circuit may also be at least one of an inductor and a capacitor, and the corresponding matching parameter may also be at least one of an inductor value and a capacitor value, depending on the design of the matching circuit. That is, the components of the parallel branch include at least one of an inductor and a capacitor. In the case where the parallel branch includes an inductor and a capacitor, the connection method of the inductor and the capacitor on the parallel branch includes at least one of series connection and parallel connection. The parallel branch is provided with an inductor and / or a capacitor and the connection method thereof will be described below. Figure 8 and Fig. 9 The embodiments are described in detail in the embodiments and will not be repeated here.

[0078] In some embodiments, the above step S120 includes: using the network analyzer 220 to perform an initial test on the acoustic wave device to generate an initial waveform diagram; the above step S130 includes: determining at least one target failure point in the initial waveform diagram that does not meet the preset conditions according to the initial waveform diagram; inputting a target adjustment parameter according to the at least one target failure point; wherein the target adjustment parameter is used to adjust the target third test port corresponding to the target failure point in at least one third test port; and adjusting the matching parameter of the parallel branch corresponding to the target third test port according to the target adjustment parameter.

[0079] In the disclosed embodiment, after the acoustic wave device is connected to the network analyzer 220 through the probe on the probe card 210, the network analyzer 220 can be used to perform an initial test on the acoustic wave device to generate an initial waveform diagram. The tester can determine the target failure point in the initial waveform diagram that does not meet the preset conditions, and then determine the third test port (i.e., the target third test port) that needs to be adjusted in at least one third test port according to the target failure point and input the corresponding target adjustment parameter, so as to adjust the matching parameter of the parallel branch corresponding to the target third test port. Here, the matching parameter of the parallel branch corresponding to the target third test port can be adjusted once or multiple times, that is, one or more target adjustment parameters are input until the characteristics of each port of the acoustic wave device after adjustment meet the preset conditions. The number of target failure points can be one or more, and the number of target third test ports can be one or more.

[0080] In some embodiments, the above-mentioned determining at least one target failure point in the initial waveform graph that does not meet the preset conditions based on the initial waveform graph includes: determining multiple initial failure points in the initial waveform graph that do not meet the preset conditions; according to each initial failure point, inputting corresponding initial adjustment parameters respectively to generate multiple initial adjustment waveform graphs; and comparing each initial adjustment waveform graph with the initial waveform graph in turn to determine at least one target failure point among the multiple initial failure points.

[0081] In the disclosed embodiment, after generating the initial waveform graph, the tester can find multiple initial failure points that do not meet the preset conditions by observing the initial waveform graph, and then input the corresponding initial adjustment parameters (equivalent to adjusting the matching parameters of each parallel branch) for each initial failure point, and generate the initial adjustment waveform graph corresponding to each initial failure point. By comparing the initial adjustment waveform graph of each initial failure point with the initial waveform graph in turn, the most sensitive failure point (i.e., the target failure point) among the multiple initial failure points can be found, thereby determining the most sensitive parallel branch (i.e., the parallel branch that needs to adjust the matching parameters). In practical applications, a typical initial failure point is a point where the initial waveform graph has problems with out-of-band suppression and / or passband collapse, for example, Figure 5 Point A in Figure 6 Point C in Figure 7 Point D in .

[0082] In some embodiments, the above step S130 includes: when the test result indicates that the first transmission zero point of the acoustic wave device is located between the passband of the acoustic wave device and a preset high frequency region, reducing the matching parameter of the parallel branch corresponding to the first transmission zero point through the third test port.

[0083] The main effects on the waveform of the parallel branches located at different positions in the acoustic wave device are different, for example, the suppression of the left band / right band and the far sideband / near sideband, the passband support performance, etc. For the parallel branches that mainly play the role of out-of-band suppression, reducing their matching parameters can move the out-of-band transmission zero point to the high frequency region. Therefore, in the embodiment of the present disclosure, by reducing the matching parameters of the parallel branch corresponding to the first transmission zero point through the third test port, the first transmission zero point can be moved to the preset high frequency region, thereby satisfying the preset conditions. It can be understood that the preset conditions in this embodiment include a preset high frequency region.

[0084] Figure 5 is a schematic diagram showing a test result according to the first embodiment of the present disclosure. Figure 5 As shown, point A in the initial waveform is the first transmission zero point (i.e., the target failure point), and the preset high frequency range is 2.5 GHz to 2.7 GHz. By reducing the matching parameters of the parallel branch corresponding to point A through the third test port, point A can be moved to the preset high frequency range, for example, to point B in the adjusted waveform, thereby meeting the customer's out-of-band suppression requirements for the high frequency range of the acoustic wave device. The parallel branch corresponding to point A is Figure 1 Taking the parallel branch with parallel resonator P1 as an example, Figure 4 The third test port 223a in the circuit appropriately reduces the inductance value of the inductor L1, thereby reducing the matching parameter of the parallel branch corresponding to point A. In a specific embodiment, the inductance value of L1 can be reduced from 2.5nh to 2.0nh, so that the out-of-band transmission zero point of the acoustic wave device moves from point A to point B. Here, the preset high frequency region is not limited to Figure 5 As shown, it can be set according to customer requirements in actual applications.

[0085] In some embodiments, the above step S130 includes: when the test result indicates that the second transmission zero point of the acoustic wave device is located between the preset low-frequency region and the passband of the acoustic wave device, increasing the matching parameters of the parallel branch corresponding to the second transmission zero point through the third test port. As described above, the main effects on the waveform of the parallel branches located at different positions in the acoustic wave device are different. For the parallel branch that mainly plays the role of out-of-band suppression, increasing its matching parameters can move the out-of-band transmission zero point to the low-frequency region. Therefore, in the embodiment of the present disclosure, increasing the matching parameters of the parallel branch corresponding to the second transmission zero point through the third test port can move the second transmission zero point to the preset low-frequency region, thereby satisfying the preset conditions. It can be understood that the preset conditions in this embodiment include a preset low-frequency region.

[0086] Figure 6 is a schematic diagram showing a test result according to the second embodiment of the present disclosure. Figure 6As shown in the figure, point C in the initial waveform is the second transmission zero point (i.e., the target failure point), and the preset low frequency range is 1.61 GHz to 1.63 GHz. By increasing the matching parameters of the parallel branch corresponding to point C through the third test port, point C can be moved to the preset low frequency range, thereby meeting the customer's demand for out-of-band suppression of the low frequency range of the acoustic wave device. The parallel branch corresponding to point C is Figure 1 Taking the parallel branch with the parallel resonator P2 as an example, the inductance value of the inductor L2 can be appropriately increased through the third test port 223b, thereby increasing the matching parameter of the parallel branch corresponding to point C. In a specific embodiment, the inductance value of L2 can be increased from 0 to 0.6nh, that is, adjusted from no matching circuit to inductance matching, so that the out-of-band transmission zero point C of the acoustic wave device moves to the preset low-frequency region. Here, the preset low-frequency region is not limited to Figure 6 As shown, it can be set according to customer requirements in actual applications.

[0087] In some embodiments, the above step S130 includes: when the test result indicates that the passband of the acoustic wave device is concave, increasing the matching parameters of the parallel branch corresponding to the passband concave through the third test port. As described above, the main effects on the waveform of the parallel branches located at different positions in the acoustic wave device are different. For the parallel branch that mainly supports the passband, increasing its matching parameters can move the left side of the passband to the low frequency region. Therefore, in the embodiment of the present disclosure, increasing the matching parameters of the parallel branch corresponding to the passband concave through the third test port can move the left side of the passband to the low frequency region, thereby meeting the preset conditions. It can be understood that the preset conditions in this embodiment include the passband.

[0088] Figure 7 is a schematic diagram showing a test result according to the third embodiment of the present disclosure. Figure 7 As shown in the figure, point D in the initial waveform is the passband depression (i.e., the target failure point). By increasing the matching parameters of the parallel branch corresponding to point D through the third test port, the passband depression can be improved, and the out-of-band suppression of the left and right near-bands of the passband can be improved as a whole, thereby meeting the customer's requirements for the passband support of the acoustic wave device. The parallel branch corresponding to point D is Figure 1 Taking the parallel branch with parallel resonator P3 as an example, Figure 4 The third test port 223c in the circuit appropriately increases the inductance value of the inductor L3, thereby increasing the matching parameter of the parallel branch corresponding to point D. In a specific embodiment, the inductance value of L3 can be increased from 0.5nh to 1.7nh to improve the passband concave. Here, the frequency range of the passband is not limited to Figure 7 As shown, it can be set according to customer requirements in actual applications.

[0089] In some embodiments, the above-mentioned test method also includes: when the test result does not meet the preset condition, adjusting the matching parameters of the corresponding input matching circuit through the first test port until the preset condition is met; and / or, when the test result does not meet the preset condition, adjusting the matching parameters of the corresponding output matching circuit through the second test port until the preset condition is met.

[0090] In one example, when the test result does not meet the preset condition, the matching parameter of the corresponding input matching circuit can be adjusted through the first test port so that the test result of the acoustic wave device meets the preset condition. The input matching circuit can be at least one of an inductor and a capacitor. When the input matching circuit includes an inductor and a capacitor, the connection mode of the inductor and the capacitor of the input matching circuit includes at least one of series connection and parallel connection.

[0091] In another example, when the test result does not meet the preset condition, the matching parameter of the corresponding output matching circuit can be adjusted through the second test port so that the test result of the acoustic wave device meets the preset condition. The output matching circuit can be at least one of an inductor and a capacitor. When the output matching circuit includes an inductor and a capacitor, the connection mode of the inductor and the capacitor of the input matching circuit includes at least one of series connection and parallel connection.

[0092] In other examples, a combination of the above two examples may also be included, that is, when the test result does not meet the preset condition, the matching parameters of the corresponding input matching circuit are adjusted through the first test port and the matching parameters of the corresponding output matching circuit are adjusted through the second test port until the preset condition is met.

[0093] In some embodiments, the above-mentioned test method also includes: when the test results meet preset conditions, storing the current matching parameters of at least one parallel circuit corresponding to at least one third test port, the matching parameters of the input matching circuit, and the matching parameters of the output matching circuit; wherein the current matching parameters, the matching parameters of the input matching circuit, and the matching parameters of the output matching circuit serve as a guide for directly using the acoustic wave device after wafer testing.

[0094] In the disclosed embodiment, when the test result meets the preset conditions, it indicates that the current matching parameters of each port of the acoustic wave device have met the customer design requirements, and the current matching parameters corresponding to each port can be stored, for example, the current matching parameters of the parallel circuit corresponding to the third test port, the matching parameters of the input matching circuit, and the matching parameters of the output matching circuit, and the stored current matching parameters corresponding to each port are used as a guide for directly using the acoustic wave device after the wafer test. In this way, the matching parameters of each port of the acoustic wave device can be accurately extracted in the CP test, meeting the requirements for accurate detailed data of each port of the CP test, such as the scenario of shipment after the CP test.

[0095] Figure 8 is a schematic diagram of a topological structure of an acoustic wave device according to the second embodiment of the present disclosure. Figure 1 The difference is, Figure 8 The acoustic wave device shown also includes an input matching circuit and an output matching circuit, and Figure 8 The parallel branches of the acoustic wave device shown are connected with Figure 1 The parallel branches of the acoustic wave devices shown are different. Figure 8 The input port IN, the output port OUT, the series resonators S1 to S3, the parallel resonators P1 and P2, and the matching circuits L1 and L2 in the embodiment may refer to the relevant description of the above embodiment.

[0096] Reference Figure 8 As shown, the input matching circuit includes an inductor L0, a capacitor C1 and a capacitor C2. When the test result indicates that the matching parameters of the input matching circuit need to be adjusted, at least one of the inductance value of the inductor L0, the capacitance value of the capacitor C1 and the capacitance value of the capacitor C2 can be adjusted, or the number of the inductor and the capacitor can be increased or decreased so that the test result of the acoustic wave device meets the preset conditions. Of course, the structure of the input matching circuit is not limited to Figure 8 shown.

[0097] The output matching circuit includes an inductor L4, a capacitor C4 and a capacitor C5. When the test result indicates that the matching parameters of the output matching circuit need to be adjusted, at least one of the inductance value of the inductor L4, the capacitance value of the capacitor C4 and the capacitance value of the capacitor C5 can be adjusted, or the number of the inductor and the capacitor can be increased or decreased, so that the test result of the acoustic wave device meets the preset conditions. Of course, the structure of the output matching circuit is not limited to Figure 8 shown.

[0098] It should be noted that Figure 8 The acoustic wave device shown includes three parallel branches, two of which are located between the series resonators S2 and S3, and one of the two parallel branches located between the series resonators S2 and S3 is provided with only a capacitor C3 connected to ground. However, in an actual acoustic wave device, the number of series resonators in the series branches, the number of parallel branches, the number of parallel resonators in the parallel branches, and the number of matching circuits are not limited to Figure 8 As shown, the components of the matching circuit are not limited to Figure 8 Inductance and / or capacitance as shown.

[0099] Fig. 9 FIG. 1 is a schematic diagram of a topological structure of an acoustic wave device according to the third embodiment of the present disclosure. Figure 8 The difference is, Fig. 9 The parallel branches of the acoustic wave device shown are connected with Figure 8 The parallel branches of the acoustic wave devices shown are different. Fig. 9 The input port IN, the output port OUT, the series resonators S1 to S3, the parallel resonators P1 and P2, the matching circuits L1 and L2, the input-end matching circuit, and the output-end matching circuit may refer to the relevant description of the above embodiments.

[0100] Reference Fig. 9 As shown, a capacitor C6 is also provided in the parallel branch between the series resonators S1 and S2, and the capacitor C6 is connected in parallel with the inductor L1. One of the two parallel branches between the series resonators S2 and S3 is provided with an inductor L3 and a capacitor C3 connected in series.

[0101] Figures 10a to 10c is a schematic diagram of a process for testing an acoustic wave device according to an embodiment of the present disclosure, Figures 11a to 11c is a schematic diagram of a test waveform according to an embodiment of the present disclosure. Figure 1 The acoustic wave device shown, combined with Figure 1 , Figures 10a to 10c , Figures 11a to 11c The testing method provided in the embodiment of the present disclosure is exemplarily described.

[0102] Reference Fig.10a As shown, the input port, output port, and three matching ports of the acoustic wave device are connected to the first test port 221, the second test port 222, and the three third test ports 223a, 223b, and 223c of the network analyzer 220 through the first probe 211, the second probe 212, and the three third probes 213a, 213b, and 213c on the probe card 210. At this time, the load of the matching port is the default standard inside the network analyzer, for example, 50ohm, and the waveform diagram obtained is as follows Fig.11a shown.

[0103] Reference Fig.10b As shown, in the network analyzer 220, the loads of the three third test ports 223a, 223b, and 223c are modified to be grounded, and the initial waveform of the acoustic wave device is established, such as Fig.11b At this point, the performance indicators of the acoustic wave device need to be optimized.

[0104] Reference Fig.10c As shown, in the network analyzer 220, the loads of the three third test ports 223a, 223b, and 223c are set to appropriate inductance values ​​so that the various indicators of the acoustic wave device meet the customer's design requirements, such as Fig.11c At this time, the current matching parameters corresponding to each port can also be stored as a guide for directly using the acoustic wave device after wafer testing.

[0105] It should be noted that the test port in the network analyzer 220 is not limited to Figures 10a to 10c The five test ports shown in the figure may be other numbers. For example, the network analyzer 220 may further include other test ports. The other test ports are grounded and can be used for reference calibration before testing.

[0106] Fig.12 It is a schematic diagram showing that different acoustic wave devices are tested using a probe card according to an embodiment of the present disclosure. Fig.12 Four acoustic wave devices with different inductor quantities and different inductor values ​​are shown. If a probe card test with fixed inductance is used Fig.12 The four acoustic wave devices shown require four customized probe cards with different inductance values, and cannot be adjusted according to design changes, resulting in low test efficiency and high cost. However, by using the probe card 210 provided in the embodiment of the present disclosure and the test method in the above embodiment, four devices share one probe card, that is, one probe card 210 can be compatible with the test of four devices. The probe card 210 has good versatility, can improve test efficiency, reduce test costs, and has no restrictions on the designed inductance value.

[0107] Based on the above test method, an embodiment of the present disclosure provides a probe card, which can be applied to the test method of any of the above embodiments. The probe card includes a first probe, a second probe and at least one third probe; the first probe is used to connect the input port of the acoustic wave device and the first test port of the network analyzer; the second probe is used to connect the output port of the acoustic wave device and the second test port of the network analyzer; the at least one third probe is used to connect at least one matching port of the acoustic wave device and at least one third test port of the network analyzer; wherein, the at least one matching port is used to characterize the matching parameters of at least one parallel branch of the acoustic wave device.

[0108] In some embodiments, the first probe, the second probe, and the third probe are all radio frequency probes, and the probe card further includes a calibration reference ground probe, which is used to calibrate the grounding of the probe card before testing. For an acoustic wave device with a ground port, and the ground port is adapted to the position of the calibration reference ground probe on the probe card, the ground port can be connected to the calibration reference ground probe to achieve grounding, or it can be connected to the third probe, and the third test port of the network analyzer is connected through the third probe, and the inductance of the third test port is set to 0 to achieve grounding. For an acoustic wave device with a ground port, but the ground port is not adapted to the position of the calibration reference ground probe on the probe card, the ground port is connected to the third probe, and the third test port of the network analyzer is connected through the third probe, and the inductance of the third test port is set to 0 to achieve grounding.

[0109] In some embodiments, the acoustic wave device includes multiple matching ports; the probe card includes multiple third probes, the total number of the multiple third probes is greater than the total number of the multiple matching ports, and one third probe is used to connect to one matching port; wherein the third probes in the multiple third probes that are not connected to the matching ports are configured to be grounded or suspended.

[0110] For more information about the probe card, please refer to Figure 4 , Figures 10a to 10c , Fig.12 For the sake of brevity, the description of the middle probe card 210 is not repeated here.

[0111] The methods disclosed in several method embodiments provided in the present disclosure can be arbitrarily combined without conflict to obtain new method embodiments.

[0112] The products disclosed in the several product embodiments provided in the present disclosure can be arbitrarily combined without conflict to obtain new product embodiments.

[0113] It should be understood that "one embodiment" or "an embodiment" mentioned throughout the specification means that specific features, structures or characteristics related to the embodiment are included in at least one embodiment of the present disclosure. Therefore, "in one embodiment" or "in an embodiment" appearing throughout the specification does not necessarily refer to the same embodiment. In addition, these specific features, structures or characteristics can be combined in one or more embodiments in any suitable manner. It should be understood that in the various embodiments of the present disclosure, the size of the serial number of the above-mentioned processes does not mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present disclosure. The serial numbers of the embodiments of the present disclosure are for description only and do not represent the advantages and disadvantages of the embodiments.

[0114] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0115] The above description is only an implementation mode of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure.

Claims

1. A testing method, characterized in that: include: Connecting the probe card to the acoustic wave device and the network analyzer respectively, so that the first test port of the network analyzer is coupled to the input port of the acoustic wave device through the first probe of the probe card, the second test port of the network analyzer is coupled to the output port of the acoustic wave device through the second probe of the probe card, and at least one third test port of the network analyzer is coupled to at least one matching port of the acoustic wave device through at least one third probe of the probe card; wherein the at least one matching port is used to characterize the matching parameters of at least one parallel branch of the acoustic wave device; Using the network analyzer to test the acoustic wave device and generate test results; When the test result does not meet the preset condition, the matching parameter of the corresponding at least one parallel branch is adjusted through the at least one third test port until the test result of the acoustic wave device meets the preset condition.

2. The testing method according to claim 1, characterized in that: The parallel branch is provided with a matching circuit; and the adjusting the matching parameter of the corresponding at least one parallel branch through the at least one third test port comprises: According to the preset condition and the at least one third test port, the matching parameters of the matching circuit and / or the number of the matching circuits on the corresponding at least one parallel branch are adjusted.

3. The testing method according to claim 1, characterized in that: The step of using the network analyzer to test the acoustic wave device and generate a test result includes: Performing an initial test on the acoustic wave device using the network analyzer to generate an initial waveform diagram; When the test result does not meet the preset condition, adjusting the corresponding matching parameter of the at least one parallel branch through the at least one third test port includes: Determine, according to the initial waveform graph, at least one target failure point in the initial waveform graph that does not meet the preset condition; According to the at least one target failure point, input a target adjustment parameter; wherein the target adjustment parameter is used to adjust a target third test port corresponding to the target failure point among the at least one third test port; According to the target adjustment parameter, the matching parameter of the parallel branch corresponding to the target third test port is adjusted.

4. The testing method according to claim 3, characterized in that: The determining, according to the initial waveform diagram, at least one target failure point in the initial waveform diagram that does not meet the preset condition comprises: Determine a plurality of initial failure points in the initial waveform diagram that do not meet the preset conditions; According to each of the initial failure points, corresponding initial adjustment parameters are input respectively to generate a plurality of initial adjustment waveform diagrams; Each of the initial adjustment waveform diagrams is compared with the initial waveform diagram in sequence to determine at least one of the target failure points among the multiple initial failure points.

5. The testing method according to any one of claims 1 to 4, characterized in that: When the test result does not meet the preset condition, adjusting the corresponding matching parameter of the at least one parallel branch through the at least one third test port includes: When the test result indicates that the first transmission zero point of the acoustic wave device is located between the passband of the acoustic wave device and a preset high frequency region, reducing the matching parameter of the parallel branch corresponding to the first transmission zero point through the third test port; or, When the test result indicates that the second transmission zero point of the acoustic wave device is located between a preset low frequency region and a passband of the acoustic wave device, increasing a matching parameter of the parallel branch corresponding to the second transmission zero point through the third test port; or, When the test result indicates that the passband of the acoustic wave device is notched, the matching parameter of the parallel branch corresponding to the passband notch is increased through the third test port.

6. The testing method according to claim 1, characterized in that: The test method also includes: When the test result does not meet the preset condition, adjusting the matching parameter of the corresponding input matching circuit through the first test port until the preset condition is met; and / or, When the test result does not meet the preset condition, the matching parameter of the corresponding output matching circuit is adjusted through the second test port until the preset condition is met.

7. The testing method according to claim 6, characterized in that: The test method also includes: When the test result meets the preset condition, the current matching parameters of the at least one parallel circuit corresponding to the at least one third test port, the matching parameters of the input matching circuit and the matching parameters of the output matching circuit are stored; wherein the current matching parameters, the matching parameters of the input matching circuit and the matching parameters of the output matching circuit serve as a guide for directly using the acoustic wave device after wafer testing.

8. The testing method according to claim 1, characterized in that: The acoustic wave device includes a plurality of the matching ports; the probe card includes a plurality of the third probes, the total number of the plurality of the third probes is greater than the total number of the plurality of the matching ports, and one third probe is connected to one matching port; wherein the third probes not connected to the matching ports among the plurality of the third probes are configured to be grounded or suspended.

9. The testing method according to claim 1, characterized in that: The components of the parallel branch include at least one of an inductor and a capacitor.

10. The testing method according to claim 9, characterized in that: In the case where the parallel branch includes an inductor and a capacitor, the connection mode of the inductor and the capacitor in the parallel branch includes at least one of series connection and parallel connection.

11. A probe card, characterized in that: The probe card is applied to the test method according to any one of claims 1 to 10; the probe card comprises: A first probe, the first probe being used to connect an input port of the acoustic wave device and a first test port of a network analyzer; a second probe, the second probe being used to connect the output port of the acoustic wave device and the second test port of the network analyzer; At least one third probe is used to connect at least one matching port of the acoustic wave device and at least one third test port of the network analyzer; wherein the at least one matching port is used to characterize the matching parameters of at least one parallel branch of the acoustic wave device.

12. The probe card according to claim 11, characterized in that The first probe, the second probe and the third probe are all radio frequency probes. The probe card further includes a calibration reference ground probe, and the calibration reference ground probe is used to calibrate the grounding of the probe card.

13. The probe card according to claim 11, characterized in that The acoustic wave device includes a plurality of the matching ports; the probe card includes a plurality of the third probes, the total number of the plurality of the third probes is greater than the total number of the plurality of the matching ports, and one third probe is used to connect to one matching port; wherein the third probes not connected to the matching port among the plurality of the third probes are configured to be grounded or suspended.

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