Beam combining device capable of automatically calibrating and modulating laser light power with different wavelengths

Abstract

The invention discloses a beam combining device for automatically calibrating and modulating the power of laser light with different wavelengths, which comprises a long-wavelength laser light source for generating long-wavelength laser light; the light beam modulation mirror group is used for changing the size of the long-wavelength laser beam in the frequency conversion module and changing the ratio of the long-wavelength laser power to the laser power after frequency conversion; the frequency conversion module is used for converting the long-wavelength laser light into at least two laser light with different wavelengths on the same optical axis path; and the focusing optical element is used for respectively focusing the at least two laser lights with different wavelengths on at least two focusing positions on different planes of a composite material or a laminated material and simultaneously carrying out laser processing.

Description

[Technical field]

[0001] The present invention relates to a related technical field of using a long wavelength laser light to generate at least two laser lights of different wavelengths through a frequency conversion module, and using a beam modulation lens group to modulate the beam size of the long wavelength laser light in the frequency conversion module to modulate the ratio of the long wavelength laser light power and the converted laser light power, so as to simultaneously perform laser processing on at least two focal points of different planes of a composite or laminated material, and in particular to a beam combining device for automatically calibrating and modulating the power of laser lights of different wavelengths. [Background technology]

[0002] According to the existing technology Figure 1 As shown, laser lights of different wavelengths, such as long wavelength laser light 71 and short wavelength laser light 72, are combined into a beam, or as shown in FIG. Figure 2 As shown, in order to combine laser lights of different wavelengths, such as long-wavelength laser light 71, short-wavelength laser light 72, and shorter-wavelength laser light 73, it is necessary to prepare a plurality of first laser light sources 61, second laser light sources 62, and third laser light sources 63 of different wavelengths, and then combine the aforementioned plurality of laser lights of different wavelengths through a first reflector 81, a second reflector 82, a first color-changing mirror 83, and a second color-changing mirror 84 to perform laser processing on a plurality of focal points of different planes of a composite or laminated material 9, such as a first focal point 91, a second focal point 92, and a third focal point 93. It is found that the following defects exist:

[0003] 1. Since multiple laser light sources and multiple control systems are required, the cost is high and a large space is required.

[0004] 2. Multiple control systems are required to control the power of multiple laser beams of different wavelengths.

[0005] 3. When multiple laser lights of different wavelengths encounter angle deviation, the light of different wavelengths may produce deviation in beam separation due to the aberration of the lens or dispersion.

[0006] Furthermore, Taiwan Invention Patent No. I459039 "Laser Beam and Laser Beam Conversion Device" mainly converts a laser beam from a light source into a first laser beam with a first polarization direction and a second laser beam with a second polarization direction, and focuses them at the first and second focal points on the same plane respectively. It is a technical means for laser processing the same material at two focal points on the same plane.

[0007] In addition, Taiwan's new patent No. M450444 "Synchronous adjustment mechanism for guide beam and laser beam processing range" requires the use of two light sources, a laser light source and a guide beam light source. The guide beam is first expanded in diameter by a beam expander and then merged with the laser beam into the same optical path through a beam combiner. It is then processed with a single focus through a focusing lens. The processing range is simulated mainly through the guide beam to make the laser processing more accurate.

[0008] In addition, the Taiwan Invention Publication No. 20224821 "Multi-Light Source Cutting Device" patent uses multiple light source devices and then combines laser beams of different wavelengths through a reflector and a beam combiner, and then performs laser processing of circuit boards through a transmitter. This not only requires multiple light sources and takes up space, but the more light sources there are, the more control systems are required to control the power of the multiple light beams. [Summary of the invention]

[0009] The main purpose of the present invention is to provide a beam combining device that can automatically calibrate and modulate the power of laser lights of different wavelengths. It mainly uses a single light source and control system to save space and cost, and can convert a long-wavelength laser light into at least two laser lights of different wavelengths on a common optical axis path and focus them on at least two focal points on different planes of a composite material or a laminated material to perform laser processing simultaneously.

[0010] The second purpose of the present invention is to provide a beam combining device that can automatically calibrate and modulate the power of laser lights of different wavelengths. This is mainly for laser processing of composite materials or stacked heterogeneous materials or multi-layer materials, and can eliminate the process of calibrating the beam combining of multiple laser lights of different wavelengths.

[0011] Another object of the present invention is to provide a beam combining device that can automatically calibrate and modulate the power of laser lights of different wavelengths, which can be flexibly adjusted and used according to different processing requirements, thereby achieving the purpose of expanding its application scope and enhancing its industrial utilization value.

[0012] The present invention adopts the following technical solution:

[0013] A beam combining device for automatically calibrating and modulating the power of laser beams of different wavelengths, comprising:

[0014] A long wavelength laser light source for generating a long wavelength laser light;

[0015] A frequency conversion module, comprising at least one laser frequency conversion element, for converting the long wavelength laser light into at least two laser lights of different wavelengths on a common optical axis path;

[0016] A focusing optical element is used to focus the at least two laser lights of different wavelengths on at least two focal points on different planes of a composite material, so as to simultaneously perform laser processing on the at least two focal points on different planes of the composite material, and by changing the focal length of the focusing optical element, the focusing depth of the at least two laser lights of different wavelengths focused on the at least two focal points on different planes of the composite material can be relatively changed.

[0017] The laser frequency conversion element of the frequency conversion module is a nonlinear crystal, a periodically poled crystal or a periodically poled lithium niobate crystal (PPLN).

[0018] A beam combining device for automatically calibrating and modulating the power of laser beams of different wavelengths, comprising:

[0019] A long wavelength laser light source for generating a long wavelength laser light;

[0020] a frequency conversion module, comprising a beam modulating mirror set and at least one laser frequency conversion element, wherein the beam modulating mirror set is used to change the beam size of the long-wavelength laser light in the frequency conversion module, and change the ratio between the long-wavelength laser light power and the laser power after frequency conversion, and the at least one laser frequency conversion element is used to convert the long-wavelength laser light after the beam size is adjusted into at least two laser lights of different wavelengths on a common optical axis path;

[0021] A focusing optical element is used to focus the at least two laser lights of different wavelengths on at least two focal points on different planes of a composite material, so as to simultaneously perform laser processing on the at least two focal points on different planes of the composite material, and by changing the focal length of the focusing optical element, the focusing depth of the at least two laser lights of different wavelengths focused on the at least two focal points on different planes of the composite material can be relatively changed.

[0022] The frequency conversion module further includes at least one optical element, and the at least one optical element is adjusted to change the size of the laser beam in the at least one laser frequency conversion element.

[0023] The at least one laser frequency conversion element is a first laser frequency conversion element and a second laser frequency conversion element, and the at least one optical element is a first optical element, a second optical element and a third optical element, the first optical element is a first lens, the second optical element is a second lens, the third optical element is a third lens, the first optical element is disposed between the beam modulating lens group and the first laser frequency conversion element, the second optical element and the third optical element are spaced apart from each other and are located between the first laser frequency conversion element and the second laser frequency conversion element.

[0024] The first optical element is a first convex lens, the second optical element is a second convex lens, and the third optical element is a third convex lens.

[0025] The second optical element is a first plano-concave lens, the third optical element is a second plano-concave lens, and the second optical element and the third optical element are arranged in opposite directions to each other.

[0026] The beam modulating lens assembly at least includes an input lens and an output lens, and the diameter of the input lens is larger than that of the output lens.

[0027] The beam modulating mirror assembly is a beam reducer.

[0028] The at least one laser frequency conversion element is at least one nonlinear crystal or at least one periodically poled crystal or at least one periodically poled lithium niobate crystal (PPLN).

[0029] The technical effects of the present invention are:

[0030] 1. Only a single light source and control system are needed, which can save space and cost, and can convert a long-wavelength laser light into at least two laser lights of different wavelengths on the same optical axis path and focus them on at least two focal points on different planes of a composite material or laminated material to perform laser processing simultaneously.

[0031] 2. For laser processing of composite materials, laminated heterogeneous materials, or multi-layer materials, the process of calibrating multiple laser beams with different wavelengths can be omitted.

[0032] 3. The beam modulation lens group, at least one optical element such as a first optical element, a second optical element, a third optical element, a first frequency conversion element, and a second frequency conversion element of the frequency modulation module can be flexibly adjusted to meet different processing requirements, thereby achieving the purpose of expanding its application range.

[0033] The following is a detailed explanation with the help of diagrams.

Brief Description of the Drawings

[0034] Figure 1 It is a schematic diagram of processing different planes of a composite material using two wavelengths of laser light in the prior art;

[0035] Figure 2 It is a schematic diagram of processing different planes of composite materials using three wavelengths of laser light in the prior art;

[0036] Figure 3 is a block diagram of a first embodiment of the present invention;

[0037] Figure 4is a schematic diagram of the architecture of the first embodiment of the present invention;

[0038] Figure 5 is a block diagram of a second embodiment of the present invention;

[0039] Figure 6 is a schematic diagram of the architecture of a second embodiment of the present invention;

[0040] Figure 7 is another schematic plan view of the beam modulating lens assembly in the second embodiment of the present invention;

[0041] Figure 8 is another schematic diagram of the architecture of the second embodiment of the present invention;

[0042] Fig. 9 This is a schematic reference diagram of the combination of the first nonlinear crystal beam waist and the second nonlinear crystal beam waist size in the second embodiment of the present invention;

[0043] Fig.10 is a reference schematic diagram of using beam control to change the ratio of two laser lights with different wavelengths in the second embodiment of the present invention;

[0044] Fig.11 is a block diagram of a third embodiment of the present invention;

[0045] Fig.12 is a schematic diagram of the architecture of a third embodiment of the present invention;

[0046] Fig.13 It is another schematic diagram of the structure of the third embodiment of the present invention.

[0047] Figure numerals: 1. long wavelength laser light source; 11. long wavelength laser light; 12. short wavelength laser light; 13. shorter wavelength laser light; 2. frequency conversion module; 21. beam modulation lens group; 211. input lens; 212. output lens; 221. first laser frequency conversion element; 222. second laser frequency conversion element; 3. focusing optical element; 4. composite material; 41. first focusing point; 42. second focusing point; 43. third focusing point; 51. first optical element; 52. second optical element; 53. third optical element. [Specific implementation method]

[0048] The present invention will be further described in detail below in conjunction with the accompanying drawings, but this is not intended to limit the present invention.

[0049] like Figure 3-4 FIG. 1 is a first embodiment of the present invention. The present invention provides a beam combining device for automatically calibrating and modulating the power of laser beams of different wavelengths, comprising:

[0050] A long wavelength laser light source 1, used to generate a long wavelength laser light 11;

[0051] A frequency conversion module 2 includes at least one laser frequency conversion element, such as at least one first laser frequency conversion element 221 (eg Figure 4 ) is used to convert the long wavelength laser light 11 into at least two laser lights of different wavelengths on a common optical axis path, such as at least one long wavelength laser light 11 and at least one short wavelength laser light 12 (such as Figure 3 shown);

[0052] A focusing optical element 3 is used to focus the at least two laser lights 11 and 12 of different wavelengths on at least two focal points, such as a first focal point 41 and a second focal point 42, on different planes of a composite material 4, respectively, so as to simultaneously perform laser processing on at least two focal points, such as the first focal point 41 and the second focal point 42, on different planes of the composite material 4.

[0053] Furthermore, by changing the focal length of the focusing optical element 3, the focusing depth on the composite material 4 to be laser processed can be changed. That is to say, if it is desired to focus laser lights of different wavelengths, such as at least one long wavelength laser light 11 and at least one short wavelength laser light 12, on at least two focal points on different planes of the composite material 4, such as the first focal point 41 and the second focal point 42, the focusing depth can be changed by simply changing the focal length of the focusing optical element 3.

[0054] In the aforementioned first embodiment Figure 4 At least one converted laser frequency element of the frequency modulation module 2 is a first converted laser frequency element 221, and the first converted laser frequency element 221 can be a nonlinear crystal, a periodically poled crystal, a periodically poled lithium niobate crystal (PPLN), or other equivalent elements.

[0055] like Figure 5 FIG. 2 is a second embodiment of the present invention. The present invention provides a beam combining device for automatically calibrating and modulating the optical power of lasers of different wavelengths, comprising:

[0056] A long wavelength laser light source 1, used to generate a long wavelength laser light 11;

[0057] A frequency conversion module 2 includes a beam modulating lens set 21 and at least one laser frequency conversion element, such as a first laser frequency conversion element 221 (eg, Figure 6 ) and a second conversion laser frequency element 222 (as shown Figure 6The beam modulating lens group 21 is used to change the beam size of the long wavelength laser light 11 in the frequency conversion module 2, and change the ratio of the power of the long wavelength laser light 11 to the laser power after frequency conversion, and the at least one laser frequency conversion element, such as a first laser frequency conversion element 221 and a second laser frequency conversion element 222, is used to convert the long wavelength laser light 11 after the beam size is adjusted into at least two laser lights of different wavelengths on an optical axis path, such as a long wavelength laser light 11 and a short wavelength laser light 12;

[0058] A focusing optical element 3 is used to focus the at least two laser lights of different wavelengths, such as a long wavelength laser light 11 and a short wavelength laser light 12, respectively, on at least two focal points, such as a first focal point 41 and a second focal point 42, on different planes of a composite material 4, so as to simultaneously perform laser processing on the at least two focal points, such as the first focal point 41 and the second focal point 42, on different planes of the composite material 4. By changing the focal length of the focusing optical element 3, the focusing depth on the composite material 4 to be laser processed can be changed. That is to say, if the focusing depth of the laser lights of different wavelengths, such as the at least one long wavelength laser light 11 and the at least one short wavelength laser light 12, at the at least two focal points, such as the first focal point 41 and the second focal point 42, on different planes of the composite material 4 is to be changed, it is only necessary to change the focal length of the focusing optical element 3.

[0059] Another example Figure 6 As shown, the beam modulating lens group 21 in the frequency conversion module 2 is a beam reducer, or the beam modulating lens group 21 can also be composed of several lenses, for example, including at least one input lens 211 (such as Figure 7 As shown) and an output lens 212, and the diameter of the input lens is larger than the diameter of the output lens.

[0060] The frequency conversion module 2 further includes at least one optical element. Through the at least one optical element, for example, a first optical element 51 (such as Figure 8 As shown in the figure, the adjustment of a second optical element 52 and a third optical element 53 is used to change the laser beam size in the at least one conversion laser frequency element, such as a first conversion laser frequency element 221 and a second conversion laser frequency element 222.

[0061] Please refer to Figure 6As shown, the first optical element 51 can be a first lens, the second optical element 52 can be a second lens, and the third optical element 53 can be a third lens. The first lens is disposed between the beam control group 21 and the first conversion laser frequency element 221, and the second lens and the third lens are spaced apart from each other and located between the first conversion laser frequency element 221 and the second conversion laser frequency element 222.

[0062] In addition, the first lens is a first convex lens, the second lens is a second convex lens, and the third lens is a third convex lens. Figure 8 As shown, the second optical element 52 can be changed into a first plano-concave lens, and the third optical element 53 can be changed into a second plano-concave lens, and the first plano-concave lens and the second plano-concave lens are arranged in opposite directions to each other.

[0063] Furthermore, the first conversion laser frequency element 221 and the second conversion laser frequency element 222 of the frequency conversion module 2 are nonlinear crystals, periodically poled crystals, periodically poled lithium niobate crystals (PPLN) or other equivalent elements. Fig. 9 The figure shows a schematic reference chart of the size combination of the first nonlinear crystal beam waist and the second nonlinear crystal beam waist in the aforementioned second embodiment, for example, the first nonlinear crystal is 87 microns (um), and the second nonlinear crystal is 70 microns (um); the first nonlinear crystal is 50 microns (um), and the second nonlinear crystal is 40 microns (um); the first nonlinear crystal is 40 microns (um), and the second nonlinear crystal is 32 microns (um), as shown in FIG. Fig.10 The figure is a reference diagram showing how to change the ratio of two laser lights with different wavelengths (long wavelength laser light 11 and short wavelength laser light 12) by using beam control.

[0064] like Fig.11 FIG. 3 is a third embodiment of the present invention. The difference from the second embodiment is that in the third embodiment, the long wavelength laser light (far infrared laser light) 11 after adjusting the beam size is converted into at least two laser lights of different wavelengths on a common optical axis path after passing through the first conversion laser frequency element 221, such as a long wavelength laser light (far infrared laser light) 11 and a short wavelength laser light (part of the far infrared laser light is converted into the range of visible laser light) 12, and then converted into at least three laser lights of different wavelengths on an optical axis path after passing through the second conversion laser frequency element 222, such as a long wavelength laser light (far infrared laser light) 11, a short wavelength laser light (visible laser light) 12 and a shorter wavelength laser light (part of the far infrared laser light and part of the visible laser light is converted into ultraviolet laser light) 13, as shown in FIG. Fig.11The third embodiment of the present invention is a beam combining device for automatically calibrating and modulating the power of laser beams of different wavelengths, comprising:

[0065] A long wavelength laser light source 1, used to generate a long wavelength laser light 11;

[0066] A frequency conversion module 2, comprising a beam modulating mirror set 21 and at least one laser frequency conversion element, such as a first laser frequency conversion element 221 and a second laser frequency conversion element 222, wherein the beam modulating mirror set 21 is used to change the beam size of the long-wavelength laser light 11 in the frequency conversion module 2, and change the ratio between the long-wavelength laser light power and the laser power after frequency conversion, and the first laser frequency conversion element 221 is used to convert the long-wavelength laser light 11 after the beam size is adjusted into at least two laser lights of different wavelengths on a common optical axis path, such as a long-wavelength laser light 11, a short-wavelength laser light 12, and an even shorter-wavelength laser light 13;

[0067] A focusing optical element 3 is used to focus the at least two laser lights of different wavelengths, such as a long-wavelength laser light 11, a short-wavelength laser light 12, and a shorter-wavelength laser light 13, respectively, on at least three focal points, such as a first focal point 41, a second focal point 42, and a third focal point 43, on different planes of a composite material 4, so as to simultaneously perform laser processing on the three focal points, such as the first focal point 41, the second focal point 42, and the third focal point 43, on different planes of the composite material 4. By changing the focal length of the focusing optical element 3, the focusing depth on the composite material 4 to be laser processed can be changed. That is to say, if the focusing depths of the laser lights of different wavelengths, such as the long-wavelength laser light 11, the short-wavelength laser light 12, and the shorter-wavelength laser light 13, on at least three focal points, such as the first focal point 41, the second focal point 42, and the third focal point 43, on different planes of the composite material 4 are to be changed, it is only necessary to change the focal length of the focusing optical element 3.

[0068] The frequency conversion module 2 further includes at least one optical element, through which the at least one optical element, such as a first optical element 51, a second optical element 52 and a third optical element 53, is adjusted to change the laser beam size in the at least one laser frequency conversion element, such as a first laser frequency conversion element 221 and a second laser frequency conversion element 222.

[0069] like Fig.12As shown, the first optical element 51 may be a first lens, the second optical element 52 may be a second lens, and the third optical element 53 may be a third lens. The first optical element 51 (first lens) is disposed between the beam control group 21 and the first converted laser frequency element 221, and the second optical element 52 (second lens) and the third optical element 53 (third lens) are spaced apart from each other and are located between the first converted laser frequency element 221 and the second converted laser frequency element 222.

[0070] In addition, if Fig.12 As shown, the first optical element 51 (first lens) is a first convex lens, the second optical element 52 (second lens) is a second convex lens, the third optical element 53 (third lens) is a third convex lens, and as shown Fig.13 As shown, the second optical element 52 can be changed into a first plano-concave lens, and the third optical element 53 can be changed into a second plano-concave lens, and the second optical element 52 (first plano-concave lens) and the third optical element 53 (second plano-concave lens) are arranged in opposite directions to each other.

[0071] It is worth noting that the above is only a preferred embodiment of the present invention, and does not limit the scope of patent protection of the present invention. The present invention can also improve the materials and structures of the above-mentioned various parts, or replace them with technical equivalents. Therefore, all equivalent structural changes made by using the description and illustrations of the present invention, or directly or indirectly applied to other related technical fields are also included in the scope of the present invention.

Claims

1. A beam combining device for automatically calibrating and modulating the power of laser beams of different wavelengths, characterized in that: include: A long wavelength laser light source (1) for generating a long wavelength laser light (11); A frequency conversion module (2) comprising at least one laser frequency conversion element for converting the long-wavelength laser light (11) into a long-wavelength laser light (11) and at least one short-wavelength laser light (12) on a common optical axis path; A focusing optical element (3) is used to focus the long-wavelength laser light (11) and at least one short-wavelength laser light (12) on a first focus (41) and at least one second focus (42) on different planes of a composite material (4), respectively, so as to simultaneously perform laser processing on the first focus (41) and at least one second focus (42) on different planes of the composite material (4), and by changing the focal length of the focusing optical element (3), the focusing depth of the long-wavelength laser light (11) and at least one short-wavelength laser light (12) focused on the first focus (41) and at least one second focus (42) on different planes of the composite material (4) can be relatively changed.

2. The beam combining device for automatically calibrating and modulating the power of laser beams of different wavelengths as claimed in claim 1, characterized in that: The laser frequency conversion element of the frequency conversion module (2) is a nonlinear crystal, a periodically poled crystal or a periodically poled lithium niobate crystal.

3. A beam combining device for automatically calibrating and modulating the power of laser beams of different wavelengths, characterized in that: include: A long wavelength laser light source (1) for generating a long wavelength laser light (11); A frequency conversion module (2) comprising a beam modulating mirror group (21) and at least one laser frequency conversion element, wherein the beam modulating mirror group (21) is used to change the beam size of the long-wavelength laser light (11) in the frequency conversion module (2) and change the ratio between the long-wavelength laser light power and the laser power after frequency conversion, and the at least one laser frequency conversion element is used to convert the long-wavelength laser light (11) after the beam size is adjusted into a long-wavelength laser light (11) and at least one short-wavelength laser light (12) on a common optical axis path; A focusing optical element (3) is used to focus the long-wavelength laser light (11) and at least one short-wavelength laser light (12) on a first focus point (41) and at least one second focus point (42) on different planes of a composite material (4), respectively, so as to simultaneously perform laser processing on the first focus point (41) and at least one second focus point (42) on different planes of the composite material (4), and by changing the focal length of the focusing optical element (3), the focusing depth of the long-wavelength laser light (11) and at least one short-wavelength laser light (12) focused on the first focus point (41) and at least one second focus point (42) on different planes of the composite material (4) can be relatively changed.

4. The beam combining device for automatically calibrating and modulating the power of laser beams of different wavelengths as claimed in claim 3, characterized in that: The frequency conversion module (2) also includes at least one optical element, which is used to change the size of the laser beam in the at least one laser frequency conversion element through adjustment of the at least one optical element.

5. The beam combining device for automatically calibrating and modulating the power of laser beams of different wavelengths as claimed in claim 4, characterized in that: The at least one laser frequency conversion element is a first laser frequency conversion element (221) and a second laser frequency conversion element (222), and the at least one optical element is a first optical element (51), a second optical element (52) and a third optical element (53), the first optical element (51) is a first lens, the second optical element (52) is a second lens, and the third optical element (53) is a third lens. The first optical element (51) is arranged between the beam modulation lens group (21) and the first laser frequency conversion element (221), and the second optical element (52) and the third optical element (53) are arranged at intervals from each other and are located between the first laser frequency conversion element (221) and the second laser frequency conversion element (222).

6. The beam combining device for automatically calibrating and modulating the power of laser beams of different wavelengths as claimed in claim 5, characterized in that: The first optical element (51) is a first convex lens, the second optical element (52) is a second convex lens, and the third optical element (53) is a third convex lens.

7. The beam combining device for automatically calibrating and modulating the power of laser beams of different wavelengths as claimed in claim 6, characterized in that: The second optical element (52) is a first plano-concave lens, and the third optical element (53) is a second plano-concave lens, and the second optical element (52) and the third optical element (53) are arranged in opposite directions to each other.

8. The beam combining device for automatically calibrating and modulating the power of laser beams of different wavelengths as claimed in claim 3, characterized in that: The beam modulation lens group (21) comprises at least an input lens (211) and an output lens (212), and the diameter of the input lens (211) is greater than the diameter of the output lens (212).

9. The beam combining device for automatically calibrating and modulating the power of laser beams of different wavelengths as claimed in claim 3, characterized in that: The light beam modulating mirror group (21) is a beam reducing mirror.

10. The beam combining device for automatically calibrating and modulating the power of laser beams of different wavelengths as claimed in claim 3, characterized in that: The at least one laser frequency conversion element is at least one nonlinear crystal or at least one periodically poled crystal or at least one periodically poled lithium niobate crystal.

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